With Optical, Piezoelectric Or Acoustic Coupling Means Patents (Class 331/155)
  • Patent number: 9252706
    Abstract: A SAW device includes a SAW chip formed of a piezoelectric substrate and an IDT formed thereon, a base substrate that supports the SAW chip, and a fixing member that fixes the SAW chip to the base substrate. The SAW chip that forms a cantilever is supported by the base substrate via the fixing member in a position where the IDT does not overlap with the fixing member in a plan view of the SAW chip. The length W of the SAW chip in a y-axis direction and the length D of the fixing member in the y-axis direction satisfy 1<D/W?1.6. The fixing member bonds the lower surface and side surfaces of the fixed end of the SAW chip to the base substrate.
    Type: Grant
    Filed: May 30, 2014
    Date of Patent: February 2, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Kunihito Yamanaka, Naohisa Obata
  • Patent number: 9024697
    Abstract: The invention relates to a method for operating control equipment (1) of a resonance circuit (2), wherein the control equipment (1) comprises at least two circuit elements (8, 9) connected in series, in particular each comprising a recovery diode (13, 14) connected in parallel, between which a connection (6) of the resonance circuit (2) is connected. According to the invention, the circuit elements (8, 9) are actuated as a function of the voltage detected at the connection (6). The invention further relates to control equipment (1) of a resonance circuit (2).
    Type: Grant
    Filed: June 15, 2011
    Date of Patent: May 5, 2015
    Assignee: Robert Bosch GmbH
    Inventor: Jochen Kuehner
  • Patent number: 8907733
    Abstract: A second piezoelectric vibrator (30) is located in a hollow portion (21) of the first piezoelectric vibrator (20) when seen in a plan view. A support (40) is a frame-shaped member, and the inside surface thereof supports the edge of a vibration member (10). The fundamental resonance frequency of the first piezoelectric vibrator (20) is lower than the fundamental resonance frequency of the second piezoelectric vibrator (30). In addition, the second piezoelectric vibrator (30) overlaps a loop of vibration generated in the vibration member (10) when the first piezoelectric vibrator (20) is driven at the fundamental resonance frequency. Preferably, the center of the second piezoelectric vibrator (30) overlaps the center of a loop of vibration generated in the vibration member (10) by the first piezoelectric vibrator (20).
    Type: Grant
    Filed: July 7, 2011
    Date of Patent: December 9, 2014
    Assignee: NEC Corporation
    Inventors: Yasuharu Onishi, Jun Kuroda, Motoyoshi Komoda, Shigeo Satou, Yukio Murata, Yuichiro Kishinami, Nobuhiro Kawashima
  • Patent number: 8884712
    Abstract: There are disposed a sealing member, a pair of electrode pads to electrically couple a piezoelectric resonator, a plurality of connection pads to electrically couple an integrated circuit element and the piezoelectric resonator, and wiring patterns to establish electrical continuity between the pair of electrode pads and the plurality of connection pads, and the piezoelectric resonator and the integrated circuit element are disposed side by side in plan view. An output wiring pattern establishes electrical continuity between one of the connection pads and an alternating current output terminal of an oscillation circuit, and a power source wiring pattern establishs electrical continuity between one of the connection pads and a direct current power source terminal of the oscillation circuit. The electrode pads are disposed closer to the power source wiring pattern than the output wiring pattern.
    Type: Grant
    Filed: June 10, 2011
    Date of Patent: November 11, 2014
    Assignee: Daishinku Corporation
    Inventors: Takuya Kojo, Kenji Moriguchi, Ryuji Matsuo, Tetsuya Hanaki
  • Patent number: 8878619
    Abstract: A variable phase amplifier circuit is disclosed and its method of use in tuning devices having resonators. The variable phase amplifier receives an input differential signal pair. The input differential signal pair can be generated by a resonator device. The variable phase amplifier generates a modified differential signal pair in response to receiving the input differential signal pair. The variable phase amplifier provides a means to vary the phase of the modified differential signal pair with respect to the input differential signal pair, in an accurate and stable manner. If the modified differential signal pair with a phase shift introduced in it is fed back to the resonator device, the resonator will change its frequency of oscillation, where the new frequency of oscillation is a function of the phase of the modified differential signal pair.
    Type: Grant
    Filed: December 19, 2012
    Date of Patent: November 4, 2014
    Assignee: Sand 9, Inc.
    Inventors: Dean A. Badillo, Klaus Juergen Schoepf, Reimund Rebel
  • Publication number: 20140266484
    Abstract: Embodiments relate to MEMS resonator structures and methods that enable application of a maximum available on-chip voltage. In an embodiment, a MEMS resonator comprises a connection between a ground potential and the gap electrode of the resonator. Embodiments also relate to manufacturing systems and methods that are less complex and enable production of MEMS resonators of reduced dimensions.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 18, 2014
    Applicant: Infineon Technologies Dresden GmbH
    Inventors: Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann, Thomas Santa, Markus Burian
  • Patent number: 8803625
    Abstract: It is possible to reduce the size of a surface acoustic wave (SAW) resonator by enhancing a Q value. In a SAW resonator in which an IDT having electrode fingers for exciting SAW is disposed on a crystal substrate, the IDT includes a first region disposed at the center of the IDT and a second region and a third region disposed on both sides of the first region. A frequency is fixed in the first region and a portion in which a frequency gradually decreases as it approaches an edge of the IDT is disposed in the second region and the third region. When the frequency of the first region is Fa, the frequency at an edge of the second region is FbM, and the frequency at an edge of the third region is FcN, the variations in frequency are in the ranges of 0.9815<FbM/Fa<0.9953 and 0.9815<FcN/Fa<0.9953, respectively.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: August 12, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Kunihito Yamanaka
  • Patent number: 8797109
    Abstract: An ultrasound system for the generation of low-frequency high-power ultrasound includes a resonator for transmitting the ultrasound to a medium. To safely handle the ultrasound system, the ultrasound system has a light source illuminating a workspace of the ultrasound system.
    Type: Grant
    Filed: October 4, 2012
    Date of Patent: August 5, 2014
    Assignee: Dr. Hielscher GmbH
    Inventors: Harld Hielscher, Thomas Hielscher, Holger Hielscher
  • Publication number: 20140197898
    Abstract: A highly sensitive micro-piezoelectric tunable resonator element and device that uses a tapered transition region from the actuator and sensor elements to the resonator beam to permit maximum mechanical energy transfer to the beam. A dual-resonator beam embodiment with a shared tuning element is provided in an alternative embodiment.
    Type: Application
    Filed: January 17, 2013
    Publication date: July 17, 2014
    Inventors: Ying Hsu, Mike Tracy, Brian Bircumshaw, Ning Chen, Salah Uddin
  • Patent number: 8776364
    Abstract: A multilayer ceramic component includes a stack containing ceramic layers and electrode layers interspersed among the ceramic layers. The electrode layers contain copper and define first and second internal electrodes. First and second external contacts are on different sides of the stack. The first and second external contacts contain copper and are substantially perpendicular to the ceramic layers and electrode layers. The first internal electrode is connected to the first external contact and the second internal electrode is connected to the second external contact. The first and second internal electrodes overlap each other at a plane intersecting the stack. In areas adjacent to boundaries between the first and second external contacts and the ceramic layers, the first and second external contacts are not oxidized and material making-up the ceramic layers is not diminished. A bonding strength of the external contacts to the stack exceeds 50 N.
    Type: Grant
    Filed: March 31, 2009
    Date of Patent: July 15, 2014
    Assignee: EPCOS AG
    Inventors: Heinz Florian, Marion Ottlinger, Peter Sedlmaier
  • Patent number: 8779866
    Abstract: The present invention relates to an oscillator. The oscillator includes a resonator unit configured to resonate terahertz waves generated by an active layer using intersubband transitions of a carrier. The oscillator further includes a strain generating unit configured to generate strain of the active layer. Still furthermore, the oscillator includes a control unit configured to control the strain generating unit in accordance with the oscillation characteristic (the frequency or the output) of the terahertz waves resonated by the resonator unit.
    Type: Grant
    Filed: December 10, 2010
    Date of Patent: July 15, 2014
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yasushi Koyama
  • Patent number: 8773214
    Abstract: A SAW device includes a SAW chip formed of a piezoelectric substrate and an IDT formed thereon, a base substrate that supports the SAW chip, and a fixing member that fixes the SAW chip to the base substrate. The SAW chip that forms a cantilever is supported by the base substrate via the fixing member in a position where the IDT does not overlap with the fixing member in a plan view of the SAW chip. The length W of the SAW chip in a y-axis direction and the length D of the fixing member in the y-axis direction satisfy 1<D/W?1.6. The fixing member bonds the lower surface and side surfaces of the fixed end of the SAW chip to the base substrate.
    Type: Grant
    Filed: July 25, 2012
    Date of Patent: July 8, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Kunihito Yamanaka, Naohisa Obata
  • Patent number: 8760231
    Abstract: A piezoelectric device includes an integrated circuit (IC) chip and a piezoelectric resonator element, a part of the piezoelectric resonator element being disposed so as to overlap with a part of the IC chip when viewed in plan. The IC chip includes: an inner pad disposed on an active face and in an area where is overlapped with the piezoelectric resonator when viewed in plan; an insulating layer formed on the active face; a relocation pad disposed on the insulating layer and in an area other than a part where is overlapped with the piezoelectric resonator element, the relocation pad being coupled to an end part of a first wire; and a second wire electrically coupling the inner pad and the relocation pad, the second wire having a relocation wire and a connector that penetrates the insulating layer, the relocation wire being disposed between the insulating layer and the active face.
    Type: Grant
    Filed: March 16, 2009
    Date of Patent: June 24, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Kazuhiko Shimodaira
  • Patent number: 8749315
    Abstract: A MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system, in one embodiment, includes a MEMS resonator, electrodes, and at least one resonator electrode shield. In certain embodiments, the resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.
    Type: Grant
    Filed: July 30, 2012
    Date of Patent: June 10, 2014
    Assignee: SiTime Corporation
    Inventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
  • Patent number: 8742854
    Abstract: A periodic signal generator is configured to generate high frequency signals characterized by relatively low temperature coefficients of frequency (TCF). A microelectromechanical resonator, such as concave bulk acoustic resonator (CBAR) supporting capacitive and piezoelectric transduction, may be geometrically engineered as a signal generator that produces two periodic signals having unequal resonant frequencies with unequal temperature coefficients. Circuitry is also provided for combining the two periodic signals using a mixer to thereby yield a high frequency low-TCF periodic difference signal at an output of the periodic signal generator.
    Type: Grant
    Filed: July 19, 2011
    Date of Patent: June 3, 2014
    Assignee: Integrated Device Technology Inc.
    Inventors: Seungbae Lee, Harmeet Bhugra, Ashwin Samarao
  • Patent number: 8742861
    Abstract: It is possible to reduce the size of a surface acoustic wave resonator by enhancing the Q value. In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, a line occupying ratio is defined as a value obtained by dividing the width of one electrode finger by the distance between the center lines of the gaps between one electrode finger and the electrode fingers adjacent to both sides thereof, and the IDT includes a region formed by gradually changing the line occupying ratio from the center to both edges so that the frequency gradually becomes lower from the center to both edges than the frequency at the center of the IDT.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: June 3, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Kunihito Yamanaka
  • Publication number: 20140118079
    Abstract: A resonator element includes a base portion which includes one end portion and the other end portion opposing the one end portion in a plan view, and a pair of vibrating arms which extend along a first direction from the one end portion of the base portion. The base portion includes a reduced width portion in which a width is gradually decreased along a second direction intersecting the first direction toward a direction side which is separated from the base portion along the first direction, in at least one of the one end portion and the other end portion, and a fixing portion is provided between the one end portion and the other end portion of the base portion.
    Type: Application
    Filed: October 24, 2013
    Publication date: May 1, 2014
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Akinori YAMADA, Osamu IWAMOTO
  • Publication number: 20140078870
    Abstract: A piezoelectric vibrating piece, a piezoelectric vibrator, an oscillator, an electronic apparatus and a radio timepiece capable of reducing the size while suppressing reduction of rigidity and having excellent vibration characteristics. The piezoelectric vibrating piece includes a pair of vibrating arm portions in parallel to each other, a base portion integrally fixing base end portions of the pair of vibrating arm portions in a length direction, groove portions on main surfaces of the pair of vibrating arm portions and extending along the length direction, where each of the groove portions includes a first groove portion near a tip portion end of the vibrating arm portions and a second groove portion near the base end portion side of the vibrating arm portions with respect to the first groove portion, and the second groove portion is offset in a ?X axis direction with respect to the first groove portion.
    Type: Application
    Filed: September 12, 2013
    Publication date: March 20, 2014
    Applicant: SII Crystal Technology Inc.
    Inventor: Takashi KOBAYASHI
  • Publication number: 20140002201
    Abstract: A capacitively-driven Micro-Electro-Mechanical System (MEMS) resonator is provided, in which a piezoresistively differential measurement is used to enable the MEMS resonator to transfer a signal. The MEMS resonator uses a Complementary Metal-Oxide-Semiconductor (CMOS) manufacturing process to make its oscillator and piezoresistor to achieve electrical insulation, thereby lowering the level of feedthrough signal.
    Type: Application
    Filed: September 14, 2012
    Publication date: January 2, 2014
    Applicant: NATIONAL TSING HUA UNIVERSITY
    Inventors: Sheng-Shian LI, Cheng-Syun LI
  • Publication number: 20130328637
    Abstract: A resonator element includes a substrate including a vibrating portion that performs thickness-shear vibration and an excitation electrode provided on top and bottom main surfaces of the vibrating portion. Assuming that the average plate thickness calculated from the plate thicknesses of a plurality of regions of the vibrating portion is H and the plate thickness difference, which is a difference between the maximum and minimum values of the plate thicknesses of the plurality of regions of the vibrating portion, is ?H, 0%<?H/H?0.085% is satisfied as a relationship between H and ?H.
    Type: Application
    Filed: June 5, 2013
    Publication date: December 12, 2013
    Inventor: Osamu Ishii
  • Patent number: 8606376
    Abstract: A method of actuating a system comprising a movable component and an actuator configured to move the movable component comprises providing a control signal representative of a desired motion of the movable component. The control signal is supplied to one or more resonators. Each of the one or more resonators has a mode of oscillation representative of at least one elastic mode of oscillation of the system. The control signal is modified by subtracting from the control signal a signal representative of a response of the one or more resonators to the control signal. The actuator is operated in accordance with the modified control signal. Thus, undesirable elastic oscillations of the system which might occur if the system were operated with the original control system can be reduced.
    Type: Grant
    Filed: October 7, 2009
    Date of Patent: December 10, 2013
    Assignees: Mitutoyo Corporation, Bundesrepublik Deutschland, Endvertreten Durch den Präsidenten der Physikalisch-Technischen Bundesanstalt
    Inventors: Hartmut Illers, Kazuhiko Hidaka, Akinori Saito, Hans-Ulrich Danzebrink
  • Patent number: 8593230
    Abstract: MEMS oscillators, which include a silicon-type, in particular piezoresistive resonators, can be used to provide a fixed, stable output frequency. Silicon has a natural temperature dependence of Young's modulus, therefore, as ambient temperature changes and/or the piezoresistive resonator is powered, the resonator temperature changes, and the resonance frequency of the resonator drifts. In order to account for the temperature drift of the piezoresistive resonator, the piezoresistive resonator itself is used as a temperature sensor. The relative resistance change of the piezoresistive resonator depends only on the relative temperature change and material property of the resonator. Therefore, an accurate temperature can be sensed directly on the piezoresistive resonator. The temperature drift information is provided to a frequency adjuster, which corrects the output frequency of the circuit.
    Type: Grant
    Filed: October 14, 2011
    Date of Patent: November 26, 2013
    Assignee: NXP, B.V.
    Inventors: Kim Le Phan, Jozef Thomas Martinus van Beek
  • Publication number: 20130307633
    Abstract: An oscillation device (electro-acoustic transducer (100)) includes an oscillation element (110) that has a vibrating member (120) and a piezoelectric element (111) that is attached to one surface of the vibrating member (120). The oscillation device includes a sheet-shaped waterproof member (140) that is constituted by a waterproof material. The oscillation device includes a frame-shaped supporting member (130) that holds an outer peripheral portion of the vibrating member (120) and an outer peripheral portion of the waterproof member (140) so that the waterproof member (140) and the oscillation element (110) face each other. The oscillation device includes a connection member (150) that partially connects mutual opposed surfaces of the oscillation element (110) and the waterproof member (140).
    Type: Application
    Filed: November 25, 2011
    Publication date: November 21, 2013
    Applicant: NEC CASIO MOBILE COMMUNICATIONS, LTD.
    Inventors: Yasuharu Onishi, Yuichiro Kishinami, Jun Kuroda, Yukio Murata, Shigeo Satou, Motoyoshi Komoda, Nobuhiro Kawashima, Tatsuya Uchikawa
  • Publication number: 20130257551
    Abstract: In an electro-acoustic transducer 100 which is an oscillator device, a flat piezoelectric film 120 that moves expansively and contractively through the application of an electric field is disposed on at least one surface of a flat elastic member 110 in which a plurality of holes 111 penetrate a principal surface thereof. Since the stiffness of the elastic member 110 is adjusted by the holes 111, the stiffness impedance with respect to the piezoelectric film 120 can be matched optimally. Thus, it is possible to suppress the amount of vibration displacement and to complement the conversion efficiency of the piezoelectric film 120.
    Type: Application
    Filed: November 24, 2011
    Publication date: October 3, 2013
    Inventors: Yasuharu Onishi, Jun Kuroda, Yuichiro Kishinami, Yukio Murata, Shigeo Satou, Nobuhiro Kawashima, Motoyoshi Komoda, Tatsuya Uchikawa
  • Publication number: 20130257552
    Abstract: Each of piezoelectric vibrators 110 includes an elastic member 112 and a piezoelectric element 111. The piezoelectric element 111 is attached to the elastic member 112. A supporting member 120 has an opening. A plurality of the piezoelectric vibrators 110 are arranged in the opening along a first direction. It is preferable that the plurality of piezoelectric vibrators 110 have the same fundamental resonance frequency. In addition, it is preferable that an arrangement pitch of the piezoelectric vibrators 110 is equal to or less than half the wavelength of the fundamental resonance frequency.
    Type: Application
    Filed: November 24, 2011
    Publication date: October 3, 2013
    Inventors: Yasuharu Onishi, Jun Kuroda, Yuichiro Kishinami, Shigeo Satou, Yukio Murata, Motoyoshi Komoda, Nobuhiro Kawashima, Tatsuya Uchikawa
  • Patent number: 8542052
    Abstract: An electrical circuit for emulating a capacitance, comprises a physical capacitor which is charged by charge flow from the input of the electrical circuit. An amplifier amplifies the voltage at the input of the electrical circuit such that the physical capacitor is charged with a larger change in voltage than the change in voltage at the input. This implements an effective multiplication of capacitance. A reset system resets the physical capacitor without drawing charge from the input of the electrical circuit. This extends the voltages which can be provided to the input.
    Type: Grant
    Filed: November 2, 2011
    Date of Patent: September 24, 2013
    Assignee: NXP B.V.
    Inventor: Hans Halberstadt
  • Patent number: 8508099
    Abstract: A package and method for manufacturing the package using a rivet having a head portion and a core portion protruding from a rear surface of the head portion. The package includes a plurality of substrates bonded to each other and a cavity that houses an object in a sealed state. The core portion is disposed in a through hole in a base substrate and electrically connects the object with the outside. The core portion is inserted into the through hole and a glass frit is formed between the through hole and the core portion and seals the rivet in the through hole. A gas relief passage is formed leading from a base end of the core portion to a surface of the head portion.
    Type: Grant
    Filed: August 5, 2011
    Date of Patent: August 13, 2013
    Assignee: Seiko Instruments Inc.
    Inventor: Kazuyoshi Sugama
  • Publication number: 20130162362
    Abstract: A surface mount piezoelectric oscillator includes a piezoelectric resonator with a container main body, a plurality of external terminals, a mounting board with an IC chip, a plurality of connecting terminals, and a solder ball. The solder ball bonds the plurality of external terminals and the plurality of connecting terminals by melting and hardening. The solder bonding portion has approximately a circular shape with approximately a same size as a size of the connecting terminal of the mounting board. The solder ball placed on the connecting terminal of the mounting board is melted, self-aligned, and hardened so as to form a solder fillet of nearly axial symmetry. The solder fillet bridges between the both electrodes and bonds the connecting terminal of the mounting board and the solder bonding portion of the external terminal of the piezoelectric resonator.
    Type: Application
    Filed: December 23, 2012
    Publication date: June 27, 2013
    Applicant: NIHON DEMPA KOGYO CO., LTD.
    Inventor: NIHON DEMPA KOGYO CO., LTD.
  • Patent number: 8471643
    Abstract: Electromechanical systems resonator structures, devices, circuits, and systems are disclosed. In one aspect, an oscillator includes an active component and a passive component connected in a feedback configuration. The passive component includes one or more contour mode resonators (CMR). A CMR includes a piezoelectric layer disposed between a first conductive layer and a second conductive layer. The conductive layers include an input electrode and an output electrode. The passive component is configured to output a first resonant frequency and a second resonant frequency, which is an odd integer harmonic of the first resonant frequency. The active component is configured to output a signal including the first resonant frequency and the second resonant frequency. This output signal can be a substantially square wave signal, which can serve as a clock in various applications.
    Type: Grant
    Filed: May 13, 2011
    Date of Patent: June 25, 2013
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Jonghae Kim, Je-Hsiung Lan, Changhan Yun, Chi Shun Lo, Matthew Nowak
  • Patent number: 8461936
    Abstract: A piezoresistive MEMS oscillator comprises a resonator body, first and second drive electrodes located adjacent the resonator body for providing an actuation signal; and at least a first sense electrode connected to a respective anchor point. The voltages at the electrodes are controlled and/or processed such that the feedthrough AC current from one drive electrode to the sense electrode is at least partially offset by the feedthrough AC current from the other drive electrode to the sense electrode.
    Type: Grant
    Filed: August 4, 2011
    Date of Patent: June 11, 2013
    Assignee: NXP B.V.
    Inventors: Petrus Antonius Thomas Marinus Vermeeren, Kim Phan Le
  • Publication number: 20130127554
    Abstract: It is possible to reduce the size of a surface acoustic wave (SAW) resonator by enhancing a Q value. In a SAW resonator in which an IDT having electrode fingers for exciting SAW is disposed on a crystal substrate, the IDT includes a first region disposed at the center of the IDT and a second region and a third region disposed on both sides of the first region. A frequency is fixed in the first region and a portion in which a frequency gradually decreases as it approaches an edge of the IDT is disposed in the second region and the third region. When the frequency of the first region is Fa, the frequency at an edge of the second region is FbM, and the frequency at an edge of the third region is FcN, the variations in frequency are in the ranges of 0.9815<FbM/Fa<0.9953 and 0.9815<FcN/Fa<0.9953, respectively.
    Type: Application
    Filed: December 21, 2012
    Publication date: May 23, 2013
    Applicant: SEIKO EPSON CORPORATION
    Inventor: SEIKO EPSON CORPORATION
  • Publication number: 20130093528
    Abstract: The invention relates to a method for operating control equipment (1) of a resonance circuit (2), wherein the control equipment (1) comprises at least two circuit elements (8, 9) connected in series, in particular each comprising a recovery diode (13, 14) connected in parallel, between which a connection (6) of the resonance circuit (2) is connected. According to the invention, the circuit elements (8, 9) are actuated as a function of the voltage detected at the connection (6). The invention further relates to control equipment (1) of a resonance circuit (2).
    Type: Application
    Filed: June 15, 2011
    Publication date: April 18, 2013
    Applicant: ROBERT BOSCH GMBH
    Inventor: Jochen Kuehner
  • Publication number: 20130093527
    Abstract: A transverse acoustic wave resonator includes a base, a resonator component, a number of driving electrodes fixed to the base and a number of fixing portions connecting the base and the resonator component. The resonator component is suspended above a top surface of the base and is perpendicular to the base. The driving electrodes are coupling to side surfaces of the resonator component. The resonator component is formed in a shape of an essential regular polygon. The driving electrodes and the resonator component jointly form an electromechanical coupling system for converting capacitance into electrostatic force. Besides, a capacitive-type transverse extension acoustic wave silicon oscillator includes the transverse acoustic wave resonator and a method of fabricating the transverse acoustic wave resonator are also disclosed.
    Type: Application
    Filed: December 2, 2011
    Publication date: April 18, 2013
    Applicant: MEMSensing Microsystems Technology Co., LTD.
    Inventors: BIN XIAO, Ping Lv, Wei Hu, Jia-Xin Mei, Gang Li
  • Patent number: 8397360
    Abstract: A method of adjustment on manufacturing of a monolithic oscillator including circuit elements and a BAW resonator, this method including the steps of: a) forming the circuit elements and the resonator and electrically connecting them; b) covering the resonator with a frequency adjustment layer; c) measuring the output frequency of the oscillator; d) modifying the thickness of the frequency adjustment layer to modify the output frequency of the oscillator.
    Type: Grant
    Filed: October 1, 2010
    Date of Patent: March 19, 2013
    Assignee: STMicroelectronics SA
    Inventors: Pierre Bar, Sylvain Joblot, Jean-Francois Carpentier
  • Publication number: 20130049876
    Abstract: A second piezoelectric vibrator (30) is located in a hollow portion (21) of the first piezoelectric vibrator (20) when seen in a plan view. A support (40) is a frame-shaped member, and the inside surface thereof supports the edge of a vibration member (10). The fundamental resonance frequency of the first piezoelectric vibrator (20) is lower than the fundamental resonance frequency of the second piezoelectric vibrator (30). In addition, the second piezoelectric vibrator (30) overlaps a loop of vibration generated in the vibration member (10) when the first piezoelectric vibrator (20) is driven at the fundamental resonance frequency. Preferably, the center of the second piezoelectric vibrator (30) overlaps the center of a loop of vibration generated in the vibration member (10) by the first piezoelectric vibrator (20).
    Type: Application
    Filed: July 7, 2011
    Publication date: February 28, 2013
    Applicant: NEC CORPORATION
    Inventors: Yasuharu Onishi, Jun Kuroda, Motoyoshi Komoda, Shigeo Satou, Yukio Murata, Yuichiro Kishinami, Nobuhiro Kawashima
  • Patent number: 8381595
    Abstract: A pressure detecting device includes: a resonator whose oscillation frequency varies depending on a pressure; a first oscillation circuit that oscillates the resonator and outputs a signal of a frequency corresponding to the pressure; an AT-cut quartz crystal resonator; a second oscillation circuit that oscillates the AT-cut quartz crystal resonator and outputs a reference clock signal; a measuring unit that measures the reference clock signal by the use of a reciprocal counting method; a temperature detecting unit that detects a temperature of the resonator; and a storage unit that stores coefficients of a first approximating polynomial for calculating a first correction value used to compensate for a frequency-temperature characteristic of the measuring unit, wherein the frequency-temperature characteristic of the value measured by the measuring unit includes a frequency-temperature characteristic of the AT-cut quartz crystal resonator and a frequency-temperature characteristic of the resonator.
    Type: Grant
    Filed: March 18, 2011
    Date of Patent: February 26, 2013
    Assignee: Seiko Epson Corporation
    Inventor: Toshinobu Sakurai
  • Patent number: 8368474
    Abstract: In a SAW oscillator, each of a first SAW element and a second SAW element includes interdigital electrodes and a reflector formed on a piezoelectric material. A first oscillating circuit part forms an oscillating loop including the first SAW element. A second oscillating circuit part forms an oscillating loop including the second SAW element. The first and second oscillating circuit parts have an identical admittance property. The first and second SAW elements are configured that an electrode pitch is identical and an admittance property indicating a relation between a frequency and an admittance value is different therebetween. Further, a first intersection point between the admittance property of the first SAW element and the admittance property of the first oscillating circuit part and a second intersection point between the admittance property of the second SAW element and the admittance property of the second oscillating circuit part are at different frequencies.
    Type: Grant
    Filed: May 19, 2011
    Date of Patent: February 5, 2013
    Assignee: Denso Corporation
    Inventors: Kazuki Arakawa, Kazuhiko Kano
  • Publication number: 20130027144
    Abstract: A SAW device includes a SAW chip formed of a piezoelectric substrate and an IDT formed thereon, a base substrate that supports the SAW chip, and a fixing member that fixes the SAW chip to the base substrate. The SAW chip that forms a cantilever is supported by the base substrate via the fixing member in a position where the IDT does not overlap with the fixing member in a plan view of the SAW chip. The length W of the SAW chip in a y-axis direction and the length D of the fixing member in the y-axis direction satisfy 1<D/W1?1.6. The fixing member bonds the lower surface and side surfaces of the fixed end of the SAW chip to the base substrate.
    Type: Application
    Filed: July 25, 2012
    Publication date: January 31, 2013
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Kunihito YAMANAKA, Naohisa OBATA
  • Patent number: 8358177
    Abstract: It is possible to reduce the size of a surface acoustic wave (SAW) resonator by enhancing a Q value. In a SAW resonator in which an IDT having electrode fingers for exciting SAW is disposed on a crystal substrate, the IDT includes a first region disposed at the center of the IDT and a second region and a third region disposed on both sides of the first region. A frequency is fixed in the first region and a portion in which a frequency gradually decreases as it approaches an edge of the IDT is disposed in the second region and the third region. When the frequency of the first region is Fa, the frequency at an edge of the second region is FbM, and the frequency at an edge of the third region is FcN, the variations in frequency are in the ranges of 0.9815<FbM/Fa<0.9953 and 0.9815<FcN/Fa<0.9953, respectively.
    Type: Grant
    Filed: October 22, 2009
    Date of Patent: January 22, 2013
    Assignee: Seiko Epson Corporation
    Inventor: Kunihito Yamanaka
  • Patent number: 8350633
    Abstract: Periodic signal generators include an oscillator circuit, which is configured to generate a first periodic signal at an output thereof, and a piezoelectric-based microelectromechanical resonator. The resonator is configured to generate a second periodic signal at a first electrode thereof, which is electrically coupled to the oscillator circuit. A variable impedance circuit is provided, which is electrically coupled to a second electrode of the piezoelectric-based microelectromechanical resonator. The variable impedance circuit is configured to passively modify a frequency of the second periodic signal by changing an induced electromechanical stiffness in at least a portion of the piezoelectric-based microelectromechanical resonator.
    Type: Grant
    Filed: July 1, 2011
    Date of Patent: January 8, 2013
    Assignee: The Board of Regents for Oklahoma State University
    Inventors: Reza Abdolvand, Mohsen Shahmohammadi Ghahsareh, Mohammad J. Modarres-Zadeh
  • Patent number: 8310317
    Abstract: A vibrating member includes a base portion, a plurality of vibrating arms which extend from one end portion of the base portion, are provided in parallel in a first direction, and extend in a second direction perpendicular to the first direction, a linking portion which is provided between the base end portions of two adjacent vibrating arms and extends from the other end portion of the base portion, and a support portion which is connected to the base portion through the linking portion.
    Type: Grant
    Filed: January 13, 2011
    Date of Patent: November 13, 2012
    Assignee: Seiko Epson Corporation
    Inventor: Akinori Yamada
  • Publication number: 20120280759
    Abstract: There are disposed a sealing member, a pair of electrode pads to electrically couple a piezoelectric resonator, a plurality of connection pads to electrically couple an integrated circuit element and the piezoelectric resonator, and wiring patterns to establish electrical continuity between the pair of electrode pads and the plurality of connection pads, and the piezoelectric resonator and the integrated circuit element are disposed side by side in plan view. An output wiring pattern establishes electrical continuity between one of the connection pads and an alternating current output terminal of an oscillation circuit, and a power source wiring pattern establishes electrical continuity between one of the connection pads and a direct current power source terminal of the oscillation circuit. The electrode pads are disposed closer to the power source wiring pattern than the output wiring pattern.
    Type: Application
    Filed: June 10, 2011
    Publication date: November 8, 2012
    Applicant: DAISHINKU CORPORATION
    Inventors: Takuya Kojo, Kenji Moriguchi, Ryuji Matsuo, Tetsuya Hanaki
  • Publication number: 20120274410
    Abstract: The present invention relates to an oscillator. The oscillator includes a resonator unit configured to resonate terahertz waves generated by an active layer using intersubband transitions of a carrier. The oscillator further includes a strain generating unit configured to generate strain of the active layer. Still furthermore, the oscillator includes a control unit configured to control the strain generating unit in accordance with the oscillation characteristic (the frequency or the output) of the terahertz waves resonated by the resonator unit.
    Type: Application
    Filed: December 10, 2010
    Publication date: November 1, 2012
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Yasushi Koyama
  • Patent number: 8283987
    Abstract: One embodiment of the present invention sets forth a MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system includes a MEMS resonator, two or more resonator electrodes, and at least one resonator electrode shield. The resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.
    Type: Grant
    Filed: October 4, 2010
    Date of Patent: October 9, 2012
    Assignee: SiTime Corporation
    Inventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
  • Publication number: 20120229223
    Abstract: A vibrating element includes a piezoelectric substrate having an excitation section adapted to excite a thickness-shear vibration, and provided with a step section in each of side surfaces on both ends, and a peripheral section having a thickness smaller than a thickness of the excitation section, and the peripheral section has at least one projection section disposed on both principal surfaces in an area where a vibratory displacement when the excitation section excites a vibration is sufficiently attenuated.
    Type: Application
    Filed: March 9, 2012
    Publication date: September 13, 2012
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Toshihiro II, Matsutaro NAITO
  • Publication number: 20120200365
    Abstract: A photoresist film forming process is performed by the use of a forming apparatus that has a sprayer which generates an air flow toward metal film on a wafer to spray the photoresist material, and a plurality of spacers which is disposed between a work stage and the wafer.
    Type: Application
    Filed: January 30, 2012
    Publication date: August 9, 2012
    Inventor: Daiki Irokawa
  • Publication number: 20120126907
    Abstract: An oscillation circuit has a first inverter connected to an external piezoelectric resonator, a first feedback resistor disposed between input/output terminals of the first inverter, first/second variable capacitive elements connected to input/output of the first inverter, a charging circuit supplying input/output terminal with a reference current to charge the capacitive element, a comparator comparing a charging voltage of input/output with a reference voltage, and a control circuit that, in a calibration operation, at a first time, causes the charging circuit to start supply the reference current to the input terminal or the output terminal, and, at a second time after the first time, generates the control signal for setting a capacitance value of the first or second variable capacitive element so that the charging voltage becomes close to the reference voltage according to a comparison result of the comparator.
    Type: Application
    Filed: August 24, 2011
    Publication date: May 24, 2012
    Applicants: FUJITSU SEMICONDUCTOR LIMITED, FUJITSU LIMITED
    Inventors: Hiroyuki NAKAMOTO, Hiroyuki Ito
  • Publication number: 20120126908
    Abstract: This invention is provided a piezoelectric vibrating reed which is capable of decreasing variation in the amount of etching reside as much as possible and suppressing influence of vibration loss on the vibration characteristics as much as possible. A piezoelectric vibrating reed comprising a vibrating section extensive in parallel in a longitudinal direction and a base to which the vibrating section is connected at this proximal end. The base comprises at least a first section and a second section defined from the side of the proximal end of the base long the longitudinal direction. The first section is wider in a transverse direction than the second section.
    Type: Application
    Filed: December 12, 2011
    Publication date: May 24, 2012
    Inventor: Takashi Kobayashi
  • Publication number: 20120105164
    Abstract: A piezoelectric oscillation circuit includes: a Colpitts oscillation circuit; a first circuit unit which includes a circuit having a variable-capacity capacitor for controlling an oscillation frequency; a second circuit unit which includes a circuit having a resistance; and a piezoelectric resonator which includes a first terminal connected to the first circuit unit and the second circuit unit, and a second terminal connected to the Colpitts oscillation circuit. The Colpitts oscillation circuit connects the second terminal to a fixed potential via a dividing resistance. The second circuit unit connects the first terminal to the fixed potential via the resistance.
    Type: Application
    Filed: September 7, 2011
    Publication date: May 3, 2012
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Akitoshi OGINO, Tadayoshi SOGA, Jun MATSUOKA, Yuichi OINUMA
  • Publication number: 20120038431
    Abstract: The invention relates to a microelectromechanical resonators and a method of manufacturing thereof. The resonator comprises at least two resonator elements made from semiconductor material, the resonator elements being arranged laterally with respect to each other as an array, at least one transducer element coupled to said resonator elements and capable of exciting a resonance mode to the resonator elements. According to the invention, said at least one transducer element is a piezoelectric transducer element arranged laterally with respect to the at least two resonator elements between the at least two resonator elements and adapted to excite to the resonator elements as said resonance mode a resonance mode whose resonance frequency is dependent essentially only on the c44 elastic parameter of the elastic modulus of the material of the resonator elements. By means of the invention, electrostatic actuation and problems associated therewith can be avoided and accurate resonators can be manufactured.
    Type: Application
    Filed: August 12, 2011
    Publication date: February 16, 2012
    Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT
    Inventors: Antti JAAKKOLA, Tuomas PENSALA, Jyrki KIIHAMĂ„KI