Abstract: A semiconductor torsional micro-electromechanical (MEM) switch is described having a conductive movable control electrode; an insulated semiconductor torsion beam attached to the movable control electrode, the insulated torsion beam and the movable control electrode being parallel to each other; and a movable contact attached to the insulated torsion beam, wherein the combination of the insulated torsion beam and the control electrode is perpendicular to the movable contact. The torsional MEM switch is characterized by having its control electrodes substantially perpendicular to the switching electrodes. The MEM switch may also include multiple controls to activate the device to form a single-pole, single-throw switch or a multiple-pole, multiple-throw switch. The method of fabricating the torsional MEM switch is fully compatible with the CMOS manufacturing process.

Abstract: A MEM capacitor having a capacitance plate nearer a movable plate than a separate bias plate. Voltage potential between the bias plate and movable plate determines the value of capacitance between the movable plate and the capacitance plate. In a preferred MEM capacitor, the movable plate is suspended over two fixed plates, a bias plate and a capacitance plate. The movable plate is disposed opposite both the bias plate and the capacitance plate. A distance between opposing surfaces of the capacitance plate and the movable plate is less than a distance between the bias plate and the capacitance plate. Preferably, the relative difference in distances between the plates is accomplished by a mechanically suspended movable plate that is shaped to have portions in at least two separate planes.

Abstract: A remote television control includes a hollow floating knob which is engaged on the television tuner shaft. Inside the knob is a torque-applying mechanism such as a unidirectional clutch or ratchet for imparting torque to the tuner shaft. A flexible coaxial force applying means extend between the torque-applying mechanism and a control including a solenoid which is actuated by means of an acoustical switch tuned to respond to an acoustical signal of a selected frequency emitted by a remote source. When the solenoid is actuated, it moves the force applying means which, in turn, reacts against the knob and activates the torque-applying mechanism inside the knob so that the tuner is rotated to change the channel of the television receiver. The control also includes a switch which is actuated when the knob is indexed to an unused channel position in order to turn the televison set off. Alternatively, the television set is turned on or off independently of the channel position of the tuner.