Abstract: Various embodiments comprise apparatuses and related methods for cleaning a substrate. In one embodiment, an apparatus includes a substrate holder to hold and rotate the substrate at various speeds. An optional inner shield and an optional outer shield, when in a closed position, surround the substrate holder during operation of the apparatus. Each of the inner shield and the outer shield can operate independently in at least one of rotational speed and direction from the other shield. At least one of a front-side laser and a back-side laser are arranged to clean one or both sides of the substrate and edges of the substrate substantially concurrently or independently by impinging a light onto at least one surface of the substrate. A gas flow, combined with a high rotational-speed of the shields and substrate, assists in removing effluents from the substrate. Additional apparatuses and methods of forming the apparatuses are disclosed.

Abstract: A sensor apparatus includes a housing attachable to a vehicle and including a panel, a sensor window, a liquid nozzle fixed relative to the housing, and a tunnel. The panel includes a port. The sensor window is positioned in the port. The liquid nozzle is aimed at the sensor window. The liquid nozzle is positioned in a first horizontal direction from the port along the panel. The tunnel extends along the panel and is positioned in a second horizontal direction from the port, the second horizontal direction being opposite the first horizontal direction. The tunnel terminates at an opening positioned to receive fluid outputted by the nozzle.

Abstract: Various embodiments comprise apparatuses and related method for cleaning and drying a substrate. In one embodiment, an apparatus includes a vertical substrate holder to hold and rotate the substrate at various speeds. An inner shield and outer shield, when in a closed position, surround the vertical substrate holder during operation of the apparatus. Each of the shields can operate independently in at least one of rotational speed and direction from the other shield. A front-side and back-side spray jet are arranged to spray at least one fluid onto both sides of the substrate and edges of the substrate substantially concurrently. A gas flow, combined with a high rotational-speed of the shields and substrate, assists in drying the substrate. At least one turbine disk is coupled in proximity to at least one of the shields to remove excess amounts of fluid. Additional apparatuses and methods of forming the apparatuses are disclosed.

Abstract: Embodiments provide a veneer dryer system and methods of constructing, relocating, and replacing veneer dryers and other constructs such as lumber kilns, machinery, and processing lines or parts thereof. Embodiments of a veneer dryer system may include a track and a veneer dryer movably coupled with the track. The track may extend between the desired location of the veneer dryer and a construction location. Movers may be coupled with the track at the construction location. The veneer dryer may be partially or fully constructed on the movers and moved to the desired location for use. A pre-existing veneer dryer at the desired location may remain operational during the construction and removed before the new veneer dryer is moved into place, substantially reducing downtime and costs as compared to prior methods of replacing veneer dryers.

Abstract: A lighted dryer assembly for a vehicle wash system including a housing portion, having a head portion, a body portion, and an outlet portion. The head portion includes an air inlet portion for drawing air into the head portion and an outlet for passing the air to the body portion. The outlet portion has a plurality of exit nozzles that are configured to emit high velocity air therefrom for removing water from an exterior surface of a vehicle while disposed in a vehicle treatment area. The body portion includes an upper portion where air is received from the head portion and a lower portion disposed remote from the upper portion. A light source is disposed within the housing portion and configured to emit light that can be seen by a vehicle disposed in the vehicle treatment area.

Abstract: Dryers (300) comprising a first surface (102) and a deflector (302). The first surface comprises at least one opening (104) through which air is forced during use to dry a printed media and the deflector comprises (302) a second surface to change the direction of airflow passing through the at least one opening. The deflector guides the direction of the airflow such that it flows substantially in a direction corresponding to the direction of travel (310) of the printed media.

Abstract: Systems and methods for concentric duct system for a dryer of a printing system. One embodiment includes a dryer of a printing system and a duct system. The dryer includes web conditioners sources to condition a web of print media, intake ports to supply air for the web conditioners, and outlet ports to remove air for the web conditioners. The duct system includes a supply hub and a return hub. The supply hub includes a tubular body with a lower portion and an upper portion, and supply nodes around the lower portion. The return hub includes a body around the upper portion of the supply hub, and return nodes around the body. The duct system further includes supply ducts to connect the supply nodes and the intake ports, and return ducts to connect the return nodes and the outlet ports.

Abstract: A system and methodology associated with a connected farming system which includes an intake air modification unit which includes at least one fan, a dehumidifier and a cooling component and which collectively function to condition intake air so as to dry and cool the air prior to introduction into a grain bin. One or more sensors are provided which serve to control the operation of the intake air modification unit such that the air modification unit operates efficiently and taking into account external factors such as the presence/level of grain in the bin, the ambient weather conditions including relative humidity levels and ambient air temperature as well as qualitative characteristics of the air exiting the grain bin to include relative humidity and air temperature.

Abstract: A method of sorting green lumber is based on a ratio of moisture content to either weight or density. The moisture content of each piece of green lumber is measured, and the weight or density of the green lumber is measure. One more thresholds of moisture content to weight or density ratios are used to divide the green lumber into groups. Such a sort tends to produce groups of green lumber that require similar kiln drying schedules.

Abstract: In a sludge treatment installation, a movable carriage is arranged transversely above a work surface of a floor. The movement of the carriage by longitudinal translation over the floor is initiated by a first drive shaft carrying a toothed wheel meshing with a drive chain. A second chain helps to guide the carriage. On the carriage is provided a rotary turning tool which engages in the sludge. Driven in rotation by a second drive shaft independent of the first, it includes pairs of semi-cylindrical paddles fixed substantially symmetrically by one of their edges on either side of a shaft driven by the second drive shaft. The two paddles in each pair of paddles are asymmetrical as a result of having different radii, with a difference at least equal to about 5%. Forced ventilation acts directly on the paddles.

Abstract: A clothing dryer having a cover structure capable of increasing quantity of air generated from a cooling fan. The clothing dryer includes a first cover covering the cooling fan and a second cover connected to the first cover. A cutoff is provided at a connection area between the first cover and the second cover to branch a flow of air and is positioned below a rotational center of the cooling fan.

Abstract: Apparatus for treatment of multiple articles located in separate chambers (38) for treatment with an ambient or heated, and/or treated air flow stream (44); and processes for drying multiple articles located in the separate chambers (38) using an ambient or heated, and/or treated air flow stream (44). The chambers (38) are within a container or form a container (36), and the chambers (38) are connected in a manner that defines a virtual air flow stream tube having a length in excess of any single nominal length dimension or of any nominal internal width dimension or of any nominal internal height dimension of the container so that any to-be-treated items supported within any chamber is treated with air flow stream (44).

Abstract: Described is a system and apparatus for stripping fluids from the surface of a passing vehicle. The apparatus includes an inflatable blower bag for attaching with a duct structure. The inflatable blower bag includes an entrance for receiving air from the support structure and an exit for directing air onto a passing vehicle. A flexible water stripping blade is positioned proximate the exit such that as the bag falls onto a passing vehicle, the flexible blade engages with the passing vehicle and strips water from the passing vehicle.

Abstract: In a sludge treatment installation, a movable carriage is arranged transversely above a work surface of a floor. The movement of the carriage by longitudinal translation over the floor is initiated by a first drive shaft carrying a toothed wheel meshing with a drive chain. A second chain helps to guide the carriage. On the carriage is provided a rotary turning tool which engages in the sludge. Driven in rotation by a second drive shaft independent of the first, it includes pairs of semi-cylindrical paddles fixed substantially symmetrically by one of their edges on either side of a shaft driven by the second drive shaft. The two paddles in each pair of paddles are asymmetrical as a result of having different radii, with a difference at least equal to about 5%. Forced ventilation acts directly on the paddles.

Abstract: A system configured to dry containers before a date coding process includes a blower assembly, an air manifold and a bracket assembly. The blower assembly includes a centrifugal air blower. The air manifold is connected to the blower assembly and includes a plurality of air nozzles. The air nozzles are configured to be positioned over a conveyor line, wherein the air nozzles are configured to expel air moved by the centrifugal air blower. The bracket assembly is configured to adjustably mount the air manifold over the conveyor line, wherein the bracket assembly allows the air manifold to be horizontally and/or vertically adjusted with respect to the conveyor line.

Abstract: The present disclosure is directed generally to systems and methods for drying wood products in one or more kilns with recovered flue gases. In some embodiments, methods for drying wood products include firing a fuel in the one or more combustion devices, thereby producing a heated fluid and a flue gas. The heated fluid is circulated to provide a primary heat source to the one or more indirect fired kilns. An amount of flue gas is recovered and transferred to provide a secondary heat source to the one or more indirect fired kilns.

Abstract: Disclosed is a drying apparatus equipped with linear drive mechanisms to drive spray nozzles in the direction perpendicular to the direction in which a wet object is transferred in the drying box. Each spray nozzle has a long discharge slit elongated in the direction in which the wet object is transferred. Two opposed nozzles are provided at each of the entrance and exit of the drying box. Each nozzle has an elongated slit traversing the width of the wet object in the direction perpendicular to the transporting direction, the opposed surfaces of the nozzles being so inwardly oblique that the gap between the opposed surfaces is larger at the inner edge than the outer edge.

Abstract: This disclosure reveals a combination of embodiments that increase the evaporation rate of liquid solutions when subjected to blow-down gas flows. Certain gas flow separator baffles or framed inserts with vanes may be especially effective to enhance evaporation when combined with aggressive blow-down flow rates and centrifugal force. The centrifugal force applied to the evaporating liquid protects sample integrity by preventing the solution(s) from splashing out of the drying container. Such splashing, when high blow-down gas flow rates are directed into the sample containers, affects yield and purity.

Abstract: A configurable hoof drying apparatus. The drying components of the apparatus are selectable, configurable and inter-changeable for desired drying needs and change a pressure, speed and temperature of an original drying air source. Therefore it can be used with a hot/warm/cool/cold air drying source. The hoof drying apparatus is portable and specifically designed, but is not limited to, drying hooves for the purposes of: hoof wall repair, preparation for medication for hoof diseases and preparation of the hoof for application of hoof dressings and hoof shoes. The hoof drying apparatus can also be used for drying non-hoofed animals.

Abstract: A portable dish drying apparatus. The dish drying apparatus uses a heat lamp to dry dishes, which can be controlled using a control panel located on an outside surface of the apparatus. A video output device can be embedded on a front door, cover, or lid of the apparatus in order to allow a user to watch television.

Abstract: The present invention relates to a body drying apparatus that is wall mountable and easily removable. In addition, all of the elements that make the device functional are housed within a single unit with an electrical cord extending from the device for providing power. The internal elements are attached to an insert that is easily received by and removed from the housing for cleaning or replacing. The outlets of the device located on the housing have multiple novel configurations and designs to increase the effective drying capability of the device.

Abstract: A drying apparatus and method are disclosed. The drying apparatus includes a drying compartment and a heating device that heats air to be provided to the compartment. The heating device includes a coil through which is conducted a heated liquid, and the air is heated as it passes along the coil. The heated liquid can be provided from a source internal or external to the drying apparatus and in at least some embodiments is heated water provided from a hydronic heating device located internal to the drying apparatus. In at least some embodiments, the heated air provided through the drying compartment is returned to the heating device and recirculated through the compartment. In at least some of these embodiments, the heated air emanating from the drying compartment passes through a condensing device that removes moisture from the air before it is returned to the heating device.

Abstract: A system and method is provided for forcing evaporation of a solvent from a coating on a surface of a panel. The method includes directing air to flow along the surface of the panel, and generating turbulence in the air within the column, by creating one or more high pressure pulses of air within the airflow, at a chosen frequency. The turbulence travels in the direction of the airflow, replacing air laden with vapor adjacent to the surface of the panel with dry air, thereby accelerating drying.

Abstract: Air circulating apparatus for providing ventilation within a drying cabinet or locker having, the air circulating apparatus having an intake air flow fan and a circular-shaped air ducting system for producing cyclonic air flow within the drying cabinet or locker for enhancing the drying and deodorizing of clothing and sporting equipment not easily laundered for use in an equipment drying cabinet or locker, closet or the like. The air circulating apparatus having a small sized intake air fan, a charcoal filter element activated by the air flow, a timing circuit permitting the fan to be set for a selected period of time, a circular-shaped air ducting system having a series of angled baffles for directing air flow upwardly in a cyclonic flow pattern.

Abstract: An apparatus for drying a disposable razor so as to prevent corrosion due to moisture left on such razor. The apparatus comprising a container having a predetermined shape and formed of a predetermined material. The container is designed for holding at least one such disposable razor. There is a base portion of the container, such base portion being removably engageable with a bottom part of the container, such base portion including a foot member and a housing member. A fan is disposed in the housing of such base portion of the container. A screen is disposed in the base portion of the container atop the fan. The apparatus has a power means disposed in one of the housing and the foot member of the base portion of the container for providing power to the fan.

Abstract: Apparatus for treatment of multiple articles located in separate chambers (38) for treatment with an ambient or heated, and/or treated air flow stream (44); and processes for drying multiple articles located in the separate chambers (38) using an ambient or heated, and/or treated air flow stream (44). The chambers (38) are within a container or form a container (36), and the chambers (38) are connected in a manner that defines a virtual air flow stream tube having a length in excess of any single nominal length dimension or of any nominal internal width dimension or of any nominal internal height dimension of the container so that any to-be-treated items supported within any chamber is treated with air flow stream (44).

Abstract: The ambient air clothes dryer is an automated device providing axial flow of unheated ambient air through the dryer drum. The dryer may include different drum drive systems, timer and/or humidity detector controls, and a configuration utilizing a separate, portable fan for temporary, removable installation with the dryer housing to provide airflow through the drum. The ambient air dryer greatly reduces energy requirements for drying laundry when compared to conventional heated air dryers, and is quite effective in warm and/or dry climates. The ambient air dryer is portable and may be used indoors or outdoors. The device may be configured to use twelve-volt power from a motor vehicle for use in camping. When used indoors, the device may be placed with a heat source (heat register, etc.) to draw warm air through the drum while humidifying the air as it passes through damp laundry in the drum.

Abstract: A paint removal apparatus includes a canister partially filled with a pressurized coolant. The apparatus includes a housing having a body portion mounted atop the canister with a handle portion extending from the body portion. The handle includes an inlet port while the body portion includes first and second outlet ports. The inlet port is capable of connection to a compressed air stream for delivery thereof through an air channel between the inlet and second outlet ports. A coolant channel extends between the canister and the first outlet port. A trigger connected to a primary valve is movable between first, second, and third configurations. The primary valve and cooperating linkages enable a user to select between delivery of the air stream alone or a portion of the coolant whereby to strip paint. A scraping blade may be removably and rotatably coupled to the housing. The coolant may be dry ice.

Abstract: A manually operated vehicle blow-drying device having a swingable overhead boom and an air supply hose extending down from a distal end of the boom.

Abstract: A pavement dryer has a pick-up assembly operating with a gas processing system. The pick-up assembly has an assembly frame mounted on wheels and connected to the gas processing system, and a nozzle that is maintained in close proximity to a paved surface. The gas processing system has a system frame mounted on wheels, a compressor, and a collection chamber. The compressor draws air from the nozzle through the collection chamber. Water entrained in the air flow is removed from the paved surface and settles in the collection chamber. The water may be separated by gas centrifuges. The nozzle has a nozzle lip positioned to provide a controlled gap with the paved surface. The size of the gap can preferably be adjusted, preferably by a movable damper. The nozzle has a trailing edge seal that forcibly engages the paved surface, and preferably also has end seals.

Abstract: An axle (30) supports both a nozzle plenum (18) and a plurality lower tubes (28) that telescope into a plurality of upper tubes (26). The nozzle plenum (18) is moved vertically up and down between various operating positions as the tubes (26, 28) telescope into and out of one another to accommodate the changing longitudinal configuration of a vehicle and the nozzle plenum (18) may be rotated about the axle (30) to efficiently direct air against the contour of the vehicle.

Abstract: A dryer system for automated car wash systems includes a new and improved air dryer having a fan and a rotatable nozzle at its discharge end with the nozzle orientation being controlled by a rotary actuator whose drive shaft is mounted on the axis of rotation of the nozzle. A method of using the blowers includes the use of two or more blowers that are positioned above the vehicle and oriented so the streams of concentrated air complement each other in moving liquid particles on the vehicle toward the side or end of the vehicle where they drop from the lower edges of the sides and ends of the vehicle.

Abstract: A dryer adapted for use with a printing machine, and having at least one nozzle arrangement (6) with elongated, linearly effective nozzle output (7), especially wide slot nozzle arrangement, to blow a drying medium, especially air, onto a surface (16) to be dried, characterized in that the nozzle arrangement (6) has an effective nozzle opening width of 0.01 mm to 0.5 mm.

Abstract: A heat-shrinking film packaging machine includes a conveyor for transporting an article to be packaged through a heating device to have a heat-shrinking film surrounding the article heated and shrunk and thus tightly packaging the article. The heating device includes a hot air flow control device including two air supply devices located on opposite sides of the conveyor to define a channel through which the article is transported. Each air supply device has a surface in which an array of openings is defined and arranged in rows and columns for supplying hot air toward the article. A blocking bar is movably mounted to the surface of each air supply device and associated with each row of the openings. The blocking bar is movable with respect to the openings to selectively and partially block the openings for controlling hot air flow through the openings.

Abstract: A manually operated vehicle blow-drying device having a swingable overhead boom and an air supply hose extending down from a distal end of the boom.

Abstract: A drying tool for drying moisture present in cells of a honeycomb core. The tool includes an inflatable bladder compartment having a bendable exterior surface and a plurality of open-ended nozzles protruding from this exterior surface, with each nozzle having a passage in fluid communication with the bladder compartment. A connector element is connectible with a hot air source for delivering hot air into the bladder compartment for subsequent dispatch through the plurality of nozzles. Preferably, the nozzles are situated in a grid formation and are of a generally conical configuration. In use, the bendable exterior surface with the protruding nozzles is bowed or curved to generally configure to the exterior shape of the honeycomb core such that hot air is pinpointed in a grid pattern to drive heated air into the core and thereby cause circulation through the core cells for moisture evaporation.

Abstract: Fans circulate heated air which is introduced from nozzles defining discharge axes that are respectively directed generally parallel to, yet slightly toward, the rotational axes of the fans. The fans operate in first and second modes to respectively force flow in opposite first and second directions. Heated air is introduced from the nozzles at the high-pressure sides of the fans.

Abstract: A plurality of pairs of telescoping tubes (20) and (22) interconnect a support plenum (12) and a nozzle system (14) for delivering air from the plenum (12) to the nozzle system (14) while allowing the nozzle system (14) to move in an adjustment direction toward and away from the plenum (12). The nozzle system (14) is elongated and includes a fixed shell (24) and a movable shell (26) movably supported by the fixed shell (24). The assembly (10) is characterized by actuators (42) for moving the nozzle system (14) between the various vertical-operating positions and a motor (46) for rotating the nozzle (16). The nozzle system (14) may be moved up and down to accommodate the changing longitudinal configuration of the vehicle (18) and the nozzle (16) may be rotated about the nozzle axis to efficiently direct air against the contour of the vehicle (18).

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: An adjustable deckel profiler is disclosed, for use in apparatus for drying a moving paper web. The profiler is a slidable member which interacts with impingement air to control and adjust the air against the moving web. Means are provided for adjusting and setting the profiler relative to cross machine drying air profiling.

Abstract: A duct system includes an upper duct that supplies heated air to an upper plenum and a lower duct that supplies heated air to a lower plenum, and the upper and lower plenums provide the heated air to a kiln chamber. An intermediate plenum is between the upper and lower plenums and has outlets through which heated air supplied to the upper and lower plenums is discharged. A plurality of circulation passages extend generally laterally through the intermediate plenum. Fans positioned in the circulation passages circulate heated air that is external to the plenums. The outlets are nozzles defining discharge axes that are respectively directed generally parallel to, yet slightly toward, the rotational axes of the fans. Tips of the fans' blades extend into boundary layers adjacent the interior surfaces of the circulation passages. The fans operate in first and second modes to respectively force flow in opposite first and second directions.

Abstract: Liquid is removed from disks by apparatus and methods for drying a disk that has been wet in a liquid bath. The disk and the bath are separated at a controlled rate to form a monolayer of liquid on the disk as the disk is positioned in a gas-filled volume. The separation may be by moving the disk out of the liquid bath, and the controlled rate is generally not less than the maximum rate at which a meniscus will form between the liquid bath and the surface of the disk when the liquid bath and the disk are separated. The gas-filled volume is defined by a hot chamber that continuously transfers thermal energy to the disk in the gas-filled volume. Hot gas directed into the volume and across the disk and out of the volume continuously transfers thermal energy to the disk. The directing of the gas out of the volume is independent of the separation of the bath and the disk.

Abstract: Disclosed is an apparatus and method to redirect airflow and enhance heat transfer using an oscillating baffle. This apparatus and method allows for the improved efficiency of a heat transfer tunnel, while reducing the size of the tunnel. Several embodiments of the oscillating baffle have a first degree of freedom and a second degree of freedom which allows it to oscillate under the power of the airflow. The method employs the oscillating baffle to redirect and mix the airflow in order to enhance heat transfer in a heat transfer tunnel. The oscillating baffle is used for cooling, for heating, for enhancing the mixing of a multi-component air flow or redirecting an air flow. Other applications could include use in dusty environments to provide high speed gas streams sweeping a wall to prevent the build-up of dust.

Abstract: An apparatus for distributing a cleaning gas to a semiconductor substrate processing chamber. The apparatus comprises a feed block disposed on top of the processing chamber and a support block disposed over the feed block. The feed block and the support block slidably interfit and are axially moveable with respect to one another.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: A device for enhancing removal of liquid from fabric utilizing mechanical and aerodynamic techniques. A base plate contains one or more apertures to which a vacuum is applied for extracting water from the fabric. The total cross-sectional area of the apertures is selected to be that which will increase, and preferably maximize, the extraction power for the vacuum motor with which said base plate is to be utilized. The number and shape of the apertures is selected to reduce the ratio of the total distance along all the perimeters of said apertures to the total cross-sectional area of said apertures in order to reduce boundary layer drag. The cross-sectional area of each of said apertures is selected to be large enough to permit solid contaminants that can be expected to be in the liquid to pass through said apertures without clogging said apertures. Barriers are attached to the bottom of the base plate to force any liquid in the fabric toward the apertures as the base plate is moved across the fabric.

Abstract: A device for enhancing removal of liquid from fabric, such as a vacuum head device for removing liquid from carpet, includes an elongated base plate to be moved across the carpet. The vacuum head has a tapering cross section with a wider upper end and a narrower lower end configured to penetrate into the carpeted surface. In addition, a plurality of apertures are formed in an array in the base plate to withdraw the fluid under a vacuum force. Preferably, the plurality of apertures are sized larger than a width of the lower surface to create a plurality of protrusions extending from the base plate configured to penetrate the carpeted surface.

Abstract: This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are transferred into the vacuum processing chamber by substrates conveyor means from dummy substrate storage means which is disposed in the air atmosphere together with storage means for storing substrates to be processed, and the inside of the vacuum processing chamber is dry-cleaned by generating a plasma. The dummy substrate is returned to the dummy substrate storage means after dry cleaning is completed. Accordingly, any specific mechanism for only the cleaning purpose is not necessary and the construction of the apparatus can be made simple.

Abstract: Kiln design that uses a series of at least two subsections with airflow in constant but alternating directions instead of using bi-directional fans that periodically reverse directions. The uninterrupted alternating air flow may be used in continuous drying kilns (CDK) with two sets of carriages carrying spaced stacks of lumber travel in opposite directions through a sequence of chambers. The uninterrupted alternating air flow may be used with a set of at least one pathway for carriages carrying lumber to be dried where all carriages move from a first end of the kiln to a second end of the kiln.