Vapor Or Gas Treatment Patents (Class 34/448)
  • Patent number: 6321463
    Abstract: A substrate treating apparatus including a substrate support mechanism for supporting a substrate 1 to be treated, a rotary impeller 4 placed to face the surface of the substrate 1 supported by the substrate support mechanism, and at least one nozzle 14 provided in an approximately central portion of the rotary impeller 4, wherein rotating the rotary impeller 4 produces a flow of gas passing through the nozzle 14 and flowing from the central portion of the rotary impeller 4 toward the outer periphery thereof, thereby drying the surface of the substrate supported in a stationary state by the substrate support mechanism.
    Type: Grant
    Filed: May 25, 2000
    Date of Patent: November 27, 2001
    Assignee: Ebara Corporation
    Inventor: Hiroyuki Shinozaki
  • Patent number: 6298578
    Abstract: A method and apparatus for drying a tennis court or other surface removes water from the tennis court and heats the surface of the tennis court to facilitate evaporation of water from the court.
    Type: Grant
    Filed: October 12, 2000
    Date of Patent: October 9, 2001
    Inventor: Mark H. Frampton
  • Patent number: 6293031
    Abstract: Method and apparatus for drying a coated paper web (W) or the like web. The apparatus (10) comprises sequentially in the running direction of the web—a turning device (16) arranged on the first side of the web and provided with blow nozzles (20), with which the running direction of the web to be dried is turned in a non-contacting way, and web drying devices (30, 30′) arranged on the first and the second sides of the web, in which the web is dried in a non-contacting manner. The apparatus further comprises a counterpart (18) provided with overpressure nozzles (24), arranged on the second side of the web at the point of the turning device (16), for stabilizing the web run by means of blows generating a local overpressure between the web (W) and the carrier surfaces of the overpressure nozzles (24).
    Type: Grant
    Filed: February 1, 2000
    Date of Patent: September 25, 2001
    Assignee: Metso Paper, Inc.
    Inventors: Knut Ringbom, Richard Solin
  • Publication number: 20010008181
    Abstract: The specification discloses embodiments of a process and related apparatus for conditioning a fibrous web in order to improve the efficiency of drying and calendering thereof. In the process, a moving fibrous web is conditioned after the drier unit of a papermaking machine by applying a flow of moistened gas through one or more arrays of radial jet reattachment nozzles placed in close proximity to the web surface prior to a calendering unit or prior to a steaming unit placed between the nozzles and the calender unit to cool the web and/or increase its moisture content. Webs treated according to the invention exhibit improved properties including less moisture streaking, enhanced smoothness and avoidance of optical property loss.
    Type: Application
    Filed: February 20, 2001
    Publication date: July 19, 2001
    Inventor: Dennis W. Anderson
  • Patent number: 6256904
    Abstract: A system, such as a gap drying system, moves a substrate having a substrate tension over a curved plate at a substrate speed such that the substrate floats over at least a region of substantially constant clearance (H0) between the substrate and the curved plate. H0 is controlled without adjusting the substrate speed and without adjusting the substrate tension.
    Type: Grant
    Filed: May 6, 1998
    Date of Patent: July 10, 2001
    Assignee: Imation Corp.
    Inventors: William Blake Kolb, Marcio da Silveira Carvalho, Gary Lee Huelsman
  • Patent number: 6253464
    Abstract: A system that employs thermophoresis to protect lithographic surfaces from particle deposition and operates in an environment where the pressure is substantially constant and can be sub-atmospheric. The system (thermophoretic pellicle) comprises an enclosure that surrounds a lithographic component whose surface is being protected from particle deposition. The enclosure is provided with means for introducing a flow of gas into the chamber and at least one aperture that provides for access to the lithographic surface for the entry and exit of a beam of radiation, for example, and further controls gas flow into a surrounding low pressure environment such that a higher pressure is maintained within the enclosure and over the surface being protected.
    Type: Grant
    Filed: August 18, 2000
    Date of Patent: July 3, 2001
    Assignee: Euv LLC
    Inventors: Leonard E. Klebanoff, Daniel J. Rader
  • Patent number: 6230422
    Abstract: A method and apparatus achieve a more sustainable lift of a wet or heavy pulp web from a pulp machine to the topmost drying level of a pulp drying, allowing the speed of production to be increased and runnability problems to be minimized. The pulp web is lifted from the last press of the pulp machine to the topmost of the drying levels of the pulp dryer by supporting the web on a support wire. The pulp may be passed through the topmost drying level, and one or two other levels, also supported by a support wire, but in subsequent levels the pulp web is preferably supported only by an air cushion. In each level drying gas is blown toward the pulp web (preferably from both above and below the web) to effect drying, and the web passes around turning rolls between each drying level to enter the next, lower, drying level. The support wire may be of metal or plastic, and has a texture significantly coarser than the texture of wires commonly used in pulp machines.
    Type: Grant
    Filed: January 27, 2000
    Date of Patent: May 15, 2001
    Assignee: Metso Paper, Inc.
    Inventor: Paavo Sairanen
  • Patent number: 6216364
    Abstract: A drying apparatus for washed objects is capable of drying the objects in a reduced period of time, effectively preventing contamination of the objects during drying thereof, and attaining energy saving and a reduction in consumption of chemicals used. Mist of an organic solvent is generated by means of an ultrasonic wave in an organic solvent mist generating tank and the objects are immersed in a pure water tank, the pure water tank and organic solvent mist generating tank are then operated to communicate with each other to discharge pure water and place the objects in an atmosphere of the organic solvent mist, and then nitrogen gas is fed to the pure water tank to purge the organic solvent mist with the nitrogen gas.
    Type: Grant
    Filed: April 14, 1999
    Date of Patent: April 17, 2001
    Assignee: Kaijo Corporation
    Inventors: Akinori Tanaka, Shoichi Okano, Isao Maki
  • Patent number: 6209224
    Abstract: A method for making throughdried tissue products includes a throughdryer which functions without a throughdrying fabric. The tissue web is formed in a conventional manner and dewatered to a high consistency prior to being transferred to the surface of the throughdryer. The inside of the throughdryer is operated with a vacuum while a hot air hood serves to blow hot air through the web into the dryer. In one embodiment, the surface of the throughdrying drum is provided with circumferential ridges to impart bulk and cross-machine directional stretch to the resulting tissue. A doctor blade having ridges which intermesh with the circumferential ridges on the throughdryer surface can be used to skim the dried sheet from the dryer surface.
    Type: Grant
    Filed: December 8, 1998
    Date of Patent: April 3, 2001
    Assignee: Kimberly-Clark Worldwide, Inc.
    Inventor: Strong C. Chuang
  • Patent number: 6207020
    Abstract: The invention relates to of a process and related apparatus for conditioning a fibrous web in order to improve the efficiency of drying and calendering thereof. In the process, a moving fibrous web is conditioned after the drier unit of a papermaking machine by applying a flow of moistened gas through one or more arrays of radial jet reattachment nozzles placed in close proximity to the web surface prior to a calendering unit or prior to a steaming unit placed between the nozzles and the calender unit to cool the web and/or increase its moisture content. Webs treated according to the invention exhibit improved properties including less moisture streaking, enhanced smoothness and avoidance of optical property loss.
    Type: Grant
    Filed: May 12, 1998
    Date of Patent: March 27, 2001
    Assignee: International Paper Company
    Inventor: Dennis W. Anderson
  • Patent number: 6170172
    Abstract: A device and method cures an adhesive by means of UV radiation in an inert-gas atmosphere. The adhesive is interposed as an adhesive layer between two superposed layers of a disc-shaped optical information carrier. The device includes a UV source, a supply for an inert gas, and a holder for holding the information carrier in a centered position with respect to a centering axis. The inert-gas supply has discharge openings for inert gas, situated in a circular zone around the centering axis, at a distance from the centering axis which substantially corresponds to the radius of the peripheral edge of the information carrier, so that inert gas flows past the peripheral edge during curing. As a result locally present oxygen which would interfere with curing is expelled.
    Type: Grant
    Filed: March 22, 2000
    Date of Patent: January 9, 2001
    Assignee: U.S. Philips Corporation
    Inventors: Petrus H. G. M. Vromans, Remberto L. T. Martis, Paulus W. J. Brugel
  • Patent number: 6168743
    Abstract: A method and apparatus for steam-treating yarn, films, fibers, fiber tow and other polymeric articles is described. The apparatus includes a first orifice for generating minimum pressure areas and a second orifice to provide a sonic shock region operative to isolate the pressure in one chamber from the pressure in another chamber.
    Type: Grant
    Filed: June 15, 1999
    Date of Patent: January 2, 2001
    Assignee: Arteva North America S.A.R.L.
    Inventors: Glen Patrick Reese, James Richard Goodall
  • Patent number: 6128832
    Abstract: A system and method for providing conditioned air to a yarn traveling on a textile machine includes an air conditioning unit local to said textile machine and configured to receive input air and to condition the air to a first desired relative humidity. An air delivery conduit is in communication with the air conditioning unit and conveys the conditioned air therefrom. A diffuser is in communication with the delivery conduit so that the conditioned air flows into the diffuser. The diffuser defines a nonuniform opening so that the conditioned air leaves the diffuser in a turbulent flow. The opening is disposed at a predetermined distance from the yarn so that an air mixture, comprising the turbulent conditioned air and ambient air drawn into the turbulent flow, has a second desired relative humidity upon reaching the yarn.
    Type: Grant
    Filed: June 4, 1999
    Date of Patent: October 10, 2000
    Assignee: LTG Air Engineering, Inc.
    Inventor: Helmut Stueble
  • Patent number: 6108937
    Abstract: Methods and apparatuses are provided for cooling semiconductor substrates prior to handling. In one embodiment, a substrate and support structure combination is lifted after high temperature processing to a cold wall of a thermal processing chamber, which acts as a heat sink. Conductive heat transfer across a small gap from the substrate to the heat sink speeds wafer cooling prior to handling the wafer (e.g., with a robot). In another embodiment, a separate plate is kept cool within a pocket during processing, and is moved close to the substrate and support after processing. In yet another embodiment, a cooling station between a processing chamber and a storage cassette includes two movable cold plates, which are movable to positions closely spaced on either side of the wafer.
    Type: Grant
    Filed: September 10, 1998
    Date of Patent: August 29, 2000
    Assignee: ASM America, Inc.
    Inventor: Ivo Raaijmakers
  • Patent number: 6094840
    Abstract: A method for the heat treatment of textiles, particularly advantageous for textiles wound on cops or bobbins, comprises applying a vacuum to a steamer chamber in which the textiles have been placed. When a sufficient vacuum has been reached a treatment liquid is introduced and the vacuum source shut off maintains the vacuums. The treatment liquid is then heated to generate a saturated steam treatment for the textiles. The liquid and steam are then pumped out of the chamber and a vacuum re-instituted for evacuation, cooling and drying, after which the chamber is returned to ambient. Subsequent cycles may be performed with other liquid treatments. An apparatus for carrying out the method may be in the form of a closed system in which the vessels from which the liquid treatment are drawn are coupled to the treatment chamber to allow return of the liquids when the liquids are pumped out. Liquid loss is thus minimized and efficiency increased.
    Type: Grant
    Filed: May 13, 1999
    Date of Patent: August 1, 2000
    Assignee: Xorella AG
    Inventor: Freddy Wanger
  • Patent number: 6061927
    Abstract: A method in a dryer section of a paper or board machine for controlling curl of paper, in which steam treatment and/or moistening of the paper web is/are employed. The operations carried out in order to control the curl of the paper web are carried out in a number of stages when the web temperature is, during at least one stage, lower than 85.degree. C., preferably lower than 75.degree. C., and when the dry solids content of the web is in the range of K1-K2, wherein K1 is the ultimate dry solids content of the web -7% and K2 is the ultimate dry solids content +3%.
    Type: Grant
    Filed: April 6, 1999
    Date of Patent: May 16, 2000
    Assignee: Valmet Corporation
    Inventors: Vesa Ijas, Kari Juppi, Pasi Ahonen, Jaakko Kallioniemi
  • Patent number: 6038789
    Abstract: A method for controlling the curl of paper in which steam treatment and/or moistening of the paper web is/are carried out after the calendering process being performed in the calender. In processes in which calendering is not employed, the curl is controlled in connection with a machine reel-up or in process steps carried out after the machine reel-up. A paper or board machine applying the method includes a headbox, a former, a press, a dryer section and steam boxes, moistening devices, an IR dryer and/or equivalent curl control devices. The steam boxes, moistening devices, IR dryers and/or equivalent curl control devices for the control of the curl are arranged after the calender or, if no calender is employed, in connection with a machine reel-up or a finishing process carried out after the machine reel-up.
    Type: Grant
    Filed: May 15, 1998
    Date of Patent: March 21, 2000
    Assignee: Valmet Corporation
    Inventors: Juha Kaihovirta, Pekka Pakarinen, Matti Luontama
  • Patent number: 6035550
    Abstract: A method and apparatus of treating the BOG generated in low temperature liquid storage tanks are described, wherein the BOG is strongly adsorbed to and stored in a porous material by contacting the BOG with the porous material in the presence of a compound serving as a host.
    Type: Grant
    Filed: April 22, 1998
    Date of Patent: March 14, 2000
    Assignee: Tokyo Gas Co., Ltd.
    Inventors: Toshiharu Okui, Yuriko Maeda, Motoichi Ikeda
  • Patent number: 5987777
    Abstract: The invention relates to a dry end for drying a material web, in particular a paper or cardboard web, having at least one drying group with a plurality of drying cylinders and web guiding rollers and at least one nozzle device for transporting the threading part of the material web along a winding path by means of at least one conveyor band. The dry end is characterised in that groups of at least two nozzle devices (17, 19, 21) located at the same side of the material web (11) follow each other in the direction of transport of the material web (11).
    Type: Grant
    Filed: September 9, 1998
    Date of Patent: November 23, 1999
    Assignee: Voith Sulzer Papiermaschinen GmbH
    Inventors: Werner Goebel, Karlheinz Straub
  • Patent number: 5981022
    Abstract: A method for drying and/or curing a traveling web including a RF generating means for delivering RF through field and RF stray field to the web to heat the web, air bars to direct air flow to the web for cooling to facilitate emission of moisture therefrom and to avoid blistering due to overheating, an RF field generator to reflect RF energy to the web, and a control system to monitor and to control air temperature and/or flow, RF field strength, and/or web temperature to maintain a balance between heating and cooling to obtain efficient high speed drying while avoiding damage to the web.
    Type: Grant
    Filed: December 11, 1996
    Date of Patent: November 9, 1999
    Assignee: Avery Dennison Corporation
    Inventors: Kyung Min, John E. Johansen
  • Patent number: 5966836
    Abstract: A dryer (10, 200) is provided for use in drying freshly printed substrates such as corrugated sheets (14). A plurality of infrared heating lamps (28) are positioned below the travel path (16) of the corrugated sheets (14) and the heat lamps are physically separated from the corrugated sheets by glass panels (108, 110). Provisions are made for cooling the heat lamps by air flow. A plurality of air bars (40) are also provided with pressurized air to discharge air through ports (42) in the upper surfaces thereof for discharge against the corrugated sheet. Air discharged against the corrugated sheet and used to cool the heat lamps is collected and removed by a vacuum pump (48). This pump (48) is also used to remove moisture laden air which has been dislodged from the sheets by the combination of infrared heat and high pressure air.
    Type: Grant
    Filed: April 11, 1997
    Date of Patent: October 19, 1999
    Assignee: Howard W. DeMoore
    Inventors: Benito Valdez, III, Paul D. Copenhaver, John A. Aylor, Howard C. Secor
  • Patent number: 5771602
    Abstract: A method and device for drying a coating on a paper web or equivalent in which the direction of running of the paper web is turned, free of contact, by blowings produced by a turning device and the coating on the paper web is dried free of contact by blowings of drying devices placed at both sides of the paper web. The direction of running of the paper web is turned by drying blowings. The exhaust air of the turning device and drying device, which is placed at the side of the turning device, is removed from direct vicinity of the paper web or equivalent by a common exhaust device. The turning device and drying device are placed under and within a common box construction so that access of the exhaust air into the surrounding space is prevented. The device includes a turning device for turning the running direction of the paper web free of contact and a drying device for contact-free drying of the coating on the paper web.
    Type: Grant
    Filed: October 23, 1996
    Date of Patent: June 30, 1998
    Assignee: Valmet Corporation
    Inventors: Pertti Heikkila, Bertel Karlstedt
  • Patent number: 5714203
    Abstract: The invention relates to a procedure applicable for drying substrate surfaces of a large number of materials, such as semiconductors, metals, plastics and, in particular, silicon. The silicon (1) is dipped into a liquid bath (2) and the silicon (1) is separated from the liquid (3), the liquid of the bath (2) consisting of an aqueous HF solution (3) with a concentration between 0.001 and 50%. By adding a gas mixture containing O.sub.2 /O.sub.3 immediately after the drying process is finished, the silicon surface is hydrophilized. By adding a gas mixture containing O.sub.2 /O.sub.3 during the drying process, cleaning takes place as the ozone enters the solution on the liquid surface.
    Type: Grant
    Filed: August 5, 1996
    Date of Patent: February 3, 1998
    Assignee: Ictop Entwicklungs GmbH
    Inventors: Wilhelm Schellenberger, Dieter Herrmannsdorfer
  • Patent number: 5575084
    Abstract: A method and device for drying and/or cooling a paper web or equivalent in which the web is passed over the circumference of a revolving roll on support of a face of a support wire that faces the roll. The web is dried and/or cooled by means of a gas blown through openings in the mantle of the roll into a space between the outer face of the roll and the web supported by the support wire, whereby a support zone formed by pressurized gas is formed between the outer face of the roll and the web. Humidified gas is passed out of the support zone into the interior of the roll through other openings in the mantle of the roll into a system of exhaust ducts placed inside the roll.
    Type: Grant
    Filed: June 7, 1995
    Date of Patent: November 19, 1996
    Assignee: Valmet Corporation
    Inventor: Vesa Vuorinen
  • Patent number: 5569359
    Abstract: Blistering of a wet paper web upon a yankee dryer drum is controlled by directing compressed dry air toward the wet paper web in the space between a pressure roll external of the yankee dryer hood and the entry opening between the dryer hood and the yankee dryer drum. The flow of compressed air is controlled so that air flow can be modified across the full width of the wet paper web.
    Type: Grant
    Filed: March 28, 1995
    Date of Patent: October 29, 1996
    Assignee: James River Paper Company, Inc.
    Inventor: John R. Joiner
  • Patent number: 5548907
    Abstract: Several methods and apparatus for transferring heat, mass and momentum between a fluid and a surface are disclosed wherein the fluid is separated into a multiplicity of tiny jets that impinge upon a surface to be treated and flow across it for very short distances before reforming jets that leave the surface. While in contact with the surface, the fluid flow is laminar and the boundary layer that resists transfer of heat, mass and momentum is extremely thin. Hence, heat, mass and momentum transfer coefficients are large and predictable from first principles of physics. The pressure drop and fan power required to form these jets are generally less than that required to drive the flow parallel to the surface for long distances, where the boundary layer grows much thicker.
    Type: Grant
    Filed: August 30, 1993
    Date of Patent: August 27, 1996
    Assignee: Energy Innovations, Inc.
    Inventor: Meredith C. Gourdine