Special Gas Or Vapor Patents (Class 34/516)
  • Patent number: 9738845
    Abstract: A combustible pellet drying system includes a valveless pulse combustor and a drying column. The drying column includes a first drying region and optionally a second drying region. The first drying region receives heated drying gas from the pulse combustor to dry a quantity of moist pellets flowing downwardly through the drying column. Moisture-laden exhaust gas from the first drying region is processed by a condenser to remove water and recover thermal energy therefrom, and to produce a cooled dried exhaust gas which may be reheated by passing through a jacket around the pulse combustor. The reheated dry gas is introduced into the second drying region to further dry the pellets. The second drying region is preferably a downwardly expanding cone configuration. The drying column includes a plurality of temperature sensors. Adjacent temperature sensors may be used to determine a level of pellets within the drying column. The combustible pellets are preferably coal pellets.
    Type: Grant
    Filed: September 17, 2015
    Date of Patent: August 22, 2017
    Assignee: OMNIS THERMAL TECHNOLOGIES, LLC
    Inventor: David S. Gibbel
  • Patent number: 8793898
    Abstract: A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.
    Type: Grant
    Filed: May 22, 2008
    Date of Patent: August 5, 2014
    Assignee: Semes Co., Ltd.
    Inventors: Young-Ju Jeong, Bok-Kyu Lee, Sun-Kyu Hwang, Jeong-Yong Bae, Soo-Bin Yong
  • Patent number: 8567089
    Abstract: Disclosed are an evaporator, an evaporation method, and a substrate processing apparatus, which can increase the concentration of generated vapor of an organic solvent and efficiently heat the organic solvent. The evaporator includes a fluid tube, a liquid organic solvent supply device for supplying the organic solvent liquid to one end of the fluid tube, and heating units for heating the fluid tube. The fluid tube has a cross section that increases from the one end to the other end. When the organic solvent liquid supplied to one end of the fluid tube is heated, the organic solvent vapor is discharged from the other end of the fluid tube. The substrate processing apparatus includes the above-described evaporator.
    Type: Grant
    Filed: August 29, 2012
    Date of Patent: October 29, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Mikio Nakashima, Yuji Kamikawa
  • Publication number: 20130025155
    Abstract: Provided are an apparatus and method for treating a substrate. Specifically, provided are an apparatus and method for treating a substrate through a supercritical process. The apparatus includes: a housing providing a space for performing a process; a support member disposed in the housing to support a substrate; a supply port configured to supply a process fluid to the housing; a shield member disposed between the supply port and the support member to prevent the process fluid from being directly injected to the substrate; and an exhaust port configured to discharge the process fluid from the housing.
    Type: Application
    Filed: July 27, 2012
    Publication date: January 31, 2013
    Applicant: SEMES CO., LTD.
    Inventors: Boong Kim, Oh Jin Kwon, Sungho Jang, Joo Jib Park
  • Publication number: 20130000144
    Abstract: Provided are an apparatus for treating a substrate and a method for discharge a supercritical fluid, and more particularly, an apparatus for treating a substrate using a supercritical fluid and a method for discharging the supercritical fluid using the same. The apparatus for treating the substrate includes a container for providing a supercritical fluid, a vent line through which the supercritical fluid is discharged from the container, and a freezing prevention unit disposed in the vent line to prevent the supercritical fluid from being frozen.
    Type: Application
    Filed: June 29, 2012
    Publication date: January 3, 2013
    Applicant: SEMES CO., LTD.
    Inventors: YongHyun Choi, Kibong Kim, Woo Young Kim, Jeong Seon Park
  • Publication number: 20120324757
    Abstract: A method for drying workpieces includes immersing the workpieces in a liquid bath, raising the workpieces with a first holder until a central opening of the workpieces is visible above liquid surface, then using a dry second holder rod inserted through said central opening to continue raising process. Due to this, a drying portion of the workpiece is not held by a wet holding mechanism.
    Type: Application
    Filed: September 4, 2012
    Publication date: December 27, 2012
    Applicant: INVENPRO (M) SDN. BHD.
    Inventors: Kae Jeng NG, Kien Hui LIANG, Kien Yew LIANG
  • Publication number: 20120174431
    Abstract: Method of extracting syngas between the zone in a furnace where oxygen-starved combustion of biomass occurs and the zone in the furnace where secondary air is added to complete combustion, conditioning and cleaning the extracted syngas, and delivering it in a metered amount to the oxidizer or upstream of the oxidizer to reduce or eliminate the need for additional fossil fuels once the oxidizer has achieved its operating temperature. The gasifier or furnace burns solid waste and produces a syngas containing relatively high levels of CO, which is extracted from the furnace, conditioned, and introduced into an RTO as a fuel source. In certain embodiments, no extraction of syngas from the furnace takes place; the furnace conditions are manipulated so that normally undesirable levels of CO and other VOC's remain in the process stream. The heat from the furnace is used as intended (e.g., to heat a dryer), the stream is conditioned, and ultimately proceeds to a downstream RTO.
    Type: Application
    Filed: July 5, 2011
    Publication date: July 12, 2012
    Applicant: MEGTEC SYSTEMS, INC.
    Inventors: James T. Cash, Jeffrey C. Rudolph
  • Publication number: 20120107399
    Abstract: The present invention relates to a drying process of BIBW 2992 or the salts thereof, preferably the dimaleate salt, as well as of solid pharmaceutical formulations comprising BIBW2992 or a salt thereof, and to pharmaceutical compositions comprising BIBW 2992 or a salt thereof as the active product ingredient, characterized by a water activity of the formulation of not more than 0.20 or a water content (Karl-Fischer) of not more than 4.2%.
    Type: Application
    Filed: July 5, 2010
    Publication date: May 3, 2012
    Applicant: BOEHRINGER INGELHEIM INTERNATIONAL GMBH
    Inventor: Albert Barta
  • Patent number: 8156662
    Abstract: This invention discloses systems, apparatuses and methods for drying or dehydrating high moisture content feedstock to dry or low moisture products. The equipment systems comprise a gas turbine generator unit (preferred heat source), a dryer vessel and a processing unit, wherein the connection between the gas turbine and the dryer vessel directs substantially all the gas turbine exhaust into the dryer vessel and substantially precludes the introduction of air into the dryer vessel and wherein the processing unit forms the dried material from the dryer vessel into granules, pellets, flakes or other desired form for the final product. The systems, apparatuses and methods of this invention also provide for prevention of release of HAP, including VOC, emissions from manufacturing facilities in conjunction with or independent of the above treatment of high water content feedstock.
    Type: Grant
    Filed: October 28, 2009
    Date of Patent: April 17, 2012
    Assignee: Earthrenew, Inc.
    Inventors: Christianne Carin, Brian N. Gorbell, Christianne Carin, legal representative, Alvin W. Fedkenheuer, John S. Jonasson, Alexander Starosud
  • Publication number: 20110283758
    Abstract: This invention discloses systems and methods for conversion of high moisture waste materials to dry or low moisture products for recycle or reuse. The equipment systems comprise a gas turbine generator unit (preferred heat source), a dryer vessel and a processing unit, wherein the connection between the gas turbine and the dryer vessel directs substantially all the gas turbine exhaust into the dryer vessel and substantially precludes the introduction of air into the dryer vessel and wherein the processing unit forms the dried material from the dryer vessel into granules, pellets or other desired form for the final product. Optionally, the systems and methods further provide for processing ventilation air from manufacturing facilities to reduce emissions therefrom.
    Type: Application
    Filed: July 11, 2011
    Publication date: November 24, 2011
    Applicant: EarthRenew, Inc.
    Inventors: Christianne Carin, Brian N. Gorbell, Christianne Carin, Alvin W. Fedkenheuer, John S. Jonasson, Alexander Starosud
  • Publication number: 20110183503
    Abstract: There is disclosed a substrate processing apparatus including a processing chamber housing a substrate, pipes for supplying gas into the processing chamber, and heaters provided in the middle of the pipes, and heating the gas. In the substrate processing apparatus, the heaters heat the gas to a temperature lower than a temperature at which exhaust gas is generated from the pipes to dry the substrate in the heated gas.
    Type: Application
    Filed: March 31, 2011
    Publication date: July 28, 2011
    Applicant: FUJITSU SEMICONDUCTOR LIMITED
    Inventor: Tomokazu KAWAMOTO
  • Patent number: 7878112
    Abstract: Apparatus is described for storing sensitive materials in containers (32) which are sealed and in which the internal atmosphere may be purged by flushing with an inert gas fed in from a purger unit (30) via a suitable feed lead (35). The gas exhausted from inside the container (32) is fed back into the purge unit (30) and then checked against a desired parameter, for example oxygen concentration, until the value of that parameter reaches a desired level. Purging may then be stopped and the container left sealed, preferably at a slight over pressure relative to the ambient atmosphere. The use of a separate purge unit enables many containers to be sequentially and effectively processed. The containers are particularly useful for storing sensitive chemical and biological samples.
    Type: Grant
    Filed: January 30, 2006
    Date of Patent: February 1, 2011
    Assignee: Roylan Developments Limited
    Inventor: Stuart Naylor
  • Publication number: 20100139116
    Abstract: This invention discloses systems, apparatuses and methods for drying or dehydrating high moisture content feedstock to dry or low moisture products. The equipment systems comprise a gas turbine generator unit (preferred heat source), a dryer vessel and a processing unit, wherein the connection between the gas turbine and the dryer vessel directs substantially all the gas turbine exhaust into the dryer vessel and substantially precludes the introduction of air into the dryer vessel and wherein the processing unit forms the dried material from the dryer vessel into granules, pellets, flakes or other desired form for the final product. The systems, apparatuses and methods of this invention also provide for prevention of release of HAP, including VOC, emissions from manufacturing facilities in conjunction with or independent of the above treatment of high water content feedstock.
    Type: Application
    Filed: October 28, 2009
    Publication date: June 10, 2010
    Applicant: EARTHRENEW, INC.
    Inventors: Christianne Carin, Brian N. Gorbell, Christianne Carin, Alvin W. Fedkenheuer, John S. Jonasson, Alexander Starosud
  • Publication number: 20100083530
    Abstract: A method and apparatus for torrefaction of water containing cellulosic materials is performed in an inert atmosphere. The cellulosic material is cascaded through the apparatus between a plurality of rotatable trays vertically stacked within multiple processing zones. Steam being generated from heating of the cellulosic material is recycled back to the apparatus to provide an inert atmosphere. The steam may be superheated in a heat exchanger. Exhaust from the torrefaction zone of the apparatus has some moisture and other volatiles removed prior to being reheated in a burner. The heated exhaust is used in the heat exchanger to superheat the recycled steam.
    Type: Application
    Filed: June 15, 2009
    Publication date: April 8, 2010
    Applicant: Wyssmont Co. Inc.
    Inventors: Edward Weisselberg, Joseph Bevacqua, Robert Borre
  • Publication number: 20100043251
    Abstract: The invention relates to a heat treatment process for a material in an oven (4), such process using the combustion gases supplied by at least one burner (5) associated with a firebox (6). This process is characterised in that a first condensation phase is provided for the combustion gases between their exiting the firebox (6) and entering the oven (4), such condensation enabling part of the dust contained in the combustion gases to be eliminated, the first condensation phase being conducted using absorption refrigerating means (14) followed by a superheating phase of the combustion gas allowing the required temperature to be obtained for the heat treatment. The invention also relates to a treatment unit implementing such process. The process is more particularly applicable to the heat treatment of wood.
    Type: Application
    Filed: October 22, 2007
    Publication date: February 25, 2010
    Applicant: NEXTER MUNITIONS
    Inventor: Patrick Delaine
  • Publication number: 20100000119
    Abstract: To provide a cement burning apparatus and a method of drying high-water-content organic waste capable of reducing a danger of explosion at a facility for drying; avoiding decreased value of dried sludge as a fuel: and more efficiently drying high-water-content organic waste. The cement burning apparatus 1 comprises a dryer 6 for drying high-water-content organic waste of which water content is 40 mass percent or more, in which combustion gas extracted from outlet portions or ceiling portions of preheater cyclones 3A to 3D of a cement kiln 2 is fed to the dryer 6. As the dryer 6, a grinding-type flash dryer, which directly contacts the combustion gas G with the high-water-content organic waste W while grinding it, can be used.
    Type: Application
    Filed: June 26, 2007
    Publication date: January 7, 2010
    Inventors: Naoki Ueno, Yoshihito Izawa, Hiroyuki Takano, Hirofumi Mori
  • Publication number: 20090193679
    Abstract: A method for roasting a load of plant biomass, includes the following stages: generation of a treatment gas stream by a thermal generating apparatus, the treatment gas stream being an inert gas consisting essentially of CO2; generation of a bed of material at high temperature, called the thermal base; treatment of the load of biomass with the treatment gas stream, the treatment gas stream being laden with gaseous components including a water steam and volatile organic compounds originating from the load of biomass during the treatment; and recycling of at least a portion of the water steam by passing at least a portion of the laden gas stream through the thermal base.
    Type: Application
    Filed: June 28, 2007
    Publication date: August 6, 2009
    Inventor: Raymond Guyomarc'h
  • Publication number: 20090188127
    Abstract: This invention discloses systems and methods for conversion of high moisture waste materials to dry or low moisture products for recycle or reuse. The equipment systems comprise a gas turbine generator unit (preferred heat source), a dryer vessel and a processing unit, wherein the connection between the gas turbine and the dryer vessel directs substantially all the gas turbine exhaust into the dryer vessel and substantially precludes the introduction of air into the dryer vessel and wherein the processing unit forms the dried material from the dryer vessel into granules, pellets or other desired form for the final product. Optionally, the systems and methods further provide for processing ventilation air from manufacturing facilities to reduce emissions therefrom.
    Type: Application
    Filed: March 27, 2009
    Publication date: July 30, 2009
    Applicant: EarthRenew, Inc.
    Inventors: Brian N. Gorbell, Christianne Carin, Alvin W. Fedkenheuer, John S. Jonasson, Alexander Starosud
  • Publication number: 20090183424
    Abstract: This invention discloses systems and methods for conversion of high moisture waste materials to dry or low moisture products for recycle or reuse. The equipment systems comprise a gas turbine generator unit (preferred heat source), a dryer vessel and a processing unit, wherein the connection between the gas turbine and the dryer vessel directs substantially all the gas turbine exhaust into the dryer vessel and substantially precludes the introduction of air into the dryer vessel and wherein the processing unit forms the dried material from the dryer vessel into granules, pellets or other desired form for the final product. Optionally, the systems and methods further provide for processing ventilation air from manufacturing facilities to reduce emissions therefrom.
    Type: Application
    Filed: March 27, 2009
    Publication date: July 23, 2009
    Applicant: EARTHRENEW, INC.
    Inventors: Brian N. Gorbell, Christianne Carin, Alvin W. Fedkenheuer, John S. Jonasson, Alexander Starosud
  • Publication number: 20080295355
    Abstract: A method of increasing the efficiency of a drier, particularly a stream drier for loose and flammable materials, particularly cut tobacco, working with a gaseous drying agent under a working pressure from 5 kpa to 10 MPa, measured as an absolute pressure, preferably the drying agent being superheated steam. A pressurized process gas, preferably waste steam, particularly coming from the interior of the drier, is passed through a dosing-separating valve, preferably a rotary vane feeder (1?) mounted behind the stream drier (2), particularly through its movable section with the dried material being emptied therefrom, the steam being returned from a release valve (10) for reusing it in the process of diluting the air, the steam being regarded as a technology waste product.
    Type: Application
    Filed: May 21, 2008
    Publication date: December 4, 2008
    Inventor: Marek Sieredzinski
  • Publication number: 20080277027
    Abstract: A thermal method for stabilizing a load of wood, in particular timber, including: a phase of treatment of the load of wood in a treatment kiln by a gaseous treatment flow; generation of a gaseous treatment flow at high temperature from a heat generator independent of the treatment kiln and recovery of the loaded gaseous flow after treatment.
    Type: Application
    Filed: May 13, 2005
    Publication date: November 13, 2008
    Inventors: Jean-Pierre Bernon, Alain Dulac, Raymond Guyomarc'h
  • Patent number: 6880265
    Abstract: The present invention provides: a method of drying metallic waste having pyrophoric tendencies (liable to catch fire and/or explode), said waste being for compacting; an apparatus for drying said waste, the apparatus including a compacting canister and being suitable for implementing said drying method; and a canister for compacting said waste, the canister being particularly adapted to implementing said drying method.
    Type: Grant
    Filed: July 3, 2003
    Date of Patent: April 19, 2005
    Assignee: Compagnie Generale des Matieres Nucleaires
    Inventors: Maurice Ladre, Serge Le Cocq, GĂ©rard Limeuil
  • Patent number: 6576066
    Abstract: According to a supercritical drying method of this invention, a substrate having a pattern is dipped in water and rinsed with water. Then, the substrate is placed in the reaction chamber of a predetermined sealable vessel, and surfactant-added liquid carbon dioxide is introduced into the reaction chamber. The substrate is dipped in surfactant-added liquid carbon dioxide, and liquid carbon dioxide is changed to the supercritical state. After that, supercritical carbon dioxide is gasified.
    Type: Grant
    Filed: November 28, 2000
    Date of Patent: June 10, 2003
    Assignee: Nippon Telegraph and Telephone Corporation
    Inventor: Hideo Namatsu
  • Patent number: 6463672
    Abstract: The process of mitigation of spacecraft surface charging using ionized water vapor is used, since it helps taking excess surface electrons away from a spacecraft surface, leaving practically no residue after complete evaporation.
    Type: Grant
    Filed: July 3, 2000
    Date of Patent: October 15, 2002
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventors: Shu T. Lai, Edmond Murad
  • Patent number: 6449873
    Abstract: Disclosed is a dry cleaning apparatus and method using cluster for cleaning a surface of a specimen such as semiconductor wafer. The cleaning method first forms a neutral cluster no having polarity by passing a cleaning gas such as argon, nitrogen, or carbon dioxide gas through a sand glass-shaped nozzle. The formed neutral cluster is injected at an acute angle with respect to a surface of the specimen, thereby removing particles or organic remnants attached on the surface of the specimen without damaging the surface of the specimen.
    Type: Grant
    Filed: September 25, 2000
    Date of Patent: September 17, 2002
    Assignee: Dasan C & I Co., Ltd.
    Inventors: Deok-Joo Yoon, Myeon-Chang Sung, Kwang-Ho Jeong
  • Patent number: 6408538
    Abstract: A method of sterilizing musical instruments is provided. More particularly, a method of sterilizing musical wind instruments and accessories related thereto is provided for sterilizing, or at least sanitizing, musical wind instruments and accessories without damaging or degrading components of such instruments and accessories constructed of cloth, wood, plastic, rubber or fibrous materials. The method of the invention uses a gas diffusion process and a gas sterilant, such as ethylene oxide. A musical wind instrument and/or an accessory is placed in a gas diffusion bag and a sterilizing atmosphere is created within the gas diffusion bag by releasing ethylene oxide into the gas diffusion bag at a sufficient concentration to act as a sterilant. Ethylene oxide is heated to an appropriate temperature and maintained at such temperature for a sufficient time to achieve sterilization, or at least sanitization, of the musical wind instrument and/or accessory contained therein.
    Type: Grant
    Filed: September 14, 2001
    Date of Patent: June 25, 2002
    Inventor: Lorenzo Lepore
  • Patent number: 6398875
    Abstract: A process of drying a semiconductor wafer which includes at least one microelectric structure disposed thereon which includes contacting a water-containing thin film-covered semiconductor wafer with a composition which includes liquid or supercritical carbon dioxide and a surfactant.
    Type: Grant
    Filed: June 27, 2001
    Date of Patent: June 4, 2002
    Assignee: International Business Machines Corporation
    Inventors: John Michael Cotte, Dario L. Goldfarb, Kenneth John McCullough, Wayne Martin Moreau, Keith R. Pope, John P. Simons, Charles J. Taft
  • Patent number: 6387158
    Abstract: A method of removing moisture efficiently in the gas supply system by evacuation at normal temperature without using the baking method. The method involves flowing a gas to remove moisture in the gas supply system with the flow pressure of the gas to remove moisture set at not lower than a minimum pressure at which the gas flow becomes viscous and not higher than a water saturated vapor pressure at a flow temperature of the gas to remove moisture. The gas to remove moisture achieves a viscous flow when a mean free path of gas molecules is smaller than a diameter of piping of the gas supply system. If the gas for removing moisture is evacuated at normal temperature under such conditions, the adsorbed moisture on an inside surface of the piping and in the valves and filters can be removed effectively.
    Type: Grant
    Filed: May 4, 2001
    Date of Patent: May 14, 2002
    Assignee: Fujikin Incorporated
    Inventors: Nobukazu Ikeda, Akihiro Morimoto, Yukio Minami, Teruo Honiden, Kouji Kawada, Katunori Komehana, Touru Hirai, Michio Yamaji
  • Patent number: 6357141
    Abstract: An evaporating system for evaporating solvents from chemical samples held in supply plates, which accelerate evaporation by warming the samples in a hot air bath. The system includes adapters to allow the use of supply plates of varying heights, such as either standard micro-plates or deep well micro-plates.
    Type: Grant
    Filed: March 13, 2000
    Date of Patent: March 19, 2002
    Assignee: Zymark Corporation
    Inventors: Paul A. Kearsley, Tye Fowler, Barry T. Hixon
  • Patent number: 6345449
    Abstract: A method of sterilizing musical instruments is provided. More particularly, a method of sterilizing musical wind instruments is provided for sterilizing, or at least sanitizing, musical wind instruments without damaging or degrading components of such instruments constructed of cloth, wood, plastic, rubber or fibrous materials. The method of the invention uses a gas diffusion process and a gas sterilant, such as ethylene oxide. A musical wind instrument is placed in a gas diffusion bag and a sterilizing atmosphere is created within the gas diffusion bag by releasing ethylene oxide into the gas diffusion bag at a sufficient concentration to act as a sterilant. Ethylene oxide is heated to an appropriate temperature and maintained at such temperature for a sufficient time to achieve sterilization, or at least sanitization, of the musical wind instrument contained therein.
    Type: Grant
    Filed: August 9, 2000
    Date of Patent: February 12, 2002
    Inventor: Lorenzo Lepore
  • Publication number: 20010029681
    Abstract: A system (10) is disclosed for cleaning a vertical furnace (12) pedestal (34) and cap (36) including at least one inlet conduit (40) in fluid communication with a pressurized cleaning medium source (46). The system also includes at least one exhaust conduit (42) in fluid communication with a negative pressure source (48). A boat assembly (30) may be positioned such that the at least one conduit (40) is operable to direct cleaning medium at the boat assembly (30) to dislodge contaminate particles associated with the boat assembly. The exhaust outlet (42) then evacuates the cleaning medium and any dislodged contaminate particles. The system may operate automatically within a closed processing environment and after each process cycle.
    Type: Application
    Filed: December 14, 2000
    Publication date: October 18, 2001
    Inventors: William Pressnall, Frank D. Poag, Richard L. Guldi
  • Patent number: 6256905
    Abstract: A system for shipping perishable product in a controlled atmosphere environment, by means of various transport containers and/or vehicles. Quantifies of the product are placed in flexible containers or bags having a controlled atmosphere inlet and a gas outlet, to form shipping units. The shipping units are placed in a containing section of the transport vehicle or structure, and the individual shipping units are supplied with the controlled atmosphere gas from a suitable gas source or sources having a gas regulator or regulators. During shipment and storage, controlled atmosphere gas is directed into the shipping units as needed to maintain the proper atmosphere within the shipping units. When arriving at a destination, the quantities of perishable product are either removed from the shipping units, or kept in the shipping units for further storage and/or shipment.
    Type: Grant
    Filed: February 11, 2000
    Date of Patent: July 10, 2001
    Inventor: Galen White
  • Patent number: 6226889
    Abstract: The present invention relates to a method and apparatus for use in removing at least one volatile contaminant from contaminated material by using a rotary vacuum retort during high temperature and vacuum processing. The loading and unloading are performed in a manner that minimizes the introduction of low boiling point gases. The apparatus employs, in one preferred embodiment, elastomeric pinch valve airlocks to isolate the entire system between the airlocks and a vacuum generator. The apparatus employs, in another preferred embodiment, at least one material transfer element. Furthermore, the contaminated material may be dried in a dryer prior to introduction into the retort. Moreover, the decontaminated material can be cooled through a heat exchanger prior to discharge.
    Type: Grant
    Filed: March 7, 2000
    Date of Patent: May 8, 2001
    Assignee: SepraDyne Corporation
    Inventors: Randy A. Aulbaugh, Gregory G. Hawk
  • Patent number: 6192600
    Abstract: A process and apparatus for drying semiconductor wafers includes the controlled-rate extraction of a wafer immersed in rinsing liquid, irradiation of the wafer using high intensity lights or filaments along the wafer-liquid interface, and delivery of gas streams against the wafer along the wafer-liquid interface using a gas delivery system. Heating is controlled to create a temperature gradient without evaporating rinsing fluid adhering to surfaces of the wafer. Heating by the radiation sources creates a temperature gradient in the wafer in the irradiated region that simultaneously generates a surface tension gradient in the water adhering to the wafer. The gas delivery system removes the bulk of the water adhering to the wafer surface, and also suppresses the height of the rinsing liquid adhering to the wafer, providing faster extraction of dry and highly clean wafers from the rinsing liquid. A solvent vapor is optionally injected at the wafer-liquid interface, to reduce adhesion of the liquid to the vapor.
    Type: Grant
    Filed: September 9, 1999
    Date of Patent: February 27, 2001
    Assignee: Semitool, Inc.
    Inventor: Eric J. Bergman
  • Patent number: 6148542
    Abstract: A method of manufacturing an information carrier which cures an adhesive by means of UV radiation in an inert-gas atmosphere. The adhesive is interposed as an adhesive layer between two superposed layers of a disc-shaped information carrier. The device includes a UV source, a supplier for an inert gas, and a holder for holding the information carrier in a centered position with respect to a centering axis. The inert-gas supplier has discharge openings for inert gas, situated in a circular zone around the centering axis, at a distance from the centering axis which substantially corresponds to the radius of the peripheral edge of the information carrier, so as to cause inert gas to flow past the peripheral edge during curing, as a result of which locally present oxygen which would interfere with curing is expelled.
    Type: Grant
    Filed: March 1, 2000
    Date of Patent: November 21, 2000
    Assignee: U.S. Philips Corporation
    Inventors: Petrus H. G. M. Vromans, Remberto L. T. Martis, Paulus W. J. Brugel
  • Patent number: 6134806
    Abstract: A portable sport equipment bag having an air distributor is connected with a hose to blower and ozone generator operable to move air and ozone under pressure into the air distributor. The air distributor has one or more manifolds located within the bag. The manifolds have a plurality of holes to allow air and ozone in the manifolds to flow into the bag to dry sport equipment and objects within the bag and destroy bacteria, molds and fungus in the bag. One or more air filters mounted on the bag remove odors and foreign matter from the air flow from the bag into the environment adjacent the bag.
    Type: Grant
    Filed: August 3, 1999
    Date of Patent: October 24, 2000
    Inventor: Gregory L. Dhaemers
  • Patent number: 6105275
    Abstract: The present invention relates to a method and apparatus for use in continuously loading material to be treated into a rotary vacuum retort and continuously unloading one or more vapors or similar volatile substances and treated material out of the rotary vacuum retort during high temperature and high vacuum processing. The loading and unloading are performed in a manner that minimizes the introduction of low boiling point gases. The apparatus employs, in one preferred embodiment, elastomeric pinch valve airlocks to isolate the entire system between the airlocks and a vacuum generator. Furthermore, the material being treated may be dried in a dryer prior to introduction into the retort. Moreover, the processed material can be cooled through a heat exchanger to permit the use of a low temperature pinch valve airlock on the discharge end of the process.
    Type: Grant
    Filed: March 19, 1999
    Date of Patent: August 22, 2000
    Assignee: SepreDyne Corporation
    Inventors: Randy A. Aulbaugh, Gregory G. Hawk
  • Patent number: 6029371
    Abstract: A drying treatment apparatus for drying cleaned semiconductor wafers comprises drying gas producing means (41) connected to a drying treating unit (30) through a drying gas supplying pipe line (32). A flowrate controlling diaphragm pump (50) is provided in an isopropyl alcohol (IPA) supplying pipe line (32) that connects an IPA tank (48) and the drying gas producing means (41). An N.sub.2 gas supply source (52) is provided for supplying nitrogen gas into the drying gas producing means (41), and a heater (44) is disposed within the drying gas producing means to produce a drying gas. As a result of this, the amount of the IPA supplied to the drying gas producing means (41) by the diaphragm pump (50) is controllable, thus enabling the concentration of the IPA contained in the drying gas to be maintained at a value within a range of from 3% to 80%, inclusive, and enabling the temperature of the drying gas to be maintained at a value within a range of from 80.degree. to 150.degree.
    Type: Grant
    Filed: September 16, 1998
    Date of Patent: February 29, 2000
    Assignee: Tokyo Electron Limited
    Inventors: Yuji Kamikawa, Teruomi Minami, Shigenori Kitahara
  • Patent number: 5943880
    Abstract: A refrigerant is directly contacted to a substrate to be processed that was heated so as to quickly cool the substrate. Thus, the temperature of the substrate is dropped to a predetermined temperature level. The substrate is cooled by a cooling device and cooling water. Thus, the cooling temperature can be accurately controlled. In addition, the substrate can be effectively cooled.
    Type: Grant
    Filed: February 13, 1998
    Date of Patent: August 31, 1999
    Assignee: Tokyo Electron Limited
    Inventor: Kiyohisa Tateyama
  • Patent number: 5644855
    Abstract: A portable contamination-sensitive component transport container provides a continuously purged environment for the components. The container includes an attached cryogenically liquefied inert gas insulated storage vessel from which vaporized liquefied inert gas is used to generate a gaseous nitrogen purge to the container.
    Type: Grant
    Filed: April 6, 1995
    Date of Patent: July 8, 1997
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Wayne Thomas McDermott, Richard Carl Ockovic, Robert William Wimmer, II
  • Patent number: 5551165
    Abstract: Methods are providing for cleansing contaminants from substrates, such as semiconductor wafer handling implements, and thereby reduce the incidence of contamination of semiconductor devices being assembled upon the semiconductor wafers. In one aspect of the invention, a substrate such as a semiconductor cassette or other semiconductor wafer handling implement, is inserted into a chamber that is substantially isolated from a surrounding environment. A pressurized, and optionally purified, cleansing medium is directed against at least one surface of the substrate to dislodge contaminants from the substrate surface. Dislodged contaminants are evacuated with negative pressure from the chamber. In a preferred aspect of the invention, the cleansing medium is an inert gas, such as nitrogen, and is applied to the substrate at a pressure from about 10 p.s.i. to about 100 or more p.s.i.
    Type: Grant
    Filed: April 13, 1995
    Date of Patent: September 3, 1996
    Assignee: Texas Instruments Incorporated
    Inventors: Virgil Q. Turner, William D. Light, Hilario T. Trevino, Richard L. Guldi, Frank Poag, Douglas E. Paradis
  • Patent number: 5479727
    Abstract: The present invention is a process of removal of moisture from surfaces, such as metal conduit for transmission of high purity gases in electronic component fabrication facilities, and the passivation of such metal surfaces to retard the readsorption of moisture, wherein the moisture removal and passivation is enhanced using an agent of the formula: R.sub.a SiX.sub.b Y.sub.c Z.sub.d where a =1-3; b, c, and d are individually 0-3 and a+b+c+d=4; R is one or more organic groups; and at least one of X, Y or Z have a bond to silicon that is readily hydrolyzable. The moisture removal and passivation is conducted at less than 65.degree. C. and at least ambient pressure.
    Type: Grant
    Filed: October 25, 1994
    Date of Patent: January 2, 1996
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Stephen M. Fine, Andrew D. Johnson, John G. Langan
  • Patent number: 5454177
    Abstract: A process for the treatment of objects with an inflammable volatile liquid, in an installation comprising at least one upwardly open tank (16) adapted to be filled with the liquid, a drying device (20) adapted to remove contained treatment liquid from the treated objects, and a transport system adapted to bring an object to be treated above the tank, and to immerse it in the tank, to withdraw it, and to transfer it into the drying device, then to remove it. The tank and the drying device are disposed in a closed chamber (2, 4) containing an atmosphere comprised principally of a protective gas, with an oxygen content maintained sufficiently low that the ignition of the treatment liquid will be impossible. This chamber is separated from the exterior by at least one gas lock (1, 5) containing the same atmosphere. The object to be treated passes through the gas lock to enter the chamber and by the same or another gas lock to be removed.
    Type: Grant
    Filed: February 17, 1994
    Date of Patent: October 3, 1995
    Assignee: L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude
    Inventor: Bertrand Dutournier
  • Patent number: 5440824
    Abstract: The interior of a gas cylinder is cleaned using a supercritical fluid. A treating material, such as carbon dioxide, is injected into the cylinder, and the pressure in the cylinder is increased until the pressure of the treating material exceeds its critical pressure. Then, the cylinder is heated until the temperature of the treating material exceeds its critical temperature. The treating material therefore becomes a supercritical fluid. The treating material is maintained in its supercritical state while the cylinder is rolled for a period of time, while the supercritical fluid dissolves contaminants on the interior surface of the cylinder, and on objects within the cylinder. Then, the supercritical fluid is vented from the cylinder, preferably while the fluid in the cylinder is maintained in its supercritical state.
    Type: Grant
    Filed: September 21, 1993
    Date of Patent: August 15, 1995
    Assignee: MG Industries
    Inventors: Sivaramasubramanian Ramachandran, Alfred U. Boehm
  • Patent number: 5333394
    Abstract: A controlled atmosphere container system for shipping and storing perishable products, wherein the container system includes a plurality of individual, transportable containers to be connected from time to time with a central source for providing a controlled atmosphere to those containers. A controller preferably enables the container system to optimally allocate the capacity of the central source of the controlled atmosphere based upon the relative atmospheric conditions of the containers attached thereto and the capacity of the source. Such control is provided in the form of a predetermined hierarchy of priorities for allocating the controlled atmosphere gas to the individual containers.
    Type: Grant
    Filed: June 17, 1993
    Date of Patent: August 2, 1994
    Assignee: Chiquita Brands, Inc.
    Inventors: Robert W. Herdeman, Taras A. Kowalczyn, Charles R. Graham, John Herzstein