Abstract: A semiconductor substrate processing apparatus comprises a ball screw showerhead module adjuster assembly for adjusting the planarization of a showerhead module of the apparatus. The ball screw showerhead module adjuster assembly comprises a collar supported in a stepped opening of a top plate; a bellows forms an airtight seal between the collar and an adjuster plate supported above the collar by at least three adjustable ball screws operable to adjust the planarization of the adjuster plate with respect to the collar. An insulating sleeve extends through an opening in the collar, the bellows, and the adjuster plate. A stem of the showerhead module is supported in an opening of the insulating sleeve by a nut assembly such that the stem is supported and aligned within the insulating sleeve so that an adjustment of planarization of the adjuster plate thereby adjusts the planarization of the faceplate of the showerhead module.

Abstract: A process and a device for continuously drying protein-containing sludge, in particular sewage sludge, in a fluidised bed (20) inside a drying container (13). A drying gas flows through the fluidised bed (20) while partially de-watered sludge (6) in granulate form (21) is added to the fluidised bed (20) while dried sludge (10) is withdrawn therefrom. The granules (21) are formed without admixture of dried substances and are granulated preferably at the same time as they are pressed. Sewage sludge may thus be dried without admixture or recycling of dried substances, so that a highly efficient plant is obtained. In addition, a granulated dry material is produced which may be used in various ways.