Abstract: The invention relates to a heating system (38) for warming a gaseous treatment medium (30, 40) for a device for treating a preferably strip-shaped article (12) by means of a gaseous treatment medium (40), comprising a heating device, a mixing chamber (54) for mixing at least one first, gaseous heating medium (49) heated by means of the gas burner, and the gaseous treatment medium (30) already used for treatment and recycled by the device. Said gaseous heating medium (49) can be introduced into the mixing chamber (54) such that when the gaseous medium (49) is introduced into the mixing chamber (54), vortexes are produced in the mixing chamber (54), which generate an intensive thorough-mixing of the gaseous heating medium (49) with the recycled gaseous treatment medium (30).

Abstract: Embodiments of the invention generally provide a multistage semiconductor processing tool, wherein the processing tool includes a first transfer chamber having a first substrate transfer robot positioned therein and at least one load lock chamber in communication with the first transfer chamber. The at least one load lock is generally configured to communicate substrates into and out of the first transfer chamber. Further, the processing tool includes at least one substrate cleaning chamber positioned in communication with the first transfer chamber. The at least one substrate cleaning chamber generally includes a substrate support member, a broadband actuation device in communication with the substrate support member, and a particle removal device configured to sweep away dislodged particles from an area proximate the substrate surface.

Abstract: An apparatus for agitating a workpiece in a high pressure environment comprises a workpiece holder, a bearing, a pressure chamber housing, and a nozzle. The workpiece holder couples to the pressure chamber housing via the bearing. The nozzle couples to the pressure chamber housing. The workpiece holder comprises protrusions and a region for holding the workpiece. In operation a fluid exits the nozzle and impinges the protrusions of the workpiece holder causing the workpiece holder to rotate, which agitates the workpiece.

Abstract: A centrifugally rotating clothes hanger includes a motor for rotating the hanger, the centrifugal force resulting from rotation of the hanger being used to swing water off the clothes and assist in drying the clothes due to the wind-drying effect caused by rotation-induced airflow.