Abstract: The softgel drying machine comprises a casing, an air channel, a drying chamber, an air return channel, a tumbler and an air-drying system. The casing comprises an air circulation chamber and an air generation chamber. The drying chamber comprises at least one air supply opening and at least one air returning plate. The air-drying system comprises at least one air blower fan, a dehumidification module and an air return cooling module. The air blower fan comprises an air blower inlet port, an air blower outlet port, a chiller and an air supply duct. The chiller is coupled to the air blower outlet port. The air return cooling module comprises an air return duct, an air return inlet port and an air return outlet port. The air return inlet port is airtightly coupled to the air return channel through the air return duct.

Abstract: Disclosed herein is a method of controlling a laundry treating apparatus, if a user selects a uniform course, including performing a preheating operation of a heater to generate steam, performing a first cooling operation to operate a blower unit and a moving hanger after the preheating operation has been terminated, performing a steam operation to operate the blower unit and a steam unit and to circulate steam to a treating chamber after the first cooling operation has been terminated, performing a standby operation to operate the blower unit after the steam operation has been terminated, performing a second cooling operation to operate the blower unit after the standby operation has been terminated, and performing a drying operation to operate the blower unit and a heat pump unit and to provide heat to the treating chamber to dry the treating chamber after the second cooling operation has been terminated.

Abstract: Disclosed herein is a method of controlling a laundry treating apparatus, if a user selects a uniform course, including performing a preheating operation of a heater to generate steam, performing a first cooling operation to operate a blower unit and a moving hanger after the preheating operation has been terminated, performing a steam operation to operate the blower unit and a steam unit and to circulate steam to a treating chamber after the first cooling operation has been terminated, performing a standby operation to operate the blower unit after the steam operation has been terminated, performing a second cooling operation to operate the blower unit after the standby operation has been terminated, and performing a drying operation to operate the blower unit and a heat pump unit and to provide heat to the treating chamber to dry the treating chamber after the second cooling operation has been terminated.

Abstract: Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.

Abstract: The present invention relates to a method for acting on the temperature of a travelling strip (4) by blowing gas or a water/gas mixture, whereby a plurality of jets of gas or a water/gas mixture, extending toward the surface of the strip and arranged in such a way that the impacts (24, 34) of the jets of gas or water/gas mixture on each surface of the strip are distributed at the nodes of a two-dimensional network, are sprayed onto each face of the strip. The impacts (24) of the jets on one face (A) are not opposite the impacts (34) of the jets on the other face (B), and the jets of gas or water/gas mixture come from tubular nozzles (23, 33) which are supplied by at least one distribution chamber (21, 31) and extend at a distance from the distribution chamber in such a way as to leave a free space for the flow of the returning gas or water/gas mixture parallel to the longitudinal direction of the strip and perpendicular to the longitudinal direction of the strip.

Abstract: Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a wafer carrier track for levitating and traversing a wafer carrier within a vapor deposition reactor system is provided which includes upper and lower sections of a track assembly having a gas cavity formed therebetween. A guide path extends along an upper surface of the upper section and between two side surfaces which extend along and above the guide path and parallel to each other. A plurality of gas holes along the guide path extends from the upper surface of the upper section, through the upper section, and into the gas cavity. In some examples, the upper and lower sections of the track assembly may independently contain quartz, and in some examples, may be fused together.

Abstract: Methods of selectively and epitaxially forming a silicon-containing material on a substrate surface contained within a process chamber are provided. In one or more embodiments, the pressure in the process chamber is reduced during deposition of material on the substrate and increased during etching of material from the substrate. According to an embodiment, process gases are flowed into the chamber through first zone and a second zone to provide a ratio of the amount of gas flowed to the first zone and the amount of gas flowed to the second zone. In one or more embodiments, the first zone is an inner radial zone and the second zone is an outer radial zone, and ratio of inner zone gas flow to outer zone gas flow is less during deposition than during etching. According to one or more embodiments, the selective epitaxial process includes repeating a cycle of a deposition and then an etching process, and an optional purge until the desired thickness of an epitaxial layer is grown.

Abstract: Systems and methods for a dryer unit of a printer. In one embodiment, a dryer unit includes a light source having a plurality of lamps. The dryer unit further includes a controller that associates a target output power with each of the lamps of the light source. When in operation, the controller determines a speed of a printable medium that passes through the dryer unit. The controller is able to vary an intensity of light generated by the light source based on the speed of the printable medium by varying which of the lamps of the light source are energized to their target output power.

Abstract: A drying system of a coated continuous film equipped with roller conveyor devices of the continuous film that allow easy and rapid removal of the rollers from the system to facilitate cleaning and maintenance operations. The conveyor roller is substantially separable into two parts with at least one of the two support shafts separable from the rest of the roller to facilitate the disassembly and reassembly operations of the conveyor roller from and on the system. In this way, it is unnecessary to remove all the motion transmission elements connected to one of the two support shafts.

Abstract: Systems and methods are provided for drying print media. The system comprises a dryer comprising an enclosure and a roller. The roller is proximate to an opening into the enclosure. A perimeter of the roller covers a portion of the opening, and an uncovered portion of the opening comprises a gap for a web of print media. The gap has a size defined on one side by the perimeter of the roller and on another side by a surface of the opening.

Abstract: Disclosed is an air knife chamber constructed such that water flowing down along a partition wall is allowed to fall in front of a slit. Due to this construction, the water can be effectively removed by air knives, thus contributing to a reduction in the defective proportion of substrates.

Abstract: The present invention discloses a cleaning apparatus for glass substrate, and which includes an air knife and a conveying device. The air knife is used to dry the glass substrate. The conveying device includes a primary roller set for carrying and advancing the glass substrate, and an auxiliary roller set which is arranged before the air knife and above the primary roller set. The glass substrate is fed and advanced jointly by the operation of the primary roller set and the auxiliary roller set. By this arrangement, the damage rate of the glass substrate can be lowered, while the yield of the glass substrate can be increased.

Abstract: The invention provides an apparatus including: a rotatable belt having an outer surface and an inner surface, the outer surface partially coming into contact with a sheet; a plurality of rollers being arranged in a direction of movement of the sheet and including a first roller and a second roller adjacent to each other, the plurality of rollers being pressed against the outer surface and the moving sheet being nipped between the plurality of rollers and the outer surface; a blowing mechanism configured to blow hot air from between the first roller and the second roller toward the sheet; and a heating unit including a heater and a contact surface coming into contact with the inner surface, the heating unit being configured to be able to set the contact surface thereof to have a predetermined non-uniform temperature distribution.

Abstract: A system and process for removing an inorganic salt from a catalyst roaster belt is disclosed. The system includes an apparatus with a drying vessel having a catalyst roaster belt inlet, a catalyst roaster belt outlet, a heating medium inlet, and a heating medium outlet, wherein the catalyst roaster belt inlet and the catalyst roaster belt outlet are spaced apart along a first direction, the heating medium inlet and the heating medium outlet are spaced apart along a second direction, the heating medium inlet is spaced apart from the catalyst roaster belt inlet in the second direction, and the catalyst roaster belt inlet is between the heating medium inlet and the heating medium outlet along the second direction. The system includes an acid bath and a moveable catalyst roaster belt extending from the acid bath through the catalyst roaster belt inlet and through the catalyst roaster belt outlet.

Abstract: A blow drying mechanism for drying plate-like members with pressurized air is disclosed. The blow drying mechanism includes an air inlet wall defining at least one inlet and an air outlet wall defining at least one outlet communicating with the at least one inlet. The at least one outlet is an elongated slot.

Abstract: The present disclosure provides a drying device for drying a glass substrate with alignment liquid sprayed thereon. The drying device includes a container, a belt conveying mechanism, and an infra-red heater. The belt conveying mechanism is disposed inside the container for conveying the glass substrate. The belt conveying mechanism includes a conveyer for supporting the glass substrate. The infra-red heater is disposed on an inner surface of the container and corresponding to an external surface of the conveyer contacting the glass substrate. The present disclosure further provides a conveying apparatus with the drying device. With the drying device and the conveying apparatus of the present disclosure, the glass substrate is conveyed by the conveyer and is heated evenly. Thus, a situation where the glass substrate is unevenly heated and a thickness of the alignment film become non-uniform can be avoided somewhat.

Abstract: Moisture profiling is carried out in the transverse direction of a moving paper or board web. An air dryer has a first air supply channel extending transverse to the web and second air supply channels which are connected with the first air supply channel, and into which heated drying air is supplied from the first air supply channel. The second air supply channels are parallel to the travel direction of the web. The air dryer has elongated blowing members, each arranged in connection with a plurality of second air supply channels for supplying heated drying air from the second air supply channels to the blowing members. A profiling connection is arranged in connection with at least one, preferably several, second air supply channels for supplying additional air into the second air supply channel in order to change the moisture profile of the web in the transverse direction of the web.

Abstract: A drying device (10) includes: a drying furnace (12); a plurality of guide rollers (14) that are arranged in the drying furnace (12) and that transport a sheet-like current collector (210); and a vibration imparting device (16) that is provided for at least part (14a) of the plurality of guide rollers (14) arranged in the drying furnace (12) and that imparts vibrations to the at least part (14a) of the plurality of guide rollers (14).

Abstract: A multi layered kitchen utensil dryer is provided comprising at least one layer of porous absorbent material enveloped by at least one sheet material, said sheet material being secured to the absorbent material.

Abstract: The present invention provides a method for drying an applied film formed by applying an application liquid containing an organic solvent to a traveling long support medium, wherein the temperature Tb of the long support medium before application is not less than 2° C. lower than the temperature Tc of the application liquid and the wind velocity in the vicinity of the applied film after application is not more than 0.5 m/s, thereby the applied film is dried uniformly in the initial drying of the applied film.

Abstract: The present invention provides a paper seasoning apparatus and an inkjet recording apparatus including a paper seasoning apparatus, capable of seasoning paper configured in a paper stack, and separating the paper stacks by introducing separation plates between sheets of the paper. Namely, separation plates for separating paper into specific numbers of sheets are introduced from a plate feeding apparatus into a housing of a paper seasoning apparatus. A separation plate lowering device lowers the separation plate that is supporting a paper stack. Seasoning is performed by blowing air from an air blowing device against the paper stack.

Abstract: A drying system of a coated continuous film equipped with roller conveyor devices of the continuous film that allow easy and rapid removal of the rollers from the system to facilitate cleaning and maintenance operations. The conveyor roller is substantially separable into two parts with at least one of the two support shafts separable from the rest of the roller to facilitate the disassembly and reassembly operations of the conveyor roller from and on the system. In this way, it is unnecessary to remove all the motion transmission elements connected to one of the two support shafts.

Abstract: A system and process for removing an inorganic salt from a catalyst roaster belt is disclosed. The system includes an apparatus with a drying vessel having a catalyst roaster belt inlet, a catalyst roaster belt outlet, a heating medium inlet, and a heating medium outlet, wherein the catalyst roaster belt inlet and the catalyst roaster belt outlet are spaced apart along a first direction, the heating medium inlet and the heating medium outlet are spaced apart along a second direction, the heating medium inlet is spaced apart from the catalyst roaster belt inlet in the second direction, and the catalyst roaster belt inlet is between the heating medium inlet and the heating medium outlet along the second direction. The system includes an acid bath and a moveable catalyst roaster belt extending from the acid bath through the catalyst roaster belt inlet and through the catalyst roaster belt outlet.

Abstract: A drier installation (1) for drying web (2), more particularly paper, which installation is provided for drying a maximum web width, the installation (1) comprises gas-heated radiant elements (3) for radiating the web, arranged according to at least one row (4) stretching out in the transversal (5) direction over the substantially entire maximum web width. The installation (1) comprises at least a transversal convective system (7, 36) equipped with suction and blowing devices (8) for sucking at least part of the combustion products produced by the radiant elements (3) by means of a suction duct (13) and for blowing this pa o the combustion products towards the web (2) by means of a blowing duct (14). Both suction (13) and blowing (14) ducts stretch out in the transversal (5) direction of the web (2).

Abstract: One illustrative embodiment of a wall restoration system includes an air-handler and a wall structure assembly. The wall structure assembly can enclose a portion of a wet wall to form a passage through which air flows to dry the wall portion.

Abstract: A gas blower device for blowing gas onto a face of a traveling strip of material. The device has at least one hollow box fitted with a plurality of tubular nozzles pointing towards the face in question of the strip of material. On the side facing towards the face in question of the strip of material, the hollow box presents a surface of profile (P) that varies in at least one given direction (D) symmetrically about a midplane (Q) perpendicular to the plane of the strip. The tubular nozzles are fastened via their roots to the varying-profile surface in such a manner that their respective axes are essentially orthogonal to said varying profile at the point in question, said tubular nozzles having respective lengths that are selected so that the outlet orifices lie in a common plane substantially parallel to the plane of the strip.

Abstract: A multi-layer laminating press including hot plates arranged over top of and movable in reference to each other, conveyers revolving around the hot plates, sealing elements that assist in forming vacuum chambers between each of a first hot plate and a respectively adjacent second hot plate arranged thereabove when the press is closed. The second conveyor lower run of the second hot plate rests on the first conveyor upper run of the first hot plate and the work piece to be laminated is arranged between the first conveyor upper run and the second conveyor lower run in the vacuum chamber. Connections are provided to pressurize and/or evacuate the vacuum chambers. The vacuum chambers are limited by either the first hot plate and the second conveyor lower run, or the second hot plate and the first conveyor upper run, without the interposition of another membrane for laminating the workpiece.

Abstract: A drying apparatus includes a transport unit that transports a target in a form of a cut sheet, on which a recording process has been performed through the attachment of liquid, from an upstream side to a downstream side of a transport direction. A drying unit performs a drying process on the transported target by blowing air toward a liquid attachment surface of the target. The drying unit is provided with a blowing port which allows air to blow toward an end portion of the target at the downstream side of the transport direction in a first direction from the upstream side to the downstream side of the transport direction, and allows air to blow toward an end portion of the target at the upstream side of the transport direction in a second direction from the downstream side to the upstream side of the transport direction.

Abstract: Methods and apparatus for manufacturing particleboard (PB), medium density fiberboard (MDF), oriented strand board (OSB) and board products and the like employ density control for producing a board product having a desired configuration.

Abstract: Apparatus for continuously producing a band of paper, particularly for toilet use, includes at least a device for forming the band of paper, a felt conveyor belt suitable for transporting the band of paper through a dehydrating device having at least one presser cylinder suitable for pressing the band of paper against a drying cylinder The presser cylinder has a diameter no smaller than one third of the diameter of the drying cylinder.

Abstract: The present invention concerns a convective system for a dryer installation for a passing web, more particularly paper. The convective system 7 is an assembly of an exterior casing 13 for suction of combustion products with opening 14 towards the web, with a first 15 and second 16 suction ducts sucking the combustion products into the convective system 7. The combustion products coming from the first suction duct 15 are guided through the exterior casing 13 to a mixing and blowing device 17. Cold air 18 is mixed in this mixing and blowing device 17 with the combustion products 19, resulting in a gas mixture with lower temperature 20. The convective system 7 also has an internal casing 21 inside the external casing 13. This internal casing 21 has at least one opening towards the web 22 and has also openings 34 allowing gas flow from the mixing device 17 to the internal casing 21 of said gas mixture 20. Under the internal casing 21, there is also a blowing duct 23.

Abstract: The object of the invention is an dryer in the dryer section (26) of a machine for treating or producing a web (12). This drying section (26) has, amongst other things, a burner assembly (10), wherein this burner assembly (10) is adapted to produce a flame (14) and exhaust gases (18). Either said flame (14) or the exhaust gases (18) or both are in direct contact with the web (12) to be dried. The flame (14) or the exhaust gases (18) or both cover the maximum width of the web (12) to be dried and this at a temperature exceeding 600° C., e.g. above 700° C., e.g. 800° C., preferably 1000° C. and more. By applying such a high temperature to the web (12) to be dried, one achieves a large temperature difference, resulting in a better heat transfer Considering the theoretical equation of heat transfer qx=kx. Ax.DTx, it is evident that because of the large temperature difference, the dimensions of the system can be reduced and/or the efficiency of the drying process can be refined.

Abstract: An air knife capable of preventing drying defects during substrate drying processes includes an inlet through which air is supplied from an outside of the air knife, a chamber which stores the air flowing through the inlet, and an outlet which is connected to the chamber and sprays the air stored in the chamber on a substrate, and a main body having a lower end portion extending from the outlet and past at least a portion of the chamber, wherein an angle between the lower end portion of the main body and a body reference line extended from the outlet is less than 40 degrees.

Abstract: After rinsing, a liquid mixture (IPA+DIW) is supplied to a substrate surface while rotating a substrate at a first rotating velocity which is relatively high to thereby replace the rinsing liquid adhering to the substrate surface with the liquid mixture. In this way, the rinsing liquid adhering to the gaps between the patterns formed on the substrate surface is replaced with the liquid mixture. Subsequently, DIW is supplied to the substrate surface in a condition that the rotation of the substrate is stopped or that the substrate is rotated at a second rotating velocity which is relatively low to thereby form a puddle-like liquid layer with DIW. In this way, the liquid mixture of the surface layer part is removed from the substrate surface while leaving almost all the liquid mixture adhering to the gaps between the patterns. After that, the liquid layer is removed from the substrate surface to thereby dry the substrate surface.

Abstract: A method for drying a surface comprises supporting a fabric cover above the surface, and holding side edges of the fabric cover against the surface such that an air channel is formed between the fabric cover and the surface. The air channel has an inlet end and a discharge end, and a pressurized warm air stream having a relative humidity less than an ambient relative humidity is directed into the inlet end of the air channel such that the warm air stream moves through the air channel to the discharge end and out to the atmosphere. An apparatus for practicing the invention provides a plenum along the inlet end with plenum outlets to discharge the warm air stream, and cover supports extending out from the plenum to support the cover above the surface. A fabric tube plenum and cover supports provide versatility and portability.

Abstract: When a heat treatment device for heating synthetic fiber filament yarns by saturated steam is installed to a drawing and texturing device for synthetic fiber filament yarns, in order to lower the total height of the devices than a conventional one, cylindrical hot pins each having a heat-absorbing part and a heat-discharging part are formed integrally with the bottom surface of a laterally extended container for sealing saturated steam of heat medium liquid in such a fashion as to penetrate through the bottom surface from inside to outside of the container with axes of the hot pins extending in a vertical direction, and the level of surface of the heat medium liquid within the boiler connected with the container is disposed at a position lower than the inside bottom surface of the container.

Abstract: An air knife constructed in accordance with the present invention directs a curtain of air across a region and most typically is used to direct the stream of air against a surface. In an exemplary embodiment of the invention the air knife includes an elongated housing having an inlet for receiving air into the housing. The housing includes an elongated gap that extends along the housing that allows air entering the housing through the inlet to exit the housing and form a curtain of air. The elongated housing is made from a piece of sheet metal bent to define a hollow region into which air is forced. The sheet metal defines a gap along a length of the housing from which the air exits. The elongated air knife forms an angle with respect to a direction of travel of glass sheets passing the air knife so that a leading edge of those glass sheets passes progressively different parts of the air knife.

Abstract: Apparatus and a method for enhancing the effectiveness of a water spray (30) to cool and/or remoisten a web (12) of material. The apparatus includes a web dryer, preferably a flotation dryer (100), an electrostatic charge generating device (31) or devices, a water spray (30), an integrated power supply (20) to supply high voltage power to the charge device, and a drainage system (35) for handling excess liquid generated during the cooling and/or remoistening of the web. The cooling apparatus is capable of a modular arrangement to optimize spacing and facilitate the addition of cooling capacity where needed, such as with faster web speeds or heavier web weights. One or more temperature sensors can be used to optimize the amount of and rate of fluid fed to the spray nozzles. The spray nozzles and charge bars can be retractable with respect to the web to facilitate web-up procedures.

Abstract: The invention relates to a device for blowing a fluid onto at least one face of a thin element of the band type, comprising, within a containment (2) having a horizontal longitudinal axis (XX′) corresponding to the axis of travel of the band, at least one radial-flow fan (3) with a vertical axis (ZZ′), having at least one outlet connected to at least one pipe (51, 52) for feeding nozzles (43) directed towards the said face, characterized in that the nozzles (43) induce fluid jets in at least one plane perpendicular to the direction (XX′) of travel of the said band.

Abstract: The invention relates to a method in a paper or board machine, in which method water is removed from a paper or board web (W) by pressing in a press section (30), in which pressing stage the web (W) is pressed in at least one press nip (35; 36), and in which method the web (W) is dried after pressing by impingement drying, in which method the web (W) is passed as a closed draw from the press section (30) to a dryer section (40), and the method applies full-width threading from the press section (30) to the dryer section (40). The web (W) is dried by impingement drying by means of impingement units (46) placed around at least one large-diameter impingement roll (45). In the method, the web (W) is passed after impingement drying as a closed draw through the dryer section (40) to a calender (60), and in the method threading is accomplished as of full width through the dryer section (40).

Abstract: A process for drying/heat-treating nonwoven webs in which the web is partially dried under tension in a first drying zone and further heat treated under low tension or in a substantially tensionless state a second drying zone. The process significantly reduces the occurrence of stretch-type defects in the nonwoven webs.

Abstract: In a drying section of a machine for producing a material web such as, in particular, a paper or cardboard web, a pick-up suction roll, in particular a larger pick-up suction roll, is provided between the last pressing nip of a pressing section and a subsequent impingement drying unit, which suction roll removes the material web from a pressing felt guided through the pressing nip or from a transfer belt and transfers it to the impingement drying unit.

Abstract: The invention relates to a device for drying paper webs, especially tissue paper webs, with a dryer cylinder 1 and a dryer hood 2, 3 for blowing hot air onto the paper web. It is mainly characterised by the inlet air parts of the dryer hood 2, 3, such as the nozzle basket 9 or the inlet duct 4, being uncoupled from the frame or hood structure 10. This is especially advantageous at operating temperatures of up to 700° C.

Abstract: An air knife constructed in accordance with the present invention directs a curtain of air across a region and most typically is used to direct the stream of air against a surface. In an exemplary embodiment of the invention the air knife includes an elongated housing having an inlet for receiving air into the housing. The housing includes an elongated gap that extends along the housing that allows air entering the housing through the inlet to exit the housing and form a curtain of air. The elongated housing is made from a piece of sheet metal bent to define a hollow region into which air is forced. The sheet metal defines a gap along a length of the housing from which the air exits. The elongated air knife forms an angle with respect to a direction of travel of glass sheets passing the air knife so that a leading edge of those glass sheets passes progressively different parts of the air knife.

Abstract: Device and process for dewatering a fibrous material web by expelling water via gas pressure. The dewatering device includes at least four rolls arranged to radially limit at least one pressure chamber and sealing units arranged to axially limit the at least one pressure chamber. Adjustment devices are arranged to at least partially individually axially adjust positions of the at least four rolls and the sealing units. A pressure gas is introducible into and the fibrous material web is guidable through the at least one pressure chamber.

Abstract: A wafer dryer for use in a semiconductor cleaning apparatus includes an internal bath, an external bath, a solution supply line, a solution drain line, a pump, and drying means. The solution drain line has a first drain line and a second drain line. A pump for constantly maintaining a speed of a drained solution is installed on the first drain line. The drying means has an isopropyl alcohol (IPA) nozzle, a first gas spray nozzle for spraying N2 gas, and a second spray nozzle. The second spray nozzle is installed on all inner sidewalls of the external bath and has a plurality of holes. Thus, no wave is produced at a surface of the drained solution.

Abstract: An apparatus for performing contaminant sensitive processing on a substrate. A substrate load chamber receives the substrate from an ambient contaminant laden environment, and isolates the substrate from the ambient contaminant laden environment. The substrate load chamber further forms a first environment of intermediate cleanliness around the substrate. A substrate pass through chamber receives the substrate from the substrate load chamber, and isolates the substrate from the intermediate cleanliness of the first environment of the substrate load chamber. The substrate pass through chamber further forms a second environment of high cleanliness around the substrate. A substrate transfer chamber receives the substrate from the substrate pass through chamber, and isolates the substrate from the high cleanliness of the second environment of the substrate pass through chamber.

Abstract: A substrate feed chamber that is equipped in a substrate processing apparatus is provided. The substrate feed chamber has a storage tray capable of storing simultaneously three or more substrate holding trays that hold substrates in a vertical or substantially vertical condition and a horizontal movement mechanism that moves horizontally the storage tray with respect to the substrate feed position in order to effect feeding-in or feeding-out movement of the substrate holding tray between any of the chambers of a group consisting of processing chambers and load lock chambers and, in addition, if required, has a rotary movement device that rotates the storage tray. Improvement in throughput in a substrate processing apparatus can thereby be achieved and increase in the ground-contacting area of the device as a whole can be prevented.

Abstract: The present invention provides a drying method of a substrate surface and a supporting fixture of substrate used in such a method, which, in the drying treatment applied after a chemical and/or water dipping treatment of a semiconductor wafer or a liquid crystal substrate, permits improvement of substrate product yield and is excellent in economic merits, particularly without causing defective drying of the substrate surface near the carrier holding section.

Abstract: A method and apparatus for drying a moving material web, including pre-drying the web in an infrared dryer including at least one infrared radiator and drying the web in an air dryer including a dryer air, the air dryer operated such that a heat transfer coefficient between the dryer air and the web progresses in an ascending way as viewed in the direction of web travel.