Abstract: The predicted value of a window characteristic during closure is divided into a plurality of discrete segments. The actual system response during a closure without obstruction is then read for each of said discrete segments. A correction value to move away from the predicted value is then set for each of the discrete segments. The correction value is stored in digital form, and utilized to modify the predicted value. The present invention thus fine tunes the predicted value to account to the individual response of the particular system. In this way, the number of false or delayed obstruction readings are reduced compared to the prior art.

Abstract: A communication abnormality detecting/coping device and a vacuum pump remote monitor control device are provided, which are capable of detecting the presence/absence of an abnormality in data communication and reducing an influence of the abnormality on a system device when detecting the abnormality. An operation acknowledge message 51 is transmitted to a system device (30) from a turbo-molecular pump control device (20) in Step 1. A reply message (53) indicative of the reception of the operation acknowledgement message 51 by the system device (30) is transmitted to the turbo-molecular pump control device (20) in Step 3. In Step 5, an elapsed period of from a time at which the operation acknowledgement message (51) is transmitted to a time at which a reply message (53) is received is measured, and if the elapsed period exceeds the preset period, the abnormality in the communication system is warned in Step 6.