Abstract: A piezoelectric actuator includes a first ceramic sheet having individual inner-electrodes formed thereon, a second ceramic sheet having a common inner-electrode formed thereon, a third ceramic sheet having individual surface-electrodes formed thereon, and a fourth ceramic sheet having a plurality of connection electrodes connecting the individual surface-electrodes and the individual inner-electrodes respectively. The connection electrodes have first portions, second portions and third portions respectively, the first portions facing the individual surface-electrodes and arranged at a pitch in a row in a row-direction, the second portions facing the individual inner-electrodes and being arranged in the row-direction to be shifted with respect to the first portions by half the pitch respectively; and the third portions connecting the first portions and the second portions respectively.

Abstract: A droplet ejection device includes: a substrate having first, second, third & fourth pressure chambers extending in a first direction; a nozzle plate below the substrate & having first, second, third & fourth nozzle apertures continuous with first, second, third & forth pressure chambers, respectively; a vibration plate above the substrate; first, second, third & fourth piezoelectric elements above the vibration plate & above first, second, third & fourth pressure chambers.

Abstract: Making a transducer having a plastic matching layer which includes providing a transducer housing having a proximal end and a distal end, and bonding a plastic to the distal end of the transducer housing (the plastic fluidly sealing and occluding the distal end). The bonding further includes inserting a cylinder comprising a mold-release chemical into the transducer housing, bonding plastic onto the distal end of the transducer housing, and removing the cylinder when the plastic has hardened.

Abstract: An inkjet head comprises a plurality of individual electrodes each of which includes a first part and a second part connected to an end portion B of the first part. The end portion B is one of the end portions of a first part in a longitudinal direction of a pressure chamber. The second part of each of the individual electrodes corresponding to a first pressure chamber line is positioned between two first parts corresponding to two respective pressure chambers neighboring each other in a second pressure chamber line, so that an end portion C of the second part crosses over a line connecting each end portion D of the two first parts.

Abstract: A method for driving a liquid drop ejector (1) equipped with a piezoelectric actuator (7) including a piezoelectric ceramic layer (6) having a size covering a plurality of pressurizing chambers (2). An arbitrary piezoelectric deformation region (8) of the liquid drop ejector (1) is deflected in one thickness direction and the opposite direction, respectively, by applying a driving voltage waveform including a first voltage (?VL) and an equivalent second voltage (+VL) of the opposite polarity in order to vary the volume of the pressurizing chambers (2) of a corresponding liquid drop ejecting portion (4), and a liquid drop is ejected through a communicating nozzle (3). Since gradual creep deformation of the inactive region (16) of the piezoelectric ceramic layer (6) is prevented, the ink drop ejection performance is maintained at a good level over a long term.

Abstract: The piezoelectric actuator has: a diaphragm made of silicon; an insulating layer formed on a front surface of the diaphragm; a plurality of individual electrodes formed on a surface of the insulating layer; a plurality of piezoelectric bodies formed respectively on surfaces of the plurality of individual electrodes; and a plurality of common electrodes which are respectively arranged across the plurality of piezoelectric bodies from the plurality of individual electrodes, wherein the plurality of piezoelectric bodies are polarized in a direction from the individual electrodes toward the plurality of common electrodes.

Abstract: A focused ultrasound transducer includes a first ultrasonic emitter and at least one metallic ultrasonic lens acoustically coupled thereto. The emitter generates ultrasonic energy that propagates along a beam path projecting therefrom. The at least one metallic ultrasonic lens is positioned at least partially in the beam path so that it can direct (e.g., focus, defocus, and/or collimate) in at least one direction (or along at least one plane) at least some of the ultrasonic energy propagating from the emitter. The metallic lens may be formed by extrusion, by molding (e.g., diecast molding or thermoforming), or by sintering (e.g., powder metallurgy). The metallic lens also advantageously functions as a heat sink, improving thermal performance of the ultrasound transducer.

Abstract: A piezoelectric device includes a substrate composed of a (110) single crystal silicon, a driver IC formed in the substrate, and a piezoelectric device that is formed above the substrate and is driven by the driver IC, wherein the driver IC has an analog switch including a transistor, the transistor having a channel direction in <001> orientation of the substrate.

Abstract: A liquid transporting apparatus includes a channel unit in which liquid transporting channel transporting the liquid is formed, the liquid transporting channel including a pressure chamber; a piezoelectric actuator which is connected to the channel unit, and which applies a pressure to the liquid in the pressure chamber, the piezoelectric actuator having: a piezoelectric layer; a first electrode arranged on a first surface of the piezoelectric layer to face the pressure chamber; a second electrode which is arranged, to face the first electrode, on a second surface of the piezoelectric layer different from the first surface; third electrodes arranged on the piezoelectric layer to sandwich the first electrode in a plan view; and fourth electrodes which are arranged, to face the third electrode, on the piezoelectric layer; a voltage applying mechanism which applies a voltage to the piezoelectric actuator; and a controller which controls the voltage applying mechanism.

Abstract: A head unit comprises: first and second heads, each having an ink ejecting face including a nozzle group, the nozzle group including plural nozzle rows extending in a first direction and arranged in a second direction orthogonal, each nozzle row including a plurality of nozzles for ejecting ink arranged along the first direction at a predetermined interval; and a holder for holding the first and second heads. Each of the nozzle groups of the first and second heads includes a rectangular region in which the plurality of nozzles are arranged apart at a predetermined distance in the first direction to form a rectangular shape. The first and second heads are held by the holder in parallel with each other so that the plurality of nozzles included in the rectangular regions of the first and second heads, respectively, are arranged apart at the predetermined distance in the first direction.

Abstract: A liquid discharge head includes a discharge element including a discharge port, a liquid supply port, an electric connection terminal, and a heat transfer terminal. The discharge head also includes a supporting member including an electric connection terminal portion formed on a first surface thereof and electrically connected to the electric connection terminal, a heat transfer terminal junction portion formed on the first surface and connected to the heat transfer terminal, a plurality of through-holes extending between the first surface and a second surface of the supporting member, a partition wall portion separating the through-holes from each other, and a heat transfer path connected to the heat transfer terminal junction portion. An interval between the through-holes increases according to a direction from the first surface to the second surface. A volume of the heat transfer path increases according to the increase of the interval.

Abstract: A piezoelectric actuator includes a vibration plate, a first piezoelectric layer formed on one surface of the vibration plate, a second piezoelectric layer stacked on a surface of the first piezoelectric layer, a plurality of individual electrodes arranged on a surface of the second piezoelectric layer in a predetermined direction, a first common electrode having a plurality of first electrodes formed between the first piezoelectric layer and the second piezoelectric layer, and which are arranged in the predetermined direction to face the individual electrodes respectively, and a first wire electrically connecting all of the first electrodes, and a second common electrode having a plurality of second electrodes formed between the vibration plate and the first piezoelectric layer, and which are arranged in the predetermined direction to face the individual electrodes respectively, and a second wire electrically connecting all of the second electrodes.

Abstract: An ink jet recording head comprising: a nozzle orifice for jetting ink; an ink chamber communicating with the nozzle; a diaphragm for pressurizing ink in the ink chamber; a piezoelectric thin film on the diaphragm; and an electrode for the piezoelectric thin film wherein the piezoelectric thin film and the electrode are patterned to the same shape.

Abstract: A valve unit includes a valve portion arranged in a laminate body operable to open and close a flow passage; a drive portion that generates drive force for driving the valve portion; and a transmission portion arranged between the valve portion and the drive portion for transmitting the drive force of the drive portion to the valve portion. The laminate body includes: a first plate member including the drive portion; and a second plate member including a hole functioning as part of the flow passage; and a third plate member arranged above the second plate member and including a plate spring so as to urge the valve portion to a closing position. The valve portion pivots and inclines about a position in contact with the plate spring based on the drive force from the drive portion.

Abstract: An inkjet recording system includes an inkjet recording head in which a part of wall face of a pressure chamber in which a nozzle is provided is formed of a piezoelectric element. Centerline average roughness Ra of the piezoelectric element is 0.05 to 2 ?m, viscosity of the ink is 2.0 to 10.0 mPa·s, and the following expression (1) is satisfied; r ? ? ? ? ? cos ? ? ? 2 ? ? ? ? 0.07 ( 1 ) wherein r represents centerline average roughness (?m) of surface of piezoelectric element forming wall face of the pressure chamber, ? represents surface tension (mN/m) of ink, ? represents viscosity of ink (mPa·s), and ? represents contact angle (degree) of ink with respect to piezoelectric element.

Abstract: A droplet discharging head, includes a diaphragm, a fixing plate, and a piezoelectric element. The piezoelectric element includes a first electrode, a second electrode, a piezoelectric body layer interposed between the first and second electrodes, a first internal electrode extending from the first electrode between the first, and second electrodes, and a second internal electrode extending from the second electrode between the first and second electrodes. At least a part of a first end face of the piezoelectric element is in contact with the diaphragm. The first end face includes a first end of the first electrode, a first end of the second electrode, and a first end of the piezoelectric Body. The piezoelectric body layer includes an active layer that overlaps both the first and second internal electrodes, a first inactive layer that overlaps only the first internal electrode, and a second inactive layer that overlaps only the second internal electrode.

Abstract: A restrictor with a structure to prevent a back flow of ink and an inkjet head including the restrictor. In the inkjet head, an ink channel is formed in a channel plate, and the ink channel includes an ink inlet, a plurality of pressure chambers, a manifold, a plurality of restrictors respectively connecting the pressure chambers to the manifold, and a plurality of nozzles. Piezoelectric actuators are formed on the channel plate. Each of the restrictors includes a plurality of protrusions formed on an inner surface thereof in a structure suitable to increase a flow resistance of the restrictor when ink flows from the pressure chamber to the manifold through the restrictor. Each of the protrusions includes a first surface facing a flow of ink moving through the restrictor in a direction from the manifold to the pressure chamber, and a second surface facing a flow of ink moving through the restrictor in a direction from the pressure chamber to the manifold.

Abstract: An actuator unit for applying pressure to liquid in each of pressure chambers formed in a passage unit includes a piezoelectric layer; a common electrode formed on one surface of the piezoelectric layer to be positioned over the pressure chambers; and electric field blocking layers formed on an opposite surface of the piezoelectric layer from the one surface to be opposed to the common electrode and outside regions of the respective pressure chambers. Each electric field blocking layer is porous and lower in dielectric constant than the piezoelectric layer. The actuator unit further includes lands each positioned to sandwich an electric field blocking layer between the land and the piezoelectric layer; and individual electrodes formed on the opposite surface to be opposed to the respective pressure chambers and the common electrode and neighbor the respective electric field blocking layers. Each individual electrode is electrically connected to the corresponding land.

Abstract: An ink jet head is provided with a passage unit and an actuator unit. The passage unit includes a nozzle and a pressure chamber communicating with the nozzle. The actuator unit includes a piezoelectric layer, a first electrode connected with a front surface of the piezoelectric layer, a second electrode connected with a back surface of the piezoelectric layer, a first insulating layer located between the second electrode and the passage unit, and a first conductive member. The first insulating layer includes a first through hole. At least a part of the first conductive member is located in the first through hole. The passage unit includes a concave portion located at a position facing the first through hole, and a protruding portion which protrudes from an inner surface of the concave portion. One end of the first conductive member is electrically connected with the second electrode. The other end of the first conductive member makes contact with the protruding portion.

Abstract: A process for the manufacture of small sensors with reproducible surfaces, including electrochemical sensors. One process includes forming channels in the surface of a substrate and disposing a conductive material in the channels to form an electrode. The conductive material can also be formed on the substrate by other impact and non-impact methods. In a preferred embodiment, the method includes cutting the substrate to form a sensor having a connector portion and a transcutaneous portion, the two portions having edges that define one continuous straight line.

Abstract: An inkjet head includes a passage unit having a pressure chamber which is in communication with a nozzle and which is defined by a recessed portion provided in one surface of the passage unit; and an actuator unit including: (a) an oscillating plate fixed to the one surface of the passage unit so as to close the recessed portion defining the pressure chamber; (b) a piezoelectric layer disposed on the oscillating plate so that the piezoelectric layer and the oscillating plate cooperate with each other to constitute a piezoelectric unimorph; (c) a first electrode provided on a side of one surface of the piezoelectric layer so as to correspond to the pressure chamber; and (d) a second electrode provided on a side of an other surface of the piezoelectric layer and opposed to the first electrode in a direction of thickness of the piezoelectric layer. The pressure chamber has an elongate shape.

Abstract: An ink jet print head is provided which allows an ejection opening-formed surface to be cleaned well and can improve a precision with which ejected ink lands on a print medium. For this purpose, conductive layers of a conductive material are formed on the support substrate and planarized. The liquid ejection substrates are mounted on the support substrate with high precision, without a sealing agent, that protects electrical connecting portions on the liquid ejection substrates, protruding from the ejection opening-formed surface.

Abstract: A piezoelectric element includes: a base substrate; a lower electrode formed above the base substrate; a ferroelectric layer formed above the lower electrode; and an upper electrode formed above the ferroelectric layer, wherein an angle of a corner defined by a side surface of the ferroelectric layer and a top surface of the base substrate is between 45° and 75°.

Abstract: A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).

Abstract: A method of manufacturing a liquid ejection head includes a pressure chamber forming step of forming at least one of recess sections and through holes corresponding at least to the pressure chambers, in a plurality of calcined bodies obtained by calcining a plurality of ceramic green sheets; a piezoelectric body forming step of forming a plurality of films of piezoelectric bodies which constitute the piezoelectric elements by means of an aerosol deposition method, onto the calcined body corresponding to the diaphragm, of the plurality of calcined bodies; a laminating step of forming glass layers onto surfaces of the calcined bodies and arranging the calcined bodies to overlap each other; and a heating step of heating the arranged calcined bodies to a prescribed temperature, and simultaneously performing glass bonding of the calcined bodies and annealing of the piezoelectric bodies.

Abstract: A metal oxide layer is disposed on the lower potential side when an electric field in a predetermined direction is applied to the piezoelectric body which is deformed by an applied electric field, and compensates for the oxygen vacancies which are generated in the piezoelectric body by applying the electric field. A second metal oxide layer is disposed on the higher potential side of the electric field applied to the piezoelectric body, and by applying an electric field in the direction reverse to the electric field, compensates for the oxygen vacancies which are accumulated in the piezoelectric body, thus degradation of the piezoelectric characteristic of a piezoelectric element can be repaired.

Abstract: An inkjet head including an ink channel unit defining a network of ink channels which provides at least one common ink chamber and a plurality of nozzles held in communication with the at least one common ink chamber. The ink channel unit includes a laminated structure body that is provided by a plurality of metal plates superposed on each other. The laminated structure body has at least the at least one common ink chamber and an atmosphere communication channel which diverges from the network of ink channels. The atmosphere communication channel extends toward an exterior of the laminated structure body, so as to open outside the laminated structure body. The atmosphere communication channel is sealed at its opening. Also disclosed is a process of manufacturing the inkjet head.

Abstract: A liquid ejection head according to one aspect of the invention comprises: a channel unit that comprises: a plurality of individual liquid channels each including a pressure chamber; and a first surface having a plurality of openings corresponding to a plurality of the pressure chambers; and a piezoelectric actuator unit having a second surface that is bonded to the first surface of the channel unit via an adhesive to cover the plurality of pressure chambers. One or more grooves are formed in the first surface of the channel unit to surround the plurality of pressure chambers. An outer edge portion of the second surface the piezoelectric actuator unit faces the groove. A supporting portion that faces the outer edge portion of the second surface of the piezoelectric actuator unit to support the piezoelectric actuator unit is provided in the groove.

Abstract: A capacitive ultrasonic transducer includes a flexible layer, a first conductive layer on the flexible layer, a support frame on the first conductive layer, the support frame including a flexible material, a membrane over the support frame being spaced apart from the first conductive layer by the support frame, the membrane including the flexible material, a cavity defined by the first conductive layer, the support frame and the membrane, and a second conductive layer on the membrane.

Abstract: An inkjet printhead and a method of driving the inkjet printhead include a flow channel substrate having a pressure chamber, and a piezoelectric actuator formed on the flow channel substrate to apply a driving force to the pressure chamber to eject ink. The piezoelectric actuator includes a piezoelectric layer formed on the flow channel substrate to correspond to the pressure chamber, and a plurality of common electrodes and a plurality of driving electrodes alternately arranged in a length direction of the piezoelectric layer.

Abstract: A liquid-ejecting head including a pressure-generating chamber communicating with an nozzle, and a piezoelectric element having a first electrode, a piezoelectric layer arranged above the first electrode, and a second electrode arranged above the piezoelectric layer. An internal electric field in the piezoelectric layer is biased toward the first electrode or the second electrode and no voltage is applied to the first electrode or the second electrode.

Abstract: An inkjet recording system including an inkjet recording head in which a part of wall face of a pressure chamber in which a nozzle is provided is formed of a piezoelectric element, the piezoelectric element being activated and deformed to make pressure wave act on ink in the pressure chamber, thereby discharging an ink droplet from the nozzle, wherein surface of the piezoelectric element forming a part of wall face of the pressure chamber has a centerline average roughness Ra ranging from 0.05 to 2 ?m, and contact angle ? with ink is 45 degrees or less, and the following expression (1) is satisfied; A cos2 ?>0.04??(1) wherein A represents centerline average roughness Ra (?m) of surface of piezoelectric element forming wall surface of pressure chamber, and ? represents contact angle of ink with respect to piezoelectric element.

Abstract: The laminated piezoelectric element comprises a plurality of layers including first electrodes, piezoelectric material bodies, and second electrodes, wherein: the layers are laminated in order of the first electrode, the piezoelectric material body, the second electrode, and the piezoelectric material body; a plurality of active parts of the laminated piezoelectric element, where the piezoelectric material bodies are capable of actively expanding and contracting when a voltage is applied to the first electrode and the second electrode that are mutually opposing across the piezoelectric material body, are two-dimensionally arranged in a row direction and a column direction; and the first electrodes are common to the plurality of active parts in the row direction and the second electrodes are common to the plurality of active parts in the column direction.

Abstract: A piezoelectric actuator of an ink-jet head includes a vibration plate covering pressure chambers, and piezoelectric elements formed on a surface of the vibration plate. Each of the piezoelectric elements has stacked piezoelectric layers; individual electrodes and common electrodes arranged alternately between the stacked piezoelectric layers; and base portions of a supporting member formed on a surface of the uppermost piezoelectric layer of the piezoelectric layers. In each of the piezoelectric elements, through holes are formed to extend from a surface of one of the base portions, across the stacked piezoelectric layers, and the individual electrodes are exposed in the surface forming the through hole and the common electrodes are exposed in the surface forming the through hole. Conductive materials are filled in the through holes, respectively. Accordingly, a liquid transporting apparatus in which the structure for electrical connection is simple and easily made is provided.

Abstract: A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber.

Abstract: The liquid ejection head comprises: a nozzle through which liquid is ejected; a pressure chamber which is connected to the nozzle; a diaphragm which pressurizes the pressure chamber; and a laminated piezoelectric element which causes the diaphragm to deform and is formed on the diaphragm by means of a thin film forming technique, wherein: an effective surface area of the diaphragm forming one inner surface of the pressure chamber is greater than a surface area of a bonding section between the diaphragm and the laminated piezoelectric element; a surface area of an active section of the laminated piezoelectric element is greater than the effective surface area of the diaphragm; and the laminated piezoelectric element is formed in such a manner that a cross-sectional area of the laminated piezoelectric element perpendicular to a direction of lamination becomes smaller as receding from the diaphragm.

Abstract: A method of fabricating a polymer-based capacitive ultrasonic transducer, which comprises the steps of: (a) providing a substrate; (b) forming a first conductor on the substrate; (c) coating a sacrificial layer on the substrate while covering the first conductor by the same; (d) etching the sacrificial layer for forming an island while maintaining the island to contact with the first conductor; (e) coating a first polymer-based material on the substrate while covering the island by the same; (f) forming a second conductor on the first polymer-based material; (g) forming a via hole on the first polymer-based material while enabling the via hole to be channeled to the island; and (h) utilizing the via hole to etch and remove the island for forming a cavity.

Abstract: A laminated and bonded structure includes plural plates. The plates include first and second plates. The plates are laminated and bonded to each other with an adhesive agent. The first and second plates have laminated surfaces bonded to each other. A first escape groove is defined in the laminated surface of at least one of the first and second plates. The first escape groove guides the adhesive agent along the laminated surface. The first escape groove includes an outlet portion in an outer peripheral side surface of the at least one of the first and second plates. The outer peripheral side surface intersects with the laminated surfaces. One of the first and second plates defines a recessed first reservoir portion being capable of accumulating the adhesive agent passing through the first escape groove. The first reservoir portion communicates with the first escape groove.

Abstract: A piezoelectric actuator includes a vibration plate 30 covering pressure chambers 14 and serving also as a common electrode, a piezoelectric layer 31 arranged on the vibration plate 30 on a side opposite to the pressure chambers 14, and individual electrodes 32. The individual electrodes are each arranged on a surface of the piezoelectric layer 31 opposite to the vibration plate 30, in an area overlapping with an edge portion of the pressure chamber as viewed from a direction orthogonal to a plane in which the pressure chambers are arranged, the edge portion being an area other than the central portion of the pressure chamber. The individual electrodes are extended up to an area outside of the pressure chambers, as viewed from the direction orthogonal to the plane. A liquid transporting apparatus including the piezoelectric actuator has an excellent durability and improved drive efficiency.

Abstract: An ink jet printer head including a cavity unit; an piezoelectric actuator; and a wiring substrate. The piezoelectric actuator includes pairs of first common electrode connection pads and pairs of first individual electrode connection pads which are provided on an outer surface thereof such that the two first common electrode connection pads of each of the pairs are located at respective positions symmetric with each other with respect to a first reference point on the outer surface and the two first individual electrode connection pads of each of the pairs are located at respective positions symmetric with each other with respect to the first reference point.

Abstract: An ink jet head is provided with a passage unit, an actuator unit, and a conductive adhesion layer. The passage unit comprises a nozzle and a pressure chamber communicating with the nozzle. The actuator unit comprises a piezoelectric layer, a first electrode connected with a front surface of the piezoelectric layer, a second electrode connected with a back surface of the piezoelectric layer, and a first insulating layer located between the second electrode and the passage unit. The conductive adhesion layer adheres to both a front surface of the passage unit and a back surface of the actuator unit. The conductive adhesion layer is electrically connected with the second electrode.

Abstract: To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.

Abstract: A piezoelectric laminate including a base and a first piezoelectric layer formed above the base and including potassium sodium niobate. The first piezoelectric layer is shown by a compositional formula (KaNa1-a)xNbO3, “a” and “x” in the compositional formula being respectively 0.1<a<1 and 1?x?1.2.

Abstract: The method of manufacturing a liquid ejection head includes the steps of: forming piezoelectric elements on a diaphragm; stacking an intermediate plate which includes recess sections for covering the piezoelectric elements and drive wires connected to the piezoelectric elements, on the diaphragm; connecting an integrated circuit to the drive wires; forming an actuator function unit by electrically and mechanically bonding the diaphragm, the piezoelectric elements, the drive wires, the intermediate plate and the integrated circuit, in such a manner that the piezoelectric elements are electrically driven via the integrated circuit; measuring displacement of the diaphragm by operating the integrated circuit; and bonding a flow path forming member to the actuator function unit after the step of measuring the displacement of the diaphragm, the flow path forming member being provided for forming pressure chambers connected to nozzles and forming a common liquid chamber for storing liquid supplied to the pressure ch

Abstract: An inkjet head including (a) an ink channel unit and (b) an actuator unit which are superposed on each other. The ink channel unit has (a-1) nozzles, (a-2) first recesses which are held in communication with the nozzles and which are formed in a recessed surface of the ink channel unit, and (a-3) second recesses which are isolated from the nozzles and which are formed in the recessed surface. The actuator unit has (b-1) a piezoelectric sheet straddling the first recesses, (b-2) individual electrodes located in positions opposed to the respective first recesses, and (b-3) a common electrode cooperating with each of the individual electrodes to define a portion of the piezoelectric sheet which is located between the common electrode and the each of the individual electrodes The actuator unit is fixed to the recessed surface of the ink channel unit by an adhesive, such that the first recesses are closed by the actuator unit so as to provide respective pressure chambers.

Abstract: An actuator has: a piezoelectric body formed in a shape of a tube and having an inner side wall, which faces a hollow portion of the tube, and an outer side wall, which is structured at an outer side of the tube; a first electrode formed at the inner side wall of the piezoelectric body; and a second electrode formed at the outer side wall of the piezoelectric body. The actuator displaces the piezoelectric body by a potential difference between the first electrode and the second electrode.

Abstract: A piezoelectric element structure comprises a supporting substrate, and a piezoelectric film supported on the supporting substrate, in which the piezoelectric film contains a first layer, and a second layer having zirconium, each provided with perovskite structure, and formed to be in contact with each other or laminated through an intermediate layer, and the temperature is set at 500° C. or more at the time of thin film formation so as to provide the piezoelectric film, and a quick cooling is given from the thin film formation temperature at least to 450° C. with a cooling speed of 30° C./min or more for the formation thereof. The piezoelectric film thus formed is in a small thickness as compared with the conventional piezoelectric film, but presents a large piezoelectric constant, hence making it possible to perform efficient microprocessing thereof reliably.

Abstract: The liquid ejection head includes: a plurality of liquid ejection ports; a plurality of pressure chambers which are respectively communicated with the liquid ejection ports; a diaphragm which configures at least one surface of each of the pressure chambers; and a plurality of piezoelectric elements which are disposed on a surface of the diaphragm opposite from the pressure chamber, and from which at least individual electrodes are separated in an area corresponding to the pressure chamber, wherein liquid is ejected from the liquid ejection port by causing the plurality of piezoelectric elements to make vibration.

Abstract: A piezoelectric unit includes a first piezoelectric member having a tubular shape, a second piezoelectric member inserted into a first opening of the first piezoelectric member, and a voltage applying member applying a driving voltage to the first and second piezoelectric members. An orifice plate includes a body through which first nozzle openings corresponding to the first piezoelectric member and second nozzle openings corresponding to the second piezoelectric member are formed. An elastic member is disposed between the first and second nozzle openings and the piezoelectric unit. A shape of the elastic member is changed in accordance with a changed shape of the piezoelectric unit for jetting ink through the first and second nozzle openings. Thus, a nozzle pitch of a printer head may be reduced.

Abstract: A liquid-droplet jetting apparatus is provided with a cavity unit in which nozzles and pressure chambers are formed; and a piezoelectric actuator which includes active portions which deforms when a drive voltage is applied thereto. In the apparatus, the active portions are deformed to change the volume of the pressure chambers to thereby jet a liquid in the pressure chambers from the nozzles. The active portions are grouped into a plurality of groups which are different in the length in the longitudinal direction of the active portions. Active portions with a greater length have a greater width, and active portions with a smaller length have a smaller width. Accordingly, in the liquid-droplet jetting apparatus in which the active portions are grouped into the jetting groups, drive voltages can be made substantially same with respect to all the jetting groups.