With Piezoelectric Force Ejection Patents (Class 347/68)
  • Patent number: 11365479
    Abstract: Forming a protective coating ex situ in an atomic layer deposition process to coat one or more chamber components subsequently installed in a reaction chamber provides a number of benefits over more conventional coating methods such as in situ deposition of an undercoat. In certain cases the protective coating may have a particular composition such as aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, and/or yttrium fluoride. The protective coating may help reduce contamination on wafers processed using the coated chamber component. Further, the protective coating may act to stabilize the processing conditions within the reaction chamber, thereby achieving very stable/uniform processing results over the course of processing many batches of wafers, and minimizing radical loss. Also described are a number of techniques that may be used to restore the protective coating after the coated chamber component is used to process semiconductor wafers.
    Type: Grant
    Filed: July 22, 2020
    Date of Patent: June 21, 2022
    Assignee: Lam Research Corporation
    Inventors: Damodar Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Warren Bailey, Tony Kaushal, Krishna Birru, William Schlosser, Bo Gong, Huatan Qiu, Fengyuan Lai, Leonard Wai Fung Kho, Anand Chandrashekar, Andrew H. Breninger, Chen-Hua Hsu, Geoffrey Hohn, Gang Liu, Rohit Khare
  • Patent number: 11355693
    Abstract: An electromechanical transducer includes an electromechanical transducer film of laminated layers including a perovskite-type complex oxide represented by a general formula of ABO3; and a pair of electrodes opposed to each other with the electromechanical transducer film interposed between the pair of electrodes. In the general formula of ABO3, A includes Pb and B includes Zr and Ti.
    Type: Grant
    Filed: July 27, 2018
    Date of Patent: June 7, 2022
    Assignee: RICOH COMPANY, LTD.
    Inventors: Naoya Kondo, Satoshi Mizukami, Toshiaki Masuda
  • Patent number: 11351782
    Abstract: A liquid ejection head having a channel member which includes an ejection hole surface and a pressurization chamber surface opposite thereto. An actuator substrate overlaps the pressurization chamber surface. The channel member includes a plurality of ejection holes opening in the ejection hole surface, a plurality of pressurization chambers individually communicating with the plurality of ejection holes and arranged in plan view of the pressurization chamber surface, and a plurality of dummy pressurization chambers positioned outside of the predetermined region in plan view of the pressurization chamber surface. The actuator substrate includes a plurality of pressurization portions that individually pressurize the pressurization chambers, and a plurality of dummy pressurization portions that individually pressurize the dummy pressurization chambers. The dummy pressurization chambers communicate with each other via a plurality of communication paths.
    Type: Grant
    Filed: July 29, 2019
    Date of Patent: June 7, 2022
    Assignee: KYOCERA CORPORATION
    Inventors: Hiroki Kobayashi, Kenko Gejima
  • Patent number: 11340529
    Abstract: An improved photoimageable dry film formulation, a fluidic ejection head containing a thick film layer derived from the improved photoimageable dry film formulation, and a method for making a fluidic ejection head. The improved photoimageable dry film formulation includes a multifunctional epoxy compound, a photoinitiator capable of generating a cation, a non-photoreactive solvent, and from about 0.5 to about 5% by weight a silane oligomer adhesion enhancer based on a total weight of the photoimageable dry film formulation before drying.
    Type: Grant
    Filed: July 9, 2019
    Date of Patent: May 24, 2022
    Inventor: Sean T. Weaver
  • Patent number: 11331914
    Abstract: A droplet discharging apparatus that discharges liquid droplets from one or more nozzles based on drive waveforms, includes a memory and a processor configured to execute generating, as the drive waveforms, a first drive waveform, and a second drive waveform to change a drive voltage without discharging the liquid droplets; and controlling to output one set of drive waveforms including a predetermined number of instances of the first drive waveform and one instance of the second drive waveform.
    Type: Grant
    Filed: September 15, 2020
    Date of Patent: May 17, 2022
    Assignee: Ricoh Company, Ltd.
    Inventor: Norimasa Sohgawa
  • Patent number: 11331916
    Abstract: A liquid ejecting head including a flow path forming substrate in which a pressure chamber is formed, a diaphragm, and a piezoelectric actuator. The piezoelectric actuator includes an active portion in which a piezoelectric layer is interposed between a first electrode and a second electrode. The active portion, in plan view, overlaps at least a portion of the pressure chamber and is provided so as to extend to an outside of the pressure chamber. The pressure chamber is formed so that, the closer to the piezoelectric actuator in a layered direction of the flow path forming substrate and the diaphragm, a width of the pressure chamber in a direction intersecting the layered direction becomes smaller.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: May 17, 2022
    Inventors: Harunobu Koike, Masao Nakayama, Toshihiro Shimizu
  • Patent number: 11285722
    Abstract: An inkjet head includes a channel unit and a piezoelectric actuator. The piezoelectric actuator includes a first piezoelectric plate, a first electrode, a second piezoelectric plate, a second electrode, and a conductive member. The first piezoelectric plate includes a first surface. The first electrode is disposed on the first surface, and includes a first extending portion. The second piezoelectric plate includes a second surface. The second electrode is disposed on the second surface, and includes a second extending portion. The conductive member includes a first conductive portion and a second conductive portion. The first conductive portion is disposed on the first surface. The second conductive portion is disposed on the second surface. The conductive portion covers, in a first direction, a spacing that is located between the first extending portion and the second extending portion in a second direction.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: March 29, 2022
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventors: Takashi Aiba, Keiji Kura
  • Patent number: 11285721
    Abstract: A piezoelectric printing device includes a substrate and a piezoelectric plate. At least one row of drop ejectors is disposed along a row direction. Each drop ejector includes a nozzle in fluid communication with a pressure chamber that is bounded by side walls. The piezoelectric plate has a first surface that is disposed proximate to the first side of the substrate. A bonding layer is disposed between the piezoelectric plate and the substrate. An electrode layer is disposed between the first surface of the piezoelectric plate and the bonding layer. The electrode layer includes a signal line corresponding to each pressure chamber. Each signal line leads to a signal input pad. The electrode layer also includes ground traces disposed on both sides of each pressure chamber. The ground traces are electrically connected to at least one common ground bus that is electrically connected to at least one ground return pad.
    Type: Grant
    Filed: June 26, 2020
    Date of Patent: March 29, 2022
    Assignee: Suzhou Ruifa Printing Technology & Co, Ltd
    Inventors: Yonglin Xie, Xiaofei Zhang
  • Patent number: 11288471
    Abstract: A method of marking an article for authentication, the comprising the steps of applying an identification mark to an article, said mark comprising an array of varying sized markings, where the combination of the shape, the spatial distribution and the varying sizes of the markings imparts a distinctiveness to the identification mark recording the identification mark in a database and associating information relating to the article with the identification mark in the database, wherein comparison of the identification mark on the article and the database enables the identification mark to be associated with the information relating to the article on the database.
    Type: Grant
    Filed: February 20, 2019
    Date of Patent: March 29, 2022
    Assignee: Chameleon Innovations Australia (CIA) Pty Ltd
    Inventor: Thomas Fontaine
  • Patent number: 11289642
    Abstract: A piezoelectric element 10 includes a lower electrode, constituted of a Pt/Ti laminated film, a PLT seed layer, formed on the lower electrode, a PZT piezoelectric film, formed on the PLT seed layer, and an upper electrode, formed on the PZT piezoelectric film. A curve Q1 is a curve drawn such as to pass through a plurality of plotted points, each expressing a PLT (100) peak intensity with respect to a Pt (111) peak intensity according to a substrate setting temperature during forming of the Pt/Ti laminated film. A relationship of the PLT (100) peak intensity with respect to the Pt (111) peak intensity is within a range in the curve Q1 until the PLT (100) peak intensity decreases by 5% from a peak point P, at which the PLT (100) peak intensity is the maximum, and a (100) orientation rate of PLT constituting the seed layer is not less than 85%.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: March 29, 2022
    Assignee: ROHM CO., LTD.
    Inventors: Koji Nomura, Nobufumi Matsuo, Tomohiro Date
  • Patent number: 11279136
    Abstract: A device for supplying liquid ink to an ink print head in an ink printing machine includes an ink reservoir, a line for guiding the ink from the reservoir to the print head, a line for guiding the ink from the print head to the reservoir, and a damper for damping pressure fluctuations in the liquid ink. The damper has a movable and/or deformable membrane with a given thickness. In a position of repose, the membrane has a length L and a width W, and the length L is at least twice as long as the width W. The device renders possible in a simple and cost-efficient way to reliably avoid even large pressure fluctuations, in particular high pressure peaks in the liquid ink.
    Type: Grant
    Filed: July 13, 2020
    Date of Patent: March 22, 2022
    Assignee: Heidelberger Druckmaschinen AG
    Inventors: Joerg-Achim Fischer, Michael Schoepke
  • Patent number: 11273641
    Abstract: A piezoelectric actuator includes a common electrode, an individual electrode, a first conductive pattern, a second conductive pattern, and a third conductive pattern. The first conductive pattern electrically connects to the common electrode. The second conductive pattern does not electrically connect to either the common electrode or the individual electrode. The third conductive pattern electrically connects to the individual electrode. The first conductive pattern and the third conductive pattern are opposite to each other relative to the second conductive pattern.
    Type: Grant
    Filed: March 30, 2020
    Date of Patent: March 15, 2022
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Toru Kakiuchi
  • Patent number: 11247463
    Abstract: A liquid discharge head includes an actuator base, a case member, and a nozzle plate. The actuator base includes a plurality of grooves space from each other in a first direction. Each of the grooves extends in a second direction. The actuator base is formed of a piezoelectric ceramic material. The case member includes a frame portion spaced from the actuator base in the second direction. The frame portion has an end surface in the third direction that is level with an end surface of the actuator base in the third direction. The frame portion is formed of a ceramic material having aluminum titanate as a main component. The nozzle plate is contacting the end surface of the frame portion and the end surface of the actuator base.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: February 15, 2022
    Assignee: TOSHIBA TEC KABUSHIKI KAISHA
    Inventor: Masashi Shimosato
  • Patent number: 11235331
    Abstract: A fluid ejection device may include a blank cassette that includes a substrate, a die coupled to the substrate, a number of assigned electrical traces formed on the substrate, and a number of unassigned electrical traces formed on the substrate. At least one wirebond may couple at least one of the unassigned electrical traces to the die thereby assigning at least one function to the fluid ejection device.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: February 1, 2022
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Gary G. Lutnesky, Dennis R. Esterberg, Matthew David Smith
  • Patent number: 11192365
    Abstract: A piezoelectric printhead includes a piezoelectric printing device, a manifold, a U-shaped flexible printed wiring element and an interconnection element. The piezoelectric printing device includes a piezoelectric plate and a substrate with at least one row of drop ejectors; an ink inlet port; signal lines leading to corresponding signal input pads; and ground traces leading to at least one ground return pad. The manifold is fluidically connected to the ink inlet port. The U-shaped flexible printed wiring element includes a device connection region and a pair of legs that extend from the device connection region. The pair of legs includes signal connection lines and at least one ground connection line. The interconnection element is disposed between the device connection region of the U-shaped flexible printing wiring element and a contact layer of the piezoelectric printing device that includes the signal input pads and the at least one ground return pad.
    Type: Grant
    Filed: June 26, 2020
    Date of Patent: December 7, 2021
    Assignee: SUZHOU RUIFA PRINTING TECHNOLOGY CO., LTD
    Inventors: Xiaofei Zhang, Liqiang Zhu, Yonglin Xie, Jianfei Jiang
  • Patent number: 11179936
    Abstract: A liquid ejecting head includes a flow path forming substrate, a vibration plate that is formed on one surface side of the flow path forming substrate, a first piezoelectric element that is provided on the vibration plate, a second piezoelectric element that is provided on the vibration plate, a protective substrate that is bonded to the one surface side of the flow path forming substrate, a flow path member that is adhered to a side of the protective substrate opposite to the flow path forming substrate via an adhesive, and a drive circuit that is mounted in a space formed so as to be surrounded by the flow path forming substrate, the protective substrate, and the flow path member, in which the flow path member is provided with a hole portion which is open to a region facing the space.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: November 23, 2021
    Assignee: Seiko Epson Corporation
    Inventor: Hajime Nakao
  • Patent number: 11171280
    Abstract: A piezoelectric device includes: a first electrode provided above a substrate; a piezoelectric layer provided above the first electrode; and a second electrode provided above the piezoelectric layer. The piezoelectric layer includes a plurality of layers that includes a composite oxide of a Perovskite structure containing potassium, sodium, and niobium. The piezoelectric layer has a first region and a second region in a 3 ?m×3 ?m region of a plane perpendicular to a thickness direction of the piezoelectric layer. The first region is a region in which the ratio of an atomic concentration (atm %) of potassium with respect to the sum of the atomic concentration (atm %) of potassium and an atomic concentration (atm %) of sodium is 0.30 to 0.45, and the second region is a region in which the ratio is 0.55 to 0.75.
    Type: Grant
    Filed: August 28, 2019
    Date of Patent: November 9, 2021
    Inventors: Takayuki Yonemura, Yasuto Kakemura
  • Patent number: 11155088
    Abstract: A liquid ejection head includes: individual passages each having a nozzle; supply liquid passages each communicating with an individual inlet of a corresponding one of the individual passages; return liquid passages each communicating with an individual outlet of a corresponding one of the individual passages; a first supply coupling liquid passage coupling the supply liquid passages to each other and communicating with a first inlet of each of the supply liquid passages; and a second supply coupling liquid passage coupling the supply liquid passages to each other and communicating with a second inlet of each of the supply liquid passages. In each of the supply liquid passages, the individual inlet of the corresponding one of the individual passages is located between the first inlet and the second inlet.
    Type: Grant
    Filed: July 31, 2019
    Date of Patent: October 26, 2021
    Assignee: BROTHER KOGYO KABUSHIKI KAISHA
    Inventors: Katsumi Kakamu, Masaaki Deguchi
  • Patent number: 11152559
    Abstract: A supporting film is provided on an opening and a wall of a substrate. A piezoelectric film is provided on a first region of the supporting film corresponding to the opening and a second region of the supporting film corresponding to the wall. The thickness of the piezoelectric film at the second region is smaller than that of the piezoelectric film provided at the first region. Therefore, vibration of the piezoelectric film in the first region is large, and vibration of the piezoelectric film in the second region is small. This alleviates disadvantages such as a loss of the vibration characteristics of a piezoelectric element.
    Type: Grant
    Filed: March 20, 2018
    Date of Patent: October 19, 2021
    Inventors: Chikara Kojima, Koji Ohashi
  • Patent number: 11130335
    Abstract: A piezoelectric thin-film element includes a diaphragm plate on a substrate; a lower electrode on the diaphragm plate; a piezoelectric film on the lower electrode, the piezoelectric film containing Pb; and an upper electrode on the piezoelectric film. The diaphragm plate is a laminate in which a silicon oxide layer, a silicon nitride layer, and an amorphous layer containing a metal oxide to trap Pb of the piezoelectric film are laminated in turn on the substrate. The amorphous layer has a thickness of preventing Pb of the piezoelectric film from reaching the silicon nitride layer.
    Type: Grant
    Filed: March 11, 2020
    Date of Patent: September 28, 2021
    Assignee: RICOH COMPANY, LTD.
    Inventors: Toshiaki Masuda, Keishi Miwa, Takahiko Kuroda
  • Patent number: 11090940
    Abstract: A liquid ejection head includes an ejection orifice for ejecting a liquid; a substrate on which an energy-generating element and an insulating layer are formed on a first surface; a liquid inflow path which penetrates the substrate and makes a liquid flow in a flow path disposed between the ejection orifice and the element; and a liquid outflow path which penetrates the substrate and makes the liquid flow out of the flow path. The liquid inflow path and the liquid outflow path have a first opening and a second opening penetrating the insulating layer on the first surface of the substrate, the ejection orifice is disposed between the liquid inflow path and the liquid outflow path, and an ejection orifice side end of the second opening is formed closer to the ejection orifice than an ejection orifice side end of the first opening.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: August 17, 2021
    Assignee: Canon Kabushiki Kaisha
    Inventor: Masataka Kato
  • Patent number: 11090935
    Abstract: A liquid ejection module includes a pressure chamber, a supply flow channel that supplies a liquid to the pressure chamber, a collection flow channel that collects the liquid from the pressure chamber, a liquid feeding chamber connected to one of the supply flow channel and the collection flow channel, and a connection flow channel connecting the liquid feeding chamber to the other of the supply flow channel and the collection flow channel. The liquid feeding chamber includes a liquid feeding mechanism that circulates the liquid in the supply flow channel, the pressure chamber, the collection flow channel, the liquid feeding chamber, and the connection flow channel. A ratio of a sum of flow channel resistance of the supply flow channel, the pressure chamber, and the collection flow channel relative to flow channel resistance of the connection flow channel is equal to or above 0.5.
    Type: Grant
    Filed: December 26, 2019
    Date of Patent: August 17, 2021
    Assignee: Canon Kabushiki Kaisha
    Inventors: Toru Nakakubo, Akihisa Iio, Rei Kurashima, Takahiro Akiyama, Hiroyuki Ozaki
  • Patent number: 11084285
    Abstract: A liquid discharge head includes: a pressure chamber; a nozzle connected to the pressure chamber and overlapping in a first direction with the pressure chamber; a first throttle channel connected to an end at a first side in a second direction, which is orthogonal to the first direction, of the pressure chamber and extending in the second direction; and a second throttle channel connected to an end at a second side in the second direction of the pressure chamber and extending in the second direction. In each of the first throttle channel and the second throttle channel, a length in a third direction orthogonal to the first direction and the second direction is longer than a length in the first direction.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: August 10, 2021
    Assignee: BROTHER KOGYO KABUSHIKI KAISHA
    Inventor: Taisuke Mizuno
  • Patent number: 11081637
    Abstract: A piezoelectric element is obtained using a method including: preparing a first structure; preparing a second structure; disposing a first facing electrode layer of the first structure to face a first surface of a vibration plate substrate and bonding the first structure to the first surface of the vibration plate substrate; processing the vibration plate substrate into a vibration plate by polishing or etching a second surface of the vibration plate substrate to which the first structure is bonded; preparing a laminate structure by disposing a second facing electrode layer of the second structure to face an exposed surface of the vibration plate and bonding the second structure to the vibration plate; and removing at least a part of a first silicon substrate of the first structure and a second silicon substrate of the second structure from the laminate structure.
    Type: Grant
    Filed: December 19, 2017
    Date of Patent: August 3, 2021
    Assignee: FUJIFILM Corporation
    Inventors: Takamichi Fujii, Takayuki Naono
  • Patent number: 11056812
    Abstract: An actuator device includes: an actuator including first contacts arranged in a first direction; and a wire member including second contacts and joined to the actuator. The second contacts are arranged in the first direction and respectively connected to the first contacts. Each of particular contacts as the first contacts or the second contacts has a protruding and recessed portion including: at least two protrusions; and a recess between the at least two protrusions. The particular contacts include: at least one central-region contact disposed on a central region in the first direction; and at least one end-region contact disposed nearer to an end region than to the central region in the first direction. The protruding and recessed portion of each of the at least one central-region contact is different in shape from the protruding and recessed portion of each of the at least one end-region contact.
    Type: Grant
    Filed: August 7, 2018
    Date of Patent: July 6, 2021
    Assignee: BROTHER KOGYO KABUSHIKI KAISHA
    Inventors: Toru Kakiuchi, Yasuo Kato, Rui Wang, Yuichi Ito
  • Patent number: 11020971
    Abstract: A liquid ejection head including an orifice plate including an ejection orifice, an element substrate including an energy-generating element, and a flow path wall member for formation of a flow path, the flow path wall member being disposed between the element substrate and the orifice plate, wherein the orifice plate includes a first surface and a second surface which is opposite to the first surface and which is disposed facing the element substrate, the first surface includes a first diamond-like carbon film, respective contact angles ?1 and ?2 to pure water, of the first surface and the second surface, satisfy a relationship of Expression 1 defined in the specification, and composition in the first surface of the first diamond-like carbon film satisfies all relationships of Expression 2 to Expression 5 defined in the specification.
    Type: Grant
    Filed: October 31, 2019
    Date of Patent: June 1, 2021
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Seiko Minami, Kenji Takahashi, Masaya Uyama
  • Patent number: 11014357
    Abstract: A piezoelectric element includes: a first electrode and a second electrode; and a piezoelectric layer provided between the first electrode and the second electrode, where: the piezoelectric layer contains a complex oxide having a perovskite structure and including potassium, sodium, and niobium; on a cross-section of the piezoelectric layer, a standard deviation of values that are obtained by normalizing sodium atom concentrations in eight regions by an average value of the sodium atom concentrations in the eight regions is 0.140 or less; each of the regions includes a central line of the piezoelectric layer; each of the regions is a square having a size in a thickness direction of the piezoelectric layer and a size in a direction orthogonal to the thickness direction of 150 nm; and the eight regions are aligned in the direction orthogonal to the thickness direction.
    Type: Grant
    Filed: January 28, 2020
    Date of Patent: May 25, 2021
    Assignee: Seiko Epson Corporation
    Inventors: Tomohiro Sakai, Kazuya Kitada, Yasumi Ikehara
  • Patent number: 11018651
    Abstract: Bulk acoustic wave (BAW) resonators, and electrical filters that incorporate the BAW resonators, are described. Generally, the BAW resonators comprise a substrate comprising an acoustic reflector; a first electrode disposed over the acoustic reflector; a piezoelectric layer disposed over the first electrode, the piezoelectric layer comprising scandium-doped aluminum nitride (ASN); a diffusion barrier layer disposed over the piezoelectric layer; and a second electrode disposed over the diffusion barrier layer. The diffusion barrier layer configured to prevent diffusion of material of the first electrode into the piezoelectric layer.
    Type: Grant
    Filed: April 19, 2018
    Date of Patent: May 25, 2021
    Assignee: Avago Technologies International Sales Pte. Limited
    Inventors: Domingo Figueredo, Hans G. Rohdin, Brice Ivira, Alexia Kekoa
  • Patent number: 11007779
    Abstract: An inkjet head including a flow path unit and a plurality of actuator units, each of the plurality of actuator units has a parallelogram shape defined by two sets of opposing sides, which is substantially parallel to a first direction and a second direction intersecting with each other along a plane, the side of the actuator unit parallel to the second direction is substantially parallel to that of an adjacent actuator unit and is shifted from that of the adjacent actuator unit in the second direction, the plurality of actuator units are inclined with respect to two contour lines of a flow path unit, the two contour lines being parallel with each other and extending in a longitudinal direction of the flow path unit, and centers of gravity of contours of the plurality of actuator units are arranged on substantially one straight line which is parallel to the contour lines.
    Type: Grant
    Filed: February 1, 2019
    Date of Patent: May 18, 2021
    Assignee: BROTHER KOGYO KABUSHIKI KAISHA
    Inventor: Atsuo Sakaida
  • Patent number: 10981380
    Abstract: A liquid discharge head includes a plurality of nozzles through which a liquid is discharged, the plurality of nozzles arrayed in a nozzle array direction, a plurality of pressure chambers respectively communicating with the plurality of nozzles, a plurality of individual channels respectively communicating with the plurality of pressure chambers, a common channel communicating with each of the plurality of individual channels, an individual-channel member including the plurality of pressure chambers and the plurality of individual channels, a common-channel member including the common channel, and a partition between the individual-channel member and the common-channel member. The partition includes a plurality of through-hole regions each connecting the common channel and the plurality of individual channels, and a plurality of recoverably-deformable regions facing the common channel.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: April 20, 2021
    Assignee: Ricoh Company, Ltd.
    Inventor: Takahiro Yoshida
  • Patent number: 10981383
    Abstract: A liquid ejecting head includes a nozzle plate having a plurality of nozzles, and a flow path plate bonded to one side of the nozzle plate, the flow path plate having flow paths including a liquid reservoir configured to store a liquid to be supplied to the nozzles, in which the liquid reservoir is defined by a concave portion disposed on a side of the flow path plate opposite to the nozzle plate, a bottom of the concave portion includes a first portion along a periphery of the concave portion and a second portion inside the first portion in plan view from a thickness direction of the flow path plate, and the thickness of the first portion is thicker than the thickness of the second portion.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: April 20, 2021
    Assignee: Seiko Epson Corpoation
    Inventor: Shinichi Tsubota
  • Patent number: 10971673
    Abstract: A piezoelectric element has a first electrode layer, a piezoelectric layer on the first electrode layer, a second electrode layer on the piezoelectric layer, a third electrode layer on part of the second electrode layer and including third metal, and an insulating layer covering at least a part of the piezoelectric layer not provided with the second electrode layer and having an aperture exposing a part of the second electrode layer. The second electrode layer has a first layer including first metal and a second layer including second metal on the first layer. The second layer is exposed in the aperture. A difference in standard redox potential between the second metal and the third metal is smaller than a difference in standard redox potential between the first metal and the third metal.
    Type: Grant
    Filed: March 26, 2018
    Date of Patent: April 6, 2021
    Assignee: Seiko Epson Corporation
    Inventors: Koji Ohashi, Takahiro Kamijo, Katsuhiro Imai, Takumi Yamaoka, Chikara Kojima
  • Patent number: 10946653
    Abstract: The fluid ejection microfluidic device, has a substrate; a buried cavity within the first substrate; a membrane formed by the first substrate and extending between the buried cavity and a first main surface of the substrate; and an access channel extending through the substrate, laterally and externally to the buried cavity and to the membrane and isolated with respect to the buried cavity. A sealed actuation structure extends over the first main surface of the substrate. A containment layer, of polymeric material, extends over the first main surface of the substrate and forms a fluid containment chamber accommodating the sealed actuation structure. A nozzle body of semiconductor material closes the fluid containment chamber at the top and is traversed by an ejection opening, forming, together with the fluid containment chamber and the access channel, a fluidic path.
    Type: Grant
    Filed: May 16, 2019
    Date of Patent: March 16, 2021
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Domenico Giusti, Mauro Cattaneo, Donata Asnaghi
  • Patent number: 10946654
    Abstract: A liquid ejecting head includes a nozzle array composed of nozzles, pressure generating chambers communicating with the nozzles of the nozzle array, and actuators that are positioned to correspond individually to the pressure generating chambers. Each the actuators includes a piezoelectric layer being sandwiched by a first electrode and a second electrode. The first electrode serves as individual electrodes provided individually for the respective actuators. The second electrode serves as a first common electrode that extends over the actuators corresponding to a first region of the nozzle array and a second common electrode that extends over the actuators corresponding to a second region of the nozzle array.
    Type: Grant
    Filed: August 16, 2019
    Date of Patent: March 16, 2021
    Assignee: Seiko Epson Corporation
    Inventor: Yoshitaka Matsubara
  • Patent number: 10913272
    Abstract: A liquid ejecting head includes a vibration plate constituting a part of a wall surface of a pressure chamber accommodating a liquid; a piezoelectric element vibrating the vibration plate; and a reinforcing film disposed on a surface of the vibration plate on a pressure chamber side, in which a vibration region, which is a region of the vibration plate and is vibrated by the piezoelectric element, has an elongated shape in a plan view viewed in a thickness direction of the vibration plate, and the vibration region includes a first region in which the reinforcing film is not disposed and a second region which is located at a position closer to a center of the vibration region in a longitudinal direction than the first region, and in which the reinforcing film is disposed.
    Type: Grant
    Filed: June 24, 2019
    Date of Patent: February 9, 2021
    Inventors: Satoshi Takemoto, Eiju Hirai, Masao Nakayama, Naoto Yokoyama, Osamu Tonomura
  • Patent number: 10913065
    Abstract: An apparatus includes a chamber, a nozzle connected to the chamber, a fluid driver proximate the driver to expel fluid from the chamber through the nozzle, a microfluidic passage, an inlet connecting the microfluidic passage and the chamber, a sensor proximate the inlet to sense fluid within a fluid sensing zone within the inlet, and a particle aggregation limiter to control aggregation of particles within the sensing zone.
    Type: Grant
    Filed: January 22, 2016
    Date of Patent: February 9, 2021
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Chantelle E. Domingue, Manish Giri
  • Patent number: 10913264
    Abstract: A fluid ejection apparatus includes a plurality of fluid ejectors. Each fluid ejector includes a pumping chamber, and an actuator configured to cause fluid to be ejected from the pumping chamber. The fluid ejection apparatus includes a feed channel fluidically connected to each pumping chamber; and at least one compliant structure formed in a surface of the feed channel. The at least one compliant structure has a lower compliance than the surface of the feed channel.
    Type: Grant
    Filed: June 20, 2018
    Date of Patent: February 9, 2021
    Assignee: FUJIFILM Dimatix, Inc.
    Inventors: Christoph Menzel, Kevin von Essen, Steven H. Barss, Mats G. Ottosson, Darren T. Imai
  • Patent number: 10906316
    Abstract: A method for the manufacture of a microelectromechanical systems (MEMS) device comprising bonded components which together define a chamber in the device, which method comprises forming a bonding material layer on a surface of a first component, patterning the bonding material layer and, optionally, the first component and bonding a second component to the patterned bonding material layer and first component. The forming of the bonding material layer comprises partially curing a curable material and the bonding of the second component to the patterned bonding material layer and the first component comprises fully curing the partially cured material.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: February 2, 2021
    Assignee: XAAR TECHNOLOGY LIMITED
    Inventor: Bruce Scott
  • Patent number: 10894408
    Abstract: A liquid discharging head includes a first flow path member comprising a first flow path and a pressure chamber; a second flow path member stacked on the first flow path member and comprising a second flow path; a wiring substrate comprising a connection terminal for electrically connected to a driving element to generate a pressure change in the pressure chamber; and a circulation flow path for circulating the liquid through the pressure chamber. A surface of the first flow path member includes a first region which is stacked on the second flow path member via the wiring substrate and a second region which is stacked on the second flow path member without the wiring substrate. The first flow path and the second flow path are in communication with each other in the second region so as to be the circulation flow path.
    Type: Grant
    Filed: March 19, 2019
    Date of Patent: January 19, 2021
    Assignee: Seiko Epson Corporation
    Inventors: Motoki Takabe, Eiju Hirai, Yuma Fukuzawa, Shunya Fukuda
  • Patent number: 10875299
    Abstract: A liquid droplet ejecting apparatus includes a nozzle; a flow-path-section having a first pressure-chamber, a communication-path enabling the nozzle to communicate with the first pressure-chamber, and a second pressure-chamber communicating with the first pressure-chamber through the communication-path; a first signal-generator that generates a first driving signal to drive a first piezoelectric-element; a second signal-generator that generates a second driving signal to drive a second piezoelectric-element; and an inspector that inspects ejection from the nozzle based on electromotive force generated by the first piezoelectric-element due to residual vibration that has occurred in the flow-path-section due to the driving of the first piezoelectric-element. The first driving signal includes a first inspection waveform.
    Type: Grant
    Filed: December 27, 2019
    Date of Patent: December 29, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Kinya Ozawa
  • Patent number: 10875302
    Abstract: actuator component for a droplet deposition head made up of a number of patterned layers, each layer extending in a plane normal to a layering direction, with the layers being stacked one upon another in said layering direction. A row of fluid chambers is formed within the layers, with the row extending in a row direction, which is substantially perpendicular to the layering direction. Each fluid chamber is provided with a respective nozzle and a respective actuating element, which is actuable to cause the ejection of fluid from the chamber in question through the corresponding one of the nozzles. A row of inlet passageways is also formed within the layers of the actuator component, with the row extending in the row direction. Each inlet passageway is fluidically connected so as to supply fluid to a respective one of said fluid chambers.
    Type: Grant
    Filed: October 5, 2016
    Date of Patent: December 29, 2020
    Assignee: XAAR TECHNOLOGY LIMITED
    Inventors: Robert Errol McMullen, Peter Mardilovich, Peter Boltryk
  • Patent number: 10875304
    Abstract: A liquid ejecting head includes: a substrate; a first electrode; a piezoelectric layer covering the first electrode; a second electrode positioned on the piezoelectric layer; a plurality of pressure chambers arrayed in a first direction; and a rigid layer. Each pressure chamber has one end portion and another end portion in a second direction. The rigid layer has an edge providing a plurality of convex parts and a plurality of concave parts. Each convex part and each concave part are alternately arrayed with each other in the first direction. Each convex part is positioned outside each pressure chamber and protrudes in the second direction toward the another end portion. Each concave part is positioned at each pressure chamber and is concaved in the second direction away from the another end portion.
    Type: Grant
    Filed: August 14, 2019
    Date of Patent: December 29, 2020
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Toru Kakiuchi
  • Patent number: 10870277
    Abstract: There is provided a liquid discharge head including a substrate having a pressure chamber, an actuator, and a channel member. The actuator has a first film arranged on the substrate and a second film arranged on a surface of the first film. The substrate and the channel member are attached to each other with an adhesive. A first through hole is formed in a part of the first film, and a second through hole is formed in a part of the second film. An edge of the first through hole is positioned further inward of the second through hole than an edge of the second through hole. The adhesive is applied to a part of the surface of the first film overlapping with the second through hole, so as to cover a boundary part between the first and second films.
    Type: Grant
    Filed: October 30, 2018
    Date of Patent: December 22, 2020
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Atsushi Hirota
  • Patent number: 10870274
    Abstract: In a liquid ejecting head, a reduction in mechanical strength due to a liquid chamber provided to circulate a liquid is limited. The liquid ejecting head includes: a nozzle plate provided with a nozzle; a flow channel forming unit provided with a pressure chamber to which a liquid is supplied, a communication channel through which the nozzle and the pressure chamber communicate with each other, and a circulating liquid chamber communicating with the communication channel; and a pressure generating unit that generates a pressure change in the pressure chamber. A height at a first location in the circulating liquid chamber is larger than a height at a second location on a side of the communication channel when viewed from the first location.
    Type: Grant
    Filed: December 7, 2017
    Date of Patent: December 22, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Katsutomo Tsukahara, Yuma Fukuzawa
  • Patent number: 10868232
    Abstract: A piezoelectric material includes a metal oxide containing at least Ba, Ca, Ti, Zr, and Mn, in which the piezoelectric material has a perovskite structure, in which: x, which represents a ratio of a content (mol) of Ca to A (mol) representing a total content of Ba and Ca, falls within a range of 0.10?x?0.18; y, which represents a ratio of a content (mol) of Zr to B (mol) representing a total content of Ti, Zr, and Mn, falls within a range of 0.055?y?0.085; and z, which represents a ratio of a content (mol) of Mn to the B (mol), falls within a range of 0.003?z?0.012, and in which the piezoelectric material satisfies a relationship of 0?(|d31(?20u)?d31(?20d)|)/|d31(?20u)|?0.08, and has a value of 130 pm/V or more for each of |d31(?20u)| and |d31(?20d)|.
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: December 15, 2020
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Hiroshi Saito, Akira Uebayashi, Tomohiro Watanabe, Yuto Niinuma, Yasushi Shimizu, Toshihiko Akatsuka
  • Patent number: 10862019
    Abstract: An actuator device includes: an actuator including piezoelectric elements arranged in a first direction and first contacts arranged in the first direction; a protector including a first wall opposed to the piezoelectric elements and a second wall coupled to the first wall and joined to a region of the actuator at which the first contacts are disposed; first connection terminals disposed on the first; and first through electrodes formed in the second wall to bring the first contacts and the first connection terminals into conduction with each other. A distance between two of the first through electrodes which respectively correspond to two of the piezoelectric elements which are adjacent to each other in the first direction is greater than a distance in the first direction between the two of the piezoelectric elements which are adjacent to each other in the first direction.
    Type: Grant
    Filed: April 10, 2019
    Date of Patent: December 8, 2020
    Assignee: BROTHER KOGYO KABUSHIKI KAISHA
    Inventors: Toru Kakiuchi, Yasuo Kato, Rui Wang, Yuichi Ito
  • Patent number: 10854806
    Abstract: A vibrating device includes a piezoelectric element, a wiring board electrically connected with the piezoelectric element, and a diaphragm including a metal. The piezoelectric element and the wiring board are bonded to the diaphragm. The piezoelectric element includes a piezoelectric element body, a plurality of internal electrodes, and a plurality of external electrodes. The piezoelectric element body has a first principal plane and a second principal plane opposed to each other. The plurality of internal electrodes is disposed in the piezoelectric element body. The internal electrodes are opposed to each other in a direction in which the first principal plane and the second principal plane are opposed. The plurality of external electrodes is disposed on the first principal plane, and is electrically connected with corresponding internal electrodes, of the plurality of internal electrodes. The wiring board has a resin film and a plurality of conductors.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: December 1, 2020
    Assignee: TDK CORPORATION
    Inventors: Kaoru Kijima, Tatsuya Taki, Kazushi Tachimoto
  • Patent number: 10836165
    Abstract: A fluid discharge head according to an embodiment includes abase including a plurality of first grooves disposed side by side in a first direction and a plurality of second grooves disposed side by side in the first direction and respectively disposed among the plurality of first grooves, an individual wire including individual electrodes formed in the second grooves, the individual wire being extended to one side in a second direction crossing the first direction, a common wire including common electrodes formed in the first grooves, the common wire being extended to the other side in the second direction, a connection wire connected to the common wire on the other side in the second direction and leading to the one side, and a nozzle plate including nozzles that communicate with the first grooves of the base.
    Type: Grant
    Filed: November 26, 2018
    Date of Patent: November 17, 2020
    Assignee: TOSHIBA TAC KABUSHIKI KAISHA
    Inventor: Masashi Shimosato
  • Patent number: 10833244
    Abstract: A piezoelectric element having a vibrating section including a vibrating plate, a first electrode, a piezoelectric layer, and a second electrode, in which a crystal orientation of a piezoelectric material forming the piezoelectric layer is (100) and a crystal structure of the piezoelectric material is a tetragonal crystal, and a total thickness T1 of the vibrating plate and the first electrode and a total thickness T2 of the piezoelectric layer and the second electrode have a relationship of T1?T2.
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: November 10, 2020
    Assignee: Seiko Epson Corporation
    Inventors: Takayuki Yonemura, Yasuhiro Itayama, Chikara Kojima
  • Patent number: 10828895
    Abstract: Provided is a precision instrument including a moisture absorbent in an internal space, in which the moisture absorbent is a solid material of which a surface has a water resistance property.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: November 10, 2020
    Assignee: Seiko Epson Corporation
    Inventor: Yoshinori Nakajima