With Specific Illumination Detail Patents (Class 348/131)
  • Patent number: 6845178
    Abstract: A method and apparatus for characterizing pixels in an image of an object surface by providing at least two images of the surface wherein each pixel has a unique location common to all of the images; comparing each pixel value at each location to an identification matrix; and identifying the region in which each pixel is located based on the comparison. The matrix can comprise a plurality of non-pixel values representing one or more regions, each of the regions defining at least one surface attribute. One embodiment provides at least two references images of a template using the same technique used to obtain each image of the surface, and creating the matrix using the reference images. Providing at least two images comprises providing a first and second image, wherein the surface is illuminated using a first and second source of illumination, or providing the first using a source of illumination and providing the second from the first.
    Type: Grant
    Filed: June 27, 2001
    Date of Patent: January 18, 2005
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Frank Evans, Mark Singer
  • Publication number: 20040183901
    Abstract: A lighting system is disclosed comprising a plurality of image projection lighting devices including a first image projection lighting device, a central controller, and a communications system which permits the central controller to communicate with the plurality of image projection lighting devices. The first image projection lighting device is comprised of a camera, and a light valve, wherein the light valve is used to project a first projected image onto a projection surface. The camera of the first image projection light device can capture at least a portion of the first projected image projected from the light valve to form a first captured image. At least a portion of the first captured image is projected as a second projected image by the first image projection lighting device onto the projection surface creating a video feedback loop.
    Type: Application
    Filed: February 19, 2004
    Publication date: September 23, 2004
    Inventor: Richard S. Belliveau
  • Patent number: 6763131
    Abstract: A mechanism to produce projection images 40A-40G representing a model extraction region and an image sensing region is incorporated in an image sensing unit 1 of an image processing apparatus. A control unit 2 receives an image from image sensing unit 1 to calculate density deviation within the model extraction region. The calculated result is output to a level display unit 27. When the operator determines the position of image sensing unit 1 so that projection images 40A, 40B and 40C representing the model extraction region are projected distinctly on the pattern of the subject to be registered and a high level value is displayed by level display unit 27 and depresses a teach button switch 30, image data within the current model extraction region is registered as the model image.
    Type: Grant
    Filed: December 20, 1999
    Date of Patent: July 13, 2004
    Assignee: Omron Corporation
    Inventors: Koji Shimada, Masahiro Kawachi, Fumiaki Nakamura
  • Publication number: 20040114035
    Abstract: A device for viewing an object is provided comprising a housing, a camera disposed in a housing for receiving an image of the object, focusing optics associated with the camera, an illumination source and a faceted focusing panel for reflecting illumination to the object in a large solid angle of illumination. Also provided is a method of providing an illumination source for an object, comprising determining the specularity of the object, determining an acceptable defect size in the uniformity of the illumination field, and providing an illumination geometry having defect size less than the acceptable defect size. Illumination geometries are provided that include a faceted reflecting panel.
    Type: Application
    Filed: April 18, 2003
    Publication date: June 17, 2004
    Inventor: Timothy White
  • Publication number: 20040095465
    Abstract: An image capture module and an image capture apparatus for inputting shape of an object in three dimensional space, including a light emitting section which emits light to the object for reflection by the object and imaging of reflected light on a photo-receiving plane of a reflected light image detecting section via an image capture optical system. The reflected light image detecting section detects a reflected light image indicative of a distribution of intensity of the reflected light. The light may be irradiated evenly to the object and the shape of the object may be detected correctly even if the object has irregularity by disposing the light emitting section closely to the image capture optical system. The object may be illuminated evenly by the light from a light emitting section having plural light emitting elements by disposing the light emitting elements symmetrically about the image capture optical system.
    Type: Application
    Filed: July 7, 2003
    Publication date: May 20, 2004
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Shunichi Numazaki, Takahiro Murata, Miwako Doi, Akira Morishita, Naoko Umeki
  • Publication number: 20040075739
    Abstract: Herein disclosed is a surveillance camera apparatus which comprises a camera unit, a camera retaining assembly for retaining the camera unit, a camera checking unit for checking whether or not the camera unit is normally operated, a camera driving unit for driving the camera unit to be moved in a surveillance area where the camera unit performs a surveillance operation, and a non-surveillance area where the camera unit performs no surveillance operation, and where the camera unit is capable of being checked, a light emitting unit designed to assume two different states consisting of a first state under which the light emitting unit emits the light, and a second state under which the light emitting unit stops emitting the light, a state setting unit for setting the light emitting unit to selectively assume the first and second states, and a drive control unit for controlling the camera driving unit, the drive control unit being operative to assume a first operation state under which the camera unit is driven t
    Type: Application
    Filed: September 4, 2003
    Publication date: April 22, 2004
    Inventor: Jyoji Wada
  • Publication number: 20040061779
    Abstract: A defect inspection system for the semiconductor and microelectronics industry. More particularly, the present invention relates to an automated defect inspection system for wafers or other semiconductor or electronic substrates of any kind or type that are transparent, translucent, opaque or otherwise capable of allowing at least some light to pass through.
    Type: Application
    Filed: September 30, 2002
    Publication date: April 1, 2004
    Inventors: Mark Harless, Jeremy Jenum, Willard Charles Raymond
  • Patent number: 6697102
    Abstract: An elongate rugged cylindrical metal housing encloses rotatable forward looking and side looking video cameras for inspecting bore holes of water, oil and natural gas wells. A ring-shaped array of white LEDs is mounted on a PC board at the forward end of the housing. The ring-shaped array of LEDs surrounds, and is spaced rearward of a flat sapphire window through which the forward looking video camera views down the bore hole. The array of forward looking LEDs is encased behind a dome-shaped acrylic window which protects the forward looking LEDs from physical impacts and also functions as a light pipe. A side looking video camera is mounted in an inner tube rotatable by a motor drive within the outer housing about a longitudinal axis of the outer housing. The side field of view of the second video camera can be aligned with a predetermined circumferential region of a side wall of the bore hole for locating and inspecting defects in a well casing.
    Type: Grant
    Filed: October 31, 2000
    Date of Patent: February 24, 2004
    Assignee: DeepSea Power & Light Company
    Inventors: Mark S. Olsson, David A. Cox, Jeffrey A. Prsha, Michael E. Turgeon
  • Publication number: 20040021771
    Abstract: The present invention provides systems and methods for obtaining a three-dimensional (3D) representation of one or more light sources inside a sample, such as a mammal. Mammalian tissue is a turbid medium, meaning that photons are both absorbed and scattered as they propagate through tissue. In the case where scattering is large compared with absorption, such as red to near-infrared light passing through tissue, the transport of light within the sample is described by diffusion theory. Using imaging data and computer-implemented photon diffusion models, embodiments of the present invention produce a 3D representation of the light sources inside a sample, such as a 3D location, size, and brightness of such light sources.
    Type: Application
    Filed: June 25, 2003
    Publication date: February 5, 2004
    Applicant: Xenogen Corporation
    Inventors: Daniel G. Stearns, Bradley W. Rice, Michael D. Cable
  • Patent number: 6687028
    Abstract: An image exposing apparatus for exposing an image onto a light sensitive material, is provided with a plurality of light beam emitting element arrays, each light beam emitting element array emitting aligned-light beams which are aligned in at least a single line; a light mixing device for mixing a plurality of aligned-light beams emitted from the plurality of light beam emitting element arrays and for emitting mixed-aligned-light beams which are aligned in the same line; a light receiving device located so as to receive the mixed-aligned-light beams at a position where the light sensitive material is exposed; and an adjusting device for adjusting a position of each of the plurality of light beam emitting element arrays based on a light receiving result by the light receiving means.
    Type: Grant
    Filed: April 27, 2000
    Date of Patent: February 3, 2004
    Assignee: Konica Corporation
    Inventors: Kazuo Kasahara, Eiji Ito, Atsushi Suzuki
  • Publication number: 20040008252
    Abstract: There are provided a method for deciding a duty factor in driving a light-emitting device and a driving method using the duty factor that enable restraint of deterioration of light-emitting elements and improvement in reliability. In a method for deciding a duty factor of a light-emitting device that performs display based on an analog video signal, with respect to a characteristic obtained by multiplying the characteristic of luminance after X hours in relation to the current density and the characteristic of luminance after X hours in relation to the duty factor when the total quantity of electricity flowing through light-emitting elements in one frame period is defined at a specific value, a range of duty factor that enables realization of luminance approximately exceeding a value that is 0.8 times a maximum value is regarded as an optimum range of duty factor.
    Type: Application
    Filed: July 1, 2003
    Publication date: January 15, 2004
    Inventors: Mitsuaki Osame, Yu Yamazaki, Tomoyuki Iwabuchi
  • Patent number: 6667762
    Abstract: A miniature inspection system for observing an object. The system comprises a camera (4) defining an optical axis (8) defined between the camera (4) and the object when located at the object inspection location. A ring light (14) is located concentrically with respect to and along the optical axis at a location between an entrance aperture of the camera (4) and the object, when located at the object observing location. A field lens (10) is located along the optical axis at a location between the camera (4) and the object, when placed at the object observing location. A mirror or a penta-prism (34) may be located along the optical axis, between the camera (4) and the field lens, so that light reflected from the object along the optical axis is reflected by either the mirror or the penta-prism (34) toward the entrance aperture of the camera (4). An illumination source (50), may be also provided to supply illumination along the optical axis of the system.
    Type: Grant
    Filed: February 16, 2001
    Date of Patent: December 23, 2003
    Assignee: Robotic Vision Systems, Inc.
    Inventors: William P. Bouvier, Timothy P. White, John J. Merva
  • Publication number: 20030227547
    Abstract: A device and system including an optical head assembly and a dome, and a method for use thereof. The optical head assembly includes an illumination portion and an imaging portion and is situated behind the dome. The dome may have an optical system integrated therein.
    Type: Application
    Filed: May 14, 2003
    Publication date: December 11, 2003
    Inventor: Gavriel J. Iddan
  • Publication number: 20030214581
    Abstract: An imaging section is secured to a casing, and an object is supported on an object support section, which is located within the casing. The object support section is moved within the casing in order for an imaging distance between the imaging section and the object, which has been supported on the object support section, to be altered. Excitation light is irradiated to the object, which has been supported on the object support section, with an excitation light source, which is secured to the object support section. A distribution of illuminances of the excitation light on the object is thus prevented from fluctuating to a fluctuation of the imaging distance.
    Type: Application
    Filed: March 28, 2003
    Publication date: November 20, 2003
    Applicant: FUJI PHOTO FILM CO., LTD.
    Inventor: Seishi Ikami
  • Patent number: 6625318
    Abstract: What is disclosed is a method comprising performing an observation on a sensor having a plurality of pixels, for each of the pixels that are unclassified, determining a score according to the observation, if the score for the each pixel satisfies a stopping condition, classifying the each pixel as being one of either defective or functional, and repeating the steps of performing, determining and classifying for any the pixels remaining unclassified after determining the score.
    Type: Grant
    Filed: November 13, 1998
    Date of Patent: September 23, 2003
    Inventors: Yap-Peng Tan, Tinku Acharya
  • Publication number: 20030174208
    Abstract: In-vivo images including three-dimensional or surface orientation information may be captured and viewed An in-vivo site is illuminated by a plurality of sources, and the resulting reflected images may be used to provide three-dimensional or surface orientation information on the in-vivo site. The system may include a swallowable capsule.
    Type: Application
    Filed: December 17, 2002
    Publication date: September 18, 2003
    Inventors: Arkady Glukhovsky, Hanoch Kislev, Gavriel Meron
  • Patent number: 6621517
    Abstract: A viewing and imaging system is provided for use in a screen printer. Light is supplied to the screen and/or the board from a number of independently controller light sources. According to one aspect of the invention, one light source provides substantially collimated light and another light source provides diffuse light. The light sources are controlled by a controller that pulses the light sources in order to provide a stroboscopic image of the board and screen. The duration of the pulses is adjusted to adjust the effective brightness of the light sources. The timing of the pulses are adjusted so that the temporal midpoints of pulses from each of the light sources are coincident.
    Type: Grant
    Filed: November 15, 1999
    Date of Patent: September 16, 2003
    Assignee: DEK International GmbH
    Inventor: Frank Norman Squibb
  • Patent number: 6618123
    Abstract: The invention provides a range finder capable of carrying out three-dimensional measurement stably for a long period of time. A light pattern is projected on a subject by using a light source array unit in which a plurality of light sources, such as LEDs, are arranged. Even when each LED has a small light quantity, a sufficiently large quantity of light can be projected on the subject by the entire light source array unit, and hence, the three-dimensional measurement can be stably carried out. Also, a plurality of light patterns can be generated by electrically controlling a light emitting state of each LED of the light source array unit.
    Type: Grant
    Filed: October 15, 2001
    Date of Patent: September 9, 2003
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Kenya Uomori, Atsushi Morimura, Joji Wada, Takeo Azuma
  • Patent number: 6583812
    Abstract: A cathode ray tube phosphor screen inspecting method includes the steps of illuminating a panel of a cathode ray tube, in which a phosphor screen having a regular pattern is formed the inner surface of a face, from the inner surface of the face, imaging the face inner surface, and specifying a defect on the phosphor screen from data obtained by the imaging. The panel, an illuminating unit for illumination, and an image unit for performing the imaging are moved relative to each other. The amount of light from the illuminating unit is changed in accordance with this relative movement.
    Type: Grant
    Filed: December 24, 1998
    Date of Patent: June 24, 2003
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tatsuya Yamazaki, Toshiyuki Imaizumi, Katsumi Omote, Kazumasa Hirayama
  • Publication number: 20030090566
    Abstract: A method for eliminating the flicker of a light source such as a florescent light having the first step of setting a first frame rate for the capture of a series of frames. Then, setting a capture integration period to a first integration period, and capturing a set of frames under an illumination source with a first frequency. Thereafter, determining the first frequency of the illumination by using a Fourier transform (FFT) of the set of captured frames. What is also disclosed is an apparatus for performing the above method having an image sensor and a capture control unit coupled to the image sensor.
    Type: Application
    Filed: December 20, 2002
    Publication date: May 15, 2003
    Inventors: Ronald D. Smith, Gregory W. Starr
  • Patent number: 6542180
    Abstract: The lighting behavior of a vision system is inconsistent between vision systems, within a vision system over time or between parts being viewed. This inconsistency makes it difficult to correctly run part programs even within a single run of parts on a single machine. The multi area image quality tool systems, methods and graphical user interfaces adjust the light intensity of a vision system to obtain a desired image quality or characteristic of a captured image. The multi area image quality tool is used to define a plurality of regions of interest within a captured image to be used to determine the image quality or characteristic of the captured image resulting from a current illumination level. The multi area image quality tool allows a user to easily and quickly define multiple regions of interest that can be used to determine the image quality of a captured image.
    Type: Grant
    Filed: January 18, 2000
    Date of Patent: April 1, 2003
    Assignee: Mitutoyo Corporation
    Inventors: Richard M. Wasserman, Ana M. Tessadro
  • Publication number: 20020196337
    Abstract: The weak light color imaging device according to the present invention comprises; a white light source (21) having variable output for illuminating a subject A; an excitation light source (22) for irradiating excitation light onto the subject A; an RGB filter (33) for respectively transmitting the red, green and blue wavelength components of the weak light from the subject A; a light amplifying tube (35) for amplifying the intensity of the light of each respective wavelength component of the weak light from the subject A being transmitted by the RGB filler (33); a CCD camera (37) for capturing images of the respective amplified wavelength components from the subject A; an RGB frame memory (41) for respectively storing image signals of the respective wavelength components thus captured; a scan converter (44) for superimposing the image signal of the respective wavelength components stored by the ROB frame memory (41), and converting the scanning thereof to a color image signal; and a monitor (27) for displayin
    Type: Application
    Filed: March 1, 2002
    Publication date: December 26, 2002
    Inventor: Kaneyoshi Takeyama
  • Publication number: 20020196338
    Abstract: An apparatus for inspecting a printed circuit board device, the device including at least one component mounted on a circuit board, the apparatus comprising an object carrier for carrying the printed circuit board device, imaging means for imaging along an optical axis so as to receive light reflected from surfaces of the device when placed on the object carrier within a field of view of the imaging means, and light projecting means for projecting light toward the object carrier in an oblique direction with respect to the optical axis of the imaging means for illumination of said surfaces of the device. The light projecting means includes a substantially dome-shaped structure incorporating a plurality of light elements for producing and projecting the light. Said plurality of light elements includes light elements of different light characteristics and light elements of different orientations of projection for creating a predetermined illumination pattern on said surfaces of said printed circuit board device.
    Type: Application
    Filed: June 3, 2002
    Publication date: December 26, 2002
    Inventor: Yew Fei Tham
  • Publication number: 20020163573
    Abstract: An imaging system for creating a three dimensional image of an object. The imaging system includes a housing and three sets of light sources mounted to the housing. The light sources are selectively illuminated for projecting light on the object. A camera is spaced from the housing for capturing projected light reflecting from the object. A lens and a diffuser are mounted to the housing and are spaced from the light sources for focusing and blurring the projected light to define an image projected upon the object. A controller is connected to the light sources for sequentially illuminating the light sources to produce at least three different images on the object. The controller is also connected to the camera for controlling the camera to capture the different images for creating the three dimensional image of the object.
    Type: Application
    Filed: April 11, 2001
    Publication date: November 7, 2002
    Inventors: Leonard H. Bieman, Gary Rutledge
  • Patent number: 6445518
    Abstract: A semiconductor device lead inspection apparatus and method are provided for capturing images of the semiconductor edges and leads along two optical axes which have different directions in a plane perpendicular to the semiconductor device edge. A first image is reflected off an optical surface of a prism to a direction corresponding to the camera optical axis. A second image is reflected by two optical surfaces of the prism to a direction corresponding to the camera optical axis.
    Type: Grant
    Filed: November 28, 2000
    Date of Patent: September 3, 2002
    Assignee: Semiconductor Technologies & Instruments, Inc.
    Inventor: Pao Meng Lee
  • Patent number: 6441888
    Abstract: A rangefinder performs highly accurate 3D measurement without being affected by any variation in intensity of projected light. A light source for projecting light onto an object is provided with a light receiver for detecting the intensity of the projected light. The intensity of a reflected part of the projected light, which has been captured by a camera as an image, is corrected using the light intensity, which has been detected by the light receiver, as correction information. And based on this corrected image, a distance calculator produces a range image. Thus, even if the intensity of the projected light has changed, a corresponding variation in intensity of the reflected light image can be compensated for.
    Type: Grant
    Filed: March 17, 2000
    Date of Patent: August 27, 2002
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Takeo Azuma, Kenya Uomori
  • Patent number: 6414713
    Abstract: An image pickup system is provided wherein an illumining device illumines an object from above on its front side. When an image of the object is to be picked up, a moving device moves the position of the image pickup device relative to the object so as to easily pickup the image of the object. To this end, a commodity as an object is placed within an image pickup box. An image of the commodity is picked up by a camera placed outside the box. In this case, the commodity is illumined by the illumining device from above on its front side. The camera and the commodity are moved relative to each other. Thus, illumination blurs are reduced and a clear image is easily picked up.
    Type: Grant
    Filed: December 22, 1998
    Date of Patent: July 2, 2002
    Assignee: Casio Computer Co., Ltd.
    Inventors: Isao Ebisawa, Seiji Tachibana
  • Publication number: 20020080236
    Abstract: An illumination and imaging system is provided with a co-axial illuminator that does not include a beamsplitter. The co-axial illuminator achieves efficiencies substantially in excess of those achieved with a beamsplitter. In one aspect, an optical stop is used to reflect illumination upon a target. The optical stop includes an aperture allowing light reflected from the target to pass to a detector. The aperture of the stop has an asymmetrical feature that facilitates operation on specular targets.
    Type: Application
    Filed: December 14, 2001
    Publication date: June 27, 2002
    Inventors: David D. Madsen, Eric P. Rudd, Mark R. Schoeneck
  • Patent number: 6347583
    Abstract: An apparatus for inspecting a screen of a screen printing machine, including the steps of taking, with an image taking device, an image of at least one opening of the screen, and judging, based on image data representing the taken image, whether the opening of the screen is clogged.
    Type: Grant
    Filed: February 7, 2000
    Date of Patent: February 19, 2002
    Assignee: Fuji Machine Mfg. Co., Ltd.
    Inventors: Takeyoshi Isogai, Jun Adachi, Toshinori Shimizu, Manabu Mizuno
  • Patent number: 6297644
    Abstract: A test structure which includes alternating grounded and floating conductive lines may be used to test the formation of conductive features on an integrated circuit topography. During irradiation of the conductive lines from an electron source, the grounded conductive lines will appear darker than the floating conductive lines when the test structure is inspected. If a short occurs between the conductive lines, due to an extra material defect, the portion of the floating line in the vicinity of the defect will also appear darkened. If an open appears along a grounded line, the non-grounded portion of the grounded line will be glowing. The grounded conductive lines are preferably grounded through a depletion-mode transistor. By applying a voltage to the transistor, the grounded line may be disconnected from ground, allowing electrical testing of the test structure.
    Type: Grant
    Filed: March 4, 1999
    Date of Patent: October 2, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Richard W. Jarvis, Iraj Emami, John L. Nistler, Michael G. McIntyre
  • Patent number: 6275256
    Abstract: An illuminator for a digital camera includes a body of transparent material defining a cone shaped cavity with an opening at the apex of the cone for a taking lens of the camera and an opening at the base of the cone for locating an object to be photographed with the digital camera. A plurality of light emitting diodes (LEDs) are uniformly distributed throughout the body of transparent material with respect to the surface of the cone. A power supply applies power to the LEDs so that their brightness' are equal.
    Type: Grant
    Filed: December 3, 1997
    Date of Patent: August 14, 2001
    Assignee: Eastman Kodak Company
    Inventors: Eugene G. Olczak, Thomas Szumla, Joseph L. Baker
  • Patent number: 6271963
    Abstract: An illumination device for attachment to an optical imaging apparatus, such as a microscope, that provides bright, even illumination throughout the part under observation. The illuminating device has a diffuse light source, an optical element to receive part of the light from the light source and reflecting part toward the object under observation, and reflecting elements to collect and redirect stray light rays toward said object. The reflecting elements can be angled parallel to the beamsplitter and transverse with the part.
    Type: Grant
    Filed: January 14, 1999
    Date of Patent: August 7, 2001
    Inventor: Daniel Freifeld
  • Patent number: 6207946
    Abstract: A variable intensity lighting system for use with a machine vision apparatus for capturing high contrast images of articles to be inspected, such as semiconductor packages, includes an LED or optical fiber element and flash lamp array configured in multiple segments which are operable to be controlled as to light output intensity by a programmable intensity control circuit operably connected to a microprocessor. The intensity control circuit includes multiple digital potentiometers operable to control selected segments of the lighting array. The control circuit is adapted to control up to 64 segments of the lighting array individually at 64 incremental intensity levels, respectively. The control circuit may include a light failure module to detect a segment failure or a reversed connection.
    Type: Grant
    Filed: July 26, 1999
    Date of Patent: March 27, 2001
    Assignee: Semiconductor Technologies & Instruments, Inc.
    Inventors: Noor Ashedah Binti Jusoh, Tan Seow Hoon, Sreenivas Rao
  • Patent number: 6188784
    Abstract: The present invention provides method and apparatus for determining lead integrity of IC devices characterized by an inspection arrangement which comprises optical elements for back lighting the leads disposed on either side of a trackway for the travel of the IC device thereon. The optical elements are arranged in such a fashion as to simultaneously produce a sharp backlit silhouette image of the leads protruding from either or both sides of the IC device. In accordance with the invention, means are provided for continuously and automatically feeding IC devices through an inspection station in the apparatus where an illumination source through the optical elements directs an intense light beam so that a sharp silhouette or backlit outline of the leads on both sides of the IC device is simultaneously obtained. A single camera is disposed to face the opposing direction of the illumination and optics to receive the silhouette or backlit outline of the IC device leads, as well as the top surface of the device.
    Type: Grant
    Filed: March 3, 1998
    Date of Patent: February 13, 2001
    Assignee: American Tech Manufacturing, Inc.
    Inventor: Frank V. Linker, Jr.
  • Patent number: 6160906
    Abstract: A pickup tool (30) has reflective surfaces (42, 44, 46, 48) attached thereto. The pickup tool (30) picks up an object (38) and moves the object (38) over a light source (51). The reflective surfaces (42, 44, 46, 48) reflect a light beam (61) emitted from the light source (51), generating deflected light beams (63, 65, 67, 69) which back light the object (38). The deflected light beams (63, 65, 67, 69) form silhouette images of the object (38) in cameras (52, 54, 56, 58). A visual inspection of the object (38) is performed by analyzing the images.
    Type: Grant
    Filed: June 1, 1998
    Date of Patent: December 12, 2000
    Assignee: Motorola, Inc.
    Inventors: David Charles Lehnen, Christopher John LeBeau, Tonya Marie Twine
  • Patent number: 6147357
    Abstract: An apparatus and a method are provided for inspecting the edge micro-texture of a semiconductor wafer. The apparatus includes a diffuse hemisphere having at least one access port and has a normal axis, a laser target sphere mounted within the hemisphere, and a laser source directing a laser beam to the laser target sphere and forming a laser spot on the laser target sphere. The laser beam is reflected from the laser target sphere. A wafer chuck presents a wafer edge to the reflected laser beam, with the wafer edge being tilted from the normal axis; and there is at least one camera for detecting radiation leaving the access port. The method includes directing a laser beam to a laser target sphere which is mounted within a diffuse hemisphere; the laser beam forming a laser spot on the laser target sphere is reflected from the laser target sphere to the edge of a wafer; and radiation which leaves the hemisphere through at least one access port of the hemisphere is detected with at least one camera.
    Type: Grant
    Filed: February 3, 1999
    Date of Patent: November 14, 2000
    Assignee: Wacker Siltronic Corporation
    Inventor: Claudian R. Nicolesco
  • Patent number: 6118524
    Abstract: An illumination apparatus and method illuminates one or more reflective elements, such as solder balls on an electronic component or other protruding surfaces or objects. The illumination apparatus includes one or more arc shaped or arc shape arranged light sources that provides a substantially even illumination across the one or more reflective elements. An illumination detection device detects light beams reflecting off of the illuminated reflective elements for forming a reflected image. A method of processing the reflected image includes locating one or more points on each reflected image element representing an illuminated reflective element. The points on the reflected image elements are used to located the pattern of the reflected image elements and/or to fit an outline around each image element corresponding to a known percentage of the true dimensions of each solder ball or other reflective element.
    Type: Grant
    Filed: April 7, 1999
    Date of Patent: September 12, 2000
    Assignee: Acuity Imaging, LLC
    Inventors: Steven Joseph King, Jonathan Edmund Ludlow
  • Patent number: 6111601
    Abstract: A non-contact gaging method and apparatus using a directional light beam develops a silhouette image on a CCD camera detector array; the image spanning opposite edges of an object to be gauged. The three dimensional object is imaged on the two dimensional camera array and, by means of computer analysis of pixels output from the camera, precise measurements to MIL Standards of physical dimensions are made at high rates for high volume production.Errors inherent in Prior Art devices are eliminated by only using a point source of light and eliminating the need for any additional optics. The system overcomes dimensional error by continuously gauging the high precision etched mark on the camera faceplate.
    Type: Grant
    Filed: December 11, 1995
    Date of Patent: August 29, 2000
    Inventor: Yoshi Adachi
  • Patent number: 6040895
    Abstract: In a method and apparatus wherein components and/or markings applied to substrates are illuminated with illumination devices and imaged via a camera, adequate contrast between useful and unwanted structures is achieved even in the case of highly disparate optical properties of different materials for the substrates, components and markings by the use of an illumination device composed of a number of illumination units that respectively emit light in spectral ranges different from one another and which are thereby separately varied in intensity. This illumination with variable spectral distribution assures an adequate contrast even given the employment of different materials for the illuminated items.
    Type: Grant
    Filed: April 29, 1998
    Date of Patent: March 21, 2000
    Assignee: Siemens Aktiengesellschaft
    Inventor: Gerhard Haas
  • Patent number: 6017133
    Abstract: The device for recognizing the position of the terminals (A) of components (BE) whose optical unwanted structures proceed in two principal directions (X, Y) has an image transducer (BW) equipped with an objective (O); and at least one segmented ring light illumination (RB; RB1, RB2) whose rays (S; S1, S2) are incident onto the surface of the components (BE) from all sides upon exclusion of angular segments (WS) around the principal directions (X, Y). By suppressing the light directions incident perpendicular and parallel to the unwanted structures, the terminals (A) are presented with clearly higher contrast than the other structures of the components (BE). The device is particularly utilized in components vision systems of automatic equipping units. It enables a reliably recognition of the position of the spherical terminals even given flip chips, bare chips and ball grid arrays and, thus, an exact optoelectronic centering of these components.
    Type: Grant
    Filed: June 30, 1997
    Date of Patent: January 25, 2000
    Assignee: Siemens Aktiengesellschaft
    Inventors: Hans Horst Grasmuller, Gunther Wittmann
  • Patent number: 5987160
    Abstract: A method and apparatus for inspecting a substrate having a surface on which a photoresist material has been deposited. The apparatus preferably includes a device for transporting substrates through an illumination beam such that the edges of the substrates are sequentially irradiated by the beam without requiring that each substrate be individually manipulated. The illumination beam is generated and projected onto the substrates by equipment configured to produce a beam having a size, wavelength, and intensity sufficient to cause the photoresist material to fluoresce with an intensity that can be detected without magnification. Inspection can be performed manually or automated through optical equipment that can detect flaws in the photoresist based on knowledge of the patterned image desired for the photoresist.
    Type: Grant
    Filed: April 2, 1997
    Date of Patent: November 16, 1999
    Assignees: Delco Electronics Corporation, Hughes Electronics
    Inventors: Jeffrey Dean Harlow, David A. Rockwell
  • Patent number: 5969334
    Abstract: An array of a large number of low quality light collectors measure light generated by arrays of coherent light illuminators and rebounded from a target. The resulting data is utilized to derive the resulting speckle pattern which in turn is Fourier transformed to reconstruct the target image.
    Type: Grant
    Filed: May 6, 1985
    Date of Patent: October 19, 1999
    Assignee: Hughes Danbury Optical Systems, Inc.
    Inventor: Richard A. Hutchin
  • Patent number: 5946029
    Abstract: An image processing process disposes a television (TV) camera for observing a direct reflection of an incident light in a direction substantially coinciding with rolling direction of such detection object as a laminating substrate or the like, and observes a direct reflection component of the light with mutual positional relationship between the TV camera, object and a light source varied. Measuring thus sequentially the brightness with the angle of incident light varied, a lighting angle at which the brightness of reflection is the largest, that is, an incident angle of direct reflection light is obtained with respect to respective measuring points on the object, and an image representing a distribution of incident angles of the direction reflection light can be obtained by obtaining the incident angles of the direct reflection light with respect to the whole points on the detection object.
    Type: Grant
    Filed: June 2, 1997
    Date of Patent: August 31, 1999
    Assignee: Matsushita Electric Works, Ltd
    Inventors: Kazunari Yoshimura, Ryosuke Mitaka, Kuninori Nakamura, Yasuyuki Yuki
  • Patent number: 5943125
    Abstract: An inspection system and method uses a ring illumination apparatus to illuminate one or more reflective elements, such as solder balls on an electronic component or other protruding surfaces or objects. The ring illumination apparatus includes a substantially ring-shaped light source that provides a substantially even illumination across the one or more reflective elements. An illumination detection device detects light beams reflecting off of the illuminated reflective elements for forming a reflected image. A method of processing the reflected image includes locating one or more edges of each reflected image element representing an illuminated reflective element. The edges of the reflected image elements are located by determining the maximum intensity gradient in the pixels forming the reflected image element. The inspection system and method thereby determines various characteristics such as the absence/presence, location, pitch, size and shape of each reflective element.
    Type: Grant
    Filed: February 26, 1997
    Date of Patent: August 24, 1999
    Assignee: Acuity Imaging, LLC
    Inventors: Steven Joseph King, Jonathan Edmund Ludlow, Jon Chouinard, George Schurr
  • Patent number: 5923771
    Abstract: The present invention relates to a device that measures and counts near surface bubbles on a copper bar, as well as the cracks on the lateral sides. The device detects said flaws in real time. The device is based on the image digitalization technique. The device consists of a personal computer, a video camera, a digitalization card, water and air sprinklers, external monitor and camera frame. The input of the images is performed with the video camera protected within the frame. The object of the water and air sprinklers is to make the bar flaws more visible. The external monitor allows to focus the area of interest and the digitalizing card within the computer, following the instructions of the program, performs the image analysis.
    Type: Grant
    Filed: January 30, 1997
    Date of Patent: July 13, 1999
    Assignee: Servicios Condumex S.A. De C.V. Carretera ASLP. KM.
    Inventors: Daniel Cardenas Garcia, Daniel Aguilera Longoria, Fernado Luengas Ruiz
  • Patent number: 5880774
    Abstract: A non-invasive inspection system is disclosed. The system contains light sources or source, viewing optics, an x-y table, and a platen for mounting objects to be inspected. The transparent platen contains a vacuum system that sets up a laminar flow of air which in turn holds the objects in place without altering or damaging the devices, and allows for analysis of light transmitted through devices. The method for operating the system is also included.
    Type: Grant
    Filed: June 23, 1993
    Date of Patent: March 9, 1999
    Assignee: Texas Instruments Incorporated
    Inventor: Charles H. Anderson
  • Patent number: 5861910
    Abstract: The image formation system of the invention provides a compact apparatus for viewing indicia on a planar mirror-like (specular) substrate, such as a semiconductor wafer. The invention is particularly effective in viewing indicia that require either brightfield or high-angle darkfield illumination. These and other benefits of the invention are provided in part by providing selective directional focusing and defocusing of the reflected image of the illumination elements that illuminate the indicia, while providing substantial focusing of the image of the indicia at high contrast. In the case of high-angle darkfield illumination, directionally selective focusing maximizes useful darkfield area by minimizing interference between the reflected image of the illumination sources and the image of the indicia, while the contrast of the image of the indicia is maximized.
    Type: Grant
    Filed: October 21, 1997
    Date of Patent: January 19, 1999
    Inventors: E. John McGarry, Jeffrey Friedman
  • Patent number: 5845002
    Abstract: The topographic surface features of a translucent object, such as a citrus fruit with a peel, are scanned and evaluated to permit the classification thereof according to its surface features. In the case of citrus fruit, the coarseness or pebbliness, puff and crease, ridge and valley, cuts, punctures, scrapes and splits, clear rot or sour rot of the peel is optically identified through digital analysis of the pixel scans and sorted based upon the peel surface quality. The object is classified by separating the scanned image of the fruit from the background image and removing the background image. A statistical evaluation of the image of the object as a whole, including both hemispheres of the object, is made to determine if there is any surface feature variation which might qualify as a defect or be a suitable basis upon which a classification judgment can be made.
    Type: Grant
    Filed: November 3, 1994
    Date of Patent: December 1, 1998
    Assignee: Sunkist Growers, Inc.
    Inventors: Richard D. Heck, Henry A. Affeldt
  • Patent number: 5828449
    Abstract: An inspection system and method uses a ring illumination apparatus to illuminate one or more reflective elements, such as solder balls on an electronic component or other protruding surfaces or objects. The ring illumination apparatus includes a substantially ring-shaped light source that provides a substantially even illumination across the one or more reflective elements. An illumination detection device detects light beams reflecting off of the illuminated reflective elements for forming a reflected image. A method of processing the reflected image includes locating one or more edges of each reflected image element representing an illuminated reflective element. The edges of the reflected image elements are located by determining the maximum intensity gradient in the pixels forming the reflected image element. The inspection system and method thereby determines various characteristics such as the absence/presence, location, pitch, size and shape of each reflective element.
    Type: Grant
    Filed: July 25, 1997
    Date of Patent: October 27, 1998
    Assignee: Acuity Imaging, LLC
    Inventors: Steven Joseph King, Jonathan Edmund Ludlow, George Schurr
  • Patent number: 5821997
    Abstract: A still image recording apparatus for compressing and storing image information comprises a compression unit for compressing the same image information at a plurality of different compression ratios, and a memory for storing the image data compressed by the compression unit at the different compression ratios, collectively. It further comprises a selector for setting a combination of compression ratios to the compression unit. The selector selects the combination of compression ratios based on a degree of complexity of the input image information.
    Type: Grant
    Filed: May 27, 1997
    Date of Patent: October 13, 1998
    Assignee: Nikon Corporation
    Inventors: Koichiro Kawamura, Masahiro Suzuki