Abstract: An apparatus for storing a mask includes a main body comprising a first region and a second region, the first region having a plurality of mask containers, a gas supply pipe having an outer portion outside of the main body, a fan in the first region to propel the gas from the second region to the first region, a filter disposed at a front end and/or a rear end of the fan, a heat exchanger in the second region and configured to exchange heat with the flowing gas, a Peltier element at the outer portion of the gas supply pipe, a first sensor installed in the gas supply pipe upstream of the Peltier element, a second sensor installed in the second region in a lower position to the heat exchanger, and a controller connected to the first and second sensors and the Peltier element.

Abstract: An image reading apparatus includes a conveying unit to convey a document, first and second reading units, a reception unit, a selection unit, and a setting unit. The first reading unit generates image data form a document first side and the second reading unit generates image data from a second side in parallel with the first reading unit reading. The reception unit receives settings regarding a size, an orientation, and a document opening direction of the document. The selection unit selects either a first reading method causing the first and second reading units to read per the set size, and a second reading method causing the first reading unit to read the first side per the set size and causing the second reading unit to read an entire second side. The setting unit sets image data corresponding to the document second side reading by the second reading method.

Abstract: A method of operating a printing system according to a printing path schedule, the printing system including a duplex loop including a plurality of pitches with each pitch of the plurality of pitches operatively arranged to carry one sheet, the method including receiving input data related to one or more images to be printed, preparing a printing path schedule based on the input data, receiving an indication of the delay in the printing system, determining whether the delay is equal to a multiple of a whole pitch of the plurality of pitches, and if the delay is not equal to a multiple of a whole pitch of the plurality of pitches, adjusting the printing path schedule.

Abstract: A scanning apparatus for scanning an object includes a frame and a scanning unit. The frame defines a passage and two frame openings. The passage has two passage openings opposite to each other in a first direction. The frame openings are opposite to each other in a second direction transverse to the first direction, and are in spatial communication with the passage. The scanning unit includes at least one scanning device that includes a scanning casing and a scanner. The scanning casing has a scanning opening in direct connection with one of the frame openings of the frame. The scanner is disposed in the scanning casing, and operable to scan the object via the scanning opening when the object is moving through the passage in the first direction.

Abstract: An image reading apparatus includes a conveying unit to convey a document, first and second reading units, a reception unit, a selection unit, and a setting unit. The first reading unit generates image data form a document first side and the second reading unit generates image data from a second side in parallel with the first reading unit reading. The reception unit receives settings regarding a size, an orientation, and a document opening direction of the document. The selection unit selects either a first reading method causing the first and second reading units to read per the set size, and a second reading method causing the first reading unit to read the first side per the set size and causing the second reading unit to read an entire second side. The setting unit sets image data corresponding to the document second side reading by the second reading method.

Abstract: When a job for executing both of a one-sided printing and a two-sided printing, the lowering of the productivity is suppressed and an output result a user desires is output.

Abstract: A method for controlling transfer of black and color toned images during combined simplex and duplex printing in an electrophotographic imaging device having either a plurality of movable color photoconductive drums or a plurality of moveable color transfer rolls.

Abstract: Systems and methods for calibrating scanning devices are described. The method comprises dividing a dark scan image of a calibration strip into one or more regions. The dark scan image is further analyzed to obtain at least one data point from each of the one or more regions. Further, calibration values for each of the one or more regions are computed based on the at least one data point for calibrating the scanning device. The calibration values include mean and standard deviation of the data points for each of the one or more regions.

Abstract: An image forming apparatus has a developing unit, a fixing unit, a receiving unit, a paper setting unit, and a control unit. The fixing unit conveys paper on which a visible image is formed by the developing unit between a heating roller and a pressurizing roller to fix the visible image to the paper. The receiving unit receives a demand for smoothing-out of wrinkles of the paper. The paper setting unit sets paper to be subjected to smoothing-out of wrinkles. When the receiving unit receives the demand for smoothing-out of wrinkles, the control unit performs control so that the developing unit is not operated and the paper to be subjected to smoothing-out of wrinkles set in the paper setting unit is conveyed to the fixing unit.

Abstract: A printer includes: a stationary inkjet printhead; a media feed path for guiding print media twice past the printhead; and a feed mechanism for feeding print media unidirectionally through the media feed path at a constant speed. The media feed path includes: a first section configured for feeding print media past the printhead from a first side of the printhead in a first direction with respect to the printhead; a second section downstream of the first section, the second section being configured for guiding print media around a single loop, the loop being positioned at a second side of the printhead opposite the first side; and a third section downstream of the second section, the third section being configured for feeding print media past the printhead from the second side of the printhead in an opposite second direction with respect to the printhead.

Abstract: An image reading device includes a document reading unit configured to guide light emitted from a light source to a photoelectric conversion unit to read an image on the document; a driving unit configured to drive the document reading unit so that the document reading unit reciprocates along the document; a reading position obtaining unit configured to obtain a home position at which the document reading unit is in a stopped state when starting a read operation; a dark time data obtaining unit configured to obtain dark time output data of the photoelectric conversion unit while the light source is turned off; and a read control unit configured to perform control for causing the driving unit to return the document reading unit to the home position and entering a document read operation to read a document image after the dark time data obtaining unit obtains the dark time output data.

Abstract: A duplex imaging apparatus for imaging at least one side of a document, including a processor and lower and upper imaging devices. Each imaging device includes an optical-chamber, a camera and a light-source-configuration, facilitated to directly illuminate each face of the document from at least two illuminating angles. The lower imaging device is enclosed by a glass-window, wherein the document is operatively disposed on the glass-window. Each of the light source configurations includes at least one cluster of light sources, wherein the clusters of light sources are operated in a preconfigured sequence. Direct illumination forms hotspots in the acquired image frames at preconfigured locations, corresponding to the light sources positioning. The processor is facilitated to cutout preconfigured image frame portions containing the hotspots, forming clean portions of the image frames, and to combine the clean portions to form a clean output image frame.

Abstract: A duplex scanning apparatus includes a passageway, a first optical module, a second optical module, a transporting mechanism and an elastic pressing member. The first optical module is disposed on one side of the passageway. The second optical module is disposed on the other side of the passageway. The transporting mechanism transports an original sheet through the passageway and past a first scan position of the first optical module and a second scan position of the second optical module, and images of front and reverse sides of the original sheet are obtained, respectively. The elastic pressing member, disposed between the first scan position and the second scan position, pushes the original sheet towards an original supporting plane.

Abstract: An image reader and document conveying method shorten times necessary for a discharge process that discharges a document in being conveyed and for an idle feeding process of a document that is left on a paper feed tray. If during double-sided reading, a stop key is operated to issue an instruction to cancel reading, a conveyance controller outputs a path specifying signal to select a single-sided path, and thereby a conveyance route is switched from a double-sided path to the single-sided path. For this reason, the discharge process that discharges a document being conveyed at the time of the reading cancellation to a paper discharge tray, and the idle feeding process that discharges a document left on a paper feed tray to the paper discharge tray are performed with use of the single-sided path that is shorter than the double-sided path, and therefore the times necessary for the discharge and idle feeding processes can be shortened.

Abstract: When optically scanning a medium, scanning can proceed immediately even if the size of the medium is unknown. Before or when an optical reading device starts scanning to read all of a recording medium, the CPU 40 sets a scan block of a size that can always be scanned based on the output of media edge sensors 47 and the distance from the scanning position of the optical reading device to the detection position of the media edge sensors 47, and then scans the set scan block.

Abstract: A document data capturing device includes a sheet supply tray for carrying documents, a sheet discharge tray located below the sheet supply tray, and a document conveying mechanism including a conveying path along which documents are guided from the sheet supply tray to the sheet discharge tray. The document data capturing device includes a first data-capturing unit and a second data-capturing unit which scan respective sides of a document conveyed by the document conveying mechanism. The first data-capturing unit and the second data-capturing unit are each configured with a reduction-optics scanning mechanism. The conveying path along which a document to be scanned by the first and second scanning mechanisms is conveyed is formed to surround the second reduction-optics data-capturing unit. Thus, the device can be made compact.

Abstract: A sheet-fed double-sided document scanner is disclosed and includes a first image-capturing assembly, a second image-capturing assembly, a sheet-transporting mechanism, a power receiving interface, and a control circuit. The scanner switches scanning modes according to a power input. The sheet-transporting mechanism transports a document past the first image-capturing assembly and the second image-capturing assembly. The power receiving interface receives power. When a power level of the received power is less than a default threshold level, the control circuit controls the scanner to scan a first side and a second side of the document in a first mode. When the power level of the received power reaches the default threshold level, the control circuit controls the scanner to scan the first side and the second side of the document in a second mode.

Abstract: A method receives a print job and analyzes the complexity of the print job to generate complexity factors. The method performs raster image processing (RIP) on the print job and records the time taken to perform the raster image processing of each page of the print job. This generates “RIP times.” In addition, the method records the size of each page of the print job to generate “page sizes.” Then the method prints the print job and records the time it took to process the print job. Then the method determines how each of the complexity factors, the RIP times, and the page sizes contributed to the time it took to process the print job. This generates “complexity factor time values.” The method prints a report of the complexity factor time values detailing how each of the complexity factors contributed to the time it took to process the print job.

Abstract: A printer includes a data obtaining unit, a storage unit, an engine, and a printing unit. The data obtaining unit obtains, from print data stored in the storage unit, print data for sheets less than the maximum number of sheets dischargeable to a discharge tray as target print data and sends the target print data to the engine via the printing unit. The target print data includes first print data of odd pages and second print data of even pages. After printing the first print data on one side of sheets fed from a feed tray and discharges the sheets onto the discharge tray, the engine prints the second print data on the other side of the sheets manually returned from the discharge tray to the feed tray.

Abstract: An image reading apparatus and an image forming apparatus including the same to improve a transferring path of a document to prevent curl from being generated in the document and to prevent interference between a document having both surfaces scanned and a previously discharged document. The image reading apparatus includes a scan path having one end connected to a document supplying unit and the other end connected to a document discharging unit, a scan unit to read information recorded on a document passing through the scan path, a two-sided document branch path to branch from the scan path so that the document whose first surface is scanned by the scan unit passes through the two-sided document branch path before the document is reversed for a two-side scanning process, and a two-sided document transferring path having one end connected to the two-sided document branch path and other end connected to the scan path.

Abstract: A method for forming a color image that allows a color image forming device to detect print chromaticity by an actually used print medium and automatically perform an optimal color balance adjustment in consideration of the chromaticity of the print medium. At a first step of the method, it is determined whether a feeder is selected for a subsequent printing operation. If selected, the process proceeds to a second step. If not selected, it is determined that the printing operation is not performed for some time and the process is completed without color balance adjustment. At the second step, a print medium for printing a test pattern is fed from the feeder selected for a subsequent printing operation, which is determined at the first step. A color sensor detects the chromaticity of the test pattern transferred and fused on the print medium, and the color balance is then adjusted.

Abstract: An image reading apparatus including: a paper supply section; a transporting path for transporting a document supplied from the paper supply section; a first sensor which reads an image on a first surface of the document from one side of the transporting path; a second sensor which reads an image on a second surface of the document from the other side of the transporting path; and an image processing section which is constituted so as to correspond to a first reading mode in which two sides of the document are read using the first sensor plural times, and a second reading mode in which two sides of the document are read using the first sensor and the second sensor, and which makes a registration position and direction of an output image in both the first and second reading mode the same.

Abstract: A maskless type exposure system using an exposure engine on which a digital micromirror device (DMD) is mounted includes an independent upper and lower side drive type double-sided simultaneous exposure system, in which a flexible object of exposure, including a flexible board, such as a chip-on-film (COF) or a lead frame, is fed in a rolled state, and is simultaneously exposed throughout an exposure pattern thereof on upper and lower sides thereof by independently driving a plurality of exposure engines in x, y and z axial directions in the case where the flexible exposure object has a large area or a restricted exposure region, thereby reducing costs based on minimized defective proportion and maximized productivity.

Abstract: An image reading apparatus has an original placing portion on which an original is placed, a feed portion for feeding the original placed on the original placing portion to convey the original from one end side of an original plate onto the original plate, a conveying rotary member for conveying the original on the original plate, a reversing and conveying portion for reversing the front side and back side of the original conveyed to the other end side of the original plate by the conveying rotary member, and conveying the reversed original from the other end side onto the original plate, an image reading unit for reading the image of the original stopped on the original plate while being moved, and a control portion for controlling the driving of the conveying rotary member.

Abstract: An image input scanner having two scan heads for simultaneous scanning of both sides of a sheet includes two calibration surfaces. A first calibration surface is disposed on the carriage on which a first scan head is mounted. A second calibration surface is disposed on the document handler.

Abstract: An automatic document feed device having reading means for stopping a conveyed document to a reading position on a platen and sequentially reading images of two sides of the document one side by one, includes an adjusting unit, provided upstream of the reading position on the platen, for adjusting an edge of the document, wherein the adjusting unit have a function for adjusting the edge of the document which is fed to read one side, and for reversing the document through the platen and adjusting the edge of the document which is fed again to read the other side of the document. A feed unit includes one of feed guide members and a feed roller in the feed path. The feed path unit is rotatably supported, thereby enabling the feed path to open.

Abstract: In an image reading apparatus having a first original reading device for reading one side of an original guided and fed by a guide, and a second original reading device disposed downstream of the first original reading device for reading the other side of the original, the guide is bent between the first original reading device and the second original reading device so as to shield the respective reading devices. The bending of the guide is done by bending an original feeding path so that direct rays and diffraction rays from each of two light sources may not enter respective photoelectric transfer elements associated with other light source, to thereby shield the photoelectric transfer elements from light of a light source not associated therewith.

Abstract: A device for use with a copier to make copies of both sides of a document or other objects in a single pass. The device is configured to rest on a copier platen without being attached to the platen and without deriving power from the copier. A document holder in the form of a pair of plates joined by a hinged connection is opened for insertion of a document to be copied. The holder is pivotally attached to a base member and spring-biased to rotate from a first to a second position above the copier platen. As a copier scanner moves beneath the holder temporarily latched in its first position, a first side of the document is scanned. A sensor then causes automatic release of the holder permitting it to swing to its second position for scanning its second side as the holder moves to its second position.

Abstract: An image reading apparatus having an original sheet feeding portion and an image reading portion includes two reading sensors which read an image (top surface and back surface) of an original and can almost simultaneously read both sides of the original without a reversing mechanism. In the image reading apparatus, when an instruction for starting reading is implemented without selecting a single-side reading mode or a both-side reading mode of the original, the reading of the both sides is executed for a first original. In the case that the first original is determined to be the both-side original, the both-side reading mode is still executed. In the case that the first original is determined to be the single-side original, the single-side reading mode is executed.

Abstract: A color laser printer includes an intermediate transfer belt, a capture roller for capturing residual toner from the intermediate transfer belt, and a removing roller for removing the toner captured by the capture roller. The capture roller moves to contact and separate from the intermediate transfer belt, and rotates while in contact with the removing roller whether in contact with or separated from the intermediate transfer belt.

Abstract: An image reading apparatus for reading originals, which is transported one at a time, at a predetermined reading station is provided with a first reading station for reading one side of the originals at a bottom of a U-shaped transport path for guiding the originals from a document supply tray to a discharge tray and a second reading station for reading the other side of the originals in a straight portion of a discharge tray for stable reading of the originals. A guide unit forming the second reading station is detachable from below to improve maintainability, and is equipped with an adjustment device for easy adjustment of inclination of the reading unit for reading the originals that pass through the second reading station.

Abstract: A photomask is useful in measuring the aberration of an optical lens. The photomask includes a transparent substrate, a first opaque pattern formed on a first surface of the transparent substrate and defining a plurality of apertures that expose the first surface, and a second opaque pattern formed on the second surface of the transparent substrate. The photomask is placed in an exposure apparatus between a light source of the exposure apparatus and an optical lens whose aberration is to be measured. A photoresist layer on a wafer is exposed through the photomask and the pupil of the optical lens to form a first pattern on the wafer corresponding to the second opaque pattern of the photomask. The aberration of the pupil of the optical lens is evaluated based on the relative location at which the first pattern is formed on the wafer.

Abstract: In exposing a photocurable resin to light, the light is irradiated on the photocurable resin while a base material to which the photocurable resin is applied is immersed in a liquid. An apparatus for carrying out the exposure includes an exposure tank in which a liquid does not dissolve the photocurable resin is reserved and a light source irradiating light to the photocurable resin is immersed in the liquid reserved in the tank. The exposure tank has two opposite side walls which have exposure windows closed by transparent plates respectively. The apparatus may include a plurality of light sources disposed so as to correspond to the representative exposing window. A temperature of the liquid in which the base material is immersed is controlled.

Abstract: A method for scanning and autocropping the valid scope of a frame or consecutive frames of negative film comprises several steps, including step (A) through step (G). Step (A) is to build a database of negative film. Step (B) is to preview a negative film frame for obtaining a plurality of vertex coordinates. Step (C) is to calculate coordinates of the center of the frame according to the vertex coordinates obtained. Step (D) is to input the brand name of the negative film through an input interface of the scanner driver. Step (E) is to search the database for a valid frame scope of the negative film according to the brand name thereof. Step (F) is to calculate the plurality of vertex coordinates in the valid frame scope according to the coordinates of center and the valid frame scope of the negative film. And, step (G) is to display a cropped scope, that is the valid frame scope of the negative film, according to the plurality of the vertex coordinates in the valid frame scope of the negative film.

Abstract: A sheet supply device is formed of a sheet supply stacker, a supply path for guiding a sheet stacked on the sheet supply stacker, a sheet process portion situated in the supply path, and a switch-back path positioned on a downstream side of the sheet process portion. The switch-back path guides the sheet which has passed through the sheet process portion again to the supply path by switching back the sheet. The sheet having passed through the sheet process portion is ejected onto a sheet ejecting stacker. After a first supply of the sheet to the sheet process portion is made, the sheet is reversed by the switch-back path to make a second supply to the sheet process portion; the sheet having been subjected to the second supply is again reversed by the switch-back path to make a third supply to the sheet process portion, and then ejected onto the sheet ejecting stacker. A first supply of a next sheet to the sheet process portion is made between the second and third supplies of the preceding sheet.

Abstract: The invention relates to an installation for exposing a double-sided printed circuit card to light through artworks. The installation comprises a first artwork-support (10) that is fixed, a second artwork (14) that is movable, vertical displacement means (26, 28) for moving the second support, and mechanical connection means between the displacement means and the second support, the first and second supports having relative positioning members (12, 24) suitable for mutual co-operation when the two supports are in the working position.

Abstract: A method is described for exposing both sides of a light sensitive sheet such as a printed circuit board panel according to imaging data. The method uses a device that has an optical system for scanning the sensitive sheet by one or more beams. The optical system scans both sides with the scan lines on one side mutually positioned with respect to the scan lines on the other side. According to one implementation, the optical system includes two optical scanning units driven by a single source, with a switch alternating the beam from the source to one then the other optical scanning unit.

Abstract: A device is described for exposing both sides of a light sensitive sheet such as a printed circuit board panel according to imaging data. The device comprises an optical system for scanning the sensitive sheet by one or more beams. The optical system scans both sides with the scan lines on one side mutually positioned with respect to the scan lines on the other side. According to one implementation, the optical system includes two optical scanning units driven by a single source, with a switch alternating the beam from the source to one then the other optical scanning unit.

Abstract: An image processing device comprising a second side image sensor to determine whether the second side of a document also requires processing. The second side image sensor preferably uses a camera or measures reflected infrared light with an infrared photosensor. The invention relates to a wide variety of image processing devices such as copy machines, facsimile machines, annotators, scanners, printers, etc., which process documents. When the system detects an image or markings on the second side of a document it may merely alert the user or automatically process the second side of the document without additional user interaction.

Abstract: In combinations of stimulable phosphor sheets and cassettes, at least a stimulable phosphor sheet for single-side reading is prevented from being stored in a cassette for double-side reading. A shape of the stimulable phosphor sheet for single-side reading is different from a shape of a stimulable phosphor sheet for double-side reading. A shape of a container area of the cassette for double-side reading does not allow the sheet for single-side reading to be contained therein, due to the difference in the shapes of the sheets.

Abstract: In a printer with a print engine having simplex and duplex sheet printing functions, and simplex and duplex sheet feeding paths, and at least one sheet output path, a plural function module is mounted on top of the print engine. This plural function module provides a document handling unit for feeding original documents to be imaged, and also provides a reversible sheet feeding path operatively communicating with the duplex sheet feeding path of the print engine to provide a space savings printed sheet reversing chute which is outside of the print engine for the duplex printing function. This reversible sheet feeding path in the module is alternately operable unidirectionally to provide an arcuate, inverting, sheet output path to a sheet output stacking tray which may be located on top of the plural function module.

Abstract: A novel device for image-shooting both surfaces of documents at a high rate by an electronic device. The device has an upper transport system for allowing plural documents to descend/move by a pre-set number at a time towards the downstream and an image-shooting device for image-shooting the descending/moving document. Image-shooting can be done simultaneously on both sides or side by side, either during free movement or controlled movement by a transporting device.

Abstract: It is an exemplified object of the present invention is to provide an image reading device and method that would realize a high-resolution image reading. The present invention connects to a movable optical system in a double-sided image readable device at least one of black and white references that a fixed side should referred to.

Abstract: An image forming apparatus according to the present invention includes two deck cases (sheet stacking means) arranged side by side and disposed below a re-feed path for re-feeding a sheet having a first surface on which an image was formed. In the present invention, a sheet feed path of the deck case, among two deck cases, remote from a registration introduction path is joined to an intermediate portion of the re-feed path.

Abstract: The invention relates to a machine for exposing a panel to laser radiation, said panel having a working length L in a first direction Y, and being subdivided into N successive segments. The machine has a fixed structure; a horizontal panel support that is movable relative to the structure; device for generating and modulating N laser beams; and N optical units which are fixed relative to the structure. Each optical unit has deflector device for generating a continuously deflected beam, and a mirror for directing the deflected beam towards the panel, the length l1 of the mirror being greater than L/N.

Abstract: An image reading device capable of reading images on the both surfaces of a document in order while moving the document at a prescribed speed includes a platen for reading the document moving at the prescribed speed, a reversible transferring device for moving the document at the prescribed speed along the platen, and a circulating passage for turning the document and sending back to the platen after reading the image on the obverse surface of the document. The circulating passage is composed of at least first and second turning paths for inverting a direction in which the document is transferred to turn the document upside down, so that the images on the obverse and reverse surfaces of the document can be continuously read with a compact mechanism and starting to scan from the same end of the document whenever the document is read.

Abstract: An image forming apparatus for forming an image on both of a first side and a second side which are the right side and the back side of recording material, which comprises an image carrier on the surface of which a toner image is formed, a transfer member for forming a transfer part between the transfer member and the image carrier to transfer the toner image on the image carrier onto the recording material, a transfer voltage applying section for applying transfer voltage to the transfer member, a fixing member for heating the recording material, on which the toner image is transferred by the transfer member, passed therethrough to fix the toner image on the recording material, a reversing path for reversing the two sides of the recording material passed through the fixing member and returning the reversed recording material to the transfer part again, a timer section for measuring elapsed time since the recording material, on the first side of which a toner image is transferred, passes through the fixing me

Abstract: An image forming apparatus includes: a recording material accommodating device for accommodating recording materials; an image forming device for forming an image on the recording material; a conveyance section for conveying the recording material fed from the recording material accommodating device to the image forming device; a reversal and re-feeding device having a sheet reversal section and a sheet re-feeding section for conducting image formation on two sides of the recording material. After the image is formed by the image forming device on one side surface of the recording material conveyed from the recording material accommodating device through the conveyance section, the recording material is conveyed to the reversal and re-feeding device, and conveyed again to the image forming device through the sheet re-feeding section of the reversal and re-feeding device and the conveyance section, and an image is formed on the other side surface of the recording material by the image forming device.

Abstract: A removable cover for protecting a reticle used in a lithography system is described. The removable cover includes a frame and a membrane supported by the frame. The membrane is transparent to an inspection wavelength such that the reticle can be inspected with the removable cover in place. This removable cover protects the reticle when the removable cover is in place and is removable for lithographic exposure. The removable cover can further include at least one reticle fastener that applies force to the reticle thereby preventing movement of the removable cover relative to the reticle when the removable cover is in place. A plurality of fasteners are used to position and secure the removable cover and reticle. A method of performing lithography and a lithographic system are also described.

Abstract: Apparatus for contact exposing each side of a substrate to a different image on a mask includes a first-side imaging station for imaging the first side of the substrate, a second-side imaging station for imaging the second side thereof, an intermediate station between the imaging stations for inverting the substrate. In each imaging station, the substrate is moved longitudinally with a transport carriage, from which it is transferred to an imaging carriage to be driven to an imaging point at which illumination through the mask occurs. The imaging carriage moves in both longitudinal and transverse directions, providing for both exposure to a mask covering the substrate and for step-and-repeat exposure of multiple portions of the substrate to a smaller image. Before exposure, the top surface of the substrate is aligned to be parallel to the adjacent mask, fiducial markings in the substrate are aligned with fiducial markings on the mask, and air is evacuated from the area between the mask and the substrate.