Regulating Light Intensity Or Exposure Time Patents (Class 355/35)
  • Patent number: 10571088
    Abstract: A filter assembly with a color filter pair for a light fixture comprising two color filters is provided, where the color filters are linear moveable relatively to each other in parallel planes by at least one actuator. Each of the colors filters comprise a color filtering region formed as a comb-like structure comprising plurality of elongated teeth where the elongated teeth of the color filters are angled in relation to the direction of movement of the color filters. Further, the angle between the elongated teeth of the same color filter is less than 10 degrees and the elongated teeth of the two color filters are non-parallel in relation to each other. A light fixture comprising a plurality of such color filter pairs is also described.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: February 25, 2020
    Assignee: HARMAN PROFESSIONAL DENMARK APS.
    Inventors: Carsten Dalsgaard, Jesper Gadegaard
  • Patent number: 10564145
    Abstract: An imaging system for a rotatable object includes an imaging unit configured to take a series of images of a portion of the rotatable object and a light source. The light source is directed at the rotatable object and is configured to generate pulses of light that illuminate the rotatable object during rotation of the rotatable object and allow the imaging unit to take the series of images of the rotatable object. The system also includes a synchronizer that monitors the rotational position of the rotatable object as it rotates, and a controller in communication with the imaging unit, the light source, and the synchronizer. The controller controls the operation of the imaging unit and/or the light source based upon the rotational position of the rotatable object such that each of the series of images is taken at the same rotational position of the rotatable object.
    Type: Grant
    Filed: September 28, 2016
    Date of Patent: February 18, 2020
    Assignee: Haemonetics Corporation
    Inventors: Gary Stacey, James Sullivan
  • Patent number: 10054858
    Abstract: A method of driving a spatial light modulator includes: setting, in an array of mirror elements, mirror elements in a first state for turning incident light into reflected light with the same phase as that of the incident light or with a phase different by a first phase from that of the incident light and mirror elements in a second state for turning incident light into reflected light with a phase different approximately 180° from the first phase to an arrangement with a first phase distribution; and setting, in the array of mirror elements, the first mirror elements and the second mirror elements to an arrangement with a second phase distribution which is an inversion of the first phase distribution.
    Type: Grant
    Filed: September 22, 2011
    Date of Patent: August 21, 2018
    Assignee: NIKON CORPORATION
    Inventors: Yoji Watanabe, Soichi Owa, Tomoharu Fujiwara
  • Patent number: 9888140
    Abstract: An image processing apparatus comprises an input interface, a light source unit, a reading unit and a control unit. The input interface receives an input reading condition. The light source unit comprises a plurality of light sources which emit lights of different wavelengths. The reading unit reads an image on a sheet irradiated by the light of the light source unit. The control unit separately controls the quantity of the light emitted from each light source according to the reading condition input from the input interface.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: February 6, 2018
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA TEC KABUSHIKI KAISHA
    Inventor: Hirokazu Shoda
  • Patent number: 9335638
    Abstract: In an embodiment, a lithographic apparatus is disclosed that includes a modulator configured to expose an exposure area of the substrate to a plurality of beams modulated according to a desired pattern and a projection system configured to project the modulated beams onto the substrate. The modulator may be moveable with respect the exposure area and/or the projection system may have an array of lenses to receive the plurality of beams, the array of lenses moveable with respect to the exposure area.
    Type: Grant
    Filed: August 22, 2013
    Date of Patent: May 10, 2016
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Pieter Willem Herman De Jager, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Cheng-Qun Gui, Johannes Onvlee, Erwin John Van Zwet
  • Patent number: 9310697
    Abstract: Provided is a digital exposure device. The digital exposure device includes a stage mounted with a substrate on which a pattern is formed, a first light source, a first head, and a digital micro-mirror device control unit. The stage is configured to move in a scan direction. The first light source is configured to provide a first light. The first head is spaced apart from the stage in a first direction and is configured to receive the first light, to generate at least one spot beam by modulating the first light, and to project the at least one spot beam onto the substrate. The digital micro-mirror device control unit is configured to control an energy of the at least one spot beam generated from the first head to be inversely proportional to a size of the at least spot beam generated from the first head.
    Type: Grant
    Filed: December 26, 2013
    Date of Patent: April 12, 2016
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Sanghyun Yun, Cha-Dong Kim, Changhoon Kim, Jung-In Park, Kibeom Lee, Hikuk Lee, Jaehyuk Chang
  • Patent number: 9239443
    Abstract: An optical system and method for illuminating an object under investigation with filtered light is disclosed. In one embodiment, the system comprises a linear filter array having a plurality of elongate variable bandpass filters. The variable bandpass filters each have a cam follower and are translatable along a longitudinal axis, whereby translation brings a selected filter in line with a beam of light. The cam follower of selected filter engages a cam adjacent to the array. This causes tilting of the filter to a desired angle thereby allowing precise selection of the bandpass frequency of the selected filter. Preferably, the filter can be tilted by an angle of up to 60°. Each elongate filter is preferably substantially rectangular and has a long dimension that is at least about twice the short dimension.
    Type: Grant
    Filed: June 5, 2012
    Date of Patent: January 19, 2016
    Assignee: SUTTER INSTRUMENT COMPANY
    Inventors: Jack H. Belgum, Frederick Siedenburg
  • Patent number: 8451472
    Abstract: Print verification is done by scanning the printed copies, thereby forming a stream of scanned images of the specific pages. Digitized images from the stream are then spatially aligned page by page, line by line and pixel (pel) by pixel (pel) with corresponding digitized images in a stream of source images. The source and scanned images are compared to find pel sequences that are different. These differences represent defects in the printed copies.
    Type: Grant
    Filed: November 23, 2010
    Date of Patent: May 28, 2013
    Assignee: InfoPrint Solutions Company, LLC
    Inventor: Gordon Wesley Braudaway
  • Patent number: 8432529
    Abstract: A lithographic apparatus including a radiation beam monitoring apparatus, the radiation beam monitoring apparatus including an optical element configured to generate a diffraction pattern, and an imaging detector located after the optical element and not in a focal plane of the optical element such that the imaging detector is capable of detecting a mixture of spatial coherence and divergence of the radiation beam.
    Type: Grant
    Filed: June 24, 2010
    Date of Patent: April 30, 2013
    Assignee: ASML Netherlands B.V.
    Inventors: Bert Jan Claessens, Paul Van Der Veen, Herman Philip Godfried
  • Publication number: 20130045607
    Abstract: According to one embodiment, a pattern generating apparatus includes a light intensity calculating part that calculates light intensity at a pattern to be formed based on exposure and light intensity at the periphery of the pattern, a light intensity evaluating part that evaluates the light intensities at the pattern and the periphery of the pattern, and a data output part that outputs correction data for the pattern based on the results of the evaluation by the light intensity part.
    Type: Application
    Filed: March 16, 2012
    Publication date: February 21, 2013
    Inventors: Ai INOUE, Takashi Nakazawa, Takashi Obara, Kazuyuki Masukawa, Takaki Hashimoto
  • Publication number: 20130010272
    Abstract: The present invention provides a determination method of determining exposure conditions of an exposure apparatus including an illumination optical system which illuminates a mask, and a projection optical system which projects a pattern of the mask onto a substrate, the method including a step of setting an illumination parameter for a light intensity distribution formed on a pupil plane of the illumination optical system, and an aberration parameter for an aberration of the projection optical system, and a step of determining a value of the illumination parameter and a value of the aberration parameter so that an image performance of an optical image of the pattern of the mask satisfies an evaluation criterion set for a target pattern to be formed on an image plane of the projection optical system.
    Type: Application
    Filed: June 27, 2012
    Publication date: January 10, 2013
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Yuichi Gyoda, Koji Mikami, Kouichirou Tsujita
  • Patent number: 8300905
    Abstract: The presently described technology provides a method for adaptive image processing. The image processing method includes determining an entrance exposure of an object, determining an exit exposure of the object, and determining one or more image processing parameters based at least in part on the entrance and exit exposures. The presently described technology also provides a method for adaptive image display. The image display method includes determining an entrance exposure of an object, determining an exit exposure of the object, and displaying an attenuation map based at least in part on the entrance and exit exposures.
    Type: Grant
    Filed: November 18, 2005
    Date of Patent: October 30, 2012
    Assignee: General Electric Company
    Inventor: Kadri N. Jabri
  • Patent number: 8184262
    Abstract: A system for equalizing pulse to pulse energy of a light beam includes a group of optical devices including an optical device configured to exhibit third order nonlinear properties. Transmission properties of an unequalized light beam passing through the group of optical devices change such that an output intensity of a resulting light beam output from the optical devices is equalized. One example configuration includes a beam splitter, a nonlinear interference filter, a mirror and a beam combiner. A first portion of the light beam that is reflected from the nonlinear interference filter is combined with the light beam such that a resulting combined light beam has equalized output intensity. Another example includes at least first and second prisms having third order nonlinear properties and configured as a beam steering system. A lithography system and a method of equalizing pulse to pulse energy in a light beam are also presented.
    Type: Grant
    Filed: October 14, 2008
    Date of Patent: May 22, 2012
    Assignee: ASML Holding N.V.
    Inventor: Muhammad Arif
  • Patent number: 8139262
    Abstract: A terminal 102 creates setting data 400 and inputs setting data 400 into an image output apparatus 101. The image output apparatus 101 sets the initial settings, operation settings, equipment settings, etc. based on the setting data, holds the setting data, and performs various processes based on the set settings and the held setting data. In addition, the image output apparatus 101 performs a media identification process, a media reader switching process, and the like using a media detection means 117, a media reader switching means 118, and the like, and allows only the use of the insertion opening of a predetermined media reader.
    Type: Grant
    Filed: September 22, 2004
    Date of Patent: March 20, 2012
    Assignee: Dai Nippon Printing Co., Ltd.
    Inventors: Mitsuhiro Hamashima, Jun Yoshida, Naoji Shibasaki, Yasuko Deushi, Nobuho Mori
  • Patent number: 8090500
    Abstract: In a control device for controlling a variable damper of a vehicle suspension system, when a stroke speed of the damper is within a range including a zero stroke speed, the target damping force is determined as a force opposing a current movement of the damper without regards to the direction of the target damping force determined by a target damping force determining unit. Thereby, even when the wheels move vertically at short intervals, the control value is prevented from changing rapidly, and this allows a damping force of an appropriate level to be achieved in a stable manner at all times. Also, the target damping force when a stroke speed of the damper is within a range including a zero stroke speed may be selected to be a relatively high value or low value so that a desired vehicle behavior may be achieved.
    Type: Grant
    Filed: December 6, 2007
    Date of Patent: January 3, 2012
    Assignee: Honda Motor Co., Ltd.
    Inventor: Shigenobu Sekiya
  • Patent number: 8081208
    Abstract: A high tone image is saved in a versatile image file format to enhance usability. There are provided an imaging unit that images an original image having a predetermined dynamic range, which is a ratio between minimum luminance and maximum luminance; a synthesized image generating part that generates a synthesized image data that is higher in tone than a tone width of the original image by synthesizing a plurality of original images imaged under different imaging conditions at the same observation position; a display unit that displays the images imaged by the imaging unit; a tone conversion part that converts the synthesized image data generated by the synthesized image generating part to low tone image data having a tone width capable of being displayed on the display unit; and a tone data saving part that generates a high tone data-attached display file including a high tone image region for saving the synthesized image data serving as a basis as an image file for saving the low tone image data.
    Type: Grant
    Filed: May 5, 2008
    Date of Patent: December 20, 2011
    Assignee: Keyence Corporation
    Inventors: Masahiro Inomata, Kang Woobum
  • Patent number: 8048614
    Abstract: A circuit pattern having a size finer than a half of a wavelength of an exposure beam is transferred on a semiconductor wafer plane with an excellent accuracy by means of a mask whereupon an integrated circuit pattern is formed and a reduction projection aligner. The accuracy of transferring the circuit pattern on the semiconductor wafer is improved by synergic effects of super-resolution exposure, wherein a mask cover made of a transparent medium is provided on a pattern side of the integrated circuit mask so as to suppress the aberration of reduction projection alignment, and a method of increasing the number of actual apertures of the optical reduction projection lens system provided with the wafer cover made of the transparent medium on a photoresist side of the semiconductor wafer to which planarizing process is performed.
    Type: Grant
    Filed: August 9, 2006
    Date of Patent: November 1, 2011
    Inventors: Yoshihiko Okamoto, Masami Ogita
  • Patent number: 8035804
    Abstract: A scanning exposure apparatus which exposes a substrate is disclosed. The apparatus comprises an illumination system configured to illuminate an illumination region of an original, a projection optical system configured to project a pattern of the original onto the substrate, and a stop configured to shield a flare generating component of flare light which travels from the projection optical system to the substrate, and to pass the remaining component of the flare light. An aperture of the stop has a shape different from a shape of the illumination region, and the aperture of the stop includes a portion whose dimension in a first direction parallel to a scanning direction of the substrate changes in accordance with a distance from the center of the aperture in a second direction perpendicular to the first direction.
    Type: Grant
    Filed: April 7, 2008
    Date of Patent: October 11, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventors: Tadashi Arai, Yasuo Hasegawa
  • Publication number: 20100128236
    Abstract: Disclosed is an image forming apparatus including an optical writing device including, a light source section composed of a plurality of light emitting elements arranged in a main scanning direction; an optical section including a plurality of coupled lenses to form an image on a light exposure face by gathering light emitted from the light emitting elements; and a storage section to store first correction data for correcting the light intensity of the plurality of light emitting elements and second correction data for correcting an optical characteristic specific to the coupled lens, and a control section to read out the first correction data and the second correction data from the storage section of the optical writing device and to correct the first correction data based on the second correction data.
    Type: Application
    Filed: November 23, 2009
    Publication date: May 27, 2010
    Inventor: Takashi HASEBE
  • Patent number: 7719753
    Abstract: An optical lithography system comprises a light source, a spatial light modulator, imaging optics and means for continuously moving a photosensitive substrate relative to the spatial light modulator. The spatial light modulator comprises at least one array of individually switchable elements. The spatial light modulator is continuously illuminated and an image of the spatial light modulator is continuously projected on the substrate; consequently, the image is constantly moving across the surface of the substrate. While the image is moving across the surface, elements of the spatial light modulator are switched such that a pixel on the surface of the substrate receives, in serial, doses of energy from multiple elements of the spatial light modulator, thus forming a latent image on the substrate surface. The imaging optics is configured to project a blurred image of the spatial light modulator on the substrate, enabling sub-pixel resolution feature edge placement.
    Type: Grant
    Filed: October 24, 2007
    Date of Patent: May 18, 2010
    Assignee: Maskless Lithography, Inc.
    Inventor: William Daniel Meisburger
  • Patent number: 7639416
    Abstract: An optical lithography system comprises a light source, a spatial light modulator, imaging optics and means for continuously moving a photosensitive substrate relative to the spatial light modulator. The spatial light modulator comprises at least one array of individually switchable elements. The spatial light modulator is continuously illuminated and an image of the spatial light modulator is continuously projected on the substrate; consequently, the image is constantly moving across the surface of the substrate. While the image is moving across the surface, elements of the spatial light modulator are switched such that a pixel on the surface of the substrate receives, in serial, doses of energy from multiple elements of the spatial light modulator, thus forming a latent image on the substrate surface. The imaging optics is configured to project a blurred image of the spatial light modulator on the substrate, enabling sub-pixel resolution feature edge placement.
    Type: Grant
    Filed: October 24, 2007
    Date of Patent: December 29, 2009
    Assignee: Maskless Lithography, Inc.
    Inventor: William Daniel Meisburger
  • Patent number: 7580110
    Abstract: An exposure apparatus and exposure method that produces plasma from a target material, generates pulsed light, and carries out exposure with the pulsed light. In particular, a light emitting source generates pulsed light by producing plasma from an intermittently supplied target material. A reticle stage holds a reticle that is irradiated by the pulsed light. A photosensitive substrate stage holds a photosensitive substrate irradiated by the pulsed light patterned by the reticle. A control means controls the photosensitive substrate stage so that, before exposing the photosensitive substrate begins, the timing between an exposure starting point or an exposure ending point and the light emission timing are matched based on the drive timing of the photosensitive substrate stage and the light emission timing of the pulsed light.
    Type: Grant
    Filed: January 7, 2008
    Date of Patent: August 25, 2009
    Assignee: Nikon Corporation
    Inventors: Hiroyuki Kondo, Takashi Miyachi
  • Patent number: 7508570
    Abstract: An optical lithography system comprises a light source, a spatial light modulator, imaging optics and means for continuously moving a photosensitive substrate relative to the spatial light modulator. The spatial light modulator comprises at least one array of individually switchable elements. The spatial light modulator is continuously illuminated and an image of the spatial light modulator is continuously projected on the substrate; consequently, the image is constantly moving across the surface of the substrate. While the image is moving across the surface, elements of the spatial light modulator are switched such that a pixel on the surface of the substrate receives, in serial, doses of energy from multiple elements of the spatial light modulator, thus forming a latent image on the substrate surface. The imaging optics is configured to project a blurred image of the spatial light modulator on the substrate, enabling sub-pixel resolution feature edge placement.
    Type: Grant
    Filed: October 24, 2007
    Date of Patent: March 24, 2009
    Assignee: Maskless Lithography, Inc.
    Inventor: William Daniel Meisburger
  • Patent number: 7432492
    Abstract: An image reading apparatus includes a light source with a first luminescent portion that outputs light with a first wavelength range and a second luminescent portion that outputs light with a second wavelength range, the wavelength ranges being different from each other; a light-receiving portion that receives light reflected from an original irradiated by the light source; a scanning portion that shifts a reading position of the original in a vertical scanning direction by changing a relative position between the original and the light-receiving portion; a switching portion that alternately turns on the first and second luminescent portions when the scanning portion shifts the reading position, wherein a vertical scanning resolution for a first data obtained when the first luminescent portion is turned on is independently set from a vertical scanning resolution for a second data obtained when the second luminescent portion is turned on.
    Type: Grant
    Filed: July 6, 2006
    Date of Patent: October 7, 2008
    Assignee: Fuji Xerox Co., Ltd.
    Inventor: Michio Kikuchi
  • Patent number: 7295362
    Abstract: An optical lithography system comprises a light source, a spatial light modulator, imaging optics and means for continuously moving a photosensitive substrate relative to the spatial light modulator. The spatial light modulator comprises at least one array of individually switchable elements. The spatial light modulator is continuously illuminated and an image of the spatial light modulator is continuously projected on the substrate; consequently, the image is constantly moving across the surface of the substrate. While the image is moving across the surface, elements of the spatial light modulator are switched such that a pixel on the surface of the substrate receives, in serial, doses of energy from multiple elements of the spatial light modulator, thus forming a latent image on the substrate surface. The imaging optics is configured to project a blurred image of the spatial light modulator on the substrate, enabling sub-pixel resolution feature edge placement.
    Type: Grant
    Filed: September 14, 2004
    Date of Patent: November 13, 2007
    Assignee: Maskless Lithography, Inc.
    Inventor: William Daniel Meisburger
  • Patent number: 7256408
    Abstract: A gas supply unit supplies gas to a certain space via a channel, and includes a first switch mechanism located in the channel for selectively changing the channel of the gas.
    Type: Grant
    Filed: November 21, 2005
    Date of Patent: August 14, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yoshiharu Nakamura
  • Patent number: 7098993
    Abstract: An inexpensive and highly productive exposure device for directly scanning and exposing a photosensitive material sensitive to at least a UV region, based on digital data. As a motor controller moves an exposure head at a fixed speed in Y direction, image data is read one line of image data, each GLV element of a light modulator array is switched on/off by the read image data, and laser light from a high power light source of the exposure head is switched on/off. A UV-sensitive object to be exposed is exposed in X direction in a number of pixel units that substantially corresponds to the number of the GLV elements. The image data is scanned and exposed by one line in Y direction (main-scan). The motor controller moves a flat stage by one step in X direction (sub-scan). The object to be exposed is imagewise-exposed by repeating such scans.
    Type: Grant
    Filed: March 21, 2002
    Date of Patent: August 29, 2006
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Takeshi Fujii, Yoji Okazaki, Mitsuru Sawano, Kazuhiko Nagano
  • Patent number: 7057704
    Abstract: An apparatus providing programmable illumination pattern generation for the manipulation of colloidal particulates and biomolecules in suspension between electrodes, is disclosed. The apparatus implements LEAPS (Light-controlled electrokinetic assembly of particles near surfaces), which relies on: AC electric field-induced assembly of particles: the patterning of the electrolyte/silicon oxide/silicon interface to exert spatial control over the assembly process; and the real-time control of the assembly process via external illumination. The apparatus generates patterns of illumination and projects them on to planar surfaces. i.e., a LEAPS electrode.
    Type: Grant
    Filed: March 16, 2002
    Date of Patent: June 6, 2006
    Assignee: BioArray Solutions Ltd.
    Inventors: Michael Seul, Chiu Wo Chau
  • Patent number: 7013803
    Abstract: A color registration control system for a printing press including an area scanner for acquiring an image of a paper substrate and an image processing system adapted to receive the image and process the image to determine any color register error.
    Type: Grant
    Filed: February 6, 2002
    Date of Patent: March 21, 2006
    Assignee: Quad/Tech, Inc.
    Inventors: Mark R. Hansen, Glen W. Rantala, Bradly Moersfelder
  • Patent number: 7006252
    Abstract: A method for processing a photographic image captured by an image capture system, includes the steps of: determining a maximum dark value for the image capture system representing the response of the system to no light exposure; generating an image processing path for processing the image prior to display on an output device, the image processing path having one or more image dependent image transforms, that upon processing the maximum dark value produces a processed maximum dark value that meets a predetermined criteria for darkness such that the “smokey black” problem is minimized; and applying the image processing path to the photographic image to produce a processed photographic image.
    Type: Grant
    Filed: October 17, 2001
    Date of Patent: February 28, 2006
    Assignee: Eastman Kodak Company
    Inventors: Andrew C. Gallagher, Edward B. Gindele
  • Patent number: 6980276
    Abstract: A photosensor detecting light-emission quantity from a light-emission lamp is set up, in order to regulate the current supplied with the light-emission lamp from a power according to a light-quantity detecting signal from the photosensor, so as to make the light-emission quantity from the light-emission lamp constant. Projected light-quantity onto a movie film is regulated and an image obtained from a shooting section becomes an image having a good quality with a little flicker.
    Type: Grant
    Filed: March 16, 2005
    Date of Patent: December 27, 2005
    Assignee: Sony Corporation
    Inventors: Tadashi Okano, Kunika Hashimoto
  • Patent number: 6956639
    Abstract: A density adjustment method for adjusting a density of a diagnostic image, having the steps of; exposing an image; developing the latent image; measuring a density of the developed image; creating a lookup table for relating the diagnostic image data and amount of exposure so as to form a density specified by the diagnostic image data; and correcting at least one of an exposure condition and a development condition to ensure that the next film has the optimized density, based on the difference between the measured density of a partial area of the film, and a density for comparison; wherein, a density of a prescribed area in a test exposure image is used as the density for comparison; while the exposure amount is used for exposing the partial area of the film at the time of forming a diagnostic image.
    Type: Grant
    Filed: August 25, 2004
    Date of Patent: October 18, 2005
    Assignee: Konica Minolta Holdings, Inc.
    Inventors: Makoto Horiuchi, Mamoru Umeki, Akira Taguchi, Youichi Ono
  • Patent number: 6956692
    Abstract: A method and an apparatus for controlling exposure of a surface of a substrate in a process of structuring the substrate with light of a predetermined intensity are described, wherein the light is directed to the surface by means of a deflectable mirror. The intensity has a first maximum at a first deflection of the deflectable mirror, a first minimum at a second deflection of the deflectable mirror, a second maximum at a third deflection of the deflectable mirror, and a second minimum at a fourth deflection of the deflectable mirror. A signal representing the predetermined intensity, and a signal representing a threshold intensity are received, the threshold intensity being equal to or less than the intensity of the second maximum. It is determined whether the predetermined intensity is greater than the threshold intensity.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: October 18, 2005
    Assignee: Micronic Laser Systems, AB
    Inventors: Peter Duerr, Torbjoern Sandstroem
  • Patent number: 6909489
    Abstract: A luminous source apparatus, an image projecting apparatus, and an image projection converting apparatus to prevent a projected image, or an electronic image obtained through electronization of the projected image from intensity variations. A photosensor detects the light-emission quantity from a light-emission lamp in order to regulate the current supplied with the light-emission lamp according to a light-quantity detecting signal from the photosensor, so as to make the light-emission quantity from the light-emission lamp constant. Projected light-quantity onto a movie film is regulated and an image obtained from a shooting section becomes an image having a good quality with a little flicker.
    Type: Grant
    Filed: July 23, 2003
    Date of Patent: June 21, 2005
    Assignee: Sony Corporation
    Inventors: Tadashi Okano, Kunika Hashimoto
  • Patent number: 6894285
    Abstract: The invention is directed to an arrangement for monitoring the energy radiated by an EUV radiation source with respect to energy variations acting in an illumination beam path, wherein the radiation source has a plasma column emitting extreme ultraviolet radiation. The arrangement includes an energy monitoring unit, and a detection beam path. The detection beam path is separate from the illumination beam path and is arranged with the energy monitoring unit for detecting pulse energy, so that the illumination beam path is not impaired by the energy measurement. The detection beam path is matched to the illumination beam path with respect to bundle extension and optical losses.
    Type: Grant
    Filed: February 4, 2003
    Date of Patent: May 17, 2005
    Assignee: Xtreme technologies GmbH
    Inventors: Juergen Kleinschmidt, Uwe Stamm
  • Patent number: 6891594
    Abstract: In a printing device which prints a color image on a photosensitive material by allowing an exposing head to modulate light from a light source for each pixel in accordance with image information, the exposing head is constituted by superposing three LCS's in the light-axis direction. The respective LCS's control the transmission and interruption of only the respective blue, green and red color components so that color tones in the respective pixels with respect to an image printed on printing paper are controlled based upon the subtractive color process. Therefore, it is possible to eliminate the generation of pixel offsets in an image printed on the photosensitive material by using a simple structure, and consequently to provide a printing device having a superior processability.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: May 10, 2005
    Assignee: Noritsu Koki Co., Ltd.
    Inventor: Hidetoshi Nishikawa
  • Patent number: 6888618
    Abstract: A scan type exposure apparatus wherein a pattern of an original is lithographically transferred to a substrate sequentially while the original and the substrate are scanningly moved relative to exposure light, the apparatus including a photodetector disposed at a position optically conjugate with the original, and a storing device for storing correction information with respect to an output of the photodetector, in relation to different positions of the original to be illuminated with the exposure light, such that, in the lithographic pattern transfer, the output of the photodetector can be corrected by use of the correction information.
    Type: Grant
    Filed: December 28, 1999
    Date of Patent: May 3, 2005
    Assignee: Canon Kabushiki Kaisha
    Inventor: Mitsuya Sato
  • Patent number: 6850272
    Abstract: An image processing method for image-processing digital image data acquired by a digital camera to enable reproduction of high-quality images includes the steps of computing first characteristic values characterizing colors of an image represented by digital image data, normalizing the digital image data based on the first characteristic values to produce normalized image data, computing from the normalized image data a second characteristic value characterizing density of the image represented by the digital image data, and correcting the normalized image data based on the second characteristic value to produce processed image data. Also provided is an image processing system for carrying out the method.
    Type: Grant
    Filed: March 9, 1999
    Date of Patent: February 1, 2005
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Takaaki Terashita
  • Publication number: 20040246453
    Abstract: The present invention provides a laser unit using a seal member whose central and peripheral portions will not affect each other to produce strain during mounting and which can be handled as a single component.
    Type: Application
    Filed: June 9, 2003
    Publication date: December 9, 2004
    Applicants: KABUSHIKI KAISHA TOSHIBA, TOSHIBA TEC KABUSHIKI KAISHA
    Inventor: Takaji Nakamura
  • Patent number: 6829036
    Abstract: A method and apparatus for creating a digital image on photographic paper and subsequent correction of color. The method and apparatus provides a digital image printer that is capable of rapidly producing digital images on photographic paper having good clarity and sharpness and correct color content. Further, the method and apparatus provides a digital image printer having a controllable lamp house that is easily removable and may be coupled with conventional photographic printers.
    Type: Grant
    Filed: May 5, 2000
    Date of Patent: December 7, 2004
    Inventor: Louis H. Asbury, III
  • Patent number: 6812996
    Abstract: A density adjustment method for adjusting a density of a diagnostic image, having the steps of; exposing an image; developing the latent image; measuring a density of the developed image; creating a lookup table for relating the diagnostic image data and amount of exposure so as to form a density specified by the diagnostic image data; and correcting at least one of an exposure condition and a development condition to ensure that the next film has the optimized density, based on the difference between the measured density of a partial area of the film, and a density for comparison; wherein, a density of a prescribed area in a test exposure image is used as the density for comparison; while the exposure amount is used for exposing the partial area of the film at the time of forming a diagnostic image.
    Type: Grant
    Filed: October 29, 2003
    Date of Patent: November 2, 2004
    Assignee: Konica Minolta Holdings, Inc.
    Inventors: Makoto Horiuchi, Mamoru Umeki, Akira Taguchi, Youichi Ono
  • Patent number: 6813004
    Abstract: A main controller sets an exposure control target value according to the transmittance of an optical system measured by means of a sensor prior to exposure or estimated by predetermined calculation, and exposure is controlled according to the set exposure control target value while a reticle pattern is being transferred onto a wafer through the optical system. Since the exposure energy provided to the image surface changes in a unit time per unit area in accordance with the transmittance of the optical system, the exposure control target value is set according to the transmittance of the optical system, and exposure is controlled according to the set control target value. Thus, exposure with a high precision is achieved without being influenced by the variation of the transmittance.
    Type: Grant
    Filed: October 6, 2000
    Date of Patent: November 2, 2004
    Assignee: Nikon Corporation
    Inventors: Takahiro Horikoshi, Takahisa Kikuchi, Masahiro Nei
  • Patent number: 6809793
    Abstract: A system and method are disclosed which enable temperature of a substrate, such as mask or reticle, to be monitored and/or regulated. One or more temperature sensors are associated with the substrate to sense substrate temperature during exposure by an exposing source. The sensed temperature is used to control one or more process parameters of the exposure to help maintain the substrate at or below a desired temperature.
    Type: Grant
    Filed: January 16, 2002
    Date of Patent: October 26, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Khoi A. Phan, Bhanwar Singh, Ramkumar Subramanian, Bharath Rangarajan
  • Patent number: 6793417
    Abstract: One embodiment is a system for the development of a film includes an infrared light source and a visible light source. The system also includes at least one sensor operable to collect a first set of optical data from light associated the infrared light source and a second set of optical data from light associated with the visible light source. The system further includes a processor in communication with the at least one sensor, the processor operable to determine an image on the film in response to the first and second sets of optical data.
    Type: Grant
    Filed: January 21, 2003
    Date of Patent: September 21, 2004
    Assignee: Eastman Kodak Company
    Inventors: Albert D. Edgar, Stacy S. Cook
  • Patent number: 6751005
    Abstract: An improved method is provided for compensating for pixel site defects of a spatial light modulator (30) in an imaging apparatus (10). An image is formed at a first position and directed to a surface (36). Then, an actuator (40) shifts the spatial light modulator (30) over a shift distance to a second position, which is some integer multiple n of the distance between pixels (72) on the spatial light modulator (30). A second image is formed on the spatial light modulator (30), shifted by the shift distance, and directed to the surface (36). Optionally, dithering is provided with an additional shift of an increment of the distance between pixels (72).
    Type: Grant
    Filed: December 20, 2002
    Date of Patent: June 15, 2004
    Assignee: Eastman Kodak Company
    Inventors: William M. Barnick, Bryan D. Bernardi, William G. Miller, James C. Erwin
  • Patent number: 6738127
    Abstract: A printing apparatus (110) for selectively printing an image from image data either onto any member of a set of photosensitive media (140), including a first photosensitive medium (140) having a relatively low contrast response and a second photosensitive medium (140) having a relatively high contrast response. The printing apparatus (110) uses a spatial light modulator (136) for forming an image, having at least a first set of setup voltage conditions for printing onto the first photosensitive medium (140) and a second set of setup voltage conditions for printing onto the second photosensitive medium (140). An adjustable polarizing component in the path of output light from the spatial light modulator (136), has at least a first contrast setting for the first photosensitive medium (140) and a second contrast setting for the second photosensitive medium (140).
    Type: Grant
    Filed: April 24, 2003
    Date of Patent: May 18, 2004
    Assignee: Eastman Kodak Company
    Inventors: James E. Roddy, Robert J. Zolla
  • Patent number: 6727980
    Abstract: A method for performing optical adjustments of an exposure apparatus is based on an exposure apparatus having a light source for generating illumination light for exposure, and illumination optics for irradiating a mask with the illumination light generated from the exposure light source so as to imprint a mask pattern on a substrate base.
    Type: Grant
    Filed: May 2, 2001
    Date of Patent: April 27, 2004
    Assignee: Nikon Corporation
    Inventors: Kazuya Ota, Akikazu Tanimoto, Tsuneyuki Hagiwara, Hideki Komatsuda, Takashi Mori
  • Patent number: 6690499
    Abstract: A multi-state light modulating system having grayscale based on a series of time intervals includes an arrangement that establishes the duration of each time interval such that the time intervals in the series have progressively varying duration. The arrangement also determines a drive signal for each time interval that causes the light modulator to assume a specific light modulating state. The arrangement also causes the light modulator to produce a desired time-averaged light level over the series of time intervals by in part driving the light modulator using the drive signal that corresponds to a particular time interval for a duration that is longer than the duration of the time interval. The arrangement also or alternatively arranges the series of time intervals such that the light modulator is in the same state immediately prior to the particular time interval as the light modulator is in immediately after the time interval.
    Type: Grant
    Filed: November 22, 2000
    Date of Patent: February 10, 2004
    Assignee: Displaytech, Inc.
    Inventors: Per H. Larsen, James M. Dallas, Rainer M. Malzbender, Michael R. Meadows
  • Patent number: 6683674
    Abstract: There is provided an image recording device which is compact and free of waste materials, which has a completely dry system and a simplified exposure system, and which can carry out high speed image recording. The image recording device includes, within a housing of the image recording device, an accommodating section for accommodating a light and heat sensitive recording material; a light recording section for exposing the light and heat sensitive recording material, which is supplied from the accommodating section, with light to record a latent image; a heat developing section for developing the latent image by applying heat; a light fixing section for irradiating light to fix the developed image; and a discharging section for discharging the light and heat sensitive recording material having an image recorded thereon. Exposure is carried out by a plurality of LEDs provided at a light source section of an exposure unit of the light recording section.
    Type: Grant
    Filed: May 1, 2001
    Date of Patent: January 27, 2004
    Assignee: Fuji Photo Film Co., Ltd.
    Inventors: Nobufumi Mori, Akinori Harada, Shintaro Washizu
  • Patent number: 6636294
    Abstract: A device having a substrate and a pattern structure formed on the substrate in accordance with plural processes including a multiple exposure process having (i) a step for photoprinting a fine stripe pattern on the substrate and (ii) a step for photoprinting a predetermined mask pattern on the substrate, such that the fine stripe pattern and the mask pattern are printed superposedly, wherein, in the pattern structure, a particular structural portion of the device is disposed in a portion where the fine stripe pattern and the mask pattern are printed superposedly.
    Type: Grant
    Filed: August 26, 1999
    Date of Patent: October 21, 2003
    Assignee: Canon Kabushiki Kaisha
    Inventor: Tetsunobu Kochi