Exposure Patents (Class 355/402)
  • Patent number: 8078996
    Abstract: A pattern verification method includes preparing a desired pattern and a mask pattern forming the desired pattern on a substrate, defining at least one evaluation point on an edge of the desired pattern, defining at least one process parameter to compute the transferred/formed pattern, defining a reference value and a variable range for each of the process parameters, and computing a positional displacement for each first points corresponding to the evaluation point, first points computed using correction mask pattern and a plurality of combinations of parameter values obtained by varying the process parameters within the variable range or within the respective variable ranges. The positional displacement is a displacement between first point and the evaluation point. The method further includes computing a statistics of the positional displacements for each of the evaluation points, and outputting information modifying the mask pattern according to the statistics.
    Type: Grant
    Filed: June 19, 2009
    Date of Patent: December 13, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kyoko Izuha, Shigeki Nojima, Toshiya Kotani, Satoshi Tanaka
  • Patent number: 6963392
    Abstract: An image-forming device comprises a rotating belt that includes a plurality of micro-members. The micro-members are preferably spherical members or hook and loop members. The rotating belt having the micro-members thereon is adapted to contact microencapsulated media with a force sufficient to rupture unhardened microcapsules on the media.
    Type: Grant
    Filed: May 21, 2004
    Date of Patent: November 8, 2005
    Assignee: Eastman Kodak Company
    Inventors: Zhanjun Gao, Alphonse D. Camp
  • Patent number: 6933098
    Abstract: This invention relates to an electrophoretic display or a liquid crystal display and novel processes for its manufacture. The electrophoretic display (EPD) of the present invention comprises microcups of well-defined shape, size and aspect ratio and the microcups are filled with charged pigment particles dispersed in an optically contrasting dielectric solvent. The liquid crystal display (LCD) of this invention comprises well-defined microcups filled with at least a liquid crystal composition having its ordinary refractive index matched to that of the isotropic cup material. A novel roll-to-roll process and apparatus of the invention permits the display manufacture to be carried out continuously by a synchronized photo-lithographic process.
    Type: Grant
    Filed: February 15, 2001
    Date of Patent: August 23, 2005
    Assignee: SiPix Imaging Inc.
    Inventors: Mary Chan-Park, Xianhai Chen, Zarng-Arh George Wu, Xiaojia Wang, Hong-Mei Zang, Rong-Chang Liang
  • Patent number: 6845287
    Abstract: A method, system, and computer program product for non-real-time trajectory planning and real-time trajectory execution. A trajectory planning process receives data generated by high-level control software. This data defines positions and scan velocities, where multiple axis motion must be precisely synchronized. The trajectory planning process creates sequences of constant acceleration intervals that allow critical motions to be executed at maximum throughput. The output of a trajectory planning process is known as a profile. A profile executor, using the profile output by the trajectory planner process, generates continuous, synchronized, filtered, multi-axis position and acceleration commands (i.e., execution data) that drive control servos. Time intervals generated by the trajectory planner are quantized to be integer multiples of a real time clock period.
    Type: Grant
    Filed: November 20, 2002
    Date of Patent: January 18, 2005
    Assignee: ASML Holding N.V.
    Inventors: Daniel Galburt, Todd Bednarek
  • Publication number: 20030138742
    Abstract: An exposure method which irradiates a slit-shaped illumination light IL on a reticle Ri and a substrate while moving them synchronously so as to sequentially transfer images of patterns formed on the reticle Ri to the substrate 4, wherein a density filter Fj having an attenuating part for gradually reducing the distribution of illuminance of the illumination light IL is moved in synchronization with the movement of the reticle Ri.
    Type: Application
    Filed: November 19, 2002
    Publication date: July 24, 2003
    Applicant: NIKON CORPORATION
    Inventors: Nobuyuki Irie, Nobutaka Magome
  • Publication number: 20030043376
    Abstract: A beam splitting apparatus generates, from incident light having a specific polarization, first and second split light that has the specific polarization.
    Type: Application
    Filed: June 25, 2002
    Publication date: March 6, 2003
    Inventors: Yasuhiro Kishikawa, Seiji Takeuchi
  • Publication number: 20020182544
    Abstract: This invention relates to an electrophoretic display or a liquid crystal display and novel processes for its manufacture. The electrophoretic display (EPD) of the present invention comprises microcups of well-defined shape, size and aspect ratio and the microcups are filled with charged pigment particles dispersed in an optically contrasting dielectric solvent. The liquid crystal display (LCD) of this invention comprises well-defined microcups filled with at least a liquid crystal composition having its ordinary refractive index matched to that of the isotropic cup material. A novel roll-to-roll process and apparatus of the invention permits the display manufacture to be carried out continuously by a synchronized photo-lithographic process.
    Type: Application
    Filed: February 15, 2001
    Publication date: December 5, 2002
    Applicant: SiPix Imaging, Inc.
    Inventors: Mary Chan-Park , Xianhai Chen , Zarng-arh George Wu , Xiaojia Wang , Hong-Mei Zang , Rong-Chang Liang
  • Patent number: 6330054
    Abstract: An image-forming apparatus forms an image by applying a control electric field having a polarity corresponding to recording information, to a recording medium having microcapsules including chargeable particles dispersed in a dispersion medium. The image-forming apparatus includes an alternating electric field-applying unit for applying an alternating electric field to the microcapsules. The alternating electric field is applied to the microcapsules of the recording medium before the image formed on the recording medium is rewritten. Accordingly, the chargeable particles are separated from the wall surfaces of the microcapsules and from the other chargeable particles, making it possible for the chargeable particles to perform free electrophoresis. The recording medium is initialized to improve the response performance with respect to the control electric field for forming a new image. The recording density is increased, and the blur is reduced.
    Type: Grant
    Filed: September 29, 1999
    Date of Patent: December 11, 2001
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Jun Ikami
  • Patent number: 6204914
    Abstract: A printing apparatus of a photosensitive microcapsule type comprises a chassis, a cassette for storing printing paper containing photosensitive microcapsules, a printing paper feeding device for intermittently feeding the printing paper in a feeding direction, and a printing paper pickup device for feeding the printing paper from the cassette to a preselected location from which the printing paper is intermittently fed by the printing paper feeding device. A scan shaft is mounted on the chassis for undergoing rotation about a rotational axis extending generally perpendicular to the feeding direction of the printing paper. A first spiral groove is formed in the scan shaft along a clockwise direction and has opposite ends. A second spiral groove is formed in the scan shaft along a counterclockwise direction and has opposite ends each connected to a respective end of the first spiral groove so that the first and second spiral grooves form a loop.
    Type: Grant
    Filed: March 26, 1999
    Date of Patent: March 20, 2001
    Assignee: Seiko Instruments Inc.
    Inventors: Shigeru Inagaki, Hidenori Fujioka
  • Patent number: 6016189
    Abstract: Disclosed is the image forming apparatus 1 in which, when the image displayed on the display 31 of the other electronic apparatus 30 is formed on the microcapsule sheet 2, the LC shutter 9 is opened for a predetermined time while contacting the display 31 to the contact plane A of the image forming apparatus 1 and light is irradiated on the microcapsule sheet 2 from the display 31, thereby, the desirable image is formed on the image forming layer 13 of the microcapsule sheet 2 according to the image displayed on the display 31.
    Type: Grant
    Filed: September 23, 1997
    Date of Patent: January 18, 2000
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Masashi Ueda
  • Patent number: 5963307
    Abstract: A camera-speed color photothermographic imaging method is disclosed. A photothermographic film is employed that contains a photographically responsive, thermally developable panchromatically sensitized emulsion layer unit capable of concurrently forming silver and dye image densities. The emulsion layer unit is exposed in three separate image capture areas to blue, green or red light received from the photographic subject to create latent images of blue, green and red light exposure. The photothermographic element is thermally processed to produce images of the same hue in each of the three separate image capture areas. The images of blue, green and red light exposures are then converted into a corresponding additive or subtractive primary hue, and integrated to provide a positive or negative color image of the photographic subject.
    Type: Grant
    Filed: March 20, 1998
    Date of Patent: October 5, 1999
    Assignee: Eastman Kodak Company
    Inventors: Lyn M. Eshelman, Timothy W. Stoebe
  • Patent number: 5949528
    Abstract: An image forming apparatus for forming an image by exposing and developing the photosensitive record medium, the photosensitive record medium having a first microcapsule whose strength is changed by being emitted a blue light, a second microcapsule whose strength is changed by being emitted a green light, and a third microcapsule whose strength is changed by being emitted a red light, the image forming apparatus comprising: an exposing device on which a first light emitting device for emitting the blue light, a second light emitting device for emitting the green light and a third light emitting device for emitting the red light are mounted, for exposing the photosensitive record medium by the blue light, the green light and the red light; a developing device for developing the exposed photosensitive record medium by applying a pressure to the exposed photosensitive record medium; and a transporting unit for transporting the photosensitive record medium from an exposing position where the exposing device is mo
    Type: Grant
    Filed: January 7, 1998
    Date of Patent: September 7, 1999
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventor: Takeo Iwasaki