Abstract: Embodiments described herein relate to methods and apparatus for performing immersion field guided post exposure bake processes. Embodiments of apparatus described herein include a chamber body defining a processing volume. In one embodiment, a major axis of the processing volume is oriented vertically and a minor axis of the processing volume is oriented horizontally. One or more electrodes may be disposed adjacent the processing volume and at least partially define the processing volume. Process fluid is provided to the processing volume via a plurality of fluid conduits to facilitate immersion field guided post exposure bake processes. A plurality of seals maintains the fluid containment integrity of the processing volume during processing. A post process chamber for rinsing, developing, and drying a substrate is also provided.

Abstract: A testing apparatus for onsite creation of cured sample liners necessary for confirming proper rehabilitation of pipelines includes a testing box having a base with a plurality of upstanding side walls defining an open upper end of the testing box. The testing box also includes an electrical power control assembly and an ultraviolet light assembly. A liner support manifold is shaped and dimensioned for supporting a sample liner and for attachment to the open upper end of the testing box for exposing the sample liner to pressure and ultraviolet light. In practice, and with the sample liner secured to the liner support manifold and the liner support manifold secured to the testing box, the sample liner is exposed to pressure and UV light in a highly controlled manner allowing for replication of actual in-line curing processing.

Abstract: In an imprint lithography system, a recessed support on a template chuck may alter a shape of a template positioned thereon providing minimization and/or elimination of premature downward deflection of outer edges of the template in a nano imprint lithography process.

Abstract: A digital stereo imaging photosensitive device for a grating and a photosensitive material, includes: a photosensitive platform (8), connected with a base via a platform moving mechanism; a compressing mechanism (7) mounted on the photosensitive platform, wherein a grating (5) is positioned on the compressing mechanism; a LCD displayer (2) suspending above the photosensitive platform; and a lens suspending above the photosensitive platform via a lens moving mechanism, wherein the lens is under the LCD displayer. And a method for digital stereo projection is also provided.

Abstract: A device for mounting a grating and a photosensitive material for stereoprojection imaging, includes: an enlarging-printing platform; and an exposure head positioned above the enlarging-printing platform; wherein the enlarging-printing platform is a chamber structure, and has a plurality of suction holes provided on an upper surface thereof and at least one exhaust port provided on a side connected with an exhaust device; the device for mounting the grating and the photosensitive material for stereoprojection imaging further includes a compressing mechanism connected with the upper surface. The device for mounting the grating and the photosensitive material provides a real-time composite device for developing stereopictures. With the mounting device, the grating and photosensitive photographic paper need either being combined beforehand, or being developed with the grating after exposure.

Abstract: A lithographic apparatus includes a position controller configured to control a position of a patterning device in its planar direction by selectively pressing at least one of the side faces of the patterning device. The position controller includes a gas pressure supply and one or more outflow openings directed towards at least one side face of the patterning device so as to exert pressurized gas on this side face in order to control the position of the patterning device in its planar direction in a contactless manner.

Abstract: A contact lithography apparatus, system and method use a hydraulic deformation to facilitate pattern transfer. The apparatus, system and method include a spacer that provides a spaced apart proximal orientation of lithographic elements, and a hydraulic force member that provides the hydraulic deformation. One or more of the lithographic elements and the spacer is deformable, such that hydraulic deformation thereof facilitates the pattern transfer.

Abstract: A contact lithography apparatus and a method use one or both of spacers and a mesa to facilitate pattern transfer. The apparatus and the method include one or both of a spacer that provides a spaced apart orientation of lithographic elements, such as a patterning tool and a substrate, when in mutual contact with the spacer and a mesa between the patterning tool and the substrate. The mesa supports a contact surface of one or both of the mold and the substrate. One or both of the spacers and the mesa may be non-uniform. One or more of the patterning tool, the substrate and the spacer is deformable, such that deformation thereof facilitates the pattern transfer.

Abstract: A lithographic apparatus is disclosed that has a template holder configured to hold an imprint template, a substrate table arranged to receive a substrate, a radiation output arranged to illuminate a part of the imprint template, and a detector configured to detect radiation scattered from an interface between the imprint template and imprintable material provided on the substrate.

Abstract: A near-field exposure mask includes a light blocking film having an opening smaller than a wavelength of exposure light, and a mask base material for holding the light blocking film. The near-field exposure mask is configured and positioned to effect exposure of an object to be exposed to near-field light generated corresponding to the opening during contact thereof with the object to be exposed. The mask base material is transparent to the exposure light and comprises a synthetic resin material having Young's modulus in a range of 1 GPa or more to 10 GPa or less.

Abstract: An automatic both sides exposing apparatus 1 is provided, and includes a first exposing mechanism 10 having a first mask and the second exposing mechanism 20 having a second mask; a carrying-in portion 2 and a carrying-out portion 30; an optical system for exposing the substrate; and a first holder A and a second holder B for holding the substrate and delivering the substrate from the first holder A to the second holder B with reversal of sides at a spot located in an interval between the first and second exposing mechanisms where both holders meet each other. Accordingly, a frequency at which the substrate is delivered is minimized, the substrate can be turned over without the reversing mechanism, the substrate can be transferred (and delivered) at good efficiency in limited space and exposed accurately, any inconvenient origin for the substrate may be minimized, and the apparatus is made compact.

Abstract: A holder for exposing both faces of a panel to light in order to make a double-sided printed circuit using first and second flexible artworks. The holder has a first frame with no transparent plane support member for receiving the first flexible artwork, and a second frame with no transparent plane support member for receiving the second flexible artwork. The holder includes a system for positioning and fixing the peripheries of the artworks to their respective frames. The holder further includes a mechanism for positioning and holding the panel between the frames. There is an approach mechanism for causing the frames to move towards the faces of the panel. There is also a system for establishing suction in the volume defined between the frames having the panel therebetween.

Abstract: A board stage of an aligner that can avoid bending of a printed circuit board to be exposed and accomplish high accurate exposure. In one preferred mode a suction plate 2 having small holes 20 is mounted on a supporting body on which a space 30 bigger than the small holes is provided. The holes 20 are connected to the space 30 and to a vacuum device via an air passage 31 and a bottom passage 32. The diameter of the suction hole 20 is so less than 0.4 mm not to make at the printed circuit board such bending that causes exposure troubles.

Abstract: The present invention aims at preventing deterioration of flatness of a substrate and contamination of a substrate-holding surface of a substrate holder, which are caused by a resist leaking into the back surface of the substrate. A substrate-holding surface of a substrate holder is provided with a first pair of grooves 31 and 32 extending from one end to the other along a scanning direction and a second pair of grooves 33 and 34 extending from one end to the other along a direction generally perpendicular to the scanning direction. The first and second grooves are positioned such that they make contact with the periphery of the substrate when the substrate is vertically or horizontally placed on the substrate holder. Even when a resist on a substrate leaks into the periphery of the back surface, the resist escapes into the grooves, thereby preventing deterioration of the flatness of the substrate or contamination of the substrate-holding surface.

Abstract: A method and apparatus for imaging an overlying conductive pattern over an underlying conductive pattern on a substrate, by determining deviations between the actual locations and the nominal locations of predetermined reference targets in the underlying conductive pattern on the substrate; and utilizing the determined deviations for modifying the scanning control data used for imaging the image data of the overlying conductive pattern in order to reduce misregistration thereof with respect to the underlying conductive pattern. Preferably, the reference targets are predetermined connection sites in the underlying conductive pattern to be precisely located with respect to connection sites in the overlying conductive pattern. The reference features may be assigned different weights according to their registration importance, and the deviations may be determined according to a threshold which varies with the weight assigned to the respective reference feature.

Abstract: Apparatus and method for supporting master image sheets on supporting platens includes forming vacuum seals between sheets and platens and evacuating air from therebetween to retain the master image sheets against movements on the supporting platens. An image receiving layer such as a photosensitive printed circuit board is disposed between supporting platens that are, then evacuated to retain the opposite surfaces of the layer in contact with the master image sheets for parallax-free photographic exposure to light through the platens, with inherent alignment of images thus formed on the opposite surfaces of the layer.

Abstract: A method for aligning multiple image layers to form a composite image in which the individual single color images are aligned by systems of at least one registration hole which is round and permits no movement of the film.

Abstract: An apparatus and method of using same for exposing successive sections of opposite sides of a web of material to actinic radiation in patterns on each section of the opposite sides of the web is provided. The apparatus includes a first station having mechanisms to locate and expose selected sections on the first side of the web to actinic radiation in a first pattern, and a second station spaced from the first station having mechanisms to locate and expose selected sections on the second side of said web to actinic radiation. The first and second stations include first and second pattern masters and first and second mountings for the masters, and first and second sources of actinic radiation to project the desired patterns of exposure from each of the masters to each of the sections on the first and second sides of the web in very close registration or alignment thereof.

Abstract: An improved vacuum exposure frame for use in making exposed aluminum printing or lithographic plates permits the use of unworked glass, preferably tempered glass, rather than polycarbonate plexiglass (which is easily scratched) of the prior art replacement of the transparent image-exposure-window material. The frame is routed on the lower aperture-facing portion of the exposure window, preferably by a 90.degree. routing having a horizontal face and a vertical face surrounding and defining the aperture underside. A preferred embodiment has a reverse depression preferably routed out of the horizontal face and a sealant-adhesive is inserted into the reverse depression and along the vertical face so as to secure the unworked glass to the frame. Separate ID windows with long lasting polycarbonate inserts are also in the frame where the main image exposure window aperture is shaped to contain preferably only the book pages to be exposed onto the aluminum plate.

Abstract: The invention provides a hologram-recording subject plate comprising a block and a variety of subjects fixedly contained therein, which ensures easy, stable yet continuous recording of a multiplicity of identical holograms or different holograms reconstructible by illuminating light, , a hologram-making method using the same, and a hologram-recorded article. The subject plate comprises a transparent solid block and a hologram-recording subject contained therein. A photosensitive material film is applied directly onto one surface of the subject plate, and the subject plate is then irradiated with laser light through the photosensitive material film. Such simple operation enables a multiplicity of identical holograms to be recorded in an easy, stable yet continuous manner.

Abstract: A method and apparatus for stretching and aligning film sheets to a lenticular substrate comprising supporting members for the film sheet, two actuator assemblies positioned on opposite sides of a film sheet with a rigid bar member connecting the actuator means, "flexible" clamping members to engage the edges of the film sheet, a constraint member for the film sheet and lenticular substrate and detection means to detect errors in positioning of the film sheet image (substrate) and lenticular substrate.

Abstract: A photographic contact printing device has a point-like light source (17) and two uni-directionally curved parabolically cylindrical mirrors (18, 19) the axis of curvature (22, 23) of which are perpendicular to each other, and one axis (23) being parallel to the exposure plane.

Abstract: A vacuum drum apparatus on which a mask is mounted having a resilient surface and a plurality of holes suitable for a substrate of a given size. The vacuum drum apparatus is balanced for rotation at high speeds by attaching a counterweight to the mask. The drum is a circular cylinder perforated with an array of holes. The drum has flat surfaces on its outer surface that are used to mount the mask and the substrate on the drum. A hollow chamber within the drum is connected to a controlled pressure source for providing a vacuum. The mask may be magnetically attracted about the outer surface of the drum. Thus, the mask may be made of a flexible ferromagnetic sheet. The mask may also be staged on the drum with other mechanical type entanglements. The mask is preferably elastomeric and may include an inextensible layer.

Abstract: A vacuum drum apparatus on which a mask is mounted having a resilient surface and an array of holes suitable for a substrate of a given size. The drum is a circular cylinder perforated with an array of holes. A hollow chamber within the drum is connected to a controlled pressure source for providing a vacuum. The mask may be magnetically attracted about the outer surface of the drum. Thus, the mask may be made of a flexible ferromagnetic sheet. The mask is preferably elastomeric and may include an inextensible layer.

Abstract: Apparatus and method for contact printing uses a vacuum contact plate and a screen frame to hold a master film sheet in contact registration with a screen having a region that is substantially porous to the passage of air disposed about a central photosensitive region. The vacuum contact plate receives the screen frame and supports the master film sheet and the screen on an elevated, substantially planar component. Air is evacuated from a hollow cavity within the elevated component to create a pressure differential across the master film sheet to urge the master film sheet in contact with the screen. If the master film sheet is not large enough to cover the entire porous region of the screen, the master film sheet is attached to a carrier sheet of sufficient size. The carrier sheet is then placed on the elevated component to be retained in contact registration with the photosensitive screen.

Abstract: A media handling unit is a selfcontained device which is capable of being moved to existing photoplotting structures to transport media sheets from a supply cassette housed within the unit and advanced into the plotter for conducting a plotting operation. The unit also retreives the scanned media from the photoplotter returning it the unit in a light tight environment where the scanned film is deposited onto a collecting tray. The supply of film is provided in a cassette having a semi-cyldrical support surface causing the film to take on a preformed configuration which is generally coincident with the shape of the support surface on the plotter.

Abstract: A vacuum frame apparatus including a latching system with means to assist in repressurizing the vacuumized area of the frame includes a vacuum blanket support frame pivotally mounted along one side of a glass panel for holding workpieces in precise registration against the glass panel for making copies includes a hollow rectangular frame around a flexible vacuum blanket. The frame members have a plurality of small vacuum ports on the underside inside a peripheral bead seal for evacuating the space between the flexible vacuum blanket and the glass panel when a vacuum is pulled on the interior of the hollow peripheral frame by a vacuum pump. Large size frontal ports are provided on the front side member of the frame to cooperate with batch mechanisms for clamping and holding the frame tightly against the glass panel during copy making.

Abstract: A method and a copying frame for copying of negative and positive original films, in combination with or without so called masking films, onto a material which is covered with a light sensitive layer, and having a frame rim of a non-transparent material and a glass plate inserted in a recess of said frame rim, and suction channels (9, 14, 17, 18) provided in said frame rim, and in which the copying frame, for making it possible to handle original films both of a "small" size format and of a "large" size format is formed with two sets of suction grooves, namely a) two cooperating, separate, parallel grooves (14) for suction connecting a "small" size original film (23), which grooves have a length matching the the width of said "small" size film format and are arranged along a part of the long sides of the frame rim, and b) two separate and cooperating, mainly C-shaped grooves (17) having the openings thereof facing each other and being arranged for suction connecting an original film of the "large" size film f

Abstract: A substrate supporting apparatus designed so that a substrate received and delivered by the apparatus can be positioned easily with improved accuracy. For this positioning, pressurized air is supplied between a float chuck and a base chuck of the substrate supporting apparatus to float the float chuck, and peripheral end surfaces of the float chuck are supported by cylinder pins and fixing pins. In this state, a substrate is received from a transport hand and is attracted to a surface of the float chuck. Thereafter, the cylinder pins are caused to recede, and the float chuck is moved together with the substrate by pressing forces of pressing springs to abut reference pins. As a result, a changeover valve is operated by output signals from photosensors to attract the float chuck to the base chuck.

Abstract: A sheet material holder includes a vacuum platen defining a plurality of arrays of vacuum channels corresponding in number and size to a plurality of sheet material sizes on one surface thereof and including a corresponding plurality of distinct vacuum plenums communicating with the arrays of vacuum channels; a vacuum pump; a corresponding plurality of remotely actuatable valves connected between the vacuum plenums and the vacuum pump; a corresponding plurality of flow sensors for sensing the flow of air between the plenums and the vacuum pump; and logic and control means connected to the flow sensors and the valves for sensing air flow between a plenum and the vacuum pump and actuating the corresponding valve. Sheet size is automatically inferred by the pattern of valves that are actuated.

Abstract: The apparatus and method of the present invention uses a register light unit to facilitate manual alignment of master photographic images on a flexible carrier sheet. The carrier sheet and master images are positioned relative to a photosensitive screen using a vacuum contact plate that receives a screen frame in tight registration using a substantially planar surface for supporting the flexible carrier sheet with master images thereon. Vacuum is drawn around the screen to develop a pressure differential across the carrier sheet to urge the master images thereon into surface contact with the photosensitive screen during exposure to a source of illumination. Work stations include storage bins for prepared screens and master films to expedite processing through an exposure unit that includes a vacuum contact plate which is mounted to translate between a load/unload position outside of a housing and an exposure position inside of a housing that shields an operator from radiation from the source of illumination.

Abstract: Automated apparatus and method for exposing lithographic plates to light through films and masks. The method involves placing a plate, film and mask at an exposure station in superposed relation to one another with the film overlying the plate and the mask overlying the film, exposing the plate to light through the mask and film at the exposure station, raising the mask off the film to a raised position, gripping the film and moving it relative to the plate to expose a portion of the plate therebelow, gripping the exposed portion of the plate, gripping the mask in its raised position, moving the film, plate and mask forwardly while so gripped to a discharge station, and releasing the film, plate and mask at the discharge station.

Abstract: Apparatus for exposing photosensitized plates to light through films, having a window movable up and down at an exposure station adapted to grip a film after an exposure of a plate and to lift the film away from the plate, plates and films being fed in under its raised window from a loading station, films being discharged from the bottom of the raised window to a tray located above the loading system in a position wherein it does not interfere with manual loading of plates and films in the apparatus.

Abstract: The registration board assembly for pre-press printing proofs and printing plates includes a substantially planar layer or registration board, a backing layer adjacent and affixed to the planar layer, and a cavity formed between the planar layer and the backing layer. A register pin extends through an aperture in the planar layer. An elastomeric member such as a rubber diaphragm is disposed within the cavity and biases a barrel portion of the register pin through the planar layer aperture. The elastomeric member is mounted so that it is removable and replaceable. One way of mounting the elastomeric member is to provide a hole in the backing layer through which the elastomeric member is pulled to remove it. A new elastomeric member is then pushed through the backing layer hole. In a second embodiment, a threaded plug in the backing layer holds the elastomeric member in place. The threaded plug is removed to replace the elastomeric member.

Abstract: A slide track, pin registration system for registering photosensitive media to light exposure equipment. The system includes one or more slide tracks and each of which contain media registration pins. The slide tracks are orthogonally mounted within grooves let into a resilient media support mat. Each pin is restrained in a spring biased retainer which retainer is loosely confined in a support base that slide mounts to the track. The number of pins and profile shapes are variable to match the media and registration requirements. In one vacuum system, the tracks are supported in a multi-chambered, foam backed bladder. In another the tracks are supported on a single chambered bladder. In still another system, the retainer slides within grooves formed in a rigid board.

Abstract: The method and apparatus for securing a sheet of photographic material in position on a plate during exposure to a source of radiation includes configuring a flexible vacuum blanket substantially to the shape of a rigid template that forms surface recesses in a selected pattern to facilitate the evacuation of air from beneath the vacuum blanket, and then reconfiguring the surface of the vacuum blanket to smooth condition by relieving vacuum between the blanket and the template to promote substantially continuous contact with the sheet and plate. The sheet may be exposed to a source of radiation through the plate or, after removing the template, through the vacuum blanket which may be formed of transparent polymer material.

Abstract: Both surfaces of a substrate formed with a resist or a thin film sample can be exposed concurrently and either one surface exposure or both surface concurrent exposure of the sample can be carried out. The first groove for use in fixing the flat plate holder of transparent material held by a frame to the frame under a suction of vacuum and fixing is formed at a lower circumferential edge of the flat plate holder, the second groove for sucking by vacuum and fixing the mask film on the upper surface of the flat plate holder is formed at the upper surface of the flat plate holder and at the same time there is provided a seal member for sealing a clearance between the mask film and the end part of the sample formed with a resist position aligned to each other, and suction holes for use in sucking by vacuum and fixing the lower surface of the end part of the sealed sample are communicated with each of the seal member, mask film and the flat plate holder in a sample holding device of the exposure device.

Abstract: A film mask is abutted to the object at the one side thereof then a fluid is introduced at an other side of the film mask so as to press the film mask to be placed in contact with the object.

Abstract: An imaging support assembly for precise and repeatable alignment and registration of plural, planar workpieces having a plurality of projecting registration pin assemblies. The workpieces contain holes where projecting pins of the registration pin assemblies are received. At least one of the registration pin assemblies contains a projecting pin of a non-circular shape when viewed end-on. A flanged barrel of the assembly is rigidly mounted to a planar support board. The projecting pin is spring biased within a sleeve that mounts in the barrel. The pin projects through a barrel aperture and is non-rotatively movable in the plane of the board within limits defined by the barrel aperture.

Abstract: An apparatus and method for transferring xerographically printed information on a piece of paper (102) to an ultraviolet sensitive medium (101). The paper (102) can be optionally treated with a chemical (207) to enhance ultraviolet light transmission through the paper (102). The paper (102)/medium (101) assembly may be advanced via nip rollers (432, 433) at a predetermined rate so as to optimize time of exposure to the ultraviolet light source (410).

Abstract: A mask is used for mounting a sensitized sheet, such as a printing plate, onto the surface of an exposure drum. The mask, acting as an intermediary between the exposure drum and the printing plate, is a flexible sheet, with a top and bottom surface, that is mounted about the exposure drum. A groove formed within the top surface of the flexible sheet is used for securing the printing plate by means of a vacuum. A passageway formed within the flexible sheet connects the groove to the bottom surface and receives a vacuum from the exposure drum. Plates of different sizes are mounted to the exposure drum by interchangeable masks of corresponding sizes.

Abstract: A contact print frame of the type which is especially adapted to move one or more transparent films (7) into intimate contact with a light sensitive printing plate (11), a light sensitive collection film or any other light sensitive medium and to expose/print said one or more transparent films (7) onto said light sensitive medium (11), and comprising a supporting transparent glass, named contact glass (1), which has, as conventional, vacuum grooves (5, 6) at the bottom surface thereof for vacuum connecting an original/master film (7) and eventually also a masking film to said contact glass (1), and which is arranged to be pressed into contact with the printing plate (11) etc.

Abstract: A device for aligning a flexible mask with a substrate when the substrate is mounted on a vacuum chuck member which includes a surround member surrounding the exposed surface of the substrate. The mask is held on a mask holder and the chuck member and mask holder are movable toward and away from each other. The surround member rests on a flexible element which effectively causes the surround member to float so that when the mask is brought into contact with the substrate, the mask always lies in the same plane as the exposed surface of the substrate and the exposed surface of the surround member and no distortion of the mask occurs.

Abstract: A method of contact printing comprising the steps of supporting a film and an original in superposed relationship. A vacuum is progressively applied to the superposed film and original from a first edge to an opposite edge thereof to hold them in substantially intimate contact while simultaneously moving a source of collimated light over the surface of the superposed film and original and exposing the film through the cover sheet and the original.

Abstract: The reproduction device according to the invention comprises a support (3) provided with a window (4), the original (2) being intended to block the window, while the film (1) is intended to be placed in front of the original, a frame (5) located in front of the support (3), on the side of the original and of the film, and provided with pressing means (6) opposite the portion of the film disposed in front of the original, the support and the frame being displaceable in relation to one another between an inactive position in which the pressing means do not exert any action on the film and the original, and an active position in which the pressing means first of all press the film against the original, and then the original against the support, means for creating a negative pressure between the original and the film when the support and the frame are in their active positions, and a light source located on the side of the support (3) that is opposite the frame for printing the film through the original.

Abstract: A method of manufacturing an aperture pattern printing plate in a limited number of steps using only one original printing plate. The method produces transparent portions on a portion of the printing plate corresponding to a non-effective area of a shadow mask, and opaque portions on a portion of the printing plate corresponding to an effective area of a shadow mask. The method has the steps of bringing a transparent plate having an unexposed transparent photosensitive layer formed on at least one of its principal surfaces into contact with an original plate having opaque areas corresponding to apertures in a to be constructed shadow mask. A first exposure is performed on the photosensitive layer through the original plate. The photosensitive layer is then developed to render exposed portions of the photosensitive layer opaque. These opaque portions are then etched away. A portion of the photosensitive layer corresponding to the non-effective area of a shadow mask is then covered to prevent exposure.

Abstract: Positional shifting of a photosensitive film due to poor winding-up and -off of an air-tight sheet is prevented without troublesome adjustments, whereby operationability of a contact printer is enhanced and improved. The air-tight sheet winding mechanism includes a connector frame fixed to a pair of carriages movable along each track rail disposed on both sides of a contact printer, and a roller holder for supporting a sheet roller. The connector frame is engaged with the roller holder by inserting micro bearings into oblong apertures. The roller holder and the sheet roller are engaged with the connector frame to slidably move in a direction B and swing about the micro bearing as shown by an arrow C. An air tight sheet is thus precisely and uniformly wound up and off according to its inherent properties including residual stress and residual strain.

Abstract: A contact printer for producing graphic material, such as engraving plates, by exposing a metallic surface by means of a light source emitting ultra-violet light. The light source is situated in a box with a lid which can be tipped up. Inside the box, a vacuum frame is provided which can be tipped down from a horizontal position below the lid to an inclined position for the exposure. The resulting apparatus is very compact, and simultaneously, an almost uniform exposure over the entire metallic surface is achieved.

Abstract: A pneumatic pressure pad within an exposure stage of a microfiche duplication equipment cyclically reliably evenly progressively pressures a microfiche master film into uniform pressured contact with an unexposed film in order that the unexposed film may be exposed from the master film without appreciable distortion. A housing of the pneumatic pressure pad defines a chamber divided into separate volumes by a flexible diaphragm. A pneumatic source cyclically applies a differential air pressure between the chamber's two volumes and across the flexible diaphragm. Outside of the housing, an elastomeric pressure pad presents a substantially planar precision crowned surface in a direction oriented towards the planes of each of the unexposed and exposed films. A shaft connects the diaphragm to the pressure pad.

Abstract: A vacuum contact printing device comprises a pair of frame members for supporting a pair of originals disposed on both sides of a base member and a pair of transparent plates disposed outside the frame members. A first vacuum chamber is formed between the paired originals and a second vacuum chambers are formed between the paired originals and the transparent plates. A vacuum device is connected to the first and second vacuum chambers for exhausting inner air in the first and second chambers for reducing inner pressures thereof and being capable of releasing the vacuum condition at least in the second vacuum chamber. There is provided an exposure apparatus to which the original contact printing device is applicable, in which original contact devices are movable from exposure positions to other positions and a supplemental original contact device is movable to the exposure position.