Abstract: A method for optically examining the interior of turbid media is provided. The method comprises the steps: providing broad-band light (2); spatially separating a plurality of wavelength bands (2a, 2b, . . . , 2n) contained in the broad-band light; separately modulating the plurality of wavelength bands (2a, 2b, . . . , 2n); recombining the plurality of modulated wavelength bands to a beam (11) of spectrally encoded broad-band light; illuminating a turbid medium (8) with the beam (11) of spectrally encoded broad-band light; detecting light emanating from the turbid medium (8) with a detector (9) and demodulating the detected light with a demodulator (10) to provide spectroscopic information.

Abstract: The invention is directed to an arrangement for an optical system for polarization-dependent, time-resolved optical spectroscopy, in particular a spectrometer that includes a polarization device which has a crystal polarizer and includes a light entry area which is arranged upstream of the polarization device and which is formed in such a way as to enclose a spatial acceptance angle of the crystal polarizer, and also that includes a light exit area which is arranged downstream of the polarization device, wherein an intermediate area which connects the light entry area and the light exit area is formed in the polarization device with a path length of at most approximately 4 mm which is traversed in the crystal polarizer by light impinging within the spatial acceptance angle.

Abstract: A new method and strategy for the quantitative determination of enantiomeric purity that combines polarimetry, spectroscopy, and chemometric modeling. Spectral data is collected after a light beam is passed through a first polarimeter, a sample of a chiral compound, and a second polarimeter oriented at a 45 degree angle relative to the first polarimeter. The spectral data for samples of known enantiomeric composition is subjected to a type of multivariate regression modeling known as partial least squares (“PLS-1”) regression. The PLS-1 regression produces a mathematical model that can be used to predict the enantiomeric composition of a set of samples of unknown enantiomeric purity.

Abstract: The present invention provides a small spectroscope that has a short response time. A spectroscope according to one embodiment of the present invention includes: a beam deflector that includes an electro-optic crystal, having an electro-optic effect, and paired electrodes used to apply an electric field inside the electro-optic crystal; spectroscopic means for dispersing light output by the beam deflector; and wavelength selection means for selecting light having an arbitrary wavelength from the light dispersed and output by the spectroscopic means.

Abstract: A tunable optical spectrometer includes a medium configured to perform polarization rotation within a frequency band on a linearly polarized test beam, wherein the medium is circularly birefringent, and wherein the polarization rotation is achieved based on two-photon-absorption. The medium includes a gaseous substance, a first reference laser beam having a first reference frequency, and a second reference laser beam having a second reference frequency, wherein the first reference laser beam and the second reference laser beam have a same circular polarization state.

Abstract: The invention is related to a camera device (10) for CCTV applications. The camera device (10) comprises a sensor (12) comprising a lens (14) for monitoring the scene in front of the camera device (10). At least one polarizer element (16) is assigned to said sensor (12), the at least one polarizer element (16) being rotatably mounted with respect to said sensor (12), or said polarizer element (16) uses opto-electric effects.

Abstract: A spectrometer for analysing material comprises a light source, a monochromator for selecting a range of wave-lengths from the light source and emitting them as monochromatic light, a chamber for locating a sample, a focusing means for focusing the monochromatic light onto a sample in the chamber, a detector for measuring the monochromatic light after it has interacted with the sample. An independently variable parameter is varied between two values vi and v2, while the detector measures the monochromatic light across a range of is wavelengths, the independent variable having a value or values between v1 and v1+?v, and ?v being much smaller than the interval between v1 and v2.

Abstract: A light focusing unit and a spectrum measuring apparatus having the same are provided. The light focusing unit includes a light source section configured to emit light, a light guiding section configured to guide the light emitted from the light source section along multiple parallel light incidence paths, and a light focusing section configured to direct the light from the guiding section to be incident on a test position of a sample at different incidence angles.

Abstract: A method and apparatus for convolving spectroscopic data with certain phase information for practicing phase-compensated sensitivity-enhanced spectroscopy (PCSES). PCSES uses a beam of radiation in a polarization state PSp from a source emitting at a plurality of wavelengths, and places in the beam a compensator capable of altering polarization state PSp by applying a delimited phase shift ? between two orthogonal polarization axes of the radiation to restrict a finely-vibrating spectrum. A sample disposed in the beam after the compensator generates a response beam by reflection, transmission or even both. A polarization state PSa of the response beam is passed to a detector to determine a spectrum of the response beam. A first spectrum is collected when polarization states PSp, PSa and the compensator are in a first polarization-altering configuration and a second spectrum is collected when polarization states PSp, PSa and the compensator are in a second polarization-altering configuration.

Abstract: The present invention relates to a system and methods for acquiring two-dimensional Fourier transform (2D FT) spectra. Overlap of a collinear pulse pair and probe induce a molecular response which is collected by spectral dispersion of the signal modulated probe beam. Simultaneous collection of the molecular response, pulse timing and characteristics permit real time phasing and rapid acquisition of spectra. Full spectra are acquired as a function of pulse pair timings and numerically transformed to achieve the full frequency-frequency spectrum. This method demonstrates the ability to acquire information on molecular dynamics, couplings and structure in a simple apparatus. Multi-dimensional methods can be used for diagnostic and analytical measurements in the biological, biomedical, and chemical fields.

Abstract: Before the diffraction from a diffracting structure on a semiconductor wafer is measured, where necessary, the film thickness and index of refraction of the films underneath the structure are first measured using spectroscopic reflectometry or spectroscopic ellipsometry. A rigorous model is then used to calculate intensity or ellipsometric signatures of the diffracting structure. The diffracting structure is then measured using a spectroscopic scatterometer using polarized and broadband radiation to obtain an intensity or ellipsometric signature of the diffracting structure. Such signature is then matched with the signatures in the database to determine the grating shape parameters of the structure.

Abstract: The present invention relates to an optical device for assessing optical depth (D) in a sample (100) illuminated by polarized radiation (20) from a source (10). A first and a second radiation guide have their end portions (3Oa?, 30b?) arranged for capturing reflected radiation (25a, 25b) from the sample. A detector (40) measures a first polarization (P1) and a second polarization (P—2) of the reflected radiation (25), and a first and a second intensity (II, 12) of the reflected radiation (25a, 25b) in the first (30a) and the second (30b) radiation guide, respectively. Processing means (60) then calculates a first (f) and a second (g) spectral function, both spectral functions (f, g) being indicative of single scattering events in the sample.

Abstract: This invention provides an apparatus and method for characterization of thin film structures. More particularly, the present invention provides methods and devices for fast and accurate identification of optical constants, thickness, interface roughness and stresses of a sensing film structures by spectropolarimetric imaging technique. This invention also provides the method for active in-line manufacturing diagnostics and process control. The invention is broadly applicable with most important applications being manufacturing diagnostics, process control, quality control and characterization of solar cells, flat panel displays and semiconductor structures.

Abstract: The invention relates to an optical spectral sensor for determining the spectral information of incident light, in particular in the visible and infrared spectral range, with at least one optoelectronic semiconductor arrangement and at least one metal film, which is surrounded by a dielectric, wherein the metal film has a periodic pattern, wherein the at least one optoelectronic semiconductor arrangement and the at least one patterned metal film are arranged in such a way that light to be detected initially passes through the patterned metal film and then impinges on the optoelectronic semiconductor arrangement, wherein the optical spectral sensor is formed in such a way that the spectral sensitivity is determined essentially by the optical properties of the patterned metal film.

Abstract: A grating-based biosensor is disclosed where the biosensor is constructed and arranged such that the grating lines of the sensor align with an optical axis of a birefringent substrate, so as to improve resonance peak uniformity. Methods of manufacturing biosensors to provide alignment of the grating lines with the optical axes of a birefringent substrate are also disclosed. One embodiment uses a grating master wafer to form a grating on a continuous web of substrate material. The grating master wafer is rotated relative to the web until the lines of the grating in the master wafer are in substantial alignment with the optical axis of the web. A UV curable material is applied to the wafer and cured in place to form the grating on the surface of the substrate web. With a web of some preferred materials, such as PET film, one need only determine the optical axis orientation once for a given web since the optical axis orientation is essentially constant along the length of the web.

Abstract: An optical measurement apparatus and method a method for performing modulation spectroscopy measurement of a sample comprising: delivering an incident probe beam to a sample at a known spot; modulating reflectance of the probe beam with a pump beam which periodically forms a pump beam spot on the sample coincident with the probe beam spot; and monitoring a reflected probe beam with a detector: wherein the incident probe and pump beams are collinear; and wherein the incident beams are directed to be collinear by reflecting a beam from a facet of an optical waveguide transmitting the other beam.

Abstract: A tunable optical spectrometer includes a medium configured to perform polarization rotation within a frequency band on a linearly polarized test beam, wherein the medium is circularly birefringent, and wherein the polarization rotation is achieved based on two-photon-absorption. The medium includes a gaseous substance, a first reference laser beam having a first reference frequency, and a second reference laser beam having a second reference frequency, wherein the first reference laser beam and the second reference laser beam have a same circular polarization state.

Abstract: A drift tube amplifier having an input and an output. The drift tube amplifier including a current-to-voltage converter for converting input current to a voltage, a band pass filter assembly for reducing unwanted noise within the voltage, a voltage controlled amplifier for adjusting the output voltage level, and a logarithmic ratio converter for converting the voltage from linear to LOG scale.

Abstract: An apparatus for separating fluorescent light from light elastically scattered/reflected from a material illuminated with a broadband illumination source includes a polarization discriminator, which separates the substantially polarized elastically scattered/reflected light from the unpolarized fluorescent light, and a spectrometer to analyze the full and separated reflectance spectra. A linear polarizer may be provided to polarize the illumination source. A method for separating fluorescence light induced in a material by broadband light from an elastic scattering/reflection component includes providing polarization discrimination to separate the components, the fluorescence light being substantially unpolarized, and spectrally analyzing the reflectance components. The method may include linearly polarizing the light source. A fluorescence spectra may be extracted from a minimum reflectance spectra or from a residual polarization reflectance spectra.

Abstract: Apparatus for analyzing light having at least one wavelength, the apparatus comprising: (a) a light deflector for deflecting the light so as to provide a deflected light beam characterized by at least one wavelength-dependent angle, respectively corresponding to the at least one wavelength of the light; (b) an encoder, capable of encoding the deflected light beam so as to provide an encoded light beam characterized by at least one angle-dependent polarization state, respectively corresponding to the at least one wavelength-dependent angle; and (c) a decoder, for decoding the encoded light beam so as to determine at least one spectral component of the light.

Abstract: A device for measuring an optical property of a liquid crystal display is provided. The device has a light source providing a light, a first polarizer pervious to the light, a second polarizer pervious to the light, a detector receiving the light, and a calculating module. The first polarizer and the second polarizer are mounted between the light source and the detector, a first transmittance spectrum is obtained while the liquid crystal display is mounted between the first polarizer and the second polarizer, and a second transmittance spectrum is obtained while the liquid crystal display is mounted between the detector and the first and second polarizers.

Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.

Abstract: A spectrometer generates Vibrational Circular Dichroism (VCD) measurements having an exceedingly high signal-to-noise ratio, as well as a greater wavelength range over which measurements may be accurately provided. This is achieved by utilizing reflective optics (preferably solely reflective optics, i.e., no refractive elements) to supply a concentrated and collimated input light beam to a sample within a sample cell, and similarly collecting the light output from the sample cell via reflective optics for supply to a detector.

Abstract: The invention is directed to an arrangement for an optical system for polarizalion-dependent, time-resolved optical spectroscopy, in particular a spectrometer that includes a polarization device which has a crystal polarizer and includes a light entry area which is arranged upstream of the polarization device and which is formed in such a way as to enclose a spatial acceptance angle of the crystal polarizer, and also that includes a light exit area which is arranged downstream of the polarization device, wherein an intermediate area which connects the light entry area and the light exit area is formed in the polarization device with a path length of at most approximately 4 mm which is traversed in the crystal polarizer by light impinging within the spatial acceptance angle.

Abstract: An apparatus for ascertaining properties of a light beam, comprises a means for splitting a measured beam out from the light beam and comprises at least one detector that at least partially receives the measured beam. A polarization-influencing means is arranged in the beam path of the measured beam in order to enhance reliability and reproducibility.

Abstract: A light source unit and a spectrum analyzer are provided in which the influence of interference can be reduced under conditions where light is separated into spectral components. A spectrum analyzer 1 is equipped with a light source unit 2 for irradiating light onto sample A, a detector unit 3 for detecting the light reflected, scattered, or transmitted from the sample A, and a sample stage 4 on which a sample A is placed. A wide band light source 20 generates wide band light P1 such as supercontinuum light (SC light). Also, the light source unit 2 has an interference suppressing means for suppressing the interference of each wavelength component of the wide band light P1.

Abstract: A polarizing monochromator comprising a uniaxial birefringent crystal prism, the prism has the geometry of a triangular block having a triangular base, a face including a side of the hypotenuse is an input-output face, where light enters and exits, and a face including the longer side of the right angle is a reflection face, the optic axis of the prism is perpendicular to the base of the prism, the angle of the input-output face of the prism with respect to light coming from a collimator optical system is determined in such a manner that ordinary light and extraordinary light exit from the input-output face of the prism in opposite directions with respect to an optical axis connecting the collimator optical system and the prism, and a light-collecting optical system is disposed to collect either extraordinary light or ordinary light exiting from the input-output face of the prism.

Abstract: A scanner device includes a support surface for the measured object and a drive unit for moving a color measuring head across the support surface in at least one dimension thereof and for adjusting the height of the color measuring head in the direction perpendicular to the support surface, as well as a measuring and drive control unit activating the drive unit and cooperating with the color measuring head (MH). The color measuring head (MH) is equipped with at least an illuminating channel (IC) and a collection channel (CC). The illuminating channel (IC) has a light source (10) and optical means (12-22) for illuminating the measured object (S) at a measurement site at a mean angle of incidence of 45 E.

Abstract: Apparatus and method for increasing the sensitivity in the detection of optical coherence tomography and low coherence interferometry (“LCI”) signals by detecting a parallel set of spectral bands, each band being a unique combination of optical frequencies. The LCI broad bandwidth source is split into N spectral bands. The N spectral bands are individually detected and processed to provide an increase in the signal-to-noise ratio by a factor of N. Each spectral band is detected by a separate photo detector and amplified. For each spectral band the signal is band pass filtered around the signal band by analog electronics and digitized, or, alternatively, the signal may be digitized and band pass filtered in software. As a consequence, the shot noise contribution to the signal is reduced by a factor equal to the number of spectral bands. The signal remains the same. The reduction of the shot noise increases the dynamic range and sensitivity of the system.

Abstract: An imaging-type near-field optical microscope mainly comprises a light source and a photodetector array. The array functions as imaging array where each cell or photodetector has subwavelength dimensions. A sample under test is disposed in optical near field of the photodetectors, e.g., on surface of the array. As a result of subwavelength dimensions and near-field effect, resolution can break the diffraction limit and even reach nanoscale. The microscope has a fast speed, works with soft sample and sample in solution, and is capable of dynamic observations. In addition, the array surface doubles as a platform for molecule manipulation.

Abstract: A normal incidence reflectometer includes a rotatable analyzer/polarizer for measurement of a diffracting structure. Relative rotation of the analyzer/polarizer with respect to the diffracting structure permits analysis of the diffracted radiation at multiple polarity orientations. A spectograph detects the intensity of the spectral components at different polarity orientations. Because the normal incidence reflectometer uses normally incident radiation and an analyzer/polarizer that rotates relative to the diffracting structure, or vice-versa, the orientation of the diffracting structure does not affect the accuracy of the measurement. Thus, the sample holding stage may use X, Y, and Z, as well as r-? type movement and there is no requirement that the polarization orientation of the incident light be aligned with the grating of the diffraction structure.

Abstract: A spectroscope capable of suppressing the dimension and the cost with avoiding a problem caused by polarization dependency of the diffraction grating. The spectroscope includes a polarizing beam splitter plate 3 that divides the light from an input fiber 1 into a first and a second optical paths and polarizes each light of each optical path having different direction of polarization with each other, a Fresnel rhomb half wave plate 5 that arranges the direction of polarization of the light in the first optical path into that in the second optical path and a plane mirror 4 that deflects the second optical path such that at least a portion of an area where the light through the first optical path is incident on the diffraction grating 6 and an area where the light through the second optical path is incident on the diffraction grating overlap each other.

Abstract: A filter for use in a spectrometer to filter transmitted radiation and wherein the filter has a birefringent element responsive to an applied signal, a first polarizer for polarizing the radiation transmitted by a sample, a second polarizer for polarizing the radiation transmitted by the birefringent element, and wherein the birefringent element has a birefringent member having a first birefringence and the birefringent member being responsive to a force applied thereto to generate an additional second birefringence; and the filter having a driver for applying a force to the birefringent member in accordance with the applied signal, and the driver has a piezoelectric member coupled to the birefringent member on one end or at two opposite ends.

Abstract: An apparatus for filtering an input beam of light to produce an output beam of light is provided. The apparatus facilitates tuning an input beam of light to a desired wavelength by directing the input beam of light, via a mirror, onto a diffractive optical element and returning the diffracted portion of the input beam of light as an output beam of light. The apparatus may also include a polarization recovery element adapted for receiving the input beam of light and outputting a first and second spatially offset beam of polarized light. The apparatus may also be configured as a tunable receiver by utilizing a detector to detect a characteristic of a filtered output beam. The output beam may be additionally filtered by a spatial filter.

Abstract: In a device for measuring the complete polarization state of light over a spectral bandwidth, an optical input signal (41) with wavelengths of light within a spectral band is incident on two or more diffraction gratings (42, 44, 46, 48), or incident from at least two directions on one or more diffraction gratings (72, 74), and the intensity is measured as a function of wavelength for at least four of the diffraction spectra produced by the grating(s). The polarization state of light is then calculated as a function of wavelength over the spectral bandwidth from the intensity measurements.

Abstract: A method and apparatus for mitigating the effects of polarization on wavelength determinations is disclosed. An optical source produces light across an optical spectrum, while a polarization element changes the polarization of the light at a first rate. The resulting light is applied to an optical element that produces a spectral response with a feature of interest from the polarization changed light. The optical element and the polarization element are such that the bandwidth of the feature of interest of the optical element is significantly greater than the first rate. A receiver network produces received signals from the received spectrum; and a data processing unit calculates a wavelength that is insensitive to ripple in the received signal and/or the received signals are low-pass filtered to reduce the ripple resulting from the polarization change.

Abstract: A method of measuring a concentration of a component in a subject includes setting an intensity relationship equation between a positive-order beam and a negative-order beam with respect to a reference matter at a particular wavelength, applying a light having a first wavelength band absorbed by the component and detecting an intensity of a positive-order beam output from the subject and an intensity of a negative-order beam output from the reference matter, the positive-order beam and the negative-order beam having a second wavelength band, calculating an intensity of a positive-order beam input to the subject by applying the intensity of the negative-order beam output from the reference matter to the intensity relationship equation, and calculating absorbance using the intensity of the positive-order beam output from the subject and the intensity of the positive-order beam input to the subject and measuring a concentration of the component using the absorbance.

Abstract: A Non-Scanning Computed Tomography Imaging Spectropolarimeter (NS-CTISP) measures all spatial, spectral and polarimetric information simultaneously in an image scene allowing measurement of dynamically changing scenes. In particular, NS-CTISP uses division of aperture to polarimetrically analyze each divided image, all of which are thereafter diffracted to measure irradiance on a focal plane array. The Stokes object cube data for each voxel is thereafter estimated from an inverse of the voxel polarimetric calibration matrix for the optical components.

Abstract: The invention describes a method to eliminate instrumental offset in measurement of optically active scattering and circular dichroism. The method uses the time-average measurement of the light that is systematically transformed by a series of optical devices. The optical devises perform the function of rotating linearly polarized light, interconverting left and right circular polarized light, converting circular polarized light to rotating linear polarized light and converting linear polarized light to alternating left and right circular polarized light.

Abstract: Incoming light is spectrally analyzed by diffracting the incoming light with a grating. At least a part of the incoming light is split off so that this part contains mainly one polarization component of the incoming light. It is ensured that this split-off part and a remaining part of the incoming light reach the grating with their polarized component mainly parallel to a main direction of polarization which is diffracted with maximal efficiency by the grating. For this purpose, at least the split-off part is diffracted after being passed through a polarization rotating element.

Abstract: A dual-channel, double-filtering, multi-pass OSA having a narrow spectral linewidth response and high ORR comprises a diffraction grating (DG), two input ports (P1?, P1?) for directing first and second input light beams (LR, LT) onto the grating; a retroreflector (RAM1) for returning the dispersed light beams to the grating for dispersion again; two intermediate output ports (P2?, P2?) for receiving the twice-dispersed light beams; two secondary input ports (P3?, P3?) coupled to the intermediate output ports by polarization-maintaining waveguides (PMF2?, PMF2?) for directing the light beams onto the grating a third time, with their SOPs having a predetermined orientation relative to the SOPs of the first and second light beams when first incident upon the grating, the retroreflector (RAM1) returning the three-times-dispersed light beams to the grating for dispersion a fourth time; and two output ports (P4?, P4?) for receiving the light beams after dispersion the fourth time.

Abstract: Disclosed is the application of spatial filters and beam energy homogenizing systems in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.

Abstract: A variable-wavelength light source unit for sending output light of an arbitrary wavelength selected in a variable-wavelength light source section 1 has an optical variable attenuator 2 placed on the output side of the variable-wavelength light source section and a control circuit 4 for controlling the attenuation amount of the optical variable attenuator in response to light output provided by splitting a part of the output light.

Abstract: An electrically adjustable spectrometer uses collimated, P-polarized light made incident on a surface of an optically transparent liquid crystal input material. The material transmits the light to a boundary surface between the input material and an output optically transparent material. The input material is preferably highly dispersive, making Snell component values at the boundary surface markedly different for different wavelengths. The output material is preferably of low dispersion and high birefringence. Only one wavelength at the boundary surface has a Snell component value tangent to its corresponding index surface in the output section. Within this section, the ray vector for this wavelength is parallel to the boundary surface. Because optical energy propagates in the ray vector direction, only the narrow range of wavelengths having ray vectors substantially parallel to the boundary surface reach an output of the device.

Abstract: An apparatus for ascertaining properties of a light beam, comprises a means for splitting a measured beam out from the light beam and comprises at least one detector that at least partially receives the measured beam. A polarization-influencing means is arranged in the beam path of the measured beam in order to enhance reliability and reproducibility.

Abstract: The present invention provides a thin film property measuring method using a spectroscopic ellipsometer. With the measuring method, a model including a combination of the film thickness, complex refractive index, or the like, of each layer is formed, and fitting is made for the measured spectra and the spectra calculated based upon the model, with the model and the incident angle being modified over a predetermined number of repetitions, thereby determining the structure, the wavelength dependency of the dielectric constant, and the composition ratio, of a thin film including a compound semiconductor layer on a substrate. Furthermore, new approximate calculation is employed in the present invention, thereby enabling the concentration of the atom of interest contained in polycrystalline compound semiconductor to be calculated.

Abstract: An optical signal performance monitoring apparatus in a multi-channel optical transmission system and a method for monitoring the optical signal performance.

Abstract: There is disclosed a method and apparatus for spectroscopically sensing a man-made, terrestrial or atmospheric magnetic field emanating from an object that includes receiving a radiance emission from an object and dispersing the radiance emission into parts of the electromagnetic spectrum. The method also includes detecting a part of the electromagnetic spectrum identified with a selected gas and measuring the magnetic field from a part of the electromagnetic spectrum based on spectral spreading of a spectral line.

Abstract: The present invention relates to a spectrometer module comprising an input, for receiving an incoming optical signal, a variable differential group delay (DGD) element, for applying a variable birefringence retardation to said incoming optical signal, and a detector unit for detecting the power of a signal exiting said variable DGD element, having a defined state of polarization. It also relates to a monitor module, a monitoring unit and a monitoring system, comprising such a spectrometer module for use in monitoring an optical network. Further, the invention relates to a spectrometer device, for spectrometry purposes, comprising a spectrometer module as stated above.

Abstract: In a process of forming a film on a surface of a wafer by thermal processing, laser light generated by a light source is depolarized by a depolarizer and the deporlarized light is irradiated upon the surface of wafer. As for the light reflected from the surface of wafer, polarization components in predetermined two directions perpendicular to each other are extracted by a beam splitter, and optical sensors receive the extracted light components to detect each intensity. An analytical processing unit determines a thickness of a formed film based on a change in a difference in intensity.