Abstract: In an optical spectrum analyzer comprising a spectrograph and a photodevice array, and an optical spectrum detecting method, a wavelength deviation, from an assigned wavelength, of a light detected by a photodevice array which detects a wavelength of a diffraction light or a non-diffraction light from an acoustooptic device, is detected and a feedback control to a diffraction angle of the acoustooptic device is performed. Also, without using a feedback control, an exit light and a diffraction light from the acoustooptic device are respectively received by two photodevice arrays and the photodevices are arranged in order to mutually compensate gaps between the photodevices, whereby a center of each photodevice is similarly made coincide with a peak of an optical beam to be received.

Abstract: The invention provides a method and apparatus for determining the wavelength of a sample source of light, the apparatus having a reference light source of known wavelength, a collimator for collimating light from the sample source and from the reference source, a dispersing means for receiving and spatially dispersing collimated light from the collimator according to wavelength, focusing means for focusing dispersed light from the dispersing means, and a photodetector located in the focal plane of the focusing means and having an aperture for spatially selectively admitting light from the focusing means, and operable to provide a temporally calibratable output signal indicative of the wavelength of the selectively admitted light, wherein the apparatus is operable to scan the focused spatially dispersed beam across the aperture, and the photodetector output includes resolvable features corresponding to light from the reference source and sample source, whereby a time difference between the features is indicati

Abstract: Plane diffraction grating 13 is formed of a material having an appropriate linear expansion coefficient and a variation in the wavelength of the reflected light from concave mirror 14 on account of thermal expansion or shrinkage of members other than plane diffraction grating 13 is cancelled out or reduced by a variation in the wavelength of the reflected light from concave mirror 14 on account of thermal expansion or shrinkage of plane diffraction grating 13. The same principle is used to deal with the effect on the wavelength of the diffracted light that may be caused by changes in the layout of individual members on account of thermal expansion or shrinkage of substrate 10a that fix them.

Abstract: A diffraction grating and a prism with the appropriate characteristics are employed to provide a combined dispersive characteristic that is substantially linear over the visible spectrum. Radiation from the grating and prism is collimated by a lens towards a detector array. The grating or a telecentric stop between the grating and prism is placed at a focal point of the lens in a telecentric arrangement so that equal magnification is achieved at the detector array. If the detector array is replaced by a plurality of optical channels, a multiplexer/demultiplexer is obtained.

Abstract: In a four-stage type monochromator, there is provided a returning reflector 6 for making the dispersing direction of the wavelength of light 13e and 13h incident on and emergent from a plane diffraction grating 4 is reversed before and after its reflection. Angles of incident and emergent light at a time when the light is spectrally separated by the diffraction grating 4 are made identical.

Abstract: An optical filter for generating a filter output signal from a filter input signal, the filter output signal consisting of light from the filter input signal in a predetermined bandwidth. The filter includes a grating, a first optical assembly and an optical signal path. A portion of the input signal traverses the optical signal path such that it is diffracted from the grating to form a first intermediate beam that is input to the first optical assembly, which generates a second intermediate beam therefrom. The second intermediate beam is directed back to the grating and is diffracted by the grating, a portion of the diffracted second intermediate beam forming a portion of the filter output signal. The second intermediate beam is the inverted image of the first intermediate beam, and hence, the second reflection from the grating compensates for the time dispersion introduced by the first reflection from the grating.

Abstract: An SNR calculation method having the steps of measuring the wavelength characteristic of a dynamic range in an optical spectrum measurement apparatus for each wavelength in a multiplexed wavelength range and storing the wavelength characteristic in a storage unit, measuring the signal level and the noise level of a measured optical signal wavelength, reading the noise level of the wavelength of the measured optical signal produced by each of other optical signal wavelengths multiplexed on the measured optical signal wavelength from the storage unit, subtracting the noise level read from the storage unit from the noise level of the measured optical signal wavelength to provide the corrected noise level, and calculating the SNR of the measured optical signal from the measured optical signal level and the corrected noise level.

Abstract: An optical spectrum analyzer comprises a diffraction grating (DG), a polarization decomposing unit (PDM) for decomposing the input light beam into first and second light beams having mutually-perpendicular linear states of polarization, and two output ports (FP2/1, FP2/2) each for receiving from the grating, substantially exclusively, a respective one of the polarized light beams (LT, LR) after diffraction by the diffraction grating (DG).

Abstract: The Ebert-type mounting is modified for use as a multiorder spectrograph, by replacing the spherical primary mirror of the Ebert with a paraboloidal mirror to eliminate the astigmatism and spherical aberration of the Ebert mounting, and by replacing the Ebert's rotating plane grating, normally blazed for use in the first order, with a fixed low-blaze-angle grating blazed at a longer wavelength such that the radiation at the shorter wavelengths, for which the grating will be used, will be most efficiently dispersed into a multiplicity of higher spectral orders. In a preferred embodiment of this invention, these spectral orders are separated using a twice-through cross-dispersing prism mounted near the grating surface, with the grating and prism mounted and aligned together in a crossed-dispersion assembly that is interchangeable with other crossed-dispersion assemblies containing other grating and prism combinations.

Abstract: In order to provide a multi-path monochromator capable of reducing the size of optical parts with a high resolution and a wide dynamic range, the multi-path monochromator has a lens 2 used as a first collimator for converting an incident light into a parallel light, a diffraction grating 4 for diffracting an output light outputted from the lens 2, plane mirrors 3 and 5 for reflecting a diffraction light diffracted by the diffraction grating 4 to return the diffraction light back to a same path, a parabolic mirror 7 used as a second collimator for collecting a diffraction light which is again diffracted by the diffraction grating into which a reflected light is again outputted from the plane mirror, and an output slit positioned at a focal position of the parabolic mirror 7. The parabolic mirror 7 used as the second collimator has a focal length which is longer than a focal length of the lens used as the first collimator.

Abstract: A Littrow-type spectrometer or monochromator using a folded light path to provide a compact optical instrument is disclosed. Light enters the instrument through an inlet aperture on a planar mirror. The aperture is located at the focus of a parabolic collimator mirror. Collimated light reflected by the parabolic mirror is reflected back to the planar mirror, which is positioned at an angle to the collimated light. The light reflected from the planar mirror is directed at a planar grating that produces diffracted light having all the wavelengths input into the system, including light of a selected wavelength, back towards the planar mirror. Light having the selected wavelength is thus caused to fall on the parabolic mirror. The parabolic mirror then focuses the selected wavelength of light onto a light exit aperture that is juxtaposed to the inlet light aperture. The planar grating can be rotatably mounted to scan the input light spectrum.

Abstract: In a spectrographic type spectrometry measuring apparatus employing a concave holographic diffraction grating or a replica thereof, a small-size and light-weight spectrometry measuring apparatus having a high reliability with a spectrum position does not move in a photo detector plane in spite of an occurrence of a temperature change. This measuring apparatus is composed of a light-condensing device, a concave holographic diffraction grating or a replica thereof, and a telecentric correction lens for condensing a diffracted light from the diffraction grating telecentrically on the spectrum condensing plane. In this constitution, the spectral ray enters vertically to the spectrum focusing plane, and if the photo detector is moved in the optical axis direction due to a temperature change, the spectrum is not moved on the photo detector surface, and it is not necessary to calibrate an optical element due to an ambient temperature change.

Abstract: A spectrophotometer, comprising a housing in which a measuring system is arranged, which housing has a measuring opening, via which light is passed to the measuring system. The measuring system comprises a grating monochromator, an autocollimator cooperating therewith, and detection means for the light originating from the grating monochromator. The grating monochromator and the autocollimator thereby form one whole.

Abstract: The invention provides a mechanism for oscillating the spectral grating of a monochromator. The mechanism couples the spectral grating of the monochromator to an oscillating spatial linkage mechanism which accepts a rotational input and converts it into an oscillatory motion. A monochromator according to the invention comprises an oscillating grating that is oscillated by such spacial linkage mechanism drive.

Abstract: A spectrometer has higher resolving power without enlarging a size of the apparatus. This spectrometer has a slit board, a mirror, a collimator lens, a holographic grating, an Echelle grating, a magnifier lens and a line sensor. The holographic grating is arranged to diffract parallel light incident from the collimator lens toward the Echelle grating. The Echelle grating is arranged to reflect the parallel light incident from the holographic grating toward the holographic grating.

Abstract: An optical wavelength selection apparatus containing a surface-relief transmission diffraction grating, a collimating lens for collimating a beam incident to the diffraction grating, and a focusing lens for focusing the beams diffracted by the diffraction grating. The diffraction grating, after having been subjected to a test condition of 85 degrees centigrade and a relative humidity of 85 percent for at least 500 hours, has diffraction efficiency performance within 6 percent of that achieved before being subjected to these test conditions.

Abstract: A spectrometer measures a spectrum of a light beam supplied from a light source so as to obtain fine information and coarse information of the spectrum easily. This spectrometer has a holographic grating, an Echelle grating, a rotation stage and a line sensor. In the case where a single pass beam is to be detected, a control processing unit controls the rotation stage so as to rotate the Echelle grating from the Littrow arrangement by a predetermined angle &dgr;1. On the other hand, in the case where a double pass beam is to be detected, the control processing unit controls the rotation stage so as to rotate the Echelle grating from the Littrow arrangement by a predetermined angle &dgr;2.

Abstract: A monochromator including: a concave mirror which converts incident light into parallel light and emits the parallel light, a plane diffraction grating for diffracting the parallel light emitted from the concave mirror, first reflection means which reflects first light diffracted by the plane diffraction grating and causes the diffracted light to enter the plane diffraction grating as second incident light, second reflection means which reflects second diffracted light and causes the reflected light to enter the plane diffraction grating as third incident light, and an exit slit disposed in the vicinity of a focal point such that third diffracted light is reflected by the first reflection means, to thereby enter the plane diffraction grating as fourth incident light and such that fourth diffracted light is converged at the focal point by the concave mirror, to thereby enable extraction of light having a specific wavelength.

Abstract: An apparatus and method for producing a substantially straight instrument image is provided. The apparatus and method for producing a substantially straight instrument image, according to the present invention includes a curved slit. The curved slit may be formed in a light beam controller. The curved slit is capable of admitting a light beam into the instrument. The instrument parameters associated with optical devices located in the instrument in the path of the light beam are determined. One or more formulae are used to transform and process the instrument spectral parameters to determine the shape or curvature of the curved slit.

Abstract: In the monochromator, when measured beam which is diffracted by a plane diffraction grating is collected by a collimator to be returned, the measured beam is displaced by a displacement member in a direction parallel to rulings of the plane diffraction grating and is passed through a first cut-off slit having a slit of a predetermined width formed in a direction perpendicular to the direction of the rulings.

Abstract: The spectrometer comprises, in combination: a slit (1) for the entry of a light beam; a collimator; a dispersion system (9); focusing means and a detector (13). The collimator comprises at least a first concave spherical mirror (3) and at least a first Schmidt plate (5) in an off-axis arrangement.

Abstract: A high resolution etalon-grating spectrometer. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.

Abstract: An optical filter for generating a filter output signal from a filter input signal, the filter output signal consisting of light from the filter input signal in a predetermined bandwidth. The filter includes a grating, a first optical assembly and an optical signal path. A portion of the input signal traverses the optical signal path such that it is diffracted from the grating to form a first intermediate beam that is input to the first optical assembly, which generates a second intermediate beam therefrom. The second intermediate beam is directed back to the grating and is diffracted by the grating, a portion of the diffracted second intermediate beam forming a portion of the filter output signal. The second intermediate beam is the inverted image of the first intermediate beam, and hence, the second reflection from the grating compensates for the time dispersion introduced by the first reflection from the grating.

Abstract: An apparatus and method for producing a spectrally variable radiation source and systems including same is disclosed. An embodiment of a spectrally variable radiation source is disclosed including a broadband radiation source, a collimating element, a dispersive element, an imaging element, an output aperture and an optional output collimating element. An embodiment of a spectrally encoded infrared chromatograph incorporating the inventive spatially variable radiation source is disclosed. An arbitrary spectrum projector for simulating emission or absorption spectra for chemical and biological agents, as well as projecting calibration and test spectra for characterizing sensors is also disclosed.

Abstract: An x-y coordinate is set on the surface of diffraction grating 3 with non-uniformly spaced grooves and expressed by the following series expansion which is a groove function describing a point (w,l) on the nth groove from the origin: 1 n = 1 σ ⁢ ∑ i , j ⁢ n i ⁢   ⁢ j ⁢ w i ⁢ l j ⁢   ⁢ ( i + j ≥ 1 )

Abstract: The invention concerns a device for adjusting angular play on a predetermined angular range of an optical element mobile in rotation relative to a frame. Said device comprises a contact piece (3), integral with the optical element, and an elastic steady arm (4). The steady arm has a first end (41) fixed to the frame and a second end (42) co-operating with the contact piece when the mobile element is oriented in the predetermined angular range, at least when the mobile element enters said angular range in the rotational direction (S1), such that the steady arm exerts on the mobile element a counter-torque. Said second end does not co-operate with the contact piece when the mobile element is oriented outside the angular range.

Abstract: An optical channel monitor is provided that sequentially or selectively filters an optical channel(s) 11 of light from a (WDM) optical input signal 12 and senses predetermined parameters of the each filtered optical signal (e.g., channel power, channel presence, signal-noise-ratio). The OCM 10 is a free-space optical device that includes a collimator assembly 15, a diffraction grating 20 and a mirror 22. A launch pigtail emits into free space the input signal through the collimator assembly 15 and onto the diffraction grating 20, which separates spatially each of the optical channels 11 of the collimated light, and reflects the separated channels of light onto the mirror 22. A &lgr;/4 plate 26 is disposed between the mirror 22 and the diffraction grating 20. The mirror reflects the separated light back through the &lgr;/4 plate 26 to the diffraction grating 20, which reflects the channels of light back through the collimating lens 18.

Abstract: A depolarizing plate comprising a first rectangular wedge plate that has a first crystallographic optical axis in a diagonal direction of the rectangle and which has a thickness thereof in a vertical direction vary continuously in a direction 45 degrees from said first crystallographic optical axis and a second rectangular wedge plate that has a second crystallographic optical axis in a diagonal direction of the rectangle crossing said first crystallographic optical axis at right angles and which has a thickness thereof in a vertical direction vary continuously in a direction 45 degrees from said second crystallographic optical axis, the two wedge plates being joined in such a position that said first crystallographic optical axis crosses said second crystallographic optical axis at right angles, wherein the slope formed by the joint of said wedge plates is rotated about the optical axis of an incident ray of light.

Abstract: Systems and methods for rapid Raman spectroscopy. The speed is improved by providing light from a sample to a light-dispersive element, such as a holographic grating, in a pattern that inversely complements distortion caused by the grating. For example, if the grating imparts a curve to the spectral lines emanating from the grating, then the light is inserted into the grating in a curve in the opposite direction. Also calibration light guides able to transmit a known, or standard, light to the detection or spectroscopy system. The calibration light guide can be useful both with traditional light transmission guides and with the light transmission guides of the present invention.

Abstract: A wavelength correction apparatus automatically corrects a deviation of a testing wavelength from a reference spectrum analyzer installed on-site. The apparatus is constructed of a reference light source 62 for outputting a reference light of a specific wavelength; a light input terminal 50 for inputting a testing light whose wavelength is to be measured and compensated; an optical switch 54 for receiving the testing light and the reference light so as to output one either the testing light or the reference light; a control section 60 for controlling the operations of the reference light source 62 and the optical switch 54; and an optical spectrum measuring device 58 for measuring optical spectra output from the optical switch 54 and for operating the control section 60 at a point in time specified by an operator. The in-situ wavelength correction device produce precise compensates for wavelength deviation so that a compact wave correction apparatus can be used on-site of optical communications stations.

Abstract: A high resolution etalon-grating monochromator. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.

Abstract: A high resolution etalon-grating spectrometer. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.

Abstract: A monochromator is provided which reduces the amount of stray light striking the detector of the monochromator. A light source is provided which directs light to a source mirror. The source mirror reflects light from the light source through a filter and an entrance slit, and to a first monochromator mirror. The first monochromator mirror collimates the light and reflects it to a diffractive surface. The diffractive surface separates the light into its individual wavelength components. The separated light is directed from the diffractive surface to a second monochromator mirror. The second monochromator mirror directs the light to an exit slit. The present invention reduces stray light to the diffractive surface by tilting the second monochromator mirror off axis at an angle to prevent the reflected light from striking the diffractive surface or directing light out of the plane of diffraction.

Abstract: Improved calibration of optical wavelength measuring instruments. In a first embodiment, improved calibration is achieved in an optical wavelength measuring instrument by performing calibration measurements at a plurality of known wavelengths and using an average calibration constant derived from the plurality of measurements. In a second embodiment, improved calibration is achieved by performing calibration measurements at a plurality of known wavelengths and calculating a linear or higher order calibration model, or a periodic model. These approaches may be extended by segmenting the wavelength range and using different calculated calibration values, or different calibration models, for each segment.

Abstract: Plane diffraction grating 13 is formed of a material having an appropriate linear expansion coefficient and a variation in the wavelength of the reflected light from concave mirror 14 on account of thermal expansion or shrinkage of members other than plane diffraction grating 13 is cancelled out or reduced by a variation in the wavelength of the reflected light from concave mirror 14 on account of thermal expansion or shrinkage of plane diffraction grating 13. The same principle is used to deal with the effect on the wavelength of the diffracted light that may be caused by changes in the layout of individual members on account of thermal expansion or shrinkage of substrate 10a that fix them.

Abstract: A spectrometer, or a spectral instrument using multiple non-interfering optical beam paths and special optical elements. The special optical elements for use with the instrument are used for directing the optical beam and/or altering the form of the beam. The instrument has the potential, depending upon the totality of the optical components incorporated into the instrument, to be a monochromator, a spectroradiometer, a spectrophotometer and a spectral source. The spectral instrument may further be a part of the spectral system. The system may include the spectral instrument, a power module and means for remote control of the instrument. Such remote control may be by use of a personal computer or a control system dedicated to the control, measurement and analysis of the collected information. The multiple non-interfering beam paths are created using specially designed optical elements such as a diffraction grating, a splitter box, a zero back-lash drive system for movement of the grating element.

Abstract: An optical spectrum analyzer comprises a diffraction grating (DG), a polarization decomposing unit (PDM) for decomposing the input light beam into first and second light beams having mutually-perpendicular linear states of polarization, and two output ports (FP2/1, FP2/2) each for receiving from the grating, substantially exclusively, a respective one of the polarized light beams (LT, LR) after diffraction by the diffraction grating (DG).

Abstract: The reference light is entered into the monochromator 4, and by using the diffraction light of the different order from the diffraction order to measure the measured light, the wavelength of the reference light is measured, and the difference between the measured wavelength and the wavelength corresponding to the diffraction order of the reference light is found, and when there is a deviation in the absorption wavelength, the rotation angle of the diffraction grating 14 is corrected by an angle corresponding to the deviated wavelength, and the wavelength is calibrated.

Abstract: A compact, preferably monolithic optical element converts an incident beam of light into a dispersed exit beam. A transmissive optical grating is supported between two reflective surfaces such that a beam is reflected to pass through the same grating at least twice to form the exit beam. In the preferred embodiment the grating is a volume hologram cemented between two optically transmissive substrates which include outwardly oriented surfaces that are parallel to one another and to the grating, and the internal reflections occur at these surfaces. Mirrors may also be used. A preferred method of grating formation is also disclosed.

Abstract: In a monochromator including a light dispersing element rotatable about an axis, a linear motor for rotating the light dispersing element around the axis, an encoder for generating a signal representing a rotational position of the light dispersing element, and a linear motor controller for detecting the rotational position of the light dispersing element based on the signal generated by the encoder, the inventive monochromator is characterized in that the signal generated by the encoder has a waveform including no flat portion. That is, the strength of the signal must change if the rotational position of the light dispersing element changes even slightly. Using a linear motor as a driving unit for the light dispersing element, the monochromator of the present invention can rotate the light dispersing element constantly with a stable speed even at high speed.

Abstract: The invention relates to a method of calibrating an optical system, the system comprising a flash lamp as a light source (4), a lens system (6), a monochromator comprising a grating (10), a motor (20) for displacing the grating so as to enable scanning essentially monochromatic light over a detection system. The light source provides at least two high intensity peaks at distinct wavelengths. The method comprises scanning a first wavelength region comprising at least one of said at least two high intensity peaks, and measuring the intensities at a selected number of points during the scan. A first of said at least two peaks is coarsely located. A wavelength region around each of said at least two peaks is scanned, measuring the intensities at closer intervals than previously. At least two peaks are located by autocorrelation. The location of said peaks is determined in terms of a distance from a reference point, said distance corresponding to said displacement of the grating.

Abstract: The present invention relates to a double pass monochromator that improves wavelength resolution and reduces the actual length thereof. A return reflection means 7 that reverses the direction of dispersion of the wavelength of the second pass light 1c, 1f emitted and incident on a diffraction grating 4 during the reflection. In addition, the angles of the incident and emitted light during separation of spectral components by the diffraction grating are identical during the first and second diffraction.

Abstract: In accordance with the present invention, a high-resolution, compact spectrometer is provided for dispersing wavelengths .lambda. of an incoming beam for detection by a detector. The spectrometer comprises: (a) an entrance slit through which the incoming beam passes; (b) a first mirror for collimating the beam from the entrance slit; (c) a first reflectance grating for dispersing the collimated beam to form a beam having a spectral intensity distribution, the first reflectance grating having a number of grooves N.sub.1 ; (d) a second reflectance grating for further dispersing the collimated beam, the second reflectance grating having a number of grooves N.sub.2 ; and (e) a second mirror for focusing the collimated and dispersed beam, wherein the spectrometer has a substantially symmetrical construction. The symmetrical construction of the spectrometer doubles the resolution and dispersion of the gratings.

Abstract: A sensor for measuring reflective, transmissive, or self-luminous samples, comprises a plurality of light sources, where each of the light sources emit light of a substantially different wavelength band spaced in the visible spectrum; a reference channel photodetector; a sample channel photodetector; an optical cap adapted to direct a first portion of the light emitted by each of the light sources to the reference channel photodetector, a reflector cone for directing a second portion of the light emitted by each of the light sources to the sample; and a receptor piece for directing the diffuse portion of the light reflected from the sample to the sample channel photodetector. Preferably, the reference channel and sample channel photodetectors are identical devices and are mounted back-to-back to share environmental characteristics, and in turn, minimize the variation between their respective responses.

Abstract: A monochromator including an incident portion upon which light to be measured is made incident; a first lens for converting the incident light to be measured into parallel rays of light; a diffraction grating for receiving the light to be measured converted into the parallel rays of light and for outputting the light at an angle which differs depending on wavelength; a second lens for condensing the output light outputted from the diffraction grating at a certain angle; an output portion for outputting the output light thus condensed; and an angle changing device for making variable at least a relative angle between the diffraction grating and the second lens by one of rotation of the diffraction grating and movement of arrangement of the first and second lenses centering around the diffraction grating.

Abstract: A small spectrograph containing no moving components and capable of providing high resolution spectra of the mid-infrared region from 2 microns to 4 microns in wavelength. The resolving power of the spectrograph exceeds 20,000 throughout this region and at an optical throughput of about 10.sup.-5 cm.sup.2 sr. The spectrograph incorporates a silicon immersion echelle grating operating in high spectral order combined with a first order transmission grating in a cross-dispersing configuration to provide a two-dimensional (2-D) spectral format that is focused onto a two-dimensional infrared detector array. The spectrometer incorporates a common collimating and condensing lens assembly in a near aberration-free axially symmetric design. The spectrometer has wide use potential in addition to general research, such as monitoring atmospheric constituents for air quality, climate change, global warming, as well as monitoring exhaust fumes for smog sources or exhaust plumes for evidence of illicit drug manufacture.

Abstract: A substrate inspecting system 60 observes and inspect a semiconductor wafer pattern by irradiating the surface of the semiconductor wafer 11 with electron beams 31, and making a projection unit project in enlargement secondary electrons, reflected electrons and backward scattered electrons generated therefrom in the form of secondary electron beams 32 on an undersurface of an electron beam detecting unit 61, and form an image thereon. The substrate inspecting system 60 includes a parallel-plate type energy filter 33 in a projection system. The present invention discloses a substrate inspecting apparatus capable of detecting a voltage contrast defect on a sample with a high accuracy by separating the secondary electron beams and fetching a secondary electron beam having an energy over a predetermined value, and of quantitatively measuring this defect, a substrate inspecting system having this apparatus, and a substrate inspecting method.

Abstract: A monochromator according to the present invention has an arm 1 rotatably mounted on a rotation shaft 3, and a diffraction grating 6 is fixed to the arm 1. The arm 1 is rotated by a linear motor 9 including a moving part 91 fixed to the arm 1 and a stator part 92 fixed to a base 2. The linear motor 9 is a voice-coil linear motor constructed to allow the arm 1 to rotate reciprocatively around the rotation shaft 3 within a preset angular range. The absolute rotational position of the arm 1 is detected by a rotary encoder 7 including a crossbar 71 fixed to the arm 1 and a encoder block 72 fixed to the base 2. Based on the output signal of the rotary encoder 7, the linear motor 9 is controlled so that the moving part 92 rotates at a fixed angular speed around the rotation axis 3. Thus, the wavelength scanning is carried out at high speed, and sampling of monochromatic light having desired wavelengths is performed accurately.

Abstract: In a spectroscopic instrument having a spherical grating to disperse incident light into a spectrum, the grating is oscillated on axis to scan the light passing through an exit slit through the spectrum or a portion of the spectrum. The axis of rotation of the grating is shifted to be displaced from tangent to the center of the spherical grating so that the light passing through the exit slit is substantially focused throughout the spectrum scanned by the instrument. The grating is mounted in the holder to shift the center of gravity of the grating and the holder to be on the axis on which the grating is pivoted.

Abstract: An electronic streak camera is described which includes a housing enclosing an objective lens disposed along an optical axis for forming an image of optical radiation from an emissive body, a pinhole field stop at the focal point of the objective lens, a collimating lens for collimating radiation passing the pinhole field stop, a prism for splitting the radiation from the collimating lens into a characteristic optical spectrum of the radiation, an imaging lens for forming an image of the radiation from the prism.