By Polarized Light Examination Patents (Class 356/364)
  • Patent number: 11119050
    Abstract: Methods and systems for performing spectroscopic measurements of semiconductor structures including ultraviolet, visible, and infrared wavelengths greater than two micrometers are presented herein. A spectroscopic measurement system includes a combined illumination source including a first illumination source that generates ultraviolet, visible, and near infrared wavelengths (wavelengths less than two micrometers) and a second illumination source that generates mid infrared and long infrared wavelengths (wavelengths of two micrometers and greater). Furthermore, the spectroscopic measurement system includes one or more measurement channels spanning the range of illumination wavelengths employed to perform measurements of semiconductor structures. In some embodiments, the one or more measurement channels simultaneously measure the sample throughout the wavelength range. In some other embodiments, the one or more measurement channels sequentially measure the sample throughout the wavelength range.
    Type: Grant
    Filed: May 20, 2020
    Date of Patent: September 14, 2021
    Assignee: KLA Corporation
    Inventors: Noam Sapiens, Shankar Krishnan, David Y. Wang, Alexander Buettner, Kerstin Purrucker, Kevin A. Peterlinz
  • Patent number: 11112702
    Abstract: The invention relates to a device and a method for characterizing a microlithographic mask. A device according to the invention has an illumination optical unit for illuminating structures of a mask intended for use in a lithography process in a microlithographic projection exposure apparatus, a detector unit, and an evaluation unit for evaluating the data recorded by the detector unit, wherein the detector unit is configured for the spatially resolved determination of both the intensity and the polarization state of the respectively impinging light emanating from the mask.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: September 7, 2021
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Sven Martin, Thomas Frank, Ulrich Matejka
  • Patent number: 11079220
    Abstract: Grating-coupled surface plasmon resonance response of a calibration grating is used to calibrate the azimuth angle offset between a sample on the stage and the plane of incidence (POI) of the optical system of an optical metrology device. The calibration grating is configured to produce grating-coupled surface plasmon resonance in response to the optical characteristics of the optical metrology device. The calibration grating is coupled to the stage and positioned at a known azimuth angle with respect to the optical channel of the optical metrology device while the grating-coupled surface plasmon resonance response of the calibration grating is measured. The azimuth angle between an orientation of the calibration grating and the POI of the optical system is determined based on the grating-coupled surface plasmon resonance response. The determined azimuth angle may then be used to correct for an azimuth angle offset between the sample and the POI.
    Type: Grant
    Filed: September 11, 2020
    Date of Patent: August 3, 2021
    Assignee: ONTO INNOVATION INC.
    Inventor: Nicholas James Keller
  • Patent number: 11067505
    Abstract: A small angle laser scatterometer with a temperature-pressure-controllable sample cell and a characterization method, the scatterometer formed by sequentially arranging a laser source, an adjustable attenuator, a beam expanding lens, a polarizer, the temperature-pressure-controllable sample cell, an analyzer, a transmission-type projection screen and an image acquisition device. The temperature-pressure-controllable sample cell is composed of a visual autoclave, a temperature control component, a rapid cooling component and a pressure control component. An evolution process of microstructures of polymer materials in specific atmosphere and rapid temperature and pressure changing environments on a scale of 0.5 ?m to 10 ?m.
    Type: Grant
    Filed: March 18, 2019
    Date of Patent: July 20, 2021
    Assignee: SHANDONG UNIVERSITY
    Inventors: Guoqun Zhao, Lei Zhang, Guilong Wang
  • Patent number: 11050944
    Abstract: An imaging system comprises an optical sensor array with a plurality of sensor elements, an objective lens, an active polarization filter, and associated logic. The objective lens is configured to direct light from a field of view onto the plurality of sensor elements. Switchable electronically between first and second operational states, the active polarization filter is positioned to filter the light en route to the optical sensor array. The active polarization filter provides unequal relative attenuance, in the first versus the second operational state, of nonparallel polarization components of the light. The logic is configured to switch the active polarization filter from the first operational state to the second operational state, and to compare a light-intensity response of the plurality of sensor elements in the first operational state to the light-intensity response of the plurality of sensor elements in the second operational state.
    Type: Grant
    Filed: November 29, 2018
    Date of Patent: June 29, 2021
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Ishan Chatterjee, Christian Holz
  • Patent number: 11047901
    Abstract: In a method of testing an interconnection substrate, a blocking condition of a reference light reflected from a probe having an intrinsic optical characteristic may be set. An electric field emitted from a test interconnection substrate having a plurality of circuits may change the intrinsic optical characteristics of the probe into test optical characteristics. Light may be irradiated to the probe having the test optical characteristics. The reference light reflected from the probe having the test optical characteristic may be blocked in accordance with the blocking condition. The remaining reflected light that may be due to an abnormal circuit may be detected.
    Type: Grant
    Filed: June 11, 2019
    Date of Patent: June 29, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Mee-Hyun Lim, Sung-Yeol Kim, Seong-Keun Cho, Won-Don Joo, Jae-Hong Kim, Taek-Jin Kim, Kyung-Min Lee, Sang-Min Lee
  • Patent number: 11016229
    Abstract: An optical filter including a polarizer and a visible light blocking filter is described. The polarizer is configured to transmit at least 60 percent of light in a first infrared wavelength range that is incident on the polarizer at normal incidence in a first polarization state, to transmit less than 30 percent of light in a second infrared wavelength that is incident on the polarizer at normal incidence in a second polarization state orthogonal to the first polarization state, and to transmit less than 30 percent of light in a third infrared wavelength range that is incident on the polarizer with a 50 degree angle of incidence in the second polarization state. The visible light blocking filter configured to transmit at least 60 percent of light in the first infrared wavelength range at normal incidence in the first polarization state.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: May 25, 2021
    Assignee: 3M INNOVATIVE PROPERTIES COMPANY
    Inventors: John A. Wheatley, Gilles J. Benoit, Todd A. Ballen, Kenneth L. Smith, Guanglei Du, Edward J. Kivel, Rolf W. Biernath, Jordan D. Whitney, Daniel J. Schmidt
  • Patent number: 11003028
    Abstract: The present invention discloses a photo-alignment apparatus that realizes a desirable distribution through a single exposure and a method of manufacturing an optical element. The photo-alignment apparatus comprises a light source, a linear polarization film, a pixelated electronic-control phase retarder, and a phase retardation plate; the light source is used to provide light for a exposure; the linear polarization film is configured to convert the light emitted by the light source into a linearly-polarized light having a polarization direction parallel to the direction of the transmission axis of the linear polarization film; the pixelated electronic-control phase retarder is configured to generate phase retardations distributed in a desirable pattern; and the phase retardation plate is used to generate a non-pixelated phase retardation.
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: May 11, 2021
    Assignee: SHANGHAI JIAO TONG UNIVERSITY
    Inventors: Yan Li, Yikai Su
  • Patent number: 10990110
    Abstract: A navigation control system for an autonomous vehicle comprises a transmitter and an autonomous vehicle. The transmitter comprises an emitter for emitting at least one signal, a power source for powering the emitter, a device for capturing wireless energy to charge the power source, and a printed circuit board for converting the captured wireless energy to a form for charging the power source. The autonomous vehicle operates within a working area and comprises a receiver for detecting the at least one signal emitted by the emitter, and a processor for determining a relative location of the autonomous vehicle within the working area based on the signal emitted by the emitter.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: April 27, 2021
    Assignee: Robot Corporation
    Inventor: Mark J. Chiappetta
  • Patent number: 10928307
    Abstract: Disclosed is a retroreflector-based sensor system for optical characterization of a sample, having a transmitter for irradiating the sample, a retroflector positioned behind the sample, the transmitter, the sample, and the retroreflector being positioned such that radiation reflected back from the retroreflector is again incident on the sample and is reflected back from the latter in the direction towards the transmitter, and a receiver which is positioned in the receiving beam path such that it detects radiation reflected back from the retroreflector, incident again on the sample and reflected back from the latter, in the direction towards the transmitter.
    Type: Grant
    Filed: June 1, 2017
    Date of Patent: February 23, 2021
    Assignee: Fraunhofer-Geseilschaft zurförderung der angewandten Forschung e.V.
    Inventors: Matthias Hartrumpf, Christian Negara
  • Patent number: 10921370
    Abstract: The invention concerns an optoelectronic chip including a pair of optical inputs having a same bandwidth, and each being adapted to a different polarization, at least one photonic circuit to be tested, and an optical coupling device configured to couple the two inputs to the circuit to be tested.
    Type: Grant
    Filed: January 16, 2019
    Date of Patent: February 16, 2021
    Assignee: STMICROELECTRONICS (CROLLES 2) SAS
    Inventors: Patrick Le Maitre, Jean-Francois Carpentier
  • Patent number: 10895477
    Abstract: Optical polarization-based devices and techniques are provided to enable low cost construction and easy signal processing to measure the light frequency via measurements of signals associated with a delay between the two orthogonal polarizations after passing through a DGD element and the retardation value of the DGD element without directly measuring the optical frequency. The optical detection may be designed in various configurations. In particular, for example, the optical detection may split the optical output of the DGD into two optical beams with two different optical detectors so that the final frequency information can be deducted into a pair of sine and cosine functions, such as a pair of sine and cosine functions of measured optical signal levels and the retardation value of the DGD element.
    Type: Grant
    Filed: May 9, 2018
    Date of Patent: January 19, 2021
    Assignee: General Photonics Corporation
    Inventors: Xiaotian Steve Yao, Xiaojun James Chen
  • Patent number: 10883880
    Abstract: An optical characteristic evaluation method evaluates unevenness of an optical characteristic in an optical film based on analysis of a polarized state of light transmitting through an optical film and an analyzer. The method includes the following, measuring a phase difference and an orientation angle in a plurality of positions; and quantifying and evaluating the unevenness of the optical characteristic based on a parameter of a vector of output light calculated by a formula 1 using a vector showing a polarized state of input light and a matrix showing a polarizing characteristic of the optical film and the analyzer. The formula 1 is as follows, formula 1: F2=M×F1, F1: Stokes vector or Jones vector of input light, F2: Stokes vector or Jones vector of output light, M: Mueller matrix or Jones matrix of the optical film as the evaluation target and the analyzer.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: January 5, 2021
    Assignee: KONICA MINOLTA, INC.
    Inventors: Osamu Masuda, Kazuhiko Hirabayashi, Hirofumi Tanaka, Koji Nakashima
  • Patent number: 10852482
    Abstract: The precision TFF POSA is formed by pressing a TFF glass rod array into a top surface of a master glass block to flatten the otherwise curved TFFs formed using conventional TFF deposition processes on glass. The TFF glass rod array is secured to the master glass block with a securing material to form a fabrication structure, which is singulated to form precision TFF POSAs having TFF members with flat TFFs and long TFF member long axes. A fiber interface device is arranged at a back surface of the TFF POSA. Other fiber interface devices having device axes are arranged proximate the TFF members. The device axes are parallel to the TFF member long axes to form a WDM system with a parallel configuration. In this configuration, there is one positionally adjustable fiber interface device for each wavelength channel, which allows for optimizing WDM optical communication in Mux and DeMux directions.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: December 1, 2020
    Assignee: Alliance Fiber Optic Products, Inc.
    Inventors: Dong Gui, Qijun Xiao
  • Patent number: 10816649
    Abstract: In a polarimeter, a polarization modulator changes a polarization phase of an output optical pulse with a modulation function that varies in time over the duration of the optical pulse. A static polarization state analyzer, which includes a one or more static polarization component analyzers and detectors, receives the modulated optical pulse after interaction with a target medium and provides time varying intensities of the polarization components of the received pulse. A signal processing module determines a polarization property of the target medium, such as a Mueller matrix, dependent upon time varied intensities over the duration of the received optical pulse. A time-division optical multiplexer may be used to combine the outputs from multiple static polarization component analyzers to form a single time-multiplexed signal comprising a plurality of optical pulses that are separated in time and passed to a single photo-detector.
    Type: Grant
    Filed: January 24, 2018
    Date of Patent: October 27, 2020
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventors: Christian Keyser, Richard Kenneth Martin
  • Patent number: 10768114
    Abstract: A modular system for organic sample analysis is disclosed which includes a sample stage including a support platform and a motorized positioning mechanism mounted on the support platform, and a sample holder mounted on the motorized positioning mechanism upon which a sample is placed. A probe support rack is mounted on the support platform and two or more bio-imaging probes mounted on the probe support and arranged in a pre-defined geometry with respect to each other, and at least one bio-imaging probe has a field of view independent of all other bio-imaging probes. The system includes a computer controller connected to the motorized positioning mechanism and the two or more bio-imaging probes. The computer is programmed for controlling motorized positioning mechanism to move the sample holder having the sample located thereon to positions in the field of view of each bio-imaging probe where the sample can be analyzed individually by each of the bio-imaging probes.
    Type: Grant
    Filed: April 29, 2016
    Date of Patent: September 8, 2020
    Assignee: Synaptive Medical (Barbados) Inc.
    Inventors: Kresimir Franjic, Siu Wai Jacky Mak, Kai Michael Hynna, Michael Frank Gunter Wood, Piotr Kuchnio, Yusuf Bismilla, Lachlan Noel Holmes, Stewart Bright, Aaron Yu Lai Cheung, Yuri Alexander Kuzyk, Aryeh Benjamin Taub, Sanaz Rezaei
  • Patent number: 10769789
    Abstract: An image processing apparatus includes an information obtaining unit configured to obtain three-dimensional polarization sensitive tomographic information and three-dimensional motion contrast information about a subject based on tomographic signals of lights having different polarizations, the lights being obtained by splitting a combined light obtained by combining a returned light from the subject illuminated with a measurement light with a reference light corresponding to the measurement light, an obtaining unit configured to obtain a lesion region of the subject using the three-dimensional polarization sensitive tomographic information, and an image generation unit configured to generate an image in which the lesion region is superimposed on a motion contrast image generated using the three-dimensional motion contrast information.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: September 8, 2020
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Masashi Kotoku, Yoshihiko Iwase, Makoto Sato
  • Patent number: 10755404
    Abstract: Techniques that facilitate integrated circuit defect detection using pattern images are provided. In one example, a system generates an equalized pattern image of a pattern image associated with a module under test based on an adaptive contrast equalization technique. The system also identifies a first set of features of the equalized pattern image based on a feature point detection technique and aligns the equalized pattern image with a reference pattern image based on the first set of features and a second set of features of the reference pattern image. Furthermore, the system compares a first set of light intensities of the equalized pattern image to a second set of light intensities of the reference pattern image to identify one or more regions of the module under test that satisfy a defined criterion associated with a defect for the module under test.
    Type: Grant
    Filed: December 7, 2017
    Date of Patent: August 25, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Chung-Ching Lin, Thomas McCarroll Shaw, Peilin Song, Franco Stellari, Thomas Anthony Wassick
  • Patent number: 10739251
    Abstract: The present invention discloses a high temporal resolution Mueller matrix elliptical polarization measuring device and method. In the incident light path, four polarization modulation channels are used to split and modulate a pulse laser beam into four polarized beams in independent polarization states. Due to different light path differences, the pulse beams have a time interval of several nanoseconds, and thus four pulse laser beams are successively irradiated on the surface of the sample. In the reflected light path, six channel polarization detection modules are used to synchronously measure the Stokes vectors of the reflected beams on the sample surface. By using known incident and reflected Stokes vectors of the four pulse beams, linear equations can be solved to obtain the Mueller matrix of the sample.
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: August 11, 2020
    Assignee: Huazhong University of Science and Technology
    Inventors: Hao Jiang, Jiamin Liu, Shiyuan Liu, Song Zhang, Zhicheng Zhong, Xiuguo Chen, Honggang Gu
  • Patent number: 10732126
    Abstract: A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.
    Type: Grant
    Filed: October 31, 2017
    Date of Patent: August 4, 2020
    Assignee: Corning Incorporated
    Inventors: Chong Pyung An, Uta-Barbara Goers, En Hong, Sung-chan Hwang, Ji Hwa Jung, Tae-ho Keem, Philip Robert LeBlanc, Hyeong-cheol Lee, Michal Mlejnek, Johannes Moll, Rajeshkannan Palanisamy, Sung-jong Pyo, Amanda Kathryn Thomas, Correy Robert Ustanik
  • Patent number: 10712636
    Abstract: The polarization acquisition apparatus is configured to allow an image capturing system including an interchangeable lens and an image capturing apparatus to perform image capturing using polarized light. The polarization acquisition apparatus includes a variable polarization axis element in which a direction of its polarization transmission axis is variable, a driver configured to operate the variable polarization axis element so as to change the direction of the polarization transmission axis, a first mount to which the image capturing apparatus is detachably attachable, and a second mount to which the interchangeable lens is detachably attachable. The driver is configured to operate the variable polarization axis element so as to change the direction of the polarization transmission axis to at least three directions when the image capturing is performed multiple times.
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: July 14, 2020
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Rie Ishimatsu, Kazuhiko Momoki, Yutaka Yamaguchi
  • Patent number: 10709327
    Abstract: A thin film analysis apparatus and method for a curved surface is disclosed. The apparatus includes an illuminator, a sample, an imaging group, one or more beamsplitters, optional focusing groups, polarization analyzers, detectors and optional display and analysis systems. The image series are recorded, preferably substantially synchronously. The system can be calibrated by as few as one reference phantom that has the same or substantially similar geometry as the sample under test. Based on calibration, a lookup table of the effective reflectance can be created, which is proportional to the portion of the light that reaches the detectors, or the mutual subtraction of the effective reflectance values of all possible combinations of the unknown optical parameters within certain search ranges of the sample. The experimentally measured results are compared with the lookup table, and optical properties, for example, the thicknesses and refractive indices of the thin film can be determined.
    Type: Grant
    Filed: December 4, 2018
    Date of Patent: July 14, 2020
    Inventor: Aizhong Zhang
  • Patent number: 10677591
    Abstract: In some embodiments, a system for measuring surface features may include a pattern projector, at least one digital imaging device, and an image processing device. The pattern projector may project, during use, a pattern of light on a surface of an object. In some embodiments, the pattern projector moves, during use, the pattern of light along the surface of the object. In some embodiments, the pattern projector moves the pattern of light in response to electronic control signals. At least one of the digital imaging devices may record, during use, at least one image of the projected pattern of light. The image processing device which, during use, converts projected patterns of light recorded on at least one of the images to three-dimensional data points representing a surface geometry of the object using relative positions and relative angles between the at least one imaging device and the pattern projector.
    Type: Grant
    Filed: April 19, 2018
    Date of Patent: June 9, 2020
    Assignee: Texas Department of Transportation
    Inventor: Yaxiong Huang
  • Patent number: 10670779
    Abstract: An optical element is disclosed. The optical element includes a plurality of layers. The plurality of layers includes a notch filter array that has a plurality of notch filter elements. Each notch filter element is configured to filter out energy within at least one wavelength band of interest. The plurality of layers further includes a polarization-responsive grid array having a plurality of polarization elements and includes a microlens array having a plurality of microlens elements. Each microlens element is configured to image a portion of a scene onto an image plane.
    Type: Grant
    Filed: September 8, 2017
    Date of Patent: June 2, 2020
    Assignee: Lockheed Martin Corporation
    Inventors: Johann M. Veras, David R. Twede, Clara R. Baleine, Gary C. Vanstone
  • Patent number: 10656086
    Abstract: A measurement apparatus measures an optical characteristic with high robustness and with a simple configuration. A measurement apparatus of the present invention measures optical characteristic of a sample. The measurement apparatus includes an irradiation unit to irradiate the sample with light emitted from a light source and transmitted through an opening member, an imaging unit to detect an image formed by the light irradiated by the irradiation unit and reflected by the sample, and a processing unit to obtain the optical characteristic of the sample on the basis of an output of the imaging unit. The opening member comprises plural openings through which the light emitted from the light source is transmitted, the irradiation unit irradiates the sample with the light transmitted through the plurality of openings, and the imaging unit detects an image formed by the light transmitted through the plurality of openings and reflected by the sample.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: May 19, 2020
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Takayuki Uozumi
  • Patent number: 10643327
    Abstract: An inspection apparatus includes a tone correction unit, a dimensional error acquisition unit, and a map generating unit. The correction unit acquires a transmissivity distribution for transmission of light from a light source through an incident surface of an inspection target based on the optical image data to correct a tone of the optical image data so as to eliminate variations in contrast of the optical image data which correspond to the transmissivity distribution. The acquisition unit determines a dimension of the pattern based on the corrected optical image data to acquire a dimensional error that is a difference between the dimension of the pattern and a design value for the pattern. The generating unit generates a map in which the dimensional error is associated with the position coordinates of the table on the inspection target based on the position coordinates and the dimensional error.
    Type: Grant
    Filed: November 4, 2016
    Date of Patent: May 5, 2020
    Assignee: NuFlare Technology, Inc.
    Inventor: Riki Ogawa
  • Patent number: 10634619
    Abstract: A display inspection device includes a light source, a light condenser unit, a light splitter unit, and a photoelectric converter that are arranged, in sequence, externally of a display-to-be-inspected. The light condenser unit provides constant-frequency excitement to the inspection light beam so as to make constant-frequency variation of focus of the inspection light beam. The range of variation of the focus of the inspection light beam always covers a focus point on a surface of the display-to-be-inspected so that the inspection device possess an active focusing function, allowing a surface configuration, reflectivity, or defect of the display-to-be-inspected to be reflected in variation of intensity of a reflected light beam and also allowing the focusing point of the inspection light beam not to be constrained to focus on the surface of an objected-to-be-inspected thereby greatly increasing an inspection range of the device and improving inspection efficiency.
    Type: Grant
    Filed: September 1, 2018
    Date of Patent: April 28, 2020
    Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd
    Inventor: Zhe Liu
  • Patent number: 10627396
    Abstract: Disclosed are methods for the free solution measurement of molecular interactions by refractive index sensing other than backscattering interferometry. The disclosed methods can have very low detection limits and/or very low sample volume requirements. Also disclosed are various biosensor applications of the disclosed techniques. This abstract is intended as a scanning tool for purposes of searching in the particular art and is not intended to be limiting of the present invention.
    Type: Grant
    Filed: January 27, 2017
    Date of Patent: April 21, 2020
    Assignee: Vanderbilt University
    Inventors: Darryl J. Bornhop, Amanda Kussrow, Michael Kammer
  • Patent number: 10620116
    Abstract: A polarization property image measurement device includes: a first radiation unit that radiates light beams in different polarization conditions onto a target object after subjecting the light beams to intensity modulation at frequencies different from one another; a light receiving unit including first photoelectric conversion units that photoelectrically convert the light beams having been radiated from the first radiation unit and scattered at the target object in correspondence to each of the different polarization conditions, and second photoelectric conversion units that photoelectrically convert visible light from the target object; and a processor that detects signals individually output from the first photoelectric conversion units at the different frequencies and differentiates each signal from other signals so as to determine an origin of the signal as one of the light beams; and creates an image of the target object based upon signals individually output from the second photoelectric conversion un
    Type: Grant
    Filed: June 8, 2018
    Date of Patent: April 14, 2020
    Assignee: NIKON CORPORATION
    Inventors: Takanori Kojima, Satoru Odate, Toru Takagi
  • Patent number: 10610846
    Abstract: Methods and systems for highly-sensitive label-free multiple analyte sensing, biosensing, and diagnostic assay are disclosed. The systems comprise an on-chip integrated two-dimensional photonic crystal sensor chip. The invention provides modulation methods, wavelength modulation and intensity modulation, to monitor the resonance mode shift of the photonic crystal microarray device and further provides methods and systems that enable detection and identification of multiple species to be performed simultaneously with one two-dimensional photonic crystal sensor chip device for high throughput chemical sensing, biosensing, and medical diagnostics. Other embodiments are described and claimed.
    Type: Grant
    Filed: June 18, 2014
    Date of Patent: April 7, 2020
    Assignee: Omega Optics, Inc.
    Inventors: Swapnajit Chakravarty, Yunbo Guo, Ray T. Chen
  • Patent number: 10523873
    Abstract: The low-sensitivity polarization characteristic model calculation unit 31 of the polarized image processing unit 30-1 calculates the low-sensitivity polarization characteristic model on the basis of the low-sensitivity polarized image in the plurality of polarization directions that is generated by the low-sensitivity imaging unit 21. The non-saturation polarized image extraction unit 32 extracts an image in a polarization direction in which saturation has not occurred from the high-sensitivity polarized image in the plurality of polarization directions that is generated by the high-sensitivity imaging unit 22. The high-sensitivity component acquisition unit 33-1 calculates a high-sensitivity polarization characteristic model having the phase component identical to the low-sensitivity polarization characteristic model from an image in a plurality of polarization directions in which saturation has not occurred in the high-sensitivity polarized image.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: December 31, 2019
    Assignee: SONY CORPORATION
    Inventors: Hideki Oyaizu, Yasutaka Hirasawa, Yuhi Kondo
  • Patent number: 10467448
    Abstract: The disclosure is related to a sensor module, a sensor unit and a system for recognizing surrounding objects and defining an environment. The sensor module is installed in a sensor unit. The sensor module includes an optical element guiding the lights from the objects surrounding the sensor unit and to an image sensor, and the image sensor is used to sense the lights from the objects. The light can be directly from a light source inside the surrounding object or reflected by the object surface. The objects can be identified according to optical features obtained by the image sensor from surfaces of the objects. When the image sensor receives the two lights, guided by the optical element, and reads optical features being regarded as the unique IDs to identify the objects respectively. Therefore, an environment around the sensor unit can be defined.
    Type: Grant
    Filed: May 21, 2018
    Date of Patent: November 5, 2019
    Assignee: PIXART IMAGING INC.
    Inventors: Tsung-Hsueh Lee, Chao-Chien Huang, Cheng-Lin Yang
  • Patent number: 10448897
    Abstract: A method includes: obtaining, by an apparatus, instantaneous images from an optical heart activity sensor, wherein the instantaneous images characterize a heart activity data of a user; obtaining information about spatial shifts of a measuring area of the optical heart activity sensor in relation to a body tissue of the user; determining effect of the spatial shifts in the instantaneous images based on the information about the spatial shifts; enhancing the instantaneous images by decreasing the effect of the spatial shifts in the instantaneous images; and processing the enhanced instantaneous images into the heart activity data of the user.
    Type: Grant
    Filed: February 25, 2015
    Date of Patent: October 22, 2019
    Assignee: Polar Electro Oy
    Inventors: Mikko Repka, Jukka-Tapani Makinen, Juha Sumen, Seppo Korkala
  • Patent number: 10436621
    Abstract: Detection for localizing at least one particle moving in a flow includes emitting a transmission signal by a transmitter, and receiving a reflected reception signal. The reflected reception signal is frequency and phase modulated in comparison with the transmission signal. The reflected reception signal is convolved with at least one kernel representative of a conjugate estimated channel pulse response. A reconstructed particle position function is formed, and the position of the particle is determined from the reconstructed particle position function.
    Type: Grant
    Filed: November 27, 2014
    Date of Patent: October 8, 2019
    Assignee: Siemens Aktiengesellschaft
    Inventors: Holger Hackstein, Christian Morhart, Florian Poprawa, Andreas Ziroff, Dominik Zoeke
  • Patent number: 10427163
    Abstract: A cuvette carrier comprising: a plurality of walls defining a holding volume for a cuvette; a first and second transmissive region included in the plurality of walls; and a first optical polarizer arranged to polarize light passing through the first transmissive region.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: October 1, 2019
    Assignee: Malvern Panalytical Limited
    Inventor: Jason Corbett
  • Patent number: 10420498
    Abstract: A system includes a photodetector array and a processor. The photodetector array includes a plurality of photodetectors and is configured to detect light that exits a body and output a plurality of electronic signals representative of the detected light as a function of time. The processor is configured to sample the electronic signals output by the photodetector array at a plurality of delay times during a predetermined time period to generate a sequence of frames, apply a plurality of temporal-based and spatial-based correlation measurement operations to sample values in each of the frames, generate, based on the application of the temporal-based and spatial-based correlation measurement operations to the sample values in each of the frames, a plurality of spatiotemporal correlation measure values for the light detected by the photodetector array, and include the plurality of spatiotemporal correlation measure values in a correlation map.
    Type: Grant
    Filed: December 19, 2018
    Date of Patent: September 24, 2019
    Assignee: HI LLC
    Inventors: Roarke Horstmeyer, Haojiang Zhou, Yuecheng Shen, Haowen Ruan
  • Patent number: 10403665
    Abstract: A two-dimensional solid-state image capture device includes pixel areas arranged in a two-dimensional matrix, each pixel area being constituted by multiple sub-pixel regions, each sub-pixel region having a photoelectric conversion element. A polarization member is disposed at a light incident side of at least one of the sub-pixel regions constituting each pixel area. The polarization member has strip-shaped conductive light-shielding material layers and slit areas, provided between the strip-shaped conductive light-shielding material layers. Each sub-pixel region further has a wiring layer for controlling an operation of the photoelectric conversion element, and the polarization member and the wiring layer are made of the same material and are disposed on the same virtual plane.
    Type: Grant
    Filed: April 19, 2017
    Date of Patent: September 3, 2019
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventor: Sozo Yokogawa
  • Patent number: 10379043
    Abstract: A voltage is applied to a liquid-crystal variable retarder that monotonically changes a retardance and changes a first derivative with respect to time of the retardance of the liquid-crystal variable retarder over a time period. An interferogram of light passing through the liquid-crystal variable retarder is measured during the time period.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: August 13, 2019
    Assignee: Palo Alto Research Center Incorporated
    Inventor: Alex Hegyi
  • Patent number: 10367724
    Abstract: In some embodiments, a system includes a first router and a second router both configured to be included within an OTN. The first router is configured to send to the second router a first signal having an ODU with a path delay measurement (DMp) bit set. The first router is configured to, in response to not receiving within a path-length-dependent time period from the second router a second signal having the DMp bit set, (1) trigger a protection action at the first router, and (2) send to the second router a signal configured to notify the second router to trigger the protection action at the second router. The second router is configured to, in response to receiving the signal configured to notify, trigger the protection action at the second router.
    Type: Grant
    Filed: December 7, 2017
    Date of Patent: July 30, 2019
    Assignee: Juniper Networks, Inc.
    Inventor: Rathi Kartheek
  • Patent number: 10302433
    Abstract: The invention relates to a daytime and nighttime stellar sensor (1), comprising: at least one video camera (2) suitable for taking images of stars (3) in the sky; and a control unit (4), characterized in that it furthermore comprises: a polarizer (5), the control unit (4) being configured: to obtain an estimation of a direction of polarization of the polarized light received from the sky by the video camera (2); and to control the orientation of the polarizer (5) so that said polarizer (5) filters polarized light from the sky directed toward the video camera (2) and having said polarization direction.
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: May 28, 2019
    Assignee: CENTRE NATIONAL D'ETUDES SPATIALES
    Inventor: Johan Montel
  • Patent number: 10288485
    Abstract: The present disclosure discloses a colorimetry calculation method for a display. The display includes a quantum dot backlight module and a first polarizer, wherein the quantum dot backlight module includes a light guide plate, a quantum dot thin film layer, and a backlight. The method obtains the correction spectrum of the quantum dot backlight module, and obtains the true spectrum of the quantum dot backlight module when the first polarizer is arranged on the light exit side of the quantum dot backlight module based on the correction spectrum and the measurement spectrum, that is, the modified spectrum, so as to accurately simulate the chromatic offset phenomenon due to the secondary excitation of the first polarizer, and provide the basis for the quantitative design of the display including the quantum dot backlight module. The present disclosure also discloses a chromaticity calculation method of a display.
    Type: Grant
    Filed: October 20, 2017
    Date of Patent: May 14, 2019
    Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd
    Inventor: Guowei Zha
  • Patent number: 10282868
    Abstract: A method, non-transitory computer readable medium and apparatus for generating one or more graphical chromophore maps are disclosed. For example, the method includes receiving a plurality of images from a plurality of different customers, estimating a plurality of different illuminates that were used to capture each one of the plurality of images, calculating a correlation of a spectral reflectance of a lip region of a customer with an absorption curve of hemoglobin for the each one of the plurality of images for each one of the plurality of different illuminates that is estimated, selecting an illuminance of the plurality of different illuminates that provides a highest correlation and generating one or more graphical chromophore maps for subsequently received images of customers using the illuminance that is selected.
    Type: Grant
    Filed: January 24, 2017
    Date of Patent: May 7, 2019
    Assignee: The Procter & Gamble Company
    Inventors: Martin Sidney Maltz, Luisa Fernanda Polania Cabrera, Paul Jonathan Matts, Ankur Purwar
  • Patent number: 10247610
    Abstract: A chromatic confocal sensor includes: a light source portion that emits a plurality of light beams having different wavelengths; a plurality of optical heads that converge the plurality of light beams emitted from the light source portion at different focal positions and emit measurement light reflected by a measurement point at the focal positions; a spectrometer including a line sensor, and an optical system that includes a diffraction grating that diffracts a plurality of measurement light beams emitted from the plurality of optical heads, and emits the plurality of measurement light beams diffracted by the diffraction grating to a plurality of different light-receiving areas of the line sensor; and a position calculation portion that calculates a position of a plurality of measurement points as a measurement target of the plurality of optical heads based on a light-receiving position of the plurality of light-receiving areas of the line sensor.
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: April 2, 2019
    Assignee: MITUTOYO CORPORATION
    Inventor: Koji Kubo
  • Patent number: 10244154
    Abstract: An image collecting system, an image collecting processing system and an image collecting processing method are provided by embodiments of the present disclosure. The image collecting system (100) includes a pick-up device (130) and a polarizing device (152). The pick-up device (130) is configured to acquire a first image and a second image of a target scene. The polarizing device (152) is disposed in an input path of the pick-up device (130) corresponding to the second image when the pick-up device (130) acquires the second image, to allow first incident light (110) for forming the first image and second incident light (120) for forming the second image, entering the pick-up device (130), to have different polarization states. The embodiments of the present disclosure can reduce the amount of image information processing and improve the accuracy of image processing.
    Type: Grant
    Filed: May 20, 2016
    Date of Patent: March 26, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., PEKING UNIVERSITY
    Inventors: Xinguo Li, Yi Wang, Xing Zhang, Yanbing Wu
  • Patent number: 10209134
    Abstract: An photosensitive device, the sensor comprising: a plurality of photosensitive units distributed in an array, each photosensitive unit configured to receive and convert light signal, wherein the photosensitive unit comprises a detecting element and a polarizer, the detecting element comprises a carbon nanotube structure comprising a plurality of carbon nanotubes oriented along the same direction, and the polarizer is configured to generate polarized light to irradiate a part surface of the carbon nanotube structure; a measuring device configured to measure temperature differences or potential differences generated in the carbon nanotube structure by irradiating; a data processor configured to analyze and calculate the potential differences or the temperature differences to obtain the wavelength of the light signal.
    Type: Grant
    Filed: January 19, 2017
    Date of Patent: February 19, 2019
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Ling Zhang, Yang Wu, Kai-Li Jiang, Chang-Hong Liu, Jia-Ping Wang, Shou-Shan Fan
  • Patent number: 10184796
    Abstract: Apparatuses and methods for sensing rotations are provided. One embodiment of the apparatus includes a cell containing alkali and active nuclear magnetic resonance (NMR) isotope(s) atoms, a magnet providing a first magnetic field, a light source, and optics which circularly polarize light to generate a pump beam for optically pumping the alkali atoms and, together with a second magnetic field orthogonal to the first magnetic field or a modulation of the light, causing the alkali and the NMR isotope atoms to precess about the first magnetic field. The apparatus further includes a partial reflector opposite the light source and configured to, in conjunction with a first linear polarizer, generate a reflected linearly-polarized probe beam from a portion of the pump beam, and one or more polarizing beam splitters configured to split light of the probe beam incident thereon into orthogonally polarized components that are detected and used to determine rotations.
    Type: Grant
    Filed: April 10, 2014
    Date of Patent: January 22, 2019
    Assignee: Microsemi Frequency and Time Corporation
    Inventors: Kim Richard Overstreet, II, John Alexander Malcolmson, Jr., Robert Ira Lutwak
  • Patent number: 10168273
    Abstract: Disclosed are methods and apparatus for measuring and controlling polarization for inspection of a semiconductor sample.
    Type: Grant
    Filed: October 26, 2017
    Date of Patent: January 1, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Haifeng Huang, Rui-Fang Shi, Damon F. Kvamme, Amrish Kelkar
  • Patent number: 10156669
    Abstract: This patent describes an optical element, which converts incident linearly or circularly polarized visible light into radially or azimuthally polarized light beam. The polarization converter is a single optical element, produced by direct laser writing technique in an optically transparent substrate. Direct laser writing based on ultra-short pulsed laser radiation forms form birefringence self-assembled nanogratings in optically transparent material, such as fused silica. The period of gratings is smaller than wavelengths of a visible light.
    Type: Grant
    Filed: May 3, 2012
    Date of Patent: December 18, 2018
    Assignee: University of Southampton
    Inventors: Martynas Beresna, Peter Kazansky
  • Patent number: 10107807
    Abstract: Techniques for enhanced fluorescence include a functionalized substrate for a target optical frequency comprising a one dimensional photonic crystal that is functionalized with a bioactive target molecule that has an affinity for a particular analytic. The one dimensional photonic crystal includes a plurality of dielectric layers including a plurality of high index of refraction layers alternating with a plurality of low index of refraction layers. The thickness of each layer is within a factor of four of a wavelength of the optical frequency in the layer. For emissions from a fluorophore bound to the target molecule and excited by incident light, there is an emission intensity maximum centered at an angle independent of the direction of the incident light.
    Type: Grant
    Filed: May 21, 2015
    Date of Patent: October 23, 2018
    Assignee: The University of Maryland, Baltimore
    Inventors: Joseph R. Lakowicz, Ramachandram Badugu
  • Patent number: 10080515
    Abstract: Systems and methods are disclosed for non-invasively measuring blood glucose levels in a biological sample based on spectral data. This includes utilizing at least one light source configured to strike a target area of a sample, utilizing at least one light filter positioned to receive light transmitted through the target area from the at least one light source, utilizing at least one light detector positioned to receive light from the at least one light source and filtered by the at least one light filter, and to generate an output signal, having a time dependent current, which is indicative of the power of light detected, receiving the output signal from the at least one light detector with a processor and based on the received output signal, calculating the attenuance attributable to blood in a sample with a signal-to-noise ratio of at least 20-to-1; and determining a blood glucose level.
    Type: Grant
    Filed: January 17, 2017
    Date of Patent: September 25, 2018
    Assignee: St. Louis Medical Devices, Inc.
    Inventor: Zhi Xu