Of Surface Reflection Patents (Class 356/369)
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Patent number: 12270966Abstract: The present invention relates to an apparatus for determining agricultural relevant information in an agricultural environment. It is described to provide a processing unit with at least one image of an agricultural area. The at least one image corresponds with at least one area of the agricultural area. The at least one image comprises remotely acquired reflectance intensity data relating to a plurality of features on the ground. An image of the at least one image is of a first area of the agricultural environment. The processing unit is provided with at least one sensor data relating to the first area of the agricultural environment. The processing unit implements a radiation propagation model of the atmosphere that utilizes at least one model parameter. The processing unit determines modified at least one model parameter. The processing unit determines at least one agricultural relevant information for an examination area of the at least one area.Type: GrantFiled: December 10, 2018Date of Patent: April 8, 2025Assignee: BASF AGRO TRADEMARKS GMBHInventors: Ole Peters, Sandra Selinger, Thomas Rommel, Silke Andree-Labsch
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Patent number: 12269215Abstract: A method for 3D printing a part in a layer-wise manner includes providing a pool of polymerizable liquid in a vessel over a build window and positioning a downward-facing build platform in the pool, thereby defining a build region above the build window. The method includes selectively curing a volume of polymerizable liquid in the build region by imparting electromagnetic radiation through the build window to form a printed layer of the part adhered to the build platform and scanning at least a portion of the build window with monochromatic, polarized light along a plane of incidence. The method includes measuring a change in intensity and polarity of the light to obtain information about the printed layer. The method includes raising the build platform to a height of a next layer to be printed and modifying the electromagnetic energy imparted into the next layer based upon the obtained information to print a next layer.Type: GrantFiled: September 20, 2023Date of Patent: April 8, 2025Assignee: STRATASYS, INC.Inventor: J. Samuel Batchelder
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Patent number: 12270722Abstract: A reciprocal polar decomposition for a backscattering Mueller matrices, including the following steps: step 1, according to the reciprocity of forward light path and backward light path, transforming the Mueller matrix M of backscattering into a symmetric matrix QM; step 2, obtaining a diattenuator matrix MD1 by a matrix QMG; step 3, obtaining eigenvalues and eigenvectors through orthogonal decomposition; step 4, sorting the eigenvectors to obtain a depolarization matrix M?d and a retarder matrix MR1; and step 5, obtaining polarization parameters by the obtained depolarization matrix M?d and retarder matrix MR1. By using this decomposition, a systematic solution for decomposing the backscattering Mueller matrix is given firstly, and polarization parameters (such as an orientation angle, linear retarder, and depolarization) for characterizing a microstructure of a medium are obtained.Type: GrantFiled: October 11, 2022Date of Patent: April 8, 2025Assignee: WENZHOU MEDICAL UNIVERSITYInventors: Min Xu, Zhineng Xie, Weihao Lin
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Patent number: 12235091Abstract: Various examples include an apparatus to characterize substrate and film thicknesses of the substrate and films formed thereon. The apparatus uses one or more wavelengths of light from a light source (e.g., a swept laser) to interrogate the substrate. The light is directed substantially orthogonally to an upper surface of the substrate. A polarizer and an analyzer element are coupled between the light source and the substrate. Therefore, the polarizer and the analyzer are both located in the beam propagation path from the light source to the substrate. An optical detector is arranged substantially orthogonally to the upper surface of the substrate. The optical detector receives light returned back from the substrate. The apparatus is capable of determining the thickness of the substrate and one or more films contained thereon, regardless of substrates having optical anisotropies, such as chiral characteristics or stress-induced films. Other apparatuses and methods are also disclosed.Type: GrantFiled: July 22, 2022Date of Patent: February 25, 2025Assignee: Onto Innovation Inc.Inventors: Jian Ding, Nathan Unruh, Ju Jin, Nazar Orishchin
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Patent number: 12222281Abstract: A method for measuring an element concentration of a material includes: a material sample is irradiated with first electromagnetic waves; second electromagnetic waves radiated by the material sample are obtained under the action of the first electromagnetic waves; material property parameters of the material sample are determined by detecting the second electromagnetic waves; and an element concentration of the material sample is determined according to the material property parameters.Type: GrantFiled: July 24, 2022Date of Patent: February 11, 2025Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.Inventor: Ying-Chih Wang
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Patent number: 12222286Abstract: An optical fiber multi-parameter sensing system and method are provided. The optical fiber multi-parameter sensing system comprises a light source, an optical circulator, a fiber-tip probe sensor and an optical spectrum analyzer, wherein the fiber-tip probe sensor can be placed into an analyte without changing the characteristics of the analyte. The variation of a bulk parameter that is a bulk refractive index of bulk environment around the fiber-tip probe sensor and a surface parameter which is a thickness of surface dielectric layer of the fiber-tip probe sensor can be determined simultaneously by monitoring the changing of resonance intensity and resonance wavelength of a single fiber-tip leaky mode resonance. The sensing system optionally configured such that multiple parameters in the analyte around the fiber-tip probe sensor can be obtained by detecting a single resonance peak.Type: GrantFiled: September 4, 2022Date of Patent: February 11, 2025Assignee: WENZHOU UNIVERSITYInventors: Zhihong Li, Xianxin Yang, Fei Wang, Haiyong Zhu, Xinxin Jin, Yanmin Duan
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Patent number: 12209854Abstract: Methods and systems for measurement of wafer tilt and overlay are described herein. In some embodiments, the measurements are based on the value of an asymmetry response metric and known wafer statistics. Spectral measurements are performed at two different azimuth angles, preferably separated by one hundred eighty degrees. A sub-range of wavelengths is selected with significant signal sensitivity to wafer tilt or overlay. An asymmetry response metric is determined based on a difference between the spectral signals measured at the two different azimuth angles within the selected sub-range of wavelengths. The value of the asymmetry response metric is mapped to an estimated value of wafer tilt or overlay. In some other embodiments, the measurement of wafer tilt or overlay is based on a trained measurement model. Training data may be programmed or determined based on one or more asymmetry response metrics at two different azimuth angles.Type: GrantFiled: April 20, 2022Date of Patent: January 28, 2025Assignee: KLA CorporationInventors: Stilian Ivanov Pandev, Min-Yeong Moon
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Patent number: 12207902Abstract: A photoacoustic remote sensing system (PARS) for imaging a subsurface structure in a sample has an excitation beam configured to generate ultrasonic signals in the sample at an excitation location; an interrogation beam incident on the sample at the excitation location, a portion of the interrogation beam returning from the sample that is indicative of the generated ultrasonic signals; an optical system that focuses at least one of the excitation beam and the interrogation beam with a focal point that is below the surface of the sample; and a detector that detects the returning portion of the interrogation beam.Type: GrantFiled: March 14, 2022Date of Patent: January 28, 2025Assignee: ILLUMISONICS INC.Inventors: Parsin Haji Reza, Roger Zemp
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Patent number: 12205040Abstract: A method of manufacturing a semiconductor device includes forming a pattern on a wafer, measuring a spectrum of the pattern on the wafer, with a spectral optical system, performing an analysis of the spectrum through a deep learning model for predicting pattern characteristics, the deep learning model being trained based on a domain knowledge, and evaluating the pattern on the wafer based on the analysis of the spectrum, wherein the domain knowledge includes a noise inducing factor of the spectral optical system.Type: GrantFiled: April 30, 2021Date of Patent: January 21, 2025Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Yoonsung Bae, Seungho Gwak, Kwangrak Kim, Seunggun Byoun, Gilwoo Song, Younghoon Shin, Kyungwon Yun, Chiyoung Lee, Taeyong Jo
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Scanning device for scanning an environment and enabling an identification of scanned moving objects
Patent number: 12205307Abstract: The present disclosure relates to a scanning device being configured to enable efficient identification of scanned measurement points being associated with moving objects in an otherwise static environment. The scanning device is built as total station or laser scanner being typically used for scanning an environment and enabling, based on the scanning, the generation of a three dimensional (3D) point cloud representing the scanned environment.Type: GrantFiled: November 16, 2021Date of Patent: January 21, 2025Assignee: LEICA GEOSYSTEMS AGInventors: Christoph Herbst, Bernhard Metzler -
Patent number: 12174362Abstract: Discloses are a microscopic imaging system and a microscopic imaging method for sample angle recognition. Firstly, a polarization rotation device introduced in an optical path of an excitation light can polarize and modulate the excitation light so as to make a polarization-modulated excitation light to rotate in a preset angle range; secondly, the polarization-modulated excitation light can be splitted into two parts via a beam splitting device, one for sample imaging, and the other for detection of polarization; and finally, a plurality of model characteristic curves can be obtained by a polarization detection device, each of the model characteristic curves corresponding to one angle, thus determining an angle information about an object to be analyzed in the sample.Type: GrantFiled: August 14, 2024Date of Patent: December 24, 2024Assignee: SHENZHEN BAY LABORATORYInventors: Shangguo Hou, Haoyang Li, Xiufeng Zhang, Dongping Zhong
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Patent number: 12123983Abstract: Systems and methods of aligning removable sensors mounted on a vehicle based upon sensor output of such sensors are described. Sensor output is collected from a removable sensor (e.g., a digital camera), and a representation of such sensor output is generated (e.g., a digital image). The representation of the sensor output is compared against a spatial template (e.g., a digital mask overlaid on the representation) to determine whether external references in the representation align with corresponding reference indicators in the spatial template. When alignment is required, the removable sensor is aligned by one or both of the following until the external references in a representation of sensor data at an updated current location align with the corresponding reference indicators in the spatial template: (i) adjusting the position of the removable sensor on the vehicle or (ii) adjusting the representation of the sensor output to simulate such repositioning.Type: GrantFiled: April 24, 2019Date of Patent: October 22, 2024Assignee: The Boeing CompanyInventors: Nick S. Evans, Eric R. Muir, Kevin S. Callahan
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Patent number: 12117384Abstract: A method for modeling light transport through a scattering medium prior to being incident on a detector and a corresponding system is disclosed. The method determines the effects of scattering and absorption caused by particles as a function of the density, size, and refractive index of the particles, as well as the wavelength of the light source. Based on the determined scattering and absorption coefficients, the signal incident on the detector may be calculated. The calculation may also be inverted such that based upon the detected signal, an object may be detected, and its location in the scattering medium may be estimated.Type: GrantFiled: March 23, 2022Date of Patent: October 15, 2024Assignee: National Technology & Engineering Solutions of Sandia, LLCInventors: Brian Z. Bentz, Jeremy Benjamin Wright, John D. Vander Laan
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Patent number: 12117344Abstract: A method of fabricating a polarization sensor is described. It includes a quarter-wave plate to convert circularly polarized light into linearly polarized light. The quarter-wave plate is realized as a metasurface. The sensor also includes a linear polarizer to analyze the light generated by the quarter wave plate, and a photodetector to receive the analyzed light. The sensor may be combined with other linear polarization sensors to form a sensor capable of complete measurement of the polarization state of incident light.Type: GrantFiled: May 13, 2022Date of Patent: October 15, 2024Assignee: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITYInventors: Yu Yao, Chao Wang, Chu Wang, Jing Bai, Ali Basiri, Xiahui Chen
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Patent number: 12111146Abstract: An optical measurement apparatus including: an irradiation optical system configured to irradiate a measurement subject with irradiation light that includes a plurality of wavelengths; a reception optical system configured to receive measurement light that is transmission light or reflection light travelling from the measurement subject as a result of the measurement subject being irradiated with the irradiation light; and a polarizing plate, wherein the polarizing plate is configured to be able to be provided in either the irradiation optical system or the reception optical system.Type: GrantFiled: December 11, 2020Date of Patent: October 8, 2024Assignee: Otsuka Electronics Co., Ltd.Inventors: Kunikazu Taguchi, Suguru Irie
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Patent number: 12105028Abstract: A method of quality control and testing for manufactured semiconductors by generating a model for spectroscopic ellipsometry constant analysis includes: calculating, by an operator, simulation data representing a spectroscopic ellipsometry constant of an analysis target through reasoning on attribute data representing an attribute of the analysis target using a simulation model; calculating, by an error calculator, an error representing a difference between actual measured data obtained by measuring the spectroscopic ellipsometry constant of the analysis target and the simulation data; and performing optimization in which an optimizer modifies a parameter of the simulation model according to the error.Type: GrantFiled: September 25, 2023Date of Patent: October 1, 2024Assignee: AUROS Technology, Inc.Inventors: Sang Jun Kim, Dae Won Kwon
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Patent number: 12088929Abstract: A same region detector detects a same region of a processing target for each of a plurality of different viewpoints from polarization images in a plurality of polarization directions acquired for each of the viewpoints. The polarization images in the plurality of polarization directions acquired for each of the plurality of different viewpoints are, for example, polarization images acquired by imaging over a period of a plurality of frames in which a positional relationship between the processing target and a polarization image acquisition unit that acquires the polarization images changes. A polarization degree calculation unit calculates a polarization degree of the same region for each of the viewpoints on the basis of the polarization images in the plurality of polarization directions.Type: GrantFiled: May 13, 2021Date of Patent: September 10, 2024Assignee: SONY GROUP CORPORATIONInventors: Yasutaka Hirasawa, Yuhi Kondo, Legong Sun, Taishi Ono
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Patent number: 12074073Abstract: A method includes: receiving film property data associated with manufacturing parameters of manufacturing equipment; determining that the film property data is correlated and is different from target data; selecting, by a processing device, a set of data points of the film property data that are orthogonal to the target data; performing, by the processing device, feature extraction on the set of data points; and determining, based on the feature extraction, updates to one or more of the manufacturing parameters to meet the target data.Type: GrantFiled: May 6, 2022Date of Patent: August 27, 2024Assignee: Applied Materials, Inc.Inventors: Sidharth Bhatia, Jie Feng, Dermot Cantwell
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Patent number: 12066331Abstract: There is provided a polarization analysis apparatus that adjusts an angle of incidence or a numerical aperture by using an aperture. The apparatus includes: a first aperture that transmits a lighting beam reflected from a sample on a substrate; a second aperture that transmits a lighting beam having passed through the first aperture; and a detector that detects a lighting beam having passed through the second aperture and selects an angle of incidence of the lighting beam and numerical apertures of the first aperture and the second aperture.Type: GrantFiled: July 28, 2023Date of Patent: August 20, 2024Assignee: AUROS TECHNOLOGY, INC.Inventors: Mi Ta Park, Jae Jun Lee
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Patent number: 12055487Abstract: An apparatus for analyzing a substance of an object in a non-invasive manner is provided. The apparatus for analyzing a substance of an object includes: a sensor part including an image sensor, and a plurality of light sources disposed around the image sensor; and a processor configured to drive the plurality of light sources to obtain absorbance of each pixel of the image sensor based on an intensity of light received by each pixel, to correct the absorbance of each pixel based on a distance between the plurality of light sources and each pixel, and to analyze a substance of an object based on the corrected absorbance of each pixel.Type: GrantFiled: October 22, 2020Date of Patent: August 6, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Myoung Hoon Jung, Sang Kyu Kim, Yoon Jae Kim, Hyun Seok Moon, Jin Young Park, Sung Mo Ahn, Kun Sun Eom
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Patent number: 12055378Abstract: A thickness measuring device of the present invention includes a supporter which supports a specimen, an emission unit which emits an electromagnetic wave in a direction toward the specimen, a chamber which surrounds the specimen, a receiving unit which receives an electromagnetic wave output in a direction in which the chamber is positioned, and a control unit which receives a signal from the receiving unit and calculates a thickness of the specimen. At least a part of the chamber transmits a part of the electromagnetic wave and reflects the remaining part of the electromagnetic wave. The receiving unit receives a first electromagnetic wave having a first peak and a second electromagnetic wave having a second peak. The first peak occurs at a first time point, the second peak occurs at a second time point, and a difference between the first time point and the second time point is a first period or more.Type: GrantFiled: April 21, 2020Date of Patent: August 6, 2024Assignee: ACTRO CO., LTD.Inventors: Hak Sung Kim, Gyung Hwan Oh, Dong Woon Park, Heon Su Kim
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Patent number: 12035893Abstract: Methods and apparatus for improved imaging of internal tissue structures, such as lesions in the peritoneum, are disclosed employing Differentially Polarized Light (DPL) imaging. The optical system can include a laparoscope having at least one optical illumination waveguide for directing illuminating radiation and an optical collection waveguide having an aperture for collecting and transmitting radiation backscattered from a tissue region to a detector. The system further can include a polarizer for polarizing the illuminating radiation and a second analyzing polarizer disposed in the optical return path, whereby backscattered radiation of differing polarizations can be passed to the detector. End cap assemblies are also disclosed that that can be fitted to conventional laparoscopes, e.g., by a threaded connection or the like, to facilitate DPL imaging by polarizing the illuminating light of the laparoscope. For example, the end cap can include a polarizing film within a stainless steel housing.Type: GrantFiled: October 11, 2019Date of Patent: July 16, 2024Assignees: Trustees of Tufts College, Lahey Clinic, Inc.Inventors: Irene Georgakoudi, Martin Hunter, Robert Michael Trout, Thomas Schnelldorfer
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Patent number: 12031886Abstract: A sensor assembly for measuring a torsion of a rotor blade of a wind turbine generator system includes a first light source configured to generate light and a first transmitter-side polarizer disposed downstream thereof in a direction of light propagation and configured to generate linearly polarized light as a first transmission light. A second light source is configured to generate unpolarized light as a second transmission light. First and second detector elements are arranged and adapted to receive the first and second transmission light. A first receiver-side polarizer is disposed upstream of the first detector element in the direction of light propagation and a second receiver-side polarizer is disposed upstream of the second detector element in the direction of light propagation. An orientation of a polarization plane of the first receiver-side polarizer and an orientation of a polarization plane of the second receiver-side polarizer are different from one another.Type: GrantFiled: December 7, 2022Date of Patent: July 9, 2024Assignee: DR. JOHANNES HEIDENHAIN GMBHInventors: Markus Meissner, Franz Langrieger, Siegfried Reichhuber, Stefan Gilg
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Patent number: 12032190Abstract: Material-Sensing Light Imaging, Detection, And Ranging (LIDAR) systems optionally include a laser configured to generate a light pulse, a beam steerer configured to produce a polarization-adjusted light pulse emitted towards an object, at least one polarizer configured to polarize reflected, scattered, or emitted light returned from the object, and a processor configured to detect at least one material of the object based on an intensity and polarization of the polarized reflected, scattered or emitted light from the object. The beam steerer may include a kirigami nanocomposite. Methods are also provided, including, for example, generating a light pulse, adjusting a polarization of the light pulse to produce a polarization-adjusted light pulse emitted towards an object, polarizing reflected, scattered, or emitted light returned from the object, and detecting at least one material of the object based on an intensity and polarization of the polarized reflected, scattered or emitted light from the object.Type: GrantFiled: April 15, 2021Date of Patent: July 9, 2024Assignee: The Regents of The University of MichiganInventors: Nicholas A. Kotov, Sharon Glotzer, Brian Shahbazian, Ryan Branch, Lizhi Xu, Wonjin Choi, Minjeong Cha, Matthew Spellings
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Patent number: 12025502Abstract: A spectropolarimetric apparatus according to an embodiment of the present invention includes a light source attachment/detachment unit to which a light source is detachably coupled, a polarization interferometer configured to split light emitted from the light source coupled to the light source attachment/detachment unit into a plurality of polarized light beams using a polarization beam splitter and irradiate at least some of the split polarized light beams to a reflective sample to output the reflected light, and a spectrometer configured to measure physical properties of the reflective sample by analyzing the output light, wherein a wavelength of the light source coupled to the light source attachment/detachment unit varies depending on the reflective sample.Type: GrantFiled: April 26, 2022Date of Patent: July 2, 2024Assignee: MGEN.CO., LTDInventor: Min Young Park
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Patent number: 12019022Abstract: Analyzing reflections and/or emissions of electromagnetic radiation to distinguish fertile plant specimens from sterile plant specimens. In an aspect, the presence of wavelengths associated with pollen in the electromagnetic radiation reflections and/or emissions indicates a plant specimen is fertile, and the absence of wavelengths associated with pollen in the reflections and/or emissions indicates a plant specimen is sterile. In other aspects, spectral signature differences in the reflections and/or emissions that are indicative of other properties besides pollen (e.g., petal color, etc.) are utilized to distinguish between fertile and sterile plant specimens.Type: GrantFiled: June 6, 2019Date of Patent: June 25, 2024Assignee: MONSANTO TECHNOLOGY LLCInventors: Dmytro Guzhva, Maria Cristina Ubach
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Patent number: 11959852Abstract: A method for determining properties of a sample (12) by ellipsometry includes positioning the sample (12) in an ellipsometer (10) so that a surface normal (n) of a measurement region of the sample surface is tilted relative to a reference axis (z) of the ellipsometer (10) and measuring a Mueller matrix for the measurement region. The method then includes creating an equation system by equating the measured Mueller matrix and a matrix product formed of: a rotation matrix about an input rotation angle (?); an isotropic Mueller matrix in normalized NCS form and a rotation matrix about an output rotation angle (??). The method then solves the equation system for the parameters representing the sample properties to be determined. The input rotation angle (?) and the output rotation angle (??) are set as parameters independent of one another when setting up the equation system.Type: GrantFiled: January 23, 2020Date of Patent: April 16, 2024Assignee: Park Systems GmbHInventor: Matthias Duwe
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Patent number: 11953449Abstract: A visual inspection device including a pinhole lens optically coupled to a sensor is provided. The pinhole lens has a pinhole placed at the distal end of the lens to capture the rays from an object to be inspected, a front optical group receiving the rays which cross the pinhole, and a rear optical group. The front optical group is configured to focus, on the rear optical group, the rays which cross the pinhole. The rear optical group is configured to focus, on the sensor, the rays received from the front optical group.Type: GrantFiled: July 18, 2022Date of Patent: April 9, 2024Assignee: Opto Engineering S.p.A.Inventor: Claudio Sedazzari
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Patent number: 11954834Abstract: An endoscopic system includes an endoscopic imager configured to capture image frames of a target site within a living body and a processor configured to apply a spatial transform to a preliminary set of image frames, the spatial transform converting the image frames into cylindrical coordinates; calculate a map image from the spatially transformed image frames, each pixel position in the map image being defined with a vector of fixed dimension; align a current image frame with the map image and apply the spatial transform to the current image frame; fuse the spatially transformed current image frame to the map image to generate a fused image; and apply an inverse spatial transform to the fused image to generate an enhanced current image frame having a greater spatial resolution than the current image frame. The system also includes a display displaying the enhanced current image frame.Type: GrantFiled: July 27, 2022Date of Patent: April 9, 2024Assignee: Boston Scientific Scimed, Inc.Inventors: Niraj Prasad Rauniyar, Robert J. Riker, Timothy Paul Harrah
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Patent number: 11953377Abstract: Aspects relate to an integrated and compact attenuated total internal reflection (ATR) spectral sensing device. The spectral sensing device includes a substrate, a spectrometer, and a detector. The substrate includes an ATR element, a microfluidic channel, and a channel interface at a boundary between the ATR element and the microfluidic channel formed therein. The ATR element is configured to receive input light and to direct the input light to the channel interface for total internal reflection of the input light at the channel interface. An evanescent wave produced by a sample contained within the microfluidic channel based on the total internal reflection of the input light attenuates the light output from the ATR element and the resulting output light may be analyzed using the spectrometer and the detector.Type: GrantFiled: February 15, 2022Date of Patent: April 9, 2024Assignee: SI-WARE SYSTEMSInventors: Yasser M. Sabry, Amr O. Ghoname, Momen Anwar, Diaa Khalil
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Patent number: 11939665Abstract: A film thickness measurement apparatus includes: a stage that places a substrate having a film formed thereon and measures a thickness of the film in-situ in a film forming apparatus; a film thickness meter including a light emitter that emits light toward the substrate disposed on the stage and a light receiving sensor that receives the light reflected by the substrate for measuring the thickness of the film in-situ; a moving mechanism including a multi-joint arm that moves an irradiation point of the light on the substrate; a distance meter that measures a distance between the light receiving sensor and the irradiation point on the substrate; and a distance adjustor that adjusts the distance between the light receiving sensor and the irradiation point on the substrate.Type: GrantFiled: February 24, 2021Date of Patent: March 26, 2024Assignee: TOKYO ELECTRON LIMTEDInventors: Masato Shinada, Tamaki Takeyama, Kazunaga Ono, Naoyuki Suzuki, Hiroaki Chihaya, Einstein Noel Abarra
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Patent number: 11935244Abstract: A method and apparatus for improving sensitivity of wafer detection, and a storage medium are provided. The method including: acquiring a gray-scale image of a peripheral circuit region of a wafer; dividing the gray-scale image into at least one pixel region; determining a repeated image region in each pixel region, in which the repeated image region is a region with N*M pixels where M pixels on a same column in the repeated image region have a same gray-scale value, and N and M are integers greater than 0; and determining position information where interference superposition occurs in the peripheral circuit region of the wafer according to all repeated image regions in the gray-scale image.Type: GrantFiled: July 30, 2021Date of Patent: March 19, 2024Assignee: Changxin Memory Technologies, Inc.Inventor: Ran Du
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Patent number: 11913874Abstract: The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulse trains for use in multi-wavelength time-sequential optical metrology.Type: GrantFiled: April 5, 2021Date of Patent: February 27, 2024Assignee: KLA CorporationInventors: Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Kevin Peterlinz, Gregory Brady, Derrick A. Shaughnessy
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Patent number: 11913830Abstract: A laser absorptivity measurement device uses a linearly polarized incident beam, an optical configuration comprising an internal polarizing beamsplitter that transmits the linearly polarized incident beam and a quarter-wave plate that converts linearly polarized incident beam into a circularly polarized incident beam that is reflected off a processing substrate. The quarter-wave plate and polarizing beamsplitter can then direct the reflected light back into an integrating volume, where the power of the reflected light can be measured by a photodetector. The laser absorptivity measurement device is capable of making real-time absorption efficiency measurements of a variety of laser-based processes, including laser welding and brazing, additive manufacturing, and laser marking.Type: GrantFiled: November 9, 2021Date of Patent: February 27, 2024Assignee: National Technology & Engineering Solutions of Sandia, LLCInventors: Daniel Tung, Randal L Schmitt
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Patent number: 11906769Abstract: An optical system includes: a first optical system including a polarization conversion element aligning a polarization direction of light including color light beams with a predetermined polarization direction, and generating illumination light including the color light beams; a first polarization rotation element disposed at a first pupil position inside the first optical system, including first and second divided regions, in which the first and second divided regions have different polarization characteristics with respect to a first color light beam outputted from the polarization conversion element; a polarizer disposed between the polarization conversion element and the first polarization rotation element, and reducing light in a polarization direction other than the predetermined polarization direction included in light outputted from the polarization conversion element; and light valves each illuminated by at least the first color light beam included in the illumination light generated by the first optType: GrantFiled: January 7, 2021Date of Patent: February 20, 2024Assignee: Sony Group CorporationInventors: Kazumasa Kaneda, Koji Miura
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Patent number: 11885608Abstract: An ellipsometer is provided. The ellipsometer includes: a polarizing optical element, comprising a prism, that is configured to split reflected light into two linearly polarized components of light having polarization directions orthogonal to each other, the reflected light generated by reflecting illuminated light, including linearly polarized light that is polarized in one direction, from a measurement surface of a sample; an interference member, comprising at least one body, that is configured to form at least one interference fringe in which the two linearly polarized components of light interfere with each other in directions different from the polarization directions; an image detector configured to detect the at least one interference fringe; and an analysis device including at least one processor, the analysis device configured to calculate ellipsometry coefficients ? and ? based on the at least one interference fringe that is detected.Type: GrantFiled: July 2, 2021Date of Patent: January 30, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Yasuhiro Hidaka
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Patent number: 11879783Abstract: An optical spectrometer uses broadband radiation detectors to measure thermal radiation generated by the varied heating of an object without complex mechanical mechanisms, narrowband filters, or the like. The received thermal radiation is used to deduce spectral qualities of either the thermal radiation emitter or a second object reflecting or transmitting this thermal radiation.Type: GrantFiled: December 10, 2020Date of Patent: January 23, 2024Inventors: Mikhail A. Kats, Yuzhe Xiao, Chenghao Wan, Jad Salman
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Patent number: 11881436Abstract: Methods and apparatus for processing a substrate are provided. For example, metrology apparatus configured for use with a substrate processing platform comprise an interferometer configured to obtain a first set of measurements at a first set of points along a surface of a substrate, a sensor configured to obtain a second set of measurements at a second set of points different from the first set of points along the surface of the substrate, an actuator configured to position the interferometer and the sensor at various positions along a measurement plane parallel to the surface of the substrate for obtaining the first set of measurements and the second set of measurements, and a substrate support comprising a substrate support surface for supporting the substrate beneath the measurement plane while obtaining the first set of measurements and the second set of measurements.Type: GrantFiled: July 7, 2021Date of Patent: January 23, 2024Assignee: APPLIED MATERIALS, INC.Inventors: Jun-Liang Su, Chin Wei Tan, Fang Jie Lim
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Patent number: 11872015Abstract: Methods and apparatus are presented for confocal microscopy using dispersed structured illumination. In certain embodiments the apparatus also comprises an optical coherence tomography (OCT) system, and OCT images acquired from two or more regions of a sample are registered using a corresponding set of two or more larger area images acquired with the confocal microscopy system. In preferred embodiments the apparatus is suitable for analysing the retina of an eye. The confocal microscopy system can be operated in a purely intensity mode or in a coherent mode. In other embodiments a confocal microscopy system using dispersed structured illumination is utilised for surface metrology.Type: GrantFiled: January 18, 2021Date of Patent: January 16, 2024Assignee: Cylite Pty LtdInventor: Steven James Frisken
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Patent number: 11852592Abstract: An optical scanning system includes a first radiating source capable of outputting a first source light beam, a second radiating source capable of outputting a second source light beam, a first time-varying beam reflector configured to direct the first source light beam and the second source light beam toward the sample, a scan lens configured to focus the first source light beam and the second source light beam reflected by the first time-varying beam reflector onto the sample, and a compound ellipsoidal collector configured to direct light scattered from the sample toward a scattered radiation detector. The optical scanning system causes one of the first or second source light beams to be directed towards a sample at an incident angle. The first light beam has a first wavelength, the second light beam has a second wavelength, and the first wavelength and the second wavelength are not the same.Type: GrantFiled: April 27, 2023Date of Patent: December 26, 2023Inventors: Steven W. Meeks, Hung Phi Nguyen, Alireza Shahdoost Moghaddam
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Patent number: 11827365Abstract: A method of operating an optical icing conditions sensor includes transmitting a first light beam with a first transmitter and a second light beam with a second transmitter, thereby illuminating two illumination volumes. A first receiver receives the first light beam. A second receiver receives the second light beam. A controller measures the intensity of light received by the first and second receivers. The controller compares the intensities to threshold values and determines if either intensity is greater than the threshold values. The controller determines a cloud is present if either intensity is greater than the threshold values. The controller calculates a ratio of the intensities if a cloud is present. The controller determines, using the ratio, whether the cloud contains liquid water droplets, ice crystals, or a mixture of liquid water droplets and ice crystals.Type: GrantFiled: October 18, 2021Date of Patent: November 28, 2023Assignee: Rosemount Aerospace Inc.Inventors: Kaare Josef Anderson, Mark Ray, Kent Allan Ramthun
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Patent number: 11821833Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 ?m to 1000 ?m), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.Type: GrantFiled: February 5, 2022Date of Patent: November 21, 2023Assignee: J.A. WOOLLAM CO., INC.Inventors: Stefan Schoeche, Craig M. Herzinger, Steven E. Green, Martin M. Liphardt, James D. Welch
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Patent number: 11798157Abstract: The present disclosure relates to non-destructive methods for collecting data from three-dimensional objects. Method include directing one or more interrogating beams of light towards a surface of a three-dimensional object, where the three-dimensional object includes one or more underlying surfaces, and one or more materials having excitonic properties are disposed on the surface of the three-dimensional object; capturing, using an imaging device, optic response of the one or more materials having excitonic properties to the one or more interrogation beams; and computing, using the imaging device, a distance between the one or more underlying surfaces and the one or more materials having excitonic properties, where the optic response of the one or more materials having excitonic properties is a function of the distance between the one or more materials having excitonic properties and the one or more underlying surfaces.Type: GrantFiled: October 9, 2020Date of Patent: October 24, 2023Assignee: THE REGENTS OF THE UNIVERSITY OF MICHIGANInventors: Parag Deotare, Zidong Li, Kanak Datta
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Patent number: 11800035Abstract: A reading apparatus that reads an image formed on a document while transporting the document, the reading apparatus includes a first reading section that reads, as a read image, one of specularly reflected light or diffusely reflected light which is reflected from the document on a reading glass through which the moving document passes, and a second reading section that reads, as a read image, the other of the specularly reflected light or the diffusely reflected light which is reflected from the document on one side of a transport path through which the document is transported.Type: GrantFiled: April 11, 2022Date of Patent: October 24, 2023Assignee: FUJIFILM Business Innovation Corp.Inventors: Yoji Nishida, Masato Serikawa, Emiko Shiraishi, Daisuke Nakai
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Patent number: 11769265Abstract: Apparatuses and methods are disclosed for assessing the texture of skin using images thereof. In exemplary embodiments, a texture map of an area of skin is generated from a combination of a parallel-polarized image and a cross-polarized image of the area of skin. The texture map is then flattened to remove the underlying curvature of the skin. A texture roughness metric is then generated based on the flattened texture map. An image of the texture map and the metric can be displayed to provide visual and alphanumeric representations of the texture of skin, thereby facilitating the comparison of baseline and follow-up images of the skin, such as those taken before and after treatment.Type: GrantFiled: October 17, 2021Date of Patent: September 26, 2023Assignee: Canfield Scientific, IncorporatedInventor: Sachin V. Patwardhan
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Patent number: 11740176Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 ?m to 1000 ?m), utilizing a tunable quantum cascade laser (QCL) source in combination with dithering capability to reduce speckle and standing wave effects, dual-rotating optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.Type: GrantFiled: January 18, 2022Date of Patent: August 29, 2023Assignee: J.A. WOOLLAM CO., INCInventors: Stefan Schoeche, Craig M. Herzinger, Steven E. Green, Martin M. Liphardt, James D. Welch
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Patent number: 11733173Abstract: An optical scanning system includes a first radiating source capable of outputting a first source light beam, a second radiating source capable of outputting a second source light beam, a first time-varying beam reflector configured to direct the first source light beam and the second source light beam toward the sample, a scan lens configured to focus the first source light beam and the second source light beam reflected by the first time-varying beam reflector onto the sample, and a compound ellipsoidal collector configured to direct light scattered from the sample toward a scattered radiation detector. The optical scanner causes one of the first or second source light beams to be directed towards a sample at an incident angle. The first light beam has a first wavelength, the second light beam has a second wavelength, and the first wavelength and the second wavelength are not the same.Type: GrantFiled: January 2, 2023Date of Patent: August 22, 2023Assignee: Lumina Instruments Inc.Inventors: Steven W. Meeks, Hung Phi Nguyen, Alireza Shahdoost Moghaddam
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Method and apparatus for contactless high-resolution determination and control of an object position
Patent number: 11733030Abstract: A high-sensitivity optical system to determine and/or control spatial displacement and position of objects applicable to various situations when a contact measurement cannot be performed, such as in high-vacuum or ultra-high vacuum chambers, at high temperatures, in aggressive chemical environments, etc. A laser beam is directed at a low glancing angle to a screen secured to an object. The screen's surface is normal to a motion direction of interest. A location of the bright laser beam spot on the screen surface is acquired and the displacement thereof is analyzed and quantified based on the change in distance from the laser beam spot to a reference element which is arranged on the screen and creates a variation in the acquired image brightness. A feedback loop control mechanism is provided which returns the displaced object to its original position.Type: GrantFiled: December 10, 2019Date of Patent: August 22, 2023Assignee: Neocera, LLCInventors: Mikhail D. Strikovski, Steven L. Garrahan, Jonathan E. Parkinson, Jeonggoo Kim, Solomon Kolagani -
Patent number: 11725987Abstract: An assembly for measurements of one or more optical parameters of a medium is disclosed. The assembly comprises a light sheet generator, a light intensity modulator, a holder for a sample, and an optical sensor. A method of using the assembly for measuring one or more optical parameters of a medium is also disclosed.Type: GrantFiled: March 2, 2020Date of Patent: August 15, 2023Inventors: Edouard Jean Jacques Berrocal, William René Serge Chaze, Elias Viktor Kristensson, Jérémie Thouakesseh Zoueu
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Patent number: 11728902Abstract: The manipulation and control of entangled particle and entangled photon properties by means of low loss interaction free quantum means is vital for studying the fundamentals of entanglement and for future applications in distributed quantum information processing, sensing and imaging. Despite its importance, achieving low loss interaction free manipulation and control of entanglement is difficult, particularly with pulsed networked systems with quantum properties changing in space and time and with intervening absorbing elements. This invention uses low loss quantum interaction free techniques and designs that can be miniaturized to efficiently and robustly send and receive quantum information and data using pulsed and continuous origin temporal and polarization entangled particles and entangled photons. The invention may be used to improve quantum communication of information and quantum networking in fiber optics, turbulent and scattering media, and free space.Type: GrantFiled: December 13, 2022Date of Patent: August 15, 2023Assignee: The United States of America as represented by the Secretary of the ArmyInventors: Ronald E. Meyers, Keith S. Deacon