Abstract: A apparatus is provided for carrying out an optical test method for a gearwheel. The testing apparatus includes a first camera for capturing image data of a first type of tooth flanks of the gearwheel to be tested, a position sensor for determining a rotational position of the gearwheel to be tested, a control device for evaluating the rotational position determined by this position sensor and for controlling the camera on the basis of this turning position, and a first illuminating device designed for illuminating an area of the gearwheel to be tested, which area is provided for capturing the image data.

Abstract: The present invention is directed to data communication. In a specific embodiment, a known data segment is received through a data communication link. The received data is equalized by an equalizer using an adjustable equalization parameter. The output of the equalizer is sampled, and a waveform is obtained by sweeping one or more sampler parameters. The waveform is evaluated by comparing it to the known data segment. Based on the quality of the waveform, equalizer parameter is determined. There are other embodiments as well.

Abstract: A method and device for displaying a two-dimensional image of a viewed object simultaneously with an image depicting a three-dimensional geometry of the viewed object using a video inspection device is disclosed. The video inspection device displays a two-dimensional image of the object surface of a viewed object, and determines the three-dimensional coordinates of a plurality of surface points. At least one rendered image of the three-dimensional geometry of the viewed object is displayed simultaneously with the two-dimensional image. As measurement cursors are placed and moved on the two-dimensional image, the rendered image of the three-dimensional geometry of the viewed object is automatically updated.

Abstract: A jitter sensor including a light source and a light sensor utilizes speckle pattern analysis to detect motion.

Abstract: A method and system may determine the estimated location of a vehicle, measure a location of an object relative to the vehicle using a sensor associated with the vehicle, and determine an updated vehicle location using the measured relative object location in conjunction with previously stored object locations. The estimated vehicle location may be determined using a system different from that associated with the sensor, for example a GPS system. The object location may be measured relative to a sub-map corresponding to the location of the vehicle.

Abstract: A lithographic system includes a lithographic apparatus comprising a projection system which projects a patterned radiation beam onto a target portion of a substrate and an alignment system which measures the position of a feature of the pattern on the substrate at a number of locations over the substrate. A controller compares the measured positions with points on a grid of values and extrapolates values for intermediate positions on the substrate based on values of corresponding intermediate points on the grid, so as to provide an indication of the intermediate positions on the substrate and their displacements relative to the grid. The grid is based on at least one orthogonal basis function, the measurement on the substrate being performed at positions corresponding to the root values of the at least one orthogonal basis function.

Abstract: A toner amount measuring unit irradiates a toner image formed on an image carrying member with light, and an image capturing unit captures an image of a reflected waveform according to light reflected by the toner image. Then, an amount of applied toner is calculated based on the peak position or peak height of the reflected waveform in accordance with information associated with the density of the toner image to be formed.

Abstract: A video calibration device comprising an elongated image tube having a length, a first opening at one end of the image tube and a second opening at the opposite end of the image tube. The device includes an elongated sensor tube having a length, a first opening at one end of the sensor tube and a second opening at the opposite end of the sensor tube. The first opening of the sensor tube is adapted to support a video calibration sensor. A video calibration sensor is disposed in the first opening of the sensor tube. The sensor tube is sealingly secured to the image tube at an angle whereby the second opening of the sensor tube and the second opening of the image tube are substantially juxtaposed.

Abstract: A method for making a sample for evaluation of laser irradiation position and evaluating the sample, and an apparatus which is switchable between a first mode of modification of semiconductor and a second mode of making and evaluating the sample. Specifically, a sample is made by irradiating a semiconductor substrate for evaluation with a pulse laser beam while the semiconductor substrate is moved for evaluation at an evaluation speed higher than a modifying treatment speed, each relative positional information between pulse-irradiated regions in the sample is extracted, and stability of the each relative positional information between pulse-irradiated regions is evaluated. The evaluation speed is such a speed that separates the pulse-irradiated regions on the sample from each other in a moving direction.

Abstract: Computer-implemented systems and methods for processing image data of a process-free plate are provided according to the present disclosure. The systems and methods may, generally, include a data acquisition step/means for receiving image data using one or more channels of a imaging system, each channel functioning to image the same target region of a process-free plate using a different wavelength of light, and a data processing step/means for filtering the image data using at least one of: (i) self-filtering, (ii) Fourier shrinkage and (iii) Wavelet shrinkage. When the image data is received using a plurality of channels, the received image data may advantageously be combined so as to optimize contrast-to-noise performance. The disclosed systems and methods may advantageously perform the operations of image de-noising, contrast enhancement, and thresholding, and may further involve compensation techniques, e.g., for minimizing distortion and blurring effects.

Abstract: A model-based tuning method for tuning a first lithography system utilizing a reference lithography system, each of which has tunable parameters for controlling imaging performance. The method includes the steps of defining a test pattern and an imaging model; imaging the test pattern utilizing the reference lithography system and measuring the imaging results; imaging the test pattern utilizing the first lithography system and measuring the imaging results; calibrating the imaging model utilizing the imaging results corresponding to the reference lithography system, where the calibrated imaging model has a first set of parameter values; tuning the calibrated imaging model utilizing the imaging results corresponding to the first lithography system, where the tuned calibrated model has a second set of parameter values; and adjusting the parameters of the first lithography system based on a difference between the first set of parameter values and the second set of parameter values.

Abstract: Provided are a layered film defect detection device capable of performing defect detection considering irregularities of optical performance of a phase difference layer constituting the layered film without requiring insertion of a new part into an optical path; and a layered film defect detection method. A defect detection device used for a layered film (11) having a polarizing plate (1) and a phase difference layer (separator (2)) includes: a light source (12) arranged at one side of the film surfaces of the layered film (11), an imaging unit (13) arranged on the other side of the film surface; an inspection polarization filter (15) arranged between the light source (12) and the imaging unit (13); a defect detection unit (14b) for detecting a defect existing on the polarizing plate (1) according to the captured image; and an optical axis adjusting unit (16) for adjusting a relative angle position of the polarization axis (L2) of a polarizing filter (15) and a polarization axis (L1) of a polarizer (2).

Abstract: An overlay for use with a video screen having a display thereon, comprising at least one first tactilely readable area corresponding to a feature of a first graphical display on the screen.

Abstract: A method and apparatus for detection of a particular material, such as photoresist material, on a sample surface. A narrow beam of light is projected onto the sample surface and the fluoresced and/or reflected light intensity at a particular wavelength band is measured by a light detector. The light intensity is converted to a numerical value and transmitted electronically to a logic circuit which determines the proper disposition of the sample. The logic circuit controls a sample-handling robotic device which sequentially transfers samples to and from a stage for testing and subsequent disposition. The method is particularly useful for detecting photo-resist material on the surface of a semiconductor wafer.

Abstract: An assembly line for mounting tires on wheels, for inflating the tire mounted on a wheel, for placement of the bead heels of the tire and for balancing which also includes apparatus for checking the conformity of the diameter of the tire to be mounted and for checking the conformity of the dimensions of the wheel.

Abstract: A method for non-destructively testing for the concentration of a component of a film that is used for doping a region of a semiconductor wafer uses an image histogram of the light reflected from an array of points on the film and the underlying substrate. The image histogram has peaks that are characteristic of the composition of the film. Tests are run to establish the image histogram peaks for a film with a normal concentration of the components and for films with low and high concentrations. When the same test is made for the film of a production wafer, the concentration of the component is readily classified as normal, high, or low.

Abstract: A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the sample, measuring a second change in optical response of the sample, comparing the second change in optical response of with the first change in optical response and associating a difference between the second change and the first change in optical response with a property of interest in the sample. The measurement of the first change in optical response is made with the sample having an initial lateral strain. The measurement of the second change in optical response is made after the lateral strain in the sample is changed from the initial lateral strain to a different lateral strain. The second change in optical response is compared to the first change in optical response to find the difference between the second change and the first change.

Abstract: A photomask defect inspection method is provided by which defects of pin holes with the diameter equal to or less than 0.35 .mu.m can be detected with certainty. According to the inspection method, a pattern whose image is projected onto an imaging position by the use of illumination light (P1) for exposure consists of light transmitting portions (41) formed on a glass base (2) and light intercepting portions (42) which transmit part of the illumination light (P1) in such a way that a phase of the part of the illumination light (P1) passing through the light intercepting portions (42) is delayed with respect to a phase of the illumination light (P1) passing through the light transmitting portions (41).

Abstract: A lithographic process for semiconductor device fabrication is disclosed. In the process a patterned mask having a multilayer film formed on a substrate is illuminated by extreme ultraviolet (EUV) radiation and the radiation reflected from the pattern mask is directed onto a layer of energy sensitive material formed on a substrate. The image of the pattern on the mask is thus introduced into the energy sensitive material. The image is then developed and transferred into the underlying substrate. The multilayer film is inspected for defects by applying a layer of energy-sensitive film (called the inspection film) in proximity to the multilayer film and exposing the energy-sensitive material to EUV radiation. The thickness of the multilayer film is such that a portion of the EUV radiation is transmitted through the inspection film, reflected from the multilayer film and back into the inspection film.

Abstract: A method for characterizing a sample comprising the steps of depositing the sample on a substrate, measuring a first change in optical response of the sample, changing the lateral strain of the sample, measuring a second change in optical response of the sample, comparing the second change in optical response of with the first change in optical response and associating a difference between the second change and the first change in optical response with a property of interest in the sample. The measurement of the first change in optical response is made with the sample having an initial lateral strain. The measurement of the second change in optical response is made after the lateral strain in the sample is changed from the initial lateral strain to a different lateral strain. The second change in optical response is compared to the first change in optical response to find the difference between the second change and the first change.

Abstract: Graphic data for forming a light-shielding pattern and graphic data for forming a semitransparent pattern are stored in first and second memories, respectively. A synthesis circuit converts the graphic data stored in the first and second memories into bit patterns and writes them in a third memory. A line width determination circuit determines, as a halftone region, a region having the number of continuous bits at the same level, which number is a predetermined number or less, in the bit patterns stored in the third memory. A pattern data generation circuit generates pattern data constituted by the signal levels of a light-transmitting region and a light-shielding region on the basis of an output signal from the synthesis circuit.

Abstract: A calibration apparatus is disclosed for measuring the properties of a laser beam. The apparatus includes a photoreactive element having a composition which reacts with laser radiation in a manner proportional to the intensity or intensity profile of the laser beam and an alignment means for disposing the photoreactive element in the path of a laser beam, such that the beam can be activate to impinge upon the photoreactive element and the properties of the beam are recorded by changes in the state of the calibration element. The calibration element may also be used to provide corrective feedback for modifying or controlling the properties of the laser beam.

Abstract: A scanning electron beam is formed as a rectangular electron beam. The electro-optical system which forms this rectangular beam has a rectangular-cathode light source and a quadrupole lens system. This rectangular beam is scanned in its short-axis (X-axis) direction by a deflection system while a stage is moved in its long-axis (Y-axis) direction to achieve scanning of the surface of the wafer under inspection. The rectangular beam corresponds to a number of circular beams arranged in a row. Therefore, pixel signals corresponding to a number of pixels equal to the aspect ratio of the rectangular beam (ratio of the length in the long-axis direction to the length in the short-axis direction) are simultaneously output.

Abstract: The invention relates to a method and apparatus for acquiring, recording and storing information in photographic and electronic media. In particular, the invention relates to low flare image recording and specifically to recording two-dimensional images, such as are found in electrophoretic patterns, along with associated alpha-numeric information. An optical comparator is also disclosed. A method and apparatus of optically and electronically comparing images on film strips is disclosed.

Abstract: The invention relates to a method and apparatus for acquiring, recording and storing information in photographic and electronic media. In particular, the invention relates to low flare image recording and specifically to recording two-dimensional images, such as are found in electrophoretic patterns, along with associated alpha-numeric information. An optical comparator is also disclosed. A method and apparatus of optically and electronically comparing images on film strips is disclosed.

Abstract: A recording apparatus has a holder for a plurality of reaction vessels including a support plate (11) having an array of holes (15) therein for receiving an array of reaction vessels (16), a housing (10) for receiving the holder and being sealed to prevent entry of stray light, an openable cover (24, 249) for the housing, a film back (12) for holding a photographic film adjacent the underside of the plate (11), and a removable shutter (13) for interposition between the film and the support plate.

Abstract: A method for contactlessly testing for opens and shorts in conducting paths within or on a nonconducting substrate. There are a plurality of conducting pads on the surface of the substrate. Charges are contactlessly generated, e.g., by an optical beam, in at least one selected pad inducing a voltage thereon and on pads electrically connected therewith through one of the conducting paths. A two dimensional electron flux is contactlessly caused to be emitted from the selected pad and at least one other pad of the plurality of pads, e.g., by an optical beam. The flux emitted from the pads depends on the voltage on each pad. The flux is detected to distinguish pads in electrical connection.

Abstract: A method of inspecting a pattern of elements on a working plate includes producing a negative copy of the working plate and aligning the negative copy with a positive inspection plate having elements slightly larger than the elements of the working plate whereby flaws are revealed as light transmissive spots. The working plate and a negative inspection plate, having the elements slightly smaller than the elements of the working plate, are aligned and flaws are revealed as light transmissive spots.

Abstract: A method of detecting a registration diversion between a mask and a wafer prior to a main exposure. This method detects relative diversions between marks on the wafer and latent images of marks on the mask formed on a photosensitive layer of the wafer. The latent images of the marks on the mask are preliminarily formed on the photosensitive layer of the wafer by an exposure energy beam prior to the main exposure.

Abstract: Examination of microstructures of LSI and VLSI devices is facilitated by employing a method in which the device is photographed through a darkfield illumination optical microscope and the resulting negative subjected to inverse processing to form a positive on a photographic film. The film is then developed to form photographic prints or transparencies which clearly illustrate the structure of the device. The entire structure of a device may be examined by alternately photographing the device and selectively etching layers of the device in order to expose underlying layers.

Abstract: A method for inspecting the presence of foreign particles on a mask comprising the steps of forming alignment marks on a wafer onto which the pattern is trially replicated, aligning projected images by means of the alignment marks to form overlapped images of the pattern of a mask to be inspected and the pattern of another mask in which the light and dark areas are inverted on a photosensitive material on the wafer, and inspecting the exposure status of the photosensitive material on the wafer after development to identify defects such as foreign particles attached to the mask to be inspected.

Abstract: The invention concerns a method and apparatus for testing aspherical lenses, particularly continuous-focus eyeglass lenses. The negative picture (7) of a test pattern (1) is produced by means of a master lens (4) which is placed in the ray path of the optical system (6) of the testing device. (FIG. 1). Thereupon the negative picture is projected back onto the test pattern over said ray path, which is now traversed in the opposite direction. If the specimen to be tested is now substituted for the master lens, light edges appear in the plane of the test pattern and give information as to the deviations of the distribution of the refractive power of the test specimen from the desired values of the master lens.

Abstract: Pairs of images are presented to an observer under conditions such that they are perceived as a single image and provide information about their mutual relationship. The pair are derived from non-equivalent image means, e.g. from (a) a photograph of a scene subject to change and (b) direct viewing of the changed scene. They are generally presented simultaneously to respective eyes. Intermittent alternate occlusion of the images highlights differences. The image pairs may constitute movie or television displays to provide 3-dimensional effects.

Abstract: The surface to be sensed or scanned is placed in the path of a projector which is moved along an axis of the surface. The path of motion of the projector is subdivided into predetermined sections which are illuminated by the projector in accordance with a predetermined sequential pattern. This procedure of moving the projector is repeated a predetermined number of times, with a separate illuminating pattern prevailing each time that the projector is moved relative to the surface and traverses the entire surface to be scanned. The combinations of the patterns obtained from the repeated scannings of the projector define closely-spaced sections of the surface. The patterns are coded so that each section is uniquely defined in coded form. A camera having the entire surface within its field of view photographs the surface each time that the projector is moved along the axis of the surface.

Abstract: A method for dynamically recording distortion in a transparency includes a support fixture for mounting the transparency for movement about a predetermined horizontal or vertical axis, with a camera disposed in back of the transparency while a test target is disposed in front of it. The test target has a plurality of small light sources arranged in a rectangular matrix pattern toward which the camera is aimed through the transparency. By opening the camera shutter for a period of time as the transparency is moved through a predetermined angle, a photographic record of distortion at a plurality of regions in the transparency is produced.

Abstract: An improvement in the process of manufacturing integrated circuits to enhance the yield, including the steps of tracking which of the individual dies on a photomask or related series of photomasks has produced a predominance of defective chips on the semiconductor wafer, then correcting the die images on the master photomasks and then producing new working masks. This procedure may be repeated several times, each time reducing the number of defect-bearing die images on the photomask and thereby providing a means by which a semiconductor device manufacturer can obtain better yields.

Abstract: The spatial locations of points defining a specular surface are determined by disposing the specular surface in the field of view of a lens and by using the specular surface to view by reflection an irradiated reference surface disposed successively in different positions. Reference surface indicia viewed in common line of sight relation to each specular surface point in such different positions of the reference surface are identified. Radiant energy reflected by a specular surface point through the lens node and the location of the lens node defines a further line in space. The intersection of this further line and such line of sight defines the spatial location of such specular surface point. Photographic records made with the reference surface in such different positions contain representations of reflected radiant energy for all specular surface points in the field of view of the lens and in line of sight relation to the reference surface.

Abstract: Pairs of images are presented to an observer under conditions such that they are perceived as a single image and provide information about their mutual relationship. The pair are derived from non-equivalent image means, e.g. from (a) a photograph of a scene subject to change and (b) direct viewing of the changed scene. They are generally presented simultaneously to respective eyes. Intermittent alternate occlusion of the images highlights differences. The image pairs may constitute movie or television displays to provide 3-dimensional effects.