Abstract: The invention relates to a method for establishing a light beam (CLB) with substantially constant luminous intensity comprising the steps of establishing a light beam (LB) by means of a light source (SAL) and controlling an attenuation of said light beam (LB) on the basis of occurrences of luminous intensity peaks (IP) in said light beam (LB).

Abstract: Apparatus for dynamic surface annealing of a semiconductor wafer includes a source of laser radiation emitting at a laser wavelength and comprising an array of lasers arranged in rows and columns, the optical power of each the laser being individual adjustable and optics for focusing the radiation from the array of lasers into a narrow line beam in a workpiece plane corresponding to a workpiece surface, whereby the optics images respective columns of the laser array onto respective sections of the narrow line beam. A pyrometer sensor is provided that is sensitive to a pyrometer wavelength. An optical element in an optical path of the optics is tuned to divert radiation emanating from the workpiece plane to the pyrometry sensor. As a result, the optics images each of the respective section of the narrow line beam onto a corresponding portion of the pyrometer sensor.

Abstract: A lamp house storing a plurality of flash lamps and a chamber storing and holding a semiconductor wafer are fitted to each other in an openable/closable manner. The lamp house and the chamber are fixed to a closed state with male screws. In order to process a semiconductor wafer, a shutter plate is drawn out to open an irradiation window. In this state, the shutter plate shields a space located above the male screws so that the male screws cannot be detached for opening the lamp house and the chamber. In order to open the lamp house and the chamber, the shutter plate must be inserted for shielding the irradiation window while opening the space located above the male screws. Thus, a thermal processing apparatus capable of preventing the lamps from breaking during maintenance thereof is provided.

Abstract: An ultra violet light sterilizing apparatus utilizing a silicon carbide (SiC) photodiode sensor is described. The ultraviolet light fluid sterilization apparatus includes a fluid chamber, at least one ultraviolet light source configured to emit ultraviolet light into the fluid chamber, and at least one ultraviolet light sensor that includes a silicon carbide photodiode. Each UV light sensor includes a sealed outer housing having an optically transparent window. A silicon carbide photodiode is located inside the housing adjacent the transparent window. Each UV light sensor also includes a signal amplification unit that includes an amplifier mounted on a printed circuit board located inside the housing. The UV sterilization apparatus also includes a controller configured to receive, as input, a signal from each ultraviolet light sensor.

Abstract: A portable automatic disappearing filament optical pyrometer having low power demand incorporating a solid state line scanner as a sensing element is controlled by a microprocessor to perform a balance between the radiation from a target and a lamp filament to provide a digital indication of the temperature of the target including compensation for emissivity of the target.

Abstract: Disclosure is made of a photoelectric pyrometer for measuring the temperature of bodies of small cross-sectional dimensions which vary with respect to the optical axis of the pyrometer. The pyrometer comprises, in successive arrangement, an objective, a stationary field diaphragm, a slit obturator, an aperture diaphragm, a condenser sighted at the aperture of the stationary field diaphragm, and a photoelectric converter arranged in the sharp image plane of the condenser. The light-sensitive surface of the photoelectric converter receives two trains of light pulses. One of these pulse trains is formed by the above-mentioned units, whereas the other is formed by the obturator arranged across the path of a luminous flux generated by an optical feedback radiation source. The photoelectric converter produces two trains of trapezoidal electric pulses of a variable duration and on-off ratio.