Contour Or Profile Patents (Class 356/489)
  • Patent number: 12055384
    Abstract: An apparatus and method for capturing an object surface by electromagnetic radiation are provided. The apparatus includes a radiation generation device having a beam source and being configured to radiate a first and a second electromagnetic radiation having a first and second wavelength, respectively, onto a measurement point or a region of the object surface without emitting radiation onto the measurement point or onto the region, or without emitting radiation utilized for surface capturing, in a wavelength range between the first and the second wavelengths, a capturing device to capture for the measurement point a first and a second measurement value, the first measurement value being based on reflected radiation having the first wavelength and the second measurement value being based on reflected radiation having the second wavelength, and each of the first and second measurement values representing a distance between the capturing device and the object surface.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: August 6, 2024
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Andreas Betsche, Dirk Beckmann
  • Patent number: 11796782
    Abstract: An optics arrangement for flexible multi-color illumination for a light microscope includes an acousto-optical tunable filter (“AOTF”). The AOTF is set up to diffract two light components from incident illumination light into different order-of-diffraction directions. The two light components differ in their wavelengths and polarizations. Alternatively, an electro-optical modulator (“EOM”) can be used, with which two temporally successive light components of different wavelengths are set to different polarization directions. A polarization beam splitter separates the two light components of different wavelengths and polarizations into reflection light, which is reflected at the polarization beam splitter, and transmission light, which is transmitted at the polarization beam splitter. A light structuring apparatus imprints different structures onto the transmission light and the reflection light.
    Type: Grant
    Filed: April 11, 2019
    Date of Patent: October 24, 2023
    Assignee: CARL ZEISS MICROSCOPY GMBH
    Inventors: Jörg Siebenmorgen, Ingo Kleppe, Ralf Netz
  • Patent number: 11766757
    Abstract: A processing system includes a control unit that generates positional information related to a position of a measuring unit at a time of measuring a processing object and outputs the generated positional information and a generation period signal indicating a period during which the positional information is generated, an acquisition unit that acquires the positional information and the generation period signal which have been output, an acquisition interval calculation unit that calculates a statistical value indicating an interval between acquisition periods regarding a plurality of generation period signals acquired by the acquisition unit, an estimation unit that estimates the period during which the positional information is generated on the basis of the statistical value calculated by the acquisition interval calculation unit, and a shape calculation unit that calculates a shape of the processing object based on measurement information, the positional information, and the period estimated by the estimat
    Type: Grant
    Filed: December 25, 2017
    Date of Patent: September 26, 2023
    Assignees: NIKON CORPORATION, DMG MORI CO., LTD.
    Inventors: Tomoaki Yamada, Shizuo Nishikawa, Satoshi Miyamoto, Junichi Morishita
  • Patent number: 11733650
    Abstract: A holographic imaging system may include an optical source configured to output a source beam and a splitter configured to split the source beam into a reference beam and an object beam that may be incident on a target to form a scattered object beam. The system may also include a combiner configured to combine the filtered scattered object beam with the reference beam to form an interference beam, an imaging array configured to receive the interference beam and generate frames of raw holographic data based on measurements of the interference beam over time, and an image data processor. The image data processor may be configured to receive the frames of raw holographic data from the imaging array, remove data components within the frames that are associated with the particle motion having a motion frequency that is less than a movement frequency threshold to form conditioned raw holographic data, and generate an image based on the conditioned raw holographic data.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: August 22, 2023
    Assignee: The Johns Hopkins University
    Inventors: David W. Blodgett, Carissa L. Rodriguez, Austen T. Lefebvre, Eyal Bar-Kochba, Nicole E. Steiner
  • Patent number: 11515681
    Abstract: Provided is a laser module that receives a first laser beam and outputs a second laser beam different from the first laser beam, the laser module including an optical system configured to modulate the first laser beam into the second laser beam and output the second laser beam, a first mirror disposed on an optical path of the first or second laser beam defined in the laser module, the first mirror reflecting the first laser beam to the optical system, a first sensor disposed adjacent to the first mirror and configured to sense the first laser beam incident to the first mirror, a second mirror disposed on the optical path to reflect the second laser beam to an outside of the laser module, and a first driver connected to the second mirror and configured to rotate the second mirror.
    Type: Grant
    Filed: July 12, 2019
    Date of Patent: November 29, 2022
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Won Bae Cho, Moon Youn Jung
  • Patent number: 11357404
    Abstract: Described herein are apparatuses for dental scanning and components of apparatuses for dental scanning. A component of a dental scanning apparatus may include a beam splitter, a transparency and an image sensor. The component may have a first surface and a second surface. The transparency may be affixed to the first surface of the beam splitter, and may comprise a spatial pattern disposed thereon and be configured to be illuminated by a light source of the dental scanning apparatus. The image sensor may be affixed to the second surface of the beam splitter, wherein as a result of the transparency being affixed to the first surface of the beam splitter and the image sensor being affixed to the second surface of the beam splitter, the image sensor maintains a stable relative position to the spatial pattern of the transparency.
    Type: Grant
    Filed: January 5, 2021
    Date of Patent: June 14, 2022
    Assignee: Align Technology, Inc.
    Inventors: Yossef Atiya, Tal Verker
  • Patent number: 11343476
    Abstract: A display apparatus comprises a light source device, an image data processing module, a light modulating device and an image synthesizing device. The light source device is configured to emit first light and second light. The image data processing module is configured to receive original image data of an image to be displayed, wherein the original image data of the image to be displayed is based on image data within a second color gamut range and comprises original control signal values of m colors of each pixel; the second color gamut range covers a first color gamut range and has a portion that exceeds the first color gamut range. The image data processing module is further configured to map the original control signal values of the m colors into m corrected control signal values corresponding to the first light and n corrected control signal values corresponding to the second light.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: May 24, 2022
    Assignee: Appotronics Corporation Limited
    Inventors: Xin Yu, Fei Hu, Zu-Qiang Guo, Yi Li
  • Patent number: 11231375
    Abstract: An apparatus for measurement of surface relief provides a phase sensitive camera and processing to reconstruct a wavefront profile matching the surface when illuminated with a known light source thereby providing noncontact surface relief measurements.
    Type: Grant
    Filed: May 20, 2019
    Date of Patent: January 25, 2022
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: Soongyu Yi, Zongfu Yu
  • Patent number: 11172888
    Abstract: Hand-held optical thromboelastographic sensor and method of using the same for simultaneous assessment of multiple parameters of blood coagulation at a point-of-care. The sensor includes an optical system registering laser speckle intensity associated with a stationary blood sample and data-processing circuitry programmed to derive the multiple parameters from speckle intensity. The circuitry may be part of a mobile device configured to operate without communication with a central server and/or data storage.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: November 16, 2021
    Assignee: THE GENERAL HOSPITAL CORPORATION
    Inventor: Seemantini K. Nadkarni
  • Patent number: 11047873
    Abstract: Systems and methods are provided for making in-situ measurements of the sea bed 3 component fluid velocity field and sediment motion across a range of real ocean conditions using particle image velocimetry (PIV). A PIV system in accordance with an embodiment of the present disclosure can include a camera to capture images of the particles in motion, a laser to generate a laser sheet for illuminating the particles, and a synchronizer to act as an external trigger for the laser and the camera.
    Type: Grant
    Filed: May 31, 2019
    Date of Patent: June 29, 2021
    Assignee: The Government of the United States of America, as represented by the Secretary of the Navy
    Inventors: Joseph Calantoni, Edward Braithwaite, Callum Gray, Sean Griffin
  • Patent number: 10993619
    Abstract: An ultra-wideband (UWB) radar system for non-invasive, real-time tumor tracking includes an UWB transmitter arranged to transmit radar pulses to penetrate a region of interest of a patient; an UWB receiver arranged to receive radar return pulses after being reflected by tumor tissue in the region of interest of the patient; and an UWB signal processor constructed to communicate with the UWB receiver, wherein the UWB transmitter and the UWB receiver are constructed to be arranged sufficiently far away from the patient so as to avoid interfering with radiation treatment of the tumor.
    Type: Grant
    Filed: May 30, 2014
    Date of Patent: May 4, 2021
    Assignees: The Johns Hopkins University, U.S. Government in the Name of the Secretary of the Navy
    Inventors: Yeonju Sarah Han-Oh, Eun Oh
  • Patent number: 10883818
    Abstract: The invention relates to a method and system for monitoring at least one parameter of an object. There is provided an imaging system for monitoring at least one parameter of movement of a moving object, the system comprises at least one imaging unit comprising an optical transformer configured and operable for applying spatial image space transformation of at least one parameter of movement into geometric relation, by translating different components of six degrees of freedom of movement in a three-dimensional space into a lateral translation; wherein the imaging unit is configured and operable for imaging the moving object on an image plane and generating image data indicative of the moving object in an x-y plane; the imaging system generating motion data indicative of the six degrees of freedom of movement.
    Type: Grant
    Filed: February 7, 2017
    Date of Patent: January 5, 2021
    Assignee: CONTINUSE BIOMETRICS LTD.
    Inventors: Zeev Zalevsky, Javier Garcia, Moshe Arie Ariel Schwarz, Yevgeny Beiderman
  • Patent number: 10866141
    Abstract: The invention relates to a device for the spectral analysis of an electromagnetic measurement signal using an optoelectronic mixer, wherein the optoelectronic mixer is designed to generate the electrical superimposition signal by superimposing the electromagnetic measurement signal and a reference signal with at least one known frequency (fo). The device comprises the following features: a signal input for receiving an electrical superimposition signal from the optoelectronic mixer, a low-pass filter, a rectifier, and a read-out unit. The low-pass filter is designed to generate a filtered superimposition signal from the electrical superimposition signal by filtering out frequency portions above an upper cutoff frequency (fG). The rectifier is designed to generate a rectified superimposition signal from the filtered superimposition signal.
    Type: Grant
    Filed: February 7, 2017
    Date of Patent: December 15, 2020
    Assignee: TECHNISCHE UNIVERSITAT DARMSTADT
    Inventor: Sascha Preu
  • Patent number: 10788655
    Abstract: Provided are an irradiation device, a laser microscope system, an irradiation method, and a laser microscope detection method which can further widen a bandwidth of detection light as a multiplexed signal. Laser light beams are separated and enter a first AOD (24) and a second AOD (34) so that a plurality of first diffracted light beams and a plurality of second diffracted light beams with deflection angles and sizes of frequency shifts different from each other are generated. The first diffracted light beams and the second diffracted light beams are superposed by a beam splitter (19) so as to generate a plurality of interference light beams with beat frequencies different from each other. An objective lens (52) is formed by aligning a plurality of irradiation spots of interference light beam linearly in a main scanning direction and irradiates a sample (T) with the interference light beam.
    Type: Grant
    Filed: February 9, 2017
    Date of Patent: September 29, 2020
    Assignee: Japan Science and Technology Agency
    Inventors: Hideharu Mikami, Keisuke Goda
  • Patent number: 10527487
    Abstract: This invention provides a highly-sensitive, high-frequency, soft-polymer vibrations sensor that is integrated with the artwork and logo's currently utilized in equipment to make the sensor(s) unobtrusive. Low-power electronics with the ability to capture and analyze specific signals of concern are utilized as to increase the operational lifetime of the system and decrease the number of re-charge or battery changes per match. High-frequency vibration data is captured and stored locally on the equipment where user-defined code can analyze data and pick specific parameters of concern to send via the wireless communications link to a receiver. The receiver is able to capture the data and re-construct events of interest. This architecture reduces the power and bandwidth requirements of the device while maintaining functionality and the ability to transmit and report parameters and incidents of interest.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: January 7, 2020
    Assignee: Future Technologies in Sport, Inc.
    Inventors: Jacob Van Reenen Pretorius, Eric Oleg Bodnar
  • Patent number: 10514250
    Abstract: An interferometry system including a coherent light source operable to generate a beam of coherent light is provided. Separate waveguide pathways are optically associated between the coherent light source a photodetector. A transceiving segment can also be optically associated with each waveguide pathway at a location between the coherent light source and the photodetector. Each transceiving segment can be configured to emit an emitted beam of coherent light and positioned to receive a received portion of an emitted beam of coherent light emitted from a transceiving segment optically associated with a different waveguide pathway. The received portion of the emitted beam of coherent light can be combined with coherent light from the waveguide pathway receiving the received portion of the emitted beam of coherent light to form an optical interference signal. Accordingly, each waveguide pathway can be further configured to direct a separate optical interference signal toward a respective photodetector.
    Type: Grant
    Filed: June 23, 2017
    Date of Patent: December 24, 2019
    Assignee: University of Utah Research Foundation
    Inventor: Clayton C. Williams
  • Patent number: 10436570
    Abstract: The present invention provides a Michelson interferometer for capturing images of a vibrating sample comprising a coherent light source. The light source may be adapted to illuminate a sample with a constant brightness across the sample. The interferometer may also be configured to generate a 3D representation of a sample using a single frame for a predetermined phase of the sample. The 3D representations may be combined to create a 3D video representation of the vibrating sample.
    Type: Grant
    Filed: November 7, 2016
    Date of Patent: October 8, 2019
    Assignee: STC.UNM
    Inventors: Arash Kheyraddini-Mousavi, Zayd Leseman, Behnam Kheyraddini-Mousavi
  • Patent number: 10416397
    Abstract: The optical receptacle according to the present invention has a first optical element and a second optical element. The first optical element and the second optical element are coupled to each other via a first fitting part of the first optical element and a second fitting part of the second optical element. The first optical element has a first optical surface and a second optical surface. The second optical element has a third optical surface, a fourth optical surface and a light-separating part.
    Type: Grant
    Filed: February 20, 2017
    Date of Patent: September 17, 2019
    Assignee: Enplas Corporation
    Inventors: Shimpei Morioka, Ayano Kon, Motohiko Maene
  • Patent number: 10371511
    Abstract: A device and method for geometrically measuring an object includes a carrier for the object, at least one reference object that can be fixed relative to the carrier, and a holder which can be moved in at least one direction (x,z) relative to the reference object and on which a reference body and a distance measuring device are arranged, which distance measuring device is designed for measurement of a distance between the object and the reference body. A first and a second reference sensor are arranged at a distance from each other on the holder or on the reference body while facing the reference object, said reference sensors being designed to measure a first and a second distance to the reference object.
    Type: Grant
    Filed: May 13, 2015
    Date of Patent: August 6, 2019
    Assignee: TAYLOR HOBSON LTD.
    Inventors: Thilo May, Christian Am Weg
  • Patent number: 10254106
    Abstract: An optical sensor for determining a coordinate of a measurement object is provided which includes a stop element and an illumination apparatus configured to generate an illumination light beam and to illuminate the measurement object through the stop element, a sensor element configured to detect a portion of a detection light beam emanating from the measurement object and to determine an intensity distribution, and an optical element configured to focus a portion of the illumination light beam at one focal point along an optical axis. The optical sensor includes an apparatus configured to vary and set a relative lateral position of the optical axis to the measurement object to determine, for each of first and second focal points, first and second intensity distributions at first and second relative lateral positions and to determine therefrom a distance coordinate and/or a lateral coordinate of the measurement object.
    Type: Grant
    Filed: December 17, 2017
    Date of Patent: April 9, 2019
    Assignee: Carl Zeiss Industrielle Messtechnik GmbH
    Inventors: Frank Hoeller, Christian Hembd
  • Patent number: 9999349
    Abstract: An ophthalmologic apparatus comprises a light source 12, an optical measurement system 13 that radiates first light from the light source to inside an eye to be examined and guides first reflected light from the eye, an optical reference system (24, 22) that radiates second light from the light source to a reference surface and guides second reflected light from the reference surface, a photo detector 26 that detects interfering light between the first reflected light from the optical measurement system and the second reflected light from the optical reference system, and a processor that determines a position of a measuring portion of the inside of the eye based on the detected interfering light. The optical measurement system comprises an incident angle changing member 46 that changes an incident angle of the first light radiated to the eye within a predetermined angular range relative to an axis of vision of the eye.
    Type: Grant
    Filed: July 17, 2015
    Date of Patent: June 19, 2018
    Assignee: TOMEY CORPORATION
    Inventors: Chihiro Kato, Tsutomu Ohmori, Yuji Nozawa
  • Patent number: 9995761
    Abstract: A laboratory system has demonstrated the measurement of three degrees of vibrational freedom simultaneously using a single beam through heterodyne speckle imaging. The random interference pattern generated by the illumination of a rough surface with coherent light can be exploited to extract information about the surface motion. The optical speckle pattern is heterodyne mixed with a coherent reference. The recorded optical data is then processed to extract three dimensions of surface motion. Axial velocity is measured by demodulating the received time-varying intensity of high amplitude pixels. Tilt, a gradient of surface velocity, is calculated by measuring speckle translation following reconstruction of the speckle pattern from the mixed signal.
    Type: Grant
    Filed: April 12, 2017
    Date of Patent: June 12, 2018
    Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE ARMY
    Inventors: Bradley W. Libbey, James D. Perea
  • Patent number: 9903808
    Abstract: A comb source includes a continuous wave frequency source to provide a continuous wave radiation; a first modulator in optical communication with the continuous wave frequency source; a second modulator in optical communication with continuous wave frequency source; and a waveform driver in electrical communication with the first modulator and the second modulator. A process for producing an analyte spectrum includes producing a first comb from a continuous wave frequency and a first waveform; producing a reference comb and a probe comb from the first comb; subjecting a sample to the probe comb; producing a sample comb in response to subjecting the sample to the probe comb; producing a composite comb from the reference comb and the sample comb; producing a second comb from the continuous wave frequency and a second waveform; and combining the second comb and the composite comb to produce the analyte spectrum.
    Type: Grant
    Filed: January 6, 2015
    Date of Patent: February 27, 2018
    Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE
    Inventors: David F. Plusquellic, David A. Long, Kevin O. Douglass, Joseph T. Hodges, Adam J. Fleisher
  • Patent number: 9841273
    Abstract: An optical measuring probe for measuring inner and/or outer diameters of objects, uses a first optical element for focusing or collimating an optical beam onto a surface of an object. A second optical element for splitting the optical beam into a first measuring beam and a second measuring beam is provided in the optical measuring probe in such a way that the second measuring beam is guided out of the measuring probe in a direction opposite the direction of the first measuring beam and that the first measuring beam forms a first scan point and the second measuring beam forms a second scan point. Also described is a corresponding method for measuring diameters using the optical measuring probe. The optical measuring probe and the associated method make it possible to optically measure inner and outer diameters of measuring probes objects in a simple manner.
    Type: Grant
    Filed: July 16, 2013
    Date of Patent: December 12, 2017
    Assignee: ROBERT BOSCH GMBH
    Inventors: Peter Riegger, Gerald Franz, Pawel Drabarek
  • Patent number: 9683930
    Abstract: This disclosure is generally directed to systems for imaging polarization properties of optical-material samples. As one example, there is provided a system for precise, simultaneous imaging of both the in-plane and out-of-plane birefringence properties of sample material over a wide range of incidence angles. An example spatially resolved imaging approach described herein is amenable to determination of a wide range of polarimetric properties, in addition to the in-plane and out-of-plane birefringence measure discussed as a preferred embodiment.
    Type: Grant
    Filed: May 20, 2014
    Date of Patent: June 20, 2017
    Assignee: Hinds Instruments, Inc.
    Inventors: John Freudenthal, Andy Leadbetter, Baoliang Wang
  • Patent number: 9651477
    Abstract: A laboratory system has demonstrated the measurement of three degrees of vibrational freedom simultaneously using a single beam through heterodyne speckle imaging. The random interference pattern generated by the illumination of a rough surface with coherent light can be exploited to extract information about the surface motion. The optical speckle pattern is heterodyne mixed with a coherent reference. The recorded optical data is then processed to extract three dimensions of surface motion. Axial velocity is measured by demodulating the received time-varying intensity of high amplitude pixels. Tilt, a gradient of surface velocity, is calculated by measuring speckle translation following reconstruction of the speckle pattern from the mixed signal.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: May 16, 2017
    Assignee: THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE ARMY
    Inventors: Bradley W. Libbey, James D. Perea
  • Patent number: 9647408
    Abstract: A control circuit for generating an optical output at a target frequency using a single-frequency laser is provided. The control circuit includes a micro-ring resonator configured to generate a frequency comb of a plurality of comb frequencies based on a source frequency, a carrier-envelope offset interferometer configured to determine a carrier-envelope offset frequency of the frequency comb, a tunable filter configured to select a subset of comb frequencies of the frequency comb based on the target frequency, and a spectrometer configured to resolve ambiguities in overlap between the subset of comb frequencies and the frequency comb, and refine the subset of comb frequencies to a single comb frequency for output.
    Type: Grant
    Filed: November 3, 2014
    Date of Patent: May 9, 2017
    Assignee: The Boeing Company
    Inventor: John R. Lowell
  • Patent number: 9488847
    Abstract: A variable optical attenuator in which a polarization beam splitter splits a beam incoming from the front into two linearly-polarized beams perpendicular to each other and separately outputs them to the back along first and second light paths. A Faraday rotator rotates a polarization plane of the two incoming linearly-polarized beams to an arbitrary angle by controlling a magnetic field to be applied to a Faraday element by a magnetism applying means and outputs them to the back. First and second analyzers arranged in the first and the second light paths and parallelly arranged perpendicular to these light paths are arranged in that order. The two analyzers have optical axes perpendicular to each other so that the optical axes are in the same direction as that of the polarization plane of the two linearly-polarized beams output from the polarization beam splitter.
    Type: Grant
    Filed: May 17, 2013
    Date of Patent: November 8, 2016
    Assignee: Kohoku Kogyo Co., Ltd.
    Inventors: Hiroaki Ono, Kenji Sahara, Yuko Ota, Takashi Kato
  • Patent number: 9212896
    Abstract: An optical interferometer including an output-beam beam input for coupling-in an output beam, and a beam splitter device for splitting the output beam into at least one first sub-beam and one second sub-beam, the interferometer being embodied as a heterodyne interferometer by virtue of at least one optical frequency shifter being arranged in the beam path of the interferometer and the interferometer including one or more optical waveguide elements, by which optical waveguides are formed, at least between the output-beam beam input, beam splitter device and frequency shifter. The frequency shifter is arranged in the beam path of the first or second sub-beam.
    Type: Grant
    Filed: May 27, 2014
    Date of Patent: December 15, 2015
    Assignee: POLYTEC GMBH
    Inventors: Michael Wortge, Christian Rembe, Alexander Drabenstedt, Tobias Braun
  • Patent number: 9194818
    Abstract: A distance measurement system includes: an irradiating means for irradiating two coherent electromagnetic waves having frequencies different from each other to an object under measurement in a partially displacing manner while having a same area; an electromagnetic wave detecting means for detecting electromagnetic waves from at least two or more areas on the object under measurement with a boundary line being interposed therebetween to extend in a direction substantially perpendicular to the displacement direction; a signal generating means for generating a difference signal or a summation signal of respective outputs of the electromagnetic waves detected in the electromagnetic wave detecting means at symmetrical positions with respect to the boundary line; and a measuring means for obtaining a phase difference or intensity difference of the difference signal or summation signal to obtain measurement values.
    Type: Grant
    Filed: April 17, 2013
    Date of Patent: November 24, 2015
    Assignee: ASTRODESIGN, INC.
    Inventors: Toshiharu Takesue, Shigeto Takeda, Shigeaki Suzuki
  • Patent number: 9141003
    Abstract: A position measurement system configured to measure a position quantity of a movable object in a measurement direction, the system including a radiation source, a beam splitter to split the radiation beam in a measurement beam and a reference beam, a first reflective surface mounted on the movable object to receive the measurement beam, a second reflective surface mounted on a reference object to receive the reference beam, and a detector arranged to receive a first and second reflected beam reflected by the first and second reflective surface, respectively, and configured to provide a signal representative of the position quantity of the movable object based on the first and the second beam, wherein the radiation source and detector are mounted on an object that is different from the movable object and the reference object.
    Type: Grant
    Filed: October 12, 2010
    Date of Patent: September 22, 2015
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Ruud Antonius Catharina Maria Beerens, Sjoerd Nicolaas Lambertus Donders, Engelbertus Antonius Fransiscus Van Der Pasch, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Petrus Martinus Bernardus Vermeulen
  • Patent number: 9081435
    Abstract: In a display apparatus, one frame includes a first sub-frame in which a previous image is held and a second sub-frame in which a present image is displayed. A plurality of sensors recognizes an object disposed on a display panel and sequentially outputs sensing signals in response to scan signals. Sensing signals are divided into a first sensing signal read out during a first sub-frame and a second sensing signal read out during a second sub-frame, and a control circuit generates a noise free signal using the first and second sensing signals. Thus, a coordinate value indicating the position of the object may be generated based on the noise free signal, thereby preventing mis-operation or malfunction caused by the noise.
    Type: Grant
    Filed: November 7, 2011
    Date of Patent: July 14, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventors: HeeJoon Kim, Jae-Ho Oh, Jaehyun Cho
  • Patent number: 9025245
    Abstract: A chromatic confocal microscope system and signal process method is provided to utilize a first optical fiber module for modulating a light into a detecting light passing through a chromatic dispersion objective and thereby forming a plurality of chromatic dispersion lights to project onto an object. A second optical fiber module conjugated with the first optical fiber module receives a reflected object light for forming a filtered light, which is split into two filtered lights detected by two color sensing units for generating two sets of RGB intensity signals, wherein one set of RGB intensity signals is adjusted relative to the other set of RGB intensity signals. Then two sets of RGB intensity signals are calculated for obtaining a maximum ratio factor. Finally, according to the maximum ratio factor and a depth relation curve, the surface profile of the object can be reconstructed.
    Type: Grant
    Filed: November 26, 2012
    Date of Patent: May 5, 2015
    Assignee: National Taipei University of Technology
    Inventors: Liang-Chia Chen, Yi-Wei Chang
  • Patent number: 8675205
    Abstract: The time delay (and therefore the OPD) between object and reference beams in an interferometer is manipulated by changing the spectral properties of the source. The spectral distribution is tuned to produce a modulation peak at a value of OPD equal to the optical distance between the object and reference arms of a Fizeau interferometer, thereby enabling the use of its common-axis configuration to carry out white-light measurements free of coherence noise. Unwanted interferences from other reflections in the optical path are also removed by illuminating the object with appropriate spectral characteristics. OPD scanning is implemented without mechanical means by altering the source spectrum over time so as to shift the peak location by a predetermined scanning step between acquisition frames. The invention and its advantages are applicable to optical coherence tomography as well as conventional white light interferometry.
    Type: Grant
    Filed: March 29, 2013
    Date of Patent: March 18, 2014
    Inventor: Artur G. Olszak
  • Patent number: 8670128
    Abstract: A shape determining device (X) splits the original light beam from a light source (Y) into two light beams, directs the light beams to the front and back surfaces of the object (1) to be determined, and performs optical heterodyne interference using the split light beams at the front and back surfaces of the object (1) to be determined. In the shape determining device (X), each of the split light beams is further split into a main light beam and a subordinate light beam, the subordinate light beam interferes with the main light beam at each of the front and back surfaces before and after the illumination of the object (1) to be determined, the signals after the interference are phase-detected, and the difference between the phases acquired by the phase detection is detected at each of the front and back surfaces of the object (1) to be determined.
    Type: Grant
    Filed: January 26, 2010
    Date of Patent: March 11, 2014
    Assignee: Kobe Steel, Ltd.
    Inventors: Masato Kannaka, Eiji Takahashi, Masakazu Kajita
  • Patent number: 8654340
    Abstract: The disclosure relates to a detection device for imaging an object, that comprises: a laser cavity for transmitting an original light signal at an original wavelength towards the object in order to generate an evanescent wave at the surface of the object; a conversion means adapted for converting the evanescent wave into a progressive signal; a re-injection means adapted for injecting the progressive signal into the laser cavity in order to generate interference inside the laser cavity between the progressive signal and the original light signal; a detection means adapted for detecting the interference in order to determine the characteristics of the object; characterized in that the device includes a wavelength modification means adapted so that the wavelength of the progressive signal injected into the laser cavity is different from the original wavelength.
    Type: Grant
    Filed: September 3, 2008
    Date of Patent: February 18, 2014
    Assignees: Centre National de la Recherche Scientifique (CNRS), Ecole Nationale Superieure d'Ingenieurs (ENSI)
    Inventors: Sylvain Girard, Hervé Gilles, Mathieu Laroche
  • Patent number: 8605290
    Abstract: A non-invasive imaging and analysis method and system/apparatus suitable for non-invasive imaging and analysis of a target is disclosed. Targets include biological tissue structures or components; optical structures or components; electronic structures or components; or structures in general. A preferred embodiment of the invention provides a precision optical measuring module that modifies the spatial separation of multiple reference interference signals by adjusting the separation between a partial reflective element and a full mirror mounted on a piezo device and determining the distance between surfaces or structures within the target by simultaneously monitoring the magnitude of the separation between the partial reflective element and the full mirror and processing generated interference signals.
    Type: Grant
    Filed: May 23, 2010
    Date of Patent: December 10, 2013
    Inventor: Josh N Hogan
  • Publication number: 20130301056
    Abstract: An interferometric sensor having an interference objective, an illumination system, and a detection system configured to simultaneous non-contact determination of profile and roughness of a tested surface. The illumination system comprises a radiation source configured to emit three wavelengths of quasi-monochromatic light. The sensor further includes a detection system having a color array detector in optical communication with the interference objective and configured to detect the light reflected by the measurand. The sensitivity of measurement can be adjusted by re-orienting of a portion of the sensor with respect to the measurand.
    Type: Application
    Filed: May 7, 2013
    Publication date: November 14, 2013
    Inventor: Robert E. Parks
  • Patent number: 8537213
    Abstract: A method for measuring a via bottom profile is disclosed for obtaining a profile of a bottom of a via in a front side of a substrate. In this method, an infrared (IR) light source is transmitted from the back of the substrate to the bottom of the via through an objective by using an IR-microscope, and lights scattered from the bottom of the via are acquired by an image capturing device to generate an image, where the image displays a diameter (2Ea) of the via bottom profile and a diameter (2Ec) of a maximum receivable base area of the via for the IR-microscope. Thereafter, by using an elliptic equation, a minor axis radius thereof (Eb) is obtained, and thus the via bottom profile is obtained from a radius (Ea) of the via bottom profile and the minor axis radius (Eb) of the elliptic equation.
    Type: Grant
    Filed: December 28, 2010
    Date of Patent: September 17, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Deh-Ming Shyu, Yi-Sha Ku, Wei-Te Hsu
  • Publication number: 20130235385
    Abstract: A method of measuring a surface shape of a target object by irradiating a target object and a reference surface with coherent light while changing a frequency of the coherent light includes: setting a rate of changing the frequency of the coherent light based on at least one of first information of a contour of an image of the target object projected onto a surface perpendicular to an optical axis of a measurement light and known second information of the surface shape; obtaining, by an image sensor, a plurality of images of interference fringes while changing the frequency of the coherent light with which the target object and the reference surface are irradiated at the set rate; and obtaining the surface shape based on the obtained plurality of images.
    Type: Application
    Filed: February 8, 2013
    Publication date: September 12, 2013
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Masaki NAKAJIMA
  • Patent number: 8502987
    Abstract: Disclosed herein is a method of determining the near angle scattering of a sample reflective surface comprising the steps of: a) splitting a beam of light having a coherence length of greater than or equal to about 2 meters into a sample beam and a reference beam; b) frequency shifting both the sample beam and the reference beam to produce a fixed beat frequency between the sample beam and the reference beam; c) directing the sample beam through a focusing lens and onto the sample reflective surface, d) reflecting the sample beam from the sample reflective surface through a detection restriction disposed on a movable stage; e) recombining the sample beam with the reference beam to form a recombined beam, followed by f) directing the recombined beam to a detector and performing heterodyne analysis on the recombined beam to measure the near-angle scattering of the sample reflective surface, wherein the position of the detection restriction relative to the sample beam is varied to occlude at least a portion of t
    Type: Grant
    Filed: February 1, 2011
    Date of Patent: August 6, 2013
    Assignee: The United States of America as Represented by the Administrator of the National Aeronautics and Space Administration
    Inventors: Russell A. Chipman, Brian J. Daugherty, Stephen C. McClain, Steven A. Macenka
  • Publication number: 20130155414
    Abstract: A measuring apparatus for measuring a position or a shape of a surface to be inspected includes a multi-wavelength interferometer and a control unit. The multi-wavelength interferometer includes an optical system that causes light to be inspected, which enters the surface to be inspected and is reflected by the surface to be inspected, and reference light to interfere with each other, a spectroscopic unit that divides interference light between the light to be inspected and the reference light into each wavelength, and a detector that detects the interference light and is provided for each divided interference light and an optical member that can adjust a position of a light guide portion that guides light from the spectroscopic unit to the detector. The control unit controls the optical member by using information related to inclination of the surface to be inspected to adjust the position of the light guide portion.
    Type: Application
    Filed: December 11, 2012
    Publication date: June 20, 2013
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: CANON KABUSHIKI KAISHA
  • Publication number: 20130100458
    Abstract: A multi-wavelength interferometer includes a beam splitter configured to split plural light fluxes into a reference beam and a measurement beam, a frequency shifter configured to shift a frequency of at least one of the reference beam and the measurement beam to make the frequencies of the reference beam and the measurement beam different from each other, an optical system configured to cause the measurement beam to be incident on a measurement surface and to cause the measurement beam reflected from the measurement surface to interfere with the reference beam to obtain interference light, a dividing unit configured to divide the interference light into a plurality of light beams, and a detection unit configured to detect the plurality of light beams divided by the dividing unit.
    Type: Application
    Filed: October 22, 2012
    Publication date: April 25, 2013
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: CANON KABUSHIKI KAISHA
  • Patent number: 8422026
    Abstract: The time delay (and therefore the OPD) between object and reference beams in an interferometer is manipulated by changing the spectral properties of the source. The spectral distribution is tuned to produce a modulation peak at a value of OPD equal to the optical distance between the object and reference arms of a Fizeau interferometer, thereby enabling the use of its common-axis configuration to carry out white-light measurements free of coherence noise. Unwanted interferences from other reflections in the optical path are also removed by illuminating the object with appropriate spectral characteristics. OPD scanning is implemented without mechanical means by altering the source spectrum over time so as to shift the peak location by a predetermined scanning step between acquisition frames. Finally, the spectrum is controlled on a pixel-by-pixel basis to create a virtual surface that matches the profile of a particular sample surface.
    Type: Grant
    Filed: June 15, 2010
    Date of Patent: April 16, 2013
    Inventor: Artur G. Olszak
  • Publication number: 20130088722
    Abstract: A measurement apparatus includes: a first light source which generates first light containing a scan section in which a wavelength is scanned between a first wavelength and a second wavelength; a second light source which generates second light having a third wavelength; a first detector and a second detector which respectively detect first and second interference signals generated by irradiating a reference surface and a test surface with the first and second light; a calculation unit which calculates, based on data of a phase of the second interference signal, one of the position and shape of the test surface by using the third wavelength as a measurement wavelength that determines a measurement range.
    Type: Application
    Filed: September 12, 2012
    Publication date: April 11, 2013
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Akihiro Yamada
  • Patent number: 8332016
    Abstract: The present invention improves projection displays of volume data. Using the Minimum Intensity Projection (MinIP), fluid filled regions or other regions of hyporeflective tissue are displayed. By limiting the projection to partial volumes within the volume, differences in the scattering intensity within specific regions are isolated. In this way, hyperreflectivity of weakly scattering tissue can be assessed.
    Type: Grant
    Filed: August 4, 2009
    Date of Patent: December 11, 2012
    Assignee: Carl Zeiss Meditec, Inc.
    Inventor: Paul F. Stetson
  • Patent number: 8264695
    Abstract: A method of aligning at least two wave shaping elements, a method of measuring a deviation of an optical surface from a target shape and a measuring apparatus for interferometrically measuring a deviation of an optical surface from a target shape.
    Type: Grant
    Filed: February 18, 2011
    Date of Patent: September 11, 2012
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ralf Arnold, Stefan Schulte, Bernd Doerband
  • Patent number: 8159678
    Abstract: A method of aligning at least two wave shaping elements, a method of measuring a deviation of an optical surface from a target shape and a measuring apparatus for interferometrically measuring a deviation of an optical surface from a target shape.
    Type: Grant
    Filed: February 18, 2011
    Date of Patent: April 17, 2012
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Ralf Arnold, Stefan Schulte, Bernd Doerband
  • Publication number: 20120081684
    Abstract: Disclosed are systems and methods for object inspection, in particular for inspection of reticles used in a lithography process. The method includes interferometrically combining a reference radiation beam with a probe radiation beam, and storing their complex field images. The complex field image of one object is then compared with that of a reference object to determine the differences. The systems and methods have particular utility in the inspection of a reticle for defects.
    Type: Application
    Filed: April 13, 2010
    Publication date: April 5, 2012
    Applicants: ASML Netherlands B.V., ASML Holding N.V.
    Inventors: Arie Jeffrey Den Oef, Yuli Vladimirsky, Yevgeniy Konstantinovich Shmarev, Luigi Scaccabarozzi, Robert Albert, Richard David Jacobs
  • Patent number: 7986414
    Abstract: A frequency scanning interferometer is arranged for simultaneously measuring multiple surfaces of a test object through a wide range of expected offsets. Knowledge of the expected locations of the test surfaces is compared with a sequence of ambiguity intervals based on a synthetic measurement wavelength to center the test surfaces within the ambiguity intervals.
    Type: Grant
    Filed: January 30, 2009
    Date of Patent: July 26, 2011
    Assignee: Corning Incorporated
    Inventors: Christopher Alan Lee, Mark Joseph Tronolone