For Dimensional Measurement (e.g., Thickness Gap, Alignment, Profile) Patents (Class 356/485)
  • Patent number: 10663589
    Abstract: A laser interferometer system includes a beam splitter to split a laser beam into first and second beam sets, a first retroreflector mounted to an object to reflect the first beam set, a first detecting device for detecting movements of the object in x-, y- and z-axis directions based on the reflected first beam set, a second retroreflector mounted to the object to reflect the second beam set, and a second detecting device for detecting rotations and movements of the object with respect to the y- and z-axis directions based on the reflected second beam set. The movements of the object in the z-axis direction obtained by the first and second detecting devices are used to obtain a rotation of the object with respect to the x-axis direction.
    Type: Grant
    Filed: April 1, 2019
    Date of Patent: May 26, 2020
    Assignee: National Yunlin University of Science and Technology
    Inventors: Yung-Cheng Wang, Lih-Horng Shyu, Chung-Ping Chang, Hung-Ta Shih, Pi-Cheng Tung
  • Patent number: 10571249
    Abstract: The invention relates to a device for optical measurement of a thickness of an intransparent layer on a substrate, comprising first means for optical distance measurement configured to measure a first distance between a first reference plane and a first surface of the intransparent layer, and second means for optical distance measurement configured to measure a second distance between a second reference plane and a second surface of the intransparent layer. The second means measures a third distance between the second reference plane and a surface of the substrate. The thickness of the intransparent layer is computed from the first distance and the second distance. The measurement of the third distance is used to take into account the influence of the optical effect of the substrate on the distance measurement of the second distance. The invention also relates to a method for optical measurement of a thickness of an intransparent layer on a substrate.
    Type: Grant
    Filed: July 22, 2019
    Date of Patent: February 25, 2020
    Assignee: PRECITEC OPTRONIK GMBH
    Inventors: Philipp Nimtsch, Simon Mieth
  • Patent number: 10378933
    Abstract: Encoder systems provide measurement and reference optical paths based on propagation in a common set of optical elements along paths that are displaced angularly or spatially. Associated measurement and reference beams are reflected by corner cubes to as to define first paths and second paths. The measurement and reference beams are combined to determine a work piece displacement in a manufacturing process.
    Type: Grant
    Filed: October 20, 2014
    Date of Patent: August 13, 2019
    Assignee: Nikon Corporation
    Inventor: Eric P. Goodwin
  • Patent number: 10347805
    Abstract: In various embodiments, a layer of organic encapsulant is provided over a surface of an ultraviolet (UV) light-emitting semiconductor die, and at least a portion of the encapsulant is exposed to UV light to convert at least some of said portion of the encapsulant into non-stoichiometric silica material. The non-stoichiometric silica material includes silicon, oxygen, and carbon, and a carbon content of the non-stoichiometric silica material is greater than 1 ppm and less than 40 atomic percent.
    Type: Grant
    Filed: February 16, 2018
    Date of Patent: July 9, 2019
    Assignee: CRYSTAL IS, INC.
    Inventors: Ken Kitamura, Masato Toita, Hironori Ishii, Yuting Wang, Leo J. Schowalter, Jianfeng Chen, James R. Grandusky
  • Patent number: 10330460
    Abstract: A calibration system for calibrating a tilt angle of the fast steering mirror includes a position sensing device configured to generate a beam of electromagnetic radiation, and a diffractive optical element, positioned between the position sensing device and the fast steering mirror, the diffractive optical element being configured to divide the input beam into a plurality of output beams directed to the fast steering mirror. The position sensing device is configured to determine a tilt angle of the fast steering mirror. A method to calibrate a tilt angle of the fast steering mirror is further disclosed.
    Type: Grant
    Filed: June 13, 2017
    Date of Patent: June 25, 2019
    Assignee: RAYTHEON COMPANY
    Inventors: Kyle Heideman, Andrew Bullard, Matthew E. Jenkins, John J. Anagnost
  • Patent number: 10267617
    Abstract: Method include using an apparatus to measure a first surface field, at a first surface of the apparatus, of an artifact having one or more surface features with known topography. The method includes determining a first focus metric at the first surface based on at least a portion of a first surface profile containing the one or more surface features. Methods include digitally transforming, the first surface field into a second surface field at a second surface of the apparatus, deriving, a second surface profile from the second surface field and computing a second focus metric for the second surface profile, and determining, based on two or more focus metric values, an optimum surface for evaluating the instrument transfer function. Method include determining the instrument transfer function of the apparatus based on at least a portion of the surface profile derived from the surface field of the optimum surface.
    Type: Grant
    Filed: December 19, 2016
    Date of Patent: April 23, 2019
    Assignee: Zygo Corporation
    Inventor: Leslie L. Deck
  • Patent number: 9846028
    Abstract: A film thickness measurement device 1A includes a light emission unit 10 for emitting light onto a measurement object 100, a light detection unit 20A for detecting the wavelength-dependent intensity of reflected light, and a film thickness calculation unit 30A for determining the film thickness of a first film 102 by comparing measured spectral reflectance obtained based on the detection result in the light detection unit 20A with theoretical spectral reflectance that takes into account front surface reflectance, front surface transmissivity, and back surface reflectance. The film thickness calculation unit 30A compares the measured spectral reflectance with a plurality of values of the theoretical spectral reflectance obtained by changing the front surface reflectance value, the front surface transmissivity value, and the back surface reflectance value, and determines the film thickness of the first film 102 based on the theoretical spectral reflectance closest to the measured spectral reflectance.
    Type: Grant
    Filed: October 24, 2014
    Date of Patent: December 19, 2017
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Kenichi Ohtsuka, Tetsuhisa Nakano
  • Patent number: 9817224
    Abstract: In one aspect, the present disclosure provides a system for Fourier ptychographic microscopy, the system comprising (i) an image capture apparatus including an objective lens, (ii) at least one processor, and (iii) data storage including program instructions stored thereon that when executed by the at least one processor, cause the system to: (a) capture, via the image capture apparatus, a plurality of initial images of an object, wherein each of the plurality of initial images of the object have a first resolution, and (b) process each of the plurality of initial images in Fourier space to generate a final image of the object having a second resolution, wherein the second resolution is greater than the first resolution.
    Type: Grant
    Filed: April 30, 2015
    Date of Patent: November 14, 2017
    Assignee: University of Connecticut
    Inventors: Guoan Zheng, Siyuan Dong
  • Patent number: 9797704
    Abstract: An interferometer includes a light source, a beam splitter, a reference reflector, a measuring reflector, a detection unit, and at least two transparent plane-parallel plates. The beam splitter splits a beam of rays into at least one measuring beam and at least one reference beam. Until being recombined, the measuring beam propagates in a measuring arm, and the reference beam propagates in a reference arm. The reference beam falls at least three times on the reference reflector located in the reference arm. The measuring reflector is disposed in the measuring arm and is joined to an object to be measured, which is movable along a measuring direction relative to the reference reflector. The measuring beam falls at least three times on the measuring reflector. At least one distance signal with regard to the position of the object to be measured is ascertainable from the interfering measuring and reference beams via the detection unit.
    Type: Grant
    Filed: July 24, 2015
    Date of Patent: October 24, 2017
    Assignee: DR. JOHANNES HEIDENHAIN GMBH
    Inventor: Markus Meissner
  • Patent number: 9778166
    Abstract: In a microparticle measurement device, a sample is passed through each channel in a multi-flow channel, and a predetermined linear area is illuminated with light. Measurement light originating from a microparticle in the sample, such as scattered or fluorescent light, is shaped into a parallel beam by an objective lens and passes through a first and second transmission portions. The beams transmitted through these two portions are converged as first and second measurement beams onto the same straight line by a cylindrical lens. The intensity of the interference light formed by these beams is detected with a detector. Meanwhile, the light emitted from the light source and passing through the multi-flow channel without hitting the microparticle falls through the objective lens onto a non-reflection portion and does not travel toward the cylindrical lens. Accordingly, only the interference light formed by the measurement beams is allowed to fall onto the detector.
    Type: Grant
    Filed: February 20, 2015
    Date of Patent: October 3, 2017
    Assignee: NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
    Inventor: Ichiro Ishimaru
  • Patent number: 9778196
    Abstract: A phase sensitive detection mechanism that uses electrical processing is realized, and an optical detection device, an optical detection method, and a program that are capable of detecting faint light at high speed and with high sensitivity are provided by a simple configuration. A light source section generates a first pulsed light. A filter section transmits a second pulsed light formed from a portion of a frequency spectrum exhibited by the first pulsed light, and reflects a third pulsed light formed from another portion of the frequency spectrum exhibited by the first pulsed light. A phase modulation section phase modulates the second pulsed light at plural phases. A multiplexing section produces a fourth pulsed light by multiplexing the third pulsed light with the second pulsed light phase modulated by the phase modulation section. A detector spectrally disperses and detects scattered light generated by radiating the fourth pulsed light onto a target object.
    Type: Grant
    Filed: February 10, 2015
    Date of Patent: October 3, 2017
    Assignee: National University Corporation Tokyo University of Agriculture and Technology
    Inventors: Takayuki Suzuki, Kazuhiko Misawa, Yuki Obara
  • Patent number: 9743831
    Abstract: The invention provides an apparatus and method for scanning, imaging and treating the retina of an eye. The apparatus (10) comprises a source of collimated light (14), a two-dimensional scanning device (16) having two axes of rotation (16a, 16b), wherein the axes of rotation (16a, 16b) are orthogonal and substantially planar, and wherein the source of collimated light (14) and the two-dimensional scanning device (16) combine to provide a two-dimensional collimated light scan from a point source (22). The apparatus (10) further comprises a scan transfer device (18), wherein the scan transfer device (18) has two foci (18a, 18b) and the point source (22) is provided at a first focus point (18a) of the scan transfer device (18) and an eye (12) is accommodated at a second focus point (18b) of the scan transfer device (18), and wherein the scan transfer device (18) transfers the two-dimensional collimated light scan from the point source (22) into the eye (12).
    Type: Grant
    Filed: June 2, 2011
    Date of Patent: August 29, 2017
    Assignee: OPTOS PLC
    Inventors: Dan Gray, Stephen Pemberton, Derek Swan, Martin Thomson
  • Patent number: 9696138
    Abstract: A scanning monochromatic spatial low-coherent interferometer (S-LCI) can be used to simultaneously measure geometric thickness and refractive index. The probe beam of the scanning S-LCI can be an off-axis converging single wavelength laser beam, and the decomposed incident angles of the beam on the sample can be accurately defined in the Fourier domain. The angle dependent phase shift of a plane parallel plate or other sample can be obtained in a single system measurement. From the angle dependent phase shift, the geometric thickness and refractive index of the sample can be simultaneously obtained. Additionally or alternatively, the S-LCI system can interrogate the sample to profile the location and refractive index of one or more layers within the sample using the disclosed techniques.
    Type: Grant
    Filed: July 31, 2012
    Date of Patent: July 4, 2017
    Assignee: University of Florida Research Foundation, Inc.
    Inventors: Xiaoke Wan, Jian Ge
  • Patent number: 9683831
    Abstract: A measurement apparatus including a housing having a first arm and a second arm spaced apart from the first arm to define a measurement zone therebetween, and a laser radar unit, wherein the laser radar unit emits a laser beam that is split into a first beam and a second beam, the first beam travels through the first arm, across the measurement zone and into the second arm, while the second beam travels through the second arm, across the measurement zone and into the first arm, thereby forming a closed optical path, and wherein the closed optical path includes a midpoint that is offset from the measurement zone such that the first beam travels a first optical path and the second beam travels a second, longer optical path when the closed optical path is broken by a part positioned in the measurement zone.
    Type: Grant
    Filed: March 23, 2015
    Date of Patent: June 20, 2017
    Assignee: The Boeing Company
    Inventor: John W. Palmateer
  • Patent number: 9657391
    Abstract: Systems and methods of controlling a deposition rate during thin-film fabrication are provided. A system as provided may include a chamber, a material source contained within the chamber, an electrical component to activate the material source, a substrate holder to support the multilayer stack and at least one witness sample. The system may further include a measurement device and a computational unit. The material source provides a layer of material to the multilayer stack and to the witness sample at a deposition rate controlled at least partially by the electrical component and based on a correction value obtained in real-time by the computational unit. In some embodiments, the correction value is based on a measured value provided by the measurement device and a computed value provided by the computational unit according to a model.
    Type: Grant
    Filed: May 8, 2014
    Date of Patent: May 23, 2017
    Assignee: HALLIBURTON ENERGY SERVICES, INC.
    Inventors: James M. Price, Aditya B. Nayak, David L. Perkins
  • Patent number: 9651359
    Abstract: The system includes a dual interferometer sub-system including a first and second channel. The system includes an illumination source. The illumination source includes a first laser source disposed along a first input path and a second laser source disposed along a second input path. The illumination sources includes a combiner-splitter element optically coupled to an output of the first laser source and an output of the second laser source and is configured to combine light of a first wavelength from the first laser source and light of a second wavelength from the second laser source. The combiner-splitter element is further configured to split the combined light into a first channel and a second channel of the dual interferometer sub-system, where the first and second each receive a portion of the light of the first wavelength and the light of the second wavelength.
    Type: Grant
    Filed: November 19, 2015
    Date of Patent: May 16, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Dengpeng Chen, Yi Zhang, Jie-Fei Zheng
  • Patent number: 9593938
    Abstract: Provided is a fifth step for obtaining a removal depth of a second electrode mixture layer (first opaque layer) corresponding to an integrated value from the integrated value of the value corresponding to the number of applying pulses integrated thus far, based on a correlation between the value corresponding to the number of applying pulses of pulse laser and the removal depth of the second electrode mixture layer grasped in advance, once it is determined that a white light applying target has changed from the second electrode mixture layer to a solid electrolyte layer (second opaque layer) and acquiring the removal depth as a thickness of the second electrode mixture layer.
    Type: Grant
    Filed: May 6, 2016
    Date of Patent: March 14, 2017
    Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
    Inventor: Masanori Miura
  • Patent number: 9581967
    Abstract: A holography imaging system includes a first laser, a second laser, a transmitter optical system, a receiver optical system, and a detector array. The first laser has a constant frequency, and the second laser has a non-constant frequency. The transmitter optical system can illuminate a target simultaneously using portions of the first and second laser signals. The receiver optical system can focus a returned light onto the detector array. A first and second illumination point sources can direct portions of the first and second laser signals onto the detector array. The first and second illumination point sources are located in-plane with a pupil of the receiver optical system. The system can detect simultaneously holograms formed on the detector array based on the returned light and the portions of the first and second laser signals directed by the first and second illumination point sources.
    Type: Grant
    Filed: January 7, 2015
    Date of Patent: February 28, 2017
    Assignee: Lockheed Martin Coherent Technologies, Inc.
    Inventor: Brian Krause
  • Patent number: 9476693
    Abstract: An apparatus enabling abnormality detection of a sample. A first interference optical system scans the sample with first signal light from a first sample optical path, making the first signal light interfere with first reference light from a first reference optical path, to detect first interference light. Optical path length difference between the first sample optical path and first reference optical path is changed based on the detection. A change in the optical path length difference is determined. A second interference optical system scans the sample with second signal light from a second sample optical path, making the second signal light interfere with second reference light from a second reference optical path to detect second interference light. Tomographic information of the sample based on detection of the second interference light is determined. A refractive index profile of the sample is obtained based on the change amount information and tomographic information.
    Type: Grant
    Filed: December 4, 2013
    Date of Patent: October 25, 2016
    Assignees: KABUSHIKI KAISHA TOPCON, The University of Electro-Communications
    Inventors: Akihiko Sekine, Eriko Watanabe
  • Patent number: 8992076
    Abstract: A dilatometer for measuring metallic samples. The dilatometer includes a sample holder configured to receive and clamp a sample, an induction coil arranged on the sample, the induction coil configured to heat the sample, and a sensor for measuring the temperature of the sample.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: March 31, 2015
    Assignee: Waters GmbH
    Inventor: Heinz-Ludwig Bahr
  • Publication number: 20140368830
    Abstract: The invention relates to an optical measuring device for acquiring in situ a difference in distance between a support and an edge region of an object to be measured. The optical measuring device has a measuring head with dual beam guide which directs a first measuring beam towards the support and a second measuring beam towards the edge region of the object to be measured. Means are provided for acquiring and forming reflection spectra of the first measuring beam which is directed towards the support and the second measuring beam which is directed towards the edge region of the object to be measured. The measuring device has a multi-channel measuring apparatus with one spectrometer line. An evaluation unit for the reflection spectra for acquiring the stage height between the support and the edge region of the object works together with a spectrometer and a display unit.
    Type: Application
    Filed: June 17, 2014
    Publication date: December 18, 2014
    Applicant: PRECITEC OPTRONIK GMBH
    Inventors: Berthold MICHELT, Matthias KUNKEL
  • Patent number: 8885150
    Abstract: A scatterometer, configured to measure a property of a substrate, includes a radiation source which produces a radiation spot on a target formed on the surface of the substrate, the size of the radiation spot being smaller than the target in one direction along the target, the position of the radiation spot being moved along the surface in a series of discrete steps. A detector detects a spectrum of the radiation beam reflected from the target and produces measurement signals representative of the spectrum corresponding to each position of the radiation spot. A processor processes the measurement signals produced by the detector corresponding to each position of the radiation spot and derives a single value for the property.
    Type: Grant
    Filed: February 18, 2009
    Date of Patent: November 11, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Henricus Petrus Maria Pellemans, Arie Jeffrey Den Boef
  • Patent number: 8742318
    Abstract: In a tool length measuring method measuring a length of a tool based on a movement amount of the tool from a predetermined position when the tool is moved from the predetermined position in a predetermined direction and interrupts a laser beam, the movement of the tool in a direction in which the tool approaches a main body of a laser device is stopped when a static signal indicating that the tool is interrupting the laser beam is detected.
    Type: Grant
    Filed: July 8, 2011
    Date of Patent: June 3, 2014
    Assignee: DMG Mori Seiki Co., Ltd.
    Inventors: Satoshi Miyamoto, Takayuki Nishioka
  • Patent number: 8743346
    Abstract: The present invention provides an inexpensive range image sensor and etc. A range image sensor comprises diffractive optical elements and on which are formed diffractive gratings that change a traveling direction of incident parallel light so that in a coordinate space defined by a xyz-axis, the incident parallel light is split into split beams, and angles formed by the x-axis and line segments determined by projected light spots formed by the split beams on a predetermined projection plane intersecting the z-axis become predetermined angles. Furthermore, the range image sensor is provided with a distance determining unit for determining distances to the projected light spots on the basis of the tilting with respect to the x-axis of the line segments determined by the projected light spots formed on the object by the split beams.
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: June 3, 2014
    Assignee: Casio Computer Co., Ltd.
    Inventor: Hideaki Inoue
  • Patent number: 8736823
    Abstract: Analysis and characterization of semiconductor and free-metal devices using a plurality of “live” and stored interference patterns or data detected to determine or generate two-dimensional or three-dimensional information of at least one internal stress or signal, or determining the effects thereof of internal or external stresses acting upon or within the electrical signals applied to a device under test or evaluation having exterior surfaces, interior structures, electronic features as well as determining the effects thereof of chemicals, bioelectric materials, or substances, placed adjacent to the surface of the devices under test.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: May 27, 2014
    Assignee: Attofemto, Inc.
    Inventor: Paul L. Pfaff
  • Patent number: 8670128
    Abstract: A shape determining device (X) splits the original light beam from a light source (Y) into two light beams, directs the light beams to the front and back surfaces of the object (1) to be determined, and performs optical heterodyne interference using the split light beams at the front and back surfaces of the object (1) to be determined. In the shape determining device (X), each of the split light beams is further split into a main light beam and a subordinate light beam, the subordinate light beam interferes with the main light beam at each of the front and back surfaces before and after the illumination of the object (1) to be determined, the signals after the interference are phase-detected, and the difference between the phases acquired by the phase detection is detected at each of the front and back surfaces of the object (1) to be determined.
    Type: Grant
    Filed: January 26, 2010
    Date of Patent: March 11, 2014
    Assignee: Kobe Steel, Ltd.
    Inventors: Masato Kannaka, Eiji Takahashi, Masakazu Kajita
  • Patent number: 8665449
    Abstract: The invention relates to a system and to a corresponding method for optical coherence tomography having an interferometer (10) which has a beam splitter (13), a first reflector (11) and a reflector (12) the optical distance (I) of which from the beam splitter (13) is changeable by a speed (v), and a detector (30) for collecting light which is reflected by a specimen (1) to be examined. In order to reduce the times required for the most reliable possible recording of interference patterns, provision is made such that the intensity of the light (14 or 4) injected into the interferometer (10) or emitted by the interferometer (10) is modulated with a modulation frequency (fM) which is not equal to the Doppler frequency (fD), the Doppler frequency (fD) being given by twice the ratio of the speed (v) of the change of the optical distance (I) between the reflector (12) and the beam splitter (13) to the average wavelength (?0) of the injected light (14): fM?fD=2·v/?0.
    Type: Grant
    Filed: February 20, 2008
    Date of Patent: March 4, 2014
    Assignee: Agfa HealthCare NV
    Inventors: Rainer Nebosis, Rainer Scheunemann
  • Patent number: 8654340
    Abstract: The disclosure relates to a detection device for imaging an object, that comprises: a laser cavity for transmitting an original light signal at an original wavelength towards the object in order to generate an evanescent wave at the surface of the object; a conversion means adapted for converting the evanescent wave into a progressive signal; a re-injection means adapted for injecting the progressive signal into the laser cavity in order to generate interference inside the laser cavity between the progressive signal and the original light signal; a detection means adapted for detecting the interference in order to determine the characteristics of the object; characterized in that the device includes a wavelength modification means adapted so that the wavelength of the progressive signal injected into the laser cavity is different from the original wavelength.
    Type: Grant
    Filed: September 3, 2008
    Date of Patent: February 18, 2014
    Assignees: Centre National de la Recherche Scientifique (CNRS), Ecole Nationale Superieure d'Ingenieurs (ENSI)
    Inventors: Sylvain Girard, Hervé Gilles, Mathieu Laroche
  • Patent number: 8537213
    Abstract: A method for measuring a via bottom profile is disclosed for obtaining a profile of a bottom of a via in a front side of a substrate. In this method, an infrared (IR) light source is transmitted from the back of the substrate to the bottom of the via through an objective by using an IR-microscope, and lights scattered from the bottom of the via are acquired by an image capturing device to generate an image, where the image displays a diameter (2Ea) of the via bottom profile and a diameter (2Ec) of a maximum receivable base area of the via for the IR-microscope. Thereafter, by using an elliptic equation, a minor axis radius thereof (Eb) is obtained, and thus the via bottom profile is obtained from a radius (Ea) of the via bottom profile and the minor axis radius (Eb) of the elliptic equation.
    Type: Grant
    Filed: December 28, 2010
    Date of Patent: September 17, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Deh-Ming Shyu, Yi-Sha Ku, Wei-Te Hsu
  • Patent number: 8432553
    Abstract: Phase differences associated with a defocused wavefront can be determined from a single color image. The color image, which is a measurement of intensity as a function of wavelength, is used to calculate the change in intensity with respect to wavelength over the image plane. The change in intensity can then be used to estimate a phase difference associated with the defocused wavefront using two-dimensional fast Fourier transform solvers. The phase difference can be used to infer information about objects in the path of the defocused wavefront. For example, it can be used to determine an object's shape, surface profile, or refractive index profile. It can also be used to calculate path length differences for actuating adaptive optical systems. Compared to other techniques, deriving phase from defocused color images is faster, simpler, and can be implemented using standard color filters.
    Type: Grant
    Filed: October 6, 2010
    Date of Patent: April 30, 2013
    Assignee: Massachusetts Institute of Technology
    Inventors: Laura A. Waller, George Barbastathis
  • Patent number: 8405835
    Abstract: The present invention relates to a scanning microscope using a heterodyne interferometer, which can be used for mapping or imaging complex optical parameters such as physical structures and material properties of a sample under test. The heterodyne interferometer is designed to provide in- and quadrature-phase interference signal which can be used for extracting the phase and amplitude change induced on the probe beam. The phase and the amplitude of the probe beam, which is reflected from or transmitted through the sample, are modified by the physical structures and material properties of the sample. Therefore, by scanning the probe beam, local variations of the phase and amplitude can be mapped, and, thereby, three-dimensional microscopic physical structures and material properties can be imaged by processing the phase and amplitude values.
    Type: Grant
    Filed: January 29, 2010
    Date of Patent: March 26, 2013
    Assignee: Industry-University Cooperation Foundation Sogang University
    Inventors: Kyuman Cho, Kang-Hyuk Kwon
  • Patent number: 8379219
    Abstract: A compound common-path interferometer including first and second measurement arms for measuring a test object is arranged so that a reference optic of the first measurement arm is disconnected from a remainder of the first measurement arm and a coupling between the reference optics of the first and second measurement arms forms a monolithic measurement cavity for maintaining reference surfaces of the reference optics at a fixed spacing and orientation. Separate supports are provided for the monolithic measurement cavity and the remainder of the first measurement arm.
    Type: Grant
    Filed: May 27, 2011
    Date of Patent: February 19, 2013
    Assignee: Corning Incorporated
    Inventors: John Weston Frankovich, Christopher Alan Lee, Michael Joseph Litzenberger
  • Patent number: 8300232
    Abstract: A method of measuring a thickness of a coating on a substrate material. A first pulse of monochromatic light having a predetermined first wavelength is emitted toward the coating and substrate material. A second pulse of monochromatic light having a predetermined second wavelength is emitted toward the coating and substrate material, the second wavelength being different than the first wavelength. A first elapsed time is measured from emission of the first pulse of light to reception of a reflection of the first pulse of light from a surface of the substrate material at an interface with the coating. A second elapsed time is measured from emission of the second pulse of light to reception of a reflection of the second pulse of light from an outer surface of the coating. A thickness of the coating is determined as a function of a difference between the first and second elapsed times.
    Type: Grant
    Filed: August 19, 2009
    Date of Patent: October 30, 2012
    Assignee: Siemens Energy, Inc.
    Inventors: David G. Sansom, David B. Allen, Anirudha Vaidya
  • Publication number: 20120257213
    Abstract: An apparatus and method for determining a depth of a region having a high aspect ratio that protrudes into a surface of a semiconductor wafer are provided. The apparatus comprises a multi-wavelength light source, a semiconductor wafer holder for holding a semiconductor wafer, a head for directing the light source onto the semiconductor wafer, a spectrometer for collecting light comprising multiple wavelengths reflected from the semiconductor wafer and analysis means for determining a depth of the region from an interference pattern of light reflected from the semiconductor wafer by performing Fourier domain optical coherence tomography.
    Type: Application
    Filed: April 5, 2012
    Publication date: October 11, 2012
    Applicant: PRECITEC OPTRONIK GMBH
    Inventor: Martin Schönleber
  • Patent number: 8248614
    Abstract: An optical system performs imaging in a transmissive and reflective mode. The system includes an optical interferometer that generates interference phenomena between optical waves to measure multiple distances, thicknesses, and indices of refraction of a sample. Measurements are made through a galvanometer that scans a pre-programmed angular arc. An excitation-emission device allows an electromagnetic excitation and emission to pass through an objective in optical communication with the sample. An electromagnetic detector receives the output of the optical interferometer and the excitation-emission device to render a magnified three dimensional image of the sample.
    Type: Grant
    Filed: March 16, 2009
    Date of Patent: August 21, 2012
    Assignee: UT-Battelle, LLC
    Inventors: Christopher J. Mann, Philip R. Bingham, Shaun S. Gleason
  • Publication number: 20110211197
    Abstract: The disclosure relates to a detection device for imaging an object, that comprises: a laser cavity for transmitting an original light signal at an original wavelength towards the object in order to generate an evanescent wave at the surface of the object; a conversion means adapted for converting the evanescent wave into a progressive signal; a re-injection means adapted for injecting the progressive signal into the laser cavity in order to generate interference inside the laser cavity between the progressive signal and the original light signal; a detection means adapted for detecting the interference in order to determine the characteristics of the object; characterised in that the device includes a wavelength modification means adapted so that the wavelength of the progressive signal injected into the laser cavity is different from the original wavelength.
    Type: Application
    Filed: September 3, 2008
    Publication date: September 1, 2011
    Applicant: CENTRE NATIONAL DE RECHERCHE SCIENTIFIQUE (CNRS)
    Inventors: Sylvain Girard, Hervé Gilles, Mathieu Laroche
  • Patent number: 7986413
    Abstract: Methods and apparatus are provided employing rapid scanning continuous wave terahertz spectroscopy and imaging for the non-destructive evaluation of materials such as animal hides and natural cork, and explosive detection, concealed weapon detection, and drug detection. A system employing an aperiodic detector array and implementing phase modulation at 100 kHz significantly reduces the imaging time and enables interferometric images of a THz point source to be obtained at several frequencies between 0.3 and 0.95 THz.
    Type: Grant
    Filed: January 14, 2009
    Date of Patent: July 26, 2011
    Assignee: New Jersey Institute of Technology
    Inventor: John Francis Federici
  • Patent number: 7978336
    Abstract: An optical system includes more than two optical interferometers that generate interference phenomena between optical waves to measure a plurality of distances, a plurality of thicknesses, and a plurality of indices of refraction of a sample. An electromagnetic detector receives an output of the optical interferometers to render a magnified image of at least a portion of the sample. A controller reduces or eliminates undesired optical signals through a hierarchical phase unwrapping of the output of the electromagnetic detector.
    Type: Grant
    Filed: March 16, 2009
    Date of Patent: July 12, 2011
    Assignee: UT-Battelle, LLC
    Inventors: Christopher J. Mann, Philip R. Bingham
  • Publication number: 20110157595
    Abstract: An angular displacement of an object is measured interferometrically by splitting a laser beam into a reference beam and a measuring beam. The reference beam is directed at a stationary reference retroreflector and then a phase shift detector. The measuring beam is directed at a rotatable reflective surface of the object and then a stationary measuring retroreflector and then back to the rotatable reflective surface and then to the phase shift detector such that the phase shift detector measures an angular displacement of the rotatable reflective surface when the length of the path of the measuring beam changes when the rotatable reflective surface is displaced.
    Type: Application
    Filed: December 30, 2009
    Publication date: June 30, 2011
    Inventors: William S. Yerazunis, Richard C. Waters
  • Patent number: 7969578
    Abstract: An apparatus and method are provided. In particular, at least one first electro-magnetic radiation may be provided to a sample and at least one second electro-magnetic radiation can be provided to a non-reflective reference. A frequency of the first and/or second radiations varies over time. An interference is detected between at least one third radiation associated with the first radiation and at least one fourth radiation associated with the second radiation. Alternatively, the first electro-magnetic radiation and/or second electro-magnetic radiation have a spectrum which changes over time. The spectrum may contain multiple frequencies at a particular time. In addition, it is possible to detect the interference signal between the third radiation and the fourth radiation in a first polarization state. Further, it may be preferable to detect a further interference signal between the third and fourth radiations in a second polarization state which is different from the first polarization state.
    Type: Grant
    Filed: June 13, 2008
    Date of Patent: June 28, 2011
    Assignee: The General Hospital Corporation
    Inventors: Seok-Hyun Yun, Brett E. Bouma, Guillermo J. Tearney, Johannes Fitzgerald De Boer
  • Publication number: 20110122414
    Abstract: An interferometric system for measuring surfaces of a measured object using an optical system. The optical system has a beam splitter, which directs measuring beams in a first beam path and measuring beams in a second beam path onto the surfaces of the measured object with the aid of two mirrors. The beam paths which are formed by the light beams which are reflected on the surfaces at least partially overlap in an area having identical beam direction. In this manner, measured surfaces of the measured object are at least partially imaged on an identically irradiated surface of a detector, such as an image recorder.
    Type: Application
    Filed: April 16, 2009
    Publication date: May 26, 2011
    Inventors: Matthias Fleischer, Pawel Drabarek
  • Patent number: 7923672
    Abstract: A device for optically sensing a specimen with a large depth of field has a lighting module which illuminates a zone of the specimen during a predetermined measurement period with a pattern whose phase is modified in time during the measurement period, generating a specimen light to which a corresponding time-variable phase is imparted. The device also includes a detection module having a space-resolving detection zone which records the specimen zone and has multiple recording pixels, two analysis channels which can be connected to the recording pixels, and an analysis unit is connected to both analysis channels.
    Type: Grant
    Filed: September 14, 2006
    Date of Patent: April 12, 2011
    Assignee: Carl Zeiss Microimaging GmbH
    Inventor: Ralf Wolleschensky
  • Patent number: 7907285
    Abstract: Measurement of Brillouin scattered light is enabled without an optical receiver having a wide reception band.
    Type: Grant
    Filed: September 27, 2006
    Date of Patent: March 15, 2011
    Assignee: Advantest Corporation
    Inventors: Junichi Ukita, Takashi Matsumura
  • Patent number: 7894074
    Abstract: A laser Doppler vibrometer for vibration measurement that employs active feedback to cancel the effect of large vibration excursions at low frequencies, obviating the need to unwrap phase data. The Doppler shift of a reflective vibrating test object is sensed interferometrically and compensated by means of a voltage-controlled oscillator driving an acousto-optic modulator. For frequencies within the servo bandwidth, the feedback signal provides a direct measurement of vibration velocity. For frequencies outside the servo bandwidth, feedback biases the interferometer at a point of maximal sensitivity, thus enabling phase-sensitive measurement of the high-frequency excursions. Using two measurements, one with a low bandwidth and one with a high bandwidth, more than five decades of frequency may be spanned.
    Type: Grant
    Filed: December 19, 2008
    Date of Patent: February 22, 2011
    Assignee: The United States of America as represented by the Secretary of Commerce, NIST
    Inventor: John Lawall
  • Patent number: 7863763
    Abstract: The present invention relates to alignment marks for use on substrates, the alignment marks consisting of periodic 2-dimensional arrays of structures, the spacing of the structures being smaller than an alignment beam but larger than an exposure beam and the width of the structures varying sinusoidally from one end of an array to the other.
    Type: Grant
    Filed: November 22, 2005
    Date of Patent: January 4, 2011
    Assignee: ASML Netherlands B.V.
    Inventors: Richard Johannes Franciscus Van Haren, Sami Musa
  • Patent number: 7817283
    Abstract: Various systems and methods for analysis of optical pulses are provided. In one embodiment, an optical system is provided having an optical axis. The optical system includes a two-dimensional diffraction grating positioned along the optical axis, and a spectral filter positioned along the optical axis after the two-dimensional diffraction grating. The spectral filter is angularly offset about a vertical transverse angle associated with the optical system. The diffraction grating is angularly offset about the optical axis relative to the spectral filter, and an optical capture device positioned after the spectral filter.
    Type: Grant
    Filed: May 17, 2007
    Date of Patent: October 19, 2010
    Assignee: Georgia Tech Research Corporation
    Inventors: Pablo Gabolde, Rick Trebino
  • Patent number: 7796246
    Abstract: Provided are a three-dimensional image measuring method and apparatus for an LCD color filter automatic grinder. It is possible to measure a three-dimensional image of an LCD color filter, even though textures for recovering the three-dimensional image are insufficient, by irradiating illumination passed through a patterned filter to the LCD color filter. In addition, it is possible to measure a three-dimensional image of an LCD color filter by obtaining a plurality of image sequences along an optical axis of a camera composed of CCD or CIS. Illumination is irradiated to an LCD color filter to be measured through a patterned filter.
    Type: Grant
    Filed: December 26, 2006
    Date of Patent: September 14, 2010
    Assignee: Gwangju Institute of Science and Technology
    Inventor: Tae-Sun Choi
  • Patent number: 7790480
    Abstract: A process (300) is disclosed to measure predetermined wavelength reflectance spectra of a photo resist coated wafer (305,310,315,320) at a nominal thickness. After coating, the predetermined wavelength reflectance (325,330) is measured and the peak heights and valleys in the vicinity of the predetermined wavelength are tabulated. The relative swing ratio is computed (335) as the average peak height of the spectra at the exposure wavelength. This relative swing ratio is then compared to similar computations on other processes to determine which provides the best critical dimension (CD) control.
    Type: Grant
    Filed: October 19, 2004
    Date of Patent: September 7, 2010
    Assignee: NXP B.V.
    Inventor: David Ziger
  • Patent number: 7777891
    Abstract: Brillouin scattered light is used to measure the distribution of elasticity and viscosity in a measurement object without contact and in a noninvasive and simpler manner. Measuring light emitted from a light source is directed from a light probe onto a measurement object, and scattered light is received by the light probe. A control computer analyzes the light spectrum of scattered light received by the light probe, calculates at least one parameter selected from the center frequency and the linewidth of the elastic wave scattered components as viscoelastic information, matches the viscoelastic information with the position of a target area in the measurement object, and outputs image information. The position information of the target area in the measurement object is acquired by photographing light spots of guide light with a camera provided to the light probe.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: August 17, 2010
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventor: Takemi Hasegawa
  • Patent number: 7715017
    Abstract: An apparatus and a method for measuring very small separations between a transparent or semi-transparent first body and a second body, wherein one or more light sources produce light that is split into two distinct paths. One path is directed through the first body at two locations, one where it reflects from the interface at the separation to be measured, and another where the second body does not affect the reflection. The second path is directed at a frequency shifter, which shifts the frequency of the light. The two paths are recombined and interfereometric variations of intensity, substantially at the frequency of the shifter, are detected. The difference in phase between the measurement and reference areas with the second body not present is subtracted from the difference in phase between the measurement and reference areas with the second body present. The difference in differences yields the phase change that occurs when the second body is introduced.
    Type: Grant
    Filed: December 13, 2004
    Date of Patent: May 11, 2010
    Assignee: MicroPhysics Inc
    Inventor: Christopher Allen Lacey