Having Short Coherence Length Source Patents (Class 356/497)
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Patent number: 11803960Abstract: Global and local alignment energies are used in an image contrast metric. The image contrast metric can be used to find optical targets. Some pixels from a gradient magnitude image and a context range image from an optical image can be used to determine the image contrast metric. A heatmap from the image contrast metrics across part of a wafer can then be used to make a list of targets. Upper and lower confidence values can be applied to rank the available targets.Type: GrantFiled: June 22, 2021Date of Patent: October 31, 2023Assignee: KLA CorporationInventors: Huan Jin, Xiaochun Li, Sangbong Park, Zhifeng Huang
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Patent number: 11779211Abstract: Disclosed is a fluorescent fundus camera which is one kind of ophthalmological diagnostic equipment, using a blue excitation light beam when a contrast medium appears in the retinal vessels. When an abnormal blood vessel is present, the contrast medium leaks into the retina or appears as color in tissues surrounding the retina, and the presence of damage to the retina and the appearance of abnormal neovascularization can be found.Type: GrantFiled: March 13, 2019Date of Patent: October 10, 2023Assignee: AIINSIGHT INC.Inventors: Hanjo Kwon, Keun Heung Park
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Patent number: 11774289Abstract: A microelectromechanical (MEMS) interferometer is provided. The MEMS interferometer includes a pair of movable mirrors that are positioned along perpendicular axes, wherein each of the pair of movable mirrors is coupled to a mechanism. The mechanism includes an electrostatic actuator driving a displacement amplification mechanism, and the displacement amplification mechanism driving each of the pair of the movable mirrors. The MEMS interferometer includes a beam splitter that is positioned at an intersection of the perpendicular axes extending through each movable mirror and the beam splitter. The MEMS interferometer also includes a metasurface microbolometer placed in line with the beam splitter to measure an intensity of a recombined beam from the pair of movable mirrors.Type: GrantFiled: November 2, 2021Date of Patent: October 3, 2023Assignee: Saudi Arabian Oil CompanyInventor: Dwight W. Swett
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Patent number: 11747204Abstract: A system includes first and second radiation sources, first and second detectors, a signal digitizer, a controller, and an analyzer. The first and second radiation sources generate respective first and second beams of radiation to irradiate a target. The first beam and second beams each include a first wavelength operated at a first modulation frequency and a second wavelength operated at a second modulation frequency. The first and second detectors each include a photo-sensitive element that generate first or second detection signals, a Faraday shielding enclosure, a signal amplifier, and a frequency mixer to frequency-adjust the first or second detection signals. The controller provides timing information to inform an activation scheme of the first and second radiation sources and corresponding radiation detection events at the first and second detectors. The analyzer analyzes the first and second detection signals and determines at least amplitude and phase information of the scattered radiation.Type: GrantFiled: August 4, 2021Date of Patent: September 5, 2023Assignee: The Johns Hopkins UniversityInventors: Scott M. Hendrickson, Jeremiah J. Wathen, Michael J. Fitch, David W. Blodgett, Vincent R. Pagan
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Patent number: 11737662Abstract: Disclosed is a visual imaging device based on PS-OCT for early demineralization and caries of dental hard tissues, comprising a laser light source for emitting a laser light, a coupler for receiving and dividing the laser light emitted by the laser light source into a reference laser light and a detection laser light; wherein the reference laser light backtracking to the coupler and the detection laser light backtracking to the coupler are coupled and then passed through a transmission grating and a convex lens to input as an optical signal into a linear CCD detector for converting the optical signal into an electrical signal which is then input to a computer control system and collected by a built-in capture card; and the computer is configured to perform a three-dimensional reconstruction of an image and perform two-dimensional cross-section image analysis; and the computer control system is connected to the scanning galvanometer to control a vibration of the scanning galvanometer.Type: GrantFiled: February 26, 2021Date of Patent: August 29, 2023Assignee: XUANWU HOSPITAL, CAPITAL MEDICAL UNIVERSITYInventors: Ying Zhao, Yuhao Bai
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Patent number: 11733034Abstract: A fast measurement method for micro-nano deep groove structure based on white light interference, including: establishing a white light interference system, using the white light interference system to measure the structure of the groove, the CCD camera collects and obtains multiple groups of groove interferograms and the serial number corresponding to each groove interferogram in each group; processing each group of groove interferograms of the groove sample to obtain the maximum contrast of each group of groove interferograms and the 3D reconstruction diagram of the local structure; extracting the interface reconstruction diagram in the 3D reconstruction diagram of the local structure according to each group of the groove interferograms; after splicing the interface reconstruction diagrams corresponding to all groups of groove interferograms, obtaining a 3D structural reconstruction diagram of the groove sample, and measuring the depth and width of the groove sample according to the 3D structural reconstrucType: GrantFiled: December 15, 2022Date of Patent: August 22, 2023Assignee: ZHEJIANG UNIVERSITYInventors: Kexin Zhang, Yiyong Liang, Guozhong Li
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Patent number: 11727561Abstract: Automated and objective methods for quantifying a retinal characteristic include segmenting an optical coherence tomography retinal image into a plurality of layered retinal regions, and quantifying the retinal characteristic for each region as normalized to a range defined by the characteristic value in the vitreous region and in the retinal pigment epithelium region. Such methods are useful for detecting occult ocular pathology, diagnosing ocular pathology, reducing age-bias in OCT image analysis, and monitoring efficacy ocular/retinal disease therapies.Type: GrantFiled: December 30, 2020Date of Patent: August 15, 2023Assignee: University of Louisville Research Foundation, Inc.Inventors: Shlomit Schaal, Ayman El-Baz, Amir Reza Hajrasouliha
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Patent number: 11716985Abstract: A method for remediating developmentally delayed plants within a field of crops using at least one work vehicle during a field operation. The method comprises identifying delayed plants within the field with a sensor on the work vehicle and generating, with a processor, location data associated with the location of the delayed plant with the field. Upon arriving at the location of the delayed plant with the work vehicle, the delayed plant is remediated.Type: GrantFiled: February 24, 2022Date of Patent: August 8, 2023Assignee: Deere & CompanyInventors: Noel W. Anderson, Larry L. Hendrickson
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Patent number: 11713960Abstract: A method for measuring a surface of an object including at least one structure using low coherence optical interferometry, the method including the steps of acquiring an interferometric signal at a plurality of measurement points in a field of view and, for at least one measurement point, attributing the interferometric signal acquired to a class of interferometric signals from a plurality of classes, each of the classes being associated with a reference interferometric signal representative of a typical structure; and analysing the interferometric signal to derive therefrom an item of information on the structure at the measurement point, as a function of its class.Type: GrantFiled: November 28, 2019Date of Patent: August 1, 2023Assignee: UNITY SEMICONDUCTORInventors: Jean-François Boulanger, Isabelle Bergoënd
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Patent number: 11692906Abstract: A method for determining geometrical parameters of a soft contact lens comprises the steps of providing an OCT imaging device comprising an OCT light source; providing a soft contact lens arranging the soft contact lens relative to the OCT imaging device so light coming from the OCT light source impinges on the back surface of the soft contact lens; generating a three-dimensional OCT image of the soft contact lens; from the three-dimensional OCT image determining a plurality of edge points located on the edge of the soft contact lens, connecting adjacent ones of the edge points by individual straight lines; summing up the lengths of all individual straight lines to a length U of the approximated circumference of the soft contact lens; from the length U determining a diameter D of the lens according to D=U/?.Type: GrantFiled: July 27, 2021Date of Patent: July 4, 2023Assignee: Alcon Inc.Inventor: Thomas Tonn
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Patent number: 11686572Abstract: The present disclosure provides an OCT imaging system to reduce or eliminate frequency-domain aliasing artifacts. The frequency is shifted using a carrier frequency to define a sampling range substantially centered on the carrier frequency. An image of the sample is generated from a displayed imaging range that consists of a subset of the frequencies within the sampling range. Furthermore, the system may be configured to determine the carrier frequency such that a Nyquist frequency corresponding to the shifted frequency is extended beyond either an upper or a lower bound of an OCT quality envelope corresponding to the first portion of light. Additionally, the carrier frequency may be determined such that a lower bound of the OCT quality envelope is greater or less than a zero-frequency DC limit.Type: GrantFiled: October 12, 2021Date of Patent: June 27, 2023Assignee: Ninepoint Medical, Inc.Inventors: Eman Namati, Muhammad Al-Qaisi, Matthew A. Sinclair, Benedikt Graf, David Vader
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Patent number: 11650406Abstract: A microscopic imaging method of phase contrast (PC) and differential interference contrast (DIC) based on the transport of intensity equation (TIE) includes capturing three intensity images along the optical axis; solving the TIE by deconvolution to obtain the quantitative phase; obtaining the intensity image under the DIC imaging mode according to the DIC imaging principle; and obtaining the corresponding phase image of PC imaging mode according to the PC imaging principle. The method can endow the bright-field microscope with the ability to realize PC and DIC imaging without complex modification of the traditional bright-field microscope. In addition, it has the same imaging performance as the phase contrast microscope and differential interference contrast microscope, which are expensive, complex-structure, and has strict environmental conditions.Type: GrantFiled: July 5, 2019Date of Patent: May 16, 2023Assignee: NANJING UNIVERSITY OF SCIENCE AND TECHNOLOGYInventors: Chao Zuo, Qian Chen, Jiasong Sun, Yuzhen Zhang, Guohua Gu
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Patent number: 11638520Abstract: An ophthalmic imaging system including an ocular lens and an optical coherence tomography (OCT) imaging module is provided. The OCT imaging module is able to image both retina and anterior segment of eyes by switching a lens group into and out of the OCT light path. The OCT imaging module includes a retina imaging mode and an anterior segment imaging mode. In the retina imaging mode, there exists an intermediate image plane located between the ocular lens and the OCT imaging module. From the retina imaging mode, anterior segment imaging is achieved by inserting a switching lens group into the optical path inside the OCT imaging module or replacing the whole OCT imaging module of the retina mode, wherein, after the insertion, there exist a new intermediate image plane located inside the OCT imaging module and a conjugate of the entrance pupil of the OCT imaging module located between the ocular lens and the OCT imaging module.Type: GrantFiled: April 20, 2020Date of Patent: May 2, 2023Assignee: SVISION IMAGING LIMITEDInventors: Heng Wu, Xianzhao Peng, Nanfan Cheng
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Patent number: 11631185Abstract: A method for non-contact modal analysis uses an optical sensing device such as a video camera. Unlike traditional modal analysis, requiring accelerometers or force sensors to measure the modal characteristics of a structure, the inventive system uses pixel displacement measurements from the optical sensor to characterize the modal properties of the device under test. The input or reference signal is measured by an independent data acquisition system and is synchronized with the response motion captured in video recordings.Type: GrantFiled: August 5, 2022Date of Patent: April 18, 2023Assignee: RDI TECHNOLOGIES, INC.Inventors: Kenneth Ralph Piety, Jeffrey R. Hay, Douglas A. Mann
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Patent number: 11602276Abstract: A target image to be corrected is generated by arranging partial images acquired by scanning a tissue of a living body with light and temporally continuously receiving the light from the tissue. A processor of a medical image processing device performs detecting position shift amounts, acquiring a component, and correcting. In the process of detecting position shift amounts, the processor detects the position shift amounts between the partial images (S3). In the process of acquiring, the processor acquires an assumed result of at least one of a component in the position shift amount caused by movement of the tissue, and a component in the position shift amount caused by a shape of the tissue (S4). In the process of correcting, the processor corrects a position of each of the partial images based on the component in the position shift amount (S7).Type: GrantFiled: March 30, 2020Date of Patent: March 14, 2023Assignee: NIDEK CO., LTD.Inventors: Yoshiki Kumagai, Ryosuke Shiba
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Patent number: 11602271Abstract: An OCT imaging system may include an OCT light source operable to emit an OCT light beam, and a beam splitter operable to split the OCT light beam into a sample beam, transferred to a sample arm waveguide, and a reference beam, transferred to a reference arm waveguide. The sample arm waveguide and the reference arm waveguide may be coupled together within a cladding, wherein the cladding improves a calibration of a generated OCT image by fixing axial movement of the sample arm and reference arm waveguides relative to one another. By routing long reference and sample arm waveguide fibers together in the OCT system using a sheath/cladding, OCT image offset due to asymmetrical fiber stretching can be minimized or eliminated.Type: GrantFiled: February 25, 2019Date of Patent: March 14, 2023Assignee: Alcon Inc.Inventors: Guy Holland, Muhammad K Al-Qaisi
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Patent number: 11604060Abstract: Examples of the disclosure relate to an apparatus (101), a wearable electronic device and an optical arrangement for optical coherence tomography. The apparatus comprises an optical coherence tomography system (103) and an optical arrangement (105). The optical arrangement comprises at least one means for beam shaping (109) configured to shape a beam of light from the optical coherence tomography system. The optical arrangement also comprises at least one mirror (111) positioned so that light from the means for beam shaping is incident on the at least one mirror. The at least one mirror is configured to move in at least one direction relative to the optical coherence tomography system.Type: GrantFiled: February 20, 2019Date of Patent: March 14, 2023Assignee: Nokia Technologies OyInventors: Michael Eggleston, Mark Earnshaw, Cristian Bolle, Flavio Pardo
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Patent number: 11596303Abstract: There is provided an imaging device (100) for imaging a target, the imaging device (100) comprising a Scheimpflug imaging system (102) and an Optical Coherence Tomography, OCT, imaging system (104), where the Scheimpflug imaging system (102) comprises a camera (112) and a lens system (108), and the OCT imaging system (104) comprises an imaging optical element and a detector (122). The imaging device (100) further comprises a light source (106) adapted to provide a light beam suitable for operation of the Scheimpflug imaging system (102) and the OCT imaging system (104). The lens system (108) of the Scheimpflug imaging (102) system is configured to provide an adjustable focal length.Type: GrantFiled: February 12, 2021Date of Patent: March 7, 2023Assignee: THE UNIVERSITY OF LIVERPOOLInventors: Yaochun Shen, Yalin Zheng, Samuel Lawman, Xiaoran Li
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Patent number: 11562919Abstract: Embodiments of systems and methods for measuring a surface topography of a semiconductor chip are disclosed. In an example, a method for measuring a surface topography of a semiconductor chip is disclosed. A plurality of interference signals and a plurality of spectrum signals are received by at least one processor. Each of the interference signals and spectrum signals corresponds to a respective one of a plurality of positions on a surface of the semiconductor chip. The spectrum signals are classified by the at least one processor into a plurality of categories using a model. Each of the categories corresponds to a region having a same material on the surface of the semiconductor chip. A surface height offset between a surface baseline and at least one of the categories is determined by the at least one processor based, at least in part, on a calibration signal associated with the region corresponding to the at least one of the categories.Type: GrantFiled: June 24, 2020Date of Patent: January 24, 2023Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Sicong Wang, Xiaoye Ding
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Patent number: 11549798Abstract: A measuring device determines a distance between a processing head for a laser processing system configured to process a workpiece with a laser beam and the workpiece. The measuring device includes an optical coherence tomograph to measure a distance between the processing head and workpiece. In the optical coherence tomograph, measuring light generated by a measuring light source and reflected by the workpiece interferes with measuring light reflected in a reference arm with two or more reference stages. The stages include a first reference stage configured such that the measuring light reflected therein travels a first optical path length, and a second reference stage configured such that the measuring light reflected therein travels a second optical path length different from the first length, wherein the measuring light reflected by the workpiece interferes with reflected measuring light of the first reference stage and reflected measuring light of the second reference stage.Type: GrantFiled: July 29, 2019Date of Patent: January 10, 2023Assignee: PRECITEC GMBH & CO. KGInventor: Matthias Strebel
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Patent number: 11543232Abstract: An apparatus for oral imaging has a light source energizable to generate a light frequency signal ranging from a minimum to a maximum frequency. An image acquisition apparatus scans the generated light frequency signal to successive positions on a sample surface and to combine a returned signal from each successive position with the generated light frequency signal. The image acquisition apparatus has a detector that obtains a beat frequency signal from the combined returned signal and the generated light frequency signal. A processor that is in signal communication with the detector generates a processed beat signal from the combined signals, wherein the processed beat signal is indicative of the distance from the tunable laser source to the sample surface at the corresponding position. A display is in signal communication with the processor and is energizable to display distance data according to the processed beat signal for each scanned position.Type: GrantFiled: January 5, 2017Date of Patent: January 3, 2023Assignee: DENTAL IMAGING TECHNOLOGIES CORPORATIONInventors: Chuanmao Fan, Victor C. Wong
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Patent number: 11536562Abstract: An analysis apparatus includes an acquisition part that acquires a plurality of interference images of the object to be measured from the interference measurement apparatus, a calculation part that calculates a sine wave component and a cosine wave component of an interference signal for each pixel in the plurality of interference images, respectively, an error detection part that detects an error between a first Lissajous figure constructed on the basis of the sine wave component and the cosine wave component for each pixel and an ideal second Lissajous figure, a correction part that corrects the sine wave component and the cosine wave component for each pixel on the basis of the error, and a geometry calculation part that calculates surface geometry of the object to be measured on the basis of the corrected sine wave component and cosine wave component.Type: GrantFiled: September 25, 2020Date of Patent: December 27, 2022Assignee: Mitutoyo Corp.Inventor: Shimpei Matsuura
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Patent number: 11530982Abstract: Fourier Transformation Spectrometer, FT Spectrometer, comprising: A double beam interferometer, comprising: At least one beam splitter unit (622; 623; 624, 625, 626, 627; 636; 673, 674, 675) for splitting an incident light beam (EB) of a spatially expanded object into a first partial beam (TB1) and a second partial beam (TB2); at least a first beam deflection unit (630; 641; 651; 661; 697) designed to deflect the first partial beam (TB1) at least a first and a second time, wherein the second beam deflection unit (630) is designed to also deflect the second partial beam (TB2) at least at first and a second time; or the double beam interferometer comprises a second beam deflection unit (642; 652; 662) designed to deflect the second partial beam (TB2) at least a first and a second time, wherein the beam deflection unit is also designed to at least partially spatially overlay the first partial beam (TB1) and the second partial beam (TB2), and the respectively first and second deflection of the first partial beamType: GrantFiled: March 30, 2021Date of Patent: December 20, 2022Inventors: Klaus Körner, Alois M. Herkommer
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Patent number: 11512941Abstract: An analysis apparatus includes an acquisition part that acquires a plurality of interference images based on lights having a plurality of different wavelengths from an interference measurement apparatus, a removing part that outputs an interference component by removing a non-interference component included in an interference signal for each pixel in the plurality of the interference images, a conversion part that generates an analysis signal by performing a Hilbert transformation on the interference component, and a calculation part that calculates a distance between a reference surface and a surface of an object to be measured by specifying a phase gradient of a wavelength of light radiated onto the reference surface and the surface of the object to be measured on the basis of the interference component and the analysis signal.Type: GrantFiled: September 25, 2020Date of Patent: November 29, 2022Assignee: MITUTOYO CORPORATIONInventor: Shimpei Matsuura
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Patent number: 11501420Abstract: Aspects relate to reconstructing phase images from brightfield images at multiple focal planes using machine learning techniques. A machine learning model may be trained using a training data set comprised of matched sets of images, each matched set of images comprising a plurality of brightfield images at different focal planes and, optionally, a corresponding ground truth phase image. An initial training data set may include images selected based on image views of a specimen that are substantially free of undesired visual artifacts such as dust. The brightfield images of the training data set can then be modified based on simulating at least one visual artifact, generating an enhanced training data set for use in training the model. Output of the machine learning model may be compared to the ground truth phase images to train the model. The trained model may be used to generate phase images from input data sets.Type: GrantFiled: September 22, 2020Date of Patent: November 15, 2022Assignees: PerkinElmer Cellular Technologies Germany GmbH, PerkinElmer Health Sciences Canada, Inc.Inventors: Kaupo Palo, Abdulrahman Alhaimi
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Patent number: 11489313Abstract: An apparatus includes a wavelength-tunable laser and an electronic controller. The electronic controller is configured to control the wavelength-tunable laser such that an output wavelength of the wavelength-tunable laser performs a zigzag in time. The wavelength-tunable laser is capable of rapidly and densely scanning wavelengths across a broad spectral range.Type: GrantFiled: December 31, 2019Date of Patent: November 1, 2022Assignee: NOKIA TECHNOLOGIES OYInventor: Brian Stern
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Patent number: 11471039Abstract: Methods and apparatus are presented for obtaining high-resolution 3-D images of a sample over a range of wavelengths, optionally with polarisation-sensitive detection. In preferred embodiments a spectral domain OCT apparatus is used to sample the complex field of light reflected or scattered from a sample, providing full range imaging. In certain embodiments structured illumination is utilised to provide enhanced lateral resolution. In certain embodiments the resolution or depth of field of images is enhanced by digital refocusing or digital correction of aberrations in the sample. Individual sample volumes are imaged using single shot techniques, and larger volumes can be imaged by stitching together images of adjacent volumes.Type: GrantFiled: January 13, 2020Date of Patent: October 18, 2022Assignee: Cylite Pty LtdInventors: Steven James Frisken, Trevor Bruce Anderson, Armin Georg Segref, Grant Andrew Frisken
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Patent number: 11464408Abstract: Retinal imaging systems and related methods employ a user specific approach for controlling the reference arm length in an optical coherence tomography (OCT) imaging device. A method includes restraining a user's head relative to an OCT imaging device. A reference arm length adjustment module is controlled to vary a reference arm length to search a user specific range of reference arm lengths to identify a reference arm length for which the OCT image detector produces an OCT signal corresponding to the retina of the user. The user specific range of reference arm lengths covers a smaller range of reference arm lengths than a reference arm length adjustment range of the reference arm length adjustment module.Type: GrantFiled: February 26, 2020Date of Patent: October 11, 2022Assignee: Notal Vision Ltd.Inventors: Amit Pascal, Omer Rafaeli, Yair Alster, Gidon Goren-Gratzyani
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Patent number: 11454491Abstract: Embodiments of systems for classifying interference signals are disclosed. In an example, a system for classifying interference signals includes an interferometer including a light source and a detector, and at least one processor. The interferometer is configured to provide a plurality of interference signals each corresponding to a respective one of a plurality of positions on a surface of a semiconductor chip. A spectrum of the light source is greater than a spectrum of white light. The at least one processor is configured to classify the interference signals into a plurality of categories using a model. Each of the categories corresponds to a region having a same material on the surface of the semiconductor chip.Type: GrantFiled: June 24, 2020Date of Patent: September 27, 2022Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Sicong Wang, Xiaoye Ding
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Patent number: 11448593Abstract: A device and method for performing reflectivity measurements at a distance by receiving two or more reflected signals (using two or more different wavelength sweeps) and calculating ratios of the two (or more) received reflected signals, for the purpose of determining the composition of a material or surface at a distance.Type: GrantFiled: March 4, 2020Date of Patent: September 20, 2022Assignee: INSIGHT PHOTONIC SOLUTIONS, INC.Inventors: Jason Ensher, Christopher Wood
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Patent number: 11408723Abstract: The present invention relates to a method for the non-invasive optical characterization of a heterogeneous medium, comprising: a step of illuminating, by means of a series of incident light waves, a given field of view of the heterogeneous medium, positioned in a focal plane of a microscope objective (30); a step of determining a first distortion matrix (Dur, Drr) in an observation basis defined between a conjugate plane of the focal plane (FP) and an observation plane, said first distortion matrix corresponding, in a correction basis defined between a conjugate plane of the focal plane and an aberration correction plane, to the term-by-term matrix product of a first reflection matrix (Rur) of the field of view, determined in the correction basis, with the phase conjugate matrix of a reference reflection matrix, defined for a model medium, in said correction basis; and a step of determining, from the first distortion matrix, at least one mapping of a physical parameter of the heterogeneous medium.Type: GrantFiled: July 16, 2019Date of Patent: August 9, 2022Assignees: Centre National de la Recherche Scientifique, ECOLE SUPÉRIEURE DE PHYSIQUE ET DE CHIMIE INDUSTRIELLES DE LA VILLE DE PARISInventors: Alexandre Aubry, Amaury Badon, Victor Barolle, Claude Boccara, Laura Cobus, Mathias Fink, William Lambert
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Patent number: 11382504Abstract: The invention relates to an OCT system, comprising: an OCT light source for emitting OCT light into an object beam path and a reference beam path; and a detector for capturing an interference signal produced from the object beam path and the reference beam path. A wavelength-dependent beamsplitter is arranged in the OCT beam path such that a first spectral partial beam is guided along a longer path and a second spectral partial beam is guided along a shorter path. The invention further relates to a corresponding OCT method. Two measurement regions separated from each other can be sensed by means of the OCT system according to the invention.Type: GrantFiled: July 2, 2019Date of Patent: July 12, 2022Assignee: Haag-Streit AGInventors: Lucio Robledo, Peter Stalder, André Huber-Meznaric
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Patent number: 11366398Abstract: Semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting an earlier-in-time portion of the time-domain representation that excludes a later-in-time portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the earlier-in-time portion of the time-domain representation.Type: GrantFiled: July 18, 2019Date of Patent: June 21, 2022Assignee: NOVA LTDInventors: Gilad Barak, Michael Chemama, Smadar Ferber, Yanir Hainick, Boris Levant, Ze'Ev Lindenfeld, Dror Shafir, Yuri Shirman, Elad Schleifer
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Patent number: 11333871Abstract: A method for imaging a sample using a microscope includes recording a first image of the sample, the first image being represented by image data. Sample information is extracted from the first image by analyzing the image data using an analyzer. At least a part of the sample is scanned with a light beam while modulating the light beam based on the extracted sample information. A second image of the sample is recorded during and/or after scanning the sample with the modulated light beam.Type: GrantFiled: June 9, 2020Date of Patent: May 17, 2022Assignee: LEICA MICROSYSTEMS CMS GMBHInventor: Romina Geiger
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Patent number: 11333616Abstract: An adaptive focusing system including an optics module, an optics module height positioner (OMHP), a position sensor operative to generate a position output indicating a height of the optics module, a predictive height estimator operative to generate an estimated height value of a sample at each site of a plurality of sites, and generate a desired optics module height output for each of the sites, a regulator operative to generate, at least partially based on the desired optics module height output and a known height of the optics module, a sequence of optics module height control instructions for the plurality of sites, a driver operative to provide a sequence of control outputs to the OMHP and a model predictive controller (MPC) operative to monitor differences between a reported height of the optics module and an MPC-expected height of the optics module, thereby to generate system amelioration values.Type: GrantFiled: October 8, 2020Date of Patent: May 17, 2022Inventor: Gilad Laredo
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Patent number: 11326871Abstract: A height detection apparatus successively changes the brightness of white light from a first level to a second level in accordance with a position of a Z stage and captures an image of interference light while moving a two-beam interference objective lens relative to a paste film in an optical axis direction, detects, as a focus position, a position of the Z stage where the intensity of interference light is highest in a period during which the brightness of white light is set to the first or second level, for each pixel of the captured image, and obtains the height of the paste film based on a detection result.Type: GrantFiled: August 20, 2020Date of Patent: May 10, 2022Assignee: NTN CORPORATIONInventor: Hiroaki Ohba
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Patent number: 11320254Abstract: Method and system for determining separation distance between an object and a processing or measuring tool involve generating a measurement beam of low coherence optical radiation, leading the measurement beam towards the object and the reflected measurement beam towards an optical interferometric sensor assembly in a first direction of incidence, generating a reference beam of low coherence optical radiation, and leading the reference beam towards the optical interferometric sensor assembly in a second direction of incidence, superimposing the measurement and reference beams on a common region of incidence, detecting position of a pattern of interference fringes between the measurement and reference beams on the region of incidence, and determining difference in optical length between a measurement optical path and a reference optical path on position of the pattern of interference fringes along an illumination axis to determine current separation distance between the processing or measuring tool and the objType: GrantFiled: December 3, 2020Date of Patent: May 3, 2022Assignee: ADIGE S.p.A.Inventors: Simone Donadello, Barbara Previtali, Daniele Colombo
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Patent number: 11241153Abstract: An apparatus for parallel optical coherence tomographic funduscope includes an illumination arm, a processing unit, and a retina imaging interferometer. The illumination arm includes a light source used for emitting incident lights; the processing unit is used for processing raw images from the retina imaging interferometer to obtain fundus images; and the retina imaging interferometer which includes a sample arm, a reference arm, a detection arm and a blocking unit to block unwanted back reflections from optical elements and eye, is used for acquiring the raw images by a camera in the detection arm. The illumination and the reference arms are located in a first light path and the sample and the detection arms are located in a second light path. The blocking unit include a detection pupil located at the intersection of the first and second light paths to block unwanted back reflections from optical elements and eye.Type: GrantFiled: November 20, 2019Date of Patent: February 8, 2022Inventor: Kevin Wang
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Patent number: 11234592Abstract: An arrangement for adapting the focal plane of an optical system to a non-planar, in particular spherical or spheroidal object, wherein the optical system has a positive total refractive power and generates a real image. The optical system also comprises an optical element with a negative refractive power. Principally useful in all technical fields with the corresponding requirements relating to a curved focal plane, the arrangement is useful in ophthalmologic devices. The eye which is to be examined is the spherical or spheroidal object for example, the front of the eye which has radii of between 5 and 10 mm of small dimensions.Type: GrantFiled: December 15, 2017Date of Patent: February 1, 2022Assignee: Carl Zeiss Meditec AGInventors: Andrea Berner, Ingo Koschmieder, Dietrich Martin
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Patent number: 11226294Abstract: A defect inspection apparatus generates a surface layer inspection image which is an image representing displacement of an inspection target in a measurement region based on an intensity pattern of interfered laser light. The defect inspection apparatus is configured to generate an appearance inspection image which is an image of an outer surface of the measurement region based on an intensity pattern of incoherent light.Type: GrantFiled: July 2, 2020Date of Patent: January 18, 2022Assignee: Shimadzu CorporationInventors: Takahide Hatahori, Kenji Takubo, Koki Yoshida
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Patent number: 11134836Abstract: An ophthalmologic information processing apparatus includes an acquisition unit, a tissue specifying unit, and a specifying unit. The acquisition unit is configured to acquire a tomographic image of a subject's eye formed based on scan data acquired using an optical system for performing optical coherence tomography on the subject's eye. The tissue specifying unit is configured to acquire first shape data representing shape of a tissue of the subject's eye by performing segmentation processing on the tomographic image. The specifying unit is configured to specify a low sensitivity component having a small variation with respect to a change in a position of the optical system with respect to the subject's eye from the first shape data, and to obtain second shape data representing shape of the tissue based on the specified low sensitivity component.Type: GrantFiled: May 15, 2019Date of Patent: October 5, 2021Assignee: TOPCON CORPORATIONInventors: Toshihiro Mino, Jonathan Liu
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Patent number: 11109759Abstract: A handheld optical coherence tomography imaging and tissue sampling system and method of imaging and sampling a tissue is disclosed. The method includes inserting a catheter probe into a biopsy needle. The biopsy needle can be attached to a hand-held scanning and sampling device. The biopsy needle is maneuvered to an investigation site. A three-dimensional image of the tissue at the investigation site is captured with the catheter probe.Type: GrantFiled: February 28, 2018Date of Patent: September 7, 2021Assignee: Physical Sciences, Inc.Inventors: Nicusor V. Iftimia, Whanwook Chang
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Patent number: 11109752Abstract: A dental caries diagnosis device comprising a light source which is configured to emit examination light (R) and a light receiving unit (4f) which is configured to receive the examination light (R) with which a tooth has been irradiated includes: a head-side casing (4a1) which is inserted into a mouth in a contactless manner with respect to a tooth or a gum and which projects the examination light (R) toward a tooth; and a filter (4e) which is disposed in front of the light receiving unit (4f) and which is configured to remove a noise component from the received light, wherein the light receiving unit (4f) is configured to receive the examination light (R) which has been transmitted through the tooth.Type: GrantFiled: June 5, 2017Date of Patent: September 7, 2021Assignee: NIHON UNIVERSITYInventor: Takashi Kaneda
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Patent number: 11112234Abstract: The present subject matter at least provides an apparatus for inspecting a slab of material including a passivation layer. The apparatus includes a frequency-domain optical-coherence tomography (OCT) probe configured to irradiate the slab of material, and detect radiation reflected from the slab of material. The apparatus also includes a spectral-analysis module configured to analyze at least an interference pattern with respect to the OCT probe to thereby determine a thickness of the slab of the material. The apparatus also includes a thin-film gauge configure to determine a thickness of the passivation layer such that the determined thickness of the slab of material may be adjusted baes on the thickness of the passivation layer.Type: GrantFiled: January 13, 2020Date of Patent: September 7, 2021Assignee: APPLEJACK 199 L.P.Inventor: Wojciech J Walecki
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Patent number: 11073372Abstract: The present subject matter at least provides an apparatus for characterization of a slab of a material. The apparatus comprises two or more frequency-domain optical-coherence tomography (FD-OCT) probes configured for irradiating the slab of material, and detecting radiation reflected from the slab of material or transmitted there-through. Further, a centralized actuation-mechanism is connected to the OCT probes for simultaneously actuating elements in each of the OCT probes to cause a synchronized detection of the radiation from the slab of material. A spectral-analysis module is provided for analyzing at least an interference pattern with respect to each of the OCT probes to thereby determine at least one of thickness and topography of the slab of the material. Further, in some embodiments, the slab of material may include a passivation layer. The apparatus may be configured to determine a thickness of the passivation layer.Type: GrantFiled: January 13, 2020Date of Patent: July 27, 2021Assignee: APPLEJACK 199 L.P.Inventor: Wojciech J Walecki
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Patent number: 11073370Abstract: An optical system comprising an optical coherence tomography (OCT) measuring device and a beam deflection unit for laterally deflecting the position or angle of a beam path of the OCT measuring device. There is an optical component in the beam path, said optical component being embodied in such a way that a back-reflection of the optical component has a different configuration in terms of its longitudinal location along the beam path depending on the lateral position of the deflected beam path on the optical component. The optical system comprises an evaluation unit which is embodied in such a way that a value of the lateral position or angle deflection of the beam deflection unit is determinable on the basis of a longitudinal location of the back-reflection at the optical component determined by the OCT measuring device.Type: GrantFiled: August 6, 2019Date of Patent: July 27, 2021Assignee: HEXAGON TECHNOLOGY CENTER GMBHInventors: Thomas Jensen, Zheng Yang
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Patent number: 11022424Abstract: An optical coherence tomography system, includes a swept-source laser, a Mach-Zehnder interferometer and a balanced detector. The interferometer includes a first fiber coupler, a second fiber coupler, a sample arm and a reference arm. The reference arm includes a reference arm front section, a reference arm rear section and a delay line. A tail end of the reference arm front section is connected to the reference arm rear section through the delay line. The first fiber coupler is configured to split the output light of the swept-source into a sample light and a reference light and distribute the returned sample light to the second fiber coupler. A difference between the optical path length of a parasitic reflected signal of the delay line reaching the second fiber coupler and the optical path length of the sample light is greater than 8 times the cavity length of the swept-source laser.Type: GrantFiled: March 27, 2020Date of Patent: June 1, 2021Assignee: SVISION IMAGING LIMITEDInventors: Xing Wei, Bingjie Huang, Jun Chen, Xianzhao Peng
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Patent number: 10966803Abstract: A method for imaging a tooth surface, the method executed at least in part on a computer, directs an excitation signal toward the tooth from a scan head and obtains a depth-resolved response signal emanating from the tooth, wherein the response signal encodes tooth surface structure information. Liquid and tooth surfaces are segmented from the depth-resolved response signal. The tooth surface structure information is adjusted based on the segmented liquid. A 3D image of the tooth is reconstructed according to the depth-resolved response signal and the adjusted tooth surface structure information. The 3D image content is displayed, stored, or transmitted.Type: GrantFiled: May 31, 2016Date of Patent: April 6, 2021Inventors: Victor C. Wong, Chuanmao Fan, Yiyi Guan, Jean-Marc Inglese, Edward R. Shellard
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Patent number: 10945597Abstract: In accordance with one aspect of the present invention, an optical coherence tomography-based ophthalmic testing center system includes an optical coherence tomography instrument comprising an eyepiece for receiving at least one eye of a user or subject; a light source that outputs light that is directed through the eyepiece into the user's or subject's eye, an interferometer configured to produce optical interference using light reflected from the user's/subject's eye, an optical detector disposed so as to detect said optical interference; and a processing unit coupled to the detector. The ophthalmic testing center system can be configured to perform a multitude of self-administered functional and/or structural ophthalmic tests and output the test data.Type: GrantFiled: November 8, 2018Date of Patent: March 16, 2021Assignee: Doheny Eye InstituteInventors: Alexander C. Walsh, Paul G. Updike, Srinivas R. Sadda
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Patent number: 10939060Abstract: An image sensor that captures an image of light from a predetermined depth of a subject, includes: a photoelectric converter that photoelectrically converts light including interference light of light from the subject and reference light; a discrimination unit that locks in and detects a signal component having an interference frequency in an interference light component corresponding to the predetermined depth from a signal output from the photoelectric converter; and a floating diffusion unit that temporarily accumulates an electric charge resulting from the photoelectric conversion by the photoelectric converter; wherein: the discrimination unit includes: a transfer unit that transfers the signal to the floating diffusion unit; and a sampling unit that samples the electric charge accumulated in the floating diffusion unit at a sampling frequency determined based on the interference frequency.Type: GrantFiled: May 16, 2018Date of Patent: March 2, 2021Assignee: NIKON CORPORATIONInventor: Naoki Ohkouchi