Having Short Coherence Length Source Patents (Class 356/497)
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Patent number: 10175178Abstract: A method for inspecting an ophthalmic lens, such as a contact lens, using Optical Coherence Tomography. The method includes illuminating a sample volume including the lens with a sample light beam which is provided from a light source having a power of at least 2 mW at a wavelength of 1040 nm to 1080 nm and which does not exceed 5 W. In carrying out the method an ophthalmic lens is inspected which has been manufactured such that it comprises scattering centers embedded in and/or on an anterior surface and in and/or on a posterior surface thereof, respectively, and/or distributed throughout a bulk material being delimited by the anterior surface and the posterior surface of the ophthalmic lens. An interference pattern resulting from a superposition of back-scattered light from the sample volume including the ophthalmic lens and a reference light beam provided from the light source may then be analyzed and evaluated.Type: GrantFiled: July 18, 2017Date of Patent: January 8, 2019Assignee: Novartis AGInventor: Thomas Tonn
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Patent number: 10149599Abstract: A processing apparatus includes: a light source unit configured to emit partially coherent light having a coherence length that is equal to or more than inverse of a scattering coefficient of a light scattering body and shorter than half of inverse of a reduced scattering coefficient of the light scattering body; an illumination unit configured to irradiate an illumination area on a surface of the light scattering body, with the partially coherent light emitted from the light source unit; a detection unit configured to detect, in a detection area including the illumination area, a signal of scattered and returned light from the light scattering body; and an interference component extracting unit configured to extract an interference component by excluding a noninterference component from the signal of the scattered and returned light detected by the detection unit.Type: GrantFiled: August 8, 2017Date of Patent: December 11, 2018Assignee: OLYMPUS CORPORATIONInventor: Ryosuke Ito
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Patent number: 10145757Abstract: The system and methods are made to apply interferometry to ophthalmic applications. The system makes use of a low-coherence interferometer to obtain a plurality of measurements of a contacts lens. The system and methods characterizes the surface profile of both surfaces of a contact lens, a thickness profiles, and combines these measurements with an index information to reconstruct a complete model of the contact lens.Type: GrantFiled: April 13, 2018Date of Patent: December 4, 2018Assignee: Johnson & Johnson Vision Care, Inc.Inventors: John E. Greivenkamp, Jr., James William Haywood, Kyle C. Heideman, Russell T. Spaulding, Gregory Allen Williby
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Patent number: 10123691Abstract: Various methods for automatically identifying the Schwalbe's line location in an optical coherence tomography (OCT) image of the anterior chamber of an eye are described. In one example method, the posterior corneal surface in the ROI is segmented by using one or more segmentation approaches to produce a segmented output. A curvature is computed at each segmented point to identify a set of local curvature maxima locations. Features at each local curvature maxima location are evaluated. The Schwalbe's line location is identified using the evaluated features at each maxima location. Other methods for identifying the Schwalbe's line location discussed in the present application are based on identification of a location of maximum curvature in the curvature function and identification of a maximum distance to the convex-hull of a model fit.Type: GrantFiled: March 14, 2017Date of Patent: November 13, 2018Assignee: CARL ZEISS MEDITEC, INC.Inventor: Homayoun Bagherinia
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Patent number: 10117568Abstract: Geographic atrophy of the eye can be detected and measured by imaging the eye at a depth greater than the retinal pigment epithelium (RPE) at a plurality of locations of the eye, for example, using optical coherence tomography (OCT); determining a ratio of the intensities of imaging signals of a retinal layer(s) with respect to the intensity of imaging signals of a sub-RPE layer(s) at each location; determining representative values based at least in part on the determined ratios; generating a map of the representative values; and identifying diseased areas from the map. Contours and binary maps may be generated based on the identified diseased areas. The size and shape of the identified areas may be analyzed and monitored over a period of time to phenotype subjects and classify diseases.Type: GrantFiled: January 7, 2016Date of Patent: November 6, 2018Assignee: Kabushiki Kaisha TOPCONInventors: Charles A. Reisman, Qi Yang
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Patent number: 10113908Abstract: The present invention relates to an apparatus and method of a real-time, monitoring and control feedback system for a 2-D spectrometer application, to correct for active optical axis pointing misalignments or jitter (i.e., tip, tilt), that result in degraded scientific image integrity, unwanted spatial crosstalk and image blurring artifacts which severely limit the applications for high resolution spectrometer image data. The present invention provides a unique system architecture which ensures the most direct optical axis motion detection and control capability that will enable sub-pixel image motion monitoring and boresight control stability, thus, maximizing the science image quality.Type: GrantFiled: September 25, 2017Date of Patent: October 30, 2018Assignee: The United States of America as represented by the Administrator of NASAInventors: Catherine Marx, Irving Linares, Peter Shu, James Smith
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Patent number: 10113856Abstract: Improved line-field imaging systems incorporating planar waveguides are presented. In one embodiment the optics of the system are configured such that a line of light on the light scattering object is imaged to the planar waveguide in at least one dimension. Embodiments where the waveguide incorporates a beamsplitter of an interferometer, where the beam divider and waveguide are referenced to one or more common surfaces, and wherein the source and waveguide are optically coupled, are also considered. In another embodiment, the planar waveguide is in contact or close proximity to the light scattering object.Type: GrantFiled: October 2, 2014Date of Patent: October 30, 2018Assignee: CARL ZEISS MEDITEC, INC.Inventors: Matthew J. Everett, Tilman Schmoll, Alexandre R. Tumlinson
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Patent number: 10098538Abstract: Imaging systems are provided allowing examination of different object regions spaced apart in a depth direction by visual microscopy and by optical coherence tomography. An axial field of view and a lateral resolution is varied depending on which object region is examined by the imaging system. The proposed imaging systems are in particular applicable for thorough examination of the human eye.Type: GrantFiled: March 23, 2017Date of Patent: October 16, 2018Assignee: CARL ZEISS MEDITEC AGInventors: Christoph Hauger, Markus Seesselberg, Martin Hacker, Keith O'Hara
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Patent number: 10080492Abstract: A method and system for compensating for motion artefacts in Optical Coherence Tomography is provided. A B-scan set includes a plurality of B-scan images acquired at least a position corresponding to a target position of a fundus of an eye. The plurality of B-scans within the B-scan set are aligned using a first alignment process and a second alignment process, where the second alignment process is performed on the B-scan images within the B-scan set aligned by the first alignment process. The first alignment process aligns the B-scan images within the B-scan set at a first resolution in at least an axial direction, and the second alignment process aligns the B-scan images within the B-scan set aligned in the first alignment process at a second resolution having a higher resolution than the first resolution in at least the axial direction.Type: GrantFiled: March 8, 2017Date of Patent: September 25, 2018Assignee: Canon Kabushiki KaishaInventors: Tomasz Dziubak, Marek Rózanski, Tomasz Bajraszewski
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Patent number: 10054419Abstract: A method for high dynamic range and high accuracy interferometry measurements is described. The method uses a broadband light source for generating light, an interferometer, a phase shifting device, an imaging optical system and a detector array for collecting and measuring the reflected light from an object. The detected light is processed by a processor unit to obtain the object's surface.Type: GrantFiled: April 29, 2015Date of Patent: August 21, 2018Assignee: ADOM, ADVANCED OPTICAL TECHNOLOGIES LTD.Inventors: Yoel Arieli, Yoel Cohen
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Patent number: 10054429Abstract: A system (10) for analyzing an object (11) includes a light source (12) producing multiple light components, each of different wavelength and a respective amplitude, phase and polarization. An optical element (13) directs the light components on to the object to create known 2D patterns at different image planes displaced from the optical element by distances that are known functions of the wavelength of the light component. A 2D imager (20) images the 2D patterns and produces a plurality of full view 2D wavelength dependent patterns each corresponding to a known distance from the optical element and each having variable image contrast dependent on displacement of a surface of the object from the image plane, maximal image contrast being achieved when the surface of the object and image plane are coincident. A processing unit (25) determines the object surface based on the variable image contrast of each image.Type: GrantFiled: May 14, 2015Date of Patent: August 21, 2018Assignee: ADOM, ADVANCED OPTICAL TECHNOLOGIES LTD.Inventors: Yoel Arieli, Yoel Cohen
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Patent number: 10048055Abstract: An optical probe for irradiating light onto a subject includes an optical path control unit configured to receive light from outside the optical probe, and change a path of the light within the optical probe; an optical path length control element configured to receive the light having the changed path from the optical path control unit, and change an optical path length of the light as the optical path control unit changes the path of the light; and an optical output unit configured to receive the light having the changed optical path length from the optical path length control element, and output the light.Type: GrantFiled: January 9, 2013Date of Patent: August 14, 2018Assignees: Samsung Electronics Co., Ltd., Korea University Research and Business FoundationInventors: Jae-guyn Lim, Hyun Choi, Min-seog Choi, Won-he Choe, Seong-deok Lee, Woo-young Jang, Beop-min Kim, Hyun-woo Jeong
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Patent number: 10045831Abstract: Systems and methods are provided for a microscope-integrated intraoperative scanner system having automated tracking of an instrument tip. A scanning mirror is configured such that a field of view of the OCT system is determined by a position or orientation of the scanning mirror. A drive system is configured to control the scanning mirror. Camera assemblies are configured to determine respective two-dimensional projections of the positions of markers attached to a surgical instrument. A stereo vision system is configured to determine a three-dimensional location of each of the markers from the determined two-dimensional positions. An instrument tracking component is configured to determine a position of a working tip of the surgical instrument according to the determined three-dimensional locations. A drive control is configured to instruct the drive system to adjust the scanner mirror to control the field of view of the OCT system.Type: GrantFiled: May 9, 2016Date of Patent: August 14, 2018Assignee: The Cleveland Clinic FoundationInventors: Mohamed T. El-Haddad, Yuankai K. Tao
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Patent number: 9996910Abstract: A frequency resolution unit performs frequency resolution of a radiographic image to generate band images representing frequency components in a plurality of frequency bands. A reference image generation unit generates a reference image representing information associated with scattered radiation included in the radiographic image, and generates a plurality of band reference images corresponding to a plurality of frequency bands from the reference image. A band image conversion unit performs conversion between the corresponding pixels of the band reference images and the band images in the corresponding frequency bands to generate converted band images. A synthesis unit synthesizes the converted band images to generate a processed radiographic image with converted contrast.Type: GrantFiled: October 27, 2017Date of Patent: June 12, 2018Assignee: FUJIFILM CorporationInventors: Satoshi Naito, Takahiro Kawamura
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Patent number: 9984459Abstract: Methods and systems for angiographic imaging with optical coherence tomography (OCT) are described using ratio-based and angiographic deviation based calculations. In using these calculations to determine motion, arbitrary interframe permutations may be used, post-calculated, non-linear results for projection visualization may be averaged, poor matches may be eliminated on an A-line by A-line basis, windowing functions may be used to improve results, partial spectrums may be used when capturing data, and a minimum intensity threshold may be used for determining which pixels to use.Type: GrantFiled: April 5, 2016Date of Patent: May 29, 2018Assignee: Kabushiki Kaisha TOPCONInventors: Charles A. Reisman, Zhenguo Wang, Atsushi Kubota, Jonathan Liu
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Patent number: 9968245Abstract: Exemplary apparatus and process can be provided for imaging information associated with at least one portion of a sample. For example, (i) first different wavelengths of at least one first electro-magnetic radiation can be provided within a first wavelength range provided on the portion of the sample so as to determine at least one first transverse location of the portion, and (ii) second different wavelengths of at least one second electro-magnetic radiation within a second wavelength range can be provided on the portion so as to determine at least one second transverse location of the portion. The first and second ranges can east partially overlap on the portion. Further, a relative phase between at least one third electro-magnetic radiation electro-magnetic radiation being returned from the sample and at least one fourth electro-magnetic radiation returned from a reference can be obtained to determine a relative depth location of the portion.Type: GrantFiled: September 13, 2012Date of Patent: May 15, 2018Assignee: The General Hospital CorporationInventors: Guillermo J. Tearney, Brett Eugene Bouma, Dvir Yelin
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Patent number: 9962076Abstract: Imaging systems are provided allowing examination of different object regions spaced apart in a depth direction by visual microscopy and by optical coherence tomography. An axial field of view and a lateral resolution is varied depending on which object region is examined by the imaging system. The proposed imaging systems are in particular applicable for thorough examination of the human eye.Type: GrantFiled: March 23, 2017Date of Patent: May 8, 2018Assignee: CARL ZEISS MEDITEC AGInventors: Christoph Hauger, Markus Seesselberg, Martin Hacker, Keith O'Hara
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Patent number: 9958254Abstract: Calibrating a scanning interferometry imaging system includes: configuring the scanning interferometry imaging system for operation with an interference objective using light having a narrowband wavelength spectrum; using the scanning interferometry imaging system to direct measurement light and reference light along different paths and to overlap the measurement and reference light on a detector, the measurement and reference light having the narrowband wavelength spectrum; scanning an optical path length difference between the measurement light and the reference light at the detector while acquiring intensity data using the detector, the detector acquiring the intensity data at a frame rate and the scanning being performed at a scan speed; determining information about the scan speed based on the acquired intensity data, geometric information about the scanning interferometry imaging system, and the narrowband wavelength spectrum; and calibrating the scanning interferometry imaging system based on the inforType: GrantFiled: August 11, 2015Date of Patent: May 1, 2018Assignee: Zygo CorporationInventors: Peter J. de Groot, Jake Beverage, Xavier Colonna de Lega, Martin F. Fay
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Patent number: 9953137Abstract: Apparatus, systems and methods for pre-processing, analyzing, and storing genomic data through a scalable, distributed analysis system across a network is presented.Type: GrantFiled: July 3, 2013Date of Patent: April 24, 2018Assignee: Nant Holdings IP, LLCInventor: Patrick Soon-Shiong
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Patent number: 9945655Abstract: An interferometer apparatus comprising: a short coherence length or broadband light source; a light director to direct light from the light source along a measurement path to a surface of a sample and also along a reference path to a reference surface; a wavelength disperser to cause wavelength dispersion of light along one of the measurement and the reference paths; a combiner to cause light from the sample surface and light from the reference surface to produce an interference pattern or interferogram; a detect—or to detect intensity values of the interference pattern as a function of wavelength; and a determiner to determine from the detected intensity values the wavelength at which the measurement and reference paths are balanced, wherein the wavelength disperser is at least one of: a grating wavelength disperser, a prism wavelength disperser, and an optical dispersive medium.Type: GrantFiled: December 12, 2013Date of Patent: April 17, 2018Assignee: University of HuddersfieldInventors: Jiang Xiang, Haydn Martin
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Patent number: 9940722Abstract: Segmentation and identification of closed-contour features in images using graph theory and quasi-polar transform are disclosed. According to an aspect, a method includes representing, in a rectangular domain, an image including a feature of interest. Further, the method includes determining a point within the feature of interest. The method also includes transforming the image of the feature from the rectangular domain to a quasi-polar domain based on the point. The quasi-polar domain is represented as a graph of nodes connected together by edges. The method also includes graph cutting the quasi-polar domain to identify the boundary of the feature of interest in the image.Type: GrantFiled: January 27, 2014Date of Patent: April 10, 2018Assignee: Duke UniversityInventors: Sina Farsiu, Stephanie J. Chiu, Joseph A. Izatt
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Patent number: 9910256Abstract: The present invention provides a novel simple, portable, compact and inexpensive approach for interferometric optical thickness measurements that can be easily incorporated into an existing microscope (or other imaging systems) with existing cameras. According to the invention, the interferometric device provides a substantially stable, easy to align common path interferometric geometry, while eliminating a need for controllably changing the optical path of the beam. To this end, the inexpensive and easy to align interferometric device of the invention is configured such that it applies the principles of the interferometric measurements to a sample beam only, being a single input into the interferometric device.Type: GrantFiled: December 14, 2016Date of Patent: March 6, 2018Assignee: RAMOT AT TEL-AVIV UNIVERSITY LTD.Inventors: Natan Tzvi Shaked, Pinhas Girshovitz
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Patent number: 9909983Abstract: An optical system (10) includes an arrangement for splitting a source beam into a measurement beam and a reference beam. The reference beam is reflected off a reflective element (42) which mounted on a delay line (44). A target (35) scatters the radiation from the measurement beam. The scattered radiation and the reference beam are brought to interfere on a detector (40) by calibrating the delay line (44). The detected interference pattern is Fourier-transformed and filtered to select a region of interest around a side-band of the Fourier-transformed interference pattern in order to remove noise caused by stray radiation that hits the detector.Type: GrantFiled: February 2, 2016Date of Patent: March 6, 2018Assignee: ASML Netherlands B.V.Inventor: Nitesh Pandey
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Patent number: 9910251Abstract: There is provided a lens system includes a first optical system and forms an intermediate image, which has been formed inside the first optical system by light from an input side, into a final image. The first optical system includes a first subsystem, with the first subsystem including a first lens that is disposed at a position closest to the intermediate image on the input side and moves during focusing and a second lens that is disposed at a position closest to the intermediate image on the output side and moves during focusing.Type: GrantFiled: March 19, 2014Date of Patent: March 6, 2018Assignees: NITTOH INC., THEIA TECHNOLOGIES LLCInventors: Kazuhiro Oe, Jeffrey Alan Gohman
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Patent number: 9891078Abstract: Determining information about a degree of freedom of rigid body motion of an encoder scale includes: directing a first beam toward an encoder scale, in which the first beam diffracts from an encoder scale; combining a diffracted component of the first beam with a second beam to form an interfering output beam; monitoring changes in the output beam as a function of a wavelength of the first and second beams; and determining the information about a degree of freedom of rigid body motion of the encoder scale based on changes in the output beam as a function of the wavelength.Type: GrantFiled: July 14, 2015Date of Patent: February 13, 2018Assignee: Zygo CorporationInventors: Leslie L. Deck, Jan Liesener
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Patent number: 9881400Abstract: Method for measuring a height map of a test, including measuring a coarse height map of the test surface with a pre-map sensor provided to an optical profiler with a relatively long working distance and/or a large field of view, storing the coarse height map in a memory, subdividing the coarse height map into sections appropriate for the field of view of a high resolution optical profiler sensor provided to the optical profiler, calculating corresponding X, Y and Z positions for the optical profiler sensor with respect to the test surface, calculating a trajectory in the X, Y, Z-direction for the optical profiler sensor with respect to the test surface using the calculated X, Y, Z-positions, moving the optical profiler in the X, Y, Z-direction with respect to the test surface according to the trajectory, and measuring a high accuracy height map with the high resolution optical profiler sensor.Type: GrantFiled: July 24, 2015Date of Patent: January 30, 2018Assignee: MITUTOYO CORPORATIONInventors: Adriaan Tiemen Zuiderweg, Johannes Anna Quaedackers, Harm Visscher
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Patent number: 9875559Abstract: An image processing apparatus includes an acquiring unit that acquires a plurality of pixel value rows aligned in a depth direction of an object to be measured based on interference light obtained by causing return light of scanned measurement light from the object to be measured and reference light corresponding to the measurement light to interfere with each other. A forming unit forms a two-dimensional image based on pixel values selected in accordance with a predetermined selection criterion from the plurality of pixel value rows, one of the pixel values being selected from one of the plurality of pixel value rows. In addition, a setting unit sets a selection range which is a range in the depth direction for selecting the pixel values in the plurality of pixel value rows, and a criterion changing unit changes the predetermined selection criterion in accordance with the set selection range.Type: GrantFiled: May 31, 2016Date of Patent: January 23, 2018Assignee: Canon Kabushiki KaishaInventor: Hiroki Uchida
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Patent number: 9869542Abstract: A system and method for resampling interference datasets of samples in segments, in a swept-source based Optical Coherence Tomography (OCT) system. The resampling is preferably performed within a Field Programmable Gate Array (FPGA) of the OCT system, the FPGA preferably having Fourier-transform based signal processing capabilities such as Fast Fourier Transform (FFT) cores. Resampling the interference datasets in segments provides a flexible approach to resampling that makes efficient use of system resources such as FFT cores. By resampling the interference datasets in segments, the system adjusts to an increased number of resampling points as the imaging depth upon the sample increases. The OCT system then combines the segments using overlapping values of the resampling points between adjacent resampling regions of the resampled segments, and performs Fourier Transform based post-processing on the combined segments to obtain axial profiles of the sample at desired imaging depths.Type: GrantFiled: April 21, 2014Date of Patent: January 16, 2018Assignee: Axsun Technologies, Inc.Inventors: Brian Goldberg, Bartley C. Johnson
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Patent number: 9839358Abstract: Using an optical tomography method of splitting low coherent light into sample light and reference-light, emitting the sample light to a measurement-target in a line shape, generating interference light by superimposing reflected light from the measurement-target due to emission of the sample light and the reference-light on each other, and acquiring a two-dimensional spectroscopic tomographic-image of the measurement-target by spectroscopically detecting the interference light and performing frequency analysis, an arbitrary wavelength region in an ultraviolet region is cut out from low coherent light including a wavelength region from an ultraviolet region to a visible region and the arbitrary wavelength region is shaped into a spectrum having an arbitrary wavelength width, the two-dimensional spectroscopic tomographic-image is acquired as using the low coherent light, and the penetration depth of the sample light for the measurement-target is evaluated based on the two-dimensional spectroscopic tomographic-Type: GrantFiled: April 25, 2017Date of Patent: December 12, 2017Assignee: FUJIFILM CorporationInventors: Heijiro Hirayama, Sohichiro Nakamura
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Patent number: 9836830Abstract: A frequency resolution unit performs frequency resolution of a radiographic image to generate band images representing frequency components in a plurality of frequency bands. A reference image generation unit generates a reference image representing information associated with scattered radiation included in the radiographic image, and generates a plurality of band reference images corresponding to a plurality of frequency bands from the reference image. A band image conversion unit performs conversion between the corresponding pixels of the band reference images and the band images in the corresponding frequency bands to generate converted band images. A synthesis unit synthesizes the converted band images to generate a processed radiographic image with converted contrast.Type: GrantFiled: May 20, 2016Date of Patent: December 5, 2017Assignee: FUJIFILM CorporationInventors: Satoshi Naito, Takahiro Kawamura
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Patent number: 9823127Abstract: Disclosed herein are systems and methods for deep spectroscopic imaging of a biological sample. In an aspect, a system includes a broad bandwidth light source configured to generate an illumination beam, an interferometer, and a spectrometer. The interferometer includes a first beam splitter configured to split the illumination beam into an incident beam and a reference beam; an optical lens directs the incident beam onto a biological sample at a predefined offset from corresponding optical axis, and receive a beam scattered from the biological sample. The beams are configured to intersect with each other within a focal zone of the optical lens. Photons of the incident beam undergo multiple forward scattering within the biological sample. A second beam splitter configured to receive and superimpose the scattered and reference beams, to generate an interference beam. The spectrometer uses a spectral domain detection technique to assess tissue properties of the biological sample.Type: GrantFiled: April 9, 2015Date of Patent: November 21, 2017Assignee: Duke UniversityInventors: Adam Wax, Howard Levinson, William J. Brown, Thomas Matthews, Manuel Medina
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Patent number: 9824452Abstract: A topographical measurement system of a specular object and a topographical measurement method thereof are disclosed. The topographical measurement system has a screen, an image capturing device, and an image processing device. The specular object reflects a fringe pattern from the screen, so as to form a virtual image of the fringe pattern. The virtual image is therefore analyzed to obtain a surface profile of the specular object.Type: GrantFiled: May 10, 2016Date of Patent: November 21, 2017Assignee: NATIONAL SUN YAT-SEN UNIVERSITYInventors: Wei-hung Su, Bo-chin Huang
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Patent number: 9810530Abstract: Autofocus system (AF) employing, in addition to specified optical units, fringe projection and fringe detection systems (FPS, FDS) and specifically-configured data processing system. AFS is configured to project with FPS a sinusoidal fringe pattern, formed by a pattern source, on a substrate and to image the so projected pattern from substrate onto optical detector with FDS to form optical image from which topology of the substrate is defined as substrate moves relative to the projected pattern. Pattern source may include diffraction grating oriented that the projected pattern is inclined relative to direction of substrate scanning Topology profile is corrected for tilt of substrate, Goos-Hanchen errors, and for fringe-pattern-induced errors outside a chosen spatial-frequency range. To reduce errors of topology profile, at least five values of phase difference are used. AFS is configured to define temporal phase shifting in optical image without using any moving parts in the AFS.Type: GrantFiled: January 9, 2015Date of Patent: November 7, 2017Assignee: NIKON CORPORATIONInventors: Daniel Gene Smith, Eric Peter Goodwin
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Patent number: 9752868Abstract: A portion of the surface of a cylindrical part with a machined groove is mapped with an optical profilometer during the manufacturing process and the height map is fitted to a virtual cylindrical configuration that best fits the data. Two-dimensional Fourier Transfer analysis of the map data is advantageously used to find the orientation of the groove on the part. The orientation of the groove is then compared to the longitudinal axis of such virtual cylinder to calculate the groove's lead angle. If the measured lead angle is outside a predetermined design tolerance deemed acceptable for manufacturing purposes, the part is removed from the fabrication line.Type: GrantFiled: October 8, 2016Date of Patent: September 5, 2017Assignee: BRUKER NANO INC.Inventors: Erik Novak, Florin Munteanu
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Patent number: 9714826Abstract: A shape of an object is measured using a plurality of space encoding patterns each of which includes a light portion and a dark portion. A first and second pattern sets are obtained. The first set comprises patterns each of which has the light portion of each space encoding pattern masked by a pattern mask. The second set comprises patterns each of which has the light portion of each of the space encoding pattern masked by a mask with varying the mask pattern. Captured images of an object on which the patterns of the first and second sets are sequentially projected are inputted. A correspondence between projection coordinates of the projected pattern and image coordinates of a captured image for the projected pattern is detected. A shape of the object is derived based on correspondences.Type: GrantFiled: June 9, 2015Date of Patent: July 25, 2017Assignee: CANON KABUSHIKI KAISHAInventors: Tomoaki Higo, Toshihiro Kobayashi, Masayoshi Yamasaki
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Patent number: 9709669Abstract: The present invention relates to distance measuring method and equipment which consists of a stage that receives multiple signals reflected from the target of measuring through the operation of the shutter, a stage that calculates the phase difference between transmitting and receiving signals based on said multiple signals received at said different phases, and a stage that calculates the distance between said target of measurement and a distance measuring equipment based on said phase difference, and said multiple signals may be of same frequency and amplitude. Therefore, the phase difference between transmitting and receiving signals can be determined accurately and the distance to the objects can be accurately recognized.Type: GrantFiled: May 29, 2013Date of Patent: July 18, 2017Inventor: Tae Min Kim
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Patent number: 9677871Abstract: The invention relates to an optical measuring process for acquiring a surface topography of a measurement object. To this end, a measuring device with a measuring head in a measuring head guide device is provided for chromatic confocal acquisition of the surface topography or for spectral interferometric OCT acquisition of the distance to the surface topography. Firstly, spectrally broadband light of a light source from a fiber array with i fibers of i measurement spots is directed onto the measurement object via a common measuring head optic, with formation of a spot array of i measurement spots. i reflection spectra of the i measurement channels are then acquired and digitized. Finally, the digitized reflection spectra are evaluated with removal of time variations of systematic measurement errors and time-related deviation movements of the measuring head guide device.Type: GrantFiled: May 15, 2015Date of Patent: June 13, 2017Assignee: Precitec Optronik GmbhInventors: Martin Schönleber, Berthold Michelt, Matthias Kunkel
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Patent number: 9671335Abstract: A photonics integrated system is disclosed, comprising a substrate, an integrated interferometer integrated in the substrate and being configured for receiving radiation from a radiation source, and an integrated spectral filter integrated in the substrate and being configured for receiving radiation from the interferometer. The integrated interferometer has a period and the integrated spectral filter has a bandwidth such that the period of the integrated interferometer is smaller than the bandwidth of the integrated spectral filter. The integrated spectral filter has a periodic transfer characteristic with a period and the system has a bandwidth such that the period of the periodic transfer characteristic of the integrated spectral filter is larger than the bandwidth of the system.Type: GrantFiled: December 20, 2013Date of Patent: June 6, 2017Assignees: UNIVERSITEIT GENT, IMEC VZWInventors: Peter Bienstman, Tom Claes
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Patent number: 9664501Abstract: A reference surface is used to develop an empirical plot between a parameter of interest, such as roughness or modulation, and the position of the reference mirror in an interferometer by repeating measurements of the reference surface at different positions of the reference mirror so as to identify the in-focus position of the reference mirror. Serial quality-control measurements of samples of interest are carried out with the reference mirror in such in-focus position until a predetermined quality-control event triggers an automated system re-calibration by re-measuring the reference surface and, if the result does not correspond to the in-focus position of the reference mirror according to the plot, by finding a new in-focus position for the reference mirror using the same plot or, alternatively, a new similarly produced plot. Sample measurements are then resumed with the mirror placed at that new position.Type: GrantFiled: January 9, 2016Date of Patent: May 30, 2017Assignee: BRUKER NANO INC.Inventors: Erik Novak, Colin Farrell, Bryan Guenther
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Patent number: 9664509Abstract: The rough bottom surface of a recessed feature partially obscured by an overlying structure is profiled interferometrically with acceptable precision using an objective with sufficiently large numerical aperture to illuminate the bottom under the obscuring structure. The light scattering produced by the roughness of the surface causes diffused light to return to the objective and yield reliable data fringes. Under such appropriate numerical-aperture and surface roughness conditions, the bottom surface of such recessed features can be profiled correctly simply by segmenting the correlograms produced by the scan and processing all fringes that correspond to the bottom surface elevation.Type: GrantFiled: December 19, 2014Date of Patent: May 30, 2017Assignee: BRUKER NANO INC.Inventors: Joanna Schmit, Erik Novak
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Patent number: 9638580Abstract: An apparatus 100 for measuring thermal radiation in one mode of the present invention is used for detecting thermal radiation of an object 12 to be measured.Type: GrantFiled: February 20, 2013Date of Patent: May 2, 2017Assignee: Tokyo University of Agriculture and TechnologyInventor: Kenji Ikushima
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Patent number: 9632038Abstract: Systems and methods for unwrapping phase signals obtained from interferometry measurements of patterned wafer surfaces are disclosed. A phase unwrapping method in accordance with the present disclosure may calculate a front surface phase map and a back surface phase map of a wafer, subtract the back surface phase map from the front surface phase map to obtain a phase difference map, unwrap the phase difference map to obtain a wafer thickness variation map, unwrap the back surface phase map to obtain a back surface map representing the back surface of the wafer; and add the wafer thickness variation map to the back surface phase map to calculate a front surface map representing the front surface of the wafer.Type: GrantFiled: July 24, 2015Date of Patent: April 25, 2017Assignee: KLA-Tencor CorporationInventors: Haiguang Chen, Jaydeep Sinha
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Patent number: 9599568Abstract: A method of determining the appearance of losses of cohesion in a transparent ceramic coating layer (16) formed on a substrate (10), the method comprising the steps that consist firstly in looking for an image representative of a separation zone, if any, between the ceramic layer and the substrate, and secondly in analyzing the detected image, if any, with the image being viewed optically at particular wavelengths that are greater than or equal to 500 nm.Type: GrantFiled: August 7, 2012Date of Patent: March 21, 2017Assignee: SNECMAInventors: Gregory Fabre, Jean-Yves Guedou, Vincent Guipont, Michel Christian Marcel Jeandin
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Patent number: 9599805Abstract: The present invention discloses an optical system to generate incoherent structured illumination and an optical imaging system using incoherent structured illumination. The optical system includes: at least one coherent light source, a spatial light modulator, a plurality of optical lenses, a rotating diffuser for destroying the coherence of the structured illumination pattern, an objective, and a stage accommodating samples. The optical imaging system using incoherent structured illumination includes: an optical microscope having an objective and a beam splitter, a charge-coupled device camera for recording a sequence of images of the samples, a stage for accommodating and moving samples; a coherent light source; a spatial light modulator; a quarter wave plate, a plurality of optical lenses and mirrors; and a diffuser rotating 360 degrees or vibrating rapidly around the axis of the optical path continuously.Type: GrantFiled: February 29, 2012Date of Patent: March 21, 2017Assignee: NATIONAL SYNCHROTRON RADIATION RESEARCH CENTERInventors: Su Yu Chiang, Bo Jui Chang, Jih Young Yuh, Li Jun Chou
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Patent number: 9585556Abstract: Systems for imaging a sample are provided. The system includes an OCT imaging portion having an associated OCT path defined by one set of optical elements between an OCT signal delivery optical fiber and the sample; an image capture portion having an associated image capture path defined by a second set of optical elements between an image capture device and the sample; and an illuminator portion having an associated illumination path defined by a third set of optical elements between an illumination source and the sample. The OCT path, the image capture path, and the illuminator path have at least one optical element in common, and the respective paths differ from each other by at least one optical element. The illumination path includes a multi-wavelength source of optical radiation.Type: GrantFiled: February 26, 2016Date of Patent: March 7, 2017Assignee: Bioptigen, Inc.Inventors: Eric L. Buckland, Bradley A. Bower, Robert H. Hart, Pete Huening
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Patent number: 9568304Abstract: In a method and apparatus for determining the height of a plurality of spatial positions on a surface of a specimen, a light beam is projected on the surface. The surface is scanned along an optical axis in different scanning positions. The light reflected by the surface is detected in scanning positions with a spatial pattern having corresponding spatial pattern positions. From the detected light for each spatial position of the surface, an envelope curve of intensity values corresponding to scanning positions is determined. A maximum of the envelope curve and its corresponding scanning position being representative of the height of the spatial position of the surface is selected. The spatial pattern is moved in a sequence of 2n steps (n>2) in a first and a second spatial direction over a distance of ¼ and 1/n pattern wavelength, respectively.Type: GrantFiled: February 3, 2015Date of Patent: February 14, 2017Assignee: MITUTOYO CORPORATIONInventors: Han Haitjema, Frans de Nooij, Lukasz Redlarski
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Patent number: 9541381Abstract: Systems and methods for generating 3D representations of shape and color texture of a test surface are described. In one aspect, surface topography interferometers are equipped with a multi-element detector and an illumination system to produce a true-color image of the measured object surface. Color information can be presented as a true-color two-dimensional image or combined with topography information to form a three-dimensional representation of the shape and color texture of the object, effectively creating for a human observer the impression of looking at the actual part.Type: GrantFiled: February 6, 2014Date of Patent: January 10, 2017Assignee: Zygo CorporationInventor: Xavier Colonna de Lega
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Patent number: 9541375Abstract: A method and apparatus are provided to generate tomography images that performs the method. The apparatus and method are configured to determine a basis pattern from modulated phases of incident rays from a spatial light modulator according to a pattern of arranged pixels. The apparatus and method are further configured to perform spatial shift modulation shifting an arrangement of the pixels vertically or horizontally with respect to the basis pattern to obtain shift patterns of the basis pattern. The apparatus and method are configured to generate tomography images for the basis pattern and the shift patterns using spectrum signals of rays obtained from the incident rays passing through the spatial light modulator and entering a subject. The apparatus and method are configured to select a pattern that generates a clearest tomography image of the subject based on the generated tomography images.Type: GrantFiled: July 19, 2013Date of Patent: January 10, 2017Assignees: Samsung Electronics Co., Ltd., Korea Advanced Institute of Science and TechonlogyInventors: Jae-guyn Lim, YongKeun Park, Jae-duck Jang, Hyeon-seung Yu, Seong-deok Lee, Woo-young Jang
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Patent number: 9528817Abstract: Preferred embodiments of the present invention are directed to systems for phase measurement of biological materials which can be applied to the fields of, for example, cellular physiology and neuroscience. These preferred embodiments are based on principles of phase measurements and imaging technologies. The scientific motivation for using phase measurements and imaging technologies is derived from, for example, cellular biology at the sub-micron level which can include, without limitation, imaging origins of dysplasia, cellular communication, neuronal transmission and implementation of the genetic code. The structure and dynamics of sub-cellular constituents cannot be currently studied in their native state using the existing methods and technologies including, for example, x-ray and neutron scattering.Type: GrantFiled: December 14, 2012Date of Patent: December 27, 2016Assignee: Massachusetts Institute of TechnologyInventors: Christopher Fang-Yen, Gabriel Popescu, Changhuei Yang, Adam Wax, Ramachandra Dasari, Michael Feld
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Patent number: 9492077Abstract: Optimized device for swept source optical coherence domain reflectometry and tomography. In the coherence-optical device, light, with the aid of an interferometer, is used for distance-measuring and imaging purposes on reflecting and scattering areas of the human eye. The optimized device according to the invention consists of includes a tunable light source, matched to the sought-after measurement region ZOCT, with a resonator length LR, an interferometric measurement arrangement, a data capturing unit for capturing the light portions scattered back from the sample and a data processing unit. Here the resonator length LR of the tunable light source is matched not only to the sought-after measurement region ZOCT, but also to the entire interferometric measurement arrangement such that disturbance points present in the interferometric measurement arrangement cannot create disturbance signals in the sought-after measurement region ZOCT.Type: GrantFiled: January 30, 2012Date of Patent: November 15, 2016Assignee: Carl Zeiss Meditec AGInventors: Ralf Ebersbach, Martin Hacker