Abstract: Embodiments of the invention disclose devices, methods, and computer media for noise rejections in a remote sensing device, such as a LIDAR device. In an exemplary embodiment, a spatial filter includes an aperture dynamically created in synchronization with one or more directions in which emitted laser pulses from the LiDAR device are steered. Photons from all other directions except the one or more directions are blocked by the spatial filter. Reflected photons from the one or more directions pass through the spatial filter via the aperture, and are projected on one or more sets of photodetectors. Noises in the photons that pass through the spatial filter are further to be rejected based on one or more fixed temporal patterns identified in laser pulses emitted by the LiDAR device. The spatial filter can be implemented using an electrochromic display, an array of micromechanical (MEMS) mirrors, a liquid crystal display (LCD), or an electro-wetting display.

Abstract: To provide a pressure sensor that has high pressure resistance performance, small measurement error by suppressing hysteresis with respect to pressure, and high sensitivity and high productivity, a pressure sensor includes a diaphragm unit with a first main surface that receives a measurement target fluid's pressure and a second main surface located on the opposite side of this first main surface, a housing, and a sensing unit that outputs the diaphragm unit's deformation as an electric signal, in which at least part of the diaphragm unit has a multi-layer structure in which a plurality of thin plate members are stacked, and the plurality of thin plate members are deformed independently of each other while at least part of the plurality of thin plate members is in press-contact to each other in a pressure receiving state in which the measurement target fluid's pressure is applied to the first main surface.

Abstract: The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer.

Abstract: Systems and methods described herein relate to detecting objects. One embodiment receives a plurality of three-dimensional (3D) data points from a plurality of light beams emitted by one or more sensors; identifies, among the plurality of 3D data points, a first set of inlier points that satisfy a first predetermined error condition with respect to a plane hypothesis and a first set of outlier points that fail to satisfy the first predetermined error condition; identifying, among the first set of inlier points, a second set of outlier points, the second set of outlier points failing to satisfy a second predetermined error condition in a range domain with respect to a plurality of line hypotheses corresponding, respectively, to the plurality of light beams; and detecting an object based, at least in part, on at least one of the first set of outlier points and the second set of outlier points.

Abstract: A range finder including a sighting optical system that forms an optical image of a sighting target by sighting a target object and includes a correcting member in an optical path thereof that is driven to correct image blur of an optical image; a driving section that drives the correcting member based on a shaking amount applied to the sighting optical system; a light transmitting section that emits measurement light to a sighting target; a light receiving section that receives returned light from the sighting target and outputs a received light signal; a distance calculating section that calculates distance to the sighting target based on a timing when the measurement light is output and a timing when the return light is received by the light receiving section; and a power changing section that controls a focal distance of the light receiving section according to driving of the correcting member.

Abstract: System and method for measuring an optical property of a sub micrometer region of a sample including interacting a probe tip of a probe microscope with a region of the sample, illuminating the sample with a beam of light from a radiation source such that light is scattered from the probe-sample interaction region, interfering a reference beam with the scattered light wherein the reference beam has an adjustable optical phase, measuring with a detector at least a portion of the light scattered from probe-sample and background regions at a substantially constant reference phase, and constructing a signal indicative of the optical property of the sample wherein contributions from background scattered light are substantially suppressed.

Abstract: The present invention provides the Fabry-Perot (F-P) sensor compromising housing, measuring probe, longitudinal sling block, and displacement converting device. The optic fiber passes through upside sealing ring and extends into upside through hole with the optic fiber end surface disposed at the bottom; the upside of longitudinal sliding block is disposed with reflecting surface, thus a Fabry-Perot cavity is formed between part of the fiber end surface at the bottom of the fiber and the reflecting surface on the upside of longitudinal sliding block. The displacement converting device will convert the lateral slides of the measuring probe into the slides of the longitudinal sliding block, which thus changes the distance from the reflecting surface to the fiber end surface and changes the Fabry-Perot cavity length. Further, the sliding distance of the measuring probe can be calculated after the variation of the Fabry-Perot cavity length measured in according with the Fabry-Perot principle.

Abstract: An optical method and system are presented for use in measurement of isolated features of a structure. According to this technique, Back Focal Plane Microscopy (BFM) measurements are applied to a structure and measured data indicative thereof is obtained, wherein the BFM measurements utilize dark-field detection mode while applying pinhole masking to incident light propagating through an illumination channel towards the structure, the measured data being thereby indicative of a scattering matrix characterizing scattering properties of the structure, enabling identification of one or more isolated features of the structure.

Abstract: The present invention refers to a two-systems compact specimen holder (SH) easy to use which enables to analyze the same sample by employing either an atomic force microscope (AFM) or a scanning electron microscope (SEM), by preserving the setting reference of the details for both microscopies, so that it satisfies the requirements of size, conductivity, magnetization, tidiness, reference and adaptability. The capacity of preserving the location reference of the details for both microscopies, in the scope of correlational microscopy, results essential to obtain information and images in both fields of microscopy, which can be correlated in order to acquire valuable combined information.

Abstract: A pressure sensor which detects variation in pressure, the pressure sensor including a cantilever which bends according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and a first gap, a second gap, and a third gap which are formed on a proximal end portion of the cantilever. The first to third gaps electrically partition the proximal end portion of the cantilever into a first support portion, a second support portion, a first displacement detection portion, and a second displacement portion in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion of the cantilever are connected to each other in plan view. The first and second displacement detection portions detect displacement according to the bending of the cantilever between the first and second support portion.

Abstract: A pressure sensor includes a sensor main body having a cavity, a cantilever having a lever main body and lever support-portion, which is bent according to a pressure difference between the cavity and sensor outside main body, and a displacement detection unit detects cantilever displacement based on resistance variation in resistance values of the main body-resistance portion formed in the lever main body and lever-resistance portion formed in the lever support-portion. A division groove is formed in the lever support; the division divides the lever-resistance portion into a first resistance portion electrically connected to a detection-electrode in series and second resistance portion closer to other adjacent lever support-portion than the first resistance portion.

Abstract: A method of operating a scanning probe system that includes a probe support and probes carried by the probe support is disclosed. Each probe includes a cantilever extending from the support to a free end and a tip carried by the free end. The system is operated to perform interaction cycles, each including in an approach phase, moving the support so that the tips move together towards the sample surface; in a detection step, generating a surface signal on detection of an interaction of the tip(s) of a first subset of the probes with the sample surface before the rest of the probes have interacted with the sample; in a response step changing a shape of the cantilever(s) of the first subset in response to the generation of the surface signal; and in a retract phase moving the support so that the tips retract together away from the sample surface.

Abstract: An optical sensor including a MEMS structure, and a grating coupled resonating structure positioned adjacent to the MEMS structure, the grating coupled resonating structure comprising an interrogating grating coupler configured to direct light towards the MEMS structure. The interrogating grating coupler is two dimensional, and the interrogating grating coupler and the MEMS structure form an optical resonant cavity.

Abstract: A device for weighing micro- and nano-sized particles. The device includes a base portion, an oscillator coupled to the base portion and configured to vibrate the base portion, a first cantilevered beam coupled to the base portion, a second cantilevered beam coupled to the base portion, a first plurality of fingers coupled to the first cantilevered beam near the tip inwardly pointing toward the second cantilevered beam, and a second plurality of fingers coupled to the second cantilevered beam near the tip inwardly pointing toward the first cantilevered beam.

Abstract: Methods of quantifying the efficiency of a drug molecule for its targeted receptor, using a differential binding force to quantify the efficiency of a drug molecule to its targeted receptor.

Abstract: A device for the interferometric measuring of an object, including a radiation source for generating an output beam, at least one beam splitter, as well as at least one detector, with the beam splitter being arranged in the radiation path of the output beam such that the output beam is split into at least one measuring beam and one reference beam, and the device is embodied to interfere the reference beam on the detector with an interference beam to form an optic interference. The device has an open optic resonator, which is arranged in the radiation path of the device such that the measuring beam enters the open optic resonator and the interference beam emitted from the open optic resonator is interfered with a reference beam on the detector to form an optic interference. The invention further relates to a method for the interferometric measuring of an object.

Abstract: A method of estimating an in-focus level of a target in an image scanning apparatus is provided, wherein the image scanning apparatus comprises a first line scan detector configured to obtain one or more image scan lines of the target and a second line scan detector configured to obtain one or more focus scan lines of the target. The method comprises obtaining at least one image scan line of the target using the first line scan detector, each at least one image scan line being obtained at a respective focus level; obtaining at least one focus scan line of the target using the second line scan detector, each at least one focus scan line being obtained at a respective focus level; calculating at least one focus parameter using at least one focus scan line; and estimating a nominal in-focus level of the target using the calculated focus parameter(s).

Abstract: A method of driving a probe of a scanning probe microscope. The intensities of first and second radiation beams are modulated; and the beams are directed simultaneously onto the probe whereby each beam heats the probe and causes the probe to deform, typically by the photothermal effect. The optical system is arranged to direct the centers of the beams onto different locations on the probe. This enables the location of each beam to be chosen to optimize its effect. A lens receives the first and second beams and focuses them onto the probe. A beam combiner is arranged to receive and combine the beams and direct the combined beams towards the probe.

Abstract: Apparatus and method for measuring the deformation of a tethered or untethered cantilever by projecting a radiation beam onto the cantilever, detecting an interference pattern reflected from or transmitted through the cantilever, and calculating the deformation of the cantilever by measuring the intensity variation within at least a portion of the interference pattern.

Abstract: A mechanism is described for facilitating optical testing of a device under test (DUT) using a testing mechanism having multiple testing paths according to one embodiment. A method of embodiments of the invention may include facilitating, via a loopback path, optical testing of the DUT in a loopback configuration. The loopback configuration may allow for looping between one or more transmitters and one or more receivers of the DUT. The method may further include facilitating, via a spectral path, spectral measurements relating to the DUT.

Abstract: A force sensor for a probe based instrument includes a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance.

Abstract: A method of detecting a movement of a measuring probe provided between an objective lens adapted to image an object plane on a predetermined image plane and the object plane is disclosed. Additionally, a measuring instrument comprising an objective lens and a measuring probe is disclosed. An input beam of light is split into a measurement beam and a reference beam. The measurement beam is focused on a reverse focal plane of the objective lens such that the measurement beam is collimated by the objective lens. The collimated measurement beam is reflected at the measuring probe. The reflected measurement beam is directed towards the objective lens such that the objective lens focuses the reflected measurement beam on the reverse focal plane. The reflected measurement beam is collimated. The collimated reference beam and the reference beam are superimposed to form a superimposed beam and an interference between the reflected measurement beam and the reference beam is detected.

Abstract: A measurement system that includes an industrial machine and an interferometer can detect when abnormality has occurred in measurement targeted at a reflector attached to a movable body, for example, in a case where the movable body has moved too close to the interferometer. A judging section of the interferometer judges that there is abnormality in measurement targeted at the reflector on the basis of a received-light signal. Upon such an abnormality judgment, a stop command outputting section of the interferometer outputs a stop command to the industrial machine. A stopping section of the industrial machine stops the driving operation of a moving mechanism upon receiving an input of the stop command, thereby stopping the movement of the movable body. The measurement system makes it possible to prevent the industrial machine, which includes the movable body and the moving mechanism, from colliding with the interferometer.

Abstract: A system for measuring a property of a sample includes an actuation device disposed on a substrate and includes a flexible surface spaced apart from the substrate and configured so as to allow placement of the sample thereupon. The actuation device also includes a vertical actuator that is configured to cause the flexible surface to achieve a predetermined displacement from the substrate when a corresponding potential is applied thereto. A sensing probe is disposed so as to be configured to interact with the sample thereby sensing the property of the sample.

Abstract: The present invention provides an optical device, comprising an optical fiber and a cantilever that is arranged on an end of the optical fiber; The cantilever may be an integral part of the optical fiber, and may have a length that is substantially equal to a diameter of the optical fiber. Measurement means for measuring a displacement of the cantilever are connected to an opposite end of the, optical fiber. A method of measuring a displacement using the optical device comprises the steps of: —arranging measurement means, comprising a light source, on an opposite end of the optical fiber; —using the light source to send a beam of light into the optical fiber; —measuring the interference of light that is reflected on the end op the optical fiber and light that is reflected on the cantilever; and determining the displacement of the cantilever relative to an intermediate position dependent on the measured interference.

Abstract: A shape measuring apparatus includes a probe for scanning across a surface to be measured, while vibrating up and down; a minute-vibration generation section for vibrating the probe up and down; a vertical movement control section for moving the probe up and down to keep a constant contact force or a constant distance between the surface to be measured and the probe; a scanning section for scanning the surface to be measured with the probe; a displacement sensor for measuring the vertical displacement of the probe and outputting a probe displacement signal; and a signal processing section for obtaining information about the contact force or the distance between the surface to be measured and the probe from a high-frequency component of the probe displacement signal, and for obtaining information about profile of the surface to be measured from a low-frequency component of the signal obtained when the surface to be measured is scanned such that the distance or the contact force is kept constant.

Abstract: Disclosed herein are an automatic landing method for a scanning probe microscope and an automatic landing apparatus using the same. The method comprises irradiating light to a cantilever using a light source; collecting interference fringes generated by the light being diffracted from the edge of the cantilever and then being incident to a surface of the sample; driving the tip in the sample direction until the pattern of the interference fringes reaches a predetermined pattern region (first driving); and driving the tip in the sample direction after the interference fringe pattern reached the predetermined pattern region (second driving). The method in accordance with the present invention is very effective particularly for samples having a large surface area, because it enables automatic landing of a tip according to recognition and selection of an optimal time point for individual landing steps, irrespective of adverse changes in landing conditions, such as surface irregularities of samples.

Abstract: A low-cost homodyne laser interferometer probe of simple structure is provided which allows predetermined performance to be easily obtained by a simple adjustment, and a displacement measurement system using the same is also disclosed. The homodyne laser interferometer probe includes an optical fiber (1) for guiding light, a collimator lens (2) that receives the light from the optical fiber (1), a ¼ wavelength plate (3) that receives light from the collimator lens (2) and that converts the light from linearly polarized light into circularly polarized light, a beam splitter (4) for dividing light from the ¼ wavelength plate (3) into reference light and measurement light, a first focal lens (5) that receives the reference light from the beam splitter (4), a reflection mirror (6) for reflecting the reference light from the first focal lens (5), and a second focal lens (7) that receives the measurement light from the beam splitter (4).

Abstract: An interferometric-spatial-phase imaging (ISPI) system includes a substrate wafer. An alignment configuration is permanently embedded in the substrate wafer. The alignment configuration uses a global coordinate reference system by providing a plurality of global reference marks that encompass up to the entire substrate wafer. A plurality of alignment markings is provided on a surface in close proximity to the alignment configuration for obtaining continuous six-axis control of a scanning probe tip with respect to the global coordinate reference system.

Abstract: Apparatus and method for measuring the deformation of a tethered or untethered cantilever by projecting a radiation beam onto the cantilever, detecting an interference pattern reflected from or transmitted through the cantilever, and calculating the deformation of the cantilever by measuring the intensity variation within at least a portion of the interference pattern.

Abstract: The invention relates to a photoacoustic detector, comprising at least a first chamber (V0) suppliable with a gas to be analyzed, a window for letting modulated and/or pulsed infrared radiation and/or light in the first chamber (V0), and means for detecting pressure variations created in the first chamber by absorbed infrared radiation and/or light. The means for detecting pressure variations created in the first chamber by absorbed infrared radiation and/or light comprise at least an aperture provided in the wall of the first chamber (V0), in communication with which is provided a door arranged to be movable in response to the movement of a gas, and means for a contactless measurement of the door movement. The invention relates also to a sensor for a photoacoustic detector and to a method in the optimization of a door used as a sensor for a photoacoustic detector.

Abstract: An optical device for determining at least one signal light component being characteristic for an optical near-field interaction of a probe with an object to be investigated, wherein the near-field interaction is subjected to a fundamental modulation at a fundamental frequency ?, comprises an interferometer device with an illumination light path (I) being directed to the probe, a reference light path (II) being directed to a detector device for obtaining detector output signals including signal light components, and a signal light path (III) being directed from the probe to the detector device, wherein the reference and signal light paths (II, III) are superimposed at the detector device, and a demodulation device for determining the signal light components by demodulating the detector output signals, wherein the reference light path (II) does not contain the probe, an interferometer phase modulator is arranged in the reference light path (II) or signal light path (III) for changing an interferometer phase co

Abstract: A fast translation stage for a scanning probe microscope is provided. The stage includes at least one axis of translation driven at the natural resonant frequency of the translation stage such that distortion associated with rapid changes in scan direction is avoided. In one embodiment, the stage includes a sample plate or support that is driven, preferably by one or more piezoelectric actuator elements, so that the plate translates along the fast scan frequency at its resonant frequency.

Abstract: A method of detecting a movement of a measuring probe provided between an objective lens adapted to image an object plane on a predetermined image plane and the object plane is disclosed. Additionally, a measuring instrument comprising an objective lens and a measuring probe is disclosed. An input beam of light is split into a measurement beam and a reference beam. The measurement beam is focused on a reverse focal plane of the objective lens such that the measurement beam is collimated by the objective lens. The collimated measurement beam is reflected at the measuring probe. The reflected measurement beam is directed towards the objective lens such that the objective lens focuses the reflected measurement beam on the reverse focal plane. The reflected measurement beam is collimated. The collimated reference beam and the reference beam are superimposed to form a superimposed beam and an interference between the reflected measurement beam and the reference beam is detected.

Abstract: The present invention relates to a cantilever sensor system and profilers as well as biosensors using the same. The cantilever sensor system comprises: an interferometric lens module; a cantilever module; and an imaging device. The interferometric lens module further comprises: a light source; a light splitting unit; and an interferometric lens; wherein a light beam emitted from the light source is projected to the cantilever module through the light splitting unit and the interferometric lens where it is reflected back to the light splitting unit so as to interfere with the reference light beam from the reference mirror. The imaging device is used for capturing interferograms caused by the interference between the light beam of the light source and the reflected beam thereof.

Abstract: A cantilever array having a simple structure and being able to reliably detect a surface of a sample, a method for fabricating the same, a scanning probe microscope, a sliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laser interferometer, a laser Doppler interferometer having an optically exciting function for exciting a sample, each using the same, and a method for exciting cantilevers. The cantilever array includes a large number of compliant cantilevers sliding on a surface of a sample.

Abstract: An interferometric-spatial-phase imaging (ISPI) system includes a substrate wafer. An alignment configuration is permanently embedded in the substrate wafer. The alignment configuration uses a global coordinate reference system by providing a plurality of global reference marks that encompass up to the entire substrate wafer. A plurality of alignment markings is provided on a surface in close proximity to the alignment configuration for obtaining continuous six-axis control to provide positional information of a scanning probe tip or an electron beam with respect to said global coordinate reference system.

Abstract: A shape measuring apparatus includes a probe for scanning across a surface to be measured, while vibrating up and down; a minute-vibration generation section for vibrating the probe up and down; a vertical movement control section for moving the probe up and down to keep a constant contact force or a constant distance between the surface to be measured and the probe; a scanning section for scanning the surface to be measured with the probe; a displacement sensor for measuring the vertical displacement of the probe and outputting a probe displacement signal; and a signal processing section for obtaining information about the contact force or the distance between the surface to be measured and the probe from a high-frequency component of the probe displacement signal, and for obtaining information about profile of the surface to be measured from a low-frequency component of the signal obtained when the surface to be measured is scanned such that the distance or the contact force is kept constant.

Abstract: An interferometric-spatial-phase imaging (ISPI) system includes an alignment mechanism for obtaining continuous six-axis control of a scanning probe tip with respect to a coordinate system attached to a substrate. A gap detection mechanism measures tip height above a substrate and controls tip approach toward the substrate of one or more tips, as well as measures tip deflection during surface contact of the one or more tips. A plurality of complementary marks is provided for attachment to the one or more tips. A plurality of grating marks is provided to backdiffract a reflected beam from a flexible cantilever to detect high-frequency tip deflection in a compact configuration of a light source and a light detector.

Abstract: An interferometer comprises a light source unit, a first splitter, a reference beam unit and a detection unit. The light source unit provides a laser beam. The first splitter receives the laser beam from the light source unit and splits the laser beam into a first beam and a second beam. The reference beam unit comprises a frequency shifter, a stopper and a spherical mirror. A center of the frequency shifter is located on a curvature center of the spherical mirror, the first beam traveling from the first splitter to the frequency shifter, the frequency shifter splitting the first beam into a diffraction beam and a zero-order beam, wherein the diffraction beam travels to the spherical mirror, reflected by the spherical mirror toward the frequency shifter, passing the frequency shifter to become a reference beam, and the zero-order beam is stopped by the stopper. The detection unit receives the reference beam from the reference beam unit.

Abstract: This invention relates to a liquid measurement cell for micromechanical sensors, so-called cantilever sensors. These sensors are e.g. used for the detection of biomolecules without the need for fluorescent or radioactive labelling. These measurements are usually carried out in liquids, where air or gas bubbles present in the analyte inside the measurement cell can significantly affect measurement results or even destroy the sensor. In a measurement cell according to this invention, a closed gas volume is present above the liquid level. Consequently, gas or air bubble can be constantly absorbed by the gas volume and do not come in contact with the cantilever sensors. The measurement cell is further characterised by a very low volume in the order of microliters and can be combined with various optical or piezoelectrical/piezoresistive read-out methods.

Abstract: A nanoscale displacement detector includes a cantilever integrated with an optical resonator, referred to herein as a “microresonator.” The microresonator and cantilever are configured such that displacement of the cantilever relative to the microresonator causes a change in the resonant frequency of the microresonator. The change in the resonant frequency of the microresonator is used to monitor cantilever displacement. In an embodiment, the microresonator includes a cavity that faces the cantilever and the cantilever includes a protrusion that faces the microresonator and is aligned with the cavity.

Abstract: A measuring apparatus comprising: a reference member held in fixed position and orientation with respect to a workpiece during measurement; a stylus for scanning a surface of the workpiece while being displaced upward and downward in accordance with unevenness of the surface of the workpiece; a displacement gauge for measuring a displacement of a specific part of the stylus relative to the reference member; and a scanner for causing the stylus to scan the workpiece along the surface; wherein the fixed position and orientation of the reference member with respect to the workpiece are not changed even during the operation of the scanner; the up-and-down displacement of the specific part of the stylus is measured relative to the reference member; a fine shape of the workpiece is detected in accordance with the measured displacement of the specific part of the stylus.

Abstract: The sample stage of an array microscope is tilted in the scanning direction such that the best-focus plane of the array microscope intersects the surface of the sample during the scan. As a result of the tilt, the distance from the sample surface of each miniaturized microscope spanning the array varies from point to point on the surface. Accordingly, the best focal distance for each such point on the sample surface is identified by tracking the quality of its focus as the sample surface travels across the rows of microscopes in the array. Best focus may be detected using any known technique, such as by measuring spatial frequency content and recording the scan position corresponding to maximum mid-range frequency content. This information is used to develop a best-focus axial-position map for use while performing a subsequent measurement scan.

Abstract: An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever (3) using an optical resonator between the cantilever (3) and an output surface (12b) of a lens assembly (10). In order to form the resonator, output surface (12b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly (10) and cantilever (3) comparatively large.

Abstract: A surface texture measuring instrument provided with a near-field measuring unit (30) including a near-field probe (33) that forms a near-field light at a tip end thereof when a laser beam is irradiated, a laser source (35) that generates the laser beam to be irradiated on the near-field probe (33), a detection element (38) that detects scattering effect of the near-field light generated when the near-field probe (33) is moved close to a workpiece (1), and an actuator (32) that displaces the near-field probe (33) and the workpiece (1) in a direction moving close to/away from each other, includes: a laser length-measuring unit (20) that measures a relative distance between a reference position and the workpiece (1) in the vicinity of the tip end of the near-field probe (33) or a relative distance between the reference position and the near-field probe (33).

Abstract: In a manufacture of a probe for a scattering type near-field microscope, there is provided a method of coating, with a high reproducibility, uniform metal particles efficiently inducing a surface enhanced Raman scattering. It has been adapted such that, in the probe for the scattering type near-field microscope, one part or all of the probe due to an interaction of at least an evanescent field is coated by metal particles which don't mutually adhere and have a particle diameter of 10 nm or larger and 50 nm or smaller in radius of curvature.

Abstract: The present invention provides a hybrid optical and interferometric atomic force microscope system (40) for monitoring a cantilever probe (46). A light source (42) provides a light beam which is focussed on the back of the cantilever probe (46). The light reflected off the probe is split into two beams of different path lengths and are recombined to form an interference beam (58). This interference beam (58) is passed through a grating (102) having substantially the same period and orientation as the interference beam pattern. The light transmitted through the grating (102) illuminates a photodetector (122) to give a signal according to the intensity of the light falling on the photodetector. The photodetector output signal is sent to a positioning system (126), which in turn gives a signal to the piezoelectric system (54) so that the probe (46) follows the sample (50) surface. This signal is integrated as a function of position across the scanned area to represent a characteristic of the sample surface.

Abstract: A ground-based method is disclosed which determines the spatial statistics of fragmented and spatially variably dispersed objects in a transmissive medium, by generating a plurality of pulsed beams of laser energy, the beams having selectively variable width and shape; selectively varying the width and shape of the beams; directing the beams toward the dispersed objects; measuring the time and/or phase and intensity of signals returned by the dispersed objects, and calculating the apparent reflectance of the dispersed objects as a function of the range of the dispersed objects for each beam width and beam shape.

Abstract: A method for controlling the position of a probe location relative to a fixed reference point of a probe processing apparatus is described. Initially, an optical laser apparatus is coupled to the probe processing apparatus. The position of the probe location is set to fall within a predetermined converging range of a positioning laser beam coming from the optical laser apparatus. The positioning laser beam is then split into a probe beam and a reference beam. The probe beam and the reference beam are polarized in different directions with respect to each other. The reference beam is subsequently combined with a reflected beam formed by the probe beam reflected from the probe location. The phase difference between the reference beam and the reflected beam is detected, and a table on the probe processing apparatus for supporting the probe is adjusted to minimize the detected phase difference.