Displacement Or Distance Patents (Class 356/498)
  • Patent number: 10222319
    Abstract: A device for optically detecting in transmission nanoparticles moving in a fluid sample includes a light source for emitting a spatially incoherent beam for illuminating the sample; an imaging optical system; and a two-dimensional optical detector. The imaging optical system includes a microscope objective. The two-dimensional optical detector includes a detection plane conjugated with an object focal plane of the microscope objective by said imaging optical system. The two-dimensional optical detector allows a sequence of images of an analysis volume of the sample to be acquired, each image resulting from optical interferences between the illuminating beam incident on the sample and the beams scattered by each of the nanoparticles present in the analysis volume during a preset duration shorter than one millisecond.
    Type: Grant
    Filed: September 29, 2015
    Date of Patent: March 5, 2019
    Assignees: ECOLE SUPÉRIEURE DE PHYSIQUE ET DE CHIMIE INDUSTRIELLES DE LA VILLE DE PARIS, CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, UNIVERSITÉ DE PIERRE ET MARIE CURIE, ECOLE NORMALE SUPÉRIEURE, INSTITUT NATIONAL DE LA SANTÉ ET DE LA RECHERCHE MÉDICALE
    Inventors: Albert Claude Boccara, Martine Boccara
  • Patent number: 10206580
    Abstract: The present disclosure provides a full-field OCT system using a wavelength-tunable laser, which can observe peaks of a short-time A-line profile corresponding to each time point at which interference images of an object to be measured are acquired, so as to measure a depth direction movement of the object to be measured, and can correct the phases of interference signals on the basis of the measured depth direction movement, so as to generate an OCT image which is compensated for the depth direction movement.
    Type: Grant
    Filed: October 19, 2016
    Date of Patent: February 19, 2019
    Assignees: KOH YOUNG TECHNOLOGY INC., INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY
    Inventors: Hyun Ki Lee, Hong Ki Yoo, Chang Soo Kim, Hyeong Soo Nam
  • Patent number: 10161741
    Abstract: A method and a system for the optical detection, with hyperacuity, of a contrasted target, allowing the detection of the relative position of said target in relation to said detection system and therefore the acquisition and the pursuit of such a target. One or more embodiments is applicable to the field of autonomous robotic systems, especially for the positioning of drones or robots on a target.
    Type: Grant
    Filed: May 4, 2016
    Date of Patent: December 25, 2018
    Assignees: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, UNIVERSITÉ D'AIX-MARSEILLE
    Inventors: Stephane Viollet, Franck Ruffier, Augustin Manecy, Julien Diperi
  • Patent number: 10156432
    Abstract: An incoming laser source beam is projected to a glass disc having a frosted upper surface. A refracted beam and a reflected beam are produced from the laser source beam. The refracted beam is reflected back to and through the glass disc to combine with the reflected beam to form an interference pattern on the target.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: December 18, 2018
    Inventor: Adam Alexander Schmieder
  • Patent number: 10126112
    Abstract: An object is to enable removal fixed pattern noise even if the intensity of interference light changes during measurement. An image capturing apparatus comprises a light splitting unit that splits light emitted from a light source into reference light and measurement light, an interference signal detection unit that acquires an interference signal from interference light resulting from interference of the reference light and return light generated by irradiating an object to be inspected with the measurement light, a noise signal acquisition unit that acquires a noise signal containing a noise component contained in the interference light, a correction unit that corrects the intensity of one of the interference signal and the noise signal, and a noise removal unit that removes the noise component contained in the interference signal using the interference signal and the noise signal one of which is corrected.
    Type: Grant
    Filed: September 30, 2015
    Date of Patent: November 13, 2018
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Toshiharu Sumiya, Makoto Fukuhara, Makoto Sato
  • Patent number: 10120059
    Abstract: A laser interferometer that includes a laser interferometer, an position sensitive detector detecting an offset of an optical axis of the laser interferometer, a biaxial rotator turning the laser interferometer toward an arbitrary direction, an angle sensor detecting a rotation angle of the biaxial rotator, a retro reflector reflecting reflected light in a direction parallel to incident light, and a controller performing feedback control of the biaxial rotator so as to track the retro reflector based on signals from the position sensitive detector and the angle sensor. The tracking-type laser interferometer starts tracking control when return light from the retro reflector is returned to a detection range of the position sensitive detector, and changes gain for the feedback control in accordance with a behavior for a position of the return light on the position sensitive detector due to the tracking control.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: November 6, 2018
    Assignee: MITUTOYO CORPORATION
    Inventor: Shinichi Hara
  • Patent number: 10113976
    Abstract: A method and device for non-contact detection of a thin medium (5) is disclosed. The device comprises a light source (1), an optical splitter (2), a reference plane (3), a linearly arrayed photoelectric detector (6), a signal processing module (4) and the thin medium (5).
    Type: Grant
    Filed: July 8, 2015
    Date of Patent: October 30, 2018
    Assignee: GRG BANKING EQUIPMENT CO., LTD.
    Inventors: Xiaofeng Jin, Jianping Liu, Tiancai Liang, Wenchuan Gong
  • Patent number: 10107614
    Abstract: An optical pen for an optical measurement system includes a probe body arranged to be adjustably mounted in a measuring machine for optically measuring a test object. A single mode fiber optically coupled within the pen body transmits a source beam having an instantaneous or sequentially established bandwidth spanning a range of wavelengths to the pen body and also transmits a measurement beam from the pen body toward a detector. A combination and configuration of optics within the pen body provides a more compact and efficient optical pen.
    Type: Grant
    Filed: April 18, 2017
    Date of Patent: October 23, 2018
    Assignee: Quality Vision International, Inc.
    Inventor: David B. Kay
  • Patent number: 10088297
    Abstract: Disclosed are apparatuses and methods for measuring a thickness. The apparatus for measuring a thickness including a light source that emits a femto-second laser, an optical coupler through which a portion of the femto-second laser is incident onto a target and other portion of the femto-second laser is incident onto a reference mirror, a detector configured to receive a reflection signal reflected on the reference mirror and a sample signal generated from the target and configured to measure a thickness of the target based on an interference signal between the reflection signal and the sample signal, and a plurality of optical fiber lines configured to connect the light source, the optical coupler, and the detector to each other may be provided.
    Type: Grant
    Filed: March 21, 2017
    Date of Patent: October 2, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sung Yoon Ryu, Younghoon Sohn, Yusin Yang, Chungsam Jun, Yunjung Jee
  • Patent number: 10066974
    Abstract: An encoder interferometry system includes an encoder scale arranged to receive and diffract a measurement beam. The system further includes one or more optical elements configured and arranged to receive a first diffracted measurement beam and a second diffracted measurement beam from the encoder scale and to redirect the first diffracted measurement beam and the second diffracted measurement beam toward the encoder scale such that the first diffracted measurement beam and the second diffracted measurement beam propagate along non-parallel beam paths having an angular separation ? following a second diffraction at the encoder scale. The system further includes a first detector arranged to receive the first diffracted measurement beam and a second detector arranged to receive the second diffracted measurement beam.
    Type: Grant
    Filed: October 12, 2015
    Date of Patent: September 4, 2018
    Assignee: Zygo Corporation
    Inventor: Jan Liesener
  • Patent number: 9857159
    Abstract: A velocity-compensated frequency sweeping interferometer has a single measurement light producing device that produces a coherent light source consisting of a single light beam. The light producing device produces a scanning wavelength light beam. A primary beam splitter produces a first reference beam and a first measurement beam from said single light beam. The first reference beam travels a fixed path length to a primary reference reflector and the first measurement beam travels to and from a moveable reflective target over an unknown path length. A distance measurement interferometer is created by interfering the first reference beam with the first measurement beam. A return frequency measurement interferometer provides a measure of frequency of the return beam from the target which, when compared with the frequency of the outgoing beam, allows for velocity compensation of the target.
    Type: Grant
    Filed: September 24, 2014
    Date of Patent: January 2, 2018
    Assignee: TVS Holdings, LLC
    Inventor: John M Hoffer, Jr.
  • Patent number: 9757817
    Abstract: A method, apparatus, and system are provided to monitor and characterize the dynamics of a phase change region (PCR) created during laser welding, specifically keyhole welding, and other material modification processes, using low-coherence interferometry. By directing a measurement beam to multiple locations within and overlapping with the PCR, the system, apparatus, and method are used to determine, in real time, spatial and temporal characteristics of the weld such as keyhole depth, length, width, shape and whether the keyhole is unstable, closes or collapses. This information is important in determining the quality and material properties of a completed finished weld. It can also be used with feedback to modify the material modification process in real time.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: September 12, 2017
    Assignee: Queen's University at Kingston
    Inventor: Paul J. L. Webster
  • Patent number: 9739592
    Abstract: A multiple beam path laser optical system using a multiple beam reflector. The multiple beam path laser optical system includes a light source part to generate a laser beam to be irradiated to a specimen, the multiple beam reflector to split a laser beam incident thereto from the light source part and to provide a plurality of optical paths, a main beam splitter to irradiate the laser beam split by the multiple beam reflector to the specimen, a transducer to excite the specimen for signal detection of the laser beam irradiated to the specimen, and a control part to analyze an interference pattern of a laser beam reflected from the specimen and recombined in the main beam splitter.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: August 22, 2017
    Assignee: Foundation for Research and Business, Seoul National University of Science and Technology
    Inventors: Ik-Keun Park, Hae-Sung Park, Tae-Sung Park, Dong-Ryul Kwak
  • Patent number: 9719772
    Abstract: A fiber optic sensing system for determining the position of an object requires a light source, an optical fiber, a fiber optic splitter, a fiber tip lens, an optical detector and signal processing circuitry. Light emitted by the light source is conveyed via optical fiber and the splitter to the lens and onto an object, such that at least a portion of the light is reflected by the object and conveyed via fiber and the splitter to the detector. Signal processing circuitry coupled to the detector determines the position of the object with respect to the lens based on a characteristic of the reflected light. The system is suitably employed with a hydraulic accumulator having a piston, the position of which varies with the volume of fluid in the accumulator, with the system arranged to determine the position of the piston, from which the volume can be calculated.
    Type: Grant
    Filed: September 29, 2015
    Date of Patent: August 1, 2017
    Assignee: TELEDYNE SCIENTIFIC & IMAGING, LLC
    Inventors: John E. Mansell, Milind Mahajan, Graham J. Martin
  • Patent number: 9677873
    Abstract: An apparatus, method and computer program for measuring a distance using a self-mixing interference (SMI) unit that generates an SMI signal. The SMI unit comprises a laser emitting a first laser beam directed to an object and wherein the SMI signal depends on an interference of the first laser beam and a second laser beam reflected by the object. A peak width determination unit determines a peak width of the SMI signal, and a distance determination unit determines a distance between the object and the SMI unit depending on the determined peak width of the SMI signal. Since the distance is determined depending on the peak width of the SMI signal, without requiring a laser driving current modulation, advanced electronics for modulating the driving current of the laser are not needed. This reduces the technical efforts needed for determining the distance.
    Type: Grant
    Filed: July 19, 2011
    Date of Patent: June 13, 2017
    Assignee: KONINKLIJKE PHILIPS ELECTRONICS N.V.
    Inventors: Alexander Marc Van Der Lee, Mark Carpaij
  • Patent number: 9678436
    Abstract: An irradiation module for a measuring apparatus is provided. The irradiation module is light-conductive, is configured as a cohesive body and comprises a beam-splitting surface arranged within the irradiation module for splitting an incoming measuring beam into two partial beams. Furthermore, the irradiation module comprises an optical diffraction grating for interaction with a first of the two partial beams and a reflection surface for reflecting the second partial beam.
    Type: Grant
    Filed: April 29, 2013
    Date of Patent: June 13, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Dietmar Schnier
  • Patent number: 9678443
    Abstract: The invention relates to a lithography system comprising an optical column, a moveable target carrier for displacing a target such as a wafer, and a differential interferometer module, wherein the interferometer module is adapted for emitting three reference beams towards a first mirror and three measurement beams towards a second mirror for determining a displacement between said first and second mirror. In a preferred embodiment the same module is adapted for measuring a relative rotation around two perpendicular axes as well. The present invention further relates to an interferometer module and method for measuring such a displacement and rotations.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: June 13, 2017
    Assignee: MAPPER LITHOGRAPHY IP B.V.
    Inventors: Guido de Boer, Thomas Adriaan Ooms, Niels Vergeer, Godefridus Cornelius Antonius Couweleers
  • Patent number: 9562673
    Abstract: A decorative lighting apparatus including at least one light source and an attenuation assembly. The attenuation assembly including an attenuator, a first housing being configured to be coupled to a second housing, and a first base being configured to be coupled to a second base. When the first housing is coupled to the second housing, the first and second housings form a recess designed and dimensioned to receive and hold the attenuator in a substantially fixed position, and when the first base is coupled to the second base, the first and second bases form a further recess designed and dimensioned to receive and hold the coupled first housing and second housing in a substantially fixed position.
    Type: Grant
    Filed: December 3, 2015
    Date of Patent: February 7, 2017
    Assignee: Telebrands Corp.
    Inventors: Ajit Khubani, Yun Pan
  • Patent number: 9458994
    Abstract: A motion assembly for a decorative lighting apparatus. The motion assembly including an articulating element configured to secure an optical element in a path of a light being generated by the decorative lighting apparatus, and a motor coupled to the articulating element via a linkage such that a movement generated by the motor is imparted to the articulating element so that the light passing through the optical element is articulated when projected onto a surface.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: October 4, 2016
    Assignee: Telebrands Corp.
    Inventors: Ajit Khubani, Yun Pan
  • Patent number: 9377293
    Abstract: Imaging systems are provided allowing examination of different object regions spaced apart in a depth direction by visual microscopy and by optical coherence tomography. An axial field of view and a lateral resolution is varied depending on which object region is examined by the imaging system. The proposed imaging systems are in particular applicable for thorough examination of the human eye.
    Type: Grant
    Filed: November 20, 2014
    Date of Patent: June 28, 2016
    Assignee: CARL ZEISS MEDITEC AG
    Inventors: Christoph Hauger, Markus Seesselberg, Martin Hacker, Keith O'Hara
  • Patent number: 9342164
    Abstract: A motion detecting device and the method for dynamically adjusting image sensing area is disclosed. The motion detecting device includes a light source, an image capture unit and a processing unit. The image capture unit is used to capture reference image according to fixed sampling period. The processing unit is used to calculate exposure reference value of the light source and image characteristic value of reference image. The processing unit according to the exposure reference value and the image characteristic value to determine whether the surface is in first rough coefficient range or second rough coefficient range. If rough coefficient of the surface is in the first rough coefficient range, the processing unit defines first search radius or second search radius to increase or decrease the image sensing area. Otherwise, the processing unit defines third search radius or fourth search radius to increase or decrease the image sensing area.
    Type: Grant
    Filed: October 18, 2013
    Date of Patent: May 17, 2016
    Assignee: PIXART IMAGING INC.
    Inventors: Chun-Wei Chen, Ren-Hau Gu, Shih-Wei Kuo
  • Patent number: 9316487
    Abstract: A laser tracking interferometer has a carriage provided with a first displacement gauge outputting a displacement signal associated with a relative displacement from a reference sphere; a second retroreflector provided to the carriage; a laser interferometer provided to the carriage and outputting a displacement signal associated with a relative displacement between the first retroreflector and the second retroreflector; and a data processor calculating a displacement of the first retroreflector with reference to the reference sphere based on the displacement signal output from the first displacement gauge and the displacement signal output from the laser interferometer.
    Type: Grant
    Filed: May 19, 2014
    Date of Patent: April 19, 2016
    Assignee: MITUTOYO CORPORATION
    Inventors: Masayuki Nara, Shinichiro Yanaka
  • Patent number: 9310178
    Abstract: Method and systems for determining a change of distance to an object by interferometry with emitting measurement laser light from a laser diode are disclosed. The method may include receiving at least a part of the measurement laser light, superimposing the reflected measurement laser light with a reference laser light and thereby providing at an interferometric phase and determining the change of distance to the object depending on the superimposition. In some embodiments, the measurement laser light may be emitted with low coherence and broad spectral bandwidth. An emitting wavelength of the measurement laser light may be fluctuating hop-freely within the spectral bandwidth causing interferometric phase fluctuations.
    Type: Grant
    Filed: June 17, 2014
    Date of Patent: April 12, 2016
    Assignee: HEXAGON TECHNOLOGY CENTER GMBH
    Inventors: Yves Salvadé, Frank Przygodda, Marcel Rohner
  • Patent number: 9239226
    Abstract: An apparatus for measuring the quantity and optical parameters of a liquid in a container using the principle of optical low coherence reflectometry is provided, the apparatus having: a source arm with a low coherence light source; a reference arm including a reference lens, a mirror, means for adjusting the distance between the reference lens and the mirror and means for measuring the distance between the reference lens and the mirror; a test arm with a test lens; means for dividing the output of the source arm between the test arm and the reference arm; means for combining light reflected back into the reference arm and the test arm to create an interference signal; and means for detecting and analyzing the interference signal.
    Type: Grant
    Filed: January 23, 2014
    Date of Patent: January 19, 2016
    Assignee: The Governors of the University of Alberta
    Inventors: Robert Fedosejevs, Ilya Utkin, Sunita Sindhu, Ying Yin Tsui
  • Patent number: 9201237
    Abstract: Scanning apparatus includes a transmitter, which is configured to emit a beam comprising pulses of light, and a scanning mirror, which is configured to scan the beam over a scene. A receiver is configured to receive the light reflected from the scene and to generate an output indicative of the pulses returned from the scene. A grating is formed on an optical surface in the apparatus and is configured to diffract a portion of the beam at a predetermined angle, so as to cause the diffracted portion to be returned from the scanning mirror to the receiver. A controller is coupled to process the output of the receiver so as to detect the diffracted portion and to monitor a scan of the mirror responsively thereto.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: December 1, 2015
    Assignee: APPLE INC.
    Inventors: Naftali Chayat, Raviv Ehrlich, Alexander Shpunt
  • Patent number: 9116854
    Abstract: An image correlation for images having speckle pattern is evaluated. Modulation transfer function (MTF) curves of speckle-pattern images captured at different times are figured out. Whether a correlation value between the MTF curves meets a threshold is checked. If the correlation value is smaller than the threshold, speckle-pattern images are re-selected for re-figuring out the MTF curves and the correlation value. Thus, error of strain and displacement for digital image correlation owing to blurring images of the on-moving target object is figured out; calculation time of the digital image correlation is reduced; and accuracy on measuring physical parameters of the target object before and after movement is improved for digital image correlation.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: August 25, 2015
    Assignee: National Applied Research Laboratories
    Inventors: Chi-Hung Huang, Wei-Chung Wang, Yung-Hsiang Chen, Tzi-Hung Chung, Tai-Shan Liao
  • Patent number: 9072460
    Abstract: The present invention relates to an optical coherence tomography device and an optical coherence tomography method using same for capturing the cornea and the retina of the eye by using light sources in respectively different wavelength ranges. According to the present invention, included are two light sources, a first interferometer and a second interferometer for generating respectively different interference patterns by the light outputted from each of the light sources, and interference pattern detection means for detecting an interference pattern occurring in each interferometer.
    Type: Grant
    Filed: May 30, 2012
    Date of Patent: July 7, 2015
    Assignee: HUVITZ CO., LTD.
    Inventors: Tae Joong Eom, In-Won Lee, Hoon-Seop Kim
  • Patent number: 9069265
    Abstract: The invention relates to a differential interferometer module adapted for measuring a direction of displacement between a reference mirror and a measurement mirror. In an embodiment the differential interferometer module is adapted for emitting three reference beams towards a first mirror and three measurement beams towards a second mirror for determining a displacement between said first and second mirror. In a preferred embodiment the same module is adapted for measuring a relative rotation around two perpendicular axes as well. The present invention further relates to a lithography system comprising such a interferometer module and a method for measuring such a displacement and rotations.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: June 30, 2015
    Assignee: MAPPER LITHOGRAPHY IP B.V.
    Inventors: Guido de Boer, Thomas Adrian Ooms, Niels Vergeer, Godefridus Cornelius Antonius Couweleers
  • Patent number: 9030670
    Abstract: A method of tracking the position of an object, comprising using reference interference data from first output beam, reference interference data from a second output beam, measurement interference data from the first output beam, measurement interference data from the second output beam, and knowledge of the difference between the absolute phase offset of the first output beam and the absolute phase offset of the second output beam for both a reference interferometer (15?) and a measurement interferometer (15) to calculate a parameter indicative of the absolute phase offset of the measurement interferometer (15) for the first output beam. The calculated parameter is used to calculate the ratio of the optical path differences of the measurement interferometer (15) and the reference interferometer (15?).
    Type: Grant
    Filed: July 22, 2011
    Date of Patent: May 12, 2015
    Assignee: Isis Innovation Limited
    Inventors: Matthew Warden, David Urner
  • Patent number: 9025160
    Abstract: Interferometric path length measurements using frequency-domain interferometry form the basis of several measurement techniques, including optical frequency domain reflectometry (OFDR), optical coherence tomography (OCT), and frequency-modulated continuous wave (FMCW) radar and lidar. A phase-sensitive and self-referenced approach to frequency-domain interferometry yields absolute and relative path length measurements with axial precision orders of magnitude better than the transform-limited axial resolution of the system.
    Type: Grant
    Filed: January 30, 2012
    Date of Patent: May 5, 2015
    Assignee: The Regents of the University of Colorado, a body corporate
    Inventors: Eric Moore, Robert McLeod
  • Patent number: 9013709
    Abstract: A method for detecting motion direction of an object (4) comprises the steps of: laser output light (L1) is generated, using a semiconductor laser (2) having a thermal response frequency (fr); the laser is driven with rectangularly modulated DC current (I) having a modulation frequency higher than said thermal response frequency (fr) and preferably higher than twice said thermal response frequency (fr), such as to triangularly modulate the wavelength of the laser output light; the laser output light is directed to the object; a portion of reflected light (L3) is allowed to interfere with light (L0) within the laser; a portion of the laser light is used as measuring beam (5); the frequency spectrum of the measuring beam (5) is analyzed in conjunction with the modulated laser current in order to determine the direction of movement of the object (4).
    Type: Grant
    Filed: March 24, 2010
    Date of Patent: April 21, 2015
    Assignee: Koninklijke Philips N.V.
    Inventors: Marcel Schemmann, Cristian Presura, Carsten Heinks, Atanas Pentchev
  • Patent number: 9013710
    Abstract: An optical position-measuring device for detecting the relative position of two objects includes a measuring standard connected to one object, and a scanning unit connected to the other object and including a light source, one or more grating(s), and a detector system. The detector system includes a plurality of detector element groups arranged in a detection plane, via which a plurality of position-dependent, phase-shifted scanning signals is able to be generated by scanning a periodic fringe pattern that results in the detection plane, the detector elements that have in-phase scanning signals forming a group in each case. The sum of the areas and the centroid of the detector elements of a group is identical to the sum of the areas and the centroid, respectively, of the detector elements of each other group. Periodic diaphragm structures are arranged in front of the light-sensitive areas of the detector elements.
    Type: Grant
    Filed: May 3, 2012
    Date of Patent: April 21, 2015
    Assignee: Dr. Johannes Heidenhain GmbH
    Inventor: Michael Hermann
  • Publication number: 20150103356
    Abstract: A compact, balanced, up to three degrees of freedom measuring interferometer which enables fiber delivery of an optical source without periodic nonlinearity, an interferometer system, and method for using an interferometer to measure up to three degrees of freedom is disclosed.
    Type: Application
    Filed: November 29, 2012
    Publication date: April 16, 2015
    Applicants: DELFT UNIVERSITY OF TECHNOLOGY, UNIVERSITY OF ROCHESTER
    Inventors: Jonathan D. Ellis, Josephus Wilhelmus Spronck
  • Publication number: 20150085299
    Abstract: Disclosure is related to a light tracing method, and an apparatus thereof. According to one embodiment of the invention, the apparatus is such as an optical indexer. The method for determining a moving direction is performed based on an optical constructive or destructive interference pattern made by reflected lights received by a sensor chip. In particular, the coherent light may be preferably used in order to enhance the interference effect. In an exemplary embodiment, the method includes firstly the sensor pixels in the sensor chip receiving the reflected light, and calculating the energy. Next, within a time slot, the energy state of each sensor pixel can be calculated. A moving vector may be determined from a difference between the binary energy states of the adjacent sensor pixels. The binary energy state is based on a comparison between every sensor pixel and a statistic average within the sampling time slot.
    Type: Application
    Filed: September 25, 2013
    Publication date: March 26, 2015
    Inventors: Yun-Shan Chang, Da Wei Lin
  • Patent number: 8982334
    Abstract: The present invention refers to a method of operating a self-mixing interference sensor and a corresponding self-mixing interference sensor device. In the method the laser (1) of the device is controlled to periodically emit a laser pulse followed by an emission period of laser radiation having a lower amplitude. The pulse width of the laser pulse is selected such that the pulse after reflection at the object (3) re-enters the laser (1) during the emission period of laser radiation with lower amplitude. The corresponding SMI signal has an increased signal to noise ratio.
    Type: Grant
    Filed: August 10, 2010
    Date of Patent: March 17, 2015
    Assignee: Koninklijke Philips N.V.
    Inventors: Alexander Marc Van Der Lee, Mark Carpaij, Holger Moench, Marcel Schemmann
  • Patent number: 8982339
    Abstract: A material-working device with working beams of a beam generator and with in-situ measurement of a working distance between the beam generator and a workpiece, the material-working device including a working laser; a laser scanner for the working laser, the laser scanner including a two-dimensional deflecting device with scanner mirrors and a variable refocusing device at varying working distances; and a sensor device including a spectrometer and at least one sensor light source, wherein measuring beams together scan a working area of the workpiece by the laser scanner and an objective lens while gathering the working distance, and the measuring beams of at least two of the light sources of the sensor device being linearly polarized and being coupled into a working beam path of the laser scanner of the material-working device by an optical coupling element in a collimated state with crossed polarization directions.
    Type: Grant
    Filed: November 2, 2012
    Date of Patent: March 17, 2015
    Assignee: Precitec Optronik GmbH
    Inventors: Martin Schönleber, Markus Kogel-Hollacher
  • Patent number: 8958055
    Abstract: A laser based coordinate measuring device measures a position of a remote target. The laser based coordinate measuring device includes a stationary portion, a rotatable portion, and at least a first optical fiber. The stationary portion has at least a first laser radiation source and at least a first optical detector, and the rotatable portion is rotatable with respect to the stationary portion. The first optical fiber system, which optically interconnects the first laser radiation source and the first optical detector with an emission end of the first optical fiber system, has the emission end disposed on the rotatable portion. The emission end emits laser radiation to the remote target and receives laser radiation reflected from the remote target with the emission direction of the laser radiation being controlled according to the rotation of the rotatable portion.
    Type: Grant
    Filed: January 3, 2012
    Date of Patent: February 17, 2015
    Assignee: Faro Technologies, Inc.
    Inventors: Robert E. Bridges, Lawrence B. Brown, James K. West, D. Scott Ackerson
  • Publication number: 20150043007
    Abstract: Embodiments of the invention relate to a method for determining a change in distance to a moving and reflective target. Embodiments of the invention can be performed by means of interferometry and may include the generation of laser radiation, the emission of the measurement radiation to the target, and the detection of at least part of the measurement radiation reflected at the target. In some embodiments, a superposition of the reflected measurement radiation with the reference radiation is generated and detected, an interferometer output variable is derived on the basis of the detected superposition, and/or a time-resolved output variable curve is produced from the derived interferometer output variable. In some embodiments, the output variable curve is continually checked in that the output variable curve is continually read out in a time-resolved manner.
    Type: Application
    Filed: February 28, 2013
    Publication date: February 12, 2015
    Inventors: Tomasz Kwiatkowski, Thomas Lüthi
  • Patent number: 8941841
    Abstract: A displacement measurement device includes a plurality of light receiving elements each of which outputs a signal corresponding to illuminance of interference fringe, the elements being arranged in a range of two periods of the interference fringe and arranged with an interval based on the period of the interference fringe in a movement direction of the interference fringe, a differential processing unit configured to perform differential processing on predetermined combinations of the signals output from the elements to generate four signals, a phase calculation unit configured to calculate a phase of the interference fringe on the basis of the signals output from the elements; and an output signal selection unit configured to select two signals from among the four signals on the basis of the phase of the interference fringe and select a signal of which absolute value is larger from among the two selected signals.
    Type: Grant
    Filed: March 25, 2013
    Date of Patent: January 27, 2015
    Assignee: Fujitsu Limited
    Inventors: Katsuki Shirai, Taizan Kobayashi, Kouji Uesaka
  • Publication number: 20150019160
    Abstract: A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.
    Type: Application
    Filed: May 22, 2014
    Publication date: January 15, 2015
    Applicant: attocube Systems AG
    Inventors: Klaus Thurner, Khaled Karrai, Pierre-Francois Braun
  • Patent number: 8919219
    Abstract: A precision equipment having: a base; a table supported by the base; a tubular rod connected to a side of the table via a joint; a drive mechanism that moves the rod forward and backward; and a laser interferometer that detects displacement of the table relative to the base. The joint is provided by a supplying-discharging static-pressure joint and includes: a movement surface that is connected to the table and is orthogonal to a moving direction of the table; a drive surface that is connected to the rod and faces the movement surface; and a fluid supply channel supplying fluid to a static-pressure clearance between the movement surface and the drive surface. The laser interferometer includes a laser path having an optical axis along the moving direction passing through the inside of the rod of which a pressure is reduced and the drive surface and reflect on the movement surface.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: December 30, 2014
    Assignee: Mitutoyo Corporation
    Inventor: Hisayoshi Sakai
  • Patent number: 8909804
    Abstract: A method distributing data in a network is provided. The method comprises measuring the path lengths between a reference clock and a plurality of remote destinations and sending a timing signal from the reference clock to the plurality of remote destinations. The method further comprises measuring the phase between the reference clock and a return signal from each of the plurality of remote destinations and adjusting the phase of the data such that each remote destination receives the data within a skew tolerance.
    Type: Grant
    Filed: September 14, 2009
    Date of Patent: December 9, 2014
    Assignee: Honeywell International Inc.
    Inventor: David Paul Campagna
  • Publication number: 20140347673
    Abstract: A laser tracking interferometer has a carriage provided with a first displacement gauge outputting a displacement signal associated with a relative displacement from a reference sphere; a second retroreflector provided to the carriage; a laser interferometer provided to the carriage and outputting a displacement signal associated with a relative displacement between the first retroreflector and the second retroreflector; and a data processor calculating a displacement of the first retroreflector with reference to the reference sphere based on the displacement signal output from the first displacement gauge and the displacement signal output from the laser interferometer.
    Type: Application
    Filed: May 19, 2014
    Publication date: November 27, 2014
    Applicant: MITUTOYO CORPORATION
    Inventors: Masayuki NARA, Shinichiro YANAKA
  • Patent number: 8896843
    Abstract: A method for speckle mitigation in an interferometric distance meter comprises the steps of transmitting optical radiation with at least one wavelength ? to a target to be surveyed, receiving a portion of the optical radiation scattered back by the target in an optical axis (OA), wherein the optical radiation forms a speckle field, converting the received optical radiation into at least one received signal, determining a true distance to the target from the received signal by absolute or incremental interferometric distance measurements. In the method the true pointing direction relative to the optical axis (OA) is determined, wherein the distance error due to speckle effects is corrected.
    Type: Grant
    Filed: December 13, 2010
    Date of Patent: November 25, 2014
    Assignee: Leica Geosystems AG
    Inventors: Marcel Rohner, Yves Salvade
  • Publication number: 20140313516
    Abstract: A calibration wafer and a method for calibrating an interferometer system are disclosed. The calibration method includes: determining locations of the holes defined in the calibration wafer based on two opposite intensity frame; comparing the locations of the holes against the locations measured utilizing an external measurement device; adjusting a first optical magnification or a second optical magnification at least partially based on the comparison result; defining a distortion map for each of the first and second intensity frames based on the comparison of the locations of the holes; generating an extended distortion map for each of the first and second intensity frames by map fitting the distortion map; and utilizing the extended distortion map for each of the first and second intensity frames to reduce at least one of: a registration error or an optical distortion in a subsequent measurement process.
    Type: Application
    Filed: April 17, 2013
    Publication date: October 23, 2014
    Applicant: KLA-Tencor Corporation
    Inventor: KLA-Tencor Corporation
  • Publication number: 20140307264
    Abstract: A laser tracker for continuous tracking of a reflecting target and for determining the distance to the target is provided. The laser tracker may include a base defining a standing axis, a beam steering unit for emission of a measuring radiation and for receiving at least a part of the measuring radiation reflected by the target. The beam steering unit is motorized to be pivotable relative to the base around the standing axis and a tilt axis extending substantially orthogonal to the standing axis. Furthermore, the tracker has a distance measuring unit configured as an interferometer for determining a change in distance to the target by means of interferometry, an interferometer laser beam source for generating the measuring radiation for the interferometer and an angle measurement functionality for determining an alignment of the beam steering unit relative to the base. The interferometer laser beam source may be configured as a laser diode.
    Type: Application
    Filed: November 2, 2012
    Publication date: October 16, 2014
    Inventors: Thomas Lüthi, Burkhard Böckem
  • Patent number: 8860947
    Abstract: A novel soft beamsplitter mounting system as part of an interferometer to protect the beamsplitter substrate from external stresses and thus preserve optical flatness is introduced. The soft mounting system enables such protection by being more flexible that the beamsplitter substrate so external forces deforms the mount rather than the beamsplitter. Although the soft beamsplitter mounting configurations disclosed herein protects the beamsplitter, the interferometer itself is less stable because the mounts of the present invention allows the beamsplitter to tilt more easily than other components held in the interferometer. The improved tilt control embodiments of the present invention turns this seemingly deleterious effect into a cost saving benefit by using the inexpensive soft mounting system as a flexure to allow an improved active control system to maintain tilt alignment in a system that is more rugged than conventional interferometers.
    Type: Grant
    Filed: November 11, 2010
    Date of Patent: October 14, 2014
    Assignee: Thermo Electron Scientific Instruments LLC
    Inventor: John Magie Coffin
  • Publication number: 20140300903
    Abstract: An angle measuring system including: a rotary encoder including an encoder main body and a rotating shaft which is freely rotatable with respect to the encoder main body, the rotary encoder which detects a relative rotation angle of the rotating shaft with respect to the encoder main body; a regulation member which regulates an absolute rotation angle of the encoder main body about the rotating shaft within a fixed range; an absolute angle detecting device which detects the absolute rotation angle of the encoder main body about the rotating shaft concurrently with detection of the relative rotation angle by the rotary encoder; and a correction device which corrects the rotation angle detected by the rotary encoder based on the rotation angle detected by the absolute angle detecting device.
    Type: Application
    Filed: April 3, 2013
    Publication date: October 9, 2014
    Applicant: TOKYO SEIMITSU CO., LTD.
    Inventor: Toru SHIMIZU
  • Publication number: 20140300904
    Abstract: The present invention provides a measurement apparatus including a first optical system configured to allow a first test light to pass, and a second optical system configured to allow a second test light to pass, wherein an optical power in the first optical system and an optical power in the second optical system are different, a distance between a focal point of the first test light on a side of the surface to be measured and the surface to be measured changes in accordance with each of a plurality of wavelengths of the first test light, and a distance between a focal point of the second test light on the side of the surface to be measured and the surface to be measured changes in accordance with each of a plurality of wavelengths of the second test light.
    Type: Application
    Filed: April 2, 2014
    Publication date: October 9, 2014
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Hiroyuki YUKI
  • Publication number: 20140268170
    Abstract: Provided are an apparatus and a method for estimating a depth of a buried defect in a substrate. The apparatus for estimating a depth of a buried defect in a substrate includes a light source providing a source of light, an aperture through which only a part of the source of light passes, a reflecting mirror receiving and reflecting the source of light that has passed through the aperture as a first light, a lens receiving and condensing the first light, the substrate receiving and reflecting the condensed first light as a second light, a light sensor receiving the second light and sensing a brightness of the second light, and a position adjustment portion adjusting a distance between the lens and the substrate.
    Type: Application
    Filed: December 10, 2013
    Publication date: September 18, 2014
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Jong-Cheon Sun, Jeong-Ho Ahn, Dong-Ryul Lee, Dong-Chul Ihm