Surface Displacement Due To Acoustic Wave Propagation) Patents (Class 356/502)
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Patent number: 10366674Abstract: A system calibrates luminance of an electronic display. The system includes an electronic display, a luminance detection device, and a controller. The luminance detection device is configured to measure luminance parameters of active sections of the electronic display. The controller is configured to instruct the electronic display to activate sections in a sparse pattern and in a rolling manner and instruct the luminance detection device to measure luminance parameters for each of the active sections in the sparse pattern. The controller generates calibration data based on the measured luminance parameters of sections in the sparse pattern.Type: GrantFiled: December 27, 2016Date of Patent: July 30, 2019Assignee: Facebook Technologies, LLCInventor: Kieran Tobias Levin
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Patent number: 10352762Abstract: A system for detecting vibrations from a surface is provided. The system includes a coherent light source for projecting a multi-beam pattern onto the surface and an imaging device for mapping a speckle field generated by each spot formed on the surface by the multi-beam pattern to a unique region of an imaging sensor. The system further includes a processor for processing speckle field information received by the imaging sensor and deriving surface vibration information.Type: GrantFiled: December 27, 2015Date of Patent: July 16, 2019Assignee: Guardian Optical Technologies Ltd.Inventor: Gideon Carmon
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Patent number: 10247814Abstract: A phase shift detector includes: an interferometer; and a microwave probe in electrical communication with the interferometer, the microwave probe including: a primary shield electrode; and a transmission electrode disposed proximate to the primary shield electrode, the transmission electrode and the primary shield electrode being exposed and arranged to produce an electric field, wherein the transmission electrode is isolated electrically from the primary shield electrode.Type: GrantFiled: January 14, 2016Date of Patent: April 2, 2019Assignee: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGYInventors: Kin P. Cheung, Jason T. Ryan, Jason Campbell
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Patent number: 10234264Abstract: The present disclosure relates to a full-field Z-direction displacement measurement system. Dynamic measurement is achieved on the basis of laser shearing speckle interferometry by using a spatial domain phase shift method. The homogeneity and similar measurement accuracy of the laser shearing speckle interferometry and the Doppler interferometry are further used to help the laser shearing speckle interferometry to implement absolute displacement measurement by using the single-point time domain Doppler interferometry. By means of the improvements in these aspects, the measurement system of the present invention can achieve full-field Z-direction displacement measurement, high-precision full-field absolute value vibration measurement and transient depth measurement, and can have important applications in depth measurement, three-dimensional sensing, vibration measurement in aerospace and the depth measurement in new material characterization detection and other fields.Type: GrantFiled: January 17, 2017Date of Patent: March 19, 2019Assignee: Shenzhen Orbbec Co., Ltd.Inventors: Yuanhao Huang, Honghuai Xu, Chengyu Zhang
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Patent number: 10073060Abstract: A method for inspecting an additive manufacturing process in which a directed energy source is used to create a weld pool at an exposed build surface of a mass of powdered material, and selectively fuse the powdered material to form a workpiece. The inspection method includes: using a noncontact method to generate an acoustic wave in the build surface; using a noncontact method to measure displacement of the build surface in response to the acoustic wave; and determining at least one sub-surface material property of the workpiece by analyzing the displacement of the build surface.Type: GrantFiled: November 19, 2015Date of Patent: September 11, 2018Assignee: General Electric CompanyInventors: MacKenzie Ryan Redding, Scott Alan Gold, Thomas Graham Spears
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Patent number: 9964432Abstract: Method and system for measuring vibration in two or three directions in objects (12) by using three illumination light beams (11A-C) for measurement of in-plane vibrations in two directions, where one of the three illumination light beams (11A-C) is common for the two in-plane measurements, and where the three illumination light beams (11A-C) are configured to provide free space at one side of the object (12) for easier access to the object. The method and system is further arranged for using two illumination light beams (30A-B) for measuring vibrations in the object (12) in a third direction, which third direction is out-of-plane direction, where one illumination light beam (30A) is illuminating the object (12) through an imaging objective (16) and one illumination light beam (30B) is used as reference beam.Type: GrantFiled: December 4, 2013Date of Patent: May 8, 2018Assignee: Optonor ASInventor: Eiolf Vikhagen
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Patent number: 9945914Abstract: A nonlinear terahertz (THz) spectroscopy technique uses a sample illuminated by two THz pulses separately. The illumination generates two signals BA and BB, corresponding to the first and second THz pulse, respectively, after interaction with the sample. The interaction includes excitation of at least one ESR transition in the sample. The sample is also illuminated by the two THz pulses together, with an inter-pulse delay ?, generating a third signal BAB. A nonlinear signal BNL is then derived via BNL=BAB?BA?BB. This nonlinear signal BNL can be then processed (e.g., Fourier transform) to study the properties of the sample.Type: GrantFiled: May 19, 2017Date of Patent: April 17, 2018Assignee: Massachusetts Institute of TechnologyInventors: Harold Young Hwang, Jian Lu, Yaqing Zhang, Benjamin K. Ofori-Okai, Keith A. Nelson, Xian Li
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Patent number: 9903818Abstract: To implement an analysis result provision system that can acquire an analysis result of a target substance without transferring the substance when the substance is analyzed using plasma light information occurred from plasma area where the substance is turned to plasma state, a provision system of analysis result includes an analytical terminal that turns a target substance to plasma state and acquires plasma light information occurred from plasma area, and a host computer. The host computer includes host side communication part that acquires plasma light information via telecommunication line, and information analysis part that analyzes the target substance using plasma light information acquired by the host side communication part. The host side communication part transmits the analysis result of the target substance to the sender of the plasma light information. The analysis result is obtained by the analysis of the information analysis part using plasma light information.Type: GrantFiled: December 26, 2012Date of Patent: February 27, 2018Assignee: IMAGINEERING, INC.Inventor: Yuji Ikeda
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Patent number: 9888856Abstract: A photoacoustic wave induced in a subject to be examined by illumination of the subject to be examined with light is detected. A first photoacoustic image corresponding to a frequency component less than or equal to a predetermined frequency and a second photoacoustic image corresponding to a frequency component higher than a predetermined frequency are generated based on a detection signal of the detected photoacoustic wave. The first photoacoustic image and the second photoacoustic image are combined together by placing, on a pixel in the first photoacoustic image the pixel value of which is less than or equal to a threshold, a pixel in the second photoacoustic image corresponding to the pixel in the first photoacoustic image.Type: GrantFiled: November 7, 2014Date of Patent: February 13, 2018Assignee: FUJIFILM CorporationInventor: Kazuhiro Tsujita
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Patent number: 9782933Abstract: The invention concerns an apparatus (1) for producing three-dimensional objects (6) layer by layer using a powdery material which can be solidified by irradiating it with a beam (4) of charged particles, said apparatus (1) comprising means for successive application of powder layers to a work table, and a radiation gun (3) for delivering said beam (4) of charged particles, wherein the inventive apparatus (1) comprises a powder-lifting detection device (10, 10a, 10b, 10c, 10d, 10e) capable of generating a signal (S) upon detection of lifting of powdery material from the working area (5).Type: GrantFiled: February 10, 2015Date of Patent: October 10, 2017Assignee: Arcam ABInventors: Daniel Jonasson, Morgan Larsson, Ulf Ackelid, Anders Snis, Tomas Lock
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Patent number: 9749060Abstract: Techniques are described for characterizing a receiver front end of a pluggable optical module. The pluggable optical module receives an optical signal that includes a first portion having a first polarization and a second portion having a second polarization. The first portion and second portion are not coherent with one another and the power of the first portion and second portion is equal.Type: GrantFiled: December 31, 2015Date of Patent: August 29, 2017Assignee: Juniper Networks, Inc.Inventors: Qiang Wang, Yang Yue, Murat Arabaci
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Patent number: 9722793Abstract: An optical sensing device can receive a speckle pattern generated by a laser's interaction with acoustically stimulated tissue. A computing device can identify one or more characteristics within the received speckle pattern. The computing device can then identify a match of the one or more characteristics to a user biometric signature stored within a storage device. Based upon the identified match, the system can authenticate a user within a computer system.Type: GrantFiled: September 9, 2015Date of Patent: August 1, 2017Assignee: Microsoft Technology Licensing, LLCInventors: John Michael Lutian, Sergey Ulyanov
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Patent number: 9188478Abstract: An apparatus and a method for detecting surface motion of an object subject to ultrasound are disclosed. The method comprises generating a laser beam, dividing the laser beam into a reference beam and an object beam to be directed onto the surface, thereby producing a scattered object beam, introducing a small-amplitude modulation in the optical path difference between the reference beam and the scattered object beam, detecting the interference between the scattered object beam and the phase modulated reference beam using a plurality of detecting elements to generate a plurality of electrical interference signals, wherein the electrical interference signals each comprise a wanted signal component indicative of the surface motion and a noise signal component, and processing the electrical interference signals to determine the surface motion of the object.Type: GrantFiled: February 8, 2013Date of Patent: November 17, 2015Assignee: Bossa Nova Technologies, LLCInventor: Bruno François Pouet
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Patent number: 9140601Abstract: An automatically adjustable method for use in opto-acoustic metrology or other types of metrology operations is described. The method includes modifying the operation of a metrology system that uses a PSD style sensor arrangement. The method may be used to quickly adjust the operation of a metrology system to ensure that the data obtained therefrom are of the desired quality. Further, the method is useful in searching for and optimizing data that is or can be correlated to substrate or sample features or characteristics that of interest. Apparatus and computer readable media are also described.Type: GrantFiled: January 27, 2012Date of Patent: September 22, 2015Assignee: Rudolph Technologies, Inc.Inventors: Manjusha Mehendale, Michael Kotelyanskii, Priya Mukundhan, Michael Colgan, Wei Zhou
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Patent number: 8976365Abstract: A material sensing apparatus comprises an excitation source configured to induce waves in a workpiece, and an optical waveguide interferometer configured to sense the induced waves in the workpiece. The optical waveguide interferometer comprises a probe segment having a probe segment end, and an adjustable coupler configured to permit setting a gap between the probe segment end and the workpiece. A controller is coupled to the adjustable coupler and configured to set the gap between the probe segment end and the workpiece.Type: GrantFiled: December 17, 2013Date of Patent: March 10, 2015Assignee: Harris CorporationInventors: Robert M. Montgomery, Randy L. Carmean, Charles Franklin Middleton, IV, James G. Tonti
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Patent number: 8842289Abstract: A biological sensing apparatus comprises an excitation source configured to induce waves in a biological target, and an optical waveguide interferometer configured to sense the induced waves in the biological target. The optical waveguide interferometer comprises a probe segment having a probe segment end, and an adjustable coupler configured to permit setting a gap between the probe segment end and the biological target. A controller is coupled to the adjustable coupler and configured to set the gap between the probe segment end and the biological target.Type: GrantFiled: January 13, 2014Date of Patent: September 23, 2014Assignee: Harris CorporationInventors: Robert M. Montgomery, Randy L. Carmean, Charles Franklin Middleton, IV, James G. Tonti
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Patent number: 8842290Abstract: A sensing apparatus comprises an excitation source configured to induce waves in a target, and a fiber optic interferometer configured to sense the induced waves in the target. The fiber optic interferometer comprises a probe segment having a probe segment end, and an adjustable coupler configured to permit setting a gap between the probe segment end and the target. A controller is coupled to the adjustable coupler and configured to set the gap between the probe segment end and the target.Type: GrantFiled: December 17, 2013Date of Patent: September 23, 2014Assignee: Harris CorporationInventors: Robert M. Montgomery, Randy L. Carmean, Charles Franklin Middleton, IV, James G. Tonti
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Publication number: 20140247456Abstract: The invention relates to a method for photoacoustic tomography of a sample, deformations on a measurement surface of the sample being measured as a function of location and time, the deformations resulting from the absorption of a pulsed excitation radiation on at least one spectrally addressable target structure in the sample interior while emitting thermomechanical pressure waves in the direction of the measurement surface, and the measured deformations being fed to a reconstruction method for determining the position of the target structure in the sample interior.Type: ApplicationFiled: March 3, 2014Publication date: September 4, 2014Applicant: Medizinisches Laserzentrum Lubeck GmbHInventors: Jens HORSTMANN, Ralf Brinkmann
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Patent number: 8797515Abstract: An apparatus and a method capable of measuring large deformation with a high accuracy and dynamically, using speckle interference, utilizes an optical path where one laser beam out of two laser beams becomes non-collimated light and a plane parallel transparent plate, and can form carrier fringes. More specifically, the transparent plate is arranged on the optical path where the non-collimated light is formed, or is removed from the optical path, or a refractive index, or a thickness of the transparent plate arranged on the optical path, or a tilt angle relative to an optical axis is changed. The phase analysis can be performed from fringe images corresponding to the deformation, by performing repetitively the above-described processing and acquisition of the speckle interference pattern.Type: GrantFiled: May 24, 2011Date of Patent: August 5, 2014Assignee: Canon Kabushiki KaishaInventor: Takashi Sugimoto
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Patent number: 8760665Abstract: High speed autofocus interferometric inspection systems and methods are discussed in this Application. In accordance with some embodiments, an inspection system can generally include a laser module, an interferometer module, and a system controller. The laser can produce laser pulses to excite a device such as a silicon wafer, chip capacitor or chip packaged/silicon die containing a plurality of solder bumps into vibration. The interferometer module can be disposed to receive reflected laser energy from the device to sense vibration displacements created in the device with the laser pulses. The system controller to receive vibration data from the interferometer, the system controller configured to output a control signal for adjusting a relative distance and position between the laser module and the device. Other aspects, features, and embodiments are also claimed and discussed.Type: GrantFiled: January 26, 2010Date of Patent: June 24, 2014Assignee: Georgia Tech Research FoundationInventors: Ifeanyi Charles Ume, Tyler Randolph
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Patent number: 8687068Abstract: A pattern includes a spatial configuration of color codes. Each color code is a unique configuration of colors selected from a number of basis colors. The color codes each include the same number of colors.Type: GrantFiled: September 19, 2010Date of Patent: April 1, 2014Assignee: Hewlett-Packard Development Company, L.P.Inventors: Nelson Liang An Chang, Suk Hwan Lim
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Interferometric material sensing apparatus including adjustable reference arm and associated methods
Patent number: 8675204Abstract: A material sensing apparatus includes an excitation source configured to induce waves in a workpiece, and an optical waveguide interferometer configured to sense the induced waves in the workpiece. The optical waveguide interferometer includes a plurality of optical couplers and interconnecting optical fibers arranged to define a reference arm, a measurement arm, and a probe segment coupled to the reference arm and the measurement arm and having a probe segment end to be positioned adjacent the workpiece. An optical path length adjustor is coupled to the reference arm. A controller cooperates with the optical path length adjustor and the first optical detector. The controller is configured to adjust an optical path length of the reference arm to maintain a constant relationship with respect to an optical path length of the measurement arm, and to generate workpiece data based upon the first optical detector.Type: GrantFiled: May 6, 2011Date of Patent: March 18, 2014Assignee: Harris CorporationInventors: Robert M. Montgomery, Randy L. Carmean, Charles Franklin Middleton, IV, James G. Tonti -
Patent number: 8675203Abstract: A biological sensing apparatus includes an excitation source configured to induce waves in a biological target, and an optical waveguide interferometer configured to sense the induced waves in the biological target. The optical waveguide interferometer includes a plurality of optical couplers and interconnecting optical fibers arranged to define a reference arm, a measurement arm, and a probe segment coupled to the reference arm and the measurement arm and having a probe segment end to be positioned adjacent the biological target. An optical path length adjustor is coupled to the reference arm. A controller cooperates with the optical path length adjustor and a first optical detector. The controller is configured to adjust an optical path length of the reference arm to maintain a constant relationship with respect to an optical path length of the measurement arm, and to generate biological target data based upon the first optical detector.Type: GrantFiled: May 6, 2011Date of Patent: March 18, 2014Assignee: Harris CorporationInventors: Robert M. Montgomery, Randy L. Carmean, Charles Franklin Middleton, IV, James G. Tonti
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Patent number: 8675202Abstract: A sensing apparatus includes an excitation source configured to induce waves in a target, and an optical waveguide interferometer configured to sense the induced waves in the target. The optical waveguide interferometer includes a plurality of optical couplers and interconnecting optical fibers arranged to define a reference arm, a measurement arm, and a probe segment coupled to the reference arm and the measurement arm and having a probe segment end to be positioned adjacent the target. An optical path length adjustor is coupled to the reference arm. A controller cooperates with the path length adjustor and is configured to adjust an optical path length of the reference arm to maintain a constant relationship with respect to an optical path length of the measurement arm.Type: GrantFiled: May 6, 2011Date of Patent: March 18, 2014Assignee: Harris CorporationInventors: Robert M. Montgomery, Randy L. Carmean, Charles Franklin Middleton, IV, James G. Tonti
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Patent number: 8665451Abstract: A biological sensing apparatus comprises an excitation source configured to induce waves in a biological target, and an optical waveguide interferometer configured to sense the induced waves in the biological target. The optical waveguide interferometer comprises a probe segment having a probe segment end, and an adjustable coupler configured to permit setting a gap between the probe segment end and the biological target. A controller is coupled to the adjustable coupler and configured to set the gap between the probe segment end and the biological target.Type: GrantFiled: May 6, 2011Date of Patent: March 4, 2014Assignee: Harris CorporationInventors: Robert M. Montgomery, Randy L. Carmean, Charles Franklin Middleton, IV, James G. Tonti
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Patent number: 8649021Abstract: A sensing apparatus comprises an excitation source configured to induce waves in a target, and a fiber optic interferometer configured to sense the induced waves in the target. The fiber optic interferometer comprises a probe segment having a probe segment end, and an adjustable coupler configured to permit setting a gap between the probe segment end and the target. A controller is coupled to the adjustable coupler and configured to set the gap between the probe segment end and the target.Type: GrantFiled: May 6, 2011Date of Patent: February 11, 2014Assignee: Harris CorporationInventors: Robert M. Montgomery, Randy L. Carmean, Charles Franklin Middleton, IV, James G. Tonti
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Patent number: 8649022Abstract: A material sensing apparatus comprises an excitation source configured to induce waves in a workpiece, and an optical waveguide interferometer configured to sense the induced waves in the workpiece. The optical waveguide interferometer comprises a probe segment having a probe segment end, and an adjustable coupler configured to permit setting a gap between the probe segment end and the workpiece. A controller is coupled to the adjustable coupler and configured to set the gap between the probe segment end and the workpiece.Type: GrantFiled: May 6, 2011Date of Patent: February 11, 2014Assignee: Harris CorporationInventors: Robert M. Montgomery, Randy L. Carmean, Charles Franklin Middleton, IV, James G. Tonti
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Patent number: 8643846Abstract: The present invention provides for a novel method and apparatus for the simultaneous generation and detection of optical diffraction interference pattern on a photo detector. The monitoring method and apparatus disclosed herein comprises of a (any) continuous wave coherent collimated beam of light (or a laser) falling on an (any) optically reflective coating on the surface of the body with inherent vibrations, or with manifest vibrations induced from another source through any medium where the said light is reflected, and then received on the surface of a (any) photo detector in such a way that the received light falls partially on the active sensing area, and partially on the outer perimeter of the active sensing area.Type: GrantFiled: July 10, 2008Date of Patent: February 4, 2014Assignee: Defence Research and Development OrganisationInventors: Thankappan Santhanakrishnan, Tatavarti Venkata Sreerama Narasimha Rao
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Publication number: 20130208284Abstract: An apparatus and a method for detecting surface motion of an object subject to ultrasound are disclosed. The method comprises generating a laser beam, dividing the laser beam into a reference beam and an object beam to be directed onto the surface, thereby producing a scattered object beam, introducing a small-amplitude modulation in the optical path difference between the reference beam and the scattered object beam, detecting the interference between the scattered object beam and the phase modulated reference beam using a plurality of detecting elements to generate a plurality of electrical interference signals, wherein the electrical interference signals each comprise a wanted signal component indicative of the surface motion and a noise signal component, and processing the electrical interference signals to determine the surface motion of the object.Type: ApplicationFiled: February 8, 2013Publication date: August 15, 2013Inventor: Bruno François Pouet
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Patent number: 8497986Abstract: A laser maintenance apparatus including a laser irradiation device which includes a first optical element for irradiating detection laser light on a test object to detect an ultrasonic wave; a second optical element for irradiating generation laser light on a test object so as to excite the ultrasonic wave; and an optical system container for containing the first and second optical element. The reflection direction of the first optical element and the reflection direction of the second optical element are arranged at an angle along the circumferential direction of the test object. The light reflected by the first optical element is irradiated at a position different than light reflected by the second optical element, and the laser irradiation positions of the light reflected by the first and second optical elements are different in the axial direction and the circumferential direction of the test object.Type: GrantFiled: April 23, 2010Date of Patent: July 30, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Makoto Ochiai, Takahiro Miura, Mitsuaki Shimamura, Hidehiko Kuroda, Fukashi Osakata, Kentaro Tsuchihashi, Masahiro Yoshida
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Patent number: 8487208Abstract: A laser beam irradiation apparatus includes a laser beam oscillation unit including a pulse laser beam oscillator for oscillating a pulse laser beam and a cycle frequency setting unit for setting the cycle frequency, an acousto-optic deflection unit for deflecting the optical axis of the pulse laser beam oscillated from the laser beam oscillation section, and a control unit for controlling the acousto-optic deflection unit. The control unit outputs a driving pulse signal having a predetermined time width including a pulse width of the pulse laser beam oscillated from the pulse laser beam oscillator to the acousto-optic deflection unit based on the cycle frequency setting signal from the cycle frequency setting section.Type: GrantFiled: August 8, 2007Date of Patent: July 16, 2013Assignee: Disco CorporationInventors: Yutaka Kobayashi, Kouichi Nehashi, Keiji Nomaru, Yasuomi Kaneuchi
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Publication number: 20130120758Abstract: A laser ultrasonic measurement system includes a first and a second laser source configured to generate a first and a second laser beam, respectively. A movable mechanical link is arranged to transmit the first laser beam. The movable mechanical link is formed by a plurality of rigid sections interconnected by rotating joints. A robot is configured to support and control the movement of at least a section of the mechanical link to transmit the first laser beam to an object. An optical scanner is positioned proximate to the mechanical link. The optical scanner is configured to direct the first and second laser beams onto the object. An interferometer is optically coupled to the optical scanner. The interferometer is configured to receive reflected light from the object and in response generate an electrical signal. The first laser source is kinematically mounted in a housing assembly.Type: ApplicationFiled: June 26, 2012Publication date: May 16, 2013Inventors: Marc Dubois, Thomas E. Drake
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Patent number: 8411279Abstract: Remote seismic surveying systems and methods are disclosed. At least some embodiments illuminate a water or ground surface with a beam from a coherent electromagnetic wave source. Reflected electromagnetic energy is focused onto an image plane where it combines with a reference beam to form an interference pattern. Electronics track the intensity versus time for multiple points in the image and derive displacement signals for various physical locations in the survey region. These displacement signals are associated with seismic source firing times and locations before being stored as seismic traces in a survey database. Some variations use the reflected electromagnetic energy to create multiple interference patterns that vary due to different path length differences, thereby eliminating signal phase ambiguities.Type: GrantFiled: August 12, 2009Date of Patent: April 2, 2013Inventor: Gary Lee Scott
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Patent number: 8390815Abstract: Low-cost interface property measuring device and method enabling high-precision and simple measurement of an interface property.Type: GrantFiled: March 14, 2008Date of Patent: March 5, 2013Assignee: National University Corporation Shizuoka UniversityInventors: Takayuki Saito, Toshiyuki Sanada, Yusuke Ozawa
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Publication number: 20120320383Abstract: A laser ultrasonic inspection system comprises laser sources configured to generate laser beams, an optical scanner configured to direct the laser beams onto an object thereby generating ultrasonic waves in the object and illuminating the object, an interferometer configured to generate an electrical signal in response to the reflected light, and a radiation restricting inspection chamber for housing the object. Another laser ultrasonic inspection system comprises a radiation restricting inspection chamber, laser sources located outside of the inspection chamber, an optical scanner located inside the inspection chamber, a visible laser tracer representative of the orientation of the laser beams; an interferometer, a scanner positioning mechanism, and an object positioning mechanism. A method for inspecting an object comprises the steps of positioning an object inside of an inspection chamber, defining a scanning profile, and directing laser beams onto the object according to the inspection profile.Type: ApplicationFiled: June 14, 2012Publication date: December 20, 2012Inventors: Marc Dubois, Thomas E. Drake
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Patent number: 8269979Abstract: A device detects underfill voids and solder ball defects via laser generation and laser detection of an ultrasonic wave at the top surface of flip chips. High resolution is provided by using small laser spot sizes and closely-spaced laser beams of wavelengths that are absorbed near the surface of the semiconductor. Improved spatial resolution and rejection of unwanted scattered waves can be attained by limiting the time frame of the ultrasonic waveform to the time required for the first longitudinal wave reflection from the bottom of the flip chip. The laser beam spacing can be reduced by using probe and detection beams of different wavelengths. Resolution of less than 100 ?m features was demonstrated for silicon flip chips.Type: GrantFiled: December 6, 2007Date of Patent: September 18, 2012Assignee: Optech Ventures, LLCInventors: Marvin Klein, Todd Murray
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Patent number: 8264693Abstract: A method of measuring at least one property including a magnetic property of target material is provided. A pump pulse train having one or more pump pulses is generated. The target material is irradiated with at least a portion of the one or more pump pulses so as to cause transient perturbation in the target material. At least one probe pulse train is generated having one or more probe pulses. The target material is irradiated with at least a portion of the one or more probe pulses to obtain one or more reflected probe pulses which are modulated based on the transient perturbation. A time interval between a time at which the target material is irradiated by each of the pump pulses and a time at which the target material is irradiated by each of its corresponding probe pulses is controlled. Each modulated probe pulse is detected.Type: GrantFiled: December 8, 2008Date of Patent: September 11, 2012Assignee: The Regents of The University of MichiganInventors: Vladimir A. Stoica, Roy Clarke
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Patent number: 8248595Abstract: A surface inspecting method including irradiating a laser light to a test object to generate an ultrasonic wave, irradiating a second laser light at a position apart by a known distance from a position where the laser light is irradiated and receiving a reflection light thereof, and correcting a generation surface wave of a received ultrasonic wave by using an ultrasonic wave other than the generation surface wave to thereby detect a flaw of the test object. A characterization of the generation surface wave is divided or integrated by the same characterization of the ultrasonic wave other than the generation surface wave included in an output signal to obtain a performance index value and obtain a depth of the flaw by applying the performance index value to a calibration curve in which a corresponding relation between the performance index value and the depth of the flaw is obtained preliminarily.Type: GrantFiled: September 19, 2011Date of Patent: August 21, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Makoto Ochiai, Takahiro Miura, Hidehiko Kuroda, Fukashi Osakata, Satoshi Yamamoto, Kentaro Tsuchihashi, Masahiro Yoshida, Akira Tsuyuki
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Patent number: 8243280Abstract: A laser ultrasonic measurement system includes a first and a second laser source configured to generate a first and a second laser beam, respectively. A movable mechanical link is arranged to transmit the first laser beam. The movable mechanical link is formed by a plurality of rigid sections interconnected by rotating joints. A robot is configured to support and control the movement of at least a section of the mechanical link to transmit the first laser beam to an object. An optical scanner is positioned proximate to the mechanical link. The optical scanner is configured to direct the first and second laser beams onto the object. An interferometer is optically coupled to the optical scanner. The interferometer is configured to receive reflected light from the object and in response generate an electrical signal. The first laser source is kinematically mounted in a housing assembly.Type: GrantFiled: May 12, 2009Date of Patent: August 14, 2012Assignee: iPhoton Solutions, LLCInventors: Marc Dubois, Thomas E. Drake, Marvin Klein
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Patent number: 8199331Abstract: A vibrometer and a method for optically measuring oscillations at an object, including a radiation source for creating a source beam, a beam splitter to split the source beam into a measuring beam and a reference beam, an optic interference device for interfering the reference beam with a measuring beam, at least partially reflected by the object, and a detector, with the interference device and the detector being embodied cooperating such that a measuring beam, at least partially deflected by the object, and the reference beam interfere on the detector. The vibrometer is embodied as a heterodyne vibrometer, having an optic frequency shift unit, which is arranged in the optical path of the vibrometer, to form a carrier frequency by creating a frequency difference between the measuring beam and the reference beam.Type: GrantFiled: April 2, 2009Date of Patent: June 12, 2012Assignee: Polytec GmbHInventors: Christian Rembe, Georg Siegmund, Tian-Hua Xu
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Patent number: 8179535Abstract: An acoustic field in a body of water is monitored using a coherent light field emitter applying a distributed light field across the surface of the water to be reflected, and a sensor is used to sense reflected components of the light field above the surface and to provide a signal representing information in the reflected light and related to movements in the water and caused by the acoustic field. The signal is provided from an interferometry technique and useable to derive information on the underwater acoustic field in a useful form.Type: GrantFiled: May 10, 2007Date of Patent: May 15, 2012Assignee: Commonwealth Scientific and Industrial Research Organisation Australia and Defence Science and Technology OrganisationInventors: Barry John Martin, John Chester Wendoloski
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Patent number: 8151646Abstract: According to one embodiment, a system for measuring vibration includes multiple spatially separated detectors coupled to a differential signal analyzer and a light source. The light source generates a coherent light beam onto a target that is reflected as backscattered light. The differential signal analyzer receives signals from each of the detectors indicative of backscattered light from the target. The differential signal analyzer then applies a phase shift to a subset of the received signals and combines the phase shifted signals with signals from other detectors to form a differential signal representative of physical vibration of the target.Type: GrantFiled: October 24, 2008Date of Patent: April 10, 2012Assignee: Raytheon CompanyInventor: David U. Fluckiger
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Patent number: 8149421Abstract: Faults, dimensions and other characteristics of a material or structure are sensed by a coherent beam's reflection from the material when probed with ultrasonic waves or when vibrating at high frequencies. The reflected beam acquires a dynamic phase change substantially different from its original phase and from the phase of a reference beam split from the common source beam. The reflected beam and the reference beam are superimposed by diffraction in an adaptive holographic beam-splitter, and the superimposed beams are detected by a photodetector capable of detecting small phase changes from ultrasonic surface displacements or perturbations. An apparatus and method are disclosed defining an improved crystal homodyne interferometer with an energy source coupled to the crystal and operative to maintain the crystal in a condition for emptying unwanted traps in the crystal.Type: GrantFiled: June 23, 2008Date of Patent: April 3, 2012Assignee: Optech Ventures, LLCInventors: Marvin Klein, Konstantin Shcherbin
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Patent number: 8144334Abstract: An apparatus and method for non-determination of the surface velocity of a target using optical interference and Doppler shifting of the light reflected from the target are disclosed. It may be used to measure small-amplitude, acoustic frequency surface vibrations as well as non-periodic surface vibration.Type: GrantFiled: September 29, 2009Date of Patent: March 27, 2012Assignee: The United States of America as represented by the Secretary of the ArmyInventors: Stephen R. Chinn, James D. Haberstat, Bradley W. Libbey
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Patent number: 8139227Abstract: A method utilizes an optical resonator that includes a reflective element and a spatial mode filter positioned relative to the reflective element such that light emitted from the spatial mode filter is reflected by the reflective element. The optical resonator has an optical resonance with a resonance lineshape that is asymmetric as a function of wavelength.Type: GrantFiled: December 22, 2010Date of Patent: March 20, 2012Assignee: The Board of Trustees of the Leland Stanford Junior UniversityInventors: Onur Kilic, Michel J. F. Digonnet, Gordon S. Kino, Olav Solgaard
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Patent number: 8134715Abstract: An interferometer includes a cavity including a pair of mirrors defining a cavity length. An input beam and a counter-propagating reference beam are directed into the cavity. The interferometer generates a feedback control signal and an ultrasound signal for optimal performance and measurement of a target, respectively.Type: GrantFiled: May 19, 2009Date of Patent: March 13, 2012Assignee: iPhoton Solutions, LLCInventors: Thomas E. Drake, Marc Dubois
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Patent number: 8115936Abstract: A laser maintenance apparatus including a laser system which includes an optical system for emitting, in a first irradiation condition, a generation laser beam for generating an ultrasonic wave in a portion of an object on which maintenance is to be performed, and including a laser source configured to generate and detect a detection laser beam which interacts with the ultrasonic wave generated by the laser light beam in the first condition. The laser maintenance apparatus also includes a light transmitting device for transmitting laser light emitted from the laser system, a laser irradiation device for irradiating laser light transmitted by the light transmitting device to the object portion, and a transporting/scanning mechanism for transporting the light transmitting device and the laser irradiation device to a portion near the object portion, and scanning over an arbitrary range at the object portion.Type: GrantFiled: April 23, 2010Date of Patent: February 14, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Makoto Ochiai, Takahiro Miura, Hidehiko Kuroda, Fukashi Osakata, Kentaro Tsuchihashi, Masahiro Yoshida, Tetsuro Aikawa, Satoshi Okada, Toru Onodera, Akira Tsuyuki
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Patent number: 8111403Abstract: A method and a device for non-contact vibration measurement of an object. Method steps include: Moving at least one laser interferometer, which emits at least one measuring beam to at least one measuring point on the object, detecting the measuring beam reflected by the object, determining the vibration data from the emitted and reflected measuring beam, allocating the vibration data to the measuring point, as well as evaluating the vibration data and displaying the vibration data of the measuring point, with at least one comparison of a position of the laser interferometer being performed using at least one position of a known freely predetermined point on the object and a transformation rule being prepared to determine the position of the laser interferometer in reference to the object for arbitrary measuring positions based on the comparison. The device for measuring vibrations is also disclosed.Type: GrantFiled: May 19, 2008Date of Patent: February 7, 2012Assignee: Polytec GmbHInventor: Matthias Schuessler
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Patent number: 8089632Abstract: Systems and methods are provided for detecting contaminants associated with a target. In one embodiment, a system is provided that comprises a tunable laser configured to transmit an illuminator pulse at a target for a predetermined time duration and a laser Doppler vibrometer system configured to transmit a probe pulse at a surface of the target within the predetermined time duration. The laser Doppler vibrometer system is further configured to detect and analyze at least one return pulse of the probe pulse to determine a surface expansion velocity of contaminants associated with the target due to the illuminator pulse.Type: GrantFiled: June 9, 2008Date of Patent: January 3, 2012Assignee: Northrop Grumman Systems CorporationInventors: Robert Rex Rice, William Byron Cottingame
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Patent number: 8077036Abstract: A system for detecting and classifying a security breach may include at least one sensor configured to detect seismic vibration from a source, and to generate an output signal that represents the detected seismic vibration. The system may further include a controller that is configured to extract a feature vector from the output signal of the sensor and to measure one or more likelihoods of the extracted feature vector relative to set {bi} (i=1, . . . , imax) of breach classes bi. The controller may be further configured to classify the detected seismic vibration as a security breach belonging to one of the breach classes bi, by choosing a breach class within the set {bi} that has a maximum likelihood.Type: GrantFiled: October 2, 2008Date of Patent: December 13, 2011Assignee: University of Southern CaliforniaInventors: Theodore W. Berger, Alireza Dibazar, Ali Yousefi, Hyung O. Park