Having Wavefront Division (by Diffraction) Patents (Class 356/521)
  • Patent number: 10771776
    Abstract: The disclosure pertains to an apparatus comprising a circuitry. The circuitry is configured to obtain a calibration image of a target, to derive a sparse image based on the calibration image, wherein the sparse image includes image points, to derive ray support points based on the image points by performing an image to target mapping of the image points based on a polynomial function, wherein the ray support points being indicative of light rays reflected by the target and incidenting on an image sensor, and to generate a camera model based on the derived ray support points.
    Type: Grant
    Filed: August 24, 2018
    Date of Patent: September 8, 2020
    Inventor: Hendrik Schilling
  • Patent number: 10495439
    Abstract: Various optical systems equipped with diode laser light sources are discussed in the present application. One example system includes a diode laser light source for providing a beam of radiation. The diode laser has a spectral output bandwidth when driven under equilibrium conditions. The system further includes a driver circuit to apply a pulse of drive current to the diode laser. The pulse causes a variation in the output wavelength of the diode laser during the pulse such that the spectral output bandwidth is at least two times larger the spectral output bandwidth under the equilibrium conditions.
    Type: Grant
    Filed: September 15, 2016
    Date of Patent: December 3, 2019
    Inventors: Alexandre R. Tumlinson, Nathan Shemonski, Yuan Liu
  • Patent number: 10466460
    Abstract: A confocal microscope is provided that includes one or more lasers focused by an optical system into a line on the surface of a sample mounted to a stage. The microscope further includes at least one linear array detector that is optically conjugated to the focused line. The stage permits movement of the sample with respect to all other components of the microscope, which remain stationary.
    Type: Grant
    Filed: August 13, 2015
    Date of Patent: November 5, 2019
    Assignee: SURGIVANCE INC.
    Inventor: Daniel Summer Gareau
  • Patent number: 10422718
    Abstract: A test appliance and a method for testing a mirror, e.g., a mirror of a microlithographic projection exposure apparatus. The test appliance has a computer-generated hologram (CGH), and a test can be carried out on at least a portion of the mirror by way of an interferometric superposition of a test wave that is directed onto the mirror by this computer-generated hologram and a reference wave. Here, the computer-generated hologram (CGH) (120, 320) is designed in such a way that, during operation of the appliance, it provides a first test wave for testing a first portion of the mirror (101, 301) by interferometric superposition with a reference wave in a first position of the mirror (101, 301) and at least a second test wave for testing a second portion of the mirror (101, 301) by interferometric superposition with a reference wave in a second position of the mirror (101, 301).
    Type: Grant
    Filed: August 14, 2017
    Date of Patent: September 24, 2019
    Inventors: Hans-Michael Stiepan, Jochen Hetzler, Sebastian Fuchs
  • Patent number: 10357160
    Abstract: Two-dimensional image acquiring apparatuses, systems, methods and storage mediums are provided herein. An apparatus includes a Spectrally Encoded Endoscopy (“SEE”) probe including a diffractive element, the diffractive element operating to separate and diffract a transmitted light into separated light beams such that the diffracted light beams are superposed or substantially superposed on a target region; an image sensor that operates to acquire one or more intensities from a detected light; and an imaging optical system that operates to image light beams separated from the detected light, wherein the diffractive element, the imaging optical system, and the sensor are disposed for each of the light beams separated from the detected light to acquire spectral data of each of the light beams separated from the detected light. The diffractive element operates to rotate such that an image of the image sensor is changed, and a two-dimensional image is acquired.
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: July 23, 2019
    Assignee: Canon U.S.A., Inc.
    Inventors: Akira Yamamoto, Mitsuhiro Ikuta
  • Patent number: 10247582
    Abstract: An optical encoding device includes a light source module, an encoding disc, and a photodetector. The light source module emits a source beam. The encoding disc is disposed on a passing path of the source beam. The encoding disc has first diffracting patterns. The first diffracting patterns include a plurality of sets of first diffracting patterns arranged along a radial direction of the encoding disc. Each set of the first diffracting patterns includes a plurality kinds of first diffracting patterns having different pattern extending directions and different pattern periods. When the encoding disc is rotating, the first diffracting patterns in each set of first diffracting patterns enter the passing path of the source beam in sequence, to cause a diffraction and form diffracted beams having different angles. The photodetector receives the diffracted beams having the different angles.
    Type: Grant
    Filed: January 25, 2017
    Date of Patent: April 2, 2019
    Assignee: Industrial Technology Research Institute
    Inventors: Ming-Chieh Chou, Chi-Hung Lee, Ching-Chang Chen, Yi-Cheng Chen
  • Patent number: 10211596
    Abstract: Disclosed is an optical sensor, including an external cavity laser configured to output sensing light and reference light; and a photodetector configured to detect a beating signal by an interference of the sensing light and the reference light output from the external cavity laser, in which the external cavity laser includes a reflecting filter including a sensing grating, to which a sensing object is attachable, and a reference grating, which is disposed on the same plane as that of the sensing grating, and outputs sensing light reflected from the sensing grating and reference light reflected from the reference grating. Accordingly, the optical sensor does not require a high-resolution spectroscope and has improved resolution and sensitivity.
    Type: Grant
    Filed: August 26, 2016
    Date of Patent: February 19, 2019
    Inventor: Kwang Ryong Oh
  • Patent number: 10105050
    Abstract: An adaptive optics apparatus includes an aberration measuring unit that measures an aberration caused by a subject's eye, the aberration being measured on the basis of returning light that returns from the subject's eye; an aberration correcting unit that performs aberration correction in accordance with the aberration measured by the aberration measuring unit; an irradiation unit that irradiates the subject's eye with light corrected by the aberration correcting unit; and an adjusting unit that maintains a correction characteristic of the aberration correcting unit when the subject's eye moves out of a predetermined area.
    Type: Grant
    Filed: March 30, 2015
    Date of Patent: October 23, 2018
    Assignee: Canon Kabushiki Kaisha
    Inventor: Koji Nozato
  • Patent number: 10025205
    Abstract: The present disclosure relates to a method for detecting focal plane based on a grating Talbot effect, the function of which is to detect position of a silicon wafer in a photolithography machine in real time so as to implement an adjustment of leveling and foal plane of the silicon wafer in a high resolution. The detection system utilizes a phase change of “self-image” generated by a grating Talbot effect caused by defocusing of the silicon wafer, so as to accomplish the detecting for focal plane of the silicon wafer in the photolithography machine in a high resolution: if the silicon wafer is at a focal plane, the imaged wavefront by the grating is a planar wavefront; and when the silicon wafer is defocused, the imaged wavefront is a spherical wavefront. Such a detection system has a simple structure, a higher anti-interference capability and a perfect adaption of the process.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: July 17, 2018
    Assignees: The Institute of Optics and Electronics, The Chinese Academy of Sciences
    Inventors: Xianchang Zhu, Song Hu, Lixin Zhao
  • Patent number: 10012495
    Abstract: According to one aspect, the invention relates to a device (100, 200, 300, 400, 500) for measuring the distance, with respect to a reference plane (PREF), from a point of light (Pi) of an object (O). The device comprises a two-dimensional detector (30) comprising a detection plane (PDET) and an imaging system (10) adapted to form an image of a light spot (Pi) situated on an object of interest plane (11) in an image plane (11?) arranged in the vicinity of the detection plane (PDET) or a conjugate plane (P?DET) of the detection plane.
    Type: Grant
    Filed: September 8, 2015
    Date of Patent: July 3, 2018
    Inventors: Pierre Bon, Emmanuel Fort, Sandrine Leveque-Fort
  • Patent number: 10012491
    Abstract: A diffraction interferometer includes a reference light passage, a test light passage and a pinhole substrate. The pinhole substrate includes a test pinhole and a reference pinhole. The diffracted wavefront emitted from the test pinhole is reflected by the optical component to be tested adjacent to the pinhole substrate and a converge adjacent to the reference pinhole. The diffracted wavefront includes surface shape information of an optical component to be tested that is reflected by the pinhole substrate. Interference with the diffracted wavefront is emitted by the reference pinhole and forms interference fringes. The large numerical aperture phase-shifting dual pinhole diffraction interferometer adopts a dual pinhole substrate and a illumination manner with two converged light paths to enable the separation of the reference light and test light, to prevent disturbance between the two light paths, which would induce the change of interferogram status during phase-shifting.
    Type: Grant
    Filed: October 27, 2014
    Date of Patent: July 3, 2018
    Inventors: Nikolay Voznesenskiy, Dongmei Ma, Chunshui Jin, Haitao Zhang, Jie Yu, Mariia Voznesenskaia, Tatiana Voznesenskaia, Wenlong Zhang
  • Patent number: 9921111
    Abstract: A method for performing optical wavefront sensing includes providing an amplitude transmission mask having a light input side, a light output side, and an optical transmission axis passing from the light input side to the light output side. The amplitude transmission mask is characterized by a checkerboard pattern having a square unit cell of size ?. The method also includes directing an incident light field having a wavelength ? to be incident on the light input side and propagating the incident light field through the amplitude transmission mask. The method further includes producing a plurality of diffracted light fields on the light output side and detecting, at a detector disposed a distance L from the amplitude transmission mask, an interferogram associated with the plurality of diffracted light fields.
    Type: Grant
    Filed: July 13, 2016
    Date of Patent: March 20, 2018
    Assignee: RAM PHOTONICS, LLC
    Inventor: Seung-Whan Bahk
  • Patent number: 9864183
    Abstract: Systems and methods for structured illumination super-resolution phase microscopy are disclosed. According to an aspect, an imaging system includes a light source configured to generate light. The system also includes a diffraction grating positioned to receive and diffract the output light. The system also includes a sample holder positioned to receive the diffracted light for transmission through a sample. Further, the system includes an image detector positioned to receive the light transmitted through the sample and configured to generate image data based on the received light. The system also includes a computing device configured to apply subdiffraction resolution reconstruction to the image data for generating an image of the sample.
    Type: Grant
    Filed: April 11, 2014
    Date of Patent: January 9, 2018
    Inventors: Joseph A. Izatt, Shwetadwip Chowdhury
  • Patent number: 9846126
    Abstract: Apparatus, sensor chips and techniques for optical sensing of substances by using optical sensors on sensor chips.
    Type: Grant
    Filed: October 27, 2009
    Date of Patent: December 19, 2017
    Assignee: Genalyte, Inc.
    Inventors: Lawrence Cary Gunn, III, Muzammil Iqbal, Brad Spaugh, Frank Tybor
  • Patent number: 9810893
    Abstract: Various imaging apparatuses, methods and their implementation are characterized herein. As may be implemented with one or more embodiments, a phase mask and optics operate to provide characterization of object depth and related rotational mobility of a feature corresponding to the object. In various implementations, the optics include a microscope having an objective and a detection pathway that operate with the phase mask for passing the light from the objective. Circuitry, such as light detector, processor or combination thereof operates with the phase mask and microscope to characterize the depth and rotational mobility, based on detected light passed via the microscope and the phase mask.
    Type: Grant
    Filed: March 26, 2015
    Date of Patent: November 7, 2017
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Adam S. Backer, Mikael P. Backlund, Alexander R. von Diezmann, Steffen J. Sahl
  • Patent number: 9767596
    Abstract: A method of processing a depth image includes receiving a high-resolution color image and a low-resolution depth image corresponding to the high-resolution color image, generating a feature vector based on a depth distribution of the low-resolution depth image, selecting a filter to upsample the low-resolution depth image by classifying a generated feature vector according to a previously learnt classifier, upsampling the low-resolution depth image by using a selected filter, and outputting an upsampled high-resolution depth image.
    Type: Grant
    Filed: July 15, 2014
    Date of Patent: September 19, 2017
    Inventors: Seung-won Jung, Ouk Choi, Do-kyoon Kim, Kee-chang Lee
  • Patent number: 9757082
    Abstract: An x-ray imaging system includes an x-ray source, an x-ray detector including a plurality of detector strips arranged in a first direction of the x-ray detector. Each detector strip includes a plurality of detector pixels arranged in a second direction of the x-ray detector. A phase grating and a plurality of analyzer gratings including grating slits are disposed between the x-ray source and detectors. The x-ray source and the x-ray detector are adapted to perform a scanning movement in relation to an object in the first direction, in order to scan the object. Each of the plurality of analyzer gratings is arranged in association with a respective detector strip with the grating slits arranged in the second direction. The grating slits of the analyzer gratings of the detector strips are offset relative to each other in the second direction.
    Type: Grant
    Filed: July 15, 2016
    Date of Patent: September 12, 2017
    Inventors: Erik Fredenberg, Magnus Aslund
  • Patent number: 9497379
    Abstract: Certain aspects pertain to Fourier ptychographic imaging systems, devices, and methods such as, for example, high NA Fourier ptychographic imaging systems and reflective-mode NA Fourier ptychographic imaging systems.
    Type: Grant
    Filed: August 22, 2014
    Date of Patent: November 15, 2016
    Assignee: California Institute of Technology
    Inventors: Xiaoze Ou, Roarke Horstmeyer, Guoan Zheng, Changhuei Yang
  • Patent number: 9488444
    Abstract: An EO sensor is configured to time multiplex a primary optical channel that provides high detection sensitivity to maintain high SNR and a multi-filtered optical channel that provides detection in different measurement bands (e.g. spectral, polarization, amplitude or phase). The channels may, for example, be time multiplexed based on range to target or within each integration period of the EO sensor. The multi-filtered optical channel uses a field directing array to sample the FOV to form different optical sub-channels that are filtered by different optical filters. These sub-channels may be spatially multiplexed onto different sub-regions of the detector or may be time multiplexed onto the entire detector. The light modulator used to time multiplex the primary and multi-filtered optical channels may be used to time de-multiplex spatially overlapping regions of the FOV onto a pixel of the detector in order to detect high spatial resolution images with low resolution detectors.
    Type: Grant
    Filed: April 29, 2013
    Date of Patent: November 8, 2016
    Assignee: Raytheon Company
    Inventors: Casey T. Streuber, Michael P. Easton, Kent P. Pflibsen
  • Patent number: 9360423
    Abstract: An optical system for a holographic microscope includes: a light source configured to emit a light beam; a grating configured to split the light beam into a reference beam and an object beam; a lens unit configured to irradiate a sample by the reference and object beams split by the grating; a spatial filter including a first region for the reference beam and a second region for the object beam; and a detector configured to detect an interference pattern caused by the reference and object beams.
    Type: Grant
    Filed: June 29, 2012
    Date of Patent: June 7, 2016
    Assignee: Canon Kabushiki Kaisha
    Inventors: Chung-Chieh Yu, Isao Matsubara, Yasuyuki Unno
  • Patent number: 9298100
    Abstract: The disclosure generally relates to imaging optical systems that include a plurality of mirrors, which image an object field lying in an object plane in an image field lying in an image plane, where at least one of the mirrors has a through-hole for imaging light to pass through. The disclosure also generally relates to projection exposure installations that include such im-aging optical systems, methods of using such projection exposure installa-tions, and components made by such methods.
    Type: Grant
    Filed: July 11, 2014
    Date of Patent: March 29, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Hans-Juergen Mann
  • Patent number: 9291451
    Abstract: A method for measuring the centricity of a conductor in an insulating casing, in which the string formed by the conductor with its insulating casing is moved along a conveying direction. A device for measuring the centricity of a conductor in an insulating casing includes an inductive measuring apparatus, first and second optical measuring apparatus and an evaluation apparatus.
    Type: Grant
    Filed: July 28, 2014
    Date of Patent: March 22, 2016
    Assignee: SIKORA AG
    Inventors: Harald Sikora, Klaus Bremer
  • Patent number: 9279823
    Abstract: There is provided an optical accelerometer including a first substrate, a second substrate, a spacer and a processing unit. The first substrate includes a frame, a movable member and at least one elastic member. Periodic slots are formed on the movable member along at least one direction to be served as a diffraction grating. The elastic member is connected between the frame and the movable member. The second substrate includes at least one sensing unit configured to detect a diffraction pattern formed by the diffraction grating. The spacer is disposed between the first substrate and the second substrate to define a predetermined height. The processing unit is coupled to the sensing unit and configured to calculate a 3D acceleration according to the diffraction pattern.
    Type: Grant
    Filed: July 15, 2013
    Date of Patent: March 8, 2016
    Inventors: Wei-Chung Wang, Hui-Hsuan Chen
  • Patent number: 9201124
    Abstract: The cost and size of an atomic magnetometer are reduced by attaching together a first die which integrates together a vapor cell, top and side photo detectors, and processing electronics, a second die which integrates together an optics package and a heater for the vapor cell, and a third die which integrates together a VCSEL, a heater for the VCSEL, and control electronics.
    Type: Grant
    Filed: July 14, 2011
    Date of Patent: December 1, 2015
    Inventors: Philipp Lindorfer, Peter J. Hopper, William French, Paul Mawson, Steven Hunt, Roozbeh Parsa
  • Patent number: 9197798
    Abstract: Methods and apparatus for capturing and rendering high-quality photographs using relatively small, thin plenoptic cameras. Plenoptic camera technology, in particular focused plenoptic camera technology including but not limited to super-resolution techniques, and other technologies such as microsphere technology may be leveraged to provide thin form factor, megapixel resolution cameras suitable for use in mobile devices and other applications. In addition, at least some embodiments of these cameras may also capture radiance, allowing the imaging capabilities provided by plenoptic camera technology to be realized through appropriate rendering techniques.
    Type: Grant
    Filed: November 3, 2011
    Date of Patent: November 24, 2015
    Assignee: Adobe Systems Incorporated
    Inventor: Todor G. Georgiev
  • Patent number: 9176263
    Abstract: Briefly, embodiments of an optical micro-sensor are described.
    Type: Grant
    Filed: April 6, 2011
    Date of Patent: November 3, 2015
    Assignees: President and Fellows of Harvard College, Centeye Incorporated
    Inventors: Todd Zickler, Sanjeev Jagannatha Koppal, Geoffrey Louis Barrows, Ioannis Gkioulekas
  • Patent number: 9151667
    Abstract: The present invention includes a laser diode, a laser controller configured to adjust a wavelength of illumination from the laser diode, a beam sampler configured to receive illumination from the laser diode and configured to direct a delivery portion of illumination to a phase-shifting interferometer, the beam sampler configured to direct a reference portion of illumination along a reference path, a detector configured to receive the reference portion of illumination, an amplitude controller configured to receive information associated with optical power of the reference portion of illumination from the detector and further configured to compare optical power of the reference portion of illumination with a selected optical power, and an optical amplitude modulator configured to adjust optical power of illumination received from a first portion of the illumination path, the optical amplitude modulator configured to transmit illumination having adjusted optical power along a second portion of the illumination
    Type: Grant
    Filed: December 4, 2012
    Date of Patent: October 6, 2015
    Assignee: KLA-Tencor Corporation
    Inventor: Yi Zhang
  • Patent number: 9131844
    Abstract: The present invention pertains to a method and apparatus for pressure sore detection. A modulated optical signal based on a digital code sequence is transmitted to human tissue. A temporal transfer characteristic is derived from the modulated optical signal. Tissue characteristics is determined based on the temporal transfer characteristic.
    Type: Grant
    Filed: February 1, 2012
    Date of Patent: September 15, 2015
    Assignee: Triple Ring Technologies, Inc.
    Inventors: Joseph Anthony Heanue, Lester John Lloyd, Kate Leeann Bechtel, Brian Patrick Wilfley
  • Patent number: 9046500
    Abstract: An apparatus for focusing light in a semi-conductor inspection system, including: a first mirror arranged to reflect extreme ultra-violet (EUV) generated by a plasma source; and a second mirror arranged to focus the EUV light, reflected from the first mirror, onto a first intermediate focus plane. A homogenizing tunnel, including: a first aperture having a first shape and a first size and arranged to receive extreme ultra-violet (EUV) light; a second aperture having a second shape and a second size; and a passageway connecting the first and second apertures and arranged to homogenize the EUV light received by the first aperture. The first shape is different from the second shape or the first size is different from the second size.
    Type: Grant
    Filed: December 17, 2013
    Date of Patent: June 2, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Damon Kvamme, Yanming Zhao
  • Publication number: 20150146214
    Abstract: A measuring apparatus measures an optical performance of a test optical element and includes a diffraction grating configured to emit diffracted light, an image sensor configured to capture an interference pattern formed by the diffracted light, and a controller configured to move the at least one of the diffraction grating and the image sensor in an optical axis direction, to capture a plurality of interference patterns before and after movements, and to calculate a light-condensing position based on a spatial frequency of a plurality of interference patterns and a moving amount.
    Type: Application
    Filed: November 19, 2014
    Publication date: May 28, 2015
    Inventor: Toshiyuki Naoi
  • Patent number: 9041938
    Abstract: A surface wave assisted system having an aperture layer with a surface and an aperture, and a plurality of grooves around the aperture. The plurality of grooves is configured to generate an optical transfer function at the aperture by inducing a surface wave for interfering with transmission of light of a range of spatial frequency.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: May 26, 2015
    Assignee: California Institute of Technology
    Inventors: Guoan Zheng, Xiquan Cui, Xin Heng, Changhuei Yang, Axel Scherer
  • Patent number: 8941042
    Abstract: A multi-beam laser beam control and imaging system includes a laser transmitter configured to emit light in a plurality of beamlets towards a target. At least one of the beamlets illuminates the whole target or a substantial portion of the target when imaging the target. A sensor is configured to receive light from the beamlets. A processor is communicably coupled to the sensor and configured to compute a relative phase of a wavefront of at least one beamlet based on output from the sensor. The processor also reconstructs a wavefront which is used to formulate two or three dimensional images of the target. A controller is communicably coupled to the processor and to the laser transmitter. The controller is configured to adjust a phase of at least one of the beamlets.
    Type: Grant
    Filed: May 21, 2012
    Date of Patent: January 27, 2015
    Inventor: Richard A. Hutchin
  • Patent number: 8922787
    Abstract: A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam.
    Type: Grant
    Filed: February 4, 2013
    Date of Patent: December 30, 2014
    Assignee: Si-Ware Systems
    Inventors: Bassem Mortada, Diaa Abdel Maged Khalil, Bassam A. Saadany
  • Patent number: 8908192
    Abstract: A method for qualifying optics (16; 14, 16) of a projection exposure tool (10) for microlithography. The optics include (16; 14, 16) at least one mirror element (14-1 to 14-7, 16-1 to 16-6) with a reflective coating (52) disposed on the latter. The method includes: irradiating electromagnetic radiation (13, 42) of at least two different wavelengths onto the optics (16; 14, 16), a penetration depth of the radiation into the coating (52) of the mirror element varying between the individual wavelengths, taking an optical measurement on the optics (16; 14, 16) for each of the wavelengths, and evaluating the measurement results for the different wavelengths taking into consideration a respective penetration depth of the radiation into the coating (52) of the mirror element for each of the different wavelengths.
    Type: Grant
    Filed: January 30, 2013
    Date of Patent: December 9, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Markus Goeppert
  • Patent number: 8885172
    Abstract: An encoder interferometry system includes an interferometer positioned to receive first and second beams having different frequencies, in which the interferometer has at least one polarizing beam splitting element for directing the first beam along a measurement path to define a measurement beam and the second beam along a reference path to define a reference beam. The encoder interferometry system further includes a encoder scale positioned to diffract the measurement beam at least once, a detector positioned to receive the measurement and reference beams after the measurement beam diffracts from the encoder scale, and an output component positioned to receive the measurement and reference beams before they reach the detector and deflect spurious portions of the first and second beam away from the detector.
    Type: Grant
    Filed: January 30, 2012
    Date of Patent: November 11, 2014
    Assignee: Zygo Corporation
    Inventors: Peter J. de Groot, Michael Schroeder
  • Patent number: 8873067
    Abstract: Provided herein is a TSV measuring interferometer that uses a variable field stop that adjusts such that a light is focused at an inlet and at a bottom surface of a TSV when measuring a diameter and depth of the TSV, thereby reducing a measurement time and result data, the interferometer also using a telecentric lens that adjusts the light injected into the TSV to be a straight line, so as to obtain a sufficient amount of light reaching the bottom surface to improve the accuracy of measurement even in a TSV having a large aspect ratio.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: October 28, 2014
    Assignee: Snu Precision Co., Ltd.
    Inventors: Ki Hun Lee, Heung Hyun Shin, Heui Jae Pahk
  • Patent number: 8848200
    Abstract: Methods and systems are provided for suppressing speckle and/or diffraction artifacts in coherent structured illumination sensing systems. A coherent radiation pattern forms an interference pattern at an illumination image plane and illuminates an object. Radiation scattered or otherwise emitted by the object is detected to produce a signal, which is integrated in time. Coherent artifact suppression is attained by using a spatial modulator, such as an acousto-optic device, to vary a phase gradient at the illumination image plane during the signal integration time. Various embodiments are provided for purposes including without limitation: preserving the depth of field of the coherent illumination; using the same acousto-optic device for pattern generation and coherent artifact suppression; electronically controlling the effective spatial coherence of the illumination system; and reducing errors due to coherent artifacts in a laser-based three dimensional imaging system.
    Type: Grant
    Filed: October 5, 2012
    Date of Patent: September 30, 2014
    Inventor: Daniel Feldkhun
  • Patent number: 8841591
    Abstract: Systems, methods and devices are implemented for optical imaging. In one embodiment of the present disclosure, an optical imaging apparatus utilizes a laser-based coherent light source, and an optical device to pass grated light along an illumination direction from the laser-based coherent light source toward an object. Additionally, an illumination modulator is provided for changing angles at which the light, moving toward the object plane, reaches the object plane, and the light reaches the object plane at different angles. Further, the apparatus can include circuitry to process image-based data in response to and based on the light reaching the object plane at different angles for a user-viewable image of an object in proximity of the object plane.
    Type: Grant
    Filed: April 4, 2012
    Date of Patent: September 23, 2014
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Jeffrey P. Wilde, Yonina C. Eldar, Joseph W. Goodman
  • Patent number: 8811767
    Abstract: Depth values in a scene are measured by projecting sets of patterns on the scene, wherein each set of patterns is structured with different spatial frequency using different encoding functions. Sets of images of the scene is acquired, wherein there is one image for each pattern in each set. Depth values are determining for each pixel at corresponding locations in the sets of images. The depth values of each pixel are analyzed, and the depth value is returned if the depth values at the corresponding locations are similar. Otherwise, the depth value is marked as having an error.
    Type: Grant
    Filed: March 15, 2011
    Date of Patent: August 19, 2014
    Assignee: Mitsubishi Electric Research Laboratories, Inc.
    Inventors: Ashok Veeraraghavan, Mohit Gupta, Amit Agrawal
  • Patent number: 8804133
    Abstract: A method of imaging at least a part of an object. The method comprises splitting electro-magnetic radiation to first and second portions, propagating the first and second portions, spectrally dispersing the first portion toward the part and the second portion toward a reference element, combining between reflections of the spectrally dispersed first and second portions to produce an interference signal, capturing an image of the part from the interference, and adjusting at least one of a tilt of said image plane and a curvature of the image by changing a deviation between the phase of at least one spectral component of the first portion and the phase of at least one spectral component of the second portion.
    Type: Grant
    Filed: June 16, 2010
    Date of Patent: August 12, 2014
    Assignee: Technion Research & Development Foundation Limited
    Inventors: Dvir Yelin, Michal Merman
  • Patent number: 8797551
    Abstract: The system disclosed is for optical coherence tomography (OCT). The system includes an improved interferometric system for metrology, detection, ranging as well as imaging system based on optical coherence tomography (OCT). Further, the method provides advancements in detection, imaging of samples in biological, medical, ophthalmic, corneal and retinal diagnosis.
    Type: Grant
    Filed: November 8, 2010
    Date of Patent: August 5, 2014
    Assignee: Netra Systems Inc
    Inventors: Manish D Kulkarni, Shuqing Ma, Balasigamani Devaraj
  • Patent number: 8786864
    Abstract: A circular common-path point diffraction interference wavefront sensor includes an optical matching system, a beam-splitter, a first reflection mirror, a second reflection mirror, a first Fourier lens, a second Fourier lens, a charge-coupled device (CCD) detector, a computer system, and a two-pinhole mask having a reference pinhole and a testing window and placed at a confocal plane of the first Fourier lens and the second Fourier lens. A testing beam is divided into two beams through the beam-splitter. One beam makes the pinhole diffraction by the reference pinhole, thereby producing the approximately ideal plane wave as the reference wave. Another beam passes through the testing window almost without any attenuation as the signal wave. The spatially linear carrier frequency is introduced by adjusting the tilt angle of the beam-splitter. The present invention is adapted for all kinds of dynamic and static detection field of wavefront phase.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: July 22, 2014
    Assignee: Sichuan University
    Inventors: Guoying Feng, Yongzhao Du, Shouhuan Zhou
  • Patent number: 8780191
    Abstract: A virtual microscope system capable of obtaining a stained sample image and a statistical data of spectra in a short period of time is provided, the virtual microscope system includes an image obtaining unit for obtaining a stained sample image, a spectrum obtaining unit for obtaining a spectrum of the stained sample image, an optical path setting unit for setting an optical path of a light flux passed through the stained sample with respect to the image obtaining unit and the spectrum obtaining unit and a control unit for controlling to repeat obtaining the stained sample image by the image obtaining unit and obtaining the spectrum of the stained sample image by the spectrum obtaining unit in the observation field of the stained sample to create a virtual slide and a spectrum table of the stained sample.
    Type: Grant
    Filed: November 9, 2010
    Date of Patent: July 15, 2014
    Assignee: Olympus Corporation
    Inventor: Takeshi Otsuka
  • Patent number: 8780355
    Abstract: According to a first aspect the invention relates to a reconstruction process of a narrow-band signal acquired by an instrument producing irregular sampling, in which two series of samples are acquired at the same sampling period, the two series being offset relative to one another such that the sampling errors are identical or quasi identical over both series. According to a second aspect, the invention relates to an instrument configured to carry out the process according to the first aspect of the invention.
    Type: Grant
    Filed: September 1, 2009
    Date of Patent: July 15, 2014
    Assignee: Centre National Detudes Spatiales
    Inventors: Elodie Cansot, Emmanuel Christophe, Alain Rosak
  • Patent number: 8780357
    Abstract: An optical displacement measurement device in which variations in interference light by stray light are suppressed to improve interpolation accuracy and detection accuracy. The surface of diffraction grating 11 is coated with protective layer 12 of thickness L and refractive index n. The protective layer has thickness L such that, with angle ? between a line normal to the protective layer and an incident light beam and an angle ?? between diffracted light generated by diffraction grating and reflected by boundary surface of protective layer to become stray light to be re-incident on diffraction grating and a line normal to diffraction grating, interference light is of an intensity of interference such that an optical path difference between stray light and light interfering with stray light represented by ?=2L(n/cos ??+tan ??·sin ?) will amount to not higher than 2% of intensity of interference of interference light with optical path length difference ?=0.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: July 15, 2014
    Assignee: DMG Mori Seike Co., Ltd
    Inventor: Akihiro Kuroda
  • Publication number: 20140192366
    Abstract: There is provided an exposure condition determining method for determining an exposure condition for an exposure-objective substrate having a plurality of semiconductor pattern features formed by predetermined exposure on a surface thereon, the method including, irradiating an illumination light onto a surface of a substrate, which has the pattern features, detecting a diffracted light from the plurality of semiconductor pattern features of the substrate irradiated with the illumination light, and determining the exposure condition based on a variation in brightness of the detected diffracted light.
    Type: Application
    Filed: January 16, 2014
    Publication date: July 10, 2014
    Inventor: Hiroaki OKAMOTO
  • Publication number: 20140192365
    Abstract: A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam.
    Type: Application
    Filed: February 4, 2013
    Publication date: July 10, 2014
    Applicant: SI-WARE SYSTEMS
    Inventors: Bassem Mortada, Diaa Abdel Maged Khalil, Bassam A. Saadany
  • Publication number: 20140183363
    Abstract: The present invention provides a wavefront measuring apparatus and method, and object measuring apparatus which can increase resolution of wavefronts of electromagnetic wave pulses without being limited by the number of detecting elements. An embodiment of the present invention includes a detecting part detecting electric field strength of an electromagnetic wave pulse, and an optical delaying part delaying the electromagnetic wave pulse so as to provide a first propagation path and a second propagation path provided in a spatial region different from a spatial region of the first propagation path and having a length different from a length of the first propagation path, wherein time waveforms of the electromagnetic wave pulse are constructed using a signal associated with the electric field strength detected by the detecting part, and a wavefront is obtained based on the time waveforms and information associated with the lengths of the first and second propagation paths.
    Type: Application
    Filed: April 19, 2012
    Publication date: July 3, 2014
    Inventors: Kousuke Kajiki, Toshihiko Ouchi, Takeaki Itsuji
  • Patent number: 8755036
    Abstract: An active imaging system includes a laser transmitter configured to emit light in a plurality of beamlets. A sensor is configured to receive light from the beamlets. A processor is communicably coupled to the sensor and configured to compute images of objects illuminated by the beamlets.
    Type: Grant
    Filed: March 11, 2011
    Date of Patent: June 17, 2014
    Inventor: Richard A. Hutchin
  • Publication number: 20140152993
    Abstract: An optical path of measurement light emitted from a measurement light source is overlaid by a beam combiner on an optical path of reference light emitted from a reference light source. The measurement light emitted from the measurement light source includes light in the sensitivity wavelength range (S1) of a measurement light detector and light in the sensitivity wavelength range (S2) of a reference light detector. An interferometer includes a wavelength separation filter that cuts light in at least a part of the sensitivity wavelength range (S2) of the reference light detector, of light included in the wavelength range of the measurement light.
    Type: Application
    Filed: June 14, 2012
    Publication date: June 5, 2014
    Applicant: KONICA MINOLTA, INC.
    Inventor: Yusuke Hirao