Abstract: Methods and apparatus for capturing and rendering high-quality photographs using relatively small, thin plenoptic cameras. Plenoptic camera technology, in particular focused plenoptic camera technology including but not limited to super-resolution techniques, and other technologies such as microsphere technology may be leveraged to provide thin form factor, megapixel resolution cameras suitable for use in mobile devices and other applications. In addition, at least some embodiments of these cameras may also capture radiance, allowing the imaging capabilities provided by plenoptic camera technology to be realized through appropriate rendering techniques.

Abstract: Briefly, embodiments of an optical micro-sensor are described.

Abstract: The present invention includes a laser diode, a laser controller configured to adjust a wavelength of illumination from the laser diode, a beam sampler configured to receive illumination from the laser diode and configured to direct a delivery portion of illumination to a phase-shifting interferometer, the beam sampler configured to direct a reference portion of illumination along a reference path, a detector configured to receive the reference portion of illumination, an amplitude controller configured to receive information associated with optical power of the reference portion of illumination from the detector and further configured to compare optical power of the reference portion of illumination with a selected optical power, and an optical amplitude modulator configured to adjust optical power of illumination received from a first portion of the illumination path, the optical amplitude modulator configured to transmit illumination having adjusted optical power along a second portion of the illumination

Abstract: The present invention pertains to a method and apparatus for pressure sore detection. A modulated optical signal based on a digital code sequence is transmitted to human tissue. A temporal transfer characteristic is derived from the modulated optical signal. Tissue characteristics is determined based on the temporal transfer characteristic.

Abstract: An apparatus for focusing light in a semi-conductor inspection system, including: a first mirror arranged to reflect extreme ultra-violet (EUV) generated by a plasma source; and a second mirror arranged to focus the EUV light, reflected from the first mirror, onto a first intermediate focus plane. A homogenizing tunnel, including: a first aperture having a first shape and a first size and arranged to receive extreme ultra-violet (EUV) light; a second aperture having a second shape and a second size; and a passageway connecting the first and second apertures and arranged to homogenize the EUV light received by the first aperture. The first shape is different from the second shape or the first size is different from the second size.

Abstract: A measuring apparatus measures an optical performance of a test optical element and includes a diffraction grating configured to emit diffracted light, an image sensor configured to capture an interference pattern formed by the diffracted light, and a controller configured to move the at least one of the diffraction grating and the image sensor in an optical axis direction, to capture a plurality of interference patterns before and after movements, and to calculate a light-condensing position based on a spatial frequency of a plurality of interference patterns and a moving amount.

Abstract: A surface wave assisted system having an aperture layer with a surface and an aperture, and a plurality of grooves around the aperture. The plurality of grooves is configured to generate an optical transfer function at the aperture by inducing a surface wave for interfering with transmission of light of a range of spatial frequency.

Abstract: A multi-beam laser beam control and imaging system includes a laser transmitter configured to emit light in a plurality of beamlets towards a target. At least one of the beamlets illuminates the whole target or a substantial portion of the target when imaging the target. A sensor is configured to receive light from the beamlets. A processor is communicably coupled to the sensor and configured to compute a relative phase of a wavefront of at least one beamlet based on output from the sensor. The processor also reconstructs a wavefront which is used to formulate two or three dimensional images of the target. A controller is communicably coupled to the processor and to the laser transmitter. The controller is configured to adjust a phase of at least one of the beamlets.

Abstract: A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam.

Abstract: A method for qualifying optics (16; 14, 16) of a projection exposure tool (10) for microlithography. The optics include (16; 14, 16) at least one mirror element (14-1 to 14-7, 16-1 to 16-6) with a reflective coating (52) disposed on the latter. The method includes: irradiating electromagnetic radiation (13, 42) of at least two different wavelengths onto the optics (16; 14, 16), a penetration depth of the radiation into the coating (52) of the mirror element varying between the individual wavelengths, taking an optical measurement on the optics (16; 14, 16) for each of the wavelengths, and evaluating the measurement results for the different wavelengths taking into consideration a respective penetration depth of the radiation into the coating (52) of the mirror element for each of the different wavelengths.

Abstract: An encoder interferometry system includes an interferometer positioned to receive first and second beams having different frequencies, in which the interferometer has at least one polarizing beam splitting element for directing the first beam along a measurement path to define a measurement beam and the second beam along a reference path to define a reference beam. The encoder interferometry system further includes a encoder scale positioned to diffract the measurement beam at least once, a detector positioned to receive the measurement and reference beams after the measurement beam diffracts from the encoder scale, and an output component positioned to receive the measurement and reference beams before they reach the detector and deflect spurious portions of the first and second beam away from the detector.

Abstract: Provided herein is a TSV measuring interferometer that uses a variable field stop that adjusts such that a light is focused at an inlet and at a bottom surface of a TSV when measuring a diameter and depth of the TSV, thereby reducing a measurement time and result data, the interferometer also using a telecentric lens that adjusts the light injected into the TSV to be a straight line, so as to obtain a sufficient amount of light reaching the bottom surface to improve the accuracy of measurement even in a TSV having a large aspect ratio.

Abstract: Methods and systems are provided for suppressing speckle and/or diffraction artifacts in coherent structured illumination sensing systems. A coherent radiation pattern forms an interference pattern at an illumination image plane and illuminates an object. Radiation scattered or otherwise emitted by the object is detected to produce a signal, which is integrated in time. Coherent artifact suppression is attained by using a spatial modulator, such as an acousto-optic device, to vary a phase gradient at the illumination image plane during the signal integration time. Various embodiments are provided for purposes including without limitation: preserving the depth of field of the coherent illumination; using the same acousto-optic device for pattern generation and coherent artifact suppression; electronically controlling the effective spatial coherence of the illumination system; and reducing errors due to coherent artifacts in a laser-based three dimensional imaging system.

Abstract: Systems, methods and devices are implemented for optical imaging. In one embodiment of the present disclosure, an optical imaging apparatus utilizes a laser-based coherent light source, and an optical device to pass grated light along an illumination direction from the laser-based coherent light source toward an object. Additionally, an illumination modulator is provided for changing angles at which the light, moving toward the object plane, reaches the object plane, and the light reaches the object plane at different angles. Further, the apparatus can include circuitry to process image-based data in response to and based on the light reaching the object plane at different angles for a user-viewable image of an object in proximity of the object plane.

Abstract: Depth values in a scene are measured by projecting sets of patterns on the scene, wherein each set of patterns is structured with different spatial frequency using different encoding functions. Sets of images of the scene is acquired, wherein there is one image for each pattern in each set. Depth values are determining for each pixel at corresponding locations in the sets of images. The depth values of each pixel are analyzed, and the depth value is returned if the depth values at the corresponding locations are similar. Otherwise, the depth value is marked as having an error.

Abstract: A method of imaging at least a part of an object. The method comprises splitting electro-magnetic radiation to first and second portions, propagating the first and second portions, spectrally dispersing the first portion toward the part and the second portion toward a reference element, combining between reflections of the spectrally dispersed first and second portions to produce an interference signal, capturing an image of the part from the interference, and adjusting at least one of a tilt of said image plane and a curvature of the image by changing a deviation between the phase of at least one spectral component of the first portion and the phase of at least one spectral component of the second portion.

Abstract: The system disclosed is for optical coherence tomography (OCT). The system includes an improved interferometric system for metrology, detection, ranging as well as imaging system based on optical coherence tomography (OCT). Further, the method provides advancements in detection, imaging of samples in biological, medical, ophthalmic, corneal and retinal diagnosis.

Abstract: A circular common-path point diffraction interference wavefront sensor includes an optical matching system, a beam-splitter, a first reflection mirror, a second reflection mirror, a first Fourier lens, a second Fourier lens, a charge-coupled device (CCD) detector, a computer system, and a two-pinhole mask having a reference pinhole and a testing window and placed at a confocal plane of the first Fourier lens and the second Fourier lens. A testing beam is divided into two beams through the beam-splitter. One beam makes the pinhole diffraction by the reference pinhole, thereby producing the approximately ideal plane wave as the reference wave. Another beam passes through the testing window almost without any attenuation as the signal wave. The spatially linear carrier frequency is introduced by adjusting the tilt angle of the beam-splitter. The present invention is adapted for all kinds of dynamic and static detection field of wavefront phase.

Abstract: According to a first aspect the invention relates to a reconstruction process of a narrow-band signal acquired by an instrument producing irregular sampling, in which two series of samples are acquired at the same sampling period, the two series being offset relative to one another such that the sampling errors are identical or quasi identical over both series. According to a second aspect, the invention relates to an instrument configured to carry out the process according to the first aspect of the invention.

Abstract: A virtual microscope system capable of obtaining a stained sample image and a statistical data of spectra in a short period of time is provided, the virtual microscope system includes an image obtaining unit for obtaining a stained sample image, a spectrum obtaining unit for obtaining a spectrum of the stained sample image, an optical path setting unit for setting an optical path of a light flux passed through the stained sample with respect to the image obtaining unit and the spectrum obtaining unit and a control unit for controlling to repeat obtaining the stained sample image by the image obtaining unit and obtaining the spectrum of the stained sample image by the spectrum obtaining unit in the observation field of the stained sample to create a virtual slide and a spectrum table of the stained sample.

Abstract: An optical displacement measurement device in which variations in interference light by stray light are suppressed to improve interpolation accuracy and detection accuracy. The surface of diffraction grating 11 is coated with protective layer 12 of thickness L and refractive index n. The protective layer has thickness L such that, with angle ? between a line normal to the protective layer and an incident light beam and an angle ?? between diffracted light generated by diffraction grating and reflected by boundary surface of protective layer to become stray light to be re-incident on diffraction grating and a line normal to diffraction grating, interference light is of an intensity of interference such that an optical path difference between stray light and light interfering with stray light represented by ?=2L(n/cos ??+tan ??·sin ?) will amount to not higher than 2% of intensity of interference of interference light with optical path length difference ?=0.

Abstract: A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam.

Abstract: There is provided an exposure condition determining method for determining an exposure condition for an exposure-objective substrate having a plurality of semiconductor pattern features formed by predetermined exposure on a surface thereon, the method including, irradiating an illumination light onto a surface of a substrate, which has the pattern features, detecting a diffracted light from the plurality of semiconductor pattern features of the substrate irradiated with the illumination light, and determining the exposure condition based on a variation in brightness of the detected diffracted light.

Abstract: The present invention provides a wavefront measuring apparatus and method, and object measuring apparatus which can increase resolution of wavefronts of electromagnetic wave pulses without being limited by the number of detecting elements. An embodiment of the present invention includes a detecting part detecting electric field strength of an electromagnetic wave pulse, and an optical delaying part delaying the electromagnetic wave pulse so as to provide a first propagation path and a second propagation path provided in a spatial region different from a spatial region of the first propagation path and having a length different from a length of the first propagation path, wherein time waveforms of the electromagnetic wave pulse are constructed using a signal associated with the electric field strength detected by the detecting part, and a wavefront is obtained based on the time waveforms and information associated with the lengths of the first and second propagation paths.

Abstract: An active imaging system includes a laser transmitter configured to emit light in a plurality of beamlets. A sensor is configured to receive light from the beamlets. A processor is communicably coupled to the sensor and configured to compute images of objects illuminated by the beamlets.

Abstract: An optical path of measurement light emitted from a measurement light source is overlaid by a beam combiner on an optical path of reference light emitted from a reference light source. The measurement light emitted from the measurement light source includes light in the sensitivity wavelength range (S1) of a measurement light detector and light in the sensitivity wavelength range (S2) of a reference light detector. An interferometer includes a wavelength separation filter that cuts light in at least a part of the sensitivity wavelength range (S2) of the reference light detector, of light included in the wavelength range of the measurement light.

Abstract: The application relates to a method for analyzing the wave surface of a light beam from a source to the focus of a lens. The beam illuminates a sample on the analysis plane and having a defect. A diffraction grating of the plane is a conjugate of an analysis plane through a focal system. An image is formed in a plane at a distance from the grating plane and analyzed by processing means. The invention encodes this grating by a phase function resulting from the multiplication of two phase functions, a first exclusion function defining a meshing of useful zones transmitting the beam to be analyzed in the form of light pencil beams, and a second phase fundamental function which creates a phase opposition between two light pencil beams coming out of adjacent meshes of the exclusion grating.

Abstract: A method for reconstructing optical properties of a diffracting object immersed in a liquid medium using a reconstruction system that comprises a spatially coherent light source and a matrix photodetector, wherein the liquid medium and the matrix photodetector are separated by a distance along a vertical direction. The method comprises illuminating the liquid medium, measuring (with the matrix photodetector) an intensity of a diffraction pattern transmitted by the illuminated medium along a vertical direction, and reconstructing the optical properties of the diffracting object at a reconstruction height according to a reconstruction algorithm from the measured intensity, wherein the reconstruction height has a value less than that of the distance between the medium and the matrix photodetector along the vertical direction.

Abstract: Prior art coherent optical wave mixing has permitted two-dimensional maps from which coupled quantum transitions have been identified in molecular samples. However, extended signal accumulation times and computer processing are required for a detailed molecular analysis, which can lead to sample toxicity and difficulties in interpretation. These and other requirements are reduced by an apparatus arranged for the projection of an image that directly encodes quantum couplings from a sample. Such an apparatus includes a source component 36, a diffractive optical component 25 for generating at least three light fields 1, 2, 3 from one light field 23, one or more optical telescopes 26 and 27 wherein the transverse separation between optical paths is modified from that possible to define with a single telescope between common object and image points, a sample 11 containing said image point, and a means for resolving and detecting the angular variation of light emission from a sample.

Abstract: A spectral image acquiring apparatus includes an optical filter on which light is incident; an image sensor including a two-dimensionally disposed pixel array for detecting the light via the optical filter; and a signal processing unit generating a difference-value image based on a detection signal from the image sensor. The optical filter includes a diffraction grating having a lattice pattern corresponding to one or more pixels on the image sensor. The signal processing unit calculates a difference value in an amount of received light between two adjacent pixels based on the detection signal from the image sensor, and generates the difference-value image based on the difference value. The difference value between the two adjacent pixels is varied depending on a difference in an interference point on the image sensor corresponding to a diffraction angle of the light that has passed through the diffraction grating.

Abstract: The present disclosure relates to an improved device and methods for adapting to a laser diffraction apparatus used for measuring particle size distribution and density of the plume of a powder composition emitted from a dry powder inhaler.

Abstract: A multilayer optical device includes an arrangement, on a substrate, of a first layer, a second layer, and a space therebetween. The second layer is a thin-film. The arrangement of the first and second layers and the space therebetween produces transmitted, reflected, or dispersed spectrally modified electromagnetic energy from electromagnetic energy incident upon the arrangement. An optical function of the device is dependent at least in part on interference effects. An optical detector system includes a similar multilayer optical device. The space within the device is in fluid communication with structures for receiving a fluid such that the device operates in a first or second mode depending on absence or presence of the fluid within the space. The system includes a detector for receiving the modified electromagnetic energy, and a controller in fluid communication with the space that establishes the absence or presence of the fluid in the space.

Abstract: A Coherent Phased Array Beam Transmission and Imaging System is disclosed for end-to-end compensation of a plurality of laser beams through a turbulent medium to a non-cooperative target where the optical device used to transmit and receive laser energy is a plurality of optical transceivers (typically a telescope, but often referred to as a subaperture telescope or transceiver). The Coherent Phased Array Beam Transmission and Imaging System controls the plurality of laser beams (that originate from a single master oscillator laser and are amplified and/or transported using separate beam paths) to coherently combine the outgoing beams from each subaperture to form a single phased beam at the target. The preferred embodiment for the Coherent Phased Array Beam Transmission and Imaging System includes a method to maintain the beam hit spot on the target aim point at the full resolution of the array.

Abstract: In the interferometric system, the image plane is imaged by an output imaging setup via a transmission system of reflectors to the output plane and a reflection type diffraction grating is located in the image plane of an imaging setup of a reference branch. The transmission systems of reflectors are adjusted so that axes of both branches coincide at an entrance to the output plane and parallel with a normal line of the output plane, and an axial beam, diffracted by the reflection type diffraction grating at an angle ?, enters into the output plane at an angle ?, and the relation between angle ? and ? is sin(?)=sin(?)/m, where m is a magnification of the output imaging setup. The system enables the achievement of a holographic imaging of an object by low-coherence waves. Incoherent waves allow the imaging of objects immersed in scattering media.

Abstract: A Talbot interferometer includes a diffraction grating, an image pickup device, a moving unit configured to move at least one of the diffraction grating and the image pickup device in an optical axis direction of the test object, and a computer configured to adjust a position of the at least one of the diffraction grating and the image pickup device using the moving unit so that a Talbot condition can be met, based on a spatial frequency spectrum obtained from a plurality of interference fringes captured by the image pickup device while moving the at least one of the diffraction grating and the image pickup device using the moving unit.

Abstract: A method of measuring a deviation of an optical surface from a target shape and a method of manufacturing an optical element. This method of measuring the deviation includes: performing a first interferometric measurement using a first diffractive measurement structure, which is arranged to cover a first area of the optical surface, to provide a first interferometric measurement result, performing a second interferometric measurement using a second diffractive measurement structure, which is arranged to cover a second area of the optical surface different from the first area, to provide a second interferometric measurement result, and determining a deviation of the optical surface from the target shape.

Abstract: Hybrid sensors comprising Shack-Hartmann Wavefront Sensor (S-HWFS) and Zernike Wavefront Sensor (Z-WFS) capabilities are presented. The hybrid sensor includes a Z-WFS optically arranged in-line with a S-HWFS such that the combined wavefront sensor operates across a wide dynamic range and noise conditions. The Z-WFS may include the ability to introduce a dynamic phase shift in both transmissive and reflective modes.

Abstract: A projection exposure tool for microlithography for exposing a substrate is disclosed. The tool includes a projection objective. The tool also includes an optical measuring apparatus for determining a surface topography of the substrate before the substrate is exposed. The measuring apparatus has a measuring beam path which extends outside of the projection objective. The measuring apparatus is a wavefront measuring apparatus configured to determine topography measurement values simultaneously at a number of points on the substrate surface.

Abstract: A calculation apparatus acquires image data of interference fringes detected by using a Talbot interferometer including a diffraction grating and a detector, retrieves a first wavefront by using the image data of the interference fringe, sets a value of a second wavefront incident on the diffraction grating, calculates an interference fringe image of a plurality of the diffracted light beams through simulation, and retrieves a third wavefront by using the calculated interference fringe image, wherein the third wavefront is retrieved by changing a position of the diffraction grating in a plane perpendicular to an optical axis of the Talbot interferometer, and aberration of a test optical system is calculated by reducing an error included in the first wavefront by using the second wavefront and the third wavefront.

Abstract: A method and apparatus incorporating an optical homodyne into a self-diffraction densitometer is disclosed.

Abstract: An imaging apparatus adjusts the polarization directions of irradiation beams (to a diffraction grating) corresponding to first and second beams respectively which have different polarization directions (for example, by adjusting a relative angle formed between light-emitting ends of respective polarization maintaining fibers) so that the spectral characteristics of the irradiation beams at the diffraction grating coincide with each other. Then, the imaging apparatus acquires a tomographic image indicating polarization information for a object based on beams (that come from the diffraction grating for splitting and diffracting a beam from the adjustment unit) corresponding to the first and second beams respectively which have different polarization directions.

Abstract: A wavelength shift measuring apparatus of the present invention is a wavelength shift detection sensor (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter (BS2) splitting the light beam emitted from the light source into a plurality of light beams and to synthesize two light beams among the plurality of light beams to generate an interference light, a spacer member (SP) provided so that an optical path length difference of the two light beams split by the beam splitter (PBS2) is constant, and a plurality of photoelectric sensors (PD) detecting the interference light generated by the beam splitter (BS2). The plurality of photoelectric sensors (PD) output a plurality of interference signals having phases shifted from one another based on the interference light to calculate a wavelength shift using the plurality of interference signals.

Abstract: A laser self-mixing measuring device is provided, comprising a laser with a laser cavity and a surface arranged along the optical path of the laser beam which redirects incident laser light back into the laser cavity. The surface comprises a periodic structure which diffracts the laser light into partial beams.

Abstract: A differential interference contrast (DIC) determination device and method utilizes an illumination source, a layer having a pair of two apertures that receive illumination from the illumination source, and a photodetector to receive Young's interference from the illumination passing through the pair of two apertures. In addition, a surface wave assisted optofluidic microscope and method utilize an illumination source, a fluid channel having a layer with at least one aperture as a surface, and a photodetector that receives a signal based on the illumination passing through the aperture. The layer is corrugated (e.g., via fabrication) and parameters of the corrugation optimize the signal received on the photodetector.

Abstract: The invention relates to a device (10,20) for detecting a phase difference between two light beams (8A, 8B), said device including: a diffraction grating (2) which can generate an interference field between the two light beams; and a photodiode (1,5) which is arranged to receive the interference field, said diffraction grating being integrated to the photodiode. The invention is characterized in that the diffraction grating is an amplitude grating (2).

Abstract: Disclosed is a Rotation sensor with a light source, a light detector, an internal part having a first lateral surface, which is globally cylindrical and convex, and an external part having a second lateral surface which is globally cylindrical and concave. The first and second lateral surfaces both have a same central axis defining a rotation axis for a relative rotation between the internal part and the external part the angle of which this rotation sensor can measure. A first grating is arranged at the first lateral surface with its grating lines parallel to the rotation axis, and a second grating is arranged at the second lateral surface with its grating lines parallel to said rotation axis.

Abstract: Embodiments of the present invention relate to techniques for improving optofluidic microscope (OFM) devices. One technique that may be used employs surface tension at a hydrophobic surface to passively pump the fluid sample through the fluid channel. Another technique uses electrodes to adjust the position of objects in the fluid channel. Another technique computationally adjusts the focal plane of an image wavefront measured using differential interference contrast (DIC) based on Young's interference by back propagating the image wavefront from the detection focal plane to a different focal plane. These techniques can be employed separately or in combination to improve the capabilities of OFM devices.

Abstract: A congruence reduction algorithm that forms composite lenslets by reducing data of a plurality of focal spot locations using linear transformations. Use of the congruence reduction algorithm increases the speed of calculations by which corrective elements such as deformable mirrors function, reduces the number of lenslets in an array and improves reconstruction time and focal spot quality.

Abstract: A method and apparatus incorporating an optical homodyne into a self-diffraction densitometer is disclosed.

Abstract: A method for designing a diffractive optic includes identifying an initial performance metric for the diffractive optic, the diffractive optic including a substrate. A test cell is selected from an array of cells on the substrate. A height of the test cell is changed by a predetermined height unit. Images are computed at a plurality of discrete wavelengths or using a continuous spectrum using diffraction-based propagation through at least a portion of the array of cells. A wavelength metric is determined for each of the images. The wavelength metrics for each of the images is consolidated into a perturbed performance metric. The perturbed performance metric is compared to the initial performance metric and the method identifies whether the perturbed performance metric is an improvement over the initial performance metric.