Abstract: A test structure is presented test structure on a substrate for monitoring a LER and/or LWR effect, said test structure comprising an array of features manufactured with amplified LER and/or LWR effect.

Abstract: A method and a device for inspecting the quality of a formed thermoplastic fiber-reinforced plastic component wherein the component is tested by means of a sensor unit with a downstream electronic evaluation unit for analysis of the measuring result acquired by sensor technology by means of sample comparison, wherein by means of the optical sensor unit the surface roughness of the plastic component is measured after forming, which surface roughness is analyzed by means of the evaluation unit by a comparison with a stored reference pattern in such a manner that increased surface roughness is interpreted as increased internal materials porosity.

Abstract: A lens shape measuring apparatus measures a peripheral shape of a lens in order to measure the peripheral shape of the lens accurately according to a non-contact technique. The lens shape measuring apparatus includes: a lens holding mechanism section for holding the lens with the holding axis from the side of a lens surface; and a laser displacement meter for measuring a lens peripheral shape by irradiating a laser beam to the periphery of the lens and receiving a reflected light thereof. The laser displacement meter is installed such that a light projecting section for projecting a laser beam and a light receiving section for receiving a laser beam are aligned in a direction perpendicular to an axis line of the holding axis.

Abstract: A surface inspection tool 110 measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200. The surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: A sensor for registering a measurement variable of a medium, comprising a sensing body with a section of surface area, which is exposed to the medium to register the measurement variable, whereby a condition of the section of surface area affects the provided value of the measured measurement variable, whereby the section of surface area comprises a coating that comprises nanoparticles. The coating, which comprises the nanoparticles, comprises at least one nano polymer.

Abstract: Optical radiation sources functioning on different optical bands radiate on different optical bands and focus optical radiation on a region in a web surface as pulses in such a manner that illumination areas of the pulses overlap on the plane of the web. At most one optical radiation band is focused on the web from the direction of the normal. The spatial intensity distribution of at least one optical band differs from the uniform distribution and the intensity distributions of at least two different optical bands differ from one another in a predetermined manner. A camera forms still images of the web surface region on each optical radiation band. An image-processing unit determines the surface topography of the web on the basis of the images. In addition, a controller may control the paper manufacturing process on the basis of the determined surface topography.

Abstract: A structural color body is film-like and formed of a resin layer containing a block copolymer, the resin layer has a micro-phase separated structure including lamellar micro domains, each of the micro domains has a wave-like shape having amplitudes in the thickness direction of the structural color body, and in each of the micro domains, a maximum value of distances in the direction between the tops of convexities and the bottoms of concavities is larger than the wavelength in the visible light range.

Abstract: An inspecting method and apparatus for inspecting a substrate surface includes illuminating a light to the substrate surface having a film, detection of a scattered light or reflected light from a plurality of positions of the substrate surface to obtain a plurality of electrical signals, comparison of the plurality of electrical signals and a database which indicates a relationship between the electrical signals and surface roughness, and calculation of a surface roughness value based on the result of comparison.

Abstract: A method for obtaining a measurement in an in-line system for detecting presence of an out-of-parameter part is provided. The method includes conveying a tubular member to a detection system comprising a laser sensor arranged and configured to direct a beam of light onto an upper end surface of the tubular member for obtaining a measurement. The laser sensor is offset from a center of the tubular member such that the beam of light is directed onto an outer side of the upper end surface. The beam of light is directed onto the upper end surface at the outer side of the tubular member and the beam of light moves from a front quadrant of the upper end surface to a rearward quadrant of the upper end surface.

Abstract: A method for detecting blast induced pressure changes includes exposing a material, a contained solution, a membrane-bound solution, or a photonic crystal material, having a first optical property, to a pressure wave having a blast level. A change in the first optical property to a second optical property of the exposed material, contained solution, membrane-bound solution, or photonic crystal material is determined, and the extent of change corresponds to the blast level.

Abstract: A film-like structural color body comprises a front surface layer disposed on a front surface side, a back surface layer disposed on a back surface side, and an intermediate layer disposed between the front surface layer and the back surface layer, the front surface layer, the back surface layer and the intermediate layer contain block copolymers and have micro-phase separated structures including lamellar micro domains, each of the micro domains has a wave-like shape having amplitudes in the thickness direction of the structural color body, a maximum value of predetermined distances in the micro domains of the front surface layer and a maximum value of predetermined distances in the micro domains of the back surface layer are larger than the wavelength in the visible light range, and predetermined distances in the micro domains of the intermediate layer are equal to or less than the wavelength in the visible light range.

Abstract: A method and apparatus for determining the topography or optical properties of a moving surface of a subject are disclosed. Taking images of the moving surface at different moment in time by aiming different illuminations at the subject. Taking images of a reference area located near the moving surface synchronously with the images of the moving surface, in such a way that, in each image of the reference area, illumination of substantially the same type is aimed at the reference area, wherein the images created of the reference area are used to position image areas corresponding to the same area of the subject in the images of the moving surface.

Abstract: A method for optical investigation of textured surfaces involves the steps of irradiation of radiation onto the surface to be investigated; reception of an image from at least part of the radiation irradiated onto the surface and reflected by the surface; location-resolved evaluation of the image recorded and determination of at least one value K which is characteristic of this image. A parameter G which is characteristic of the surface is determined while using the characteristic value K and while using at least one further property E known beforehand or determined of the surface.

Abstract: The invention provides an electrode comprising an electrically conductive material having a surface capable of producing surface enhanced Raman scattering of incident light from a complex adsorbed at the surface of the electrode, the complex including the electrically conductive material combined with a second material that is substantially reducible and not substantially oxidizable. The surface of the electrode can be microroughened. The invention also includes a method for making various embodiments of the electrode, and a method of generating electricity using the electrode. In accordance with a further aspect of the invention, a fuel cell is provided including the electrode of the invention.

Abstract: A system and a method of measuring irregularity of a glass substrate using only a reflection light reflected by an upper surface of reflection lights reflected by the upper surface and a lower surface of the glass substrate are disclosed. The system includes a light source section configured to output a first light to the glass substrate and a screen.

Abstract: A sensor, sensor assembly and a method of sensing, in which the sensor is in contact with a material or structure and the sensor directly measures one or more property changes in the material by means of light reflection and scattering using a reflective target.

Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.

Abstract: An inspection method of an SOI wafer in which profiles P1 and P2 are calculated in the SOI wafer to be inspected and in an SOI wafer having a film thickness of the SOI layer thicker or thinner than that of the SOI wafer to be inspected, respectively; a profile P3 of a difference between P1 and P2, or a profile P4 of a change ratio of P1 and P2 is calculated; light having the wavelength band selected on the basis of a maximum peak wavelength within the calculated profiles P3 or P4 is irradiated to the surface of the SOI wafer to be inspected, to detect the reflected-light from the SOI wafer; and a place of a peak generated by an increase in reflection intensity of the detected reflected-light is found, as the defect caused by the change in the film thickness of the SOI layer.

Abstract: An inspecting method and apparatus for inspecting a substrate surface includes application of a light to the substrate surface, detection of scattered light or reflected light from the substrate surface due to the applied light at a plurality of positions to obtain a plurality of electrical signals, extraction of a signal in a mutually different frequency band from each of the plurality of electrical signals, and calculation of a value regarding a state of film of the substrate through an arithmetical operation process of a plurality of extracted signals in the frequency bands.

Abstract: An oven wall three-dimensional profile data (701) representing concave and convex amounts on all over oven walls (14R, 14L) at a right side and left side of a coking chamber (11) is generated by using image signals obtained by a wall surface observation apparatus (200). A resistance index “k” in which a resistance received by pushed coke (15) resulting from a rising gradient existing on the oven wall (14) is indexed is asked by using the oven wall three-dimensional profile data (701). It can be verified that there is a correlation between this resistance index “k” and a pushing load. Accordingly, it is possible to quantitatively evaluate a state of the oven wall (14) affecting on the pushing load.

Abstract: A system for estimating the specular roughness of points on a surface of an object may include a lighting system, an image capture system and a computer processing system. The lighting system may be configured to illuminate the surface of the object at different times with different illumination patterns. Each illumination pattern may illuminate the surface from a plurality of different directions and form an intensity gradient having an order of no more than two. The image capture system may be configured to capture an image of the surface of the object when illuminated by each of the different illumination patterns at each of the different times. The computer processing system may be configured to compute the specular roughness of each point on the surface of the object based on the images captured by the image capture system.

Abstract: A surface inspection tool 110 measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200. The surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: A calibration apparatus for an optical non-contact surface roughness measurement device allowing for quick, accurate, and repeatable device calibration is described. In certain embodiments, the calibration apparatus may include a base, one or more calibration surfaces coupled to a top surface of the base, and an alignment collar coupled to the top surface of the base defining a window exposing the one or more calibration surfaces. By utilizing the mechanical structure of the alignment collar and base, the optical non-contact surface roughness measurement device may be accurately aligned with respect to the calibration surfaces, allowing for repeatable calibration measurements.

Abstract: Provided is an asperity detection device for a can which does not need an additional conveyance device for inspection, reduces increased inspection costs, and allows for quick detection of defective merchandise while conveying the can.

Abstract: Disclosed are systems and methods to extract information about the size and shape of an object by observing variations of the radiation pattern caused by illuminating the object with coherent radiation sources and changing the wavelengths of the source. Sensing and image-reconstruction systems and methods are described for recovering the image of an object utilizing projected and transparent reference points and radiation sources such as tunable lasers. Sensing and image-reconstruction systems and methods are also described for rapid sensing of such radiation patterns. A computational system and method is also described for sensing and reconstructing the image from its autocorrelation. This computational approach uses the fact that the autocorrelation is the weighted sum of shifted copies of an image, where the shifts are obtained by sequentially placing each individual scattering cell of the object at the origin of the autocorrelation space.

Abstract: This invention relates to a pattern shape inspection method and an apparatus thereof for conducting a first step of irradiating wideband illuminating light which contains far ultraviolet light to a sample from a perpendicular direction, inspecting a shape of the pattern based on a spectral waveform of reflecting light detected from the sample, and detecting an edge roughness of the pattern based on the spectral waveform of the reflecting light detected from the sample, and a second step of irradiating a laser beam to the sample from an oblique direction, and detecting the edge roughness of the pattern based on scattered light detected from the sample.

Abstract: A method for identifying implanted reconstructive prosthetic devices comprising obtaining a digital radiographic image of a prosthetic implant that has been implanted in a person or animal for which the manufacturer and/or model is unknown; allowing a user to enter into a computer metadata relating to the implant for use as metadata feature values; cleaning up the unknown implant image; rotating, flipping and/or scaling the unknown implant image; extracting features from the unknown implant image according to one or more feature extraction algorithms; and comparing the metadata and extracted feature values for the unknown implant image to feature values for other implant images according to a comparison algorithm to create an overall likelihood score for each of the other implant images.

Abstract: A method for measuring the roundness profiles moved forward in longitudinal direction inside a rolling mill, using two laser scanners, respectively provided with a light-sensitive sensor and a laser. At least three shadow edges that fit against the round profile to be measured and enclose the round profile to form a polygon are generated and measured and the corresponding tangents are computed.

Abstract: The invention relates to the devices for contactlessly measuring surface profiles and can be used for person identification in security systems. The inventive device for contactlessly controlling surface profile comprises a pulse illumination unit which is provided with a transparency and forms a transparency image on an object surface, and image recording unit and a computer. Said device also comprises a control unit which is connected to the image recording unit in the form of a TV camera with field interlacing, the pulse illumination unit and to the computer for synchronizing the illumination of the object surface by said pulse illumination unit with the TV camera field and for synchronizing the image processing by the computer with the TV interlacing.

Abstract: In a scatterometric method, a roughness value can be obtained by using a model including a surface layer having a variable parameter relating to its refractive index.

Abstract: Incident light 19 emitted from a laser light source 18 is reflected on an upper surface of a cantilever 13, so that reflected light 19a enters light detection means 20. Since the incident light 19 and the reflected light 19a are in a plane not including a long axis of the cantilever 13, movements of the reflected light 19a due to change in a deflection amount ? of the cantilever 13 and due to change in a fine vertical movement amount z thereof are different in direction on the light detection means 20. This enables the change in the deflection amount ? of the cantilever 13 and the change in the fine vertical movement amount z thereof to be separated from output of the light detection means 20.

Abstract: A method and a device for inspecting the quality of a formed thermoplastic fiber-reinforced plastic component wherein the component is tested by means of a sensor unit with a downstream electronic evaluation unit for analysis of the measuring result acquired by sensor technology by means of sample comparison, wherein by means of the optical sensor unit the surface roughness of the plastic component is measured after forming, which surface roughness is analyzed by means of the evaluation unit by a comparison with a stored reference pattern in such a manner that increased surface roughness is interpreted as increased internal materials porosity.

Abstract: An inspecting method and apparatus for inspecting a substrate surface includes application of a light to the substrate surface, detection of scattered light or reflected light from the substrate surface due to the applied light at a plurality of positions to obtain a plurality of electrical signals, extraction of a signal in a mutually different frequency band from each of the plurality of electrical signals, and calculation of a value regarding a state of film of the substrate through an arithmetical operation process of a plurality of extracted signals in the frequency bands.

Abstract: A system and a method of measuring irregularity of a glass substrate using only a reflection light reflected by an upper surface of reflection lights reflected by the upper surface and a lower surface of the glass substrate are disclosed. The system includes a light source section configured to output a first light to the glass substrate and a screen.

Abstract: An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool 110 which measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200, the surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: There are described methods and apparatus for assessing sediments generated in liquid-based systems. The methods involve optically obtaining information to enable height and, thus, volume data relating to sediments to be measured. Although single samples of liquid-based systems may be processed the methods are particularly suited to processing multiple samples to obtain data relating to sediments at a high rate. The apparatus includes automated handling equipment to enable samples to be moved between workstations and relative to associated optical equipment that is used to obtain information relating to the sediments.

Abstract: Methods of determining the divergence angle between a primary image and a secondary image generated by a glazing are disclosed. In a first method, a glazing is illuminated with a light source and a primary and a secondary image of the light source, generated by the glazing, are captured using an image capture device. The distance between the primary and the secondary image is determined, and the divergence angle determined from this distance. In a second method, the primary and secondary images are viewed on a target marked with a scale indicating the divergence angle. The divergence angle is read from the scale and the positions the primary and secondary image. In this second method, the light source is located at the center of the target. In both methods, the light source comprises at least one light emitting diode. Preferably, the method is used to examine the edge region of a glazing.

Abstract: An apparatus for measuring surface properties of a carriageway or road, comprising a platform arranged to move over the carriageway, the platform carrying a light source arranged to illuminate the carriageway, and a detector arranged to receive light returning from the carriageway, characterized in that the light source projects a line of light onto the surface and data representing light returning from the line of light is captured and stored.

Abstract: To inspect a substrate such as a semiconductor substrate for surface roughness at high precision. The surface roughness of the substrate is measured in each frequency band of the surface roughness by applying a light to the substrate surface and detecting a scattered light or reflected light at a plurality of azimuth or elevation angles.

Abstract: A sample having a patterned area and a method for use in controlling a pattern parameter is presented. The sample comprises at least one test structure having a patterned region similar to a pattern in the patterned area, the patterns in the patterned area and in the at least test structure being produced by the same patterning process. The at least one test structure comprises at least one pattern parameter of a predetermined value intentionally increased above a natural value of said certain parameter induced by a patterning process. By this, the natural value of the parameter induced by the patterning process can be determined.

Abstract: A method and apparatus for inspecting a surface of an object. Data from measuring the surface of the object is obtained to form surface data for the object. A range of frequencies for features on the object is selected based on a range of distances between adjacent peaks for the features. The features are formed by a tool moving along a number of paths. Desired surface data for the features is obtained from the surface data using the range of frequencies selected. A determination is made as to whether the desired surface data for the features meets a policy specifying a desired surface for the object. In response to an absence of a determination that the desired surface data for the features meets the policy, the object is reworked.

Abstract: An automatic scan and mark apparatus has a machine tool, a location detection module, a laser detector, an ink jet and a control computer. The machine tool has a movable module and a stage. The stage mounts and holds a specimen having a scraped surface. The control computer controls the location detection module to determine a position of the movable module, controls the laser detector to detect a surface morphology of the scraped surface in a measurement range, and activates the ink jet to eject inks on high points of the scraped surface of the specimen. Thus, the surface morphology is built automatically and high points are screened out and marked by colored ink. Manufacturer may easily redo scraping of determined high points based on the marked location on the specimen without burdensome measurement.

Abstract: Provided are a defect inspecting method and a defect inspecting apparatus, wherein defect detecting sensitivity is improved and also haze measurement is performed using polarization detection, while suppressing damages to samples. The defect inspecting apparatus is provided with a light source which oscillates to a sample a laser beam having a wavelength band wherein a small energy is absorbed, and two independent detecting optical systems, i.e., a defect detecting optical system which detects defect scattered light generated by a defect, by radiating the laser beams oscillated by the light source, and a haze detecting optical system which detects roughness scattered light generated due to roughness of the wafer surface. Polarization detection is independently performed with respect to the scattered light detected by the two detecting optical systems, and based on the two different detection signals, defect determination and haze measurement are performed.

Abstract: A surface profile measuring apparatus of the invention has a changing section for changing the cross section of a flux of light to be projected onto a sample by a light projecting section in measuring a surface profile of the sample. The surface profile measuring apparatus having the above arrangement enables to measure the surface profile of the sample easily and precisely, without using different kinds of measuring apparatuses.

Abstract: A friction-coefficient estimating device is configured to estimate friction coefficient of the surface of a medium in a form of a sheet by irradiating a light on the surface and by detecting specularly-reflected light component of a reflected light and a diffusely-reflected light intensity.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract: Line edge roughness or line width roughness of a feature on a sample may be determined from incident radiation scattered from the feature. An amount of ordered scattered radiation characterized by a discrete diffraction order is determined and a diffuse scattered radiation signal is measured. A ratio between an intensity of the ordered scattered incident radiation and an intensity of the diffuse scattered radiation signal is determined. The line edge roughness or line width roughness is determined from the ratio.

Abstract: A paper type determination device of the invention drives plural light emitting points different from one another and having sequentially increasing distances from a reference point to emit light in such a manner that each is identified for irradiating one surface of a sheet of paper subjected to determination. A photodetection device set at a specific detection field of view having the center at the reference point is disposed on the other surface side of the sheet of paper, and it receives light having passed through the sheet of paper from the respective light emitting points at positions on inside and outside of the detection field of view to detect intensity of light for each light emitting point. A diffusing characteristic of the sheet of paper is obtained on the basis of the intensity of light from each light emitting point detected by the photodetection device, and a paper type is determined on the basis of the diffusing characteristic.

Abstract: An apparatus for recording a shape of a section of the human ear is provided. The apparatus has a recording device for recording a spatial shape of a first and a second subsection of the section and for recording a position or a variable representing the position of the first and the second subsection relative to a predetermined optical feature of the section. The apparatus has an evaluation device for obtaining shape information about the section by combination of the shapes of the subsections based on the recorded positions or the variables representing the respective position. This enables a number of individual images to be joined together into a three-dimensional map based on natural features in the auditory canal, such as skin flecks or veins for example.

Abstract: This method comprises the steps of: transmitting a beam of light onto a surface (17) of an element (1) comprising a fissile material, passing the beam of light reflected by the surface into a polarisation analyser (27) having a modifiable analysis direction, transmitting the beam from the polarisation analyser (27) to a device (31) for acquiring digital images, acquiring at least one digital image (31) of the surface (17) of the element (1) and processing the digital image acquired in order to measure the anisotropy. Use, for example, in controlling particles of nuclear fuel for an HTR/VHTR type reactor.