By Focus Detection Patents (Class 356/609)
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Patent number: 12216044Abstract: System for measuring the thickness and properties of a thin film using a spatial light modulator according to the inventive concept includes: a spatial light modulator; a first beam splitter; an objective lens; a second beam splitter; a first camera configured to acquire a surface image of the sample; an optical fiber equipped with a light receiving unit to receive reflected light passing through a certain area of a back focal plane of the objective lens; and a spectrometer configured to measure an intensity of light received from the optical fiber and output the measured intensity as an electrical signal.Type: GrantFiled: March 29, 2021Date of Patent: February 4, 2025Assignee: SEOUL NATIONAL UNIVERSITY R&DB FOUNDATIONInventors: Heui Jae Pahk, Seung Woo Lee, Min Gyu Kim
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Patent number: 11486694Abstract: A chromatic range sensor (CRS) system is provided that determines a workpiece thickness and includes an optical pen, an illumination source, a wavelength detector and a processing portion. The optical pen includes an optics portion providing axial chromatic dispersion, the illumination source is configured to generate multi-wavelength light and the wavelength detector includes a plurality of pixels distributed along a measurement axis. In operation, the optical pen inputs a spectral profile from the illumination source and outputs corresponding radiation to first and second workpiece surfaces of a workpiece (e.g., which may be transparent) and outputs reflected radiation to the wavelength detector which provides output spectral profile data. The processing portion processes the output spectral profile data to determine a thickness of the workpiece.Type: GrantFiled: December 18, 2020Date of Patent: November 1, 2022Assignee: Mitutoyo CorporationInventor: Norman Laman
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Patent number: 11455737Abstract: A method and apparatus for digital image correlation. A camera system is used to obtain larger scale images of a larger scale dot pattern on a surface of a workpiece and smaller scale images of a smaller scale dot pattern on the surface of the same workpiece. The smaller scale dot pattern forms a larger dot in the larger scale dot pattern in the larger scale images. The larger scale images and the smaller scale images may be used to determine a measurement of the workpiece.Type: GrantFiled: December 6, 2012Date of Patent: September 27, 2022Assignee: The Boeing CompanyInventors: James A. Grossnickle, James E. Pillers, Kevin Earl McCrary
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Patent number: 11415674Abstract: A chromatic point sensor (CPS) optical pen provides a signal usable to measure a distance to a surface, and includes an axial chromatic aberration portion arranged to receive source radiation from an aperture, output it toward the surface as a focused measurement beam having axial chromatic dispersion, receive reflected radiation from the surface and focus it proximate to the aperture. The axial chromatic aberration portion includes a first axially dispersive focusing element that receives the source radiation and focuses it at a first focal region, a second axially dispersive focusing element that receives the radiation from the first focal region and focuses it at a second focal region, and a third axially dispersive focusing element that receives the radiation from the second focal region and outputs the measurement beam. Lengths between the first, second and third axially dispersive focusing elements are adjustable (i.e., resulting in an adjustable range).Type: GrantFiled: October 31, 2019Date of Patent: August 16, 2022Assignee: Mitutoyo CorporationInventor: Pavel Ivanovich Nagornykh
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Patent number: 11326865Abstract: A calibration configuration for a chromatic range sensor (CRS) optical probe of a coordinate measurement machine (CMM) includes a cylindrical calibration object and a spherical calibration object. The cylindrical calibration object includes at least a first nominally cylindrical calibration surface having a central axis that extends along a Z direction that is intended to be aligned approximately parallel to a rotation axis of the CRS optical probe. The spherical calibration object includes a nominally spherical calibration surface having a first plurality of surface portions. The CMM is operated to obtain radial distance measurements and determine cylindrical calibration data using radial distance measurements of the cylindrical calibration object and to determine spherical calibration data using radial distance measurements of the spherical calibration object.Type: GrantFiled: August 24, 2020Date of Patent: May 10, 2022Assignee: Mitutoyo CorporationInventor: Joseph Daniel Tobiason
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Patent number: 11273017Abstract: An apparatus includes a probe sized to be at least partially inserted into an intraoral cavity of a patient and an illumination unit configured to output light. The apparatus includes a light focusing assembly comprising an image space lens, an object space lens and a focus changing assembly between the image space lens and the object space lens and being configured to: overlap a plurality of light beams of the light within the light focusing assembly; and focus the light to a plurality of external focal planes to illuminate the patient's teeth. The apparatus includes a detector to measure one or more characteristics of incident light returning from the illuminated patient's teeth and a processor coupled to the detector and configured to generate data representative of a topography of the patient's teeth based on the one or more measured characteristics of the incident light returning from the illuminated patient's teeth.Type: GrantFiled: July 7, 2020Date of Patent: March 15, 2022Assignee: Align Technology, Inc.Inventors: Yossef Atiya, Tal Verker
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Patent number: 11269191Abstract: A data acquisition apparatus includes an illumination device, a first beam splitter, a measurement unit, and a photodetector. A measurement optical path and a reference optical path are positioned between the illumination device and the photodetector. In the first beam splitter, light traveling in a first direction and light traveling in a second direction are generated from incident light. The measurement optical path is positioned in the first direction, the reference optical path is positioned in the second direction, and the measurement unit is disposed on the measurement optical path. In the optical surface of the first beam splitter, an incident position of light emitted from the illumination device changes with time, and the angle formed by light propagating through the measurement optical path and the optical axis of the measurement optical path changes with change in the incident position.Type: GrantFiled: January 14, 2021Date of Patent: March 8, 2022Assignee: OLYMPUS CORPORATIONInventor: Yoshimasa Suzuki
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Patent number: 11187521Abstract: A calibration configuration for a chromatic range sensor (CRS) optical probe of a coordinate measurement machine (CMM) includes a calibration object. The calibration object includes at least a first nominally cylindrical calibration surface having a central axis that extends along a Z direction that is intended to be aligned approximately parallel to a rotation axis of the CRS optical probe. The first nominally cylindrical calibration surface is arranged at a known first radius R1 from the central axis that extends along the Z direction. A first set of angular reference features is formed on or in the first nominally cylindrical calibration surface. The angular reference features are configured to be sensed by the radial distance sensing beam and are located at known angles or known angular spacings around the central axis from one another on or in the first nominally cylindrical calibration surface.Type: GrantFiled: April 28, 2020Date of Patent: November 30, 2021Assignee: MITUTOYO CORPORATIONInventor: Joseph Daniel Tobiason
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Patent number: 11096765Abstract: A handheld wand comprises a probe at a distal end of the elongate handheld wand. The probe includes a light projector and a light field camera. The light projector includes a light source and a pattern generator configured to generate a light pattern. The light field camera includes a light field camera sensor, the light field camera sensor comprising an image sensor comprising an array of sensor pixels, and an array of micro-lenses disposed in front of the image sensor such that each micro-lens is disposed over a sub-array of the array of sensor pixels.Type: GrantFiled: June 19, 2019Date of Patent: August 24, 2021Assignee: Align Technology, Inc.Inventors: Yossef Atiya, Erez Lampert, Avi Kopelman
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Patent number: 11099158Abstract: A three dimensional (3D) detection device has a detection supporter base to be disposed on a transmission device, ultrasonic transceiver modules disposed on at least one inner base surface of the detection supporter base and a controller. When a tested object is transmitted by the transmission device and then enters the detection supporter base, the ultrasonic transceiver modules emit ultrasonic signals to the tested object, and the tested object reflects the ultrasonic signals to the ultrasonic transceiver modules. The ultrasonic transceiver modules generate detection signals according to the reflected ultrasonic signals. The detection signals are sent to the controller, and the controller generates an ultrasonic image corresponding to a tested object according to the detection signals, and then compares the ultrasonic image to a pre-established original 3D image, so to achieve a surface detection objective.Type: GrantFiled: February 25, 2020Date of Patent: August 24, 2021Assignee: GAUSS DESIGN INCInventors: Chih-Chieh Lin, Hsien-Kuo Wang
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Patent number: 11007039Abstract: A non-transitory medium includes instructions for generating a three-dimensional virtual model of an intraoral object by receiving surface scan data of the intraoral object while changing a position of at least one lens of focusing optics of an intraoral scanner, wherein the surface scan data comprises data for a plurality of points of the intraoral object, and adjusting the data for one or more of the plurality of points to compensate for one or more inaccuracies associated with changes of a shape of a focusing surface. A three-dimensional virtual model of the intraoral object is generated using the adjusted data.Type: GrantFiled: January 28, 2021Date of Patent: May 18, 2021Assignee: Align Technology, Inc.Inventors: Tal Verker, Adi Levin, Ofer Saphier, Maayan Moshe
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Patent number: 10895448Abstract: A measurement system and methods for collecting measurement data for features of ceramic matrix composite (CMC) components are provided. In one aspect, the system and methods provided herein can be utilized to collect measurement data for a cooling hole of a CMC component. The measurement system includes a sensor system that includes a chromatic confocal sensor and a charged coupled device. The chromatic confocal sensor emits stacked cones of light each having an associated wavelength. The stacked cones are moved over a target surface of the CMC component and the charged coupled device measures one or more characteristics associated with the reflected light. The characteristics are then used by a computing device to generate a measurement data file representative of the geometric profile of the cooling hole. A rotary table system can position the CMC component to present the cooling hole at different orientations.Type: GrantFiled: April 9, 2019Date of Patent: January 19, 2021Assignee: General Electric CompanyInventors: Sean Allen Campion, Cody Daniel Burbank, Joshua Ryan Wilson
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Patent number: 10876895Abstract: A method and a device are provided which enables a simple and fast Raman and/or fluorescence measurement even on uneven specimen surfaces; additionally, the invention should make it possible to confocally image a plane or a surface, in particular a surface of a specimen, i.e. with the aid of confocal microscopy.Type: GrantFiled: February 22, 2018Date of Patent: December 29, 2020Assignee: Witec Wissenschaftliche Instrumente und Technologie GmbHInventors: Peter Spizig, Olaf Hollricher, Wolfram Ibach
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Patent number: 10841564Abstract: A three dimensional scan system includes a projection device, an image capturing module and an image formation device. The projection device includes a lighting module for providing a light beam, and a pattern generator for receiving the light beam and project a predetermined pattern. The image capturing module is used to capture images. The image formation device is used to form a projected pattern by projecting the predetermined pattern onto an object, and to project an image of the object and the projected pattern to the image capturing module. An optimal image formation focal plane of the image formation device for forming the predetermined pattern is different from an optimal image capturing focal plane of the image formation device for projecting the projected pattern.Type: GrantFiled: March 27, 2019Date of Patent: November 17, 2020Assignee: Qisda CorporationInventors: Ching-Huey Wang, Ming-Kuen Lin, Tsung-Hsun Wu
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Patent number: 10753737Abstract: A method for reconstructing a surface of an object includes the steps as follows. A light beam is modulated by a spatial light modulator (SLM) and is projected to form a pattern, wherein the pattern has a transmittance distribution in a cosine distribution such that the pattern is formed to become a fringe pattern with a periodic change. A first impulse and a second impulse present within a first period and a second period of the cosine distribution, wherein a position where the first impulse occurs within the first period and a position where the second impulse occurs within the second period are different. The light beam is guided to an object so as to form a scan pattern on the object. The scan pattern is read. According to the scan pattern, a surface profile of the object is calculated.Type: GrantFiled: November 21, 2019Date of Patent: August 25, 2020Assignee: NATIONAL CENTRAL UNIVERSITYInventors: Wei-Hung Su, Yeh-Wei Yu, Ching-Cherng Sun
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Patent number: 10739191Abstract: The present disclosure relates to a method for determining a beam profile of a laser beam, which is positioned by a scanner device in a processing field. The method includes: arranging at least one retroreflector in the processing field for irradiating powder layers of the scanner device; detecting laser radiation reflected back into the scanner device while the laser beam is scanned over the retroreflector; and determining the beam profile of the laser beam by using the laser radiation detected during the scanning travel over the retroreflector.Type: GrantFiled: May 9, 2019Date of Patent: August 11, 2020Assignee: TRUMPF Laser- und Systemtechnik GmbHInventors: Philipp Wagenblast, Matthias Allenberg-Rabe
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Patent number: 10708574Abstract: An imaging apparatus includes a first and second light source, focusing optics, a probe, a detector, an optical transmission medium and a color sensor. The first light source is to generate light beams that travel through the focusing optics along an optical path to the probe. The probe directs the light beams toward a three dimensional object to be imaged. The detector detects returning light beams that are reflected off of the three dimensional object and directed back through the probe and the focusing optics. The second light source is to generate multi-chromatic light. The optical transmission medium is outside of the optical path and is to receive a ray of the multi-chromatic light reflected off of a spot on the three dimensional object and through the probe. The color sensor is to receive the ray from the optical transmission medium and determine a color of the spot on the three dimensional object.Type: GrantFiled: April 13, 2018Date of Patent: July 7, 2020Assignee: Align Technology, Inc.Inventors: Gilad Furst, Tal Verker, Ofer Saphier
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Patent number: 10551171Abstract: A white light confocal optical measurement device capable of detecting abnormalities in a received light waveform; the optical measurement device includes: a light source; an optical system; a light receiving unit; and a processor configured to compute the distance from the optical system to the measurement object on the basis of a received light intensity of the wavelength components received in the light receiving unit. The processor compares a received light intensity of a wavelength component to a reference value for the wavelength component for a plurality of wavelength components in a waveform representing the light received, and detects an abnormality in the received light waveform when the amount of change in the received light intensity compared to the reference value therefor is greater than or equal to a predetermined threshold for any wavelength component in the plurality of wavelength components.Type: GrantFiled: January 24, 2017Date of Patent: February 4, 2020Assignee: OMRON CorporationInventors: Hisayasu Morino, Kenichi Matoba, Takahiro Suga
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Patent number: 10481056Abstract: A bond test apparatus, and a cartridge and a light guide for the bond test apparatus are disclosed. The bond test apparatus includes a stage for supporting a bond for testing, a test tool having a test tool tip, a drive mechanism for providing relative movement between the stage and the test tool during the bond test, one or more light sources fixed relative to the test tool, a light guide for directing light to the test tool tip. The cartridge includes a test tool having a test tool tip to contact the bond during a bond test, one or more light sources fixed to the test tool, and a light guide for directing light s to the test tool tip. The light guide includes a tubular body to fit around a test tool, and to direct light, using total internal reflection, from a proximal end of the light guide to a distal end of the light guide.Type: GrantFiled: January 26, 2018Date of Patent: November 19, 2019Assignee: Nordson CorporationInventor: Martin Bugg
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Patent number: 10444360Abstract: A displacement measurement device and a measurement method are provided. A displacement measurement device includes a light projecting unit configured to generate a light beam; a sensor head configured to emit the light beam to a measurement target object and receive a light beam reflected at the measurement target surface within the emitted light beam; a storage unit configured to store a function using a distance between the sensor head and the measurement target surface as a variable; and a control unit configured to calculate the distance based on a wavelength of the light received by the sensor head. The control unit calculates a value of the function using a distance between the sensor head and the measurement target surface of the measurement target object as a value of the variable. The control unit corrects the calculated distance using the calculated value of the function.Type: GrantFiled: February 12, 2018Date of Patent: October 15, 2019Assignee: OMRON CorporationInventors: Tomonori Kondo, Yuta Suzuki, Kenichi Matoba
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Patent number: 10389894Abstract: An image processing apparatus comprises: a first generation unit that generates approximate light pattern by adjusting spatial frequency of an input image, and generates a projection image data based on the approximate light pattern; and a second generation unit that generates a print image data based on the input image, wherein the second generation unit generates the print image data so that a difference between the input image and an image for observation obtained by superimposing projection light projected based on the projection image data onto a printed matter printed based on the print image data is reduced.Type: GrantFiled: June 20, 2018Date of Patent: August 20, 2019Assignee: CANON KABUSHIKI KAISHAInventors: Masanao Kurita, Shinya Oda, Masayoshi Sekine, Tetsuji Saito, Yasuo Suda
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Patent number: 10365630Abstract: A probe displacement command in a scanning measurement is generated according to a composite speed vector V: V=Gf·Vf+Ge·Ve+sp(p)·Gc·Vc2 wherein Vf is a vector along which a probe is displaced along a scanning path, Ve is a vector maintaining a deflection amount of the probe toward a work piece at a standard deflection amount. Vc2 is represented by (Vc1·q)q, Vc1 is a vector in a direction correcting a probe position such that a stylus tip is oriented along a scanning course, q is a vector given by a vector product of the normal line of a surface of the work piece and Vf, The normal direction of a measured surface is designated as Nw, p is a scalar product of Vc2 and Nw, and sg(p) is a function returning +1 or ?1 in accordance with a value of p.Type: GrantFiled: June 30, 2017Date of Patent: July 30, 2019Assignee: MITUTOYO CORPORATIONInventors: Takashi Noda, Hiromi Deguchi, Norihiko Murata
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Patent number: 10267621Abstract: The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a plurality of pinholes, an optical member configured to cause an axial chromatic aberration in the plurality of detection lights respectively emitted via the plurality of pinholes and converge the plurality of detection lights toward the measurement object, a spectroscope configured to respectively spectrally disperse, in the detection lights irradiated on the measurement object via the optical member, a plurality of detection lights respectively passed through the plurality of pinholes by being reflected while focusing on the measurement object and generate a plurality of light reception waveforms representing light reception intensities for each wavelength, and a measurement control section configured to statistically process the plurality of light reception waveforms and generate a representative light reception waveform from the plurality of light reception waveforType: GrantFiled: May 17, 2018Date of Patent: April 23, 2019Assignee: Keyence CorporationInventors: Shoma Kuga, Suketaka Fujimoto, Hideto Takei, Yusuke Suemura, Tomikazu Sakaguchi
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Patent number: 10240977Abstract: A method is provided for inspecting the surface of an object such as a wafer having tridimensional structures, using a confocal chromatic device with a plurality of optical measurement channels and a chromatic lens allowing optical wavelengths of a broadband light source to be focused at different axial distances defining a chromatic measurement range. The method includes a step of obtaining an intensity information corresponding to the intensity of the light actually focused on an interface of the object within the chromatic measurement range at a plurality of measurement points on the object by measuring a total intensity over the full spectrum of the light collected by at least some of the optical measurement channels in a confocal configuration.Type: GrantFiled: June 29, 2016Date of Patent: March 26, 2019Assignee: UNITY SEMICONDUCTORInventors: Gilles Fresquet, Alain Courteville, Philippe Gastaldo
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Patent number: 10215631Abstract: To provide a confocal displacement sensor that can prevent deterioration in measurement accuracy due to a spherical aberration of an optical member. The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a pinhole configured to emit detection light by allowing the light emitted from the light source for light projection to pass, an optical member configured to generate an axial chromatic aberration in the detection light emitted via the pinhole and converge the detection light toward the measurement object, a measurement control section configured to calculate displacement of the measurement object on the basis of, in the detection light irradiated on the measurement object via the optical member, detection light passed through the pinhole by being reflected while focusing on the measurement object, and a head housing configured to house the pinhole and the optical member.Type: GrantFiled: May 17, 2018Date of Patent: February 26, 2019Assignee: Keyence CorporationInventors: Hideto Takei, Tomikazu Sakaguchi
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Patent number: 10168145Abstract: A three dimensional shape measurement apparatus comprising: a projection unit configured to perform a projection operation to a measurement area; a photographing unit configured to photograph a target object in the measurement area undergoing the projection operation; and a measurement unit configured to measure a three dimensional shape of the target object based on the photographed image, wherein the measurement area includes a measurement reference surface serving as a reference for a focus position of a photographing optical system of the photographing unit, and is defined based on a projection range of the projection unit and a photographing range of the photographing unit, and the focus position is set deeper than a position of the measurement reference surface when observed from the photographing unit.Type: GrantFiled: April 28, 2016Date of Patent: January 1, 2019Assignee: Canon Kabushiki KaishaInventor: Masakazu Tohara
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Patent number: 10161740Abstract: The confocal displacement sensor includes a first optical fiber, to a first incident end of which light for light projection is input, the first optical fiber outputting the light from a first emission end, a second optical fiber, a second incident end of which is disposed to be opposed to the first emission end, the second optical fiber emitting light input via the second incident end from a second emission end, an optical member configured to cause an axial chromatic aberration on detection light emitted via the second emission end and converge the detection light toward the measurement object, a fiber connecting section configured to detachably connect the second incident end to the first emission end, and a refractive index matching material disposed between the first emission end and the second incident end.Type: GrantFiled: May 17, 2018Date of Patent: December 25, 2018Assignee: Keyence CorporationInventors: Hideto Takei, Tomikazu Sakaguchi
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Patent number: 9939258Abstract: An apparatus is described for measuring surface topography of a three-dimensional structure. In many embodiments, the apparatus is configured to focus each of a plurality of light beams to a respective fixed focal position relative to the apparatus. The apparatus measures a characteristic of each of a plurality of returned light beams that are generated by illuminating the three-dimensional structure with the light beams. The characteristic is measured for a plurality of different positions and/or orientations between the apparatus and the three-dimensional structure. Surface topography of the three-dimensional structure is determined based at least in part on the measured characteristic of the returned light beams for the plurality of different positions and/or orientations between the apparatus and the three-dimensional structure.Type: GrantFiled: May 12, 2017Date of Patent: April 10, 2018Assignee: ALIGN TECHNOLOGY, INC.Inventors: Erez Lampert, Adi Levin, Tal Verker
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Patent number: 9752867Abstract: A system for determining surface topography of a three-dimensional structure is provided. The system can include an illumination unit configured to output a two-dimensional array of light beams each comprising a plurality of wavelengths. An optical assembly can focus the plurality of wavelengths of each light beam to a plurality of focal lengths so as to simultaneously illuminate the structure over a two-dimensional field of view. A detector and a processor are used to generate data representative of the surface topography of the three-dimensional structure based on the measured characteristics of the light reflected from the structure.Type: GrantFiled: December 28, 2015Date of Patent: September 5, 2017Assignee: Align Technology, Inc.Inventors: Yossef Atiya, Tal Verker
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Patent number: 9675429Abstract: An apparatus is described for measuring surface topography of a three-dimensional structure. In many embodiments, the apparatus is configured to focus each of a plurality of light beams to a respective fixed focal position relative to the apparatus. The apparatus measures a characteristic of each of a plurality of returned light beams that are generated by illuminating the three-dimensional structure with the light beams. The characteristic is measured for a plurality of different positions and/or orientations between the apparatus and the three-dimensional structure. Surface topography of the three-dimensional structure is determined based at least in part on the measured characteristic of the returned light beams for the plurality of different positions and/or orientations between the apparatus and the three-dimensional structure.Type: GrantFiled: December 28, 2015Date of Patent: June 13, 2017Assignee: Align Technology, Inc.Inventors: Erez Lampert, Adi Levin, Tal Verker
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Patent number: 9354046Abstract: A three dimensional shape measurement apparatus may include a projection unit configured to perform a projection operation to a measurement area; a photographing unit configured to photograph a target object in the measurement area undergoing the projection operation; and a measurement unit configured to measure a three dimensional shape of the target object based on the photographed image. The measurement area includes a measurement reference surface serving as a reference for a focus position of a photographing optical system of the photographing unit, and is defined based on a projection range of the projection unit and a photographing range of the photographing unit. The focus position is set deeper than a position of the measurement reference surface when observed from the photographing unit.Type: GrantFiled: October 1, 2012Date of Patent: May 31, 2016Assignee: Canon Kabushiki KaishaInventor: Masakazu Tohara
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Patent number: 9297646Abstract: The present invention provides a measurement method of measuring a surface shape of a measurement target surface including an aspherical surface by using a measurement apparatus including an optical system which guides a light from the measurement target surface to a detection unit having a detection surface, including a step of converting, into coordinates on the measurement target surface by using a coordinate conversion table, coordinates on the detection surface that indicate positions where light traveling from the measurement target surface enters the detection surface, and a step of converting, by using an angle conversion table, angle differences between angles of light reflected by a reference surface and angles of light reflected by the measurement target surface at the respective coordinates on the detection surface into angle differences at a plurality of respective coordinates on the measurement target surface that correspond to the respective coordinates on the detection surface.Type: GrantFiled: December 12, 2011Date of Patent: March 29, 2016Assignee: CANON KABUSHIKI KAISHAInventors: Yasunori Furukawa, Toru Shimizu
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Patent number: 9261358Abstract: A system for determining surface topography of a three-dimensional structure is provided. The system can include an illumination unit configured to output a two-dimensional array of light beams each comprising a plurality of wavelengths. An optical assembly can focus the plurality of wavelengths of each light beam to a plurality of focal lengths so as to simultaneously illuminate the structure over a two-dimensional field of view. A detector and a processor are used to generate data representative of the surface topography of the three-dimensional structure based on the measured characteristics of the light reflected from the structure.Type: GrantFiled: July 3, 2014Date of Patent: February 16, 2016Assignee: Align Technology, Inc.Inventors: Yossef Atiya, Tal Verker
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Patent number: 9261356Abstract: An apparatus is described for measuring surface topography of a three-dimensional structure. In many embodiments, the apparatus is configured to focus each of a plurality of light beams to a respective fixed focal position relative to the apparatus. The apparatus measures a characteristic of each of a plurality of returned light beams that are generated by illuminating the three-dimensional structure with the light beams. The characteristic is measured for a plurality of different positions and/or orientations between the apparatus and the three-dimensional structure. Surface topography of the three-dimensional structure is determined based at least in part on the measured characteristic of the returned light beams for the plurality of different positions and/or orientations between the apparatus and the three-dimensional structure.Type: GrantFiled: July 3, 2014Date of Patent: February 16, 2016Assignee: Align Technology, Inc.Inventors: Erez Lampert, Adi Levin, Tal Verker
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Patent number: 9247235Abstract: A method and device for high-resolution three-dimensional (3-D) imaging which obtains camera pose using defocusing is disclosed. The device comprises a lens obstructed by a mask having two sets of apertures. The first set of apertures produces a plurality of defocused images of the object, which are used to obtain camera pose. The second set of optical filters produces a plurality of defocused images of a projected pattern of markers on the object. The images produced by the second set of apertures are differentiable from the images used to determine pose, and are used to construct a detailed 3-D image of the object. Using the known change in camera pose between captured images, the 3-D images produced can be overlaid to produce a high-resolution 3-D image of the object.Type: GrantFiled: July 15, 2013Date of Patent: January 26, 2016Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGYInventors: Morteza Gharib, Jian Lu, Scott Hsieh, Francisco Pereira, Alexei Harvard
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Patent number: 9219907Abstract: Described is a method and apparatus for obtaining additional information from an object and a method for surface imaging and three-dimensional imaging. Single lens, single aperture, single sensor system and stereo optic systems may be modified in order to successfully generate surface maps of objects or three-dimensional representations of target objects. A variety of the aspects of the present invention provide examples of the use of an addressable pattern in order to overcome mismatching common to standard defocusing techniques.Type: GrantFiled: October 3, 2013Date of Patent: December 22, 2015Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGYInventors: Morteza Gharib, Emilio Graff, Francisco Pereira
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Patent number: 9207525Abstract: Disclosed is a phosphor wheel including a substrate, a first phosphor region on the substrate, and a second phosphor region on the substrate. The first phosphor region and the second phosphor region are concentric patterns without any space between their interface. Moreover, the second phosphor region is set to surround the first phosphor region.Type: GrantFiled: June 23, 2014Date of Patent: December 8, 2015Assignee: Delta Electronics, Inc.Inventors: Keh-Su Chang, Yen-I Chou, Chi Chen, Meng-Han Liu, Bor Wang
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Patent number: 9161014Abstract: Method for compensating illumination deficiencies in microscopic “shape from focus (SFF)”, wherein firstly the reflectance of the scene is estimated by way of a projector-camera system and then microscopic “shape from focus (SFF)” is applied to a stack of reflectance maps rather than to the original image data.Type: GrantFiled: July 26, 2011Date of Patent: October 13, 2015Assignees: Alicona Imaging GmbH, Technische Universität GrazInventors: Manfred Prantl, Stefan Scherer, Martin Lenz, Matthias Ruther, Horst Bischof
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Patent number: 9089277Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.Type: GrantFiled: December 26, 2013Date of Patent: July 28, 2015Assignee: Align Technology, Inc.Inventors: Noam Babayoff, Isaia Glaser-Inbari
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Patent number: 9068823Abstract: A method for imaging an object using a microscope includes obtaining axial response data, the axial response data representative of a relationship between a separation between a top surface of the object and an objective lens of the microscope and an intensity of light reflected by the top surface of the object; positioning the object at a distance from the objective lens that is within a linear region of the axial response data; sequentially illuminating the object with a plurality of periodic patterns; obtaining a plurality of images of the object, each image resulting from the illumination of the object with a corresponding one of the plurality of periodic patterns; determining a reconstructed image of the object based on the plurality of images of the object; and, based on variations in the intensity of the reconstructed image, determining a topographic profile of the top surface of the object.Type: GrantFiled: April 22, 2014Date of Patent: June 30, 2015Assignee: Academia SinicaInventors: Chau-Hwang Lee, Chun-Chieh Wang
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Patent number: 9041940Abstract: According to one embodiment, a three-dimensional shape measuring apparatus includes at least an aperture plate that is provided with a plurality of confocal apertures which are two-dimensionally arranged to have a predetermined arrangement period, and an aperture plate displacement portion that displaces the aperture plate at a constant speed in a predetermined direction perpendicular to the optical axis direction. Further, the aperture plate is provided with a cover member which is moved integrally with the aperture plate and which includes a transparent body allowing the light beams from the light source to pass therethrough and to be irradiated to the plurality of confocal apertures, and protects the plurality of confocal apertures from dust. Further, an imaging optical system, by which each of reflected light beams is guided to a photo-detector, is designed in consideration of optical properties of the whole optical system including the transparent body of the cover member.Type: GrantFiled: September 11, 2012Date of Patent: May 26, 2015Assignee: TAKAOKA TOKO CO., LTD.Inventor: Mitsuhiro Ishihara
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Patent number: 9036140Abstract: An optical probe system having a probe with an optical guide (G) having a distal end. The optical guide (G) is mounted inside a housing (H) so that the distal end is displaceable with respect to the housing (H). A set of actuators (A), e.g. electromagnetic drive coils, can displace the distal end by application of a drive signal (Vx, Vy). A control unit (CU) generates the drive signal (Vx, Vy) so as to provide a scanning frequency which varies according to an amplitude of the drive signal (Vx, Vy). With such probe system it is possible to scan a field of view with a scanning frequency that varies with the scanning radius. Taking into account the maximum allowable drive current, it is possible to increase scanning speed compared to scanning at the mechanical resonance frequency of the optical system, since small radii can be scanned at a high scanning frequency.Type: GrantFiled: September 10, 2010Date of Patent: May 19, 2015Assignee: Koninklijke Philips N.V.Inventors: Nenad Mihajlovic, Jeroen Jan Lambertus Horikx, Waltherus Cornelis Jozef Bierhoff, Cornelius Antonius Hezemans, Bernardus Hendrikus Wilhelmus Hendriks
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Patent number: 8952305Abstract: An embodiment of an autofocus system is provided, including a height detection module, an image detection module, a movement unit and a processing unit. The height detection module is arranged to output a plurality of detection lights along a Z axis direction, wherein each of the detection lights has different focal lengths and different wavelengths such that the height detection module generates a dispersion region along the Z axis direction. The image detection module is arranged to capture an image of the focus position. The movement unit is arranged to move an object along the Z axis direction, wherein the object has an internal surface and an external surface. The processing unit determines whether the external surface and the internal surface are within the dispersion region according to the quantity of the energy peaks of a reflectance spectrum received by the height detection module.Type: GrantFiled: March 4, 2013Date of Patent: February 10, 2015Assignee: Industrial Technology Research InstituteInventors: Huang-Wen Lai, Shih-Hsuan Kuo, Leh-Rong Chang
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Patent number: 8928874Abstract: A method for operating a chromatic range sensor (CRS) system to identify abnormal spectral profiles arising from light reflected from more than one portion of a workpiece surface is provided. The method comprises: providing a CRS system comprising: an optical element, a light source, and CRS electronics comprising a CRS wavelength detector; operating the CRS system to receive an output spectral profile from a measurement point on a workpiece surface and provide corresponding output spectral profile data; analyzing the output spectral profile data to provide a peak region asymmetry characterization; and providing a corresponding abnormality indicator if the peak region asymmetry characterization indicates that the peak region is abnormally asymmetric.Type: GrantFiled: February 24, 2012Date of Patent: January 6, 2015Assignee: Mitutoyo CorporationInventor: Andrew Michael Patzwald
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Patent number: 8896845Abstract: A device for measuring three dimensional shape is configured to perform one of a first imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of a first light pattern of multiply varied phases, and a second imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of a second light pattern of multiply varied phases. The device is configured to, simultaneous with completion of the first or second imaging operation, start shifting or switching operation of said first grating or a second grating relating to said first imaging operation. The device is configured to, without waiting for completion of the shifting or switching operation, perform the other imaging operation from among the first and second imaging operations.Type: GrantFiled: July 26, 2012Date of Patent: November 25, 2014Assignee: CKD CorporationInventors: Nobuyuki Umemura, Takahiro Mamiya, Hiroyuki Ishigaki
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Patent number: 8885175Abstract: A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associate color of a structure is also provided.Type: GrantFiled: January 8, 2014Date of Patent: November 11, 2014Assignee: Cadent Ltd.Inventor: Noam Babayoff
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Patent number: 8885176Abstract: The invention provides a shape measuring device, a shape measuring method, and a shape measuring program capable of accurately and easily positioning a measuring object at a focus of a light receiving unit when measuring the shape of the measuring object. An image of a measuring object captured by a light receiving unit is displayed on a display section, and an arbitrary position on the image of the measuring object is specified by a user. A relative distance between the light receiving unit and a stage is changed so that the specified position coincides with a focus of the light receiving unit. The light emitted from a light projecting unit is reflected by the measuring object and received by the light receiving unit. Stereoscopic shape data of the measuring object is generated by a triangular distance measuring method based on a light receiving signal output by the light receiving unit.Type: GrantFiled: October 1, 2013Date of Patent: November 11, 2014Assignee: Keyence CorporationInventor: Jun Tabuchi
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Patent number: 8867044Abstract: In a method for scanning edges of an object using a computing device, the computing device is connected to an image measuring machine including an image capturing device. A start point, an end point, a scan direction, and a scan distance interval are set. Scan points on the edges of the object are determined. For each scan point, the computing device aims the image capturing device at the scan point, controls the image capturing device to capture images of the object at different depths, and records focal points. Definition values of the images are calculated and an image with a highest definition value is determined. A focal point corresponds to the image with the highest definition value and so coordinates of the scan point are determined. Scanned edges of the object are formed based on all the scan points.Type: GrantFiled: August 26, 2012Date of Patent: October 21, 2014Assignees: Hong Fu Jin Precision Industry (ShenZhen) Co., Ltd., Hon Hai Precision Industry Co., Ltd.Inventors: Chih-Kuang Chang, Li Jiang, Zhong-Kui Yuan, Dong-Hai Li, Zhi-Jun Zou
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Publication number: 20140233040Abstract: A focal point generated by a confocal sensor system is moved along a visual axis, orthogonal to the x, y-plane of an x, y, z-coordinate system, to a target z-coordinate of a point to be measured on a surface of an object. A light intensity of light reflected by the surface is dependent on a distance of the focal point along the z-axis to the point to be measured, and is detected and used in determining the actual z-coordinate of the point to be measured by an evaluation device.Type: ApplicationFiled: September 3, 2012Publication date: August 21, 2014Inventors: Werner Gergen, Detlef Gerhard, Martin Weber
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Patent number: 8797397Abstract: A method of operating a chip mounter is provided, comprising: preparing an electronic part on a part supply unit and a printed circuit board on a main body; gripping the electronic part using a part conveyor unit to move the electronic part along a part moving path on the part supply unit and the main body; photographing the electronic part when the electronic part is located at a part recognition region within the part moving path without stoppage and during the movement of the electronic part; transmitting a photographed image of the electronic part to a controller using the image processing unit; comparing the photographed image with a reference image using the controller; and displaying the photographed image to the exterior using the controller; wherein the part recognition region is set by at least one coordinate in the controller to be located on a light source of the processing unit.Type: GrantFiled: July 24, 2012Date of Patent: August 5, 2014Assignee: Samsung Techwin Co., Ltd.Inventor: Jae-Hyun Park