Abstract: The invention relates to a method and an apparatus for determining a height of a number of spatial positions on a sample, defining a height map of a surface of said sample. The method can involve irradiating the surface of the sample with light including a spatial periodic pattern in a direction perpendicular to an optical axis and moving parallel to the pattern, scanning the surface in the direction of the optical axis for each position of the surface and detecting the light reflected by the sample by a detector during the scanning. In any scanning position, only a single image is taken, and the scanning speed has a predetermined relation to the phase of the periodic pattern. Analyzing an output signal of the detector can involve, for each spatial position of the detector, determining of an amplitude of the signal detected during the scanning and determining a scanning location where the amplitude is maximal.

Abstract: An automated motorized assembly may be utilized to move a laser reflector on inside or outside surfaces, along edges of barrel shape structures. The laser reflector may be used to reflect laser signals back to a laser tracker metrology system locked in on the laser reflector. The laser tracker may follow the laser reflector as it moves along an edge of a barrel shape structure, acquiring circumferential data. The laser reflector may be moved to different positions to enable obtaining different circumferential rows of data. The automated motorized assembly may comprise a movement component that ensures consistent, continued, and/or tight movement along the traversed edge. The movement component may comprise a plurality of wheels and/or rollers, and one or more motors for driving at least some of the wheels and/or rollers. The automated motorized assembly may be controlled by user input, which may be communicated wirelessly.

Abstract: The method includes: calculating positional and angular magnification distributions of rays reflected by a reference aspheric surface on a light-receiving sensor and on a sensor conjugate surface; measuring a first wavefront of a reference light on the sensor; and calculating a second wavefront of the reference light on the sensor based on a parameter of an optical system. The method includes: moving at least two movable elements for calibration such that a difference between rotationally symmetric components of the first and second wavefronts becomes small; measuring, after the calibration, a third wavefront of the reference light on the sensor; measuring, after the calibration, a fourth wavefront of the measurement light on the sensor; and calculating the profile of the measurement object aspheric surface by using the third and fourth wavefronts, the positional and angular magnification distributions, and the profile of the reference aspheric surface.

Abstract: In one aspect, an apparatus for determining an internal profile of a measured device is provided, which method in one embodiment may include: a housing having a first axis, a measuring device configured to emit a light beam along a second axis offset from the first axis; a deflection device configured to direct the emitted light beam to an inner surface of the measured device; and a driver configured to rotate the measuring device about the first axis.

Abstract: A laser tracker system for measuring six degrees of freedom may include a main optics assembly structured to emit a first laser beam, a pattern projector assembly structured to emit a second laser beam shaped into a two-dimensional pattern, and a target. The target may include a retroreflector and a position sensor assembly. A center of symmetry of the retroreflector may be provided on a different plane than a plane of the position sensor assembly. A method of measuring orientation of a target may include illuminating the target with a laser beam comprising a two-dimensional pattern, recording a position of the two-dimensional pattern on a position sensor assembly to create a measured signature value of the two-dimensional pattern, and calculating an orientation of the target based on the measured signature value.

Abstract: A noncontact object scanning system includes a horizontal table rotatable on a vertical axis, one or more scanners above the table and one or more scanners below the table. The table allows passage of radiant energy therethrough due to its transparency or construction as a nonreflective grid. A controller automatically steps the scanners through a scanning sequence, each scan associated with a segment of the object's exterior surface. Surface segments scanned from above the table and from below the table combine to provide a comprehensive scan of the entire exterior surface. Adjacent surface segments overlap one another to provide redundant data used to overcome shadowing effects from the grid and to accurately align and merge the segments into a three dimensional representation of the complete exterior shape of the object. The scanners can incorporate color responsive light detectors whereby the three dimensional representation portrays color and shape.

Abstract: A method of categorizing the reliability of measurement data in a chromatic range sensor (e.g., an optical pen) which uses chromatically dispersed light to measure the distance to a surface. In one embodiment, the system performs a number of predetermined reliability checks which determine the reliability categories for the sets of measurement data. The reliability categories may be stored as metadata with the respective workpiece height measurements that are determined from the associated measurement data. The reliability categories may be reported to the user (e.g., as graphical reliability category indicators that accompany a graphical display of the measurement data). With these reliability categories, the user may make informed decisions regarding the measurement data (e.g., deciding to filter out data that is associated with certain reliability categories, making adjustments to the setup to achieve improved measurements, etc.).

Abstract: In an apparatus for measuring the dimensions of an object, an opto-electronic sensor system includes an illumination device which sends light towards the object and a receiving device which receives light reflected from the object. In particular, the apparatus includes means for optically splitting the field of view of the opto-electronic sensor system into a plurality of sectors. Each of these sectors covers at least a partial view of the object under inspection from a unique viewing point. The arrangement of the optical splitting means is selected so that based on the respective field of view and the location of the actual or virtual viewing point of each sector the area on the object surface which is visible from at least one of said viewing points is maximized. The apparatus uses only one opto-electronic sensor, but obtains multi-perspective imaging of the object.

Abstract: A non-contact sensing system acquiring three-dimensional information includes a laser light source and fiber generating a Gaussian optical beam. A movable mirror is angularly adjusted to scan the beam to an area of illumination. A lens package between the light source and the movable mirror focuses the optical beam to under-fill a movable mirror optical surface and control an optical beam scanned volume. The optical beam reflected by the movable mirror is redirected using a fold mirror orthogonal to an optical beam orientation. The optical beam is maintained Gaussian by the mirrors and lenses. An imaging device having a field of view intersecting the area of illumination receives optical beam image data reflected from the area of illumination. A control module communicating with the imaging device receives an object location in the imaging device field of view from the image data and reports object location data to a coordinate system.

Abstract: An apparatus for measuring a curvature of a surface (1), comprising means for irradiating a first light beam (S1), a second light beam (S2) and a third light beam (S3) onto a surface (1) of a sample (12), a detector (5) comprising at least one detector plane and being adapted to detect a first position of the reflected first light beam (S1), a second position of the reflected second light beam (S2) and a third position of the reflected third light beam (S3) in the at least one detector plane, means for determining a first distance between the first position of the first light beam (S1) and the third position of the third light beam (S3) and a second distance between the second position of the second light beam (S2) and the third position of the third light beam (S3), and means for determining a mean curvature of the surface from the first distance and the second distance.

Abstract: The present invention relates to a method of manufacturing an article having a fine concave-convex structure on a surface thereof, the structure having pores in which a pore interval is less than or equal to a wavelength of visible light, including: irradiating a surface of the article having the fine concave-convex structure on the surface, with light from an illumination device; capturing an image of reflected light from the surface of the article having the fine concave-convex structure on the surface using imaging device; acquiring color information from an image captured by the imaging device; and inspecting the article having the fine concave-convex structure based on the color information. According to the present invention, it is possible to easily inspect the depth of the pores of anodized alumina and the pitch between the pores, and to provide a method of manufacturing anodized alumina having a stable pore shape.

Abstract: Systems and methods are provided for evaluating and sorting seeds based on characteristics of the seeds. One method generally includes collecting image data from different parts of the seeds, and then analyzing the collected image data to determine if the seeds exhibit at least one or more characteristics. The seeds can then be sorted to desired seed repositories based on whether or not the seeds exhibit the at least one or more characteristics.

Abstract: [Object] To provide a drive axis control method used by a normal vector tracing ultra-precision shape measurement device that derives a surface shape of an object to be measured from coordinates at measurement points and measurement values of normal vectors, and shortens measurement time at each of the measurement points by devising a method for controlling each axis, thereby realizing higher-speed and higher-precision measurement of the surface shape of the object to be measured.

Abstract: A non-contact sensing system acquiring three-dimensional information includes a laser light source and fiber generating a Gaussian optical beam. A movable mirror is angularly adjusted to scan the beam to an area of illumination. A lens package between the light source and the movable mirror focuses the optical beam to under-fill a movable mirror optical surface and control an optical beam scanned volume. The optical beam reflected by the movable mirror is redirected using a fold mirror orthogonal to an optical beam orientation. The optical beam is maintained Gaussian by the mirrors and lenses. An imaging device having a field of view intersecting the area of illumination receives optical beam image data reflected from the area of illumination. A control module communicating with the imaging device receives an object location in the imaging device field of view from the image data and reports object location data to a coordinate system.

Abstract: Disclosed is a technique for detecting a road surface property. More specifically, the technique includes a reflectivity table that stores a degree of reflectivity of a rainy road relative to a reference reflectivity and a degree of reflectivity of a snowy road relative to the reference reflectivity. A reflection measurement unit measures a reflection which is the amount of a laser beam that is emitted through a light emitting unit of a laser sensor, reflected from the road surface, and received by a light receiving unit, and a reflectivity calculation unit calculates a degree of reflectivity for the road in front of the vehicle via a ratio of the measured reflection and the reference reflectivity. A road surface property determination unit then detects the corresponding road surface property based on the reflectivity table.

Abstract: A vision recognition system is provided for use with a high speed, automatic produce labeling machine. The system uses laser profiling to direct a sheet of light transversely to the longitudinal axis of a produce feed conveyor. The sheet of light periodically impacts, and generates laser profiles of, the surfaces of the produce items, such as pears, being fed by the conveyor to one or more labeling machines. The laser profiles are used to generate real world (x,y) coordinates of the domes of the incoming produce items, which are passed to the labeling machine or machines. Real world height (or z) coordinates may also be created and passed to the labeler.

Abstract: A sensor for capturing images of skin topology is provided having a platen, and a one or two-dimensional array of light sensing pixel elements for receiving light representative of skin topology when skin, such as finger(s), are present upon the platen. Such sensor being improved by structures, layers, or methods for reducing or blocking ambient light which would hinder the light sensing pixel elements from sensing the light representative of skin topology. The sensors are non-imaging contact sensors as they have platen to contact skin to be imaged, and do not require optics, such as lenses for focusing and/or magnification, to enable proper capture of light representative of skin topology on the sensor's light sensing pixel elements.

Abstract: A method for determining a flatness characteristic for a facet of a polygon assembly includes a) rotating a polygon assembly with facets at a desired speed, b) directing a light beam from a light source toward the polygon assembly so light is reflected by consecutive facets during revolutions of the polygon assembly, reflected light passing through a focusing lens that directs a spot light toward a target with spaced-apart bars arranged in a grating pattern that block a portion of the reflected light and allows another portion to pass through another focusing lens that directs another spot light toward a light sensor, the light sensor detecting intensity of the spot light, and c) measuring the intensity over time during revolutions of the polygon assembly to obtain measurements for each facet. An associated test setup includes a fixture, motor controller, light source, light sensor, two focusing lens, target, and system controller.

Abstract: A lens shape measurement device, includes: a rotation unit that rotates a lens supported by a stage; a laser displacement meter; a first moving unit that moves the laser displacement meter in a X-direction; a second moving unit that moves the lens in a Y-direction; and a drive controller that controls a drive of the rotation unit, the first moving unit, and the second moving unit in a mirror reflection state in which an incidence angle of the laser beams incident on a measurement target from the laser displacement meter, and a reflection angle of the laser beams reflected by the measurement target are equal to each other with a normal line of the lens passing through the measurement target set as a reference, for each of a plurality of measurement targets set on an edge of the lens in a rotating direction of the lens.

Abstract: The invention relates to a method for ascertaining material characteristics of an object, in particular optical properties of preferably semi-transparent objects. The aim of the invention is to obtain material characteristics without complex measuring methods. This is achieved in that spectrally resolved data from measured data of the object are calculated with spectrally resolved data of a reference body in order to ascertain the material characteristics, the measured data being ascertained with a confocal 3D measuring system.

Abstract: A surface sensing device comprising an optical monitoring system for measuring a displacement of the tip a hollow stylus with respect to a stylus carrier. According to the invention, the light emitting means of the optical monitoring system are built in such a way that the beam has at least two distinguishable light characteristics with a given characteristics distribution. The optical monitoring system further comprises an optically encoding component positioned in the stylus carrier in the optical return path and designed to transform the information of an impinging position of the returned beam upon the optical encoding component into a change of the characteristics distribution of the returned beam, and the detector means is sensitive for the at least two distinguishable light characteristics and built for generating the electrical output signal dependent on the changed characteristics distribution of the returned beam.

Abstract: Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including: but not limited to, critical dimension and overlay misregistration; defects and thin film characteristics; critical dimension and defects; critical dimension and thin film characteristics; critical dimension, thin film characteristics and defects; macro defects and micro defects; flatness, thin film characteristics and defects; overlay misregistration and flatness; an implant characteristic and defects; and adhesion and thickness.

Abstract: A non-energy dissipating, curvature sensing device senses curvature variation of a sample and comprises an outer layer, an inner layer and at least one spacer. The outer layer is flexible, transparent material and has a shape. The inner layer is flexible, transparent material, has a shape corresponding to the shape of the outer layer, is positioned under the outer layer and is thicker and harder than the outer layer. At least one spacer is positioned between the outer layer and the inner layer and creates space between the outer layer and the inner layer. A non-energy dissipating, curvature sensing method is also disclosed.

Abstract: The present invention provides for an apparatus for measuring a curvature of a surface of a wafer in a multi-wafer epitaxial reactor.

Abstract: In an embodiment, a diffuse reflection output conversion method is executed in an apparatus detecting a plurality of gradation patterns. The apparatus includes a light emitter and light receiver, and detects specular reflection and diffuse reflection simultaneously. A region before specular reflection saturation is a region where the specular reflection component decreases and saturates at minimum level. A diffuse reflection detector is calibrated by: obtaining a diffuse reflection output resulting from an amount of attached powder at a border between the region before specular reflection saturation and the region after specular reflection saturation; calculating a ratio between the diffuse reflection output and a reference diffuse reflection output calculated in advance as a calibration coefficient; and multiplying a diffuse reflection output obtained from the gradation patterns by the calibration coefficient calculated at the calculating.

Abstract: A system for structural analysis of an object, including a device for generating an input light beam arranged so as to cause the input beam generated to interact with at least one portion of the object, and a device for receiving the output light beam resulting from the interaction between the input beam and the object. In this system, the receiving device include a wavefront analyzer arranged so as to measure the electromagnetic field of the wave of the output beam received, and the generating device has a spatial coherence adapted to that of the receiving device. A structural analysis method implementing such a system is presented.

Abstract: Disclosed is a shape measurement device including: a light irradiation unit which irradiates linear light onto a work; an imaging element which images reflected light reflected by the work; and an image-forming lens which forms an image of the reflected light reflected by the work on an imaging plane of the imaging element, and a light irradiation plane of the light irradiation unit, a principal plane including a principal point of the image-forming lens, and the imaging plane of the imaging element satisfy a Scheimpflug principle. The shape measurement device further includes: an image obtaining region selection unit which divides the imaging plane of the imaging element into a plurality of regions, and selects, as an image obtaining region, a region for use in measurement from the plurality of regions in response to at least one of measurement accuracy and a size of a measurement range.

Abstract: Systems and methods are provided for evaluating and sorting seeds based on characteristics of the seeds. One system includes an imaging and analysis subsystem that collects image data from the seeds and analyzes the collected image data for characteristics of the seeds. This subsystem can include an imaging theater having minors that reflect image data from the seeds to an imaging device for collection. The system can also include an off-loading and sorting subsystem configured to sort the seeds based on their characteristics. And, one method includes illuminating the seeds and collecting image data from the seeds for determining their characteristics. The image data can be collected from at least three portions of the seeds at each of a plurality of sequentially changing spectral wavelengths. In addition (or alternatively), the image data can be collected from top and bottom portions of the seeds using a single imaging device.

Abstract: Disclosed is a measuring instrument for determining geometric properties of a profiled element. Said measuring instrument comprises:—a device that generates at least one first light beam (7) and a second light beam (8), the direction of radiation of the first light beam being different from the direction of radiation of the second light beam;—a retro-reflecting surface (3) which is arranged in such a way relative to the light source that at least some of both light beams is incident on the retro-reflecting surface; and—a recording device (14) which can determine, across the transversal extension thereof, the light intensity distribution of at least some of the reflected light beam of the first light beam and at least some of the reflected light beam of the second light beam, the first light beam being reflected by the retro-reflecting surface and the second light beam being reflected by the/a retro-reflecting surface.

Abstract: In an embodiment a method for position determination of an object (25) in a spatial area (28) is provided in which the object (25) is illuminated with at least one light beam (22, 27). The light beam (22, 27) does not cover the complete spatial area (28) and is guided into a part of the spatial area in which the object (25) is present depending on the position of the object (25). In another aspect a method for measuring a surface is provided.

Abstract: A system is provided for identifying at least one physical characteristic of items in a stream of items moving along a path through an inspection zone, and for separating items from the stream of items based upon the at least one physical characteristic. The system includes a movable transversely scanning mirror arranged to reflect electromagnetic energy from the inspection zone onto an array of detectors. The detectors of the array are arranged to sequentially receive electromagnetic energy so that on each transverse scan of the mirror for any given sub-zone within the inspection zone the detectors of the array receive electromagnetic energy reflected from the mirror at different times. The controller is then operable to correlate input signals from the various detectors corresponding to detected levels of electromagnetic energy received at different times from each given sub-zone within the inspection zone.

Abstract: Asymmetry properties of a periodic target on a substrate, such as a grating on a wafer, are determined. An inspection apparatus has a broadband illumination source with illumination beams point mirrored in the pupil plane of a high numerical aperture objective lens. The substrate and target are illuminated via the objective lens from a first direction and a second direction mirror reflected with respect to the plane of the substrate. A quad wedge optical device separately redirects diffraction orders of radiation scattered from the substrate and separates diffraction orders from illumination along each of the first and second directions. For example the zeroth and first orders are separated for each incident direction. After capture in multimode fibers, spectrometers are used to measure the intensity of the separately redirected diffraction orders as a function of wavelength.

Abstract: Disclosed herein is an object detection system including, a light radiation section, a light sweeping block, a light reflection body, a reflected-light detection section, and a reflected-light analysis section.

Abstract: In a laser scanner for optically scanning and measuring an environment, the scanner having a center which defines for a scan the stationary reference system of the scanner and the center of the scan, a light emitter which emits an emission light beam, a light receiver which receives a reception light beam reflected by an object in the environment of the scanner, a control and evaluation unit which determines, for a multitude of measuring points of the scan, at least the distance between the center of the scan and the object, the scanner, for registering a scene with several scans having different centers, being movable between the centers of the scans, and a scanner mouse for registering the path followed by the scanner between the different centers of the scans, the scanner mouse optically registering the movement of the laser scanner relative to a reference surface.

Abstract: A point correspondence procedure is applied to a set of images of a specular object to produce sparse reflection correspondences. The set of images is subject to rotation while acquired by a camera. That is, either the camera, the environment or the object rotates. Either a linear system A?=0 is solved or a related second order cone program (SOCP) is solved, where ? is a vector of local surface parameters. Gradients of the surface are obtained from the local quadric surface parameters, and the gradients are integrated to obtain normals, wherein the normals define a shape of the surface.

Abstract: A method of measuring a pattern shape of performing a shape measurement of a semiconductor pattern at a high accuracy even when a process margin is narrow with respect to miniaturization of a semiconductor device is provided. In the method of measuring a pattern shape, when a best-match calculated waveform cannot be selected, at least one parameter among shape parameters is set as a fixed value based on information obtained by another measurement apparatus that uses a measurement method independent to the pattern shape measurement, a matching of a library and a detected waveform is performed again, a best-match calculated waveform is selected, and shape information of an object pattern is obtained from the best-match calculated waveform.

Abstract: An optical metrology apparatus for measuring nanoimprint structures using Vacuum Ultra-Violet (VUV) light is described.

Abstract: In an apparatus for measuring the dimensions of an object, an opto-electronic sensor system includes an illumination device which sends light towards the object and a receiving device which receives light reflected from the object. In particular, the apparatus includes means for optically splitting the field of view of the opto-electronic sensor system into a plurality of sectors. Each of these sectors covers at least a partial view of the object under inspection from a unique viewing point. The arrangement of the optical splitting means is selected so that based on the respective field of view and the location of the actual or virtual viewing point of each sector the area on the object surface which is visible from at least one of said viewing points is maximized. The apparatus uses only one opto-electronic sensor, but obtains multi-perspective imaging of the object.

Abstract: An optoelectronic swept-frequency semiconductor laser coupled to a microfabricated optical biomolecular sensor with integrated resonator and waveguide and methods related thereto are described. Biomolecular sensors with optical resonator microfabricated with integrated waveguide operation can be in a microfluidic flow cell.

Abstract: A distance measurement system comprises an optical distance sensor configured to generate a light beam, a first optical module, and a processor. The first optical module is configured to receive the light beam, and generate and selectively transmit a plurality of light beams having different light channels for projection onto one or more points of an object to generate one or more reflected light beams scattered from the respective one or more points of the object, and capture and transmit the one or more reflected light beams into the optical distance sensor to retrieve a plurality of distance data to the respective one or more points of the object. The processor is configured to process the distance data to determine position information of the respective one or more points of the object. A distance measurement method is also presented.

Abstract: A method for optically scanning and measuring an environment of a laser scanner includes the steps of emitting an emission light beam by a light emitter, reflecting the emission light beam by a mirror into the environment, wherein several complete revolutions are made during rotation of the measuring head, receiving a reception light beam by a light receiver via the mirror, which reception light beam is reflected by an object in the environment of the laser scanner , and determining for a multitude of measuring points of the scan, at least the distance of the center to the object, wherein the measuring head makes more than half a revolution for the scan, and wherein at least some measuring points are doubly determined.

Abstract: A system and method provide a dual beam chromatic point sensor (CPS) system operable to simultaneously measure two surface regions. In one embodiment, a single beam CPS optical pen may have a dual beam assembly attached. First and second measurement beams of the system may be positioned on respective first and second surface regions, and both reflect light through a confocal aperture of the dual beam CPS. At least one set of measurements is determined, comprising a first and second measurement arising from the first and second measurement beams, respectively. At least the first surface region may be moved to acquire sets of measurements at various positions. Each measurement may be determined with extremely fine resolution (e.g., at least as fine as 10 nm). The system and method satisfy applications that require such resolution and accuracy without the use of an interferometer or other costly and complex elements.

Abstract: A method of inspecting an article, comprising applying an organic liquid substance over at least a portion of the article to be inspected so as to form a surface layer thereon, wherein said surface layer is luminescent. The article is irradiated with the surface layer thereon; and, scanning the article to determine its shape.

Abstract: A system and method for standoff detection of explosives and explosive residue. A laser light source illuminates a target area having an unknown sample producing luminescence emitted photons, scattered photons and plasma emitted photons. A first optical system directs light to the target area. A video capture device outputs a dynamic image of the target area. A second optical system collects photons, and directs collected photons to a first two-dimensional array of detection elements and/or to a fiber array spectral translator device which device includes a two-dimensional array of optical fibers drawn into a one-dimensional fiber stack. A spectrograph is coupled to the one-dimensional fiber stack of the fiber array spectral translator device, wherein the entrance slit of the spectrograph is coupled to the one dimensional fiber stack.

Abstract: A non-contact laser triangulation scanning apparatus for generating a three-dimensional image of the surface of an object based on the 3D surface position and surface contrast information. The apparatus comprises a laser source, a first optical unit, a second optical unit, a photosensitive positional detector having a plurality of sensor elements, and an incident light measurement device. According to generated timing signals having a predetermined time interval, a reset timing of the sensor elements of the photosensitive positional detector is controlled. The incident light measurement device measures an amount of a certifying laser light after one timing signal. An amount of a measurement laser light is determined dependent on the measured amount of the certifying laser light. The three-dimensional image is generated by combining position data derived from signals of the positional detector with contrast data derived at least from signals of the incident light measurement device.

Abstract: Provided are an apparatus for measuring a thickness change, a system using the apparatus, a morphology microscope using the apparatus, a method of measuring a thickness change, and a method of acquiring a morphology image by using the measuring method, by which a minute thickness change may be precisely and accurately measured or a morphology image may be acquired by using an inexpensive and simple configuration. The apparatus includes a light source for irradiating beam onto a target object; a curved reflector for reflecting the beam reflected on the target object and incident onto the curved reflector; and a sensing unit for sensing the beam reflected on the curved reflector.

Abstract: A mechanism for providing thermal compensation when measuring surface topography at an elevated temperature using a non-contact vibration transducer, such as a laser Doppler vibrometer (LDV). Thermal compensation is provided to a detector output signal to correct for thermal diffraction of a reflected portion of a beam of radiant energy directed at a surface of a test object. The thermal compensation is based on a calculated deviation between the detector output signal r2 at an elevated temperature and the detector output signal r1 at approximately room temperature.

Abstract: A vision recognition system is provided for use with a high speed, automatic produce labeling machine. The system uses laser profiling to direct a sheet of light transversely to the longitudinal axis of a produce feed conveyor. The sheet of light periodically impacts, and generates laser profiles of, the surfaces of the produce items, such as pears, being fed by the conveyor to one or more labeling machines. The laser profiles are used to generate real world (x,y) coordinates of the domes of the incoming produce items, which are passed to the labeling machine or machines. Real world height (or z) coordinates may also be created and passed to the labeler.

Abstract: A surface inspecting apparatus rotates a semiconductor wafer 100 (inspection object) as a main scan while translating the semiconductor wafer 100 as an auxiliary scan, illuminates the surface of the semiconductor wafer 100 with illuminating light 21, thereby forms an illumination spot 3 as the illumination area of the illuminating light 21, detects scattered or diffracted or reflected light from the illumination spot, and detects a foreign object existing on the surface of the semiconductor wafer 100 or in a part of the semiconductor wafer 100 in the vicinity of the surface based on the result of the detection. In the surface inspecting apparatus, the translation speed of the auxiliary scan is controlled according to the distance from the rotation center of the semiconductor wafer 100 in the main scan to the illumination spot.

Abstract: An apparatus (1) for determining surface characteristics of measuring surfaces, comprising at least one first radiation device (2) that emits radiation onto a measuring surface (10), at least one first radiation detection device (4) that receives at least part of the radiation emitted by the at least one radiation device (2) and subsequently scattered from the measuring surface (10) and that outputs at least one measurement signal that is characteristic of the received radiation, and including a second radiation device (12) and a second radiation detection device (14) for carrying out gloss measurements on the measuring surface (10), wherein the second radiation device (12) radiates onto the measuring surface (10) at a specified angle of incidence (a) and the second radiation detection device (14) receives at least part of the radiation emitted by the at least second radiation device (2) and subsequently reflected from the measuring surface (10).