By Triangulation Patents (Class 356/631)
-
Patent number: 11682738Abstract: A thin-film coating applicator assembly is disclosed for coating substrates in outdoor applications. The innovative thin-film coating applicator assembly is adapted to apply performance enhancement coatings on installed photovoltaic panels and glass windows in outdoor environments. The coating applicator is adapted to move along a solar panel or glass pane while applicator mechanisms deposit a uniform layer of liquid coating solution to the substrate's surface. The applicator assembly comprises a conveyance means disposed on a frame. Further disclosed are innovative applicator heads that comprise a deformable sponge-like core surrounded by a microporous layer. The structure, when in contact with a substrate surface, deposits a uniform layer of coating solution over a large surface.Type: GrantFiled: September 30, 2019Date of Patent: June 20, 2023Inventor: John Arthur deVos
-
Patent number: 11104849Abstract: One embodiment of a method for restricting laser beams entering an aperture to a chosen dyad and measuring their separation; the method works with frequency-modulated coherent light, and one embodiment uses a moveable, variable-aperture apparatus (FIG. 1) in conjunction with a converging lens (6) and a detector (7); and key elements of other embodiments are also described.Type: GrantFiled: January 22, 2021Date of Patent: August 31, 2021Inventor: Richard Fauconier
-
Patent number: 11072873Abstract: An electrospinning device is provided with a container for holding a liquid comprising a polymer melt or a polymer solution, and a nozzle arranged to outlet a stream of the liquid from the container. A collector collects electro spun material during electrospinning so as to form a fibrous structure. The device comprises an optical measurement system that measures a baseline distance between the collector and the optical measurement system for at least one location on a surface of the collector, and also measures a momentary distance between the optical measurement system and a momentary top layer of the fibrous structure during the electrospinning process. A processor calculates a momentary thickness of the fibrous structure. Once a required thickness is reached the electrospinning can be stopped.Type: GrantFiled: April 20, 2017Date of Patent: July 27, 2021Assignee: Innovative Mechanical Engineering Technologies B.VInventors: Paul Johannes Franciscus Maria Janssen, Ramon Hubertus Mathijs Solberg
-
Patent number: 11009339Abstract: Embodiments described herein relate to a non-destructive measurement device measurement device and a non-destructive measurement method for determining coating thickness of a three-dimensional (3D) object. In one embodiment, at least one first 3D image of an uncoated surface of the object and at least one second 3D image of a coated surface of the object are collected and analyzed to the determine the coating thickness of the object.Type: GrantFiled: February 5, 2019Date of Patent: May 18, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Kamala Chakravarthy Raghavan, David Alexander Britz
-
Patent number: 10404967Abstract: An optical 3-D sensor for very fast, highly resolved and dense capture of the surface shape of objects in 3-D space. One image or a plurality of images recorded at the same time in a single shot method suffice for the recording. Using this, it is possible, as a matter of principle, to record 3-D data with the frame rate of the employed cameras, i.e. to build a 3-D video camera. The optical 3-D sensor has a projector projecting a line pattern onto the object, and K cameras, which each record an image of the object illuminated by the projector. The line pattern contains lines in a number of R directions and the K cameras are disposed to span up to K×R triangulation sensors. The triangulation sensors are coupled by a control and evaluation unit by way of the common line pattern.Type: GrantFiled: February 24, 2017Date of Patent: September 3, 2019Inventors: Florian Willomitzer, Gerd Haeusler
-
Patent number: 10066925Abstract: A computer implemented method may include the steps of: (1) providing a first point cloud representative of at least a bare portion of a surface of an object relative to a reference portion of the surface, (2) providing a second point cloud representative of at least a coated portion of the surface relative to the reference portion, (3) registering the first point cloud and the second point cloud with respect to a common reference coordinate system, (4) registering a first reference portion subset of the first data points representative of the reference portion and a second reference portion subset of the second data points representative of the reference portion, and (5) calculating difference values indicative of a thickness of the surface coating based on differences between a coated portion subset of the second data points and a bare portion subset of the first data points.Type: GrantFiled: February 2, 2016Date of Patent: September 4, 2018Assignee: The Boeing CompanyInventors: Tyler Kurtz, Dennis R. Mathis
-
Patent number: 10001366Abstract: A coating thickness inspection device (20) is provided with: a displacement gauge (25); a position calculation unit (28a); and a determination unit (28b). The displacement gauge (25) measures the external shape of a rectangular wire (30) across the lengthwise direction thereof (external shape measurement step). The position calculation unit (28a) determines the position of a rectangular conductor (31) within the rectangular wire (30) across the lengthwise direction of the rectangular wire (30) (position calculation step). The determination unit (28b) determines whether the thickness across the peripheral direction of a coating section (32) as calculated on the basis of the results obtained by the displacement gauge (25) and the position calculation unit (28a) satisfies a standard thickness across the lengthwise direction of the rectangular wire (30) (determination step).Type: GrantFiled: October 10, 2014Date of Patent: June 19, 2018Assignees: FURUKAWA ELECTRIC CO., LTD., FURUKAWA MAGNET WIRE CO., LTD.Inventors: Yasuhide Matsumoto, Hirohiko Furuta
-
Patent number: 9664625Abstract: An inspection system is disclosed. An optical assembly establishes an optical path between a light source and a detector. The optical assembly has a relatively large amount of longitudinal chromatic aberration, so that light at a first wavelength focuses on one region of a substrate in the optical path, while light at a second wavelength simultaneously focuses on another region of the substrate. The system can operate in a calibration mode to determine one or more wavelengths of light corresponding to regions of interest in the substrate and in an imaging mode to image regions of interest in the substrate.Type: GrantFiled: September 27, 2013Date of Patent: May 30, 2017Assignee: Rudolph Technologies, Inc.Inventor: Wei Zhou
-
Patent number: 9645381Abstract: A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.Type: GrantFiled: April 21, 2015Date of Patent: May 9, 2017Assignee: Zeta Instruments, Inc.Inventors: Ken Kinsun Lee, Ronny Soetaman, Zhen Hou, James Jianguo Xu, Rusmin Kudinar, Vamsi Mohan Velidandla, Ben Garland
-
Patent number: 9534889Abstract: Provided is an apparatus that measures a thickness of a coating by selecting a wavelength of a laser based on a color of the coating using a contactless method using a photoacoustic effect and an interferometer, the apparatus including a pulsed laser source to irradiate a pulsed laser beam toward the coating, a continuous wave (CW) laser source to irradiate a CW laser beam toward the coating, a detector to detect an optical interference signal corresponding to the CW laser beam, and a signal processor to process the optical interference signal to calculate a thickness of the coating.Type: GrantFiled: October 3, 2014Date of Patent: January 3, 2017Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTEInventors: Jeong Eun Kim, Hyun Seo Kang, Hyoung Jun Park, Young Soon Heo, Keo Sik Kim, Eun Kyoung Jeon, Kwon Seob Lim, Young Sun Kim
-
Patent number: 9091531Abstract: The invention relates to the positioning of an additional photo receiver in addition to the known laser sensors for detecting double parts during transport and during the loading of machines, which are situated opposite each other. The additional photo receiver receives the laser beam from a laser sensor located opposite, exactly when there is no material in the measuring gap and the two laser sensors are precisely aligned. This arrangement makes it possible to improve the measuring process and the analysis of the measurement, and thereby increases process reliability during the monitoring of transport and the loading of machines.Type: GrantFiled: September 10, 2013Date of Patent: July 28, 2015Assignee: Roland Electronic GmbHInventors: Joachim Manz, Friedbert Walch, Matthias Armingeon
-
Patent number: 9062964Abstract: This disclosure describes providing techniques to measure caliper of the paper material. A system may include a first laser head that is disposed above a reference located along an edge of a roll to and a second laser head that is disposed above a top surface of paper material on a roll. The first laser head measures a first distance from the first laser head to the reference located along the edge of the roll. The second laser head measures a second distance from the second laser head to the top surface of the paper material. The system performs calculations for caliper, T, by subtracting the second distance from the first distance, to be the caliper of the paper material. The system also records and creates graphs of the caliper measurements.Type: GrantFiled: May 7, 2012Date of Patent: June 23, 2015Assignee: Clearwater Paper CorporationInventor: Michael Arabi
-
Patent number: 8818755Abstract: Various embodiments are directed to systems and methods for measuring a thickness of a container. For example, a control device may receive data indicating a surface topology of the container and based on the surface topology of the container, instruct a multi-axis positioning system to position a sensor relative to a first point of the container such that: a distance from the sensor to a surface at the first point is about equal to a predetermined distance; and the sensor direction is about normal to the surface at the first point. Data indicating the thickness at the first point may be received from the sensor.Type: GrantFiled: October 12, 2011Date of Patent: August 26, 2014Assignee: AGR International, Inc.Inventors: Georg V. Wolfe, William E. Schmidt, Jeffery A. Peterson, Edward J. Fisher
-
Patent number: 8669123Abstract: In a method of determining the distance (d) between an integrated circuit (1) and a substrate (2) emitted light enters the at least semi transparent substrate (2), passes through the substrate (2) and an at least semi transparent material (8), is reflected by the integrated circuit (1), passes again through the material (8) and the substrate (2), and leaves the substrate (2). The at least semi transparent material (8), particularly is an at least semi transparent adhesive, provided between the substrate (2) and the integrated circuit (1). The distance (d) between the substrate (2) and the integrated circuit (1) is determined by evaluating the intensities of the light leaving and entering the substrate (2), particularly by evaluating the ratio between the intensities of the light leaving and entering the substrate (2).Type: GrantFiled: November 25, 2008Date of Patent: March 11, 2014Assignee: NXP B.V.Inventor: Christian Zenz
-
Patent number: 8654326Abstract: Apparatus for performing Raman spectroscopy may include a first laser source having a first emission wavelength and a second laser source having a second emission wavelength. A separation between the first and second emission wavelengths may correspond to a width of a Raman band of a substance of interest. A switch may provide switching between the first and second laser sources. An ensemble of individually addressable laser emitters may be provided. A Bragg grating element may receive laser light from the ensemble. An optical system may direct light from the Bragg grating element into an optical fiber. A combined beam through the optical fiber may contain light from each of the emitters.Type: GrantFiled: August 29, 2013Date of Patent: February 18, 2014Assignee: PD-LD, Inc.Inventors: Boris Leonidovich Volodin, Vladimir Sinisa Ban
-
Patent number: 8451460Abstract: A monitoring system is disclosed, designed to detect the depth of deposition of a substance on a? surface (12), such as the depth of dust in a ventilation shaft. The monitoring system includes a light source (14) and a sensor (16, 30). The light source is arranged to transmit light across a detection surface and the sensor is on the other side of the detection surface. When a substance, such as dirt or grease, is deposited on the surface it obstructs the light and the amount of light reaching the sensor decreases. A processing means (26) detects the decrease in light and from this the depth of the deposition on the surface can be calculated. Preferably the sensor comprises a CCD array (32), and the substance throws a shadow on the array. The processing means can then determine the depth of the substance from the position on the array of the edge of the shadow. Preferably the monitoring system is placed in a low power ‘sleep’ mode in between intermittent operations for detecting the depth of the substance.Type: GrantFiled: December 18, 2008Date of Patent: May 28, 2013Assignee: Vanguard Sensor Technology LimitedInventors: Nigel Jones, Ron Ashby
-
Publication number: 20120086951Abstract: An optoelectronic sensor (10) is provided with a plurality of light transmitters (14) and light receivers (26) that form between one another a field (20) of mutually parallel monitoring beams (18), wherein beam shaping optics (16, 24) are assigned to the light transmitters (14) and the light receivers (26). The optics (16, 24) comprise a geometry and arrangement leading to a mutual overlap of the optics (16, 24) in a direction diagonal, in particular perpendicular, to the field (20).Type: ApplicationFiled: August 17, 2011Publication date: April 12, 2012Applicant: SICK AGInventors: Daniel KIETZ, Jürgen BÜRGER, Axel HAUPTMANN, Günter HIRT
-
Publication number: 20120057147Abstract: An apparatus (100) for determining thickness of a banknote (1), comprising: a light generator (8) to emit a light beam (12); and a sensor array (10) to detect at least a portion of the emitted light beam (12); wherein the thickness of the banknote (1) is determined by detection of a change from a predetermined position of the emitted light beam (12) by the sensor array (10).Type: ApplicationFiled: August 16, 2011Publication date: March 8, 2012Inventor: Donald Pakman LIU
-
Patent number: 8031346Abstract: System and method for evaluating coating thickness variations along a turbine blade contour. In one embodiment, applied to a first region extending 360 degrees about the blade and to a second region including an exposed reference surface, the first region includes a first surface over which the coating is formed and a second surface formed by the coating. The system provides a source of structured light positionable to cast patterns suitable for determination of coordinate position information along the surfaces. One or more imaging cameras are positionable to acquire image data based on the light patterns. A computer system processes image information to (1) characterize the first and second surfaces with respect to a coordinate along the reference surface; (2) compare coordinate data corresponding to the first surface with coordinate data corresponding to the second surface; and (3) determine thickness of the coating as a function of position.Type: GrantFiled: January 22, 2009Date of Patent: October 4, 2011Assignee: Siemens Energy, Inc.Inventors: Ritwik Biswas, Ahmed Kamel, Luiz F. Guimaraes
-
Publication number: 20100323459Abstract: In a method of determining the distance (d) between an integrated circuit (1) and a substrate (2) emitted light enters the at least semi transparent substrate (2), passes through the substrate (2) and an at least semi transparent material (8), is reflected by the integrated circuit (1), passes again through the material (8) and the substrate (2), and leaves the substrate (2). The at least semi transparent material (8), particularly is an at least semi transparent adhesive, provided between the substrate (2) and the integrated circuit (1). The distance (d) between the substrate (2) and the integrated circuit (1) is determined by evaluating the intensities of the light leaving and entering the substrate (2), particularly by evaluating the ratio between the intensities of the light leaving and entering the substrate (2).Type: ApplicationFiled: November 25, 2008Publication date: December 23, 2010Applicant: NXP B.V.Inventor: Christian Zenz
-
Publication number: 20100319866Abstract: Optical radiation sources functioning on different optical bands radiate on different optical bands and focus optical radiation on a region in a web surface as pulses in such a manner that illumination areas of the pulses overlap on the plane of the web. At most one optical radiation band is focused on the web from the direction of the normal. The spatial intensity distribution of at least one optical band differs from the uniform distribution and the intensity distributions of at least two different optical bands differ from one another in a predetermined manner. A camera forms still images of the web surface region on each optical radiation band. An image-processing unit determines the surface topography of the web on the basis of the images. In addition, a controller may control the paper manufacturing process on the basis of the determined surface topography.Type: ApplicationFiled: December 30, 2008Publication date: December 23, 2010Applicant: Metso Automation OYInventors: Marko Avikainen, Petri Niemi, Heikki Kettunen, Markku Mantyla, Heimo Keranen
-
Publication number: 20100296107Abstract: An optical radiation processing unit directs different wavelengths of the optical radiation emitted by an optical source to an object being measured from a direction that differs from the normal of a surface being measured so that the different wavelengths focus on different heights in the direction of the normal of the surface. A possible polarizer polarizes the reflected radiation in a direction perpendicular to the normal of the surface. The optical radiation processing unit directs to a detector polarized optical radiation that received from the object. The signal processing unit determines on the basis of a signal provided by the detector from the detected radiation the wavelength on which radiation is the highest, and determines the location of the surface by the determined wavelength. When measuring an object from both sides, the thickness of the object being measured is determinable using the locations of the surfaces.Type: ApplicationFiled: October 17, 2007Publication date: November 25, 2010Applicant: VALTION TEKNILLINEN TUTKIMUSKESKUSInventor: Heimo Keranen
-
Publication number: 20100110451Abstract: System and method for evaluating coating thickness variations along a turbine blade contour. In one embodiment, applied to a first region extending 360 degrees about the blade and to a second region including an exposed reference surface, the first region includes a first surface over which the coating is formed and a second surface formed by the coating. The system provides a source of structured light positionable to cast patterns suitable for determination of coordinate position information along the surfaces. One or more imaging cameras are positionable to acquire image data based on the light patterns. A computer system processes image information to (1) characterize the first and second surfaces with respect to a coordinate along the reference surface; (2) compare coordinate data corresponding to the first surface with coordinate data corresponding to the second surface; and (3) determine thickness of the coating as a function of position.Type: ApplicationFiled: January 22, 2009Publication date: May 6, 2010Applicant: SIEMENS ENERGY, INC.Inventors: Ritwik Biswas, Ahmed Kamel, Luiz F. Guimaraes
-
Patent number: 7705351Abstract: A semiconductor device includes: a circuit board; a semiconductor chip mounted over the circuit board with a predetermined gap therebetween and electrically connected to the circuit board by a protruding electrode; a first resin material filled into the gap between the circuit board and the semiconductor chip; a second resin material that seals the semiconductor chip mounted over the circuit board; a first reflector which is formed on a surface of the circuit board on the semiconductor chip side and reflects a predetermined testing light; and a second reflector which is formed on a surface of the semiconductor chip on the circuit board side and reflects the predetermined testing light.Type: GrantFiled: January 8, 2007Date of Patent: April 27, 2010Assignee: Sony CorporationInventors: Nobuaki Ikebe, Toshiaki Iwafuchi, Michihiro Satou, Yuji Yamagata
-
Patent number: 7692144Abstract: A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height direction, and a detector, and a height detection system for detecting height of the specimen set on the table while the specimen is irradiated by an electron beam. The height detection system further includes an illumination system, a collection system, first and second detectors, a device configured to receive output signals from the first and second detectors while the specimen is irradiated by the electron beam and to generate a comparison signal from the output signals, wherein the comparison signal is responsive to the height of the specimen.Type: GrantFiled: October 26, 2007Date of Patent: April 6, 2010Assignee: Hitachi, Ltd.Inventors: Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami
-
Publication number: 20100077849Abstract: The present invention concerns a device for measuring of layer thicknesses, especially for measuring of layer thicknesses of a structural part (18) during or after a coating process, with at least a first and a second path length measuring device (12, 14), wherein a first path length (a) to a surface (20) of a layer (22) being applied to the structural part (18) is measured by means of the first path length measuring device (12) and a second path length (b) to an uncoated surface (24) of the structural part (18) is measured by means of the second path length measuring device (14) continuously or at predetermined moments of time.Type: ApplicationFiled: October 10, 2007Publication date: April 1, 2010Applicant: MTU AERO ENGINES GMBHInventors: Andreas Jakimov, Manuel Hertter, Stefan Schneiderbanger
-
Patent number: 7626189Abstract: According to the method for characterizing fancy yarn, at least one characteristic of the fancy yarn is scanned along the longitudinal direction of the fancy yarn. Values of the scanning are evaluated and the results of the evaluation are outputted. The results of the evaluation are the fancy yarn parameters such as base yarn mass, base yarn diameter, slub distance, mass increase (?M) of a slub, slub diameter increase, slub diameter, slub length (LE) and/or slub total mass. The evaluation includes a smoothing or idealization of the scanning values, e.g. an idealization of the webs (91, 91?) as horizontal stretches and of the slubs (92, 92?) as trapeziums. the idealized course of the curve may be subtracted from the original course of the curve in order to obtain information on the slubs on the one hand, and on the virtual base yarn on the other hand. The occurring data quantity may be reduced by specifying parameters of the idealized course of the curve.Type: GrantFiled: November 15, 2006Date of Patent: December 1, 2009Assignee: Uster Technologies AGInventors: Christine Meixner, Gabriela Peters, Sandra Edalat-Pour
-
Patent number: 7528400Abstract: An optical translation technique for moving the interrogation spot at which a triangulation system measures the displacement of a target is disclosed. In normal operation of the laser triangulation sensor, an incident laser beam is projected from a sensor head onto a surface of a web that is facing the sensor head. Radiation is reflected from the surface and detected by the sensor. The distance from the sensor head to the web surface is calculated by triangulation. With optical translation, both the incident ray path and the captured ray path are translated with a plurality of high refractive index geometries such that the nominal functioning of the triangulation sensor remains undisturbed. The optimal position on the sheet wherein the interrogation spot will be located can be ascertained.Type: GrantFiled: November 10, 2006Date of Patent: May 5, 2009Assignee: Honeywell ASCA Inc.Inventors: Graham I. Duck, Michael K. Y. Hughes
-
Patent number: 7456842Abstract: A method and system for determining surface topology of a three-dimensional (3D) structure, based on a structured pattern that is projected onto the surface structure, and images of the pattern superposed on the structured surface are analysed to provide surface coordinates of the structure. The pattern comprises a plurality of unique color edges defined between pairs of differently-colored stripes, which substantially overcomes ambiguity problems. In one embodiment, a calibration method is provided enabling the surface coordinates to be obtained from a single image of the structure.Type: GrantFiled: September 9, 2004Date of Patent: November 25, 2008Assignees: C.M.D. Controlled Micro Devices Ltd., Cyber Vision (2004) Ltd.Inventor: Samuel Kosolapov
-
Publication number: 20080158572Abstract: A measurement system that uses a laser triangulation device to measure the thickness of transparent and/or opaque layers of a multilayer film. The triangulation device has a laser device that projects a beam perpendicularly to a surface of the multilayer film and first and second detectors that image first and second reflected rays of the beam at first and second distances offset from first and second optical axes to produce first and second measurement signals. A controller processes the measurement signals using a triangulation procedure and a simultaneous equation procedure to provide a thickness of an outer transparent layer. For a multilayer film having an opaque layer sandwiched between outer transparent layers, first and second triangulation devices are disposed on opposed sides of the film to measure the thickness of each outer film. Knowing the distance between the two devices, the thickness of the opaque layer can be derived.Type: ApplicationFiled: December 27, 2006Publication date: July 3, 2008Inventor: Michael K. Hughes
-
Patent number: 7369233Abstract: In an optical system measuring sample characteristics, by reducing the amount of ambient absorbing gas or gases and moisture present in at least a portion of the illumination and detection paths experienced by vacuum ultraviolet (VUV) radiation used in the measurement process, the attenuation of such wavelength components can be reduced. Such reduction can be accomplished by a process without requiring the evacuation of all gases and moisture from the measurement system. In one embodiment, the reduction can be accomplished by displacing at least some of the absorbing gas(es) and moisture present in at least a portion of the measuring paths so as to reduce the attenuation of VUV radiation. In this manner, the sample does not need to be placed in a vacuum, thereby enhancing system throughput.Type: GrantFiled: November 19, 2003Date of Patent: May 6, 2008Assignee: KLA-Tencor Technologies CorporationInventors: Mehrdad Nikoonahad, Shing Lee, Hidong Kwak, Sergio Edelstein, Guoheng Zhao, Gary Janik
-
Patent number: 7190826Abstract: A method and apparatus for measuring the location of objects arranged on a convex surface. A plurality of cameras is arranged in a stationary array about the surface, and is used to capture images of the objects. A parameterized model of the surface is developed using optimization techniques, and then the locations of the objects are established by triangulation. The method is applied to location of electrophysiological sensors on the head, for purposes of electroencephalographic source analysis, or for registration with other imaging modalities such as MRI (magnetic resonance imaging).Type: GrantFiled: September 16, 2003Date of Patent: March 13, 2007Assignee: Electrical Geodesics, Inc.Inventors: Gerald S Russell, Don M Tucker, K. Jeffrey Eriksen, Onofrio Olivieri
-
Patent number: 7126699Abstract: Systems and methods for multi-dimensional metrology and inspection of a specimen such as a bumped wafer are provided. One method includes scanning the specimen with partial oblique illumination to form an image of the structure, either through the normal collection angle or through an oblique collection angle. The method also includes integrating an intensity of the image and determining a height of the structure from the integrated intensity. The integrated intensity may be approximately proportional or inversely proportional to the height of the structure. In addition, the method may include scanning the specimen with bright field illumination to form a bright field image of the specimen. The method may also include determining a lateral dimension of the structure from the bright field image. Furthermore, the method may include detecting defects on the specimen from the bright field image or the obliquely-illuminated image.Type: GrantFiled: October 17, 2003Date of Patent: October 24, 2006Assignee: KLA-Tencor Technologies Corp.Inventors: Tim Wihl, Stephen Hiebert, Frank Kole, Richard Schmidley
-
Patent number: 6975410Abstract: A method is provided for measuring the wall thickness of transparent articles using non-collimated and diverging light in the form of a small point source or elongated narrow line of light, measuring the spacial separation of the reflections from the nearest and furthest surface by means of a two-dimensional image sensor and a computational device to calculate the geometrical corrections needed to provide accurate thickness measurements. In situations where smooth thickness variations occur, a symmetrical two view embodiment using two non-collimated and diverging light sources and two image sensors at equal but opposite angles of incidence from the same side of the object provides a means to correct for errors caused by internal prism effects as a result of undulations of either the nearest or furthest surface.Type: GrantFiled: April 7, 2003Date of Patent: December 13, 2005Inventor: Dennis T. Sturgill
-
Patent number: 6967726Abstract: The calibration of a laser caliber is described. The laser caliber uses first and second sensors to determine the distance to different sides of a sheet. A third sensor is used to determine the distance between the first and second sensors. The calibration of the first, second, and third sensors is done by positioning a test object onto the platform sensed by the third sensor. The platform is moved to multiple positions in order to calibrate the first, second and third sensors. Since the displacement of the platform moves the distance to the target of the first, second and third sensors the same amount, the sensors can be accurately calibrated for a number of different positions of the test object. A very accurate calibrating displacement measuring device such as an LVDT can be used.Type: GrantFiled: October 3, 2003Date of Patent: November 22, 2005Assignee: Honeywell International Inc.Inventors: Harriss T. King, Wesley D. French, Steve Axelrod, Scott C. Wiley
-
Patent number: 6891629Abstract: The invention is directed to a method and apparatus for detecting a substrate feature. A sensor is secured opposite the substrate. The sensor emits a signal onto the surface of the substrate. The sensor detects the amount of signal reflected from the substrate. The sensor is programmed with the relative signal reflective properties for a surface of the substrate. The sensor compares the expected signal reflection rates for a surface of the substrate to the actual signal reflection rate. The sensor generates an output signal to an output device.Type: GrantFiled: September 25, 2002Date of Patent: May 10, 2005Assignee: MeadWestvaco CorporationInventor: John Charles Jackson
-
Patent number: 6745136Abstract: A method for inspecting pipe, the method, in at least certain aspects, including detecting an inspection parameter in at least a first part of a pipe, the pipe having a length, a hollow body, an outer surface, and a generally circular pipe wall with an inner diameter and an outer diameter, locating at a first location the first part of the pipe with respect to the length of the pipe and with respect to the outer diameter of the pipe; and such a method for inspecting pipe which, in at least certain aspects, includes detecting at least a first part of a first imperfection of the pipe.Type: GrantFiled: July 2, 2002Date of Patent: June 1, 2004Assignee: Varco I/P, Inc.Inventors: Clive Chemo Lam, John Edward Harris
-
Patent number: 6743645Abstract: A method of inspecting a process for manufacturing a semiconductor device, used to determine the status of a processing operation during the manufacturing process, according to the embodiment of the present invention, comprises: detecting an image of a desired area of a surface of a semiconductor workpiece after it has been subjected to the processing operation, using an image signal detector; detecting image signal intensity at each pixel of a plurality of pixels of the image signal detector; and determining the status of the processing operation based on the relationship between the image signal intensity and the number of pixels at each of certain levels of the image signal intensity. A method of manufacturing a semiconductor device is made by utilizing the above-described inspection method.Type: GrantFiled: March 28, 2002Date of Patent: June 1, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Takeo Kubota, Atsushi Shigeta
-
Patent number: 6714301Abstract: A spectral ellipsometer includes a light incident optical system for focusing a incidence spot of polarized light of multi-wavelengths onto a sample surface. A detecting optical system receives the reflected light influenced by the sample surface so that the amount of change in an elliptical polarization will be characteristic of the sample surface. A spherical prism polarizer is employed in the light incident optical system having complimentary curved light incident and light exit surfaces to enable the focusing of the incident light so that each of the ray traces of the range of wavelengths are focused at the same position on the sample surface.Type: GrantFiled: October 23, 2001Date of Patent: March 30, 2004Assignee: Horiba, Ltd.Inventors: Kunio Otsuki, Yutaka Saijo
-
Patent number: 6621060Abstract: The present invention provides a laser processing and autofocusing system that measures the position of the work-piece at the machining spot, to allow the laser processing of work-pieces which are not flat and have surface variations, with the autofocusing system being able to compensate for these variations. During laser machining, it is desirable to keep the laser focus at the same height with respect to the surface of the sample for the best possible machining quality. Not all samples are flat, though, and it thus becomes necessary to map the surface of the sample accurately and to correct the focusing of the laser beam on the fly. The system includes a processing laser beam directed onto the surface at normal incidence and a light line projected onto the surface in the vicinity of the area being machined but at an angle with respect to the surface normal. The focusing optics for the machining laser and light line generator are fixed relative to each other on a positioning stage.Type: GrantFiled: March 29, 2002Date of Patent: September 16, 2003Assignee: Photonics Research OntarioInventors: Marc Nantel, Dejan Grozdanovski
-
Patent number: 6621578Abstract: An ellipsometer, which detects polarization of light successively reflected from a reference sample and an objective sample to study the objective sample, comprises first and second sample holder units for holding first and second samples, a beam projecting portion for projecting a beam of plane-polarized light toward the first sample, a polarizer, a turn-around prism for turning around the light beam reflected from the first sample to direct it to the second sample, an analyzer, a light detector for detecting light transmitted through the analyzer, and a sample positioning mechanism for arranging the first and second samples at appropriate positions and in appropriate orientations. The sample positioning mechanism includes one of the first and second sample holder units, which holds the objective sample, and comprises a height/inclination adjusting section for adjusting height and inclination of the objective sample.Type: GrantFiled: November 6, 2000Date of Patent: September 16, 2003Assignee: Olympus Optical Co, Ltd.Inventor: Iwao Mizoguchi
-
Patent number: 6618689Abstract: A method for non-destructively inspecting the wall thickness of a component, where the dimensions of the component or of the component surface are measured, substantially without making any contact, and are described by digital data. In accordance with the present invention, a multiplicity of the component's surface points, which substantially completely describe the component, is automatically calculated in a three-dimensional coordinate system. Starting from each of the surface points, going out in one direction that runs perpendicularly to the surface point into the material, one scans for at least one opposite surface point. The wall thickness of the component at the surface point is ascertained as the distance between the surface point and the at least one opposite surface point. The component is visually displayed and, in the visual display, surface points are highlighted for which the wall thickness falls below and/or exceeds one or more predefined values.Type: GrantFiled: September 5, 2001Date of Patent: September 9, 2003Assignee: DaimlerChrysler AGInventors: Ralph Knorpp, Dimitri Vitkin
-
Patent number: 6597463Abstract: A system and method are disclosed for providing in-situ monitoring of an oxidized ARC layer disposed over an ARC layer. By monitoring the thickness of the oxidized portion of the ARC layer during semiconductor processing, one or more process control parameters may be adjusted to help achieve a desired oxidized portion thickness.Type: GrantFiled: June 13, 2001Date of Patent: July 22, 2003Assignee: Advanced Micro Devices, Inc.Inventors: Bhanwar Singh, Cristina Cheung, Jay Bhakta, Carmen Morales, Junwei Bao
-
Patent number: 6549293Abstract: The invention relates to an apparatus and process for measuring the diameter and out-of-roundness of elongate workpieces, particularly those of round products advanced in their longitudinal direction in rolling mill trains. A reliable discrimination of orbiform-curved contours is required in measuring such workpieces. In an aspect of the invention, an apparatus is suggested with three or more laser triangulation devices, which measure the distance from the workpiece surface wherein the lasers of the triangulation device are directed to a common point of intersection which corresponds to the workpiece center and the laser beams of which span a common plane which is perpendicular to the longitudinal direction of the workpiece, and which are at angular distances which are substantially equal.Type: GrantFiled: May 1, 2001Date of Patent: April 15, 2003Assignee: Lap GmbH Laser ApplikationenInventor: Karsten Hofman
-
Patent number: 6501555Abstract: The disclosure describes an exemplary method of detecting a process end point during etching in the fabrication of an integrated circuit. This method can include receiving a reference signal indicative of an intensity of a light source, collecting a reflection signal reflected off a surface of an integrated circuit wafer, and comparing the reference signal and the reflection signal to locate absorption bands, the absorption band being indicative of a process end point.Type: GrantFiled: February 1, 2001Date of Patent: December 31, 2002Assignee: Advanced Micro Devices, Inc.Inventors: Kouros Ghandehari, Bhanwar Singh, Angela T. Hui
-
Patent number: 6353478Abstract: A digital range sensor comprises a light source, an optical element to focus the light from the source down to a small spot on a target, a second optical element that is mounted obliquely from the source axis, and a prism mounted on a multi-element detector, which in turn is mounted at the focus of the light returning from the target. The purpose of the prism on the detector is to direct the light onto the active surface of the detector at an angle closer to normal incidence than would otherwise be possible. The detector produces digital data which is transferred to a control module for processing and to produce a numerical range measurement.Type: GrantFiled: September 3, 1999Date of Patent: March 5, 2002Assignee: CyberOptics CorporationInventors: Eric P. Rudd, William P. Kennedy, Troy R. Pesola, David D. Madsen
-
Publication number: 20020005958Abstract: Disclosed is a non-contact type of thickness-measuring device for determining the thickness of a workpiece to be machined. It comprises: a laser light projecting means for projecting a ray of laser light to the top surface of the workpiece at a predetermined angle of incidence relative to the top surface of the workpiece; an imaging means for capturing the first ray of laser light reflected from the top surface of the workpiece and the second ray of laser light passing through the workpiece and reflecting from the bottom surface of the workpiece; and an arithmetic means for determining the thickness of the workpiece from the distance between the first point at which the first ray of laser light falls on the imaging means and the second point at which the second ray of laser light falls on the imaging means.Type: ApplicationFiled: July 3, 2001Publication date: January 17, 2002Inventor: Kazuma Sekiya
-
Publication number: 20010048520Abstract: A device and a method are provided for detecting depth and color information of an object to be surveyed. A projection unit projects a predetermined wave pattern having first waves with at least one first wavelength in a spectral range outside visible light. A collector unit receives waves which have been at least partially reflected from the object and which include the first waves, that are processed by a first subunit of the collector unit, and second waves that are processed by a second subunit of the collector unit. The second waves have at least one second wavelength in the visible-light spectral range. The depth and color information of the object is detected on the basis of the waves.Type: ApplicationFiled: March 5, 2001Publication date: December 6, 2001Inventor: Thomas Riegel