Abstract: An inspecting apparatus inspects a tampon that includes a tampon main body that has a cord and an applicator that is cylindrical and that accommodates the tampon main body in such a manner that the cord is exposed from a rear end of the applicator. The inspecting apparatus includes a suction mechanism that extends the cord along a longitudinal direction of the tampon by sucking air, and a cord-length inspecting mechanism that inspects a length of the cord while the suction mechanism is sucking the air.

Abstract: A method is described for measuring a dimension on a substrate, wherein a target pattern is provided with a nominal characteristic dimension that repeats at a primary pitch of period P, and has a pre-determined variation orthogonal to the primary direction. The target pattern formed on the substrate is then illuminated so that at least one non-zero diffracted order is detected. The response of the non-zero diffracted order to variation in the printed characteristic dimension relative to nominal is used to determine the dimension of interest, such as critical dimension or overlay, on the substrate. An apparatus for performing the method of the present invention includes an illumination source, a detector for detecting a non-zero diffracted order, and means for positioning the source relative to the target so that one or more non-zero diffracted orders from the target are detected at the detector.

Abstract: A body limb measurement device (10) comprising a track (12), a cart (14), and a laser source (16) fixedly attached to the cart. The cart is capable of linearly moving along the track. The device can further include a vertical support (18) having a pivot (20), and the track can comprise a pivot receiver (22), wherein the pivot receiver (22) is rotatably attached to the pivot (20). The track (12) can include units of length measurement (24) embedded therein. The cart (14) can include a reference point (26) to correspond to the units of length measurement, to track the cart's position on the track (12). A method of measuring a body part (28) comprising the steps of moving the cart (14) along the track (12) to measure the distance between a first edge (32) and a second edge (34) of the body part (28).

Abstract: An apparatus for measuring a 3-dimensional (3D) shape which can remove a shadow, which may occur when measuring the 3D shape, and also can measure a reflected light from an external surface of a test object, is provided. The apparatus for measuring a 3D shape includes a projection part 10 generating a light, an image formation part 20 sensing the light, a prism part 30 being provided between the projection part 10 and the viewing part 20, and a first mirror part 40 and a second mirror part 50 being provided in both ends of the prism part 30. Also, the prism part 30 selectively transmits the light generated from the projection part 10 to the first mirror part 40 and the second mirror part 50 to be directed towards an external surface of a test object 1. When the light reflected from the external surface of the test object 1 is selectively transmitted to the first mirror part 40 and the second mirror part 50 and thereby reflected, the prism part 30 transmits the reflected light to the viewing part 20.

Abstract: Apparatus is disclosed for determining the track of origin of a cigarette manufactured in a cigarette making machine having a plurality of tracks. The cigarette making machine (60) is arranged such that the circumferential position of the tipping paper seam and the circumferential position of the tobacco wrapping paper seam are different for different tracks. The apparatus comprises a detector (20, 22; 36; 50) arranged to detect radiation from the cigarette (18) and to produce a signal representative of the detected radiation, and a processor (30; 54) arranged to process the signal produced by the detecting means to identify a shadow cast by a tipping paper seam and a shadow cast by a wrapping paper seam.

Abstract: A laser scanning microscope apparatus comprising, a controlling unit for obtaining height information at each scanning point of a sample to be examined by obtaining a relative distance that maximizes an intensity output from a photo-detecting unit, which is obtained when the sample to be examined is scanned with a light from a laser light source, when a relative distance is changed by a Z scanning unit, includes an arithmetic processing unit for obtaining a plurality of height profiles of one line acquired by scanning the sample to be examined in a state of light with the light defecting unit while shifting the plurality of height profiles of one line in a scanning direction by a predetermined amount, and for obtaining one profile by linking the plurality of height profiles.

Abstract: The object of the invention is a device for in-situ determining the compactness of grainy material layers, especially determining the compactness of material layers containing equally solid part, liquid and gaseous phases e.g. soils, that consists of a guide body, a loading disc connected with the guide body and a dropping-weight movable relating the loading disc along the guide body. The characteric feature of the device is that an indicator figure (20) is adjusted to a dropping weight (13), the indicator figure (20) has a guide organ (21), wherein one of the guide organs (21) and the guide body (11) are at least periodically in a connection with each other restricting the direction of movement and the guide body (11) is complemented with a length measuring unit (30). Furthermore, the object of the invention is also a method for in-situ determining the compactness of grainy material layers, especially determining the compactness of material layers containing equally solid part, liquid and gaseous phases e.g.

Abstract: The invention relates to an apparatus for purification, respectively processing and/or analysis of biological target molecules with a detection device for detecting at least one object, which includes at least one detection area, wherein the detection device is adapted to detect at least one height value of the detection area and is adapted to determine, from the at least one height value, a spatial position and/or orientation and/or a type and/or a presence and/or a number and/or a state of the at least one object. Further, the invention relates to a receiving device for receiving material for the processing, purification and/or analysis of biological target molecules with at least one identification element, wherein the at least one identification element defines a height profile for identifying the receiving device, wherein the height profile is provided for at least one height measurement and extends at least in sections along a line, preferably a straight line.

Abstract: A method of measuring a length of sections of extrados or intrados curves of an elongated workpiece travelling in a bending machine along a forwarding direction, the elongated workpiece having cross-sections each of which is separated by a neutral axis in both an extended portion and a compressed portion when the elongated workpiece is subjected to bending, and at least a neutral cross-section, i.e. not subjected to bending, neutral cross-section beyond which the bending of the elongated workpiece begins along the forwarding direction thereof, provides a measuring instrument positioned so that it engages either an extrados or an intrados point of the elongated workpiece near the neutral cross-section, but displaced therefrom in the forwarding direction of the elongated workpiece. Further, a measuring instrument on a bending machine that embodies the method is described.

Abstract: Determination of the height difference between a first reference point and a second reference point, at least one of the two reference points lying on a semiconductor chip, which is mounted on a substrate, comprises the steps A) recording a first image from a first direction, which runs diagonally to the surface of the substrate at a predetermined angle ?2, the substrate and the semiconductor chip being illuminated from a second direction which runs diagonally to the surface of the substrate at a predetermined angle ?3, a telecentric optics being located in the beam path, B) recording a second image from the second direction, the substrate and the semiconductor chip being illuminated from the first direction, either the cited telecentric optics or a further telecentric optics being located in the beam path, C) ascertaining a first coordinate of the position of the first reference point and a first coordinate of the position of the second reference point in the first image and determining a first difference

Abstract: A device for determining the category of mail of a mailpiece, which device comprises: an stand designed to receive said mailpiece; at least one gauge fastened to said stand and provided with a slot of predetermined length and of predetermined height, which length and which height are suitable for defining a determined maximum width and a determined maximum thickness for the mailpiece; means for automatically estimating a length of the mailpiece depending on its position on the stand, and relative to the gauge; and means for acting, on the basis of that single estimate of the length of the mailpiece, to deliver, to a franking machine, information about the category of mail to which said mailpiece belongs.

Abstract: An apparatus for measuring geometric deviations in a doctor blade includes a camera defining an optical axis. The optical axis defines an X-axis in a Cartesian coordinate system. An origin of the Cartesian coordinate system defines an intersection point. A first light source has a first central axis. The first central axis is angularly disposed from the X-axis by a first angle with respect to the X-axis. A second light source has a second central axis. The second central axis is angularly disposed from the X-axis by a second angle with respect to the X-axis. A doctor blade holding device is configured to mount a doctor blade wherein a portion of the doctor blade to be measured is positioned at the intersection point.

Abstract: A method for focusing discrete points on an under-measured object is provided. The method includes: (a) receiving an image of the object, selecting measurement points on the image, and obtaining X, Y coordinate values of the measurement points; (b) searching a solid point on the under-measured object according to the X, Y coordinate value of one of the measurement points, wherein the solid point corresponds to the measuring point; (c) emitting a laser light to the solid point for computing a vertical distance “h” between the laser aid and the solid point; (d) computing a Z coordinate value of the measurement point according to the “h”; repeating step (b) to step (d) until all the Z coordinate values of the measurement points have been computed; and (e) focusing the solid points according to the X, Y and Z coordinate values of the measurement points. A related system is also provided.

Abstract: A measuring device for optical and spectroscopic examination of a sample includes a housing, a first light source, a window, an optical spectrometer with a dispersive element and a number of detector elements and which can record light from the first light source which is indirectly reflected by the sample and reenters the housing through the window, an electronic camera whose incidence opening is directed onto the sample, through the window, and an electronic evaluation device which is connected to an image sensor of the camera and to the detector elements. The camera may be assigned a second light source.

Abstract: An on-the-fly method for measuring the length, along an axis (z?z) of an anode (20) used in the production of aluminium by molten salt electrolysis in which: i) said anode is suspended from a gripping member (13a) which is fitted with a displacement sensor measuring the vertical position of the point of attachment (O); ii) said gripping member is moved vertically so that the lower surface (21a) of the anode passes through a plane (P) formed by n beams (f1, . . . , fi, . . . , fn) and, each time one of said beams i (i=1 to n) is disturbed by the lower surface of the anode passing through it, the vertical position hi of said point of attachment (O) is measured; iii) the angle of inclination zz? of the anode stem is measured and the distance between the point of attachment and the lower surface (21a) of the anode block (21) is deduced based on values measured hi (i=1 to n), and the inclination value of the anode stem.

Abstract: A testing system for testing dimensions of a cutting tool chosen by a cutting tool choosing device, includes a controller and an optical sensor. The controller includes a cutting tool changing module, a cutting tool control module, and a dimension calculating module. The cutting tool changing module is configured for controlling the cutting tool choosing device to move the cutting tool to a tip initial position above the optical sensor. The cutting tool control module is configured for controlling the cutting tool choosing device to move the cutting tool from the tip initial to the height of a lightbeam of the optical sensor, and moving the cutting tool to pass through the lightbeam of the optical sensor from side to side. The dimension calculating module is configured for receiving the electrical signals from the optical sensor and calculating dimensions of the cutting tool.

Abstract: An expansion/contraction measuring apparatus includes a transport section which transports a flexible substrate along a surface of the substrate; a detecting section detecting first and second marks which are formed on the substrate while being separated from each other by a predetermined spacing distance in a transport direction of the substrate and which are moved, in accordance with the transport of the substrate, to first and second detection areas disposed on a transport route for the substrate respectively; a substrate length setting section which sets a length of the substrate along the transport route between the first and second detection areas to a reference length; and a deriving section which derives information about expansion/contraction of the substrate in relation to the transport direction based on a detection result of the first and second marks. Accordingly, the expansion/contraction state of an expandable/contractible substrate is measured highly accurately.

Abstract: A method is described for measuring a dimension on a substrate, wherein a target pattern is provided with a nominal characteristic dimension that repeats at a primary pitch of period P, and has a pre-determined variation orthogonal to the primary direction. The target pattern formed on the substrate is then illuminated so that at least one non-zero diffracted order is detected. The response of the non-zero diffracted order to variation in the printed characteristic dimension relative to nominal is used to determine the dimension of interest, such as critical dimension or overlay, on the substrate. An apparatus for performing the method of the present invention includes an illumination source, a detector for detecting a non-zero diffracted order, and means for positioning the source relative to the target so that one or more non-zero diffracted orders from the target are detected at the detector.

Abstract: An electronic component mounting apparatus includes a beam projector for projecting a laser beam, a beam receiver which is placed in opposition to the beam projector and which receives a laser beam projected from the beam projector, a light-reception-sensitivity setting unit for adjusting light-reception sensitivity of the beam receiver, a projection-side orifice provided in the beam projector to narrow a projection spot diameter of the laser beam, and a reception-side orifice provided in the beam receiver to narrow a light-reception spot diameter, where the light-reception sensitivity of the beam receiver is improved. As a result, an electronic component mounting apparatus capable of accurately detecting height size of small components by using a relatively inexpensive photoelectric sensor can be provided.

Abstract: A device for determining the position of an object that is movable along at least one displacement direction, the or each displacement direction having assigned to it one length measuring device for measuring the position of the object along the respective spatial direction, includes: at least one scale extending along a displacement direction of the object to be measured as a first component of the respective length measuring device; a scanning head for scanning the scale as a second component of the respective length measuring device such that a change in the position of the scale with respect to the scanning head along the associated displacement direction of the object to be measured is measurable, one of the two components of the respective length measuring device being moved together with the object to be measured along the respective displacement direction when the latter is moved; and a device for determining the distance of the component of the respective length measuring device, which is movable tog

Abstract: A method for non-contact measurement of the velocity and/or the length of an extrudate moved forward in the longitudinal direction, in particular of a cable during the production.

Abstract: An object detecting device for detecting the existence and general placement of an object residing upon a surface. A preferred embodiment of the invention uses at least one laser measuring scanner operated positioned by a servo motor to allow the laser measuring scanner to generate signals related to the placement of an object on a surface. Those placement signals are then processed by a computer to make a two or three dimensional determination of the object in coordinates that show the object's location in relation to another device such as a robotic depalletizer that can then be moved into position near the object to allow removal of the object by the robotic depalletizer.

Abstract: The invention relates to a method and arrangement for measuring a timber piece (4) in a wood handling machine (1). Such a wood handling machine comprises booms (2) arranged in a base machine and a wood handling device (3) operating therein. In such a wood handling machine (1), a wood handling device (3) grips the timber piece (4) to be handled, after which one end of the timber piece is guided into a measuring carriage (5) in the wood handling machine by the wood handling device. The timber piece arranged in the measuring carriage is subjected to one or more observation measures by observation means provided in the measuring carriage.

Abstract: The disclosed subject matter relates to a sensor and apparatus for vehicle height and slant measurement which can include a light source, and two cameras with respective lenses. The light source can be configured to emit light towards a road, and both cameras can be configured to receive the image of the road that is illuminated by the light from the light source and to thereby create image data. The apparatus can include a control circuit that can geometrically measure a vehicle height in accordance with the image data. The sensor can also receive image data from different points and from two light sources, and the apparatus can detect a vehicular lean using the different vehicle heights. Thus, because the sensors of the disclosed subject matter do not necessarily include a moving part as in the conventional sensor, the sensors can be easily attached to a vehicle body and can also be used for a vehicular lean detection.

Abstract: Method for testing the filling of a container with rod-shaped articles of the tobacco-processing industry and filling test device for the container, in which a depth of the container is at least as great as a length of a rod-shaped article. The process includes detecting at least one property of the content of the container, comparing the at least one property with a predetermined desired content of the container, and when a deviation from the desired content is greater than a predetermined tolerance value, generating a signal corresponding to a defective filling. The instant abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.

Abstract: A standard component for length measurement includes a first diffraction grating and a second diffraction grating. Each of components of the second diffraction grating is disposed between components of the first diffraction grating.

Abstract: A component is deployed into a well on a carrier line having an optical cable. An optical signal is transmitted into the optical cable, and a travel time of the optical signal in the optical cable is determined. A profile of a characteristic along the optical cable is determined, and a length of the carrier line deployed into the well is determined based on the determined profile and the travel time.

Abstract: A detecting apparatus includes a detecting plate, a controlling box, and an indicator installed on the detecting plate. A region is defined on one face of the detecting plate, for supporting a workpiece thereon, with an edge of the workpiece abutting against one side of the region. A first slot and a second slot are defined in the detecting plate on an opposite side of the region. The controlling box having a circuit board with a processor is installed on an opposite face of the detecting plate. Two light sensors are installed on the circuit board aligning with the first and second slots of the detecting plate respectively. The indicator is electrically connected with the light sensors and controlled by the processor, for showing whether the dimension of the workpiece is eligible, according to detection by the light sensors.

Abstract: A method of determining one or more physical properties of a rolled smoking article is disclosed, the method comprising disposing a rolled smoking article within a field of view, illuminating the field of view, imaging the rolled smoking article to form an image, and analyzing the image to determine one or more physical properties of the rolled smoking article. Preferably the image is a digital image, which may be electronically processed to determine the physical properties. The physical properties may include the length of the rolled smoking article, or its mean diameter, ovality, circumference, roundness or shape. Also disclosed is an apparatus for performing such method comprising imaging means defining the field of view, means for positioning a smoking article in the field of view, illuminating means for illuminating the field of view, and processing means for processing the image to determine one more physical properties.

Abstract: A method of continuously measuring an elevation and shape of an unmelted polycrystalline silicon island during a silicon meltdown process. The method comprises projecting a focused bright light on the silicon island to produce a bright dot on the silicon island. The method also includes electronically determining an elevation and a shape of the silicon island by tracking the bright dot during the meltdown process.

Abstract: In a method for measuring the size or shape of an edge of a machined work piece or of a cutting edge of a tool, the surface of the edge is illuminated by diffused radiation from several positions in the vicinity to the edge by an illumination arrangement, and a picture of the edge is reproduced by recording reflected radiation from the illuminated edge by means of a picture reproduction unit.

Abstract: An automated system for setting the linear distance from a mounting surface of a pivot cartridge to critical features on actuator arms is disclosed. This distance is set to eliminate the tolerance incurred via normal manufacturing of these components. The system adjusts for every component to customize each actuator and/or pivot assembly to meet the functionality requirements for disk drives.

Abstract: An optical dilatometer includes a furnace, in which a sample may be laid on a sample carrier, and an optical system for measuring a length of the sample at different temperatures, windows for the passage of beams being provided on a sample chamber of the furnace. A light source and a collimator for generating a parallel beam path are situated on one side of the furnace, the length of the sample being detectable via a silhouette image by a sensor, situated on the diametrically opposite side of the furnace from the light source, and a lens system. This allows a simple length measurement without orientation of an optical system.

Abstract: An apparatus and method for inspecting polycrystalline silicon (Poly-Si) that illuminates light onto protrusions in the Poly-Si in order to determine a distance between them using intensity and reflection angle of reflected light. The Poly-Si inspection apparatus includes a light source that illuminates light, and a reflected light detector for receiving reflected light, wherein a distance between protrusions is measured by an incident angle of the light illuminated into the protrusion from the light source, a detection angle of the reflected light detector, and a wavelength of the detected reflected light.

Abstract: A charged beam apparatus, such as an electron microscopy apparatus, and a method for determining an aerial dimensional map of a charged beam within the charged beam apparatus, each use a test structure that includes a feature located upon a substrate. One of the feature and the substrate is conductive and the other of the feature and the structure is non conductive. The charged beam within the charged beam apparatus is scanned in a plurality of non-parallel linear directions with respect to the substrate and the feature to provide a corresponding plurality of current versus position response curves from which may be determined the aerial dimensional map of the charged beam within the charged beam apparatus.

Abstract: A range/speed finder can be incorporated into a personal electronic device. In one example, a personal electronic device includes an automatic focus system adapted to focus an image of an object and a processor in communication with the automatic focus system adapted to detect a distance of the object using the automatic focus system. The processor can be adapted to detect a speed of the object and/or a dimension of the object using the automatic focus system. Methods and systems for determining a distance, a dimension, and/or a speed of the object relative to the personal electronic device are also provided.

Abstract: A method of determining surface properties is provided, in which radiation is irradiated onto a first region of a surface to be examined, then at least some of the radiation irradiated onto the first region and returned by the latter is detected, and a measured value characteristic of this returned radiation is output. In a further step, the radiation is irradiated onto a second region of the surface and once again at least some of the radiation irradiated onto the second region and returned by the latter is detected, and a second measured value characteristic of this radiation is output. Finally, a result value is output which is characteristic of a relationship between the first measured value and the second measured value.

Abstract: In order to measure the length F of the band-shaped member 15 in all the positions in a specified width-direction region with a simple construction, a two-dimensional laser displacement sensors 18, 19 emitting laser beams 22, 23 inclined at a certain angle with respect to a longitudinal direction of the band shaped member 15 and the band-shaped member 15 move relative to each other in the longitudinal direction of the band-shaped member 15, each position of a starting end 15a and a terminating end 15b of the band-shaped member 15 crossing the laser beam 22, 23 is detected repeatedly by the two-dimensional laser displacement sensors 18, 19 each time a relative moving distance between the two-dimensional laser displacement sensors 18, 19 and the band-shaped member 15 reaches a certain value, a position information of the starting end 15a and the terminating end 15b of the band-shaped member 15 at each width-direction position is obtained from a detection result thereof, and the length of the band-shaped member

Abstract: An apparatus is for evaluating optical characteristics of an optical system based on an image forming position of a point image formed through the optical system. The apparatus includes a point image producing unit that forms a point image through the optical system in each point light source; an imaging unit that images the point images to produce a point image distribution image; and a moving unit that changes relative distance between the optical system and the point light source or the imaging unit in an optical axis direction. The apparatus also performs processing of detecting an image forming position in each different relative distance of the point image based on image information of the point image distribution images, the processing including calculating a regression expression for the detected image forming positions to obtain a shape parameter of the image axis in each of the point images.

Abstract: Embodiments of the invention include Optical Cell Guidance (OCG) methods and apparatus to control cell growth. This system guides the leading edge of motile cells with an optical gradient, which biases the cell's motion into the light by pulling on proteins, which act like soft dielectrics in the electromagnetic field. OCG differs from those devices described above in that it controls the direction of cell motility. This is an entirely new field, and the first device to directly manipulate cell motility. OCG differs from current approaches in that it does not trap or hold particles. Instead of trapping and pulling the cell, the goal of OCG is to influence, direct, and control the growth of a growth cone.

Abstract: A portable optical measurement assembly for measuring the dimensions of an upper peripheral region of a wall structure of a swimming pool is provided. The assembly comprises an optical unit subassembly including an optical unit casing. The optical unit casing encloses a light source structured and arranged to direct a light beam onto an upper peripheral region of the wall structure of a swimming pool and a sensor structured and arranged to provide data indicative of the distance from the light source to the particular point on the upper peripheral region of a wall structure of a swimming pool surface. The portable optical measurement assembly also includes a mounting assembly for rotationally supporting the optical unit subassembly.

Abstract: One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and computational analysis of edge-related data is performed to positively identify the feature(s). Another embodiment relates to a method of automated detection of undercut on a feature using off-axis beam tilting. For each beam tilt, a determination is made of difference data between the edge measurement of one side and the edge measurement of the other side. An undercut on the feature is detected from the difference data. Other embodiments are also disclosed.

Abstract: An image position detecting device is disclosed that detects an image position based on a reflected light from an image carrier that reflects a light irradiated from a light emitting source. The device includes first and second light receivers that are spaced apart in a moving direction of the image carrier such that the first light receiver detects a toner image adhered on and being moved by the image carrier before the second light receiver detects the toner image, and a comparison output unit that compares first and second analog signals input from the first and second light receivers to determine whether a level of the first analog signal is higher than a level of the second analog signal, and outputs the comparison result as an output signal in binary form. The first and second analog signals are input to the comparison output unit at different levels.

Abstract: In a method for measuring the size or shape of an edge of a machined work piece or of a cutting edge of a tool, the surface of the edge is illuminated by diffused radiation from several positions in the vicinity to the edge by an illumination arrangement, and a picture of the edge is reproduced by recording reflected radiation from the illuminated edge by means of a picture reproduction unit.

Abstract: An apparatus for measuring the height of a work held by a chuck table provided in a machining apparatus, including: a white light source for emitting a white beam of light; a chromatic aberration lens for condensing the white beam emitted from the white light source; a beam splitter which is disposed between the white light source and the chromatic aberration lens and by which a reflected beam of the white beam irradiating the work therewith is split; a first condenser lens for condensing the reflected beam split by the beam splitter; a diffraction grating by which the reflected beam condensed by the first condenser lens is converted into a diffracted beam; a second condenser lens for condensing the diffracted beam diffracted by the diffraction grating; and a wavelength detecting unit for detecting the wavelength of the diffracted beam condensed by the second condenser lens.

Abstract: A method for accurately measuring feature sizes and quantifying the beam spot size in a CDSEM at real time is provided. The inventive method is based on a scanning microscope and it works on both conductive and non-conductive features. The measurement of conductive feature includes first providing a conductive feature on a surface of a substrate (the substrate maybe an insulator, a semiconductor or a material stack thereof). The conductive feature is then connected to ground and thereafter an electron beam probe raster scans the sample. When the electron beam probe hits the conductive feature the spot will have a negative potential. The potential difference between the spot and the ground will induce an electrical current flow. When the electrical beam is off the conductive feature, there will be no current flow. Therefore, by measuring the current response to the location of the beam spot, the dimension of the conductive feature can be derived.

Abstract: A system and a method for optical characterization of a symmetric grating illuminated at off-normal incident angle are provided, where the plane of incidence is parallel to the grating lines. In this case corresponding positive and negative diffraction orders have the same intensity and phase. Several approaches for exploiting this symmetry are given. The first approach is a symmetric rigorous coupled wave analysis (SRCWA) adapted to the symmetric case, which accounts for N positive and N negative diffraction orders with M=N+1 space harmonics, without approximation. Various approximation methods are also given. Approximate versions of the RCWA (or SRCWA) can be developed by neglecting polarization coupling for small angles of incidence. A normal incident angle calculation can be used to approximate a situation with a small angle of incidence. Refinements to this approximation include revision of grating depth or refractive indices to improve accuracy.

Abstract: In order to measure the length F of the band-shaped member 15 in all the positions in a specified width-direction region with a simple construction, a two-dimensional laser displacement sensors 18, 19 emitting laser beams 22, 23 inclined at a certain angle with respect to a longitudinal direction of the band shaped member 15 and the band-shaped member 15 move relative to each other in the longitudinal direction of the band-shaped member 15, each position of a starting end 15a and a terminating end 15b of the band-shaped member 15 crossing the laser beam 22, 23 is detected repeatedly by the two-dimensional laser displacement sensors 18, 19 each time a relative moving distance between the two-dimensional laser displacement sensors 18, 19 and the band-shaped member 15 reaches a certain value, a position information of the starting end 15a and the terminating end 15b of the band-shaped member 15 at each width-direction position is obtained from a detection result thereof, and the length of the band-shaped member

Abstract: An optical sensor for detecting the housing state such as the thickness of a substrate in the present invention is provided at supporting arms. The supporting arms are attached to a supporting shaft. The supporting arms are in a vertical state in a state before detection of the substrate, but when detecting, the supporting shaft rotates to bring the supporting arms into a horizontal state so that the optical sensor enters a substrate housing body and is set at a predetermined detection position. Accordingly, a space for moving the optical sensor in the horizontal direction becomes unnecessary to reduce the space required for the detecting operation and the like, making it possible to reduce the size of a substrate processing apparatus in which the detecting apparatus is incorporated.

Abstract: A scanning unit for an optical position measuring device, which is suited for optically scanning a scale graduation, to produce positionally dependent scanning signals on the basis of scale graduation. The scanning unit includes a carrier element, at least one optoelectronic component, which is arranged on the carrier element, a radiation-sensitive or a radiation-emitting surface region of the component being oriented to face away from the carrier element. Provision is also made for at least one electrically conductive connector lead between the carrier element and a contacting region of the component. An at least semi-transparent cover element is arranged directly on the radiation-sensitive and/or radiation-emitting surface region of the component.