Abstract: The invention relates to a process for chemically mechanically polishing and grinding wafers. The CMP slurry that is used for grinding is analyzed using slurry atomic absorption spectroscopy. This allows rapid and sensitive analysis of the slurry constituents, in particular of interfering ions. The process can be automated and makes it possible to process wafers with a constant quality. Furthermore, rapid fault analysis or optimization of the process parameters used during the grinding is possible.

Abstract: An absorption spectroscopy apparatus having a fluid inlet and a fluid outlet. The apparatus includes a sample cell including an axis, a side wall having at least one curved reflective surface arrayed about the axis and facing inwardly with respect to the cell such that a beam of energy directed against a predetermined location on the reflective surface is reflected back and forth off the reflective surface and remains in substantially the same plane while inside the cell, and at least one port in the sidewall. The apparatus also includes at least one source/detector reflector having a curved profile in a plane extending perpendicular to the axis of the cell. The reflector is positioned with respect to the port of the cell to reflect energy through the port of the cell and against the predetermined location on the reflective surface of the side wall of the cell.

Abstract: An apparatus and process for measuring bulk material flowing in a pipe by light reflection, the pipe having at least one window (24a,24b,24c) consisting of a light-transmissible material, an analyser (19) being arranged outside the at least one window for emitting light and measuring the light reflected by the bulk material in the pipe, characterised in that the pipe has an elbow having a first pipe section (14) at its entrance side and a second pipe section at its exit side, at least one window being provided in a plate (9) at the outside of the elbow, which plate is arranged at an angle to the axis of the first pipe section.

Abstract: Using a nebulizer gas, sub micron and micron size particulates can be generated from a solution containing salts covering a broad range of elements. The fractional concentration of elements can be determined by bubbling the aerosol through aqueous acid and analyzing the aqueous acid for metals. The nebulizer can be coupled to an ICP (Inductively Coupled Plasma) torch and the ICPMS (Inductively Coupled Plasma Mass Spectrometer) or ICPOES (Inductively Coupled Plasma Optical Emission Spectrometer) response to different elements can be determined. This provides the response factor of the ICPMS or ICPOES for different elements.

Abstract: A mass spectrometry apparatus uses image processing of output signals of a camera in a mass spectrometer to provide feedback for directing the laser. The present invention provides for the determination of where samples have actually been deposited on a plate, and for the selection of different points for each sample, based on its structure, at which to aim a laser, during the cycle period of the mass spectrometer. Such feedback information increases the likelihood that the laser impinges samples and provides useful data.

Abstract: An absorption spectroscopy apparatus having a fluid inlet and a fluid outlet. The apparatus includes a sample cell including an axis, a side wall having at least one curved reflective surface arrayed about the axis and facing inwardly with respect to the cell such that a beam of energy directed against a predetermined location on the reflective surface is reflected back and forth off the reflective surface and remains in substantially the same plane while inside the cell, and at least one port in the sidewall. The apparatus also includes at least one source/detector reflector having a curved profile in a plane extending perpendicular to the axis of the cell. The reflector is positioned with respect to the port of the cell to reflect energy through the port of the cell and against the predetermined location on the reflective surface of the side wall of the cell.

Abstract: A method for measuring the end point and for monitoring the real time kinetics of a bioaffinity reaction in biological fluids and suspensions, employing microparticles as bioaffinity binding solid phase, biospecific reagent labelled with a fluorescent label and a fluorescence detection system which is based on two-photon fluorescence excitation, contacting the analyte, the labelled reagent and the solid phase simultaneously, focusing a two-photon exciting laser beam into the reaction suspension and measuring the fluorescence signal emitted by the microparticles from one particle at a time when they randomly float through the focal volume of the laser beam. In this method the signal is monitored kinetically to obtain information about the analyte concentration before the reaction approaches the highest point of the response. Since the growth rate of the signal intensity is directly proportional to the analyte concentration, the analyte concentration can be predicted in the initial phase of the reaction.