Abstract: A MEMS device is obtained by forming a temporary biasing structure on a semiconductor body, and forming an actuation coil on the semiconductor body, the actuation coil having at least one first end turn, one second end turn and an intermediate turn arranged between the first and the second end turns and electrically coupled to the first end turn through the temporary biasing structure. In this way, the intermediate turn is biased at approximately the same potential as the first end turn during galvanic growth, and, at the end of growth, the actuation coil has an approximately uniform thickness. At the end of galvanic growth, portions of the temporary biasing structure are selectively removed to electrically separate the first end turn from the intermediate turn and from a dummy biasing region adjacent to the first end turn.

Abstract: This camera actuator comprises: an optical path bending member; a lens unit disposed at a subsequent stage of the optical path bending member; a first actuator that is disposed near the optical path bending member and displaces the optical path bending member; and a second actuator and a third actuator that are disposed near the lens unit so as to be apart from each other in a first direction, and that respectively displace the lens unit in a second direction and a third direction that are orthogonal to the first direction and orthogonal to each other. As a result, the present invention provides a camera actuator capable of improving the degree of freedom of design around the optical path bending member.

Abstract: An actuator according to the present invention includes a support 20 that supports a driven unit 10, and outer axis driver units DSa, DSb that are separate and independent from the support 20 and configured to rotate the support 20. This configuration allows providing a sufficient rotational driving force around the outer, second axis AX2 by reducing size and weight of the related rotatable components and thus by reducing rotational moments thereof, and also allows increasing the resonance frequency of the support 20. As such, the actuator according to this embodiment provides a high-performance drive operation such as a raster scanning operation, for example.

Abstract: Provided is a single-axis rotary actuator that is suitable for rotationally driving an optical element, such as a diffraction grating, in a single-axis direction and that is suitable for forming light having a wide wavelength band. An actuator (500) includes a holder (550) having a mounting surface on which a diffraction grating (401) is attached and a rotary shaft (552); a fixed unit (520) having a bearing that holds the rotary shaft (552) of the holder (550); an elastic member (530) formed of an outer circumferential section fixed on the fixed unit (520), an inner circumferential section fixed on the holder (550), and an arm section interconnecting the outer circumferential section and the inner circumferential section and having elasticity; and a driving unit having a coil (540) provided on the holder (550) and a magnet (510) provided on the fixed unit (520).

Abstract: There are provided a reflecting module for optical image stabilization (OIS) and a camera module including the same. The reflecting module for OIS includes: a housing; a rotation holder supported by a sidewall of the housing through a rotation frame; a reflecting member provided on the rotation holder; a driving part providing driving force to the rotation holder so that the rotation holder is moved relative to the housing; and a pulling yoke provided in the housing so that the rotation holder is supported by the sidewall of the housing by attractive force between the pulling yoke and a magnet of the driving part provided on a lower surface of the rotation holder.

Abstract: The invention is based on the object of providing a particularly reliable closed-loop control for a scanner. According to various examples, this object is achieved by an analysis of a system deviation in the frequency space. By way of example, an input signal, which is indicative of a time dependence of the system deviation between an ACTUAL pose and a TARGET pose of a deflection unit of the scanner, can be expanded into a multiplicity of error components and a plurality of frequencies. Then, a corresponding correction signal component can be determined for each of the multiplicity of error components. By way of example, such techniques can be used in a laser scanning microscope.

Abstract: The present application discloses a display apparatus. The display apparatus includes a display panel having a plurality of subpixels; and an array of a plurality of micro light modulators on the display panel and configured to adaptively modulate display contrast of the display apparatus. Each of the plurality of micro light modulators is configured to adaptively modulate a light intensity of light emitted out of a light emitting side of the display panel in a region corresponding to each of the plurality of micro light modulators based on a luminance level of a current image displayed in the region.

Abstract: A method for controlling an optical device including a movable section including an optical section that refracts incident video image light in accordance with the angle of incidence of the video image light and outputs the refracted video image light and a holding section that supports the optical section, an actuator that causes the movable section to swing, and a drive circuit that applies a drive signal to the actuator via a coupling capacitor and an amplifier, the method including applying voltage that is intermediate potential for a first period and then applying a trapezoidal wave having an upper base corresponding to second voltage and a lower base corresponding to third voltage.

Abstract: A method of rendering an image of three-dimensional laser scan data is disclosed. The method includes providing a range cube map and a corresponding image cube map, generating a tessellation pattern using the range cube map and rendering an image based on the tessellation pattern by sampling the image cube map.

Abstract: Described herein is a device including mirror control circuitry for controlling a movable mirror. The mirror control circuitry includes drive circuitry for providing a drive signal to the movable mirror, and a processor. The processor cause the drive circuitry to generate the drive signal so as to have pulses with leading edges occurring an offset period of time after a maximum opening angle of the movable mirror and trailing edges occurring an offset period of time before a zero crossing of the movable mirror. The processor may sample a mirror sense signal from the movable mirror at times at which a derivative of capacitance of the movable mirror with respect to time is zero, and then perform an action based upon the samples.

Abstract: A mirror drive device includes a support part, a movable part, a permanent magnet forming a magnetic field in the periphery of the movable part, and a circuit board disposed between the support part and the permanent magnet in a facing direction of a pair of principal surfaces of the movable part so as to cause the movable part to be positioned at an inside of the circuit board when viewed in the facing direction. The movable part includes a mirror disposition portion, a mirror disposed and a drive coil so as to face the permanent magnet. The support part includes a base portion connected to a connection member and a reinforcing portion extending from the base portion toward a side away from the permanent magnet and the circuit board. The drive coil is connected to electrodes by lead-out conductors.

Abstract: A position detecting apparatus includes a light-transmitting mirror that pivots around a pivot shaft and reflects measuring light from a light source; a light-receiving mirror that pivots around the pivot shaft and reflects returning light from an object; and a light-receiving element that receives the returning light from the light-receiving mirror. When the light-transmitting mirror and the light-receiving mirror are at rest, a first mirror angle between a mirror surface of the light-receiving mirror and a direction from the pivot shaft to the light-receiving element is larger than a second mirror angle between a mirror surface of the light-transmitting mirror and the direction.

Abstract: A mechanical component having an adjustable part and a magnetic actuator device having at least one first permanent-magnetic element, which is able to be set into a first adjustment motion, whereby the adjustable part is able to be set into a first co-adjustment motion about a first axis of rotation, and wherein the magnetic actuator device includes at least one first external permanent magnet, which induces a first magnetic field and is able to be set into a first excitation motion such that the at least one first permanent-magnetic element is able to be set into the first adjustment motion. A production method for a mechanical component and a method for adjusting an adjustable part at least about a first axis of rotation in relation to its support, are also described.

Abstract: The invention discloses an oscillating lens module and a projector. The oscillating lens module includes a frame, a first coil, a lens, and a second coil. The first coil and the second coil are connected to the frame and located in a magnetic field, wherein the first coil and the second coil are adapted to be electrified and to oscillate about a first axis and a second axis respectively via the magnetic field. The lens is connected to the first coil, wherein the lens is adapted to oscillate along with the first coil. An oscillation phase of the second coil is opposite to an oscillation phase of the first coil, such that forces applied on the frame by the first coil and the second coil are counterbalanced, so as to prevent the oscillating lens module from over vibrating which makes projection images shake and makes noise.

Abstract: Provided is an optical scanner including a movable portion, a frame body portion, a first axis portion that connects the movable portion and the frame body portion and oscillatably supports the movable portion around a first oscillation axis, a support portion, and a second axis portion that connects the frame body portion and the support portion and oscillatably supports the frame body portion around a second oscillation axis, in which, when a distance between an end portion of the movable portion in a direction following the second oscillation axis and the frame body portion is defined as L1, and a distance between an end portion of the frame body portion in a direction following the first oscillation axis and the support portion is defined as L3, a relationship corresponding to 1<L1/L3<5 is satisfied.

Abstract: A force sensor includes: a base; a first movable portion arranged to face the base; a second movable portion arranged to face the first movable portion; a support that is provided on the base and rockably supports the first movable portion and the second movable portion; a joint that is provided to the support and rotatably supports the second movable portion; and a first detection unit that can detect a force component causing the first movable portion and the second movable portion to rock and a second detection unit that can detect a force component causing the second movable portion to rotate, when external force is applied to at least one of the first movable portion and the second movable portion.

Abstract: An optical device includes: an optical portion that has a light incident surface on which light is incident; a movable portion that includes a disposition surface on which the optical portion is disposed and a concave disposition portion; and a shaft portion that supports the movable portion so that the movable portion is oscillatable, wherein a portion in which the disposition surface is not formed is included between the optical portion and the shaft portion in a plan view in a normal line direction of the light incident surface.

Abstract: A reflector micromechanical structure includes a frame with a window. The frame is elastically connected to an anchorage structure by first elastic elements. An actuation structure operatively coupled to the frame is configured to generate a first actuation movement of the frame about a first actuation axis. A mobile mass is positioned within the window and elastically coupled to the frame by second elastic elements. A mass distribution is associated to the mobile mass such as to generate, by an inertial effect in response to the first actuation movement, a second actuation movement of rotation of the mobile mass about a second actuation axis.

Abstract: The present invention relates to an apparatus for driving and measuring a MEMS mirror system, the MEMS mirror system having a mirror pivotable around an axis by a driving coil and exhibiting a resonance frequency, having a pulse generator and a measuring unit, each electrically connected to the coil. The pulse generator is preferably configured to feed a modulated pulse signal, comprised of pulses separated by intervals and having a modulation frequency different from the resonance frequency, to the coil. The measuring unit is preferably configured to measure a value of a signal output by the coil during an interval of the modulated pulse signal. In a further aspect of the invention a method is provided for driving and measuring the MEMS mirror system.

Abstract: An optical device includes a glass plate, a movable section that supports the glass plate, a shaft section that supports the movable section so as to be swingable around the swing axis, a support section that supports the shaft section, a permanent magnet that is provided in the movable section and is thinner than the glass plate, and a pair of coils that are disposed opposite to each other with the permanent magnet interposed therebetween. The movable section includes thin wall portions that are thinner than the glass plate. The permanent magnet is disposed in the thin wall portions. In side view, the surface of each of the coils on the permanent magnet side is located between both the main surfaces of the glass plate.

Abstract: A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirro rassembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400).

Abstract: The invention relates to an electromagnetically actuated microshutter comprising: a moveable plate that can rotate about an axis, connected to a stationary frame by two arms aligned on both sides of the plate to said axis, and comprising on its periphery a conductive loop and below the assembly formed by the stationary frame and the moveable plate, a group of magnets having distinct magnetic orientations, arranged in such a manner so as to create, with respect to the moveable plate, a lateral magnetic field, in the plane of the frame, oblique in relation to the axis of rotation.

Abstract: An optical scanner is an optical device including a base portion that is rotatable about the Y-axis, a frame portion that is rotatable about the X-axis intersecting the Y-axis, and a shaft portion that supports the base portion so as to be rotatable about the Y-axis with respect to the frame portion. The optical scanner includes a light reflecting plate that is fixed to the base portion and includes a light reflecting portion with a light reflecting property. The frame portion is provided so as to surround the base portion. The shaft portion includes one end connected to the base portion and the other end connected to the frame portion. The light reflecting plate is separated from the shaft portion in the thickness direction of the light reflecting plate and overlaps the shaft portion, as viewed from the thickness direction.

Abstract: An optical switch includes: a semiconductor substrate, including a first rotation part and a first torsion beam disposed at two ends of the first rotation part, where the first torsion beam is configured to drive the first rotation part to rotate; a microreflector, disposed on a surface of the first rotation part of the semiconductor substrate; a first latching structure, disposed on a surface of the first torsion beam, the first latching structure including a form self remolding (FSR) material layer and a thermal field source, where the thermal field source is configured to provide a thermal field for the FSR material layer and the FSR material layer is configured to undergo form remolding under the thermal field, so as to latch the first rotation part and the microreflector in a position after rotation.

Abstract: A laser scanning module employs a scan mirror and magnet rotor subassembly supported by a stationary stator structure. The scan mirror and magnet rotor subassembly includes: a silicone frame having a pair of silicone torsional hinges (i.e. posts) aligned along a scan axis and a supported by a pair of support elements associated with the stator structure, to support the scan mirror and magnet rotor subassembly. When the scan mirror and magnet rotor subassembly is rotated about its scan axis, by forces generated by an electromagnetic coil structure acting on the permanent magnet mounted on silicone frame, the silicone torsional hinges are elastically distorted and generate linear restoring forces which return the rotor subassembly back to its home position about the scan axis.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: The invention relates to an electromagnetically actuated microshutter comprising: a moveable plate that can rotate about an axis, connected to a stationary frame by two arms aligned on both sides of the plate to said axis, and comprising on its periphery a conductive loop; and below the assembly formed by the stationary frame and the moveable plate, a group of magnets having distinct magnetic orientations, arranged in such a manner so as to create, in regard to the moveable plate, a lateral magnetic field, in the plane of the frame, oblique in relation to the axis of rotation.

Abstract: An optical scanner includes: a movable plate which includes a light reflection unit which reflects light; a first torsion bar spring which oscillatably supports the movable plate around a first axis; a displacement member which is connected to the first torsion bar spring; a second torsion bar spring which oscillatably supports the displacement member around a second axis intersecting with the first axis; a coil provided on the displacement member; and a magnet which is provided spaced apart from the displacement member, and generates a magnetic field to be inclined with respect to the first axis and the second axis and to act on the coil, wherein the displacement member includes a frame surrounding the movable plate, and a damper which has a smaller thickness than that of the frame and extends in a direction intersecting with a direction in which the second torsion bar spring extends from the frame.

Abstract: An optical scanner includes: a movable plate which includes a light reflection unit; a first torsion bar spring which oscillatably supports the movable plate around a first axis; a displacement portion which is connected to the first torsion bar spring; a second torsion bar spring which oscillatably supports the displacement portion around a second axis intersecting with the first axis; a permanent magnet which is provided on the displacement portion to be inclined with respect to the first axis and the second axis; and a coil which is provided to be separated from the displacement portion and generates a magnetic field acting on the permanent magnet. The displacement portion includes a frame surrounding the movable plate, and a damper which has a smaller thickness than that of the frame and extends in a direction intersecting with a direction in which the second torsion bar spring extends from the frame.

Abstract: An actuator including a movable portion that swings about a swing axis, a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion, and a support portion that supports the connecting portion, wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view, and the movable portion, the support portion, and the connecting portion are formed by anisotropically etching a silicon substrate.

Abstract: An image display device (1) includes a phase control synthesis portion (8) shifting phases of a plurality of drive waveform signals to offset harmonic components thereof and synthesizing the plurality of drive waveform signals and a mirror drive portion (7) driving a mirror (6b) with a drive waveform signal synthesized by the phase control synthesis portion.

Abstract: Provided is an optical scanning device that can be downsized and improve the reading rate of a laser-type image reading system. This is an optical scanning device that includes a torsion beam, and a variable focus mirror that is supported by the torsion beam. Furthermore, the variable focus mirror is supported at two symmetrical positions with respect to the axis of rotation of the torsion beam.

Abstract: A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirro rassembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400).

Abstract: In a two-dimensional optical deflector apparatus comprising an optical deflector and a driver for driving the optical deflector, the optical deflector includes a mirror, a first piezoelectric actuator for rocking the mirror with respect to a first axis of the mirror, and a second piezoelectric actuator of a meander type for rocking the mirror with respect to a second axis of the mirror perpendicular to the first axis. The driver generates a curved-type saw-tooth drive voltage and applies the curved-type saw-tooth drive voltage to the second piezoelectric actuator.

Abstract: A magnetic force drive device (7) has the first movable part (100) and the first driving unit (200). The first movable part (100) has the first movable plate (111), and a permanent magnet (120) that is magnetized in a direction substantially parallel to the first movable plate (111), and is supported by the first frame body (112) and the first pair of beam parts (113), so as to be able to oscillate around the Y axis, which is substantially parallel to the first movable plate (111) and substantially perpendicular to the direction in which the permanent magnet (120) is magnetized. The first driving unit (200) has a yoke (210), and a coil (220) that magnetizes the yoke (210). The yoke (210) has the first end part (211a), and a second end part (212a) that is placed on substantially the opposite side of the first end part (211a) against one magnetic pole of the permanent magnet (120).

Abstract: A Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device comprising a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second degree of freedom.

Abstract: A method and apparatus of driving a motor in a light scanning arrangement. The method includes the following steps: (1) driving a drive coil with a drive signal to oscillate a scan mirror and a light beam reflected from the scan mirror; (2) generating a feedback signal having zero crossings during oscillation of the scan mirror by a feedback coil in proximity to the drive coil; (3) integrating the feedback signal to generate an integrated feedback signal; and (4) processing the integrated feedback signal to generate a periodic drive signal that has the same time period as the feedback signal.

Abstract: A family of microscopes include an illumination device which produces a planar light sheet along an illumination axis of an illumination beam path and a transverse axis normal to the illumination axis. A detection device detects light emitted from the sample region along an axis of detection of a detection beam path. The illumination and detection axes as well as the transverse axis and the axis of detection being oriented relative each other at an angle unequal to zero. A light sheet generator also produces rotationally symmetrical light and includes structure and control for rapidly scanning the sample region along the transverse axis. The illumination device includes a second light sheet generator having a first astigmatically active optical element with at least one astigmatic lens for producing a static sheet of light. Selection elements used to select either the first or the second light sheet or both together to produce the sheet of light.

Abstract: A light field display device comprising an array of light field display elements, each display element comprising: a beam generator for generating an output beam of light; a radiance modulator for modulating the radiance of the beam over time; a focus modulator for modulating the focus of the beam over time; and a scanner for scanning the beam across a two-dimensional angular field, the scanner comprising a biaxial electromechanical scanning mirror comprising: a mirror, a platform, an inner frame, and an outer frame; the mirror attached to the platform via a post, the platform attached to the inner frame via a first pair of hinges, and the inner frame attached to the outer frame via a second pair of hinges; the first pair of hinges arranged substantially orthogonally to the second pair of hinges, thereby to allow biaxial movement of the mirror; the extent of the mirror larger than the extent of the inner frame.

Abstract: An actuator includes a movable section swinging around a predetermined swing axis, a connecting section extending from the movable section, and being torsionally deformed in accordance with swing of the movable section, a support section supporting the connecting section, a magnet being disposed on a plate surface of the movable section, and a coil generating a magnetic field acting on the magnet to thereby swing the movable section, and the movable section has a cross shape in a plan view.

Abstract: An optical reflection element includes a frame, a meandrous vibrating part having an outer end connected with an inside of the frame, and a mirror part supported by an inner end of the meandrous vibrating part. The meandrous vibrating part has a meandrous shape that includes curved portions and vibrating beams alternately connected with the curved portions. A curvature of respective one of the curved portions is smaller than a curvature of at least one of the curved portions which is located closer to the inner end than the respective one of the curved portions. This optical reflection element has a large deflection angle of the mirror part.

Abstract: A laser scanning module employs a scan mirror and magnet rotor subassembly supported by a stator structure using a pair of elastomeric wheel hinges. The scan mirror and magnet rotor subassembly includes: a scan mirror and magnet rotor subassembly having a rotor frame having a pair of rotor support posts aligned along a scan axis passing through the rotor frame; a scan mirror mounted on the rotor frame; and a permanent magnet mounted on the rotor frame. The elastomeric wheel hinge includes a central portion having an aperture for passage and fixed attachment of one rotor support post, a plurality of elastomeric spoke portions extending from the central portion and radially extending from the central aperture to a circumferential rim portion connected to the outer end portion of each spoke portion so as to form the elastomeric wheel hinge.

Abstract: A galvanoscanner including: a rotor including a shaft as a rotational center, and permanent magnets disposed around the shaft and polarized to a plurality of poles in a circumferential direction of the shaft; and a stator disposed in the outside of the rotor through a clearance and including coils, a yoke, and an outer casing so that the rotor swings in a predetermined angle range; wherein: the permanent magnets are provided with grooves which are formed in a direction of the rotation shaft so as to straddle circumferentially adjacent magnetic poles of the permanent magnets; and the permanent magnets are parted into at least two parts per pole by parting lines. Thus, the ratio of the torque constant to the moment of inertia can be improved so that the current required for driving can be reduced and reduction of power consumption at driving time can be attained.

Abstract: An actuator includes: a movable portion that swingably moves around a first axis; a first shaft that extends from the movable portion and swingably supports the movable portion around the first axis; a frame portion that is connected to the first shaft and swingably moves around a second axis that intersects the first axis; a second shaft that extends from the frame portion and swingably supports the frame portion around the second axis; a support portion connected to the second shaft; a coil provided on the frame portion; and a magnet that produces a magnetic field that acts on the coil, wherein the frame portion is so formed that the frame portion surrounds the movable portion, the first shaft, the second shaft, and the support portion in a plan view viewed in a thickness direction of the movable portion.

Abstract: An optical scanning device includes a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors. Respective spindles connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.

Abstract: A metal elastic member to be used for beams 4 for supporting a movable unit 3 at respective ends with respect to a fixed unit 2 in a miniature machine including at least one movable unit 3, the fixed unit 2 and the beams 4, and capable of swinging the movable unit about an axis P with the beams 4 serving as torsional rotation axes, includes a metal bar 4a having a predetermined length, a fixed unit pad 4b that is provided at a first end of the metal bar 4a and is fixed to the fixed unit 2, and a movable unit pad 4c formed on the other end side of the metal bar 4a and fixed to the movable unit 3. At least the metal bar 4a is molded to have a sectional area of 1 mm2 or less by using a physical or chemical processing method excluding a mechanical processing method and swings the movable unit 3 within a frequency of 150 Hz to 500 Hz.

Abstract: A light scanner includes a light reflection part having light reflectivity, a movable part having the light reflection part and being rotatable around a first rotation center axis and a second rotation center axis, a pair of movable beams extending from the movable part, a displacement part connected to the movable beams and rotating the movable part around the first rotation center axis, a first drive part that drives the displacement part, a pair of drive beams extending from the displacement part in parallel to the light reflection surface and orthogonal to an extension direction of the movable beams, a support frame that supports the drive beams, and a second drive part that rotates the movable part around the second rotation center axis, and the movable beam has a bending part that bendingly deforms due to displacement of the displacement part.

Abstract: The present invention relates to an optical probe (1) suitable for miniature applications. An example application is a fiber-based confocal miniaturized microscope. The optical probe comprises a coil-based actuation system (9, 10) comprising drive coils (9) capable of displacing the distal end (3) of an optical guide (2) housed (4) by the optical probe. The probe makes use of a feedback loop which alternate between driving the displacement of the optical guide by driving a current through the drive coils and switching off the current through the drive coils, and while the drive current being switched off, measure the speed of the distal end of the optical guide. The measured speed is compared to the set-point speed, and if a difference is detected, the drive current is adjusted to eliminate, or at least bring down, this difference.

Abstract: Provided is an optical scanning device capable of solving the problem of low driving efficiency. A pair of coupling parts 12 join both ends of movable mirror part 11 having a reflective plane that reflects light to respective supporting parts 13. Each coupling part 12 has magnet part 21 having a permanent magnet, first spring part 22 that couples magnet part 21 to supporting part 13 in an oscillatable manner, and a second spring part that couples movable mirror part 11 to magnet part 21 in an oscillatable manner. Driver 14 generates magnetic fields acting on magnet part 21 to oscillate magnetic part 21 and thereby oscillate movable mirror part 11.