Abstract: The invention provides an apparatus for reducing speckle in a projection visual display (PVD) system, a method of reducing visible speckle in a PVD system and a PVD system incorporating the method or apparatus. In one embodiment, the apparatus includes a diffuser interposable in an optical path of a PVD system and a diffuser actuator having a single drive axis configured to cause the diffuser to travel in a lissajous curve at least partially transverse to the optical path.

Abstract: Provided is a Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device including a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second degree of freedom.

Abstract: A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic, includes: a drive section adapted to drive the mirror device with a drive signal; a detection section adapted to detect a displacement of a movable section of the mirror device, and to generate and then output a detection signal corresponding to the detection; and a start-up processing section adapted to perform a start-up process of the mirror device, wherein the start-up processing section detects a frequency of an envelope included in abnormal vibration of the movable section as a beat frequency fb based on the detection signal of the detection section, obtains a predetermined frequency f1 based on a frequency f of the drive signal of the mirror device with which the beat frequency is detected and the beat frequency fb, and drives the mirror device again with the drive signal having the frequency f1.

Abstract: An optical multi-ring scanner is disclosed, which comprises: a substrate; an outer ring driving element, disposed inside the substrate and configured symmetrically at two sides thereof with a pair of first arms that are connected respectively to the substrate; at least one inner ring driving element, each configured with a first inner ring driver in a manner that the first inner ring driver has a pair of second arms symmetrically disposed at a top side and a bottom side thereof while being connected to the outer ring driving element; and a mirror element, disposed inside the first inner ring driver and having a pair of third arms symmetrically disposed at a top side of a bottom side thereof; wherein, the third arm is disposed coaxial with the second arm while enabling the first arm to be disposed perpendicular to the second arm and the third arm.

Abstract: A mirror device drive control apparatus adapted to perform drive control of a mirror device having a hysteresis characteristic, includes: a drive section adapted to drive the mirror device with a drive signal; a detection section adapted to detect a displacement of a movable section of the mirror device, and to generate and then output a detection signal corresponding to the detection; a control section adapted to perform control of a frequency of the drive signal so that the movable section is displaced in a predetermined range; and an abnormality detection section adapted to detect abnormal vibration of the movable section during the control by the control section, wherein the abnormality detection section detects, in response to change in frequency of the drive signal, a frequency of an envelope included in the abnormal vibration of the movable section as a beat frequency based on a detection signal of the detection section, and obtains a frequency of the drive signal for performing a restoration process o

Abstract: An actuator includes: a first oscillatory system including a frame-shaped driving member and a pair of first axial members holding the driving member from both ends so as to allow the driving member to rotate around an X-axis; a second oscillatory system including a movable plate provided inside the driving member and a pair of second axial members holding the movable plate to the driving member from both ends so as to allow the movable plate to rotate around a Y-axis perpendicular to the X axis; and a driving unit including a permanent magnet provided on the driving member, a coil provided so as to face the permanent magnet, a voltage applying unit applying a voltage to the coil, and the permanent magnet has a relief section to avoid making contact with the movable plate.

Abstract: A laser projector including a laser light source, a scan unit to scan the laser beam, a scan signal generation unit to generate a pulse signal, a drive unit to drive the scan unit and a pulse pattern adjustment unit to adjust a pulse pattern, wherein the pulse pattern adjustment unit adjusts the pulse pattern to a first pulse pattern for adjusting the swing amount from a first swing amount to a second swing amount in a projection interval, adjusts the pulse pattern to a second pulse pattern for adjusting the swing amount from the second swing amount back to the first swing amount in a first-stage interval in a non-projection interval, and adjusts the pulse pattern to a third pulse pattern for keeping the swing amount at the first swing amount in a second-stage interval in the non-projection interval until a scan position returns to the projection interval.

Abstract: An oscillation system includes first and second oscillation movable elements supported by respective elastic supporting elements. The oscillation system has a first natural oscillation mode of a resonance frequency f1 and a second natural oscillation mode of a resonance frequency of f2 which is approximately N-fold of f1 where N is a natural number. A control device determines set driving frequencies Df1 and Df2 in accordance with a predetermined equation while satisfying a relation Df2=N×Df1 and drives the oscillation system at the set driving frequencies through a driving member.

Abstract: A scan element includes a bobbin having a central axis about which is wound an electromagnetic wire coil and having a flange oriented generally transverse to the central axis. At least one elastomeric support has a first end coupled to the flange. A permanent magnet has first and second surfaces, a central axis, and a magnetization direction oriented generally transverse to the central axis of the permanent magnet. The magnet is supported by a second end of the elastomeric support. A mirror has a central axis and is mounted on the second surface of the magnet. The central axes of the mirror and magnet are coaxial with the central axis of the bobbin. The elastomeric support provides a return force when the magnet and the mirror are rotated at an angle from the central axis during energization of the electromagnetic wire coil.

Abstract: A scan element includes a bobbin having a central axis about which is wound an electromagnetic wire coil and having a flange oriented generally transverse to the central axis. At least one elastomeric support has a first end coupled to the flange. A permanent magnet has first and second surfaces, a central axis, and a magnetization direction oriented generally transverse to the central axis of the permanent magnet. The magnet is supported by a second end of the elastomeric support. A mirror has a central axis and is mounted on the second surface of the magnet. The central axes of the mirror and magnet are coaxial with the central axis of the bobbin. The elastomeric support provides a return force when the magnet and the mirror are rotated at an angle from the central axis during energization of the electromagnetic wire coil.

Abstract: An actuator includes: a first oscillatory system including a frame-shaped driving member and a pair of first axial members holding the driving member from both ends so as to allow the driving member to rotate around an X-axis; a second oscillatory system including a movable plate provided inside the driving member and a pair of second axial members holding the movable plate to the driving member from both ends so as to allow the movable plate to rotate around a Y-axis perpendicular to the X axis; and a driving unit including a permanent magnet provided on the driving member, a coil provided so as to face the permanent magnet, and a voltage applying unit applying a voltage to the coil.

Abstract: An optical scanning or positioning mechanism has a head on which optical components are mounted and an actuator coupled to the head to cause the head to move when the actuator is actuated. There are one or more sets of flexure bearings mounted in the mechanism. The flexure bearings have a restoring torque when moved from a rest position. The bearings are coupled to the head to allow the head to move when actuated by the actuator. One or more magnets are mounted in the mechanism in a location other than in the actuator to compensate for the flexure bearings restoring torque.

Abstract: An optical device includes a mass section in a plate shape including a light reflector with light reflectivity, a supporting section for supporting the mass section, a pair of elastic sections with elastic deformability for coupling the mass section to the supporting section in a pivotally movable manner, and a driving unit for pivotally moving the mass section, the driving unit including a magnetic section provided to the mass section, magnetized in a direction perpendicular to a surface of the mass section, a pair of magnetic poles with different polarities, provided in a manner to face each other in a direction perpendicular to a pivotal movement central axis with the magnetic portion intervened on the basis of a top view of the mass section in a non-driven condition, and a magnetic field generator having a coil for generating a magnetic force between the pair of magnetic poles.

Abstract: A scanning apparatus for a printer or similar instrument. A multiharmonic oscillator is used to provide a composite motion of a laser beam or other light beam to scan an imaging surface. The multiharmonic oscillator may have multiple sections each having a different resonant frequency. One section includes a reflector that intercepts the light beam, and drive electronics move the reflector so the light beam scans the imaging surface. Linear and complex non-linear motions of the light beam may be achieved. Microelectromechanical systems (MEMS) technology may be used to fabricate the oscillator.

Abstract: An actuator includes: a first vibrating system having a frame-like driving member and a pair of first axis members holding the driving member from both sides so that the driving member is rotatable about an X axis; a second vibrating system having a movable plate provided inside the driving member and a pair of second axis members holding the movable plate on the driving members from both sides so that the movable plate is rotatable about a Y axis orthogonal to the X axis; a driving unit including a permanent magnet provided on the driving member, a coil provided to oppose the permanent magnet and a voltage applying unit applying voltage to the coil; and a spacer sandwiched between the driving member and the permanent magnet so as to form space preventing intervention by the movable plate.

Abstract: An actuator includes: a first vibration system including a driving member having a frame shape, and a pair of first axial members each one end of which supports the driving member so as to allow the driving member to rotate about an X-axis; a second vibration system including a movable plate provided inside the driving member, and a pair of second axial members each one end of which supports the movable plate so as to allow the movable plate to rotate about a Y-axis perpendicular to the X-axis; a driving unit including a ferromagnetic member, a coil generating a magnetic field on the ferromagnetic; and a positioning portion that places the ferromagnetic member or the coil symmetrical with respect to an intersection point of the X and Y-axes.

Abstract: Disclosed is an oscillating system arranged so that a gravity center of a movable member and a torsional axis of a resilient support are easily registered with each other to prevent deformation of the movable member due to its dead weight or deviation of deformation from symmetrical deformation, wherein the oscillating system includes a substrate 301, a movable member 302 with hard magnetic members 310 and 311, resilient supports 304 and 305 for supporting the movable member for torsional vibration about a torsional axis 312 with respect to the substrate, and a magnetic field producing device for driving the movable member relative to the substrate, wherein the movable member 302 has recesses 306 and 307, and wherein the hard magnetic members are fixed while their end portions are aligned with end faces 308 and 309 corresponding to the recesses.

Abstract: An optical scanning actuator includes a leaf spring member that has a base end fixed and a tip end, a light source that is fitted to the leaf spring member, an electromagnetic driving unit that oscillates the tip end of the leaf spring member, and an optical element that is fitted to the leaf spring member and that is irradiated with light outgoing from the light source to reflect or refract the light to thereby scan the light.

Abstract: A beam irradiation apparatus includes: an optical element which changes a travel direction of a laser beam by being rotated in a predetermined direction; an actuator which rotates the optical element in the direction; a refractive element which is disposed in the actuator and rotates in association with rotation of the optical element; a servo beam source which emits a servo beam to the refractive element; a photodetector which receives the servo beam refracted by the refractive element and outputs a signal according to a position where the servo beam is received; and a power adjustment circuit which adjusts emission power of the servo beam source. The power adjustment circuit adjusts the emission power so that a reception amount of the servo beam in the photodetector becomes constant based on an output signal from the photodetector.

Abstract: A light refracting element formed in parallel plate shape is attached to a support shaft of a mirror holder, a semiconductor laser and a PSD are disposed at positions between which the light refracting element is sandwiched. The light refracting element is rotated by rotation of the mirror holder, and whereby a laser beam irradiation position is changed on a light acceptance surface of PSD. The laser beam irradiation position on a light acceptance surface corresponds to the mirror rotation position, so that the mirror rotation position and a laser beam scanning position in a target area can be detected based on an output from the PSD.

Abstract: A two-dimensional galvanometer scanner is disclosed in which two coils are disposed on two adjacent sides of the scanning mirror in order to provide for movement along two orthogonal axes. Preferably, a ball holder and metallic ball are used to implement a ball and socket connection to permit the scanning mirror or other optical element to be moved in the two dimensions.

Abstract: An actuator includes a movable plate having a plate shape, a pair of axial parts that is elastically deformable and supporting the movable plate rotatable, and a tension adjuster adjusting tension on an axial direction of the pair of the axial parts and including a torsional axis that is formed jointly or integrally with one of the axial parts and disposed orthogonally to the axial direction of the axial parts, and a drive source that torsionally deforms the torsional axis, wherein the torsional axis is torsionally deformed through the action of the drive source and a spring constant of the pair of the axial parts is adjusted by adjusting the tension on the pair of the axial parts.

Abstract: Disclosed are a light scanning unit and a method of synchronizing the scanning operation of such light scanning unit. The light scanning unit includes a deflection, mirror that is driven to oscillate so as to deflect and scan a light beam in a bidirectional scanning path. The synchronization, of a scanning operation may be made at least in part in consideration of the direction of flow of the current that is supplied to drive the deflection mirror to oscillate.

Abstract: An actuator includes: a first vibrating system having a frame-like driving member and a pair of first axis members holding the driving member from both sides so that the driving member is rotatable about an X axis; a second vibrating system having a movable plate provided inside the driving member and a pair of second axis members holding the movable plate on the driving members from both sides so that the movable plate is rotatable about a Y axis orthogonal to the X axis; a driving unit including a permanent magnet provided on the driving member, a coil provided to oppose the permanent magnet and a voltage applying unit applying voltage to the coil; and a spacer sandwiched between the driving member and the permanent magnet so as to form space preventing intervention by the movable plate.

Abstract: A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.

Abstract: To provide an optical scanning sensor which performs an object detection with high accuracy by suppressing the mutual interference between scanning light and reflection light, the optical scanning sensor comprises a light projecting unit that projects light, an optical scanning actuator that emits the light from the light projecting unit via a reflecting mirror and performs scanning with the light emitted by causing the mirror to swing, and a light receiving unit that receives, via the mirror, reflection light by an external object of scanning light emitted by the optical scanning actuator. The mirror includes a first surface that reflects the light projected by the light projecting unit and emits the light reflected outward as the scanning light, and a second surface that is parallel to and discontinuous in a reflection area with the first surface and reflects and emits the reflection light to the light receiving unit.

Abstract: An actuator includes: a first vibrating system having a frame-like driving member and a pair of first axis members holding the driving member from both sides so that the driving member is rotatable about an X axis; a second vibrating system having a movable plate provided inside the driving member and a pair of second axis members holding the movable plate on the driving members from both sides so that the movable plate is rotatable about a Y axis orthogonal to the X axis; a driving unit including a permanent magnet provided on the driving member, a coil provided to oppose the permanent magnet and a voltage applying unit applying voltage to the coil; and a spacer sandwiched between the driving member and the permanent magnet so as to form space preventing intervention by the movable plate. The permanent magnet is provided such that a line segment connecting both poles of the permanent magnet inclines, in a plan view of the movable plate, with respect to the X axis and the Y axis.

Abstract: An actuator includes: a first oscillatory system including a frame-shaped driving member and a pair of first axial members holding the driving member from both ends so as to allow the driving member to rotate around an X-axis; a second oscillatory system including a movable plate provided inside the driving member and a pair of second axial members holding the movable plate to the driving member from both ends so as to allow the movable plate to rotate around a Y-axis perpendicular to the X axis; and a driving unit including a permanent magnet provided on the driving member, a coil provided so as to face the permanent magnet, and a voltage applying unit applying a voltage to the coil. The permanent magnet is provided such that a line segment connecting both poles is slanted with respect to each of the X-axis and the Y-axis, in a plan view of the movable plate.

Abstract: The present invention relates to a scanning system optimized for lidar that includes a nodding mirror, a rotary electromagnetic drive, a rotary optical encoder, and control circuitry. The rotary electromagnetic drive includes a yoke incorporating a permanent magnet, and an arm having a coil at one end of the arm. The coil is enclosed within the yoke, and an opposite end of the arm is coupled to the nodding mirror, such that movement of the coil within the yoke in response to a current causes the nodding mirror to rotate. The rotary optical encoder produces an output signal in response to rotation of the nodding mirror, which serves as feedback to the control circuitry. The control circuitry adjusts the current provided to the rotary electromagnetic drive in response to the output signal, such that the nodding mirror rotates in a reference scan pattern.

Abstract: An actuator includes: a frame; first members at each end of the frame along a first axis making the frame rotatable thereabout; second members supporting each end of a movable plate against the frame along a second axis making the movable plate rotatable thereabout; first magnets with poles interposing the first axis; a second magnet with poles interposing the first axis; a coil generating a magnetic force acting on the first and second magnets; and a voltage source applying a voltage to the coil. The first and second magnets have an angle of 30-60 degrees to the first axis, and identical magnetic pole directions. The voltage source includes first and second voltage generators generating first and second voltages of first and second frequencies, and a voltage superimposer. The movable plate is rotated about the first and second axes at the first and second frequencies by the superimposed voltages.

Abstract: An apparatus includes an oscillatory system having first and second movable bodies, and first and second elastic support portions, a driving portion having a permanent magnet, and a drive controlling portion. The oscillatory system has at least two characteristic oscillation modes of first and second resonance frequencies. The drive controlling portion supplies a driving signal to the driving portion so that the movable body of the oscillatory system is swingingly rotated. The swinging rotation is performed such that a sum of time periods wherein the angular displacement of the movable body changes in one direction is different from a sum changes in its opposite direction. The drive controlling portion includes a waveform adjusting portion for adjusting the driving signal.

Abstract: A mirror device and a method for manufacturing the mirror device are presented. The mirror device includes a mirror formed from a first substrate and a hinge/support structure formed from a second substrate. The hinge/support structure includes a recessed region and a torsional hinge region. The mirror is coupled to the hinge/support structure at the recessed region. Further, a driver system is employed to cause the mirror to pivot about the torsional hinge region.

Abstract: An image scanning apparatus for embodying an image using visible lights apparatus includes a scanning unit for irradiating line scan light; a power source for generating voltage for driving the scanning unit; a light detector for detecting duty that is a variation ratio of line scan light with respect to time; and a servo-loop for comparing the detected duty with a preset value, calculating a magnitude of the voltage for driving the scanning unit, and applying voltage, which is controlled depending on the calculated voltage magnitude, to the scanning unit.

Abstract: A light deflector is disclosed that includes a bearing, a motor, a rotary body supported by the bearing and rotated by the motor, and a polygon mirror fixed to the rotary body. The motor includes an annular permanent magnet circumferentially magnetized with six poles and fixed to the rotary body, a rotational position detector part configured to detect the rotational position of the permanent magnet, and a stator assembly including a stator core and nine coils fixed to the stator core.

Abstract: A scanning apparatus for a printer or similar instrument. A multiharmonic oscillator is used to provide a composite motion of a laser beam or other light beam to scan an imaging surface. The multiharmonic oscillator may have multiple sections each having a different resonant frequency. One section includes a reflector that intercepts the light beam, and drive electronics move the reflector so the light beam scans the imaging surface. Linear and complex non-linear motions of the light beam may be achieved. Microelectromechanical systems (MEMS) technology may be used to fabricate the oscillator.

Abstract: An actuator includes: a first vibration system including a driving member having a frame shape, and a pair of first axial members each one end of which supports the driving member so as to allow the driving member to rotate about an X-axis; a second vibration system including a movable plate provided inside the driving member, and a pair of second axial members each one end of which supports the movable plate so as to allow the movable plate to rotate about a Y-axis perpendicular to the X-axis; a driving unit including a ferromagnetic member, a coil acting a magnetic field on the ferromagnetic member and a voltage applying unit applying a voltage to the coil, either one of the ferromagnetic member and the coil being disposed at a position on the driving member apart from each of the X and Y axes in a plan view of the movable plate; and a positioning portion that is disposed to the driving member and determine a fixing position of the ferromagnetic member or the coil with respect to the driving member.

Abstract: An apparatus includes a substrate and a mirror. The mirror is attached to the substrate via a spring. An electro-mechanical driver is operable to cause the mirror to rotationally oscillate about first and second non-collinear axes at different first and second frequencies.

Abstract: A scanner and a display device. The scanner may include: a mirror positioned on a light path for reflecting light; a mirror holder supporting the mirror; a housing rotatably supporting the mirror holder; a driving unit rotating the mirror holder such that the mirror rotates periodically in an oscillatory manner; a sensing magnet coupled to a rotation center of the mirror holder and rotating in correspondence to a rotation of the mirror holder; and a Hall sensor coupled to the housing adjacent to the sensing magnet for sensing a rotation of the mirror holder. With certain embodiments, the periodical oscillating rotations of the mirror can be detected and used for feedback control, so that the mirror may reflect light with greater stability. Certain embodiments can be used to supplement the driving force of the driving unit, and can prevent noise that may occur during the rotation of the mirror.

Abstract: An optical scanning actuator includes a leaf spring member that has a base end fixed and a tip end, a light source that is fitted to the leaf spring member, an electromagnetic driving unit that oscillates the tip end of the leaf spring member, and an optical element that is fitted to the leaf spring member and that is irradiated with light outgoing from the light source to reflect and refract the light to thereby scan the light.

Abstract: A microelectromechanical systems (MEMS) scanner is provided. The MEMS scanner includes: a stationary frame; a first movable stage disposed inside the stationary frame and suspended on the stationary frame so as to pivot and vibrate around a virtual center shaft; a second movable stage disposed inside the first movable stage and suspended on the first movable stage so as to pivot and vibrate around the center shaft; and an actuator providing a driving force used to pivot and vibrate the first movable stage.