Electromechanically Driven Patents (Class 359/199.4)
  • Patent number: 11300409
    Abstract: The present disclosure relates to a surveying instrument including a chassis, an optical system having an optical axis, a stage attached to the chassis and an optical component. The optical system may be adapted to receive and/or transmit light. The optical component is located at, or in proximity to, the optical axis. The received and/or transmitted light passes through the optical component. The stage includes an actuating member arranged to act on the optical component for movement thereof. The actuating member may be responsive to temperature so as to induce a displacement of the optical component relative to the chassis along the optical axis in response to a temperature change.
    Type: Grant
    Filed: June 12, 2018
    Date of Patent: April 12, 2022
    Assignee: Trimble AB
    Inventor: Johan von Matern
  • Patent number: 11280997
    Abstract: A beam scanner of a near-eye display includes a pair of tiltable reflectors and a beam-folding pupil relay coupling the tiltable reflectors optically together. The beam-folding pupil relay includes a beamsplitter for receiving the light beam reflected by the first tiltable reflector, and a first curved reflector for receiving the light beam from the beamsplitter, and for reflecting the light beam back towards the beamsplitter. The beam-folded pupil relay is configured to couple the light beam reflected by the first curved reflector to the second tiltable reflector. A second curved reflector may be provided for coupling the light beam scanned by the tiltable reflectors to a pupil-replicating waveguide. A controller may be provided for scanning the light beam in coordination with operating the light source at varying levels of brightness or color.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: March 22, 2022
    Assignee: FACEBOOK TECHNOLOGIES, LLC
    Inventor: Weichuan Gao
  • Patent number: 11262576
    Abstract: A reflective optical element includes a reflector configured to reflect light, a first connection part connected with the reflector, first and second transmission parts connected with of the first connection part, first and second vibrator parts connected with respective base ends of the first and second transmission parts, first and second driver parts connected with respective head ends of the first and second vibrator parts, a base, and a second connection part connecting the first and second vibrator parts vibratably with the base.
    Type: Grant
    Filed: October 25, 2018
    Date of Patent: March 1, 2022
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Takami Ishida, Kazuki Komaki
  • Patent number: 11231783
    Abstract: Provided is an apparatus for generating a vibrotactile sensation. The apparatus for generating a vibrotactile sensation includes a light source generating light, a vibration layer generating a vibration by receiving the light, a vibration detection unit disposed adjacent to the vibration layer to detect a vibration signal of the vibration layer, and a control unit connected to the vibration detection unit to determine the vibration of the vibration layer by using the vibration signal. Here, the vibration layer includes a thermo-elastic layer that has a first thermal expansion coefficient and a photo-thermal conversion layer that is disposed on the thermo-elastic layer and has a second thermal expansion coefficient less than the first thermal expansion coefficient.
    Type: Grant
    Filed: August 11, 2020
    Date of Patent: January 25, 2022
    Assignee: Electronics and Telecommunications Research Institute
    Inventor: Inwook Hwang
  • Patent number: 10948711
    Abstract: An optical scanning device includes a mirror support including a first surface and a second surface, a mirror for reflecting a laser beam being formed on the first surface; a driving beam that includes a beam extending in a direction orthogonal to a predetermined axis and is connected to the mirror support; a driving source that is formed on a surface of the beam and causes the mirror support to rotate around the predetermined axis; and a rib formed on the second surface of the mirror support at a position corresponding to the mirror. The first surface of the mirror support includes an area where the mirror is formed and an exposed area where the first surface is exposed.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: March 16, 2021
    Assignee: MITSUMI ELECTRIC CO., LTD.
    Inventor: Kensuke Yamada
  • Patent number: 10871645
    Abstract: A resonance system is disclosed, which includes a first resonance device configured to receive a drive signal and generate an output signal, a second resonance device configured to receive a control signal and generate the drive signal based on the received control signal, and a controller configured to generate the control signal based on the output signal such that a phase difference between the control signal applied to the second resonance device and the output signal of the first resonance device corresponds to a predetermined phase shift value.
    Type: Grant
    Filed: April 23, 2018
    Date of Patent: December 22, 2020
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Chuan Pu, Wenjun Liao
  • Patent number: 10793418
    Abstract: A rotating apparatus includes a folded back elastically deformable portion including a first piezoelectric element for deforming a first elastically deformable portion and a second piezoelectric element for deforming a second elastically deformable portion, and the rotating apparatus rotates a movable portion around a predetermined rotation axis, by respectively applying first and second driving voltage signals to the first and second piezoelectric elements, to deform the first and second elastically deformable portions. First and second connection positions have a relationship of being relatively the same or symmetrical across all folded back structures. The first connection position is where a signal line of the first driving voltage signal and the first piezoelectric element are connected, and the second connection position is where a signal line of the second driving voltage signal and the second piezoelectric element are connected.
    Type: Grant
    Filed: June 4, 2018
    Date of Patent: October 6, 2020
    Assignee: Ricoh Company, Ltd.
    Inventors: Mizuki Shinkawa, Tsuyoshi Hashiguchi
  • Patent number: 10770643
    Abstract: A MEMS actuator device of a piezoelectric type formed on a substrate, with a base unit including a base beam element having a main extension in a extension plane and a thickness in a thickness direction perpendicular to the extension plane, smaller than the main extension. A piezoelectric region extends over the beam element. An anchor region is rigid to the base beam element and to the substrate. A base constraint structure is connected to one end of the base beam element and is configured to allow a deformation of the base beam element in the extension plane and substantially reduce a deformation of the base beam element in the thickness direction.
    Type: Grant
    Filed: June 29, 2017
    Date of Patent: September 8, 2020
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Domenico Giusti, Anna Alessandri
  • Patent number: 10421099
    Abstract: A control circuit includes: an angular velocity calculator calculating an angular velocity of a mirror based on an angle of the mirror; a target angular velocity calculator calculating a target value of the angular velocity; a resonance frequency detector detecting a frequency of vibration of the mirror using the angular velocity and target value; a drive waveform generator generating a drive signal having sawtooth waveform; and an unnecessary vibration controller optimizing the drive signal to reduce an unnecessary vibration of the mirror based on the frequency of vibration of the mirror and providing piezoelectric elements with voltage according to the optimized drive signal. The resonance frequency detector detects the frequency of vibration of the mirror using a waveform and the target value of the angular velocity of the mirror during a duration in which the drive signal is transmitted to the unnecessary vibration controller from the drive waveform generator.
    Type: Grant
    Filed: May 25, 2016
    Date of Patent: September 24, 2019
    Assignee: DENSO CORPORATION
    Inventors: Shohei Morikawa, Hikaru Sasaki
  • Patent number: 10394018
    Abstract: An optical scanning device according to an embodiment of the present invention includes a mirror that has an optical reflection surface; a movable frame that supports the mirror; a pair of drive beams that support the movable frame from both sides; drive sources that are disposed on the drive beams and cause the movable frame to be swung around a predetermined axis that passes through the center of the optical reflection surface; and a fixed frame that supports the drive beams. A movable frame connection part, via which the movable frame and one of the drive beams are connected, is substantially arranged on a side opposite to a side on which a fixed frame connection part, via which the fixed frame and the one of the drive beams are connected, is arranged, with respect to the predetermined axis.
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: August 27, 2019
    Assignee: MITSUMI ELECTRIC CO., LTD.
    Inventor: Tsukasa Yamada
  • Patent number: 10371940
    Abstract: A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. Upper electrodes and lower electrodes of the first actuator part and the second actuator part are divided to correspond to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, a piezoelectric portion corresponding to positions of a first piezoelectric conversion part and third piezoelectric conversion parts and a piezoelectric portion corresponding to positions of second piezoelectric conversion parts and a fourth piezoelectric conversion part generate stresses in opposite directions.
    Type: Grant
    Filed: March 29, 2017
    Date of Patent: August 6, 2019
    Assignee: FUJIFILM Corporation
    Inventor: Takayuki Naono
  • Patent number: 10324283
    Abstract: A device disclosed herein includes a feedback measuring circuit to measure a signal flowing through a movable MEMS mirror. Processing circuitry determines a time at which the signal indicates that a capacitance of the movable MEMS mirror is substantially at a maximum capacitance. The processing circuitry also determines, over a window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to a given time, a total change in capacitance of the movable MEMS mirror compared to the maximum capacitance. The processor further determines the capacitance at the given time as a function of the total change in capacitance, and determines an opening angle of the movable MEMS mirror as a function of the capacitance at the given time.
    Type: Grant
    Filed: October 3, 2017
    Date of Patent: June 18, 2019
    Assignee: STMicroelectronics Ltd
    Inventor: Offir Duvdevany
  • Patent number: 9291815
    Abstract: An optical reflection element includes a fixed portion having a pair of sides opposite to each other, a pair of first vibration portions having one ends each connected to respective one of the sides of the fixed portion, a pair of connection portions each connected to respective one of another ends of the first vibration portions, a movable frame rotatably supported by another ends of the first vibration portions via the connection portions, a pair of second vibration portions having one ends each connected to respective one of a pair of sides of the movable frame, and a mirror rotatably connected to another ends of the second vibration portions. The second vibration portions are configured to transmit a rotational vibration about a rotation axis to the mirror. The connection portions are connected to the movable frame in a direction of the rotation axis.
    Type: Grant
    Filed: April 24, 2013
    Date of Patent: March 22, 2016
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Toshiaki Horie, Soichiro Hiraoka, Shinsuke Nakazono, Kazuki Komaki
  • Patent number: 9287488
    Abstract: A piezoelectric actuator device includes a vibrator and a driver to vibrate the vibrator. The vibrator includes a lower vibration layer configured to vibrate and an upper vibration layer coupled to an upper surface of the lower vibration layer and configured to vibrate together with the lower vibration layer. The driver includes an upper electrode layer on a lower surface of the lower vibration layer, a piezoelectric layer on a lower surface of the upper electrode layer, and a lower electrode layer on a lower surface of the piezoelectric layer. The lower vibration layer of the vibrator is made of organic material. The upper vibration layer is mainly made of inorganic material. The lower vibration layer has a smaller longitudinal elastic modulus than the upper vibration layer. The piezoelectric actuator device has a large resistance to disturbance vibrations and a large warping amount of the vibrator without increasing power consumption.
    Type: Grant
    Filed: January 29, 2013
    Date of Patent: March 15, 2016
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Soichiro Hiraoka, Kazuki Komaki, Shinsuke Nakazono, Akira Kurozuka, Toshiaki Horie
  • Patent number: 9261669
    Abstract: A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.
    Type: Grant
    Filed: February 16, 2012
    Date of Patent: February 16, 2016
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Toshiaki Horie, Shinsuke Nakazono, Soichiro Hiraoka, Yuta Yamamoto, Kazuki Komaki
  • Patent number: 9042689
    Abstract: An optical switch includes: a semiconductor substrate, including a first rotation part and a first torsion beam disposed at two ends of the first rotation part, where the first torsion beam is configured to drive the first rotation part to rotate; a microreflector, disposed on a surface of the first rotation part of the semiconductor substrate; a first latching structure, disposed on a surface of the first torsion beam, the first latching structure including a form self remolding (FSR) material layer and a thermal field source, where the thermal field source is configured to provide a thermal field for the FSR material layer and the FSR material layer is configured to undergo form remolding under the thermal field, so as to latch the first rotation part and the microreflector in a position after rotation.
    Type: Grant
    Filed: September 4, 2012
    Date of Patent: May 26, 2015
    Assignee: Huawei Technologies Co., Ltd.
    Inventors: Qinghua Chen, Haixia Zhang, Wengang Wu, Jun Zhao, Yunsheng Wen
  • Patent number: 9025228
    Abstract: An optical reflecting device includes a fixed frame, a pair of first oscillation parts, a movable frame, a pair of second oscillation parts, and a mirror part. One-side ends of the first oscillation parts are connected to the inside of the fixed frame. The movable frame is connected to and held by the other-side ends of the pair of first oscillation parts to be pivotable. One-side ends of the pair of second oscillation parts are connected to the inside of the movable frame and the pair of second oscillation parts are disposed to be substantially perpendicular to the pair of first oscillation parts. The mirror part is connected to and held by the other-side ends of the pair of second oscillation parts to be pivotable. The first oscillation parts have a meandering shape in which a plurality of straight portions and a plurality of folded portions are formed, and a stepped structure portion is provided in part of the folded portion.
    Type: Grant
    Filed: January 7, 2015
    Date of Patent: May 5, 2015
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Toshiaki Horie, Shinsuke Nakazono, Soichiro Hiraoka, Shigeo Furukawa, Yuta Yamamoto, Kazuki Komaki, Masaki Tada
  • Publication number: 20150116806
    Abstract: An optical scanner includes: a movable plate which includes a light reflection unit; a first torsion bar which oscillatably supports the movable plate around a first axis; a first displacement member which is connected to the first torsion bar; a second torsion bar which oscillatably supports the first displacement member around a second axis; a second displacement member which is connected to the second torsion bar; and an actuator which is installed on the second displacement member and applies a displacement to the second displacement member so as to apply torsional deformation and bending deformation to the second torsion bar, in which the first displacement member includes a frame member surrounding the movable plate, and a damper which has a smaller thickness than that of the frame member and extends in a direction intersecting with a direction in which the second torsion bar extends from the frame member.
    Type: Application
    Filed: October 28, 2014
    Publication date: April 30, 2015
    Inventors: Yasushi MIZOGUCHI, Hisako KOJIMA
  • Publication number: 20150062677
    Abstract: A micromechanical component and a method for producing a micromechanical component are described. The component has: a frame; a plate spring that is connected to the frame and that has a front side and a rear side facing away from the front side; a mirror element that is situated on the front side of the plate spring and is connected to the front side of the plate spring in such a way that the mirror element is suspended on the frame so as to be capable of displacement; and at least one piezoelectric strip that is connected to the rear side of the plate spring; the plate spring being elastically deformable through the application of an electrical voltage to the at least one piezoelectric strip in order to displace the mirror element.
    Type: Application
    Filed: August 28, 2014
    Publication date: March 5, 2015
    Applicant: ROBERT BOSCH GMBH
    Inventors: Simon ARMBRUSTER, Helmut GRUTZECK, Frank SCHATZ, Joerg MUCHOW, Frederic Njikam NJIMONZIE, Johannes BAADER, Kerrin DOESSEL, Rainer STRAUB
  • Publication number: 20150036202
    Abstract: Provided is an optical scanning device that can be downsized and improve the reading rate of a laser-type image reading system. This is an optical scanning device that includes a torsion beam, and a variable focus mirror that is supported by the torsion beam. Furthermore, the variable focus mirror is supported at two symmetrical positions with respect to the axis of rotation of the torsion beam.
    Type: Application
    Filed: October 17, 2014
    Publication date: February 5, 2015
    Inventors: Naruki Suzuki, Takayuki Wakabayashi, Katsumi Arai
  • Patent number: 8941905
    Abstract: An optical deflector is provided which can effectively suppress occurrence of a ringing phenomenon when a piezoelectric actuator is driven with a voltage signal of a sawtooth waveform. An optical deflector A1 includes a control circuit 20 that detects a mechanical natural frequency relevant to swinging about a second axis X2 of a movable part 9. The control circuit 20 applies a voltage signal of a sawtooth waveform from which the natural frequency and a harmonic component thereof are removed to outside piezoelectric actuators 10a and 10b. The control circuit 20 removes a frequency component, which is equal to or greater than a second threshold value G2 within a predetermined frequency range out of frequency components of a voltage signal output from a detecting piezoelectric body 62, from a drive voltage.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: January 27, 2015
    Assignee: Stanley Electric Co., Ltd.
    Inventors: Takanori Aimono, Yoshiaki Yasuda
  • Publication number: 20150021483
    Abstract: A vibrating mirror element includes a drive control portion configured to control the driving of a correction drive portion to keep the turning angle velocity of a mirror portion substantially constant by oscillating the mirror portion about an axis at a non-resonance frequency in a direction opposite to a direction in which a resonant drive portion oscillates the mirror portion.
    Type: Application
    Filed: June 12, 2014
    Publication date: January 22, 2015
    Inventor: Manabu MURAYAMA
  • Patent number: 8937757
    Abstract: In an optical deflector apparatus, an optical deflector chip includes a mirror, an actuator adapted to rock the mirror, and first pads on a front surface of the optical deflector chip and connected to the actuator. A first substrate includes second pads on a back surface of the first substrate, and an opening is formed in the first substrate. The front surface of the optical deflector chip is adhered to the back surface of the first substrate in such a way that the first pads of the optical deflector chip are in contact with respective ones of the second pads of the first substrate and the mirror opposes the opening. A back surface of said optical deflector chip is adhered to a front surface of a second substrate.
    Type: Grant
    Filed: September 11, 2012
    Date of Patent: January 20, 2015
    Assignee: Stanley Electric Co., Ltd.
    Inventor: Yoshiaki Yasuda
  • Publication number: 20140355089
    Abstract: In a MEMS device (1), a first drive portion (40) is divided into a first drive section (41) and a second drive section (42). A second drive portion (50) is divided into a third drive section (51) and a fourth drive section (52). The first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline an optical component (10).
    Type: Application
    Filed: January 8, 2013
    Publication date: December 4, 2014
    Inventors: Manabu Murayama, Kouichi Kugo, Naoki Inoue, Hitoshi Fujii
  • Publication number: 20140355088
    Abstract: In an optical deflector including a mirror, a frame, torsion bars, first and second piezoelectric actuators coupled to both of the torsion bars, and first and second coupling bars, each of the first and second piezoelectric actuators is divided into first, second and third areas in accordance with a polarization polarity distribution obtained by performing a simulation upon the optical deflector where piezoelectric portions with no slits are hypothetically provided in the first and second piezoelectric actuators while a predetermined rocking operation is performed upon the mirror. First piezoelectric portions are formed in the first and third areas of the first piezoelectric actuator, and second piezoelectric portions are formed in the first and third areas of said second piezoelectric actuator. A first drive voltage applied to the first piezoelectric portions is opposite in phase to a second drive voltage applied to the second piezoelectric portions.
    Type: Application
    Filed: May 20, 2014
    Publication date: December 4, 2014
    Applicant: STANLEY ELECTRIC CO., LTD.
    Inventors: Yoshiaki YASUDA, Masanao TANI
  • Patent number: 8873121
    Abstract: Disclosed are an optical probe using a sensor and a method for controlling the same. The optical probe includes: an optical converter to change a light path of light generated from a light source; a vibrator to convert an electrical signal into a mechanical motion; a transmission member to transmit the motion of the vibrator to the optical converter; a position sensor to sense the position of the optical converter; and a controller to adjust the position of the optical converter by controlling the vibrator based on the position sensed by the position sensor.
    Type: Grant
    Filed: May 21, 2012
    Date of Patent: October 28, 2014
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: In Hee Shin, Hyun Seo Kang, Young Sun Kim, Hyoung Jun Park, Kwon Seob Lim, Jong Jin Lee
  • Publication number: 20140293246
    Abstract: A vibrating mirror element includes a mirror portion including a reflection surface reflecting light, a supporting portion connected to the mirror portion, supporting the mirror portion to be capable of vibrating about an axis line, and a drive portion connected with the supporting portion, drivingly vibrating the mirror portion through the supporting portion. The mirror portion is formed such that at least the reflection surface is in a curved shape.
    Type: Application
    Filed: March 25, 2014
    Publication date: October 2, 2014
    Applicant: Funai Electric Co., Ltd.
    Inventor: Seiji TAKEMOTO
  • Patent number: 8847113
    Abstract: A laser processing system includes a first positioning system for imparting first relative movement of a beam path along a beam trajectory with respect to a workpiece, a processor for determining a second relative movement of the beam path along a plurality of dither rows, a second positioning system for imparting the second relative movement, and a laser source for emitting laser beam pulses. The system may compensate for changes in processing velocity to maintain dither rows at a predetermined angle. For example, the dither rows may remain perpendicular to the beam trajectory regardless of processing velocity. The processing velocity may be adjusted to process for an integral number of dither rows to complete a trench. A number of dither points in each row may be selected based on a width of the trench. Fluence may be normalized by adjusting for changes to processing velocity and trench width.
    Type: Grant
    Filed: October 24, 2011
    Date of Patent: September 30, 2014
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Mark A. Unrath, Andrew Berwick, Alexander A. Myachin
  • Publication number: 20140253993
    Abstract: A light field display device comprising an array of light field display elements, each display element comprising: a beam generator for generating an output beam of light; a radiance modulator for modulating the radiance of the beam over time; a focus modulator for modulating the focus of the beam over time; and a scanner for scanning the beam across a two-dimensional angular field, the scanner comprising a biaxial electromechanical scanning mirror comprising: a mirror, a platform, an inner frame, and an outer frame; the mirror attached to the platform via a post, the platform attached to the inner frame via a first pair of hinges, and the inner frame attached to the outer frame via a second pair of hinges; the first pair of hinges arranged substantially orthogonally to the second pair of hinges, thereby to allow biaxial movement of the mirror; the extent of the mirror larger than the extent of the inner frame.
    Type: Application
    Filed: May 24, 2014
    Publication date: September 11, 2014
    Inventor: Paul Lapstun
  • Patent number: 8792151
    Abstract: An optical reflection element includes a frame, a meandrous vibrating part having an outer end connected with an inside of the frame, and a mirror part supported by an inner end of the meandrous vibrating part. The meandrous vibrating part has a meandrous shape that includes curved portions and vibrating beams alternately connected with the curved portions. A curvature of respective one of the curved portions is smaller than a curvature of at least one of the curved portions which is located closer to the inner end than the respective one of the curved portions. This optical reflection element has a large deflection angle of the mirror part.
    Type: Grant
    Filed: March 24, 2011
    Date of Patent: July 29, 2014
    Assignee: Panasonic Corporation
    Inventors: Shinsuke Nakazono, Toshiaki Horie, Soichiro Hiraoka, Yuta Yamamoto, Masaki Tada, Kazuki Komaki, Kiyomi Furukawa
  • Patent number: 8790936
    Abstract: A wafer-level optical deflector assembly is formed on a front surface side of a wafer. Then, the front surface side of the wafer is etched by using elements of the wafer-level optical deflector assembly, to form a front-side dicing street. Then, a transparent substrate with an inside cavity is adhered to the front surface side of the wafer. Then, a second etching mask is formed on a back surface side of the wafer. Then, the back surface side of the wafer is etched to create a back-side dicing street. Then, an adhesive sheet with a ring-shaped rim is adhered to the back surface side of the wafer. Then, the transparent substrate is removed. Finally, the ring-shaped rim is expanded to widen the front-side dicing street and the back-side dicing street to pick up optical deflectors one by one from the wafer.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: July 29, 2014
    Assignee: Stanley Electric Co., Ltd.
    Inventor: Yoshiaki Yasuda
  • Patent number: 8786926
    Abstract: An optical deflector includes a mirror, a movable frame for supporting the mirror, a support body surrounding the movable frame, and a first group of piezoelectric actuators and a second group of piezoelectric actuators alternating with the first group of piezoelectric actuators. A driver applies a first drive voltage having first saw-tooth waves to the first group of piezoelectric actuators, and applies a second drive voltage having second saw-tooth waves opposite in phase with the first saw-tooth waves to the second group of piezoelectric actuators. A difference in phase between the first and second saw-tooth waves is a predetermined value to suppress resonation of harmonic frequency components of the first and second drive voltages with a natural frequency of a mechanically-vibrating system of the mirror with respect to the axis thereof depending upon the piezoelectric actuators.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: July 22, 2014
    Assignee: Stanley Electric Co., Ltd.
    Inventor: Takanori Aimono
  • Publication number: 20140198259
    Abstract: A vibrating mirror device includes a mirror portion, a driving portion including a detecting electrode that detects an amount of deformation of a piezoelectric element when driving the mirror portion by applying a voltage to cause the piezoelectric element to deform, an insulating layer formed on a top face of the piezoelectric element, and a first lead interconnection that is formed on the top face of the insulating layer, that contacts the detecting electrode, and that extends to a region outside of the driving portion.
    Type: Application
    Filed: December 18, 2013
    Publication date: July 17, 2014
    Applicant: FUNAI ELECTRIC CO., LTD.
    Inventors: Manabu Murayama, Kouichi Kugo, Naoki Inoue
  • Patent number: 8746898
    Abstract: A projection apparatus includes a shutter mechanism to prevent light from reaching an image plane during calibration of light sources. The shutter mechanism may include liquid crystal material that exhibits an effective index of refraction that varies with applied voltage. During calibration, a light beam is shuttered, light sources are driven by calibration data, and optical power is measured.
    Type: Grant
    Filed: May 7, 2012
    Date of Patent: June 10, 2014
    Assignee: Microvision, Inc.
    Inventors: Joshua O. Miller, Scott Woltman
  • Patent number: 8717638
    Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable section which includes the light reflecting section and can be displaced; two link sections connected to positions of ends of the movable section, the positions facing each other; a supporting section supporting the link sections; and a displacement providing section turning the two link sections, wherein each link section includes a turnable drive section, and a shaft section connecting the movable section and the drive section and bending in a thickness direction of the movable section by turning of the drive section.
    Type: Grant
    Filed: February 10, 2011
    Date of Patent: May 6, 2014
    Assignee: Seiko Epson Corporation
    Inventor: Yasushi Mizoguchi
  • Patent number: 8693074
    Abstract: An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 ?m.
    Type: Grant
    Filed: October 30, 2012
    Date of Patent: April 8, 2014
    Assignee: STMicroelectronics International N.V.
    Inventors: Moshe Medina, Pinchas Chaviv, Yaron Fein
  • Publication number: 20140085694
    Abstract: A piezoelectric actuator includes a plurality of piezoelectric layers, a plurality of electrodes between which each of the piezoelectric layers is placed so that the electrodes and the piezoelectric layers alternate with each other, and a substrate on which the plurality of piezoelectric layers and the plurality of electrodes are formed.
    Type: Application
    Filed: September 20, 2013
    Publication date: March 27, 2014
    Applicant: MITSUMI ELECTRIC CO., LTD.
    Inventors: Hisanori AGA, Ayu Sugiyama
  • Patent number: 8681404
    Abstract: An actuator includes: a pair of supporting beams to support an object from both sides thereof in a direction parallel to an axis of rotation; a pair of movable beams to sandwich the object and the pair of supporting beams from both sides in a direction perpendicular to the axis of rotation; a plurality of beams to sandwich the pair of movable frames from both sides thereof in the direction perpendicular to the axis of rotation and support the object; a resonant drive source to apply bending vibration to the pair of movable frames and drive the object around the axis of rotation when a resonant drive operation is performed; and a non-resonant drive source to apply bending vibration to the plurality of beams and tilt and drive the object around a second axis of rotation perpendicular to the axis of rotation when a non-resonant drive operation is performed.
    Type: Grant
    Filed: September 19, 2013
    Date of Patent: March 25, 2014
    Assignee: Mitsumi Electric Co., Ltd.
    Inventors: Tsukasa Yamada, Masato Ehara
  • Publication number: 20140071507
    Abstract: In an optical deflector including a mirror, a support frame surrounding the mirror, at least one torsion bar arranged along an axis of the mirror having an end coupled to an outer circumference of the mirror, a pair of piezoelectric actuators arranged between the support frame and the torsion bar, and a piezoelectric sensor inserted between the torsion bar and one of the piezoelectric actuators, the piezoelectric sensor includes at least one piezoelectric sensor element having a width being smaller than two-fifths of a width of the one of the piezoelectric actuators and being arranged at a wide portion within two-fifths of the width from an inner end of the one of the piezoelectric actuators.
    Type: Application
    Filed: September 10, 2013
    Publication date: March 13, 2014
    Applicant: STANLEY ELECTRIC CO., LTD.
    Inventor: Takanori AIMONO
  • Patent number: 8665507
    Abstract: The present invention is directed to a two-dimensional scanning arrangement for a laser vein-illumination device that includes a base and a frame connected to the base using at least one flexible hinge. The hinge allows the frame to move angularly with respect to the base in a first direction. The invention further includes a means for exciting angular oscillations of the frame at or near said frame's resonant frequency. An elastic torsional element having a proximal end rigidly attached to said frame and a distal end rigidly attached to a mirror is also included. The torsional element allows the mirror to move angularly with respect to the frame in a second direction, generally perpendicular to the first direction. There may also be a means for exciting the angular oscillations of the mirror. The invention also includes a device for optically inspecting confined spaces having one or more small access orifices.
    Type: Grant
    Filed: October 28, 2010
    Date of Patent: March 4, 2014
    Inventors: Vincent Luciano, Ron Goldman, Fred Wood
  • Patent number: 8649080
    Abstract: In a two-dimensional optical deflector having a mirror and a support body surrounding the mirror, first and second piezoelectric actuators of a meander-type are provided opposite to each other with respect to a first axis of the mirror. Each of the first second piezoelectric actuators includes a plurality of piezoelectric cantilevers folded at every piezoelectric and connected from the support body to the mirror. Each of the piezoelectric cantilevers are in parallel with the first axis. Each of the piezoelectric cantilevers includes first and second piezoelectric cantilever elements in parallel with each other combined by a substrate. The second piezoelectric cantilever elements are divided into a first group of piezoelectric cantilever elements and a second group of piezoelectric cantilever elements alternating with the first group of piezoelectric cantilever elements.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: February 11, 2014
    Assignee: Stanley Electric Co., Ltd.
    Inventor: Masanao Tani
  • Patent number: 8649079
    Abstract: A mirror driving device of an aspect can include: a mirror part; a pair of inner actuator parts; a pair of outer actuator parts; fixing and supporting parts; an inner actuator driving voltage supply part; and an outer actuator driving voltage supply part. A driving voltage with a frequency inducing oscillation of the mirror part in a rotating direction of the mirror part associated with resonance drive of the corresponding actuator parts can be supplied from one driving voltage supply part of the inner actuator driving voltage supply part and the outer actuator driving voltage supply part to the inner actuator parts or the outer actuator parts corresponding to the one driving voltage supply part. Simultaneously with the resonance drive, a driving voltage for inclining the mirror part without exciting resonance drive can be supplied from the other driving voltage supply part to corresponding actuator parts.
    Type: Grant
    Filed: March 29, 2012
    Date of Patent: February 11, 2014
    Assignee: FUJIFILM Corporation
    Inventor: Takayuki Naono
  • Patent number: 8649078
    Abstract: A driver for driving an optical deflector includes a mirror, a movable frame for supporting the mirror, a support body surrounding the movable frame, and a first group of piezoelectric actuators and a second group of piezoelectric actuators alternating with the first group of piezoelectric actuators. A first drive voltage for the first group of piezoelectric actuators has first repeated waves each with a first rising period. A second drive voltage for the second group of piezoelectric actuators has second repeated waves each with a second falling period corresponding to the first rising period of the first drive voltage and a second rising period corresponding to the first falling period of the first drive voltage. Frequencies of the first and second repeated waves exclude natural frequencies of a mechanically-vibrating system of the mirror with respect to the axis thereof depending upon the piezoelectric actuators.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: February 11, 2014
    Assignee: Stanley Electric Co., Ltd.
    Inventors: Takanori Aimono, Yoshiaki Yasuda
  • Publication number: 20140016170
    Abstract: An actuator includes: a pair of supporting beams to support an object from both sides thereof in a direction parallel to an axis of rotation; a pair of movable beams to sandwich the object and the pair of supporting beams from both sides in a direction perpendicular to the axis of rotation; a plurality of beams to sandwich the pair of movable frames from both sides thereof in the direction perpendicular to the axis of rotation and support the object; a resonant drive source to apply bending vibration to the pair of movable frames and drive the object around the axis of rotation when a resonant drive operation is performed; and a non-resonant drive source to apply bending vibration to the plurality of beams and tilt and drive the object around a second axis of rotation perpendicular to the axis of rotation when a non-resonant drive operation is performed.
    Type: Application
    Filed: September 19, 2013
    Publication date: January 16, 2014
    Applicant: MITSUMI ELECTRIC CO., LTD.
    Inventors: Tsukasa YAMADA, Masato Ehara
  • Publication number: 20140002877
    Abstract: An optical device includes a soft polymer film having a first and second surface. A first compliant electrode is connected to the first surface and a second compliant electrode is connected to the second surface. A rigid optical element is connected on the first and/or second surface or integrated into the polymer film.
    Type: Application
    Filed: August 30, 2013
    Publication date: January 2, 2014
    Applicant: OPTOTUNE AG
    Inventor: Manuel Aschwanden
  • Patent number: 8610983
    Abstract: An actuator which tilts and drives an object to be driven around an axis of rotation includes: a pair of supporting beams arranged to support the object to be driven from both sides thereof in a direction parallel to the axis of rotation; a pair of movable beams arranged to sandwich the object to be driven and the pair of supporting beams from both sides in a direction perpendicular to the axis of rotation; a drive source arranged to apply bending vibration to the movable frames; and a pair of connection parts arranged to connect the movable frames and end portions of the supporting beams by a multiple-beam structure, convert the bending vibration into torsional vibration, and transmit the torsional vibration to the supporting beams.
    Type: Grant
    Filed: April 21, 2010
    Date of Patent: December 17, 2013
    Assignee: Mitsumi Electric Co., Ltd.
    Inventors: Tsukasa Yamada, Masato Ehara
  • Patent number: 8579443
    Abstract: Briefly, in accordance with one or more embodiments, a scanned beam display, comprises a light source to generate a beam to be scanned and a scanning platform to scan the beam into an exit cone. The scanning platform receives the beam at a selected feed angle, and the scanning platform has a surface structure to redirect the exit cone at an exit angle that is less than the feed angle.
    Type: Grant
    Filed: June 30, 2010
    Date of Patent: November 12, 2013
    Assignee: Microvision, Inc.
    Inventors: Joshua M. Hudman, Wyatt O. Davis, Mark O. Freeman, Mark P. Helsel, David Roy Bowman, Kelly D. Linden
  • Patent number: 8570637
    Abstract: A micromechanical element includes a plate-shaped micromechanical functional element, an inner frame and an outer frame. Thereby, a curvature of a main face of the plate-shaped micromechanical functional element is variable. The inner frame encloses the plate-shaped micromechanical functional element along an edge of the main face and is connected to the plate-shaped micromechanical functional element via a plurality of connecting pieces. The outer frame is connected to the inner frame via at least two holding elements. The inner frame is connected to the plate-shaped micromechanical functional element and the outer frame, such that a first angle between the main face of the plate-shaped micromechanical functional element and a main face of the inner frame is smaller than a second angle between a main face of the outer frame and the main face of the inner frame, when the main face of the plate-shaped micromechanical functional element is in a bent state.
    Type: Grant
    Filed: April 21, 2011
    Date of Patent: October 29, 2013
    Assignee: Fraunhofer-Gesellschaft Foerderung der Angewandten Forschung E.V.
    Inventors: Holger Conrad, Denis Jung
  • Publication number: 20130271804
    Abstract: A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.
    Type: Application
    Filed: February 16, 2012
    Publication date: October 17, 2013
    Applicant: PANASONIC CORPORATION
    Inventors: Toshiaki Horie, Shinsuke Nakazono, Soichiro Hiraoka, Yuta Yamamoto, Kazuki Komaki
  • Patent number: 8559089
    Abstract: An optical scanner capable of preventing breakage of a shaft section due to stress concentration is provided. A mirror frame 13 is shaped so as to enclose a mirror 11, and holds the mirror 11, via torsion bars 121 and 122, so as to be vibratable. A unimorph 15 is constituted by four unimorphs 151, 152, 153, and 154 formed on upper left, lower left, upper right, and lower right sides, and holds the mirror frame 13, via a shaft section 14, so as to be vibratable. The shaft section 14 has a connection section 144. On the mirror frame 13, an adjustment member 16 for increasing a moment of inertia m1 of the mirror frame 13 is provided.
    Type: Grant
    Filed: September 24, 2009
    Date of Patent: October 15, 2013
    Assignee: Konica Minolta Opto, Inc.
    Inventors: Naoki Kubo, Masayuki Ueyama