Abstract: Dual axis, beam-steering devices are disclosed. An exemplary device includes a support platform having a top surface. A reflective surface is coupled to the top surface of the support platform. First and second galvanometers are coupled via respective linkages to the support platform such that the first galvanometer rotates the support platform about a first rotational axis, and the second galvanometer rotates the support platform about a second rotational axis that is orthogonal to the first rotational axis. The support platform can be simultaneously rotated with respect to both the first rotational axis and the second rotational axis to steer a beam of electromagnetic energy (e.g. light beam) reflected by the reflective surface.

Abstract: A large micro-mirror, e.g. 3 mm by 4 mm, in accordance with the present invention has sufficient rigidity to ensure a low mirror curvature, e.g. a radius of curvature greater than 5 meters, and a low mass in order to ensure a high oscillation frequency, e.g. greater than 1000 Hz. A method of making the micro-mirror utilizes bulk micro-machining technology, which enables the manufacture of a honeycomb structure sandwiched between two solid and smooth silicon layers without any indentations or holes. The honeycomb sandwich structure provides the rigidity and low mass needed to obtain a micro-mirror with a low mirror curvature and high resonant frequency.

Abstract: An actuator, includes: a weight part; a supporting part supporting the weight part; a connecting part coupling the weight part rotatable to the supporting part and having an elastic part; a driving member for driving and rotating the weight part; and a semiconductor circuit for driving the weight part. The driving member is operated to torsionally deform the elastic part and rotate the weight part. The elastic part has a first silicon part that is mainly made of silicon and a first resin part that is mainly made of resin and coupled to the first silicon part. The supporting part has at least a second silicon part made mainly of silicon and coupled to the first silicon part of the elastic part. The semiconductor circuit is provided on the second silicon part of the supporting part.

Abstract: An optical scanning device includes a dot clock generator which generates a dot clock having a dot clock cycle corresponding to a scanning direction of an optical flux by dividing master clocks which constitute basic clocks with frequency-dividing-number corresponding to a scanning position. The dot clock generator changes, with respect to a group of dot clocks which is formed of plural sets of dot clocks in which a frequency-dividing-number sequence pattern of the set of dot clocks which is constituted of two or more continuous dot clocks is repeated plural times on one scanning line, the frequency-dividing-number sequence pattern of each set of dot clocks while maintaining a total value of frequency dividing numbers necessary for generating each set of dot clocks at a constant value.

Abstract: The object of the present invention is to provide an optical scanning apparatus which is not limited in the disposition of a scanning device, can reduce the adherence of dust to each member of the scanning device, and is enhanced in the reliability of the scanning device, and an image displaying apparatus having the same. The optical scanning apparatus includes a housing for containing and holding therein a scanning device provided with a movable mirror, an elastic supporting portion for supporting the movable mirror swingably about a swinging center, and a supporting base for supporting the elastic supporting portion, an optical member OE constituting a first optical system for directing a beam to the scanning device in the housing, and an optical member OX constituting a second optical system for emerging the beam passed through the scanning device.

Abstract: An optical deflector and a light beam scanning apparatus characterized by stable amplitude and speed wherein the fluctuation of the resonant frequency resulting from various factors such as a temperature change is corrected to a predetermined level, and the amplitude of the resonant scanner is kept to a predetermined level. An electromechanical transducer is used as a control element to control the potential difference resulting from the electric charge occurring in the control element caused by rotational vibration of the optical deflector, whereby the fluctuation of the resonant frequency resulting from various factors such as a temperature change is corrected to a predetermined level and the amplitude of the resonant scanner is kept at a predetermined level. This arrangement provides an optical deflector and a light beam scanning apparatus characterized by stable amplitude and speed.

Abstract: A MEMS scan controller with inherent frequency and a method of control thereof applied to controllers of a MEMS mirror of bidirectional scanning laser printers are disclosed. The amplitude of the MEMS mirror is adjusted by using the inherent frequency so that scan data string is sent within effective scanning window with preset frequency of a laser source of the laser printer and a certain time interval. Thus the controller is simplified and the high precision scanning is achieved.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one end of said first piezoelectric element being connected to said torsion bar, the other end of the first piezoelectric element being connected to and supported by said support, said first piezoelectric element having at least one piezoelectric cantilever, the cantilever including a supporting body and a piezoelectric body formed on the supporting body to exhibit bending deformation due to piezoelectricity when a driving voltage is applied to the piezoelectric body, said piezoelectric element rotarily driving said mirror through said torsion bar when said driving voltage is applied; and a second piezoelectric element, one end of said second piezoelectric element being connected to said torsion bar, the other end of the second piezoelectric element being connected to and supported by said mirror.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.