Reflective Element (e.g., Mirror, Reflector, Etc.) Patents (Class 359/201.2)
  • Patent number: 11422363
    Abstract: The present invention is intended to provide an adaptive optics system and an optical device that allow correction of wavefront phase aberration with higher accuracy than before and have a wider correction range than the conventional ones, regardless of the distance between the observation target and the fluctuation layer, and the size of the observation target. An adaptive optics system includes: a wavefront phase modulator that makes aberration correction to incident light and emits the corrected light; and an imaging-conjugated position adjustment mechanism that adjusts freely within a specimen the position of a surface imaging-conjugated with a fluctuation correction surface formed by the wavefront phase modulator. The imaging-conjugated position adjustment mechanism adjusts the fluctuation correction surface to be imaging-conjugated with a fluctuation layer existing in the specimen.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: August 23, 2022
    Assignee: INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION NATIONAL INSTITUTES OF NATURAL SCIENCES
    Inventors: Masayuki Hattori, Yosuke Tamada, Takashi Murata, Yasuhiro Kamei, Mitsuyasu Hasebe, Yutaka Hayano, Shin Oya
  • Patent number: 11251320
    Abstract: A layered structure used for detecting incident light includes a substrate having a surface with a high Miller index crystal orientation and a superlattice structure formed over the substrate at the surface. The superlattice structure is aligned to the high Miller index crystal orientation and exhibits a red-shifted long wave infrared response range based on the crystal orientation as compared to a superlattice structure formed over a substrate at a surface with a (100) crystal orientation.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: February 15, 2022
    Assignee: IQE plc
    Inventors: Dmitri Lubyshev, Joel Mark Fastenau, Amy Wing Kwan Liu, Michael Vincent Kattner, Philip Lee Frey, Scott Alan Nelson, Mark Justin Furlong
  • Patent number: 11181734
    Abstract: Embodiments of the disclosure provide micromachined mirror assemblies and hybrid driving methods thereof. In one example, a micromachined mirror assembly includes a base and an array of micro mirrors affixed on the base. The base is configured to tilt around a base tilting axis. Each micro mirror in the array of micro mirrors is configured to tilt around a respective mirror tilting axis. Each of the mirror tilting axes is parallel to one another and is nonparallel to the base tilting axis.
    Type: Grant
    Filed: December 18, 2018
    Date of Patent: November 23, 2021
    Assignee: BEIJING VOYAGER TECHNOLOGY CO., LTD.
    Inventors: Qin Zhou, Youmin Wang
  • Patent number: 11016195
    Abstract: An aperture array comprises apertures arranged over one or more dimensions. Each aperture is configured to receive a respective portion of a received optical wavefront. Each aperture is coupled to a respective optical mixer that coherently interferes the respective portion of the received optical wavefront with a respective local oscillator optical wave. A processing module is configured to process electrical signals detected from outputs of the optical mixers, including: for each optical mixer, determining at least one phase/amplitude information from at least one electrical signal detected from at least one output of that optical mixer, determining direction-based information, associated with a subset of the field of view, based on phase/amplitude information derived from at least two optical mixers of the plurality of optical mixers, and determining distance information from the direction-based information.
    Type: Grant
    Filed: April 23, 2020
    Date of Patent: May 25, 2021
    Assignee: MOURO LABS, S.L.
    Inventor: Eduardo Margallo Balbás
  • Patent number: 10994652
    Abstract: The present invention provides an emergency notification device for a vehicle that includes: a base; a support pole composed of a plurality of pole rods sequentially connected to the base; and a light emitting frame unit connected to the pole rods to be unfolded or folded in accordance with moving up or down of the pole rods, in which the plurality of pole rods gradually changes in diameter in an antenna type to be sequentially accommodated in a pole rod having the largest diameter or unfolded from the pole rod having the largest diameter, and the plurality of pole rods are coupled with an elastic member therebetween when accommodated, and raised by elasticity of the elastic members when the elastic members are not locked.
    Type: Grant
    Filed: August 7, 2018
    Date of Patent: May 4, 2021
    Inventor: Jae Bok Kim
  • Patent number: 10948713
    Abstract: A laser scanner determines the direction and distance of one or more targets by emitting two substantially parallel beams and receiving respective return beams. Components for handling the received beams are affixed to a monolithic block to ensure fixed relative placement. The direction of the target is determined using an optical encoder to reduce the timing window for interpolation to a fraction of the time it takes for the scanner to make a full revolution. A PLL trained by recent segment timing further improves accuracy and precision. A detection algorithm adapts detection thresholds for the different signatures of return signals depending on the distance to the target. Distance calculations are also adjusted for thermal expansion of the scanner components by including a temperature-variant thermometer output signal in the distance calculation algorithm.
    Type: Grant
    Filed: July 16, 2018
    Date of Patent: March 16, 2021
    Assignee: Vehicle Service Group, LLC
    Inventors: Steve Taylor, Robin Knoke, Merritt Houldson
  • Patent number: 10871656
    Abstract: A beam diameter expanding device includes a first optical element and a second optical element. The first optical element expands a beam diameter of a light beam entering through a first incident face by expanding in a first direction, and emits the expanded light beam from a first emission face. The second optical element expands a beam diameter of the light beam that entered through a second incident face in a state expanded in beam diameter in the first direction by the first optical element, by expanding in a second direction, and emits the expanded light beam from a second emission face. A width of the first incident face in the second direction (the direction of beam diameter expansion by the second optical element) is narrower than a width of the second incident face in the first direction (the direction of beam diameter expansion by the first optical element).
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: December 22, 2020
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Mitsutaka Ide
  • Patent number: 10325560
    Abstract: A head wearable display device, a method, and a system. The head wearable display device may include a visor portion implemented as a pupil-expanding waveguide, a processor, an image illumination source communicatively coupled to the processor and configured to output optical signals, an optical pathway, and column injectors implemented in and along the optical pathway. Each of the column injectors may be associated with a pixel column. Each of the column injectors may be configured to be in a pass-through state or a deflect state. When a given column injector is in the pass-through state, the given column injector may allow optical signals to pass through the given column injector. When a particular column injector is in the deflect state, the particular column injector may be configured to deflect the optical signals into the visor portion causing a column of pixels to display in the visor portion.
    Type: Grant
    Filed: November 17, 2017
    Date of Patent: June 18, 2019
    Assignee: Rockwell Collins, Inc.
    Inventors: Carlo L. Tiana, Eric P. Stratton
  • Patent number: 10126673
    Abstract: A scanning optical apparatus includes a light source, a deflector and an imaging optical system. The deflector deflects a beam emitted from the light source to scan a scanning surface with the beam in a main scanning direction. The imaging optical system focuses the beam on the scanning surface. The imaging optical system includes a first lens having negative power in a sub scanning direction and a second lens having positive power in the sub scanning direction, in which the sub scanning direction is parallel to the scanning surface and perpendicular to the main scanning direction. The power ?1 of the first lens, the power ?2 of the second lens and a magnification ? in the sub scanning direction of the imaging optical system satisfy the conditions ?1.2??1/?2??0.9 and ?1.3????0.8.
    Type: Grant
    Filed: November 17, 2017
    Date of Patent: November 13, 2018
    Assignee: KONICA MINOLTA, INC.
    Inventors: Daisuke Kobayashi, Takashi Kurosawa, Naoki Tajima, Makoto Ooki, Hideo Uemura
  • Patent number: 9891436
    Abstract: A near eye or heads up display system includes a display engine, at least two optical waveguides, and a respective coating on at least one of the major surfaces of at least one of the waveguides. At least one such coating has a low reflectance for light within a specific wavelength range for the waveguide and incident on a major surface of the waveguide on which the coating is located at an angle below a low threshold angle relative to a normal, and has a high reflectance for light within the specific wavelength range for the waveguide that is incident on the major surface on which the coating is located at an angle above a high threshold angle relative to the normal.
    Type: Grant
    Filed: February 11, 2016
    Date of Patent: February 13, 2018
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: R. Andrew Wall, Tuomas Vallius, Pasi Pietila, Keita Oka
  • Patent number: 9857578
    Abstract: A laser scanning microscope for the acquisition of object images according to varied observation criteria. The microscope includes an illumination and detection unit, an illumination and a detection beam, a microscope objective, a scanning device with a scanning optical component and several scanners, with switching mirrors, each mirror with two switching positions, provided in the illumination and detection beams. Each switching position is assigned to one of several different, optically separate beam paths and each beam path defines a separate operating mode. A concave mirror for imaging a first scanner into at least one more scanner and vice versa is arranged in at least one of the beam paths.
    Type: Grant
    Filed: November 5, 2015
    Date of Patent: January 2, 2018
    Assignees: Carl Zeiss Microscopy GmbH, Carl Zeiss AG
    Inventors: Beate Boehme, Matthias Wald, Tiemo Anhut, Daniel Schwedt
  • Patent number: 9766442
    Abstract: A confocal scanner includes a first micro lens disk having a plurality of micro lenses arranged thereon, a second micro lens disk having a plurality of micro lenses, which is arranged in correspondence to an arrangement pattern of the first micro lens disk, and having a common rotation axis to the first micro lens disk, and a beam splitter configured to guide an illumination light, which is to be irradiated to an object, to the first micro lens disk, and to guide a return light from the object having passed through each micro lens of the first micro lens disk to the corresponding micro lens of the second micro lens disk. A numerical aperture of each micro lens arranged on the second micro lens disk is greater than a numerical aperture of each micro lens arranged on the first micro lens disk.
    Type: Grant
    Filed: December 7, 2015
    Date of Patent: September 19, 2017
    Assignee: Yokogawa Electric Corporation
    Inventor: Hiroyuki Sangu
  • Patent number: 9366857
    Abstract: The disclosure relates to a correction light device for the irradiation of optical elements of an optical arrangement, in particular a lens, such a microlithography lens having a correction light, which include at least one correction light source and at least one mirror arrangement that deflects the light from the correction light source in the beam path to the optical element such that at least part of at least one surface of at least one optical element of the optical arrangement are irradiated in a locally and/or temporally variable fashion. The correction light strikes the surface of the optical element at a flat angle such that the obtuse angle between the optical axis of the optical arrangement at the location of the optical element and the correction light beam is less than or equal to 105°.
    Type: Grant
    Filed: July 31, 2014
    Date of Patent: June 14, 2016
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Sascha Bleidistel, Manfred Maul
  • Publication number: 20150144608
    Abstract: A multi-beam laser processing system comprising a plurality of laser beams and a plurality of pairs of selectively rotatable mirrors for laser beam steering where each laser beam is independently steered by one pair of selectively rotatable mirrors. The plurality of pairs of mirrors are positioned adjacent to one another within a single main body. The main body is positioned directly opposing the beams, the mirrors directing each laser beam simultaneously to a selected location on a substrate. The main body comprises a plurality of vents; a plurality of passages; a plurality of openings; and a plurality of galvos nested densely within the main body. The galvos direct multiple laser beams to a substrate wherein the fields of view overlap and the laser beam focal point remains small and precise.
    Type: Application
    Filed: November 17, 2014
    Publication date: May 28, 2015
    Inventors: Daniel B. Miller, James J. Bucklew, Kyle Enloe, David Plourde, Brian Lindahl
  • Patent number: 9042689
    Abstract: An optical switch includes: a semiconductor substrate, including a first rotation part and a first torsion beam disposed at two ends of the first rotation part, where the first torsion beam is configured to drive the first rotation part to rotate; a microreflector, disposed on a surface of the first rotation part of the semiconductor substrate; a first latching structure, disposed on a surface of the first torsion beam, the first latching structure including a form self remolding (FSR) material layer and a thermal field source, where the thermal field source is configured to provide a thermal field for the FSR material layer and the FSR material layer is configured to undergo form remolding under the thermal field, so as to latch the first rotation part and the microreflector in a position after rotation.
    Type: Grant
    Filed: September 4, 2012
    Date of Patent: May 26, 2015
    Assignee: Huawei Technologies Co., Ltd.
    Inventors: Qinghua Chen, Haixia Zhang, Wengang Wu, Jun Zhao, Yunsheng Wen
  • Patent number: 9041990
    Abstract: A device (100) for variable deflection of light is described, encompassing a micromechanical mirror arrangement (14) having a plurality of light-reflecting mirror actuators (18, 20, 22, 24, 26), and a control unit (32) with which the mirror actuators (18, 20, 22, 24, 26) are controllable into different reflection positions in order to vary the light deflection. The device (100) has a back-reflection structure (60), systematically adapted to the mirror arrangement (14), for reflecting back onto another portion of the mirror actuators (18, 20, 22, 24, 26), in targeted fashion, the light reflected onto the back-reflection structure (60) from one portion of the mirror actuators (18, 20, 22, 24, 26).
    Type: Grant
    Filed: July 26, 2012
    Date of Patent: May 26, 2015
    Assignee: Leica Microsystems CMS GmbH
    Inventor: Frank Schreiber
  • Patent number: 9036243
    Abstract: On/off digital drive signals are used to create arbitrary spatial and temporal ribbon movement patterns in MEMS ribbon arrays.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: May 19, 2015
    Assignee: Alces Technology, Inc.
    Inventors: David M Bloom, Matthew A Leone
  • Publication number: 20150133899
    Abstract: An apparatus for ophthalmic procedures contains a source of aiming and treatment laser beams, folded mirrors and lens arrays to cause the formation of a static pupil on a delivery mirror for observation and treatment by an operator of the apparatus.
    Type: Application
    Filed: November 3, 2014
    Publication date: May 14, 2015
    Inventor: Jesse Peter Anderegg
  • Publication number: 20150085333
    Abstract: A retinal display projection device comprising a micro-projection component (2) arranged for projecting an image directly onto the retina of a user wearing the device, characterized in that said micro-projection component is arranged for projecting an image outside of the normal field of view of said user.
    Type: Application
    Filed: September 24, 2014
    Publication date: March 26, 2015
    Inventor: Olivier Theytaz
  • Patent number: 8988752
    Abstract: A beam control apparatus for an illumination beam includes an imaging illumination optical unit assembly for imaging an intermediate focus of the illumination beam onto an object field to be illuminated. A control component that influences a beam path of the illumination beam is displaceable in at least one degree of freedom by at least one displacement actuator. A position sensor device of the beam control apparatus detects a position of the intermediate focus. A control device of the beam control apparatus is signal-connected to the position sensor device and the displacement actuator. From an intermediate focus position signal received from the position sensor device, the control device calculates control signals for the displacement actuator and forwards the latter to the displacement actuator for controlling the position of the intermediate focus. This results in a beam control apparatus which makes well-controllable illumination possible together with a simple construction.
    Type: Grant
    Filed: November 14, 2012
    Date of Patent: March 24, 2015
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Marten Krebs, Gerhard Huber, Uwe Schellhorn, Joachim Stuehler
  • Publication number: 20150001396
    Abstract: A continuous scanning module is described, comprising: a polygonal scanning drum (9) rotating at substantially constant speed (f9) and provided with a plurality of first reflecting side faces (9.1-9.7) and at least one polygonal forward motion compensation-forward motion compensation drum (15) rotating synchronously with the scanning drum (9). The forward motion compensation drum (15) is provided with second reflecting side faces (15.1-15.7)) each of which receives an image from a corresponding first reflecting face of the scanning drum, and reflects it towards a scanning path.
    Type: Application
    Filed: January 9, 2013
    Publication date: January 1, 2015
    Inventor: Monica Olivieri
  • Patent number: 8922862
    Abstract: A magnetic force drive device (7) has the first movable part (100) and the first driving unit (200). The first movable part (100) has the first movable plate (111), and a permanent magnet (120) that is magnetized in a direction substantially parallel to the first movable plate (111), and is supported by the first frame body (112) and the first pair of beam parts (113), so as to be able to oscillate around the Y axis, which is substantially parallel to the first movable plate (111) and substantially perpendicular to the direction in which the permanent magnet (120) is magnetized. The first driving unit (200) has a yoke (210), and a coil (220) that magnetizes the yoke (210). The yoke (210) has the first end part (211a), and a second end part (212a) that is placed on substantially the opposite side of the first end part (211a) against one magnetic pole of the permanent magnet (120).
    Type: Grant
    Filed: February 17, 2011
    Date of Patent: December 30, 2014
    Assignee: NEC Corporation
    Inventors: Takeshi Honda, Nobuaki Takanashi
  • Patent number: 8922858
    Abstract: A motion control system and a method for biosensor scanning which scans a light beam spot over one or more of the biosensors supported by a microplate with an optical scanner system, the method including: defining a scan path for an optical scanner including selecting axes representing properties of the scan path and selecting a time series, calculating a piecewise polynomial function of time between each point in the time series; and scanning the light beam spot over one or more biosensors according to the defined scan path, as described herein.
    Type: Grant
    Filed: January 30, 2013
    Date of Patent: December 30, 2014
    Assignee: Corning Incorporated
    Inventor: Cameron John Tovey
  • Patent number: 8902485
    Abstract: A contrast enhancing system is provided comprising: a digital micromirror device (DMD); a light source; a first integrator that receives light from the light source, comprising lateral long and short dimensions, the lateral short dimension at a non-zero angle to the DMD tilt axis; a second integrator that receives and shapes light from the first integrator; a telecentric lens about midway between the integrators that generates fast and slow f-number directions of the light in angle space, respectively corresponding to the lateral long and short dimensions of the first integrator, the slow f-number direction correspondingly at the non-zero angle to the DMD tilt axis, thereby increasing dead-zones between adjacent ones of a DMD illumination path and DMD reflection paths for each of the on, flat and off-state positions; and, at least one optical component that focuses the light along the illumination path from the second integrator onto the DMD.
    Type: Grant
    Filed: November 29, 2012
    Date of Patent: December 2, 2014
    Assignee: Christie Digital Systems USA, Inc.
    Inventors: Mark Bird, John Domm
  • Patent number: 8873122
    Abstract: An imaging optical system includes a plurality of mirrors configured to image an object field in an object plane of the imaging optical system into an image field in an image plane of the imaging optical system. An illumination system includes such an imaging optical system. The transmission losses of the illumination system are relatively low.
    Type: Grant
    Filed: February 22, 2011
    Date of Patent: October 28, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Hans-Juergen Mann, Armin Schoeppach, Johannes Zellner
  • Patent number: 8866870
    Abstract: A method, apparatus, and system for controlling from a first location a laser at a second location are disclosed. Laser orientation data is determined at a first location. The laser orientation data is communicated to the second location. Video data is received from the second location that includes imagery of a laser beam emitted by a laser, and the imagery is presented on a display at the first location.
    Type: Grant
    Filed: October 20, 2011
    Date of Patent: October 21, 2014
    Assignee: Lockheed Martin Corporation
    Inventor: David A. Smith
  • Publication number: 20140293390
    Abstract: Disclosed herein is an image display apparatus, including: a light source; and a scanning section adapted to scan a light beam emitted from the light source; the scanning section including (a) a first mirror, (b) a first light deflection section, (c) a second mirror, and (d) a second light deflection section; the second light deflection section including an external light receiving face; the second light deflection section having a plurality of translucent films provided in the inside thereof; the translucent films having a light reflectivity R2 at a wavelength of the light beam which satisfies: R2?k×{(P2/t2)×tan(?2)}1/2 where k is a constant higher 0 but lower than 1, P2 an array pitch of the translucent films, t2 a thickness of the second light deflection section, and ?2 an angle formed between the light emitting face and the translucent films.
    Type: Application
    Filed: June 11, 2014
    Publication date: October 2, 2014
    Applicant: Sony Corporation
    Inventors: Kazuya Hayashibe, Hiroshi Tanaka, Teppei Imamura
  • Patent number: 8848269
    Abstract: According to the present invention there is provided a method of projecting an image, the method comprising the steps of, providing light signal which is configured such that it can be projected onto a display surface to display an image; oscillating a first reflective surface, to scan the light signal over the display surface, using an actuator which is in operable co-operation with the first reflective surface, by applying a first actuation signal to the first reflective surface, wherein a rise time or fall time of the first actuation signal is inversely proportional to a resonant frequency of oscillation of the first reflective surface.
    Type: Grant
    Filed: May 13, 2013
    Date of Patent: September 30, 2014
    Assignee: Lemoptix SA
    Inventors: Lucio Kilcher, Nicolas Abele
  • Patent number: 8844671
    Abstract: An apparatus for damping sound in the optical beam path of a microscope, having an acoustic insulation housing for encapsulating a sound-emitting component, preferably a rapidly moving or oscillating beam deflection means, in particular a resonantly oscillating mirror, the housing comprising at least one optical entrance/exit opening, is characterized in that the housing, preferably the opening of the housing, is embodied and/or configured in such a way that the sound otherwise emerging from the housing is largely extinguished by destructive interference without thereby influencing the optical beam. A microscope having a corresponding apparatus is furthermore claimed.
    Type: Grant
    Filed: May 15, 2013
    Date of Patent: September 30, 2014
    Assignee: Leica Microsystems CMS GmbH
    Inventors: Holger Birk, Volker Seyfried, Dirk-Oliver Fehrer, Vishnu Varden Krishnamachari
  • Publication number: 20140267531
    Abstract: A light scanning apparatus, including: a first holding member configured to hold a first light emitting element configured to emit a first light beam; a second holding member configured to hold a second light emitting element configured to emit a second light beam; a rotary polygon mirror; a first mounting portion on which the first holding member is mounted; and a second mounting portion on which the second holding member is mounted, the second mounting portion being provided adjacent to the first mounting portion, wherein the first mounting portion has a V-shape including two limbs in a cross section, and wherein one limb of the two limbs on the side of the second mounting portion is shorter than other limb of the two limbs on a side opposite to the side of the second mounting portion.
    Type: Application
    Filed: March 7, 2014
    Publication date: September 18, 2014
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Takehiro Ishidate, Yasuaki Otoguro, Jyuiti Kawano
  • Patent number: 8837059
    Abstract: According to an aspect of the invention, an image reading apparatus includes a substrate, light emitting elements, a catoptrics system, an imaging lens, a lens position fixing unit, and a reflective surface fixing unit. The plurality of light emitting elements is arranged on the substrate in a line and emits light to a surface of an object to be irradiated. The imaging element is disposed on the substrate and receives light reflected from the surface of the object. The first optical system guides the light emitted from the light emitting elements to the surface of the object. The second optical system guides the light reflected from the surface to the imaging element. The second optical system includes a catoptrics system including a first reflective surface and a second reflective surface so that light reflected from the first reflective surface is reflected to the substrate, and an imaging lens.
    Type: Grant
    Filed: January 24, 2012
    Date of Patent: September 16, 2014
    Assignee: Fuji Xerox Co., Ltd.
    Inventor: Kaoru Takahashi
  • Publication number: 20140253994
    Abstract: A beam brush includes one lens fixed for receiving a laser beam propagating along a first beam axis, a retroreflector positioned for redirecting the laser beam onto a second beam axis through a change in beam path length, and a second lens transmitting the redirected beam. The retroreflector is rotatable about an offset axis and has its angle of rotation controlled for affecting a change in beam path length. The angle of rotation resulting in the path length change is selected for providing a focus or divergence of the reflected beam transmitted through the second lens. Such a system is useful as a Z-axis focusing device operable an X-Y scanner located downstream the modified beam.
    Type: Application
    Filed: February 18, 2014
    Publication date: September 11, 2014
    Inventor: William R. Benner, JR.
  • Publication number: 20140246560
    Abstract: Provided is an optical scanning apparatus including: a deflector capable of deflecting an entering beam while switching an advancing direction thereof among a plurality of direction at a predetermined switching timing; a mirror array including a plurality of angle setting mirrors that are placed at angles different from one another on respective optical paths of the beams deflected by the deflector, each of the angle setting mirrors reflecting the beam while giving thereto a relative angle on the same plane for each optical path, and gathering the beam on the same point; and a first scanner that is provided so as to be swingable about an axial line perpendicular to the plane in synchronization with the switching timing, the first scanner reflecting each beam that is caused by the mirror array to enter the same point from a different direction and applying for scanning the beam along the same trajectory.
    Type: Application
    Filed: May 16, 2014
    Publication date: September 4, 2014
    Applicant: OLYMPUS CORPORATION
    Inventor: Shintaro TAKAHASHI
  • Publication number: 20140198365
    Abstract: A multi-beam laser scanning system comprising a laser, a beam splitter, a first scanning unit, a second scanning unit, and a control unit is disclosed herein. The laser is used for generating an initial laser beam. The beam splitter is used for splitting the initial laser beam into a first laser beam and a second laser beam. The first scanning unit is used for deflecting the first laser beam along a desired direction. The second scanning unit is used for deflecting the second laser beam along a desired direction. The control unit is coupled to the first and second scanning units and arranged to output control signals to the first and second scanning units to manufacture an object.
    Type: Application
    Filed: March 27, 2013
    Publication date: July 17, 2014
    Applicant: General Electric Company
    Inventor: General Electric Company
  • Patent number: 8780406
    Abstract: A visible laser beam scanned by a galvano-scanner system is aligned at each of positioning points on the top surface of a master work by manual operation to record sensor position signals of position sensors on galvano-scanners. The sensor position signals on each positioning point are recorded to create a drive pattern in accordance with recorded sensor position signals. The drive pattern no longer has optics system error sources including focus error and attachment error as well as errors caused by scale, offset and the like, also eliminating the need for entering a distance as far as the top surface of the work. Therefore, the drive pattern with error components removed can be created with ease.
    Type: Grant
    Filed: May 16, 2008
    Date of Patent: July 15, 2014
    Assignee: Harmonic Drive Systems Inc.
    Inventor: Nozomu Tanioka
  • Patent number: 8773613
    Abstract: Disclosed is a liquid-crystal display with coherent illumination. The display has a multilayered matrix structure comprising a matrix of micromirrors, lightguide panel with a matrix of holographic elements, a liquid-crystal matrix containing a plurality of liquid-crystal cells and a polarization analyzer. The micromirrors perform reciprocating linear or tilting movements. Therefore, in each current moment, the speckle pattern of the image shifts relative to the preceding pattern so that in each current moment the viewer sees an image in different micropositions, which are perceptible by the human eye as a quasistationary pattern. As a result, the speckle pattern seen by the viewer is smoothened.
    Type: Grant
    Filed: May 29, 2012
    Date of Patent: July 8, 2014
    Assignee: Ergophos, LLC
    Inventors: Vladimir Yankov, Alexander Goltsov, Igor Ivonin, Konstantin Kravtsov, Leonid Velikov
  • Patent number: 8760744
    Abstract: The disclosure relates to a correction light device for the irradiation of optical elements of an optical arrangement, in particular a lens, such a microlithography lens having a correction light, which include at least one correction light source and at least one mirror arrangement that deflects the light from the correction light source in the beam path to the optical element such that at least part of at least one surface of at least one optical element of the optical arrangement are irradiated in a locally and/or temporally variable fashion. The correction light strikes the surface of the optical element at a flat angle such that the obtuse angle between the optical axis of the optical arrangement at the location of the optical element and the correction light beam is less than or equal to 105°.
    Type: Grant
    Filed: September 23, 2009
    Date of Patent: June 24, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Sascha Bleidistel, Manfred Maul
  • Publication number: 20140158874
    Abstract: In an optical scanning device, a lower frame includes a first wall contacting an optical element, a second wall connected to a second-wall connecting portion of the first wall, a third wall connected to a third-wall connecting portion of the first wall, and a biasing member having a first end contacting the optical element and a second end supported by a scanner frame to press the optical element against the first wall. The second wall extends in a traverse direction angled with respect to a direction in which the first wall extends. The third wall extends in a direction facing away from an optical element side of the first wall on which the optical element is located. The optical element is in contact with at least one position of the first wall which position is between the second-wall connecting position and the third-wall connecting position.
    Type: Application
    Filed: December 6, 2013
    Publication date: June 12, 2014
    Applicant: BROTHER KOGYO KABUSHIKI KAISHA
    Inventor: Shinya Kusuda
  • Publication number: 20140153001
    Abstract: An optical scanning device includes a substrate, which is etched to define an array of two or more parallel micromirrors and a support surrounding the micromirrors. Respective spindles connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.
    Type: Application
    Filed: March 13, 2013
    Publication date: June 5, 2014
    Applicant: PRIMESENSE LTD.
    Inventor: PRIMESENSE LTD.
  • Publication number: 20140153072
    Abstract: An image display device may include a varifocal optical element that condenses a light beam emitted from a light source and scans a projection surface with the light beam from the varifocal optical element. The varifocal optical element may include lenses located side by side in a direction orthogonal to their optical axes that are in parallel with each other; an orthogonal plane mirror that reflects the beam that passes through one of the lens to the other lens; and an actuator that moves the orthogonal plane mirror in parallel along the optical axes of the lenses. The displacement of the actuator may be controlled based on the scanning angle.
    Type: Application
    Filed: May 31, 2012
    Publication date: June 5, 2014
    Applicant: NEC CORPORATION
    Inventor: Hiroshi Imai
  • Patent number: 8740394
    Abstract: In an illumination optical system for a DMD type projector, the TIR prism is configured such that a projection line, which is a normal to the total reflection surface vertically projected on the DMD surface, forms an angle other than 90° with a micromirror turning axis, an exit light projection line, which is a principal ray of light beam exits from the total reflection surface vertically projected on the DMD surface, forms an angle of 90° with the micromirror turning axis, and an incident light projection line, which is a principal ray of light beam incident on the total reflection surface vertically projected on the DMD surface, is located on the same side as the exit light projection line with respect to a straight line passing through an end point of the incident light projection line and extending parallel to a long side of the DMD.
    Type: Grant
    Filed: May 1, 2013
    Date of Patent: June 3, 2014
    Assignee: FUJIFILM Corporation
    Inventor: Tomoyuki Baba
  • Publication number: 20140126032
    Abstract: An image display device having a scanning characteristic excellent in the linearity without being upsized is provided. The image display device includes: an optical scanning unit that scans a light emitted from a light source in a first direction and a second direction of an image plane due to a rotational movement of reciprocation of a reflecting surface of the light; and an optical system enlarges a scanning angle of the scanned light, in which the optical system has a free-form-surface lens on an optical scanning unit side, and has a free-form-surface mirror on an image plane side. The free-form-surface mirror may be arranged so that the first direction is substantially parallel to a first plane defined by an incident optical beam and a reflected light in the free-form-surface mirror when the optical scanning unit remains static in the center of the scanning area.
    Type: Application
    Filed: June 10, 2011
    Publication date: May 8, 2014
    Inventors: Masahiko Yatsu, Koji Hirata
  • Patent number: 8717655
    Abstract: An image forming apparatus includes a light output unit that outputs light and a light scanning unit that includes at least one light reflection part reflecting the light output from the light output unit, and scans a display surface in a first direction at a first speed and scans the surface in a second direction orthogonal to the first direction at a second speed lower than the first speed with the light reflected by the light reflection part, wherein a drawable region in which an image can be formed on the display surface by scanning with the light has at least two parts of a part in which a length of the drawable region in the first direction increases, a part in which the length decreases, and a part in which the length is maintained constant from a first side toward a second side in the second direction.
    Type: Grant
    Filed: April 7, 2011
    Date of Patent: May 6, 2014
    Assignee: Seiko Epson Corporation
    Inventors: Daisuke Ishida, Yasushi Mizoguchi
  • Patent number: 8710471
    Abstract: A projection illumination installation for EUV microlithography includes an EUV synchrotron light source for producing EUV used light. An object field is illuminated with the used light using illumination optics. The object field is mapped into an image field using projection optics. A scanning device is used to illuminate the object field by deflecting the used light in sync with a projection illumination period. The result is a projection illumination installation in which the output power from an EUV synchrotron light source can be used as efficiently as possible for EUV projection illumination.
    Type: Grant
    Filed: September 21, 2010
    Date of Patent: April 29, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Udo Dinger, Markus Hauf
  • Patent number: 8699121
    Abstract: An illumination system of a microlithographic projection exposure apparatus comprises an optical raster plate having a light entrance surface. An irradiance distribution on the light entrance surface determines an angular light distribution of projection light when it impinges on a mask to be illuminated. The illumination system further comprises a control unit and a spatial light modulator which produces on the light entrance surface of the optical raster plate a plurality of light spots whose positions can be varied. At least some of the light spots have, along a reference direction (X), a spatial irradiance distribution comprising a portion in which the irradiance varies periodically with a spatial period P.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: April 15, 2014
    Assignee: Carl Zeiss SMT GmbH
    Inventor: Markus Deguenther
  • Patent number: 8693075
    Abstract: Optical beams emitted by optical sources are incident on a mirror surface of a scan mirror in a substantially vertical direction and reflected in a substantially vertical direction by the scan mirror. The mirror surface of the scan mirror is driven to repeatedly rotate two-dimensionally by a predetermined scan angle by a scan mirror drive circuit. A polarized beam splitter causes the optical beam emitted by the optical source to be incident on the scan mirror through a quarter wave plate, and outputs the optical beam that has been reflected by the scan mirror and passed through the quarter wave plate toward the screen. A scan angle expander is arranged on the output side of the polarized beam splitter, whereby the scan angle of the optical beam is increased by N times.
    Type: Grant
    Filed: April 19, 2012
    Date of Patent: April 8, 2014
    Assignee: Hitachi Media Electronics Co., Ltd.
    Inventors: Takeshi Nakao, Kunikazu Ohnishi, Hiromi Kita, Norio Hosaka
  • Publication number: 20140092459
    Abstract: There is provided a scanning microscope so configured that when the position of the exit pupil of an imaging optical system and a position conjugate to the exit pupil change, the position of the rotation center of a scanned light flux is moved and follows the changed exit pupil position. A scanning microscope includes a light source, an objective lens, and a scan unit. The scan unit includes first to fourth deflectors, and the deflection angle of illumination light deflected off each of the first to fourth deflectors is so controlled that the pivotal point of the illumination light deflected off each of the first and second deflectors and the pivotal point of the illumination light deflected off each of the third and fourth deflectors substantially coincide with the exit pupil of the objective lens or a position conjugate to the exit pupil.
    Type: Application
    Filed: September 27, 2013
    Publication date: April 3, 2014
    Applicant: NIKON CORPORATION
    Inventor: Masahiro MIZUTA
  • Publication number: 20140085695
    Abstract: Scanning beam systems based on a two-dimensional polygon scanner with different reflective polygon facets tilted at different tilt facet angles to use rotations of the polygon scanner to scan one or more optical beams both horizontally and vertically on a surface which can be a display screen or a printing surface.
    Type: Application
    Filed: November 26, 2013
    Publication date: March 27, 2014
    Applicant: PRYSM, INC.
    Inventors: Bruce Borchers, Roger A. Hajjar
  • Publication number: 20140036242
    Abstract: An optical scanning apparatus is configured to use a composite laser light source element provided with a plurality of semiconductor laser light sources in a single housing and thereby align both the irradiation position and the light flux parallel characteristics of respective laser light fluxes emitted from respective semiconductor laser light sources in the light source element. A light flux synthesis apparatus is used that includes two reflective mirrors inclined at 45 degrees relative to the optical axis of the respective incident light fluxes, and mutually inclined by a predetermined minute relative angle ?. The parallel characteristics of the respective laser light fluxes are aligned by the angle ? imparted to the reflective mirrors, and the irradiation position of the respective laser light fluxes is aligned by imparting predetermined wavelength-selectable characteristics or polarization selectable characteristics in relation to the deflection mirror to reflective surface of the reflective mirror.
    Type: Application
    Filed: July 24, 2013
    Publication date: February 6, 2014
    Applicant: Hitachi Media Electronics Co., Ltd.
    Inventor: Kunikazu OHNISHI
  • Publication number: 20140029075
    Abstract: The invention relates to a deflection mirror arrangement (30) for an optical measurement apparatus having at least one mirror unit (31, 32), which is arranged on a rotatable shaft (34) and comprises at least one deflection mirror (31.1, 31.2, 32.1, 32.2), and having a drive unit (33), which drives the rotatable shaft (34), and to an optical measurement apparatus having such a deflection mirror arrangement (30). In order to enable a reduction in the necessary installation space, the at least one mirror unit (31, 32) comprises at least two deflection mirrors (31.1, 31.2, 32.1, 32.2), which are arranged in a common horizontal plane such that they are radially spaced apart with respect to the rotatable shaft (34), with the drive unit (33) being arranged at least partially in the space between the two deflection mirrors (31.1, 31.2).
    Type: Application
    Filed: September 26, 2011
    Publication date: January 30, 2014
    Applicant: VALEO Schalter und Sensoren GmbH
    Inventors: Heiner Bayha, Peter Horvath, Thomas Schuler