Abstract: The present disclosure relates to a bump processing method and/or resulting MEMS-CMOS structure, in which one or more anti-stiction bumps are formed within a substrate prior to the formation of a cavity in which the one or more anti-stiction bumps reside. By forming the one or more anti-stiction bumps prior to a cavity, the sidewall angle and the top critical dimension (i.e., surface area) of the one or more anti-stiction bumps are reduced. The reduction in sidewall angle and critical dimension reduces stiction between a substrate and a moveable part of a MEMS device. By reducing the size of the anti-stiction bumps through a processing sequence change, lithographic problems such as reduction of the lithographic processing window and bump photoresist collapse are avoided.

Abstract: A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: Disclosed is a display device and, more particularly, a micro-shutter display device including: a light source emitting light; a lower substrate having an optical conversion unit performing at least any one of a function of converting back light output from a light source into primary colors corresponding to sub-pixels and a function of reflecting ambient light having a primary color band corresponding to sub-pixels; a micro-shutter opening and closing a path of light output from the optical conversion unit; and a driving circuit supplying a driving signal to a movable unit electrode or a fixed counter electrode, wherein the micro-shutter includes: a shutter micro-structure comprised of a shutter blade blocking light output from the optical conversion unit and a shutter aperture allowing light output from the optical conversion unit to be transmitted therethrough; an elastic element connected to the shutter micro-structure to provide elastic restoring force when the shutter micro-structure structure is driven

Abstract: A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.

Abstract: There is provided an optical scanner, and an image forming apparatus and an image display apparatus which have the optical scanner. The optical scanner includes a mirror portion having a base plate portion, and a reflective portion which is adhered to a surface of the base plate portion; and a torsion beam portion which is connected to the mirror portion, made of a same material as the base plate portion and integrally formed with the base plate portion, and which is configured to be torsionally vibrated. The reflective portion includes a reinforcement portion and a reflective surface. The reinforcement portion is made of material having a density lower than that of the base plate portion and a Young's modulus greater than that of the base plate portion. The reflective surface is formed on a surface of the reinforcement portion and is configured to reflect the incident light.

Abstract: This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.

Abstract: In a two-dimensional optical deflector having a mirror and a support body surrounding the mirror, first and second piezoelectric actuators of a meander-type are provided opposite to each other with respect to a first axis of the mirror. Each of the first second piezoelectric actuators includes a plurality of piezoelectric cantilevers folded at every piezoelectric and connected from the support body to the mirror. Each of the piezoelectric cantilevers are in parallel with the first axis. Each of the piezoelectric cantilevers includes first and second piezoelectric cantilever elements in parallel with each other combined by a substrate. The second piezoelectric cantilever elements are divided into a first group of piezoelectric cantilever elements and a second group of piezoelectric cantilever elements alternating with the first group of piezoelectric cantilever elements.

Abstract: A system for constructing high resolution images includes a beam splitter assembly, a light intensity modulator, an image capturing module and an image processing module. The beam splitter assembly is utilized to reflect a light beam generated from a light source generating device and generate a splitting beam. The light intensity modulator is utilized to modulate the intensity of the splitting beam to generate a modulating beam, which includes a predetermined noise. The modulating beam is emitted onto an object to generate a modulating image. The image capturing module is utilized to obtain a plurality of modulating images. The image processing module is utilized to analyze the modulating images to generate a high resolution image.

Abstract: A two-dimensional scanning and reflecting device includes a vibration component and a scanning component. The vibration component has a free end. The scanning component includes a frame body, a mass block, and a mirror. The frame body is connected to the free end of the vibration component. A natural frequency of the mirror corresponds to a second frequency. The mass block is disposed on the frame body in an eccentric manner, and the mass block and the natural frequency of the mirror correspond to a first frequency. When the vibration component receives a multi-frequency signal having the first frequency and the second frequency, the mirror vibrates in an axial direction with the first frequency, and vibrates in another axial direction with the second frequency.

Abstract: A stereo display apparatus includes a support member, at least one projector, a screen, first reflectors, and an actuator. The projector is connected to the support member, and includes a battery and an image memory module. The projector is capable of emitting an image beam. The screen is connected to the support member. The first reflectors surround the support member. The actuator is connected to the support member and is capable of driving the support member to rotate. The support member is capable of driving the projector and the screen to rotate. When the projector and the screen rotate, the image beam is projected onto the first reflectors in sequence, and the first reflectors reflect the image beam onto the screen in sequence.

Abstract: A laser beam is periodically deflected before being directed into a sample volume. The beam is deflected at a frequency such that the beam makes one or more passes through the sample volume while data are collected from the sample volume. The amplitude of motion of the beam, the dwell time of the beam at any given point, and the Gaussian intensity profile of the beam cooperate to produce an effective flat topped illumination profile for the light that is incident on specimens in the sample volume. The total photon exposure at any given point in the sample volume is a function of both the beam intensity and the dwell time at that location. Therefore, a longer dwell time and lower intensity at the edge of the profile are in balance with a shorter dwell time and higher intensity at the center of the profile.

Abstract: According to one embodiment of the present invention a digital micro-mirror device is taught that includes a pixel occupying an area of the device and a hinge coupled to the pixel and positioned such that at least a portion of the hinge falls outside the area of the pixel.

Abstract: An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which are deposited separately, each deposition providing a different thickness of spacer. Or a patterned photoresist may be used to allow for an etching process to selectively etch back the thickness of a spacer which was deposited in a single deposition. A full-color static graphical image may be formed of combined patterns of interferometric modulator cavities. Each cavity includes a reflector, and an induced absorber, the induced absorber including a spacer having a thickness that defines a color associated with the cavity.

Abstract: An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position at a first distance from the first optical layer and a second position at a second distance from the first optical layer. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.

Abstract: Disclosed are a scanner and an image forming apparatus employing the same. The scanner may produce bidirectional scanning of light by oscillating a deflecting mirror about a first axis substantially parallel to the mirror surface, and may compensate for skewing of the scan lines by rotating the mirror about a second axis that is substantially perpendicular to the first axis so as to allow the light to be scanned at an angle.

Abstract: A two-terminal, variable capacitance device is described that is constructed by connecting multiple MEMS devices having different actuation or “pull in” voltages in parallel.

Abstract: A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.

Abstract: A scanning beam projection system includes a two-mirror scanning system. One mirror scans in one direction, and a second mirror scans in a second direction. A fast scan mirror receives a modulated light beam from a fold mirror and directs the modulated light beam to a slow can mirror. The fold mirror may be formed on an output optic or may be formed on a common substrate with the slow scan mirror.

Abstract: A method includes generating a plurality of beams that each illuminate a separate portion of a spatial light modulator. The spatial light modulator has a first dimension of a first length and a second dimension of a second length. Each of the beams spans a portion of the first length of the first dimension and a portion of the second length of the second dimension. The method also includes scrolling the plurality of beams along the second dimension of the spatial light modulator while maintaining at least a first gap between each of the plurality of beams.

Abstract: An optical scanning device includes, in an effective scanning area in the target surface, a mechanism that causes a scanning speed at each scanning position with respect to a scanning speed at an approximately center in the effective scanning area to be within a range under a predetermined condition.

Abstract: A smooth picture device includes an optical element, a holder, a flexible member, a base and an actuator. The holder supports the optical element. At least one portion of the holder is coupled to the flexible member. The base supports the flexible member. The actuator is coupled to the holder and actuates the holder to vibrate.

Abstract: An oscillation system includes first and second oscillation movable elements supported by respective elastic supporting elements. The oscillation system has a first natural oscillation mode of a resonance frequency f1 and a second natural oscillation mode of a resonance frequency of f2 which is approximately N-fold of f1 where N is a natural number. A control device determines set driving frequencies Df1 and Df2 in accordance with a predetermined equation while satisfying a relation Df2=N×Df1 and drives the oscillation system at the set driving frequencies through a driving member.

Abstract: A disclosed optical scanning device includes: a light source unit having plural luminous sources; a light source driving unit modulating each luminous source in accordance with pixel information; an oscillating mirror supported on a twist beam as a rotation shaft, the oscillating mirror collectively deflecting light beams from the luminous sources and performing reciprocating scanning on a surface to be scanned; an imaging optical system imaging the light beams from the luminous sources on the surface to be scanned; an oscillating mirror driving unit setting a scanning frequency f in accordance with a resonance frequency of the oscillating mirror; and a pitch adjustment unit adjusting beam spot intervals p in a sub-scanning direction in accordance with the scanning frequency f of the oscillating mirror that has been set.

Abstract: A method includes generating a plurality of beams that each illuminate a separate portion of a spatial light modulator. The spatial light modulator has a first dimension of a first length and a second dimension of a second length. Each of the beams spans a portion of the first length of the first dimension and a portion of the second length of the second dimension. The method also includes scrolling the plurality of beams along the second dimension of the spatial light modulator while maintaining at least a first gap between each of the plurality of beams.

Abstract: An oscillator device includes an oscillator, a resilient support member configured to support the oscillator for oscillatory motion about an oscillation central axis, a magnetic member provided on the oscillator, and a magnetic-field generating member disposed opposed to the oscillator, wherein the oscillator has a through-hole extending through the oscillator from its top surface to its bottom surface, and wherein the magnetic member is provided in the through-hole.

Abstract: An optical scanning element includes: a first member which is constituted of a mirror portion, a mirror supporting portion and a frame portion; a second member which fixes and holds the frame portion of the first member thereon; and a piezoelectric body. The frame portion includes a beam portion and fixing portions which are positioned at both ends of the beam portion, the mirror supporting portion is connected to the beam portion at a connection point, and the piezoelectric body is fixedly mounted on the frame portion in a state that the piezoelectric body extends toward the connection point of the beam portion from the fixing portion to a position not over the connection point thus extending over the beam portion and the fixing portion. Due to such constitution, a swinging angle of the mirror portion can be increased thus enlarging a scanning angle.

Abstract: An oscillator device includes a supporting base plate, a torsion spring, and a movable member, wherein the movable member is supported by the torsion spring, for torsional oscillation relative to the supporting base plate about a torsional axis, wherein the torsion spring has an X-shaped section being perpendicular to the torsional axis and a top surface and a bottom surface each being defined by a (100)-equivalent surface of monocrystal silicon, and wherein a distance L1 connecting bottoms of concavities formed at the top surface and bottom surface, respectively, and a distance L2 connecting bottoms of concavities defined at side surfaces of the X-shaped torsion spring as well as a rate of change ?i of inertia moment of the movable member around the torsion axis, with a change of a thickness t of the supporting base plate, satisfy the following relation: L1/L2=C1?Exp{C2?(?i+C3)}+C4??i+C5 where C1=5.0*10^=?1, C2=?4.4, C3=4.6*10^?2, C4=?6.0*10^?1 and 1.5<C5<1.7.

Abstract: An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.

Abstract: A disclosed optical scanning device includes: a light source unit having plural luminous sources; a light source driving unit modulating each luminous source in accordance with pixel information; an oscillating mirror supported on a twist beam as a rotation shaft, the oscillating mirror collectively deflecting light beams from the luminous sources and performing reciprocating scanning on a surface to be scanned; an imaging optical system imaging the light beams from the luminous sources on the surface to be scanned; an oscillating mirror driving unit setting a scanning frequency f in accordance with a resonance frequency of the oscillating mirror; and a pitch adjustment unit adjusting beam spot intervals p in a sub-scanning direction in accordance with the scanning frequency f of the oscillating mirror that has been set.

Abstract: A tilt mirror is disclosed. The tilt mirror can include: a reflection portion, which may reflect incident light; a first cantilever, which may be formed on either end of the reflection portion, and which may generate a stress in one direction; a second cantilever, which may be formed on either end of the reflection portion beside the first cantilever, and which may generate a stress in the other direction; and a connector portion, which may connect the reflection portion with one end of the first cantilever and with one end of the second cantilever such that the stress generated in the one direction and the stress generated in the other direction are transferred to the reflection portion. The tilt mirror provides a simple composition that can be utilized to alter the path for rays of light.

Abstract: The present invention relates to Optical Maskless Lithography (OML). In particular, it relates to providing OML with a recognizable relationship to mask and phase-shift mask techniques.

Abstract: Provided is an optical scanner for observing an image that is formed by performing two-dimensional scanning with the aid of a swinging movable mirror, using light beams modulated on the basis of image information and emitted from a light source unit. An optical scanner of the present invention includes a scanning device and a fixing member having an attachment portion for attachment of the scanning device, the scanning device including a movable mirror, an elastic support portion supporting the movable mirror such that the movable mirror can swing around a swinging center, a support base supporting the elastic support portion, and a swinging unit for swinging the movable mirror. A first surface of the attachment portion is formed on a plane of a surface of the movable mirror. A second surface of the attachment portion is formed on a plane which is perpendicular to the surface of the movable mirror and includes the swinging center.