Reflective Element Moved By Deformable Support Patents (Class 359/224.1)
  • Patent number: 10416429
    Abstract: A dynamic focus and zoom system with three MEMS mirrors, three prisms, three beam splitters, three fixed lenses and an optical relay, all within a housing. The second prism, first and second fixed lenses, and first beam splitter are aligned linearly along a longitudinal axis of the optical relay. The first and second MEMS mirrors are linearly aligned with one another at a ninety-degree angle to such longitudinal axis. The third MEMS mirror, third fixed lens, third wave plate, third beam splitter and third prism are linearly aligned with one another at a ninety-degree angle to the same longitudinal axis. The third prism abuts up against the center of the optical relay between the first and second fixed lenses and is linearly aligned with the first prism such that the linear alignment of the first and third prisms is parallel to the longitudinal axis of the optical relay.
    Type: Grant
    Filed: September 15, 2017
    Date of Patent: September 17, 2019
    Assignee: Agile Focus Designs, LLC
    Inventor: Sarah Lukes
  • Patent number: 10394017
    Abstract: An actuator device includes a support portion; a first movable portion; a first torsion bar portion coupling the first movable portion to the support portion to be swingable around a first swing axis; and a wiring disposed on the first torsion bar portion. The torsion bar portion is of a meandering shape including a plurality of straight sections extending in a first direction along the first swing axis and juxtaposed in a second direction intersecting with the first direction, and a plurality of turnover sections alternately coupling two ends of the straight sections. The plurality of turnover sections have a curved shape. The wiring includes wiring sections embedded in grooves formed in the turnover sections.
    Type: Grant
    Filed: June 27, 2017
    Date of Patent: August 27, 2019
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Sadaharu Takimoto, Masakuni Kimoto, Norihide Adachi
  • Patent number: 10386630
    Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.
    Type: Grant
    Filed: April 5, 2017
    Date of Patent: August 20, 2019
    Assignee: North Inc.
    Inventors: Julien Gamet, Faouzi Khechana
  • Patent number: 10370242
    Abstract: A microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device, wherein the microelectromechanical device may include: a substrate; a diaphragm mounted to the substrate; a first electrode mounted to the diaphragm; a second electrode mounted to the substrate; wherein the first electrode is laterally adjacent to the second electrode; and wherein the diaphragm is arranged over a gap between the first electrode and the second electrode.
    Type: Grant
    Filed: July 28, 2017
    Date of Patent: August 6, 2019
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Alfons Dehe, Matthias Friedrich Herrmann, Johannes Manz
  • Patent number: 10359551
    Abstract: The present invention concerns the use of hybrid metal-dielectric optical coatings as the end reflectors of laser cavities and/or in the mirror structures used in other optical resonators, such as Fabry-Perot tunable filters, along with the use of such Fabry-Perot tunable filters in wavelength swept sources such as lasers. Hybrid metal-dielectric optical coatings have reflectivity spectra that can be broader than pure dielectric coatings, offer optical reflectivities higher than metal, as high as pure dielectric coatings, eliminate mirror transmission that can cause parasitic light reflections, and use fewer layers and thus have lower mass and higher mechanical resonant frequency for movable mirror applications An important characteristic of these coatings concerns the non-reflected light. Pure dielectric coatings offer high reflectivity, while the non-reflected portion of the light is transmitted by the coating to the substrate, for example.
    Type: Grant
    Filed: August 12, 2013
    Date of Patent: July 23, 2019
    Assignee: Axsun Technologies, Inc.
    Inventors: Mark E. Kuznetsov, Ranko Galeb
  • Patent number: 10281718
    Abstract: The actuation range obtained with a bending piezoelectric actuator in MEMS mirror system is mechanically amplified by fixing the moving end of the actuator to a suspender which suspends a reflector from a frame. The fixing point lies somewhere between the two ends of the suspender. The actuator and the suspender together form an actuator unit with a greater actuation range than one actuator can obtain by itself. In one embodiment, the suspender is a rigid lever. In another embodiment, the suspender is another bending actuator so that an additional increase in the actuation range can be obtained from the actuating movement of the second actuator.
    Type: Grant
    Filed: August 22, 2017
    Date of Patent: May 7, 2019
    Assignee: MURATA MANUFACTURING CO., LTD.
    Inventor: Altti Torkkeli
  • Patent number: 10268037
    Abstract: A microelectromechanical system (MEMS) mirror assembly includes a base substrate defining a cavity and a plurality of first features extending upwards from a bottom of the cavity. The MEMS mirror assembly includes a mirror substrate coupled to the base substrate and defining a MEMS actuator and a MEMS mirror platform. Actuation of the MEMS actuator moves the MEMS mirror platform from a first positional state to a second positional state. The MEMS mirror platform defines a plurality of second features on a side of the MEMS mirror platform facing the base substrate that are sized, shaped, and positioned such that the plurality of second features extend into spaces separating the plurality of first features when the mirror platform is in the second positional state. The MEMS mirror assembly includes a reflective material disposed on a side of the MEMS mirror platform facing away from the base substrate.
    Type: Grant
    Filed: April 27, 2017
    Date of Patent: April 23, 2019
    Assignee: Google LLC
    Inventor: Kevin Y. Yasumura
  • Patent number: 10263883
    Abstract: Certain embodiments of the present disclosure provide a method for communicating data flows. The method generally includes receiving control flow information corresponding to a data flow for communication from a first device to a second device, and determining one or more characteristics of the data flow based on the control flow information. For example, the one or more characteristics may include whether the data flow is a mice flow or an elephant flow. In certain aspects, the method further includes communicating the data flow based on the determined characteristics.
    Type: Grant
    Filed: December 14, 2016
    Date of Patent: April 16, 2019
    Assignee: International Business Machines Corporation
    Inventor: Keshav G. Kamble
  • Patent number: 10241321
    Abstract: A reflector assembly includes a monolithic and adaptive reflector having a single and continuous reflecting surface and a focusing shape. The reflector assembly further includes a plurality of trusses for supporting the monolithic and adaptive reflector and a plurality of actuators, each of the plurality of actuators operatively connected to one of the plurality of trusses. Actuation of each of the plurality of actuators exerts a force which flexes at least a portion of the continuous reflecting surface.
    Type: Grant
    Filed: May 5, 2016
    Date of Patent: March 26, 2019
    Assignee: Sciperio, Inc
    Inventors: Kenneth H. Church, Paul Deffenbaugh, Josh Goldfarb, Charles Michael Newton, Michael W. Owens, Will Stone, Casey Perkowski
  • Patent number: 10225530
    Abstract: A MEMS device includes a fixed structure and a mobile structure with a reflecting element coupled to the fixed structure through at least a first deformable structure and a second deformable structure. Each of the first and second deformable structures includes a respective number of main piezoelectric elements, with the main piezoelectric elements of the first and second deformable structures configured to be electrically controlled for causing oscillations of the mobile structure about a first axis and a second axis, respectively. The first deformable structure further includes a respective number of secondary piezoelectric elements configured to be controlled so as to vary a first resonance frequency of the mobile structure about the first axis.
    Type: Grant
    Filed: November 7, 2017
    Date of Patent: March 5, 2019
    Assignee: STMicroelectronics S.r.l.
    Inventors: Domenico Giusti, Roberto Carminati
  • Patent number: 10177055
    Abstract: Provided are an encapsulation structure and encapsulation method for an integrated sensor. The encapsulation structure comprises: a first substrate (1) and a first outer housing (2), the first outer housing and first substrate enclosing a first encapsulation cavity; a plurality of sensors arranged inside the first encapsulation cavity, each of the sensors comprising MEMS sensor chips (3, 8) and ASIC chips (5, 7) electrically connected to the MEMS sensor chips; inside the first encapsulation cavity, the exterior of the ASIC chip of at least one of the sensors is provided with a shielding structure.
    Type: Grant
    Filed: December 10, 2015
    Date of Patent: January 8, 2019
    Assignee: Goertek Inc.
    Inventors: Luyu Duanmu, Junde Zhang, Qinglin Song
  • Patent number: 10151974
    Abstract: An electrooptical apparatus includes a torsion hinge and a mirror support post that are formed integrally with an electroconductive member. Of the mirror support post (second support post), a first end portion at a substrate side has an open end whose opening faces the substrate. Of the mirror support post, a second end portion at a mirror side is a flat plate portion that closes the opening of the mirror support post. A mirror is in contact with the opposite side of the flat plate portion to the substrate. A first sacrificial layer for use for production of the electrooptical apparatus is formed by exposing and developing a photosensitive resist.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: December 11, 2018
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Satoshi Ito
  • Patent number: 10132699
    Abstract: The present invention relates to magnetoelastic resonators, sensors, and tunable devices, as well as methods for making such components. The resonators can be used as tags and/or sensors. In general, the resonators include one or more micron-sized resonator portions affixed on a substrate. For use as a tag, each tag includes a plurality of resonator portions that allow for multiplexed coding, and methods for making tags and arrays of such tags include use of electrodeposition processes. In particular embodiments, these components include an electrodeposited material that exhibits magnetostrictive properties.
    Type: Grant
    Filed: October 6, 2015
    Date of Patent: November 20, 2018
    Assignee: National Technology & Engineering Solutions of Sandia, LLC
    Inventors: Jamin Ryan Pillars, Eric Langlois, Christian Lew Arrington, Todd Monson
  • Patent number: 10133059
    Abstract: The current invention concerns an apparatus and a method for positioning an optical element, said apparatus comprising a positionable part to which the optical element can be mounted; a base part; a suspension system, said positionable part being mounted on said base part in a movable manner with said suspension system; an actuation system for actuating movement of said positionable part with respect to said base part; and a control system for controlling movement of said positionable part.
    Type: Grant
    Filed: June 20, 2014
    Date of Patent: November 20, 2018
    Assignee: Newson NV
    Inventor: Marc Van Biesen
  • Patent number: 10088649
    Abstract: A deformable mirror comprises a deformable membrane extending at rest in a first plane and having a reflecting front face and a back face opposite the front face, a supporting structure, an actuator having a first and second end, the first end fixed to the supporting structure, the second end displaced relative to the first end on a first axis substantially at right angles to the first plane to exert, on the back face, an axial load on the first axis, to locally deform the deformable membrane. The mirror comprises a plate that is substantially flat in a second plane substantially parallel to the first plane, positioned between the actuator and deformable membrane, linked to the back face and deformed when the actuator exerts the axial load, and the plate is rigid in the second plane to take up loads applied to the mirror in the second plane.
    Type: Grant
    Filed: February 1, 2017
    Date of Patent: October 2, 2018
    Assignees: THALES, CENTRE NATIONAL D'ETUDES SPATIALES
    Inventors: Christophe Devilliers, Félix Aguilar, Kamel Houairi, Aurélien Suau
  • Patent number: 10067339
    Abstract: An optical scanner comprises a light source, an MEMS mirror and a position detector. The light source emits a light beam. The MEMS mirror deflects the light beam emitted from the light source. The position detector detects the position of the MEMS mirror. The position detector is configured on the same semiconductor substrate with the MEMS mirror.
    Type: Grant
    Filed: July 28, 2015
    Date of Patent: September 4, 2018
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA TEC KABUSHIKI KAISHA
    Inventor: Sueo Ueno
  • Patent number: 10012828
    Abstract: An assembly body for micromirror chips that partly encloses an internal cavity, the assembly body including at two sides oriented away from one another, at least one respective partial outer wall that is fashioned transparent for a specified spectrum, and the assembly body having at least one first outer opening on which a first micromirror chip can be attached, and a second outer opening on which a second micromirror chip can be attached, in such a way that a light beam passing through the first partial outer wall is capable of being deflected by the first micromirror chip onto the second micromirror chip, and is capable of being deflected by the second micromirror chip through the second partial outer wall. A mirror device and a production method for a mirror device are also described.
    Type: Grant
    Filed: April 27, 2015
    Date of Patent: July 3, 2018
    Assignee: Robert Bosch GmbH
    Inventors: Frank Schatz, Friedjof Heuck, Kerrin Doessel, Stefan Pinter, Daniel Pantel, Franziska Rohlfing
  • Patent number: 10001643
    Abstract: A micromirror device including a drive unit, which includes a movable drive element, which is situated in a first plane, and a guiding device, and a mirror, which is elastically coupled to the drive element and is situated in the idle position in a second plane, which is in parallel to the first plane, the guiding device being designed to guide a movement of the drive element on a straight line situated in the first plane. Furthermore, a corresponding projection device is described.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: June 19, 2018
    Assignee: ROBERT BOSCH GMBH
    Inventors: Rainer Straub, Johannes Baader, Andreas Duell, Frederic Njikam Njimonzie, Joerg Muchow, Helmut Grutzeck
  • Patent number: 9992433
    Abstract: There are provided an image processing apparatus and a control method thereof. An image processing apparatus includes an image sensor for acquiring a target image, an image processing module for performing focusing on a specific area of the acquired target image and determining a focal surface of the target image on the basis of the performed focusing, and a drive control module for controlling the curvature of the image sensor, based on the determined focal surface.
    Type: Grant
    Filed: May 25, 2016
    Date of Patent: June 5, 2018
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Sun Tak Park, Ki-Uk Kyung, Sae Kwang Nam, Bong Je Park, Seung Koo Park, Sung Ryul Yun
  • Patent number: 9983404
    Abstract: A light deflecting device which suppresses a vibration caused by swing of a light deflecting unit and transmitted to a fixed unit and prevents noise from being made on a housing to which the fixed unit is attached, including a light deflecting unit having paired beams on both sides of a movable unit having a light reflecting unit and a coil, and a fixed unit to which the light deflecting unit is swingably fixed through the beams and which includes a magnetic field forming unit, swings the movable unit with the beams as torsional rotation axes by an electromagnetic force generated by a driving current flowing to the coil and a magnetic field formed by the magnetic field forming unit, and a counter swing member in the fixed unit to be swung in a reverse phase to the light deflecting unit so it is opposed to the light deflecting unit.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: May 29, 2018
    Assignee: HOKUYO AUTOMATIC CO., LTD.
    Inventor: Norihiro Asada
  • Patent number: 9952425
    Abstract: An optical device includes: an optical portion that has a light incident surface on which light is incident; a movable portion that supports the optical portion; a shaft portion that supports the movable portion so that the movable portion is oscillatable; and a fixing portion that is connected to the shaft portion, wherein the fixing portion has a thickness greater than the shaft portion and includes a portion of which an end not connected to the shaft portion serves as a free end.
    Type: Grant
    Filed: October 29, 2015
    Date of Patent: April 24, 2018
    Assignee: Seiko Epson Corporation
    Inventors: Hisako Kojima, Yasushi Mizoguchi, Shinichi Wakabayashi
  • Patent number: 9910269
    Abstract: A MEMS-micro-mirror (30) is provided comprising a mirror body (50) that is rotatably arranged in a mirror frame (60) around a rotation axis (58) extending in a plane defined by the mirror body. The rotation axis extends through a first and a second mutually opposite end-portion (51, 53) of the mirror body. The mirror has a reflective first main surface (55) and opposite said first main surface a second main surface (57) provided with a first and a second pair of reinforcement beams. The pair of reinforcement beams (91a, 91b) extends from the first end-portion (51) in mutually opposite directions away from the rotation axis. The second pair of reinforcement beams (93a, 93b) extends from the second end-portion (53) in mutually opposite directions away from the rotation axis. Reinforcement beams of said first pair extend towards respective ones of said second pair.
    Type: Grant
    Filed: November 28, 2012
    Date of Patent: March 6, 2018
    Assignee: ELMOS SEMICONDUCTOR AKTIENGESELLSCHAFT
    Inventors: Hendrikus Wilhelmus Leonardus Antonius Maria van Lierop, Matthijs Alexander Gerard Suijlen
  • Patent number: 9893263
    Abstract: In a driver for driving an optical deflector including a mirror, a piezoelectric actuator and a piezoelectric sensor adapted to sense vibrations of the piezoelectric actuator, a saw-tooth voltage generating unit; a combined saw-tooth voltage generating unit; and a control unit, the control unit applies a saw-tooth voltage and its inverted voltage to the piezoelectric actuator; performs a low-pass filtering process using a cut-off frequency upon a sense voltage; calculates a half period of fluctuations included in a low-pass-filtered saw-tooth voltage; combines the low-pass-filtered saw-tooth voltage with a delayed low-pass-filtered saw-tooth voltage; and to applies a combined saw-tooth voltage and its inverted voltage to the piezoelectric actuator.
    Type: Grant
    Filed: May 28, 2015
    Date of Patent: February 13, 2018
    Assignee: STANLEY ELECTRIC CO., LTD.
    Inventor: Takanori Aimono
  • Patent number: 9880120
    Abstract: According to embodiments, an electric field sensor having a sensor electrode is constructed of an electrically conductive material and having one or more outwardly protruding pillars. A screen electrode overlies the sensor electrode and has one or more openings which register with the one or more pillars on the sensor electrode. At least one piezoelectric actuator is connected to the screen electrode so that, when excited by a voltage signal, the piezoelectric actuator modulates the screen electrode toward and away from the sensor electrode at the frequency of the periodic voltage signal. An output circuit configured to detect a voltage, a current output, or both, between the sensor electrode and the screen electrode which is proportional in magnitude to the strength of the electric field.
    Type: Grant
    Filed: July 22, 2014
    Date of Patent: January 30, 2018
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventors: Simon J. Ghionea, David M. Hull, Gabriel L. Smith, Jeffrey S. Pulskamp, Sarah S. Bedair
  • Patent number: 9865921
    Abstract: There is disclosed a directional multi-band antenna comprising: a primary reflector, at least one secondary reflector, a multi-layer dielectric layer selectively reflective or transmissive of incident radiation according to wavelength, the layer being provided at the surface of either the primary or the secondary reflector, an RF unit comprising a collocated sensor and transmitter, an Optical unit comprising a collocated sensor and transmitter, arranged such that the primary reflector is for passing signals between the secondary reflector and the environment, the secondary reflector is firstly for passing signals between the primary reflector and the RF unit, and secondly for passing signals between the primary reflector and the Optical unit and arranged such that the antenna is operable to transmit or receive, RF or Optical signals, along a common beam axis.
    Type: Grant
    Filed: January 27, 2014
    Date of Patent: January 9, 2018
    Assignee: BAE SYSTEMS plc
    Inventors: Michael Stewart Griffith, Leslie Charles Laycock
  • Patent number: 9846370
    Abstract: A support device for an optical apparatus is disclosed. The support device includes first and second support elements. The support device also includes first and second flexure bearings. The first flexure bearing and the second flexure bearing each connect the first support element and the second support element to one another in a thermally conductive manner and hold the first support element in a manner movable in at least one first direction relative to the second support element. Spring forces generated by the first flexure bearing and the second flexure bearing partly or completely cancel one another out in the case of a movement of the first support element relative to the second support element in the first direction.
    Type: Grant
    Filed: May 17, 2016
    Date of Patent: December 19, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Henner Baitinger, Markus Hauf
  • Patent number: 9798136
    Abstract: According to the present invention there is provided a method of controlling the position of a MEMS mirror in a MEMS device, wherein the MEMS device comprises, a MEMS mirror, a magnet which provides a magnetic field (B), an actuating means which operatively cooperates with the MEMS mirror so that it can apply a force to the MEMS mirror which can tilt the MEMS mirror about at least one rotational axis when the actuating means is provided with a drive signal, wherein the magnitude force applied by the actuating means to the MEMS mirror is dependent on the amplitude of the drive signal, and a detection coil which is mounted on the MEMS mirror, the method comprising the steps of, detecting a change in the resistance (R) of the detection coil so as to detect a change in temperature of the MEMS mirror; determining the drive signal amplitude required to maintain the MEMS mirror at a predefined angular position (?); providing the actuating means with a drive signal which has an amplitude which is equal to the determi
    Type: Grant
    Filed: October 7, 2013
    Date of Patent: October 24, 2017
    Assignee: INTEL CORPORATION
    Inventors: Martin Lemaire, Thierry Barras, Nicolas Abele
  • Patent number: 9778549
    Abstract: An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts is disposed in each of the pair of vibration parts, and rotates the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts.
    Type: Grant
    Filed: August 15, 2016
    Date of Patent: October 3, 2017
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Toshiaki Horie, Soichiro Hiraoka, Shinsuke Nakazono, Kazuki Komaki
  • Patent number: 9766448
    Abstract: A mirror drive device is provided as one capable of efficiently gaining a driving force. The mirror drive device 1 has a fixed frame 5; a movable portion 7 supported so as to be swingable relative to the fixed frame 5, through torsion bars 10a, 10b extending on an identical straight line, and being of a circular shape; a mirror 9 arranged on a principal surface 7a of the movable portion 7; and a permanent magnet 3 forming a magnetic field around the movable portion 7; the movable portion 7 has a drive coil 12 arranged below the mirror 9; the drive coil 12 is of a 2n-sided polygon shape (where n is an integer of 3 or more) when viewed from a direction orthogonal to the principal surface 7a, at least one side of which is orthogonal to a direction of the magnetic field F.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: September 19, 2017
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Sadaharu Takimoto, Masakuni Kimoto, Norihide Adachi
  • Patent number: 9746608
    Abstract: A novel optical assembly apparatus for coupling optical energy and a related method for creating the novel optical assembly apparatus are disclosed. In one embodiment, the novel optical assembly apparatus includes a high-index contrast waveguide constructed on a semiconductor die or another base substrate with an aligned optical coupling section, a grating coupler etched onto a surface, a micro mirror with an acute angle relative to the surface, and a waveguide taper that narrows an optical beam width. A light ray entered into the optical coupling section is redirected by the micro mirror to form a perpendicular ray entry angle with the grating coupler. The grating coupler then efficiently couples the light ray with the waveguide taper, which in turn narrows the optical beam width. The light ray may originate from a semiconductor die or from an optical fiber, which is purposefully aligned with the high-index contrast waveguide.
    Type: Grant
    Filed: December 11, 2015
    Date of Patent: August 29, 2017
    Assignee: Partow Technologies, LLC.
    Inventor: Payam Rabiei
  • Patent number: 9732934
    Abstract: A new and useful illumination device, e.g. for a lithographic optical imaging system, is provided, and comprises a mirror array located between a radiation source and an illumination pupil. Each mirror element of the mirror array is individually steerable (controllable), and the polarization state of light from each mirror element of the mirror array can be selectively controlled, so that the illumination pupil can be filled with a distribution of light that is selectively controlled.
    Type: Grant
    Filed: October 26, 2012
    Date of Patent: August 15, 2017
    Assignee: Nikon Corporation
    Inventors: Daniel Gene Smith, Michael Sogard
  • Patent number: 9729038
    Abstract: A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: August 8, 2017
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Sadaharu Takimoto, Masakuni Kimoto, Norihide Adachi
  • Patent number: 9670056
    Abstract: The MEMS device has a suspended mass supported via a pair of articulation arms by a supporting region. An electrostatic driving system, coupled to the articulation arms, has mobile electrodes and fixed electrodes that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies, arranged on opposite sides of a respective articulation arm and connected to the articulation arm through connection elements. Each actuation assembly extends laterally to the suspended mass and has an auxiliary arm carrying a respective plurality of mobile electrodes. Each auxiliary arm is parallel to the articulation arms. The connection elements may be rigid or formed by linkages.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: June 6, 2017
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Roberto Carminati, Sebastiano Conti
  • Patent number: 9642235
    Abstract: An extreme ultraviolet radiation generating device includes a source operable to generate a first and second entrance beam, and a beam unit operable to modify at least one of a direction and a beam divergence of the first and second entrance beam, in which the beam unit includes: a beam splitter to receive the first and second entrance beam, the beam splitter being configured to reflect the first entrance beam as a first exit beam and to transmit the second entrance beam; and a mirror in the beam path of the transmitted, second entrance beam to reflect the second entrance beam to form a second exit beam that is transmitted by the beam splitter and that is at least partially superposed on the first exit beam, in which the beam unit is configured to modify an angle and/or beam divergence between the first and second exit beam.
    Type: Grant
    Filed: December 28, 2015
    Date of Patent: May 2, 2017
    Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    Inventors: Joachim Schulz, Martin Lambert
  • Patent number: 9618740
    Abstract: A micromirror for a micromirror device includes: a mirror side; and a back side which is directed away from the mirror side, at least one central area of the back side having at least one surface which is plane parallel to the mirror side, the back side being shaped in such a way that on two opposite sides of the central area, a side area having at least one side surface of the back side in each case, which is curved and/or oriented inclined toward the mirror side borders on the central area of the back side, and a height of the micromirror continuously decreasing starting from the central area along a cross section of the micromirror, which runs through the central area and the two side areas.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: April 11, 2017
    Assignee: ROBERT BOSCH GMBH
    Inventors: Simon Armbruster, Helmut Grutzeck, Joerg Muchow, Frederic Njikam Njimonzie, Johannes Baader, Stefan Pinter, Rainer Straub, Zoltan Lestyan
  • Patent number: 9593008
    Abstract: A MEMS sensor is disclosed. The MEMS sensor includes a MEMS structure and a substrate coupled to the MEMS structure. The substrate includes a layer of metal and a layer of dielectric material. The MEMS structure moves in response to an excitation. A first over-travel stop is formed on the substrate at a first distance from the MEMS structure. A second over-travel stop on the substrate at a second distance from the MEMS structure. At least one electrode on the substrate at a third distance from the MEMS structure. The first, second and third distances are all different.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: March 14, 2017
    Assignee: InvenSense, Inc.
    Inventors: Matthew Julian Thompson, Michael Dueweke, Ilya Gurin, Joseph Seeger
  • Patent number: 9573801
    Abstract: A MEMs actuator device and method of forming includes arrays of actuator elements. Each actuator element has a moveable top plate and a bottom plate. The top plate includes a central membrane member and a cantilever spring for movement of the central membrane member. The bottom plate consists of two RF signal lines extending under the central membrane member. A MEMs electrostatic actuator device includes a CMOS wafer, a MEMs wafer, and a ball bond assembly. Interconnections are made from a ball bond to an associated through-silicon-via (TSV) that extends through the MEMS wafer. A RF signal path includes a ball bond electrically connected through a TSV and to a horizontal feed bar and from the first horizontal feed bar vertically into each column of the array. A metal bond ring extends between the CMOS wafer and the MEMS wafer. An RF grounding loop is completed from a ground shield overlying the array to the metal bond ring, a TSV and to a ball bond.
    Type: Grant
    Filed: February 15, 2016
    Date of Patent: February 21, 2017
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Arun Gupta, William C. McDonald, Adam Fruehling, Ivan Kmecko, Lance Barron, Divyanshu Agrawal
  • Patent number: 9525379
    Abstract: A control method for a vibration generator is provided. The vibration generator includes a fixed part around which a coil is wound, a movable part having a magnet, a bridge part movably supporting the movable part, and a power supply unit which applies an alternating current of a predetermined frequency to the coil. The power supply unit starts at the time of startup by the alternating current with a starting frequency which differs from a resonance frequency of the movable part, and the power supply unit changes the frequency of the applied alternating current to the resonance frequency of the movable part when the amount of vibration at the starting frequency reaches a predetermined ratio with respect to a saturation vibration amount of the resonance frequency.
    Type: Grant
    Filed: June 4, 2015
    Date of Patent: December 20, 2016
    Assignee: Minebea Co., Ltd.
    Inventors: Mikio Umehara, Yutaka Kamogi
  • Patent number: 9513346
    Abstract: A method and system for a device with a magnetic sensor includes a first permanent magnet and a second permanent magnet. The first permanent magnet and the second permanent magnet of the magnetic sensor have at least one alternating ferromagnetic (FM) layer and antiferromagnetic (AFM) layer. The first permanent magnet is magnetized in a first direction and the second permanent magnet is magnetized in a second direction which is substantially orthogonal to the first direction. The blocking temperature of the AFM layer of the first permanent magnet is higher than the blocking temperature of the AFM layer of the second permanent magnet.
    Type: Grant
    Filed: January 7, 2014
    Date of Patent: December 6, 2016
    Assignee: INVENSENSE, INC.
    Inventors: Jong Il Shin, Jongwoo Shin
  • Patent number: 9507144
    Abstract: An optical deflector includes a mirror unit and a support member. The mirror unit includes a vibration mirror part extending in a main scanning direction and a torsion bar part extending in a direction crossing the main scanning direction and supporting the vibration mirror part. The support member supports the mirror unit. The support member has a pair of solid parts. The pair of solid parts are arranged adjacent to the circumferential side surfaces of both end portions of the vibration mirror part in the main scanning direction and suppress a vortex generated when the vibration mirror part vibrates. The optical deflector further includes a positioning mechanism which performs positioning of the mirror unit for the support member so that a clearance distance between each solid part and the circumferential side surfaces of both end portions of the vibration mirror part becomes a preset setting distance.
    Type: Grant
    Filed: August 25, 2015
    Date of Patent: November 29, 2016
    Assignee: KYOCERA DOCUMENT SOLUTIONS INC.
    Inventor: Yuji Toyota
  • Patent number: 9459449
    Abstract: A device projecting images by micro electro-mechanical system (MEMS) technology mirrors includes a base, a rotating seat, a substrate, a reflective mirror, a driver, and a controller. The rotating seat is rotably positioned on the base. The substrate is positioned on the rotating seat. The at least one MEMS reflective mirror is formed on the substrate and configured for rotating in two directions under control of the attached driver and controller to form two-dimensional images in a range.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: October 4, 2016
    Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: Kai-Wen Wu
  • Patent number: 9461443
    Abstract: An apparatus having a variable angle light source characterized by a pivot point, a variable response optical receiver, and a first optical system is disclosed. The variable response optical receiver receives light generated by the light source on a receiving surface, the receiver generating a signal indicative of an intensity of light that impinges on a receiving surface. The first optical system images the pivot point to a fixed point relative to the receiver surface. In one aspect of the invention the first optical system is chosen such that light from the variable angle light source covers more& than half the receiving surface. The variable angle light source can include a gain chip in a semiconductor laser having a pivot point located substantially on a facet of the gain chip.
    Type: Grant
    Filed: February 12, 2014
    Date of Patent: October 4, 2016
    Assignee: Agilent Technologies, Inc.
    Inventors: Yuri Beregovski, Miao Zhu, Adam Kleczewski, Varun Raghunathan
  • Patent number: 9435957
    Abstract: A demultiplexer includes an input optical link to receive an input signal. A grating receives the input signal from the input optical link and generates individual optical wavelength signals. A mirror array operative as a beam steering engine receives the individual optical wavelength signals and redirects them to the grating. Output optical links receive the individual optical wavelength signals from the grating.
    Type: Grant
    Filed: November 7, 2013
    Date of Patent: September 6, 2016
    Assignee: Coadna Photonics Inc.
    Inventors: Shan Zhong, Shijun (Shawn) Xiao
  • Patent number: 9416004
    Abstract: Semiconductor devices and fabrication methods are provided. In a semiconductor device, a semiconductor substrate includes a first electrode layer having a top surface coplanar with a top surface of the semiconductor substrate. A sacrificial layer is formed on the semiconductor substrate and the first electrode layer. A first mask layer made of a conductive material is formed on the sacrificial layer. The first mask layer and the sacrificial layer are etched until a surface of the first electrode layer is exposed to form openings through the first mask layer and the sacrificial layer. A cleaning process is performed to remove etch byproducts adhered to a surface of the first mask layer and adhered to sidewalls and bottom surfaces of the openings. Conductive plugs are formed in the openings after the cleaning process.
    Type: Grant
    Filed: January 13, 2015
    Date of Patent: August 16, 2016
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
    Inventors: Guangcai Fu, Tianlun Yang, Xiaoping Zhang
  • Patent number: 9354443
    Abstract: An optical scanning device includes a mirror that oscillates to scan incident visible light. The mirror includes a substrate, a metal film formed on the substrate, and an reflection enhancing film stacked on the metal film.
    Type: Grant
    Filed: August 8, 2014
    Date of Patent: May 31, 2016
    Assignee: MITSUMI ELECTRIC CO., LTD.
    Inventors: Yuki Maruyama, Misato Abe
  • Patent number: 9341790
    Abstract: In one embodiment, micro-electro-mechanical-system (MEMS) mirror structure includes an electrode plate including a first deflection electrode and a second deflection electrode, where the second deflection electrode is opposite the first deflection electrode, where the first deflection electrode is configured to receive a first drive voltage, and where the second deflection electrode is configured to receive a second drive voltage. The MEMS mirror structure also includes a mirror support pillar disposed on the electrode plate, where the mirror support pillar has a bearing surface and a mirror disposed above the bearing surface of the support pillar, where the mirror has a deflection angle, and where the first voltage is nonzero when the deflection angle is zero.
    Type: Grant
    Filed: March 10, 2014
    Date of Patent: May 17, 2016
    Assignee: Huawei Technologies Co., LTD.
    Inventor: Alan Frank Graves
  • Patent number: 9337711
    Abstract: An actuator including a movable portion that swings about a swing axis, a connecting portion that extends from the movable portion and torsionally deforms in response to the swinging of the movable portion, and a support portion that supports the connecting portion, wherein the movable portion is so shaped that the length thereof parallel to the swing axis decreases stepwise with distance from the swing axis in a plan view, and the movable portion, the support portion, and the connecting portion are formed by anisotropically etching a silicon substrate.
    Type: Grant
    Filed: April 9, 2012
    Date of Patent: May 10, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Makiko Hino, Yasushi Mizoguchi
  • Patent number: 9335543
    Abstract: An optical scanner includes: a movable plate which includes a light reflection unit; a first torsion bar which oscillatably supports the movable plate around a first axis; a first displacement member which is connected to the first torsion bar; a second torsion bar which oscillatably supports the first displacement member around a second axis; a second displacement member which is connected to the second torsion bar; and an actuator which is installed on the second displacement member and applies a displacement to the second displacement member so as to apply torsional deformation and bending deformation to the second torsion bar, in which the first displacement member includes a frame member surrounding the movable plate, and a damper which has a smaller thickness than that of the frame member and extends in a direction intersecting with a direction in which the second torsion bar extends from the frame member.
    Type: Grant
    Filed: October 28, 2014
    Date of Patent: May 10, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Yasushi Mizoguchi, Hisako Kojima
  • Patent number: 9335510
    Abstract: An electronic device may be provided with a display mounted in a housing. The display may have an array of display pixels that provide light to a user. The array of display pixels may form active display structures with a rectangular shape. The rectangular active display structures may be surrounded by an inactive border region. Reflector structures may be used to reflect light that is emitted from peripheral portions of the active display structures to a portion of the display overlapping the inactive border region, thereby providing the display with an effective active area that is larger than the area of the active display structures. The reflector structures may include rotatable reflectors. Control circuitry may use a rotatable positioner to rotate rotatable reflector structures in synchronization with controlling which pixel data is displayed by the display pixels in the peripheral portions of the active display structures.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: May 10, 2016
    Assignee: Apple Inc.
    Inventors: Tseng-Mau Yang, Dale N. Memering, Christopher D. Prest
  • Patent number: 9310607
    Abstract: An actuator includes a light reflection part having light reflectivity, a movable part having the light reflection part and being rotatable around a rotation center axis, a pair of connection parts connected to the movable part, and a support part that supports the pair of connection parts, and each of the connection parts includes a pair of beam members, a distance between the pair of beam members gradually increases from a first surface side toward a second surface side of the movable part when seen from a direction in parallel to the rotation center axis of the movable part, and given that a distance between ends at the first surface side of the pair of beam members is W1 and a thickness of the pair of beam members in a thickness direction of the movable part is t, the following expression (1) is satisfied. w 1 < t tan ? ? 54.
    Type: Grant
    Filed: September 13, 2011
    Date of Patent: April 12, 2016
    Assignee: Seiko Epson Corporation
    Inventors: Makiko Hino, Yasushi Mizoguchi