Reflective Element Moved By Deformable Support Patents (Class 359/224.1)
  • Patent number: 12038576
    Abstract: An optical scanning device comprises a scanning structure, an anchor, and a drive unit. The drive unit includes a first drive unit and a second drive unit. The first drive unit includes a first drive beam, an electrode interconnect, paired supports, and a thin film magnet. The first drive beam has a first fixed end connected to the support and a first drive end connected to the scanning structure. The electrode interconnect is formed on the first drive beam. The supports are connected to the anchor and disposed to sandwich the first drive beam. The thin film magnet is disposed on each of the supports. The thin film magnet is disposed in such a manner that a magnetic line of force is generated in a direction intersecting a direction in which the electrode interconnect extends.
    Type: Grant
    Filed: March 19, 2019
    Date of Patent: July 16, 2024
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Nobuaki Konno, Yoshiaki Hirata, Takahiko Ito
  • Patent number: 12007556
    Abstract: An light deflection device includes an light deflector having first and second piezoelectric actuators which cause a mirror unit to reciprocatingly turn around a resonant axis and a non-resonant axis, respectively, a drive unit which supplies first and second drive voltages, a swing angle fluctuation width detection unit which detects a first swing angle fluctuation width of the mirror unit around the resonant axis, a sensitivity equivalent value detection unit which detects a sensitivity equivalent value on the basis of a detected value of a second drive voltage fluctuation width and a detected value of the first swing angle fluctuation width, and a determination unit which determines whether a non-resonant axis side swing state of the mirror unit around the non-resonant axis is normal on the basis of a detected value of the sensitivity equivalent value.
    Type: Grant
    Filed: April 9, 2021
    Date of Patent: June 11, 2024
    Assignee: STANLEY ELECTRIC CO., LTD.
    Inventor: Atsuhiko Chikaoka
  • Patent number: 12007508
    Abstract: A scanner and a method for controlling the scanner for a Lidar system are provided. The method comprises: producing a trigger signal by a positional sensor of the scanner; generating a single drive signal comprising a first component at a first frequency and a second component at a second frequency, the first component and the second component are superposed with a fixed phase relationship with aid of the trigger signal; transmitting the single drive signal to the scanner, and the scanner has resonant responses at the first frequency; and actuating the scanner to move in a first periodic motion at the first frequency about a first axis, and move in a second periodic motion at the second frequency about a second axis.
    Type: Grant
    Filed: April 25, 2023
    Date of Patent: June 11, 2024
    Assignee: Hesai Technology Co., Ltd.
    Inventors: Yongfeng Gao, Shengping Mao, Liangchen Ye, Shaoqing Xiang
  • Patent number: 11970389
    Abstract: An actuator device includes a support portion; a first movable portion; a second movable portion; a first connection portion that connects the first and second movable portions such that the first movable portion is swingable around a first axis; a second connection portion that connects the second movable portion and the support portion such that the first movable portion is swingable around the first axis. Two natural angular frequencies ?1 and ?2 (where ?1<?2) for vibration of the first and second movable portions around the first axis satisfy one of the following equation (1) and equation (2) and do not satisfy the other, [ Equation ? 1 ] 0 < 1 - ( ? 1 ? ii ) 2 ? 0.2 ( 1 ) [ Equation ? 2 ] 0 < ( ? 2 ? ii ) 2 - 1 ? 0.
    Type: Grant
    Filed: August 9, 2019
    Date of Patent: April 30, 2024
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventor: Daiki Suzuki
  • Patent number: 11947113
    Abstract: A movable device includes a movable part including a mirror unit; a torsion bar with one end coupled to the movable part; a first cantilever part coupled to the other end of the torsion bar; a second cantilever part with one end coupled to a coupling portion of the first cantilever part; a stationary part coupled to the other end of the second cantilever part; and a driver configured to deform the second cantilever part. A width of the coupling portion of the first cantilever part, to which the second cantilever part is coupled, is narrower than a width of the second cantilever part in a width direction of the coupling portion.
    Type: Grant
    Filed: September 17, 2020
    Date of Patent: April 2, 2024
    Assignee: RICOH COMPANY, LTD.
    Inventor: Wataru Yokota
  • Patent number: 11939211
    Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts, and a pair of first portions. One of the first portions is connected to one of the first connection portions and one of the second connection portions and extends in a inclined direction, and the other of the first portions is connected to the other of the first connection portions and the one of the second connection portions and extends in a inclined direction.
    Type: Grant
    Filed: April 28, 2023
    Date of Patent: March 26, 2024
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Daiki Suzuki, Takuma Osaki, Naoto Sakurai
  • Patent number: 11927762
    Abstract: A display system comprising a steerable display having a monocular field of view of at least 1 degree, positioned within a scannable field of view of at least 20 degrees, the steerable display positioned for a user. In one embodiment, the steerable display is positioned for the user's fovea.
    Type: Grant
    Filed: October 4, 2021
    Date of Patent: March 12, 2024
    Assignee: Avegant Corp.
    Inventors: Aaron Matthew Eash, Andrew John Gross, Christopher David Westra, D. Scott Dewald, Edward Chia Ning Tang, Joseph Roger Battelle, Kevin William King, Warren Cornelius Welch, III, Eric Richard David Frasch, David A. Henderson, Qin Xu
  • Patent number: 11919768
    Abstract: Provided is a vibrating mirror element including: a mirror part; a substrate made of metal, including a pair of beams, a support supporting each of the pair of beams, and a torsion part swingably supporting the mirror part; a driving source generating a plate wave that swings the mirror part; and a vibration suppression part suppressing vibration transmitted to the pair of beams. The vibration suppression part is configured to suppress the vibration transmitted to the pair of beams by abutting against the pair of beams at a position between a second mirror end among ends of the mirror part that is opposite a first mirror end near the support and the torsion part in a first direction in which the pair of beams extends.
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: March 5, 2024
    Assignee: FUNAI ELECTRIC CO., LTD.
    Inventors: Kenji Tanehashi, Fuminori Tanaka, Kenichi Fujita
  • Patent number: 11920992
    Abstract: Deformable sensors and methods for magnetically modifying membrane stiffness are provided. A deformable sensor may include a membrane coupled to a housing to form a sensor cavity. The deformable sensor may further include a first magnet located on an inner surface of the membrane in the sensor cavity. The deformable sensor may additionally include a magnetic object located at a base within the sensor cavity. The magnetic object may be configured to modifiably repel the first magnet and modify stiffness of the deformable sensor based upon the modified repulsion.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: March 5, 2024
    Assignee: TOYOTA RESEARCH INSTITUTE, INC.
    Inventors: Manuel L. Kuehner, Naveen Suresh Kuppuswamy
  • Patent number: 11906728
    Abstract: Examples are disclosed that relate to pixel-shifting devices for increasing display resolution. An example pixel-shifting device comprises an outer frame, an inner frame coupled to the outer frame via a flexure, a path-shifting optical element mounted to the inner frame, and one or more piezoelectric actuators configured to drive motion of the inner frame.
    Type: Grant
    Filed: June 28, 2021
    Date of Patent: February 20, 2024
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Utku Baran, Wyatt Owen Davis, Fei Chen
  • Patent number: 11906813
    Abstract: The present disclosure relates to optical devices and systems, specifically those related to light detection and ranging (LIDAR) systems. An example device includes a shaft defining a rotational axis. The shaft includes a first material having a first coefficient of thermal expansion. The device also includes a rotatable mirror disposed about the shaft. The rotatable mirror includes a multi-sided structure having an exterior surface and an interior surface. The multi-sided structure includes a second material having a second coefficient of thermal expansion. The second coefficient of thermal expansion is different from the first coefficient of thermal expansion. The multi-sided structure also includes a plurality of reflective surfaces disposed on the exterior surface of the multi-sided structure. The multi-sided structure yet further includes one or more support members coupled to the interior surface and the shaft.
    Type: Grant
    Filed: August 26, 2022
    Date of Patent: February 20, 2024
    Assignee: Waymo LLC
    Inventors: Blaise Gassend, Ryan Davis, David Duff
  • Patent number: 11885957
    Abstract: An optical deflector capable of making a swing angle of a reflective plate larger is provided. In drive elements, since a size in the Y direction at first positions separated by a first distance from the reflective plate is larger than a size in the Y direction at second positions separated by a second distance from the reflective plate, the second distance being greater than the first distance, it is possible to increase displacement of tips of beam portions at the first positions and to make a swing angle of the reflective plate large by increasing a generated force of the entire beam portions.
    Type: Grant
    Filed: February 13, 2019
    Date of Patent: January 30, 2024
    Assignee: PIONEER CORPORATION
    Inventors: Tomotaka Yabe, Kenji Kawai, Seiro Oshima
  • Patent number: 11859598
    Abstract: SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.
    Type: Grant
    Filed: June 2, 2022
    Date of Patent: January 2, 2024
    Assignee: Hutchinson Technology Incorporated
    Inventors: Duane M. Jelkin, Raymond R. Wolter
  • Patent number: 11831255
    Abstract: A scanner comprises a mirror, a first piezoelectric actuator, a second piezoelectric actuator, a third piezoelectric actuator, a fourth piezoelectric actuator, a first connecting member, a second connecting member, a first mirror spring, a second mirror spring, a stationary member, a first plurality of actuator springs, a second plurality of actuator springs, a third plurality of actuator springs, a fourth plurality of actuator springs, a first plurality of electrodes, and a second plurality of electrodes. The scanner is driven by piezoelectric actuators. A method of fabricating the scanner comprises the steps of providing a wafer; oxidation; deposition; patterning; and applying a singulation process.
    Type: Grant
    Filed: April 18, 2021
    Date of Patent: November 28, 2023
    Assignee: ULTIMEMS, INC.
    Inventors: Yee-Chung Fu, Han-Tang Su, Yu-Chun Yu
  • Patent number: 11828936
    Abstract: One embodiment of the present application sets forth a wearable device that includes a display comprising a plurality of pixels and configured to emit light, and a micro-lens array located adjacent to the display, and configured to produce a light field by altering the light emitted by the display, where at least one of the display or the micro-lens array is configured to move from a first position to a second position that aligns a first pixel in the plurality of pixels relative to the micro-lens array.
    Type: Grant
    Filed: October 25, 2021
    Date of Patent: November 28, 2023
    Assignee: Meta Platforms Technologies, LLC
    Inventors: Ahmad Byagowi, Ramesh Raskar, Andrew Hamilton Coward, Ethan Kroll Gordon
  • Patent number: 11796793
    Abstract: An optical deflector includes a mirror configured to reflect light; a pair of support portions each having an end connected to the mirror, and configured to support the mirror; first actuators connected to the respective support portions, and configured to deform the support portions so as to cause the mirror to oscillate about a first axis; a movable frame configured to support the first actuators; and second actuators connected to the movable frame and disposed opposite to the first actuators, with the support portions being interposed between the first actuators and the second actuators. The second actuators are not connected to the support portions. The first actuators and the second actuators bend and deform in the same direction.
    Type: Grant
    Filed: November 20, 2020
    Date of Patent: October 24, 2023
    Assignee: Ricoh Company, Ltd.
    Inventors: Mitsuhiro Yoda, Yukito Sato, Mizuki Shinkawa, Goichi Akanuma, Shuichi Suzuki
  • Patent number: 11796638
    Abstract: In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: October 24, 2023
    Assignee: Beijing Voyager Technology Co., Ltd.
    Inventors: Youmin Wang, Yufeng Wang, Qin Zhou, Gary Li, Sergio Fabian Almeida Loya
  • Patent number: 11757380
    Abstract: A driving device that can be prevented from being damaged is provided. Abase member includes a frame-shaped part that rotatably supports a movable part via a shaft part provided on an inner circumference side of the frame-shaped part, and an elastic structural part extending to an outer circumference side of the frame-shaped part. The elastic structural part of the base member is joined to the pedestal, and this allows the difference in amount of thermal deformation generated on the base member and the pedestal to be absorbed by deformation of the elastic structural part, thereby preventing the driving device from being damaged.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: September 12, 2023
    Assignee: PIONEER CORPORATION
    Inventor: Shogo Kitazawa
  • Patent number: 11736809
    Abstract: A method for adjusting illumination of a user operating an information handling system may include capturing an image of the user's face using a camera at the information handling system. The method may further include determining lighting characteristics of the user's face based on the captured image. A border to be displayed surrounding a video image can be generated based on the determined lighting characteristics. The video image and the border can be displayed at a display device.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: August 22, 2023
    Assignee: Dell Products L.P.
    Inventors: Jace W. Files, John Trevor Morrison
  • Patent number: 11675184
    Abstract: A light deflector includes a movable unit having a reflective surface, an elastic member that supports the movable unit in a tiltable manner about a tilting axis, and a supporter that supports the elastic member. The elastic member has a first connection segment whose rigidity changes continuously, and is connected to the movable unit at the first connection segment. The rigidity changes continuously between the elastic member and the movable unit via the first connection segment. The elastic member includes a linear segment having a substantially fixed width, the elastic member has a second connection segment that is provided between the linear segment and the supporter and that connects the linear segment and the supporter, a width of the second connection segment gradually increases toward the supporter, and a maximum width of the first connection segment is greater than a maximum width of the second connection segment.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: June 13, 2023
    Assignee: OLYMPUS CORPORATION
    Inventor: Naoki Shiraishi
  • Patent number: 11673799
    Abstract: To manufacture an oscillating structure, a wafer is processed by: forming torsional elastic elements; forming a mobile element connected to the torsional elastic elements; processing the first side of the wafer to form a mechanical reinforcement structure; and processing the second side of said wafer by steps of chemical etching, deposition of metal material, and/or deposition of piezoelectric material. Processing of the first side of the wafer is carried out prior to processing of the second side of the wafer so as not to damage possible sensitive structures formed on the first side of the wafer.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: June 13, 2023
    Assignee: STMicroelectronics S.r.l.
    Inventors: Enri Duqi, Nicolo′ Boni, Lorenzo Baldo, Massimiliano Merli, Roberto Carminati
  • Patent number: 11662467
    Abstract: A LIDAR system including a MEMS scanning device is disclosed. The LIDAR system includes a light source, a light deflector, a sensor, and a processor. The light deflector deflects light from the light source or light received from an environment outside a vehicle in which the LIDAR system is installed. The sensor detects the light received from the light source or the environment. The processor determines a distance of one or more objects in the environment from the vehicle based on the signals from the sensor. The light deflector includes one or more actuators, which include one or more actuating arms. Connectors connect the actuating arms to an MEMS mirror or other deflector. The actuating arms move when subjected to an electrical field in the form of a voltage or current. Movement of the actuating arms causes movement of the MEMS mirror or deflector causing it to deflect light.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: May 30, 2023
    Assignee: INNOVIZ TECHNOLOGIES LTD.
    Inventors: Matityahu Shani, David Elooz, Idan Bakish, Michael Girgel, Moshe Medina, Sason Sourani, Yair Alpern, Smadar David Raly
  • Patent number: 11624935
    Abstract: A multi-axis motor includes a first elongate magnet member disposed in a first orientation and a second elongate magnet member disposed in a second orientation orthogonal to the first orientation and mechanically coupled to the first elongate magnet member. The first elongate magnet member is operable to adjust a first axis of a fine axis structure. The second elongate magnet member is operable to adjust a second axis of the fine axis structure.
    Type: Grant
    Filed: March 20, 2019
    Date of Patent: April 11, 2023
    Assignee: DRS Network & Imaging Systems, LLC
    Inventors: Brian R. Pekarek, Milton A. Woodall, Jim Royalty
  • Patent number: 11619688
    Abstract: A planar Hall sensing element includes a first pair of sensing electrodes mutually opposed in a first direction across the sensing element and a second pair of sensing electrodes mutually opposed in a second direction across the sensing element, with the second direction orthogonal to the first direction. A first pair of bias electrodes is mutually opposed in a third direction and a second pair mutually opposed in a fourth direction across the sensing element, the fourth direction orthogonal to the third direction. The third and fourth directions are rotated 45° with respect to the first and second directions so each sensing electrode is arranged between a bias electrode of the first pair and second pair. A DC bias current is supplied between the first and second pairs of bias electrodes. First and second Hall voltages are sensed at the first and second pairs of sensing electrodes.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: April 4, 2023
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Marco Crescentini, Michele Biondi, Marco Tartagni, Aldo Romani, Roberto Antonio Canegallo
  • Patent number: 11614615
    Abstract: A laser beam display device that can dynamically control the resonant frequency of a mirror is provided. The increase the reliability of a device by controlling the resonant frequency of a mirror instead of requiring components of a display device to react to changes in the resonant frequency of a mirror. A controller can drive a mirror with an input signal, receive a signal or data indicating a target resonant frequency, and bias the input signal to control the resonant frequency of the mirror. In some embodiments, the controller can also receive a feedback signal from a mirror indicating a current resonant frequency. The controller can also bias the input signal to increase or decrease the current resonant frequency. By dynamically controlling the resonant frequency of a mirror, a device can minimize any difference between the current resonant frequency detected in a feedback signal and the target resonant frequency.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: March 28, 2023
    Assignee: MICROSOFT TECHNOLOGY LICENSING, LLC
    Inventors: Chuan Pu, Wenjun Liao
  • Patent number: 11605478
    Abstract: A method of making a mirror for use with extreme ultraviolet or x-ray radiation includes: i) providing a base substrate having a curved surface, wherein the curved surface deviates from a curvature of a target mirror surface at high spatial frequencies corresponding to spatial periods less than 2 mm; and ii) securing a first side of a thin plate to the curved surface of the base substrate to cover the curved surface, wherein the plate has a thickness thin enough to conform to the curvature of the target mirror surface and thick enough to attenuate deviations at the high spatial frequencies on a second side of the thin plate opposite the first side that are caused by the deviations on the curved surface of the base substrate. A mirror made by the method is also disclosed.
    Type: Grant
    Filed: November 4, 2020
    Date of Patent: March 14, 2023
    Assignee: Zygo Corporation
    Inventor: John Matthew Kincade
  • Patent number: 11556000
    Abstract: A distally-actuated scanning mirror includes: a mirror block with reflective surface on one side; torsional hinges with proximal ends rigidly attached to the mirror block, and with distal ends attached to flexural structures configured to transform translational motion of the piezoelectric elements into rotational motion of the distal ends of the hinges; and piezoelectric elements providing such translational motion. The distally-actuated scanning mirror also includes flexural structures made of separate flexures attached to the opposite surfaces of the distal ends of the hinges, which flexural structures have defined thinned-down flexural points. Portions of the distally-actuated scanning mirror may be 3D printed and/or fabricated by silicon MEMS technology. The mirror is fabricated from a Silicon-on-Insulator wafer, having a relatively thick (e.g., 380 um) handle layer, and a relatively thin e.g., 50 um), where photolithography with backside-alignment allows separate patterning of these two layers.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: January 17, 2023
    Assignee: Red Creamery LLC
    Inventors: Ron Goldman, Dmitry Yavid, Igor Paprotny, Christopher Silvio Cosentino
  • Patent number: 11520139
    Abstract: A rotating steering mirror assembly comprising a first wedge rotatable relative to a base and a second wedge rotatable relative to the first wedge to controllably tilt a mirror on an outward- or forward-facing surface of the second wedge. Respective motors can independently rotate the first and second wedges.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: December 6, 2022
    Assignee: LOCKHEED MARTIN CORPORATION
    Inventors: Dennis J. Adams, Alan F. Lindsay
  • Patent number: 11474346
    Abstract: An optical scanning device includes a mirror that includes a mirror reflection surface, a driving part that drives the mirror, and a fixed frame that supports the mirror via the driving part. The fixed frame includes one or more inspection patterns that are formed while at least one of the mirror and the driving part is formed.
    Type: Grant
    Filed: November 6, 2019
    Date of Patent: October 18, 2022
    Assignee: MITSUMI ELECTRIC CO., LTD.
    Inventor: Yasuyuki Sudo
  • Patent number: 11460662
    Abstract: The present disclosure relates to optical devices and systems, specifically those related to light detection and ranging (LIDAR) systems. An example device includes a shaft defining a rotational axis. The shaft includes a first material having a first coefficient of thermal expansion. The device also includes a rotatable mirror disposed about the shaft. The rotatable mirror includes a multi-sided structure having an exterior surface and an interior surface. The multi-sided structure includes a second material having a second coefficient of thermal expansion. The second coefficient of thermal expansion is different from the first coefficient of thermal expansion. The multi-sided structure also includes a plurality of reflective surfaces disposed on the exterior surface of the multi-sided structure. The multi-sided structure yet further includes one or more support members coupled to the interior surface and the shaft.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: October 4, 2022
    Assignee: Waymo LLC
    Inventors: Blaise Gassend, Ryan Davis, David Duff
  • Patent number: 11434130
    Abstract: Described examples include an apparatus having a substrate with a substrate surface. The apparatus also includes an element with a planar surface facing the substrate surface and with a nonplanar surface opposite the planar surface facing away from the substrate surface.
    Type: Grant
    Filed: December 31, 2019
    Date of Patent: September 6, 2022
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Patrick Ian Oden, James Norman Hall
  • Patent number: 11385456
    Abstract: A device and method for pivotally positioning a moveable member, wherein a magnetically conductive base member is arranged opposite the magnetically conductive moveable member with a gap provided therebetween. A first magnet is arranged for providing a first magnetic flux through the base member and the moveable member such as to provide at least two first magnetic closed flux paths. A second electromagnet is arranged for providing a second magnetic flux through the base member and the moveable member such as to provide at least one second magnetic closed flux path. The second electromagnet is configured for changing, in one or more of the at least two first magnetic closed flux paths, a resulting magnetic flux provided by the first magnetic flux and the second magnetic flux such as to pivot the moveable member by means of the pivot member. The moveable member is pivotally suspended using a flexural pivot member.
    Type: Grant
    Filed: September 20, 2018
    Date of Patent: July 12, 2022
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventor: Stefan Kuiper
  • Patent number: 11366015
    Abstract: A microelectromechanical infrared sensing device is provided, which includes a substrate, a sensing plate, a reflecting plate, a plurality of first supporting elements, a plurality of second supporting elements and a plurality of stoppers. The second supporting elements are connected to the sensing plate, such that the sensing plate is suspended above the substrate. The reflecting plate is disposed between the substrate and the sensing plate. The first supporting elements are connected to the reflecting plate, such that the reflecting plate is suspended between the substrate and the reflecting plate. When the reflecting plate moves toward the substrate and at least one of the stoppers contacts the substrate or the reflecting plate, the distance between the reflecting plate and the sensing plate increases.
    Type: Grant
    Filed: April 26, 2021
    Date of Patent: June 21, 2022
    Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Bor-Shiun Lee, Ming-Fa Chen
  • Patent number: 11360300
    Abstract: An actuator includes an arm starting end having a piezoelectric element, a first end of the arm starting end connected to an inner side of a fixed frame, the arm starting end extending in a straight line, along a Y-axis direction through a gap between the fixed frame and a mirror surface, from the first end to beyond a middle point of an outer side of the mirror surface; an arm terminating end including a first end connected to the middle point of the outer side of the mirror surface, the arm terminating end extending parallel to the arm starting end; and an arm relay that connects a second end of the arm starting end to a second end of the arm terminating end, the arm relay being formed in a zigzag.
    Type: Grant
    Filed: November 1, 2017
    Date of Patent: June 14, 2022
    Assignee: DAI-ICHI SEIKO CO., LTD.
    Inventors: Kenji Ogata, Shogo Kurogi
  • Patent number: 11356059
    Abstract: An oscillator system includes a first oscillator structure configured to oscillate about a first rotation axis at a first oscillation frequency; a second oscillator structure configured to oscillate about a second rotation axis at a second oscillation frequency; a driver circuit configured to generate a first driving signal to drive an oscillation of the first oscillator structure with a first oscillation phase and the first oscillation frequency and generate a second driving signal to drive an oscillation of the second oscillator structure with a second oscillation phase and the second oscillation frequency. The first oscillation frequency and the second oscillation frequency have a variable frequency ratio with respect to each other that varies over time. The driver circuit is configured to modulate at least one of the first oscillation phase or the second oscillation phase to modulate the variable frequency ratio.
    Type: Grant
    Filed: April 29, 2020
    Date of Patent: June 7, 2022
    Inventors: David Brunner, Georg Schitter, Richard Schroedter, Han Woong Yoo
  • Patent number: 11327295
    Abstract: A MEMS device is formed in a die of semiconductor material having a cavity defined therein and having an anchorage portion. A tiltable structure is elastically suspended over the cavity and has a main extension in a horizontal plane. First and second supporting arms extend between the anchorage portion and opposite sides of the tiltable structure. First and second resonant piezoelectric actuation structures are intended to be biased to thereby cause rotation of the tiltable structure about a rotation axis. The first supporting arm is formed by first and second torsion springs, which are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis and are coupled together at a constraint region. The first and second resonant piezoelectric actuation structures extend between the anchorage portion and the constraint structure, on first and second sides of the first supporting arm.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: May 10, 2022
    Assignee: STMicroelectronics S.r.l.
    Inventors: Roberto Carminati, Nicolo' Boni, Massimiliano Merli
  • Patent number: 11323797
    Abstract: An acoustic transducer is disposed within a wearable sound device or to be disposed within the wearable sound device. The acoustic transducer includes a first anchor structure and a first flap. The first flap includes a first end and a second end. The first end is anchored by the first anchor structure, and the second end is configured to perform a first up-and-down movement to form a vent temporarily. The first flap partitions a space into a first volume to be connected to an ear canal and a second volume to be connected to an ambient of the wearable sound device. The ear canal and the ambient are connected via the vent temporarily opened.
    Type: Grant
    Filed: June 11, 2021
    Date of Patent: May 3, 2022
    Assignee: xMEMS Labs, Inc.
    Inventors: Jemm Yue Liang, Chiung C. Lo, Martin George Lim, Wen-Chien Chen, Michael David Housholder, David Hong
  • Patent number: 11312618
    Abstract: A microdevice (100) comprising a movable element (111) capable of moving relative to a fixed part (115), produced in first and second layers of material (104, 106) arranged one above the other such that the movable element comprises a portion (112) of the first layer and a portion (118) of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure (121) formed in the first and/or second layer of material.
    Type: Grant
    Filed: March 14, 2018
    Date of Patent: April 26, 2022
    Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES SAFRAN
    Inventors: Audrey Berthelot, Mikaël Colin, Alain Jeanroy, Guillaume Lehee, Olivier Vancauwenberghe, Philippe Onfroy, Jean-Sébastien Mace
  • Patent number: 11290626
    Abstract: A swivelling module able to capture light from any desired direction includes a light-transmitting housing, a reflecting element in the light-transmitting housing, a plurality of magnets disposed on a periphery of the reflecting element, and a plurality of electromagnetic induction coils disposed on corners of the light-transmitting housing. When the electromagnetic induction coils are energized, the electromagnetic induction coils interact with the magnets to drive the reflecting element to rotate to a desired direction. An imaging device and an electronic device including the swivelling module are also disclosed.
    Type: Grant
    Filed: August 5, 2020
    Date of Patent: March 29, 2022
    Assignee: TRIPLE WIN TECHNOLOGY (SHENZHEN) CO. LTD.
    Inventor: Zhi-Gao Dong
  • Patent number: 11287643
    Abstract: A displacement enlarging mechanism includes a substrate, a fixing portion provided at the substrate, an actuator coupled to the fixing portion, a beam extending in a direction substantially parallel to an upper surface of the substrate and having a base end side has been coupled to the actuator and coupled to the fixing portion and having folded back in a direction crossing the upper surface of the substrate, and a coupling portion and a mirror coupled to a folded-back portion formed by folding back of the beam. The actuator drives the beam to push or pull the beam from the base end side in the direction of the folded-back portion.
    Type: Grant
    Filed: March 8, 2018
    Date of Patent: March 29, 2022
    Assignee: SUMITOMO PRECISION PRODUCTS CO., LTD.
    Inventor: Mario Kiuchi
  • Patent number: 11274035
    Abstract: A overhanging device cavity structure comprises a substrate and a cavity disposed in or on the substrate. The cavity comprises a first cavity side wall and a second cavity side wall opposing the first cavity side wall on an opposite side of the cavity from the first cavity side wall. A support extends from the first cavity side wall to the second cavity side wall and at least partially divides the cavity. A device is disposed on, for example in direct contact with, the support and extends from the support into the cavity.
    Type: Grant
    Filed: April 7, 2020
    Date of Patent: March 15, 2022
    Assignee: X-Celeprint Limited
    Inventors: Raja Fazan Gul, Ronald S. Cok, Steven Kelleher, António José Marques Trindade, Alin Mihai Fecioru, David Gomez, Christopher Andrew Bower, Salvatore Bonafede, Matthew Alexander Meitl
  • Patent number: 11221478
    Abstract: A MEMS scanner may include a first flexible arm extending substantially in a forward direction and a base connected to a proximal end of the first flexible arm, the base being thicker than the first flexible arm in a vertical direction. The MEMS scanner may further include a second flexible arm connected to a distal end of the first flexible arm, the second flexible arm extending substantially in a reverse direction. The MEMS scanner may further include a mirror coupled to a distal end of the second flexible arm. In one implementation, the MEMS scanner may be a non-resonant scanner.
    Type: Grant
    Filed: April 15, 2019
    Date of Patent: January 11, 2022
    Assignee: Microsoft Technology Licensing, LLC
    Inventors: Utku Baran, Wyatt Owen Davis, Joshua Owen Miller
  • Patent number: 11212624
    Abstract: A MEMS-transducer comprises a membrane structure having a first main surface and a second main surface opposing the first main surface. A substrate structure holds the membrane structure, wherein the substrate structure overlaps with the first main surface of the membrane structure in a first edge region being adjacent to a first inner region of the first main surface. A gap is formed between the membrane structure and the substrate structure in the first edge region and extends from the first inner region into the first edge region.
    Type: Grant
    Filed: August 6, 2019
    Date of Patent: December 28, 2021
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Wolfgang Klein, Karolina Gierl, Markus Meyer
  • Patent number: 11199696
    Abstract: According to an embodiment, a semiconductor device includes a first actuator, a second actuator, a first frame provided between the first actuator and the second actuator, a first connection member connecting the first actuator and the first frame to each other, a second connection member connecting the first actuator and the first frame to each other at a position different from a position at which the first connection member connects the first actuator and the first frame to each other, a third connection member connecting the second actuator and the first frame to each other, a fourth connection member connecting the second actuator and the first frame to each other at a position different from a position at which the third connection member connects the second actuator and the first frame to each other.
    Type: Grant
    Filed: August 27, 2019
    Date of Patent: December 14, 2021
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Honam Kwon, Koichi Ishii, Ikuo Fujiwara, Kazuhiro Suzuki
  • Patent number: 11175491
    Abstract: The present disclosure relates to a microelectromechanical systems (MEMS) scanner that implements piezoelectric actuation principles to facilitate rotational displacement of a mirror device. The present disclosure includes a MEMS scanning device having a mirror device, a torsional beam structure, and piezoelectric actuators having a shape that facilitates torsional force to be applied to the torsional beam structure and cause the mirror device to rotate about a longitudinal axis. The MEMS scanning device may further include a lever device including multiple stages to both transfer torsional force from the actuators and prevent different actuators from countering torsional forces of other actuators. Moreover, the MEMS scanning device may further include sensor elements to measure torsional forces and control movement of the mirror device.
    Type: Grant
    Filed: April 25, 2019
    Date of Patent: November 16, 2021
    Assignee: MICROSOFT TECHNOLOGY LICENSING, LLC
    Inventor: Utku Baran
  • Patent number: 11169372
    Abstract: A light scanning apparatus includes a light source configured to output laser light, and a mirror configured to reflect the laser light from the light source. The light scanning apparatus includes a mirror driving unit configured to resonantly drive the mirror in a first direction and non-resonantly drive the mirror in a second direction, the second direction being perpendicular to the first direction. The light scanning apparatus includes a first sensor configured to output a signal in accordance with a first deflection angle at which the mirror is oriented with respect to the first direction. The light scanning apparatus includes a second sensor configured to output a signal in accordance with a second deflection angle at which the mirror is oriented with respect to the second direction.
    Type: Grant
    Filed: February 5, 2020
    Date of Patent: November 9, 2021
    Assignee: MITSUMI ELECTRIC CO., LTD.
    Inventor: Yuji Kimura
  • Patent number: 11119160
    Abstract: A planar Hall sensing element includes a first pair of sensing electrodes mutually opposed in a first direction across the sensing element and a second pair of sensing electrodes mutually opposed in a second direction across the sensing element, with the second direction orthogonal to the first direction. A first pair of bias electrodes is mutually opposed in a third direction and a second pair mutually opposed in a fourth direction across the sensing element, the fourth direction orthogonal to the third direction. The third and fourth directions are rotated 45° with respect to the first and second directions so each sensing electrode is arranged between a bias electrode of the first pair and second pair. A DC bias current is supplied between the first and second pairs of bias electrodes. First and second Hall voltages are sensed at the first and second pairs of sensing electrodes.
    Type: Grant
    Filed: July 17, 2019
    Date of Patent: September 14, 2021
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Marco Crescentini, Michele Biondi, Marco Tartagni, Aldo Romani, Roberto Canegallo
  • Patent number: 11086122
    Abstract: A microelectromechanical device includes a body of semiconductor material, which forms a cavity, a mobile structure, and an actuation structure. The actuation structure includes at least one first deformable element which faces the cavity and is mechanically coupled to the body and to the mobile structure, and a piezoelectric-actuation system which can be controlled so as to deform the first deformable element and cause a consequent rotation of the mobile structure. The mobile structure includes a supporting region and at least one first pillar region, the first pillar region being mechanically coupled to the first deformable element, the supporting region being set on the first pillar region and overlying at least part of the first deformable element.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: August 10, 2021
    Assignee: STMicroelectronics S.r.l.
    Inventors: Roberto Carminati, Massimiliano Merli, Nicolo′ Boni
  • Patent number: 11042024
    Abstract: According to the present invention there is provided methods and devices for detecting open and/or short circuits in MEMS micro-mirror devices, which use relative comparisons of voltage levels within the MEMS micro-mirror devices for detecting the occurrence of open and/or short circuits.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: June 22, 2021
    Assignee: Google LLC
    Inventors: Eric Chevallaz, Nicolas Abele
  • Patent number: 10996432
    Abstract: A reflective active variable lens includes an upper electrode, a lower electrode disposed in parallel to the upper electrode, a deformation part disposed between the upper electrode and the lower electrode, a reflective part disposed on the upper electrode, and a support part disposed to surround the deformation part. Here, the deformation part and the support part are connected to each other to provide a single structure, the deformation part is expanded from an initial shape when an electric field is formed between the upper electrode and the lower electrode, and the expanded deformation part is contracted when the electric field is removed and restored to the initial shape.
    Type: Grant
    Filed: December 10, 2018
    Date of Patent: May 4, 2021
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Suntak Park, Bong Je Park, Ki-Uk Kyung, Seung Koo Park, Sung Ryul YuN, Seongcheol Mun, Jeong Muk Lim