Abstract: A light beam deflection system is configured to transmit a light beam at an output deflection angle that changes over time. The system includes a first resonant structure configured to oscillate about a first rotation axis at first resonant frequency; a second resonant structure configured to oscillate about a second rotation axis at a second resonant frequency, where the first rotation axis is parallel to the second rotation axis, and where the first resonant frequency and the second resonant frequency are different and define a predetermined frequency difference; and a driver circuit configured to generate a first driving signal to drive the first resonant structure while further generating a second driving signal to drive the second resonant structure such that the output deflection angle of the light beam oscillates according to a beat pattern of a beat wave whose extrema amplitudes are modulated and defined by a periodic envelope.

Abstract: A microelectromechanical device includes a fixed structure having a frame defining a cavity, a tiltable structure elastically suspended above the cavity with main extension in a horizontal plane, a piezoelectrically driven actuation structure which can be biased to cause a desired rotation of the tiltable structure about a first and second rotation axes, and a supporting structure integral with the fixed structure and extending in the cavity starting from the frame. Lever elements are elastically coupled to the tiltable structure at a first end by elastic suspension elements and to the supporting structure at a second end by elastic connecting elements which define a lever rotation axis. The lever elements are elastically coupled to the actuation structure so that their biasing causes the desired rotation of the tiltable structure about the first and second rotation axes.

Abstract: An optoelectronic component includes an optical transducer made of III-V semiconductor material and an optical scanning microelectromechanical system comprising a mirror. The optical transducer and the optical scanning microelectromechanical system are produced on a common wafer comprising at least a first layer made of silicon or silicon nitride with a thickness of less than one micron and wherein at least the mirror and its holding springs are produced. In a first variant, the mobile parts of the optical scanning microelectromechanical system are produced in various layers of silicon. In a second variant, the mobile parts of the optical scanning microelectromechanical system are produced in the layer of III-V semiconductor material.

Abstract: An optical device includes: a first reflector; a second reflector facing the reflector; a light emitter between the first reflector and the second reflector; a base supporting the second reflector with space between the light emitter and the second reflector; a piezoelectric body configured to, in response to application of drive voltage, deform to cause the second region to deform to drive the second reflector so as to change a distance between the first reflector and the second reflector. The base has a first region and a second region having a lower stiffness than the first region. The second region has the second reflector and the piezoelectric body thereon. The optical device is configured to emit a laser beam whose wavelength is changeable with the distance between the first reflector and the second reflector.

Abstract: A handheld device for photoacoustic microscopy. The handheld device includes an optical assembly, a light beam scanner and a transducer unit. The optical assembly is arranged to provide a light beam. The light beam scanner includes a reflector arranged to reflect the light beam from the optical assembly to provide a reflected light beam to an object, a first drive mechanism operable to move the reflector relative to the optical assembly to move the reflected light beam relative to the object, and a second drive mechanism operable to move the reflector relative to the optical assembly to move the reflected light beam relative to the object. The transducer unit is arranged to detect photoacoustic signals emitted by the object in response to receiving the reflected light beam.

Abstract: A varifocal ocular lens is disclosed. The varifocal ocular lens is based on a pancake lens having a polarization-folded optical path formed by two reflectors, e.g. one polarization-selective reflector and one partial reflector. By placing at least one of the reflectors onto a flexible deformable membrane, the shape e.g. radius of curvature and/or cylindricity of the reflector(s) may be dynamically changed to vary focal length and/or astigmatism of the ocular lens. Viewer's visual prescription and eye vergence may be dynamically and/or statically accommodated by the varifocal lens.

Abstract: A MEMS optical device including: a semiconductor body; a main cavity, which extends within the semiconductor body; a membrane suspended over the main cavity; a piezoelectric actuator, which is mechanically coupled to the membrane and can be electronically controlled so as to deform the membrane; a micro-lens, mechanically coupled to the membrane so as to undergo deformation following the deformation of the membrane; and a rigid optical element, which contacts the micro-lens and is arranged so that the micro-lens is interposed between the rigid optical element and the membrane. The micro-lens and the main cavity are arranged on opposite sides of the membrane.

Abstract: A detection device for a coherent imaging system includes a detector comprising a matrix array of pixels, each pixel comprising a photodetector component having a photosensitive surface, the detector being designed to be illuminated by a coherent beam, called the image beam consisting of grains of light called speckle grains, a matrix array of transmissive deflecting elements configured to be individually orientable by means of an electrical signal, so as to deflect a fraction of the image beam incident on the group, and thus modify the spatial distribution of the speckle grains in the plane of the photosensitive surface, each group of one or more pixels further comprising a feedback loop associated with the deflecting element and configured to actuate the deflecting element so as to optimize the signal-to-noise ratio from the light detected by the one or more photodetector components of the group of pixels, the feedback loop comprising a feedback circuit.

Abstract: An optical scanner having high utilization efficiency of light is provided. A reflector with actuator includes a reflector having reflection regions formed on both surfaces thereof, first supporting parts supporting the reflector from both sides in a plane direction and defining a first rotary axis of the reflector, a first magnetic element installed on one surface of the reflector at a position displaced from the first rotary axis, and a first magnetic actuator configured to move the first magnetic element in a direction that rotates the reflector around the first rotary axis.

Abstract: An optical component includes a substrate and a piezoelectric film formed on the substrate and configured to deform in response to an actuation voltage applied thereto into a pattern of peaks and troughs configured to deflect optical radiation that is incident thereon. The pattern has an amplitude determined by the actuation voltage.

Abstract: A forward looking MEMS based OCT probe (50) is provided that comprises an elongate probe housing (51) having at a first end a probe interface (54) for an optic fibre (56), and at a second opposite end a viewing window (58). The probe housing accommodates a MEMS mirror (10) for sweeping a hght beam (60) through the viewing window and for reflecting light received through the viewing window towards the probe interface, wherein a rotation axis (18) of the MEMS mirror extends transverse to a longitudinal axis (62) defined by the probe housing. The MEMS mirror (10) has a stator (12), a rotor (14), and an actuator (16) with at least one pair of mutually interdigitated comb elements including at least a first comb element fixed to the stator defining a reference plane and at least a second comb element fixed to the rotor and that is further coupled at mutually opposite sides via a respective torsion beam (20A, 20B) to the stator.

Abstract: Described are two-dimensional scanning micromirror devices, scanning image display systems that incorporate a two-dimensional scanning micromirror device, and methods of projecting light using two-dimensional scanning micromirror devices. The disclosed two-dimensional scanning micromirror devices can be driven at or near the resonant oscillation frequency of the micromirror structure, which can result in lower power operation. In addition, by driving the micromirror structure at multiple different frequencies, the reflected light can be directed along a non-sinusoidal path, which can improve a tilt angle of the projected light compared with reflected light directed along a sinusoidal path.

Abstract: An optical scanning device comprises a scanning structure, an anchor, and a drive unit. The drive unit includes a first drive unit and a second drive unit. The first drive unit includes a first drive beam, an electrode interconnect, paired supports, and a thin film magnet. The first drive beam has a first fixed end connected to the support and a first drive end connected to the scanning structure. The electrode interconnect is formed on the first drive beam. The supports are connected to the anchor and disposed to sandwich the first drive beam. The thin film magnet is disposed on each of the supports. The thin film magnet is disposed in such a manner that a magnetic line of force is generated in a direction intersecting a direction in which the electrode interconnect extends.

Abstract: A scanner and a method for controlling the scanner for a Lidar system are provided. The method comprises: producing a trigger signal by a positional sensor of the scanner; generating a single drive signal comprising a first component at a first frequency and a second component at a second frequency, the first component and the second component are superposed with a fixed phase relationship with aid of the trigger signal; transmitting the single drive signal to the scanner, and the scanner has resonant responses at the first frequency; and actuating the scanner to move in a first periodic motion at the first frequency about a first axis, and move in a second periodic motion at the second frequency about a second axis.

Abstract: An light deflection device includes an light deflector having first and second piezoelectric actuators which cause a mirror unit to reciprocatingly turn around a resonant axis and a non-resonant axis, respectively, a drive unit which supplies first and second drive voltages, a swing angle fluctuation width detection unit which detects a first swing angle fluctuation width of the mirror unit around the resonant axis, a sensitivity equivalent value detection unit which detects a sensitivity equivalent value on the basis of a detected value of a second drive voltage fluctuation width and a detected value of the first swing angle fluctuation width, and a determination unit which determines whether a non-resonant axis side swing state of the mirror unit around the non-resonant axis is normal on the basis of a detected value of the sensitivity equivalent value.

Abstract: An actuator device includes a support portion; a first movable portion; a second movable portion; a first connection portion that connects the first and second movable portions such that the first movable portion is swingable around a first axis; a second connection portion that connects the second movable portion and the support portion such that the first movable portion is swingable around the first axis. Two natural angular frequencies ?1 and ?2 (where ?1<?2) for vibration of the first and second movable portions around the first axis satisfy one of the following equation (1) and equation (2) and do not satisfy the other, [ Equation ? 1 ] 0 < 1 - ( ? 1 ? ii ) 2 ? 0.2 ( 1 ) [ Equation ? 2 ] 0 < ( ? 2 ? ii ) 2 - 1 ? 0.

Abstract: A movable device includes a movable part including a mirror unit; a torsion bar with one end coupled to the movable part; a first cantilever part coupled to the other end of the torsion bar; a second cantilever part with one end coupled to a coupling portion of the first cantilever part; a stationary part coupled to the other end of the second cantilever part; and a driver configured to deform the second cantilever part. A width of the coupling portion of the first cantilever part, to which the second cantilever part is coupled, is narrower than a width of the second cantilever part in a width direction of the coupling portion.

Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts, and a pair of first portions. One of the first portions is connected to one of the first connection portions and one of the second connection portions and extends in a inclined direction, and the other of the first portions is connected to the other of the first connection portions and the one of the second connection portions and extends in a inclined direction.

Abstract: A display system comprising a steerable display having a monocular field of view of at least 1 degree, positioned within a scannable field of view of at least 20 degrees, the steerable display positioned for a user. In one embodiment, the steerable display is positioned for the user's fovea.

Abstract: Deformable sensors and methods for magnetically modifying membrane stiffness are provided. A deformable sensor may include a membrane coupled to a housing to form a sensor cavity. The deformable sensor may further include a first magnet located on an inner surface of the membrane in the sensor cavity. The deformable sensor may additionally include a magnetic object located at a base within the sensor cavity. The magnetic object may be configured to modifiably repel the first magnet and modify stiffness of the deformable sensor based upon the modified repulsion.

Abstract: Provided is a vibrating mirror element including: a mirror part; a substrate made of metal, including a pair of beams, a support supporting each of the pair of beams, and a torsion part swingably supporting the mirror part; a driving source generating a plate wave that swings the mirror part; and a vibration suppression part suppressing vibration transmitted to the pair of beams. The vibration suppression part is configured to suppress the vibration transmitted to the pair of beams by abutting against the pair of beams at a position between a second mirror end among ends of the mirror part that is opposite a first mirror end near the support and the torsion part in a first direction in which the pair of beams extends.

Abstract: The present disclosure relates to optical devices and systems, specifically those related to light detection and ranging (LIDAR) systems. An example device includes a shaft defining a rotational axis. The shaft includes a first material having a first coefficient of thermal expansion. The device also includes a rotatable mirror disposed about the shaft. The rotatable mirror includes a multi-sided structure having an exterior surface and an interior surface. The multi-sided structure includes a second material having a second coefficient of thermal expansion. The second coefficient of thermal expansion is different from the first coefficient of thermal expansion. The multi-sided structure also includes a plurality of reflective surfaces disposed on the exterior surface of the multi-sided structure. The multi-sided structure yet further includes one or more support members coupled to the interior surface and the shaft.

Abstract: Examples are disclosed that relate to pixel-shifting devices for increasing display resolution. An example pixel-shifting device comprises an outer frame, an inner frame coupled to the outer frame via a flexure, a path-shifting optical element mounted to the inner frame, and one or more piezoelectric actuators configured to drive motion of the inner frame.

Abstract: An optical deflector capable of making a swing angle of a reflective plate larger is provided. In drive elements, since a size in the Y direction at first positions separated by a first distance from the reflective plate is larger than a size in the Y direction at second positions separated by a second distance from the reflective plate, the second distance being greater than the first distance, it is possible to increase displacement of tips of beam portions at the first positions and to make a swing angle of the reflective plate large by increasing a generated force of the entire beam portions.

Abstract: SMA actuators and related methods are described. One embodiment of an actuator includes a base; a plurality of buckle arms; and at least a first shape memory alloy wire coupled with a pair of buckle arms of the plurality of buckle arms. Another embodiment of an actuator includes a base and at least one bimorph actuator including a shape memory alloy material. The bimorph actuator attached to the base.

Abstract: One embodiment of the present application sets forth a wearable device that includes a display comprising a plurality of pixels and configured to emit light, and a micro-lens array located adjacent to the display, and configured to produce a light field by altering the light emitted by the display, where at least one of the display or the micro-lens array is configured to move from a first position to a second position that aligns a first pixel in the plurality of pixels relative to the micro-lens array.

Abstract: A scanner comprises a mirror, a first piezoelectric actuator, a second piezoelectric actuator, a third piezoelectric actuator, a fourth piezoelectric actuator, a first connecting member, a second connecting member, a first mirror spring, a second mirror spring, a stationary member, a first plurality of actuator springs, a second plurality of actuator springs, a third plurality of actuator springs, a fourth plurality of actuator springs, a first plurality of electrodes, and a second plurality of electrodes. The scanner is driven by piezoelectric actuators. A method of fabricating the scanner comprises the steps of providing a wafer; oxidation; deposition; patterning; and applying a singulation process.

Abstract: An optical deflector includes a mirror configured to reflect light; a pair of support portions each having an end connected to the mirror, and configured to support the mirror; first actuators connected to the respective support portions, and configured to deform the support portions so as to cause the mirror to oscillate about a first axis; a movable frame configured to support the first actuators; and second actuators connected to the movable frame and disposed opposite to the first actuators, with the support portions being interposed between the first actuators and the second actuators. The second actuators are not connected to the support portions. The first actuators and the second actuators bend and deform in the same direction.

Abstract: In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.

Abstract: A driving device that can be prevented from being damaged is provided. Abase member includes a frame-shaped part that rotatably supports a movable part via a shaft part provided on an inner circumference side of the frame-shaped part, and an elastic structural part extending to an outer circumference side of the frame-shaped part. The elastic structural part of the base member is joined to the pedestal, and this allows the difference in amount of thermal deformation generated on the base member and the pedestal to be absorbed by deformation of the elastic structural part, thereby preventing the driving device from being damaged.

Abstract: A method for adjusting illumination of a user operating an information handling system may include capturing an image of the user's face using a camera at the information handling system. The method may further include determining lighting characteristics of the user's face based on the captured image. A border to be displayed surrounding a video image can be generated based on the determined lighting characteristics. The video image and the border can be displayed at a display device.

Abstract: To manufacture an oscillating structure, a wafer is processed by: forming torsional elastic elements; forming a mobile element connected to the torsional elastic elements; processing the first side of the wafer to form a mechanical reinforcement structure; and processing the second side of said wafer by steps of chemical etching, deposition of metal material, and/or deposition of piezoelectric material. Processing of the first side of the wafer is carried out prior to processing of the second side of the wafer so as not to damage possible sensitive structures formed on the first side of the wafer.

Abstract: A light deflector includes a movable unit having a reflective surface, an elastic member that supports the movable unit in a tiltable manner about a tilting axis, and a supporter that supports the elastic member. The elastic member has a first connection segment whose rigidity changes continuously, and is connected to the movable unit at the first connection segment. The rigidity changes continuously between the elastic member and the movable unit via the first connection segment. The elastic member includes a linear segment having a substantially fixed width, the elastic member has a second connection segment that is provided between the linear segment and the supporter and that connects the linear segment and the supporter, a width of the second connection segment gradually increases toward the supporter, and a maximum width of the first connection segment is greater than a maximum width of the second connection segment.

Abstract: A LIDAR system including a MEMS scanning device is disclosed. The LIDAR system includes a light source, a light deflector, a sensor, and a processor. The light deflector deflects light from the light source or light received from an environment outside a vehicle in which the LIDAR system is installed. The sensor detects the light received from the light source or the environment. The processor determines a distance of one or more objects in the environment from the vehicle based on the signals from the sensor. The light deflector includes one or more actuators, which include one or more actuating arms. Connectors connect the actuating arms to an MEMS mirror or other deflector. The actuating arms move when subjected to an electrical field in the form of a voltage or current. Movement of the actuating arms causes movement of the MEMS mirror or deflector causing it to deflect light.

Abstract: A multi-axis motor includes a first elongate magnet member disposed in a first orientation and a second elongate magnet member disposed in a second orientation orthogonal to the first orientation and mechanically coupled to the first elongate magnet member. The first elongate magnet member is operable to adjust a first axis of a fine axis structure. The second elongate magnet member is operable to adjust a second axis of the fine axis structure.

Abstract: A planar Hall sensing element includes a first pair of sensing electrodes mutually opposed in a first direction across the sensing element and a second pair of sensing electrodes mutually opposed in a second direction across the sensing element, with the second direction orthogonal to the first direction. A first pair of bias electrodes is mutually opposed in a third direction and a second pair mutually opposed in a fourth direction across the sensing element, the fourth direction orthogonal to the third direction. The third and fourth directions are rotated 45° with respect to the first and second directions so each sensing electrode is arranged between a bias electrode of the first pair and second pair. A DC bias current is supplied between the first and second pairs of bias electrodes. First and second Hall voltages are sensed at the first and second pairs of sensing electrodes.

Abstract: A laser beam display device that can dynamically control the resonant frequency of a mirror is provided. The increase the reliability of a device by controlling the resonant frequency of a mirror instead of requiring components of a display device to react to changes in the resonant frequency of a mirror. A controller can drive a mirror with an input signal, receive a signal or data indicating a target resonant frequency, and bias the input signal to control the resonant frequency of the mirror. In some embodiments, the controller can also receive a feedback signal from a mirror indicating a current resonant frequency. The controller can also bias the input signal to increase or decrease the current resonant frequency. By dynamically controlling the resonant frequency of a mirror, a device can minimize any difference between the current resonant frequency detected in a feedback signal and the target resonant frequency.

Abstract: A method of making a mirror for use with extreme ultraviolet or x-ray radiation includes: i) providing a base substrate having a curved surface, wherein the curved surface deviates from a curvature of a target mirror surface at high spatial frequencies corresponding to spatial periods less than 2 mm; and ii) securing a first side of a thin plate to the curved surface of the base substrate to cover the curved surface, wherein the plate has a thickness thin enough to conform to the curvature of the target mirror surface and thick enough to attenuate deviations at the high spatial frequencies on a second side of the thin plate opposite the first side that are caused by the deviations on the curved surface of the base substrate. A mirror made by the method is also disclosed.

Abstract: A distally-actuated scanning mirror includes: a mirror block with reflective surface on one side; torsional hinges with proximal ends rigidly attached to the mirror block, and with distal ends attached to flexural structures configured to transform translational motion of the piezoelectric elements into rotational motion of the distal ends of the hinges; and piezoelectric elements providing such translational motion. The distally-actuated scanning mirror also includes flexural structures made of separate flexures attached to the opposite surfaces of the distal ends of the hinges, which flexural structures have defined thinned-down flexural points. Portions of the distally-actuated scanning mirror may be 3D printed and/or fabricated by silicon MEMS technology. The mirror is fabricated from a Silicon-on-Insulator wafer, having a relatively thick (e.g., 380 um) handle layer, and a relatively thin e.g., 50 um), where photolithography with backside-alignment allows separate patterning of these two layers.

Abstract: A rotating steering mirror assembly comprising a first wedge rotatable relative to a base and a second wedge rotatable relative to the first wedge to controllably tilt a mirror on an outward- or forward-facing surface of the second wedge. Respective motors can independently rotate the first and second wedges.

Abstract: An optical scanning device includes a mirror that includes a mirror reflection surface, a driving part that drives the mirror, and a fixed frame that supports the mirror via the driving part. The fixed frame includes one or more inspection patterns that are formed while at least one of the mirror and the driving part is formed.

Abstract: The present disclosure relates to optical devices and systems, specifically those related to light detection and ranging (LIDAR) systems. An example device includes a shaft defining a rotational axis. The shaft includes a first material having a first coefficient of thermal expansion. The device also includes a rotatable mirror disposed about the shaft. The rotatable mirror includes a multi-sided structure having an exterior surface and an interior surface. The multi-sided structure includes a second material having a second coefficient of thermal expansion. The second coefficient of thermal expansion is different from the first coefficient of thermal expansion. The multi-sided structure also includes a plurality of reflective surfaces disposed on the exterior surface of the multi-sided structure. The multi-sided structure yet further includes one or more support members coupled to the interior surface and the shaft.

Abstract: Described examples include an apparatus having a substrate with a substrate surface. The apparatus also includes an element with a planar surface facing the substrate surface and with a nonplanar surface opposite the planar surface facing away from the substrate surface.

Abstract: A device and method for pivotally positioning a moveable member, wherein a magnetically conductive base member is arranged opposite the magnetically conductive moveable member with a gap provided therebetween. A first magnet is arranged for providing a first magnetic flux through the base member and the moveable member such as to provide at least two first magnetic closed flux paths. A second electromagnet is arranged for providing a second magnetic flux through the base member and the moveable member such as to provide at least one second magnetic closed flux path. The second electromagnet is configured for changing, in one or more of the at least two first magnetic closed flux paths, a resulting magnetic flux provided by the first magnetic flux and the second magnetic flux such as to pivot the moveable member by means of the pivot member. The moveable member is pivotally suspended using a flexural pivot member.

Abstract: A microelectromechanical infrared sensing device is provided, which includes a substrate, a sensing plate, a reflecting plate, a plurality of first supporting elements, a plurality of second supporting elements and a plurality of stoppers. The second supporting elements are connected to the sensing plate, such that the sensing plate is suspended above the substrate. The reflecting plate is disposed between the substrate and the sensing plate. The first supporting elements are connected to the reflecting plate, such that the reflecting plate is suspended between the substrate and the reflecting plate. When the reflecting plate moves toward the substrate and at least one of the stoppers contacts the substrate or the reflecting plate, the distance between the reflecting plate and the sensing plate increases.

Abstract: An actuator includes an arm starting end having a piezoelectric element, a first end of the arm starting end connected to an inner side of a fixed frame, the arm starting end extending in a straight line, along a Y-axis direction through a gap between the fixed frame and a mirror surface, from the first end to beyond a middle point of an outer side of the mirror surface; an arm terminating end including a first end connected to the middle point of the outer side of the mirror surface, the arm terminating end extending parallel to the arm starting end; and an arm relay that connects a second end of the arm starting end to a second end of the arm terminating end, the arm relay being formed in a zigzag.

Abstract: An oscillator system includes a first oscillator structure configured to oscillate about a first rotation axis at a first oscillation frequency; a second oscillator structure configured to oscillate about a second rotation axis at a second oscillation frequency; a driver circuit configured to generate a first driving signal to drive an oscillation of the first oscillator structure with a first oscillation phase and the first oscillation frequency and generate a second driving signal to drive an oscillation of the second oscillator structure with a second oscillation phase and the second oscillation frequency. The first oscillation frequency and the second oscillation frequency have a variable frequency ratio with respect to each other that varies over time. The driver circuit is configured to modulate at least one of the first oscillation phase or the second oscillation phase to modulate the variable frequency ratio.

Abstract: A MEMS device is formed in a die of semiconductor material having a cavity defined therein and having an anchorage portion. A tiltable structure is elastically suspended over the cavity and has a main extension in a horizontal plane. First and second supporting arms extend between the anchorage portion and opposite sides of the tiltable structure. First and second resonant piezoelectric actuation structures are intended to be biased to thereby cause rotation of the tiltable structure about a rotation axis. The first supporting arm is formed by first and second torsion springs, which are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis and are coupled together at a constraint region. The first and second resonant piezoelectric actuation structures extend between the anchorage portion and the constraint structure, on first and second sides of the first supporting arm.

Abstract: An acoustic transducer is disposed within a wearable sound device or to be disposed within the wearable sound device. The acoustic transducer includes a first anchor structure and a first flap. The first flap includes a first end and a second end. The first end is anchored by the first anchor structure, and the second end is configured to perform a first up-and-down movement to form a vent temporarily. The first flap partitions a space into a first volume to be connected to an ear canal and a second volume to be connected to an ambient of the wearable sound device. The ear canal and the ambient are connected via the vent temporarily opened.

Abstract: A microdevice (100) comprising a movable element (111) capable of moving relative to a fixed part (115), produced in first and second layers of material (104, 106) arranged one above the other such that the movable element comprises a portion (112) of the first layer and a portion (118) of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure (121) formed in the first and/or second layer of material.