Abstract: A display device provided with an MEMS light valve, comprising: a substrate, a fixed grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed grating; a guide is disposed on the substrate. The MEMS light valve comprises: a movable grating, a movable electrode and fixed electrodes; the moveable grating is located in the guide and is electrically connected to the guide when contacting the guide; one end of the movable electrode is fixedly connected with the movable grating, and the other end is suspended; and the fixed electrodes and the movable electrode form a capacitor. When a potential difference forms between the fixed electrodes and the movable electrode, the movable electrode drives the movable grating to move in the guide, thereby opening and closing the fixed grating. Therefore, the MEMS light valve sensitivity can be enhanced and reliability is improved.

Abstract: This disclosure provides systems, methods, and apparatus for a MEMS display incorporating integrated sidewall reflectors. The display can include a light blocking component suspended over a substrate. The light blocking component can include an aperture in its surface that is parallel to the substrate. The display can include one or more sidewall reflectors positioned within the aperture. The one or more sidewall reflectors can be arranged at least partially normal to the surface of the light blocking component. Light that is directed through the aperture can be reflected off of the sidewall reflectors to escape from the display at a higher angle than would otherwise be possible.

Abstract: The light-quantity control apparatus includes a base member having an opening allowing light to pass therethrough, a first aperture blade movable in a direction orthogonal to a light passing direction, a second aperture blade rotatable in a surface orthogonal to the light passing direction, and a driving lever to be rotated by a driver to drive the first and second aperture blades. The base member has a protruding portion engaging with a groove portion provided in the first aperture blade, the second aperture blade has a driving cam groove portion with which a driving pin provided in the driving lever slidably engages and a rotation center hole portion with which the protruding portion engages. The second aperture blade is rotated about the protruding portion by sliding of the driving pin with respect to the driving cam groove portion with rotation of the driving lever.

Abstract: A display apparatus includes a first insulating substrate, a light shielding layer on the first insulating substrate and including a first opening through which a light passes, a second insulating substrate which faces the first insulating substrate, and a shutter part on the second insulating substrate. The shutter part includes a driving beam electrode, a deformable electrode which faces the driving beam electrode and moves in response to a voltage applied to the driving beam electrode, and a shutter. The shutter includes a second opening which corresponds to the first opening of the light shielding layer, is connected to the deformable electrode and overlaps one of the deformable electrode or the driving beam electrode according to a movement of the deformable electrode, in a plan view.

Abstract: Systems, methods and methods of manufacture for, among other things, a MEMS device may be provided with a pair of electrodes that are separated by a gap. At least one of the electrodes is movable toward the other electrode. The MEMS device may include a beam that is positioned within the gap and arranged between the electrodes. As the movable electrode moves toward the other electrode, a portion of the MEMS device also moves towards, comes into contact with, and deflects the beam. As the beam deflects, it applies a force upon the MEMS device that opposes the movement of electrode toward the other electrode.

Abstract: An optical time delay control device for controllably altering the transit time of an optical beam between two points. In one example, the device may include an optically transparent solid medium for receiving the optical beam, wherein at least a portion of the medium is generally a parallel piped shape characterized by a height, length and width, wherein the length is larger than the height; two mirrors affixed to two opposing parallel surfaces of the optically transparent solid medium, so that during operation the optical beam reflects between the two mirrors as the optical beam travels through the optically transparent medium; and an angle actuator for controllably altering the angle at which the optical beam enters into the optically transparent medium, thereby controllably altering the time that the optical beam travels through the device. This in effect permits control of the amount of delay of the transmission of light, and delays of 20 nanoseconds have been achieved.

Abstract: An insulated glazing unit includes a spacer defining a framed area, first and second glazing panes attached to the spacer, a pane conductive layer on an inner surface of the first glazing pane, and a dielectric layer disposed on the pane conductive layer. A shade for use with the insulated glazing unit is affixed to the first glazing pane. The shade includes one or more layers selected from a resilient layer, a substantially transparent shade conductive layer, and an opaque shade conductive layer. When an electric drive is applied between the pane conductive layer and the shade conductive layer, a potential difference between the pane conductive layer and the shade conductive layer causes the shade to extend from a retracted configuration to an extended configuration. The shade can further include at least one ink coating layer including pigments that selectively reflect or absorb certain visible colors and infrared.

Abstract: The present invention provides miniature power supplies and circuitry for powering high-voltage devices.

Abstract: The invention relates to an electromagnetically actuated microshutter comprising: a moveable plate that can rotate about an axis, connected to a stationary frame by two arms aligned on both sides of the plate to said axis, and comprising on its periphery a conductive loop and below the assembly formed by the stationary frame and the moveable plate, a group of magnets having distinct magnetic orientations, arranged in such a manner so as to create, with respect to the moveable plate, a lateral magnetic field, in the plane of the frame, oblique in relation to the axis of rotation.

Abstract: The invention relates to an apparatus for transmitted light illumination for light microscopes having changing effective entrance pupil of an objective. The apparatus has a light source for emitting an illuminating light beam, and a holding device for holding a sample to be examined, and at least one diaphragm edge for trimming the illuminating light beam bundle, wherein the diaphragm edge is arranged between the holding device and the light source and extends transversely to an optical axis, wherein a beam path of the illuminating light between the diaphragm edge and a sample held by the holding device is free from beam focussing components.

Abstract: The MEMS shutter includes a shutter having an aperture part, a first spring connected to the shutter, a first anchor connected to the first spring, a second spring and a second anchor connected to the second spring, an insulation film on a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a perpendicular direction to a surface of a substrate, and the insulation film is not present on a surface of the plurality of terminals, and a surface of the shutter, the first spring, the second spring, the first anchor and the second anchor, the surfaces being in a parallel direction to a surface of the substrate and on the opposite side of the side facing the substrate.

Abstract: This disclosure provides systems, methods, and apparatus for a MEMS display incorporating extended height actuators. A light modulating component can be positioned between a substrate and an opposing surface coupled to the substrate. A suspended electrode can be coupled to the light modulating component and suspended between the substrate and the opposing surface. An extended-height electrode can be positioned immediately adjacent to the suspended electrode, and can extend from the substrate up to a height beyond the height of the suspended electrode. The suspended electrode and the extended-height electrode can be configured to move the light modulating component laterally with respect to the substrate.

Abstract: In a movable shutter-system display device, a movable shutter includes an amorphous silicon film material which has a low residual stress and thus is stable. A display device includes a display panel comprising a first substrate and a second substrate. The display panel includes a plurality of pixels; each of the plurality of pixels includes a movable shutter including amorphous silicon and a driving circuit for driving the movable shutter; and the amorphous silicon included in the movable shutter is formed of at least two amorphous silicon films, and where any two amorphous silicon films adjacent to each other among the at least two amorphous silicon films are a first amorphous silicon film and a second amorphous silicon film stacked on the first amorphous silicon film, the first amorphous silicon film and the second amorphous silicon film have different characteristic values.

Abstract: A microelectromechanical shutter system includes an actuator beam formed in a substrate, at least one actuator electrode spaced apart and electrically isolated from the actuator beam, the at least one actuator electrode angling away from a base of the actuator beam to actuate the actuator beam using a zipper action, and a fiber-optic channel in the substrate to receive a fiber-optic cable. A shutter mirror is included on a distal end of the actuator beam, with the shutter mirror in substantial alignment with a centerline of the fiber-optic channel. Upon application of a voltage between the actuator beam and the at least one actuator electrode, an electrostatic force is created between them to move the shutter mirror across the end of the fiber-optic channel.

Abstract: A diaphragm device includes: a board including an opening; a step motor including a teeth portion, and rotatable and stoppable at an interval of a predetermined step angle; a transmitting member including a driven teeth portion meshing the teeth portion, and capable of rotating and stopping in response to a drive force of the teeth portion; a drive ring capable of rotating and stopping in response to a drive force of the transmitting member; and a blade capable of stopping at a receding position to recede from the opening or at an aperture position to cover at least a part of the opening, in response to a drive force of the drive ring.

Abstract: An arm member is capable of moving to a first position, a second position, a third position, and a fourth position, in order, by driving a stepping motor in one direction. A shutter blade is in a closed state and a light quantity adjustment blade is in an insertion state when the arm member is at the first position, the shutter blade is in an open state and the light quantity adjustment blade is in the insertion state when the arm member is at the second position, the shutter blade is in the open state and the light quantity adjustment blade is in the evacuation state when the arm member is at the third position, and the shutter blade is in the closed state and the light quantity adjustment blade is in the evacuation state when the arm member is at the fourth position.

Abstract: This disclosure provides systems and apparatus for restricting out-of-plane motion during light modulator operation. In one aspect, an apparatus includes a light modulator that has a conductive movable light blocking component supported over a light blocking layer. The light modulator includes an electrostatic actuator that has a drive electrode configured to move the light blocking component laterally with respect to an aperture formed through the light blocking layer. The light modulator further includes an elongated electrode separate from the drive electrode and electrically isolated from the movable light blocking component. The elongated electrode extends alongside a path traveled by the movable light blocking component for substantially the entire length of the path.

Abstract: Methods and systems for reconfiguring an aperture of an optical inspection system are presented. A programmable aperture system includes a two dimensional array of mechanical pixels that selectively block light passing through the aperture. An array of linear guiding elements is aligned parallel to one another, and each row of mechanical pixels is supported by a corresponding linear guiding element. Each mechanical pixel is configured to slide along the corresponding linear guiding element when pushed by an actuator subsystem. The actuator subsystem repositions one or more of the mechanical pixel elements to change the shape of the aperture. The actuator subsystem is configured to selectively engage one or more mechanical pixel elements and translate the one or more mechanical pixel elements along corresponding linear guiding elements to a new position.

Abstract: This disclosure provides systems, methods and apparatus for modulating light for a display. The system includes a light blocking layer including a reflective layer and a light absorbing layer. The light blocking layer is configured such that any conductive components therein underlie or cover less than a majority of the circuitry controlling the display elements incorporated into the display.

Abstract: This, disclosure provides systems, methods and apparatus for improving the angular light distribution of a display apparatus. Smaller shutter-based display apparatus that modulate light passing through at least two apertures in an aperture or light blocking layer can provide similar viewing angle characteristics as larger shutter-based modulators by disproportionately reducing the width of a subset of the at least two apertures in relation to the remainder of the apertures. As the width of such apertures is one of the primary determinants of viewing angle, allowing a greater percentage of the light throughput of a shutter assembly to pass through wider apertures helps maintain a wider viewing angle for the display.

Abstract: In a lens barrier device, one barrier blade is arranged at a different height in the optical axis direction from another barrier blade, and a barrier base is provided with a regulating portion which is at the outer peripheral portion of an optical axis forward end side barrier blade and which regulates the position in the optical direction of the optical axis forward end side barrier blade, thus forming the lens barrier device as a unit. If rotation shafts for the barrier blades are formed on an external cover, deformation or the like would be generated when the external cover is assembled to the apparatus, resulting in an increase in the requisite drive force for the opening/closing operation. Hence, it is possible to prevent a suitable opening/closing operation from being hindered by such an increase in the requisite drive force.

Abstract: A method for modulating light using a micro-electro-mechanical structure includes providing a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements is comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.

Abstract: An optical shutter apparatus has at least one shutter blade that is movable between a first position blocking at least a portion of an aperture and a second position spaced apart from the first position. A linkage member is coupled to the at least one shutter blade and has a magnetic material. An actuator is coupled to the linkage member and is energizable to translate the at least one shutter blade between the first and second positions. An intermediate plate has a friction surface of a non-magnetic material. A magnet positioned away from the friction surface of the intermediate plate is disposed to urge the linkage member against the friction surface of the intermediate plate.

Abstract: A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.

Abstract: A system for modulating light using a micro-electro-mechanical structure includes a plurality of deformable mirror elements (30) having an L-shaped cross section. Each of the deformable mirror elements is comprised of a pedestal (32) and an elongated ribbon (33). Each of the ribbons has a reflective surface (35). A beam of light is directed on the deformable mirror elements. The deformable mirror elements is flexed about an axis parallel to a long dimension of the ribbons to vary a curvature of at least one of the reflective ribbons.

Abstract: A display substrate includes a base substrate, a micro shutter, a first driving electrode, a second driving electrode, and a plurality of anchors. The micro shutter includes a flat portion having at least one opening, a main concave portion adjacent to the opening and extending in from the flat portion to a first depth, and at least one sub-concave portion extending in from a bottom surface of the main concave portion to second depth. The first driving electrode is connected to a first side of the micro shutter. The second driving electrode is connected to a second side of the micro shutter. The second side is positioned opposite to the first side. The anchors fix the first and second driving electrodes on the base substrate.

Abstract: This disclosure provides systems, methods and apparatus for displaying images. Some such apparatus include an array of display elements coupled to a substrate and an elevated aperture layer (EAL) suspended over the array of display elements. The EAL is coupled to the substrate, and includes, for each of the display elements, at least one aperture for allowing passage of light therethrough. Methods for manufacturing such apparatus include at least one of forming etch holes through the EAL, employing an at least partially sublimatable sacrificial mold, employing a two phase release process, and releasing the apparatus such that a portion of a sacrificial mold remains surrounding portions of the apparatus.

Abstract: This disclosure provides systems, methods and apparatus for providing compact shutter assemblies. Shutter assemblies can be formed in a more compact fashion, allowing for higher pixel-per-inch displays, by incorporating shutters that during actuation pass over or under portions of the actuators that control those shutters.

Abstract: This disclosure provides systems, methods and apparatus for displaying images. One such apparatus includes a substrate, an elevated aperture layer (EAL) defining a plurality of apertures formed therethrough, a plurality of anchors for supporting the EAL over the substrate and a plurality of display elements positioned between the substrate and the EAL. Each of the display elements may correspond to at least one respective aperture of the plurality of apertures defined by the EAL. Each display element also includes a movable portion supported over the substrate by a corresponding anchor supporting the EAL over the substrate. In some implementations, one or more light dispersion elements may be disposed in optical paths passing through the apertures defined by the EAL.

Abstract: This disclosure provides systems, methods and apparatus for displaying images. Some such apparatus include a transparent substrate, a display element formed on the substrate, a light blocking elevated aperture layer (EAL) supported over the substrate by an anchor formed on the substrate, and an electrical interconnect disposed on the EAL for carrying an electrical signal to the display element. The electrical interconnect can include one or more of a data voltage interconnect, a scan-line interconnect or a global interconnect. In some implementations, a dielectric layer can separate the electrical interconnect from the EAL. The EAL can include an aperture formed through it that corresponds to the display element. In some implementations, a second electrical interconnect disposed on the substrate can be electrically coupled to a plurality of display elements.

Abstract: This disclosure provides systems, methods and apparatus for a display including a fluid-filled cavity. The display can include a plurality of light modulators, and a viewable portion and a non-viewable portion. A bubble generator can be positioned within the non-viewable portion of the cavity and arranged to form a bubble within the non-viewable portion. The non-viewable portion of the display may include a region in which a bubble or bubbles are generated and allowed to move. The display may include a controller arranged to control the operation of the bubble generator. The display also may include a temperature sensor or pressure sensor arranged to measure the temperature or pressure of the display apparatus. The controller may control the operation of the bubble generator in response to a signal from either the temperature sensor, pressure sensor, or both.

Abstract: This disclosure provides systems, methods and apparatus for a multi-state shutter assembly. The multi-state shutter assembly can be used in an electronic display. The shutter assembly can include a movable light obstructing component. The shutter assembly also can include first and second actuators configured to move the light obstructing component between three states, including a fully light obstructive state, a substantially transmissive state, and a partially transmissive state. At least one of the three states is a neutral state in which both the first and second actuators are in an unactuated state. The shutter assembly also can include a controller configured to control the first and second actuator to selectively move the light obstructing component into each of the three states.

Abstract: An optical switching assembly having an optical path therethrough includes an optical element, a base frame, an optical support that supports the optical element and is pivotably mounted to the base frame, and a linkage. The linkage interconnects the base frame and the optical support to effect movement of the optical support between an aligned position where the optical element is in the optical path and a non-aligned position removed from the aligned position. The linkage has two over-center positions that respectively correspond to the aligned position and the non-aligned position. No additional energy is required to hold the linkage in the over-center positions.

Abstract: The display apparatus including a microelectromechanical (MEMS) shutter is disclosed. The MEMS shutter is shifted by the switching element in a horizontal direction corresponding to the light control area to turn on or turn off the light control area. A first slit transmits light generated from the light source to the MEMS shutter of a first substrate and a second slit of a second substrate corresponding to the first slit provides apertures by overlapping the first slit and the second slit. The apertures of the MEMS shutter are distributed on a two dimensional plane and form a geometrically symmetric pattern that are capable of enhancing light-use efficiency.

Abstract: This disclosure provides systems, methods and apparatus for forming display structures having shutters that have a different height than corresponding actuators. In one aspect, a display apparatus includes an electrostatic actuator including opposing beam electrodes having primary faces normal to a substrate on which they are formed. The height of at least one of the opposing beam electrodes defines an actuator height. The apparatus also includes a shutter configured to be driven by the electrostatic actuator. The shutter includes at least one protrusion, the protrusion having a first sidewall and a second sidewall normal to a primary plane of the shutter, wherein a first sidewall height of the first sidewall is substantially different from the actuator height.

Abstract: This disclosure provides systems, methods and apparatus for providing multi-level multi-state shutter assemblies. The shutter assembly includes at least a first shutter at a first height over a substrate and a second shutter at a second height over the substrate. Both the first shutter and the second shutter can be operated in an open or closed state for passing or partially blocking light propagating through an aperture. In some implementations, the shutter assembly can operate in four states: a fully transmissive state, a fully obstructive state and two partially transmissive states based on the open or closed states of the first and second shutters.

Abstract: A light quantity adjustment apparatus has a board including an exposure aperture, blade members adjusting a quantity of light passing through the exposure aperture, and a driving device for driving the blade members. The driving device is provided with an electromagnetic coil, a magnet rotor rotating by applying a current to the electromagnetic coil, a rotating shaft, a coil frame having bearings, a reference surface for positioning formed in the coil frame, and a shield yoke supported relative to the reference surface and magnetically shielding the magnet rotor. The board includes a support plane supporting the blade members, a concave portion in the support plane to store the driving member, a support portion in the concave portion to support one end of the shield yoke, and a holding device for storing and supporting the driving member in the concave portion.

Abstract: This disclosure provides systems, methods and apparatus for providing relatively thinner and less stiff compliant beams for a shutter assembly. A protective coating is deposited and patterned over the shutter assembly before it is released from a sacrificial mold over which the shutter assembly is formed. Because some primary surfaces of the compliant beams are in contact with the sacrificial mold, these primary surfaces are not coated with the protective coating. Therefore, when the shutter assembly is finally released, the resulting compliant beams are relatively thinner and less stiff providing a reduction in an actuation voltage used to operate the shutter assembly. In some instances, the protective coating is patterned into discontinuous segments before release.

Abstract: A micro electro mechanical display module including a first substrate, a light source and a color filter layer is provided. The first substrate includes a first substrate body, a light-shielding pattern layer and light-shielding units. The light-shielding pattern layer has first openings. Each light-shielding unit includes a light-shielding shutter having one second opening. The shutter light-shielding shutter is movable relative to the light-shielding pattern layer. When one of the light-shielding units is enabled, the second opening is aligned with one of the first openings, so that the white light provided by the light source passes through the light-shielding pattern layer and the one of the light-shielding units and then passes through the color filter layer. When the one of the light-shielding units is not enabled, the second opening is not aligned with the one of the first openings, so that the white light is blocked by the light-shielding shutter.

Abstract: Systems and methods for displays that have a moveable shutter formed on a substrate having an aperture. The shutter, in at least one position, is asymmetrically aligned over the aperture. The asymmetric alignment provides an overlap between shutter and the substrate on one side of the aperture that is larger than an overlap between the shutter and the substrate on another side of the aperture. Typically, the larger overlap increases the ability of the shutter to reduce light passing through though the aperture when then shutter is the in the at least one position.

Abstract: A display apparatus includes a first substrate and a second substrate. The first substrate includes a light blocking layer and the second substrate includes a shutter part. The shutter part includes first, second, third, and fourth operators and a shutter. The first, second, third, and fourth operators are operated independently from each other in response to first, second, third, and fourth voltages, respectively. The shutter is connected to the first to fourth operators to be rotationally moved. Thus, the display apparatus display may display various gray scales.

Abstract: This disclosure provides systems, methods and apparatus for electromechanical systems having sidewalls beams. In one aspect, a device includes a substrate having a first electrode and a second electrode, and a movable shuttle monolithically integrated with the substrate, and having a first wall, a second wall, and a base. The first and second walls each have a first dimension at least four times larger than a second dimension. The first and second walls define substantially parallel vertical sides of the shuttle, and the base is positioned orthogonally to the first and second walls and forms a horizontal bottom of the shuttle, providing structural support to the first and second walls. The first wall and the first electrode define a first capacitor, and the second wall and the second electrode define a second capacitor.

Abstract: This disclosure provides systems, methods and apparatus for modulating light in reflective and transmissive modes of operation. In one aspect, an apparatus may include an array of electromechanical systems (EMS) light modulators. Each light modulator can be configured to achieve at least three states, including a non-transmissive, non-reflective state, a light transmissive state in which the light modulator transmits light, and a first reflective state in which the light modulator reflects a color.

Abstract: This disclosure provides systems, methods and apparatus for enabling a display to have a faster switching rate and an increased aperture ratio by using looped electrical interconnects with a reduced footprint. In one aspect, a display apparatus includes an array of display elements and a high-aspect ratio electrical interconnect connected to at least one display element in the array of display elements, wherein the high-aspect ratio electrical interconnect forms a loop that defines a closed boundary.

Abstract: This disclosure provides systems, methods and apparatus for modulating light to form an image on a display. A light modulator in the display may include a substrate, a shutter, a first actuator and a second actuator. The shutter can be configured to selectively obstruct an optical path through the substrate. The first actuator can be configured to move the shutter in a first direction along a first axis in a plane substantially parallel to a plane defined by the substrate, thereby moving the shutter from a first state to a second state. The second actuator can be configured to move the shutter in a second direction along a second axis. The second axis can be substantially orthogonal to the first axis and also within a plane parallel to the substrate. In some implementations, moving the shutter along the second axis moves the shutter into a third state.

Abstract: A light screening apparatus and a method of fabricating the same are provided. The light screening apparatus includes: a base plate including a first electrode; at least one material layer on the base plate; a rollup blade including a second electrode and configured to be disposed corresponding to a light transmitting portion of the base plate; a driving unit configured to be electrically connected to the first electrode and the second electrode; and a sticking prevention structure which prevents sticking between the rollup blade and the material layer. The sticking prevention structure may refer to a surface structure of at least one of the rollup blade and the material layer or a sticking prevention layer or a sticking prevention pattern which is additionally formed on at least one of an outer circumference surface of the rollup blade and a surface of the material layer.

Abstract: Displays having a plurality of shutter assemblies with movable shutters. Typically, the shutter assemblies are arranged in a grid of rows and columns, and the grid has a horizontal axis aligned with a horizontal axis of the display. The shutter assembly is aligned within the grid to have the axis of motion of respective shutters extend at an angle relative to the horizontal axis of the grid. In certain implementations, the shutter assemblies have a rectangular peripheral edge, and are arranged in the grid to have the square peripheral edge disposed at an angle relative to the horizontal axis of the grid. This can arrange the shutter assemblies into a diamond layout within the grid and place the shutter assemblies of adjacent columns into spatially offset rows of the grid. In some implementations, this increases the pixels per inch of the display, in other implementations, increases the aperture ratio.

Abstract: This disclosure provides systems, methods and apparatus for reducing undesired capacitance and electrostatic attraction among components of electromechanical systems (EMS) displays. An apparatus includes an array of display elements, a control matrix, and an electric insulation layer. The display elements each include a movable light blocking component coupled to a conductive beam.

Abstract: An optical filtering device and an optical inspection apparatus for detecting a defect in a high sensitivity using an optical filtering device which includes a shutter array formed in a two-dimensionally on an optically opaque thin film produced on a SOI wafer and the SOI wafer is removed at portions thereof on the lower side of the shutter patterns to form perforation portions while working electrodes are formed at the remaining portion of the SOI wafer, a glass substrate having electrode patterns formed on the surface thereof and having the shutter array mounted thereon, and a power supply section for supplying electric power to the electrode patterns formed on the glass substrate and the working electrodes of the SOI wafer. And the working electrodes is controlled to cause the shutter patterns to carry out opening and closing movements with respect to the perforation portions to carry out optical filtering.

Abstract: A shutter assembly comprises a plurality of shutter blades movable between an open position and a closed position, and a plurality of drive mechanisms arranged circumferentially about the plurality of shutter blades for moving the plurality of shutter blades, wherein each of said drive mechanisms is stable in at least a first position and a second position.