Single Transducer Generating Composite Plural Frequency Acoustic Wave Patents (Class 359/312)
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Patent number: 11693232Abstract: A laser beam irradiation apparatus includes a laser light source, a controller for controlling energy of light generated by the laser source, a first optical system for adjusting a shape of light that has passed through the controller, a scanner for adjusting the direction of light that has passed through the first optical system, and an F-theta lens for reducing a beam that has passed through the scanner.Type: GrantFiled: November 30, 2016Date of Patent: July 4, 2023Assignee: Samsung Display Co., Ltd.Inventors: Gyoo-Wan Han, Ku-Hyun Kang, Hae-Sook Lee, Jin-Hong Jeun, Kyoung-Seok Cho
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Patent number: 11450692Abstract: An array substrate and a display screen, where the array substrate includes a display area and a wiring area located on one side of the display area, the wiring area includes an upper wiring layer and a lower wiring layer laminated with the upper wiring layer, the upper wiring layer and the lower wiring layer are separated by an insulating layer group, the insulating layer group includes an insulating sub-layer and an insulating organic compensator formed on the insulating sub-layer, the insulating organic compensator is configured to compensate for at least part of a recess on an upper surface of the insulating sub-layer.Type: GrantFiled: March 31, 2021Date of Patent: September 20, 2022Assignee: YUNGU (GU'AN) TECHNOLOGY CO., LTD.Inventors: Yang Li, Yinghai Ma, Feng Yu, Xiaojia Liu, Jiuzhan Zhang
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Patent number: 8908725Abstract: The invention relates to an external cavity tunable laser. The laser comprises an extracavity collimating lens arranged outside a laser cavity, and a laser output mirror, a laser gain medium, an intracavity collimating lens, an active optical phase modulator and a tunable optical filter all arranged sequentially inside the laser cavity. The laser further comprises an active polarization rotator arranged behind the tunable optical filter, a polarization beam splitter arranged behind the active polarization rotator, a first etalon and a first total reflection mirror arranged in the direction vertical to the optic axis of a laser cavity output lens, a second etalon and a second total reflection mirror arranged in the direction of the optic axis of the laser cavity output lens, and a laser drive and control circuit.Type: GrantFiled: August 23, 2013Date of Patent: December 9, 2014Inventor: Peiliang Gao
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Patent number: 8724209Abstract: An acousto-optic (AO) device includes an AO interaction crystal for receiving and propagating a light ray along an optical propagation direction (OPD). A piezoelectric transducer is on at least one surface of the AO interaction crystal for receiving an electrical signal and emitting an acoustic wave into the AO interaction crystal. An electrode is on the piezoelectric transducer for coupling the electrical signal to the piezoelectric transducer. The electrode is a patterned electrode that includes a plurality of different transverse edge positions. The plurality of different transverse edge positions span a position range of at least five percent of an average height (Havg) of the electrode.Type: GrantFiled: December 14, 2011Date of Patent: May 13, 2014Assignee: Gooch and Housego PLCInventor: Christopher N. Pannell
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Patent number: 8718414Abstract: An acousto-optical filter element (114) is provided which has an acousto-optical crystal (118) having an acoustic signal transmitter (120) for generating acoustic signals in the acousto-optical crystal (118). The acousto-optical crystal (118) is designed to selectively spatially deflect light of a target wavelength from an input light beam (116) entering into the acousto-optical crystal (118), as a function of a high frequency applied to the acoustic signal transmitter (120), and to thereby produce a target light beam (126) having the target wavelength. In addition, the acousto-optical filter element (114) includes a spatial filter element (132) which is located in the target light beam (126) and is designed to selectively suppress the intensity of the target light beam (126) in a plane perpendicular to the propagation direction of the target light beam (126).Type: GrantFiled: February 6, 2012Date of Patent: May 6, 2014Assignee: Leica Microsystems CMS GmbHInventors: Hilmar Gugel, Volker Seyfried
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Patent number: 8687268Abstract: Methods, systems and apparatus for manipulating electromagnetic radiation such as laser beams. A method and apparatus for correcting magnification chromatic aberration utilizes one or more dispersive lenses such that long wavelength components are magnified less than short wavelength components. A telecentric relay is preferred to achieve this aim. Further, the use of polarizers to block the undesired zeroth order components of diffraction emanating from acousto-optic deflectors (AODs) is disclosed. Furthermore, specific designs of AOD including narrow transducer AODs which produce a diverging acoustic wave and AODs having two transducers and a selection switch are disclosed.Type: GrantFiled: September 14, 2012Date of Patent: April 1, 2014Assignee: UCL Business PLCInventors: Paul Anthony Kirkby, K. M. Naga Srinivas Nadella, Robin Angus Silver
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Patent number: 8681412Abstract: An acousto-optical system is described comprising at least one acousto-optical element having at least one transducer that is attached to a crystal, a driver unit for generating at least one acoustic signal for driving acousto-optical elements modifying light transmitted through the acousto-optical element and comprising at least one digital data processing unit, at least one digital-to-analog converter transforming the digital combination signal into an initial analog driver signal, and an amplifier for amplifying the initial analog driver signal to become said analog electronic driver signal. Further, a microscope and a method of operating the acousto-optical element is are described. Various objectives are achieved like more flexibility, real time compensation for non-linearity and reducing the number, size, costs and energy consumption of electronic components.Type: GrantFiled: June 1, 2011Date of Patent: March 25, 2014Assignee: Leica Microsystems CMS GmbHInventors: Bernd Widzgowski, Holger Birk, Volker Seyfried
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Patent number: 8294977Abstract: Methods, systems and apparatus for manipulating electromagnetic radiation such as laser beams. A method and apparatus for correcting magnification chromatic aberration utilizes one or more dispersive lenses such that long wavelength components are magnified less than short wavelength components. A telecentric relay is preferred to achieve this aim. Further, the use of polarizers to block the undesired zeroth order components of diffraction emanating from acousto-optic deflectors (AODs) is disclosed. Furthermore, specific designs of AOD including narrow transducer AODs which produce a diverging acoustic wave and AODs having two transducers and a selection switch are disclosed.Type: GrantFiled: September 12, 2007Date of Patent: October 23, 2012Assignee: UCL Business PLCInventors: Paul Anthony Kirkby, Robin Angus Silver, K. M. Naga Srinivas Nadella
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Patent number: 7855823Abstract: The present invention provides an acoustooptic device usable even with light in the ultraviolet region, free from laser damage and optical damage, and excellent in acoustooptic performance and an optical imaging apparatus using the same. The acoustooptic device according to the present invention includes a high-frequency signal input part (65), a transducer part (64), and an acoustooptic medium (6). A high-frequency signal input from the high-frequency signal input part (65) is converted into a mechanical vibration by the transducer part (64), and an optical characteristic of the acoustooptic medium (6) varies depending on the mechanical vibration. The acoustooptic medium is formed of a Group III nitride crystal. The optical imaging apparatus according to the present invention includes a light source, an acoustooptic device, a driving circuit, and an image plane.Type: GrantFiled: June 29, 2005Date of Patent: December 21, 2010Assignee: Panasonic CorporationInventors: Hisashi Minemoto, Yasuo Kitaoka, Isao Kidoguchi, Takayuki Negami, Yasuhito Takahashi, Toshimi Nishiyama, Kimihiko Shibuya
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Patent number: 7706047Abstract: Two-coordinate AO laser scanner for 355 and 266-nm UV wavebands utilizing AO cells with specially shaped TeO2 and KDP AO crystals, and equipped with LiNbO3 pulse-fed transducers of special configuration that allows enlarging scanning angle. This technology is utilized in computer-controlled UV laser analyzer of micro-objects, which performs florescent and reflected light analysis of any chosen micro-spot of a sample, and UV laser micro-machining unit that can process a sample with simultaneous control of the operation by built-in CCD camera. The technical solution utilized in the analyzer and micro-machining unit allows precisely matching coordinates of the processed sample and CCD matrix.Type: GrantFiled: September 18, 2007Date of Patent: April 27, 2010Inventors: Barrington L. Simon, Arcady Rozenshteyn, Gennadii Ivtsenkov
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Patent number: 7421212Abstract: Detecting a pulse of a signal includes receiving the signal and a light beam. The signal drives a spatial light modulator to modulate the light beam, where the complex amplitude of the modulated light beam is proportional to the signal current. The modulated light beam passes through an optical system and is detected by an optical detector array. A processor identifies a portion of the signal comprising the pulse.Type: GrantFiled: November 19, 2004Date of Patent: September 2, 2008Assignee: Raytheon CompanyInventor: John B. Allen
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Patent number: 7283290Abstract: An acousto-optic (AO) device for generating a highly apodized acoustic wave field includes a piezoelectric transducer crystal for emitting an acoustic wave having a ground electrode disposed on one side of the piezoelectric crystal, and a patterned electrode layer disposed on a side of the piezoelectric crystal opposite the ground electrode. The patterned electrode layer includes a continuous region proximate to its center and a discontinuous region, a pattern in the discontinuous region including a plurality of spaced apart features electrically connected to the continuous region. An AO interaction crystal which receives the acoustic wave is attached to the ground electrode or the patterned electrode layer.Type: GrantFiled: March 29, 2006Date of Patent: October 16, 2007Assignee: Gooch and Housego PLCInventors: Christopher N. Pannell, Elliot S. Wachman
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Patent number: 7206120Abstract: A dynamic beam splitter including a beam deflector having a plurality of operative regions, the beam deflector being operative to receive a laser beam at a first one of the plurality of operative regions, the laser beam passing through the beam deflector, and to selectably direct the laser beam in response to a control input signal to pass through the beam deflector a second time. Methods for splitting a beam and for manufacturing an electrical circuit employing the dynamic beam splitter are also enclosed.Type: GrantFiled: December 23, 2003Date of Patent: April 17, 2007Assignee: Orbtech Ltd.Inventors: Abraham Gross, Zvi Kotler, Eliezer Lipman, Dan Alon
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Patent number: 6982818Abstract: Electronically agile optical filtering modules for equalizing light propagation differences in at least two spaced optical beam pathways in the modules. The modules use optical polarization rotation devices that may include acousto-optic tunable filter (AOTF) devices, liquid crystal devices, and magneto-optic devices. Such devices may be subject to polarization dispersion losses (PDL) and polarization mode dispersion (PMD) that may be different for when light travel along different light paths through the device. By redirecting light beams back along a different bi-directional path through the devices which may exhibit non-uniform performance across orthogonal polarizations, PDL and PMD may be reduced.Type: GrantFiled: October 10, 2003Date of Patent: January 3, 2006Assignee: Nuonics, Inc.Inventors: Nabeel Agha Riza, Muhammad Junaid Mughal
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Patent number: 6903862Abstract: The present invention provides an ultraviolet acoustooptic device including: a radio-frequency signal input part; a transducer unit for converting a radio-frequency signal into a mechanical vibration; and an acoustooptic medium whose optical characteristic varies according to the mechanical vibration. In the ultraviolet acoustooptic device, light entering the acoustooptic medium is ultraviolet light having a wavelength of 380 nm or shorter, and the acoustooptic medium is formed of an oxide single crystal containing at least boron as a component of its unit cell, a LiNbO3 crystal, or a LiNbO3 crystal doped with MgO. Thus, an acoustooptic device can be obtained in which no laser damage nor optical damage is caused, and an ultraviolet acoustooptic device and an optical imaging apparatus using the same can be provided that do not necessarily require to be water-cooled.Type: GrantFiled: October 31, 2003Date of Patent: June 7, 2005Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Hisashi Minemoto, Toshimi Nishiyama, Kimihiko Shibuya
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Patent number: 6885491Abstract: A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate 43, a surface wave source 47 excitable with an adjustable frequency for producing surface waves on a surface 45 of the substrate 43 and an interaction region 17 of the substrate surface 45 which is provided for the radiation to interact with a grating structure provided by the surface waves produced.Type: GrantFiled: March 20, 2002Date of Patent: April 26, 2005Assignee: Carl-Zeiss-Stiftung (trading as Carl Zeiss)Inventors: Martin Ross-Messemer, Alexander Menck, Frank Höller, Kurt Franke, Günter Martin, Hagen Schmidt, Manfred Weihnacht
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Patent number: 6882374Abstract: A DMD (4) as a image display device time divisionally displays channel images formed by separating an image into RGB channels. A white light emitted from a xenon lamp (1) is separated, by an acousto-optical element (3), into spectal components. Those spectal components are projected onto the DMD (4). A refractive index of the acousto-optical element (3) varies with a frequency of an ultrasonic wave applied thereto. Therefore, a color of the spectral component applied to the DMD (4) may be changed by varying the refractive index of the acousto-optical element. RGB monochromatic lights may be irradiated on the DMD (4) by setting the frequencies FR, FG, FB of the ultrasonic wave at appropriate values.Type: GrantFiled: May 7, 2002Date of Patent: April 19, 2005Assignee: Yamaha CorporationInventor: Kensuke Numakoshi
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Patent number: 6867919Abstract: An optical arrangement for directing illumination light to a sample and for directing the detection light proceeding from the sample to a detector has a spectrally selective influencing means in the beam path of the detection light, which influences the polarization properties of the illumination light reflected or scattered from the sample in such a way that a polarizing beam splitter splits the illumination light reflected or scattered from the sample out of the detection light.Type: GrantFiled: October 8, 2003Date of Patent: March 15, 2005Assignee: Leica Microsystems Heidelberg GmbHInventor: Volker Seyfried
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Patent number: 6822785Abstract: This invention includes an Acousto-optical tuning device by employing the TeO2 in share mode, non-collinear and in high RF frequency (or large Bragg's deflection region), it is able to achieve the telecomm worthy tunable filter that provides high tuning speed, no-moving parts, very narrow filter line-width (0.2 nm for instance) and with miniature size practical for a optical telecom active module. This tuning characteristic is achieved by taking the particular advantages that the angle of incidence (AOI) and angle of diffraction (AOD) are divergent in a frequency range just suitable for a shorter wavelength application required by modern telecommunication systems while the acoustic wave decay in this frequency range can be properly managed to achieve the design goals. Furthermore, by generating a diffracted beam with larger AOD, implementation of filtering for optical propagations of different wavelengths can be conveniently selected.Type: GrantFiled: June 4, 2003Date of Patent: November 23, 2004Assignee: Acceeze, Inc.Inventors: Raymond R. Chu, Qing Jiang
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Patent number: 6775051Abstract: Systems and methods for scanning a beam of light over a specimen are provided. A system may include a pre-scan acousto-optical deflector (AOD) configured to deflect a beam of light, a second AOD configured as a traveling lens to focus the scanning beam, a relay lens, and an objective lens. The relay lens may be centered on the scan line produced by the second AOD, while the objective lens may be substantially de-centered with respect to the relay lens to produce a telecentric scanning spot with no field tilt. The system may modulate the amplitude of the sound wave in the first AOD to compensate for attenuation in the second AOD. The system may pre-fill one chirp packet in the second AOD while another chirp packet is scanning to substantially reduce a delay between consecutive scans.Type: GrantFiled: May 3, 2002Date of Patent: August 10, 2004Assignee: KLA-Tencor TechnologiesInventors: Jamie Sullivan, Ralph Johnson, John Gibson, Mingguang Li, Eric Vella
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Patent number: 6728487Abstract: An AOTF drive method for driving a plurality of AOTFs connected in tandem comprises: separating a plurality of RF signals in advance into a plurality of groups; batch-branching the RF signals of each group in accordance with the number of steps of the AOTFS; and batch-adjusting the phases of the individual branched RF signals. As a result, this makes it possible to reduce the number of phase shifters compared to the prior art while maintaining the effectiveness of suppressing beats in the AOTFs.Type: GrantFiled: January 8, 2001Date of Patent: April 27, 2004Assignee: Fujitsu LimitedInventor: Tadao Nakazawa
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Publication number: 20030206332Abstract: To provide a process of successively forming from an EL layer, a cathode, a barrier layer and a cover layer in the same multi-chamber. By using a same film deposition method to form the EL layer and the cover layer, as shown in FIG. 1A, the EL layer, the cathode, the barrier layer, and the cover layer can be formed in the same multi-chamber in succession. Thus, as shown in FIG. 1B, a sealed structure of an EL element can be formed.Type: ApplicationFiled: March 27, 2001Publication date: November 6, 2003Inventors: Shunpei Yamazaki, Noriko Shibata
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Patent number: 6600590Abstract: A system and method for reducing or eliminating the speckle intensity distribution of a laser imaging system. In one embodiment of the invention, a radio frequency signal is injected into a semiconductor laser light source (12) for a projection system (10) to create different speckle patterns that blend together on a projection surface (19). In another embodiment of the invention, optical feedback is used to induce a laser light source for a projection system (10) to create different speckle patterns that blend together on a projection surface (19). In another embodiment of the invention, the laser light source wavelength is Doppler shifted to produce different speckle patterns. In another embodiment of the invention, a means of deflection is used to directionally move the beam to reduce noticeable speckle.Type: GrantFiled: February 20, 2001Date of Patent: July 29, 2003Assignee: Eastman Kodak CompanyInventors: James E. Roddy, William R. Markis
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Patent number: 6587255Abstract: An acousto-optic scanning system, which relies on two counter propagating acoustic waves with the same frequency modulation. This scheme completely suppresses the linear frequency chirp, and thus enables the generation of fast non-linear scans and non-constant linear scans. By changing the phase between the modulating signals, this scheme also provides fast longitudinal scans of the focal point.Type: GrantFiled: December 13, 2001Date of Patent: July 1, 2003Assignee: Yeda Research and Development Co.LTDInventors: Nir Davidson, Nir Friedman, Ariel Kaplan
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Patent number: 6574035Abstract: An acoustooptic device is structured by providing an interdigital transducer in which arch-shaped electrode fingers are interdigitated so that the interdigital transducer is circular or annular in shape as a whole, on an optical waveguide which is circular when viewed from the front. This acoustooptic device is used as a diffraction optical device on which light is incident from the front. When an alternating voltage of a predetermined frequency is applied to the interdigital transducer by an oscillator, a concentric acoustic compressional wave is generated on the optical waveguide. The concentric acoustic compressional wave diffracts the incident light, so that the diffraction optical device functions like a lens and converges the luminous flux.Type: GrantFiled: December 12, 2001Date of Patent: June 3, 2003Assignee: Minolta Co., Ltd.Inventor: Toshio Naiki
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Patent number: 6560005Abstract: An acousto-optic device comprises a first light source for producing a light beam, a light-transmitting material capable of transmitting the light beam along an optical path through the light-transmitting material, a light-absorbing material adjacent to the light-transmitting material, and a pulsed light source capable of directing a pulsed light beam at the light absorbing material so as to produce acoustic waves within the light-transmitting material that cross the optical path of the light beam from the first light source.Type: GrantFiled: August 7, 2001Date of Patent: May 6, 2003Assignee: TKD, Inc.Inventor: Timothy N. Thomas
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Patent number: 6549247Abstract: An ultrasonic liquid-crystal display comprises a nonpiezoelectric bottom-plate, a piezoelectric substrate on a first surface-part of an upper end-surface of the nonpiezoelectric bottom-plate, at least one dispersive interdigital transducer on the piezoelectric substrate, a nonpiezoelectric upper-plate, a first conducting electrode, with which a second surface-part of the upper end-surface of the nonpiezoelectric bottom-plate is covered, a second conducting electrode, with which a lower end-surface of the nonpiezoelectric upper-plate is covered, and a liquid crystal between the first- and second conducting electrodes. The nonpiezoelectric bottom-plate and the nonpiezoelectric upper-plate have a transparency, respectively. When a first electric signal is applied to the dispersive interdigital transducer, an FM chirp-SAW is excited in the piezoelectric substrate. The FM chirp-SAW transmitted to the liquid crystal causes it cloudy.Type: GrantFiled: March 6, 2001Date of Patent: April 15, 2003Inventor: Kohji Toda
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Patent number: 6462857Abstract: An optical modulator includes a magnetic ferrite single crystal, an optical source, a photoreceptor system and an analyzer. The magnetic ferrite single crystal has a transducer mounted and arranged to receive a microwave. The microwave is modulated by a signal having a frequency lower than the microwave. Light emitted from the optical source is introduced to the magnetic garnet single crystal and modulated by the microwave applied to the transducer. The photoreceptor system receives the modulated light that is emitted from the magnetic ferrite single crystal. The analyzer is provided between the magnetic ferrite single crystal and the photoreceptor system, and the analyzer is arranged such that a rotation angle of the analyzer about an optical axis thereof is shifted by an angle in the range of about 40 degrees to about 50 degrees from an extinct position at which an amount of direct-current light transmitted through analyzer is minimized.Type: GrantFiled: January 17, 2001Date of Patent: October 8, 2002Assignee: Murata Manufacturing Co., Ltd.Inventors: Shinichiro Chiku, Takashi Fujii
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Publication number: 20020071172Abstract: An acoustooptic device is structured by providing an interdigital transducer in which arch-shaped electrode fingers are interdigitated so that the interdigital transducer is circular or annular in shape as a whole, on an optical waveguide which is circular when viewed from the front. This acoustooptic device is used as a diffraction optical device on which light is incident from the front. When an alternating voltage of a predetermined frequency is applied to the interdigital transducer by an oscillator, a concentric acoustic compressional wave is generated on the optical waveguide. The concentric acoustic compressional wave diffracts the incident light, so that the diffraction optical device functions like a lens and converges the luminous flux.Type: ApplicationFiled: December 12, 2001Publication date: June 13, 2002Inventor: Toshio Naiki
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Patent number: 6144482Abstract: A polarization-independent polychromatic light modulator applies one or more pairs of predetermined RF drive frequencies to an acousto-optic transducer of an acousto-optic modulator body upon which a single beam of randomly polarized or unpolarized polychromatic input light is incident. No precursor polarization separation elements are employed. For each optical wavelength to be extracted from the incident beam, two RF drive frequencies are employed. The acoustic waves launched into the acousto-optic medium by the application of the two frequencies of a given RF drive frequency pair produce respective +1 and -1 order output beam components of the selected output wavelength (as well as a zeroth order beam for that wavelength).Type: GrantFiled: November 13, 1998Date of Patent: November 7, 2000Assignee: Neos Technologies, Inc.Inventors: Eddie H. Young, Huey-Chin Ho, Michael D. Case, Robert V. Belfatto, Sr.
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Patent number: 6084627Abstract: An apparatus and method for controlling an image recording device. The apparatus includes an acousto-optic deflector that deflects a beam of light so as to write a sub-scan comprising a predetermined number of picture elements. The image recording device is arranged to write a plurality of sub-scans side by side in a substantially contiguous manner. The apparatus also includes a component that commences sub-scans, a start of sub-scan detector that detects when the light beam is directed towards a start of sub-scan position, and an end of sub-scan detector that detects when the beam of light is directed towards an end of sub-scan position. A timing logic controller generates a start reference signal representing a desired position for the start of a sub-scan. A controller compares an output of the start of sub-scan detector with respect to the start reference signal.Type: GrantFiled: April 9, 1997Date of Patent: July 4, 2000Assignee: ICG LimitedInventors: Paul Christopher Cook, Raymond John Drewett, Alan Peter Ogburn
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Patent number: 6081365Abstract: An acousto-optic modulator comprised of an acousto-optic element coated with an anti-reflection layer, and a method of manufacturing the same, are provided. The acousto-optic modulator includes an anti-reflection layer, comprised of at least two coating layers having different refractive indices, formed on the light incident/emitting surface of an ultrasonic medium for modulating a light beam incident from an optical source.Type: GrantFiled: April 7, 1999Date of Patent: June 27, 2000Assignee: Samsung Electronics, Co., Ltd.Inventor: Yong-hoon Kim
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Patent number: 5963569Abstract: A multichannel acousto-optic modulator (MCAOM) is described which uses a crystal with a plurality of mounting faces for acoustic transducers. The mounting faces are oriented so that the acoustic transducers mounted thereon generate acoustic fields which intersect the incident laser beam at a common angle, i.e., the Bragg angle. A two channel MCAOM uses two transducers. Extension to any higher number of channels follows accordingly. Energizing any of the transducers causes a corresponding first order beam to be diffracted out. Since the acoustic field for each transducer intersects the incident beam with a unique orientation, each first order beam is diffracted out on a unique axis. A system utilizing an MCAOM has electronic means for controlling the driving signals to the transducers to control each channel as required by the application. Amplitude and frequency modulation of the driving signals allows the intensity and angle of the beams to be controlled.Type: GrantFiled: March 28, 1997Date of Patent: October 5, 1999Assignee: International Business Machines CorporationInventors: Peter Michael Baumgart, James Hammond Brannon, Chie Ching Poon, Andrew Ching Tam
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Patent number: 5923461Abstract: A multi-beam scanning system for scanning a curved imaging surface includes at least one radiation emitter which emits first and second beams of radiation. A spin deflector, rotatable about a spin axis, directs the first beam to form a first scan line and the second beam to form a second scan line on the imaging surface. A deflection element, disposed in the path of the first beam and upstream of the spin deflector, operates to deflect the first beam with respect to the rotation of the spin deflector. The spin deflector is impinged by beams of radiation only at a distance, other than zero, from the spin axis.Type: GrantFiled: July 31, 1998Date of Patent: July 13, 1999Assignee: Agfa CorporationInventors: Roy D. Allen, Frank Scholten
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Patent number: 5907428Abstract: An xyz coordinate system is determined so that a z-axis may coincide with an incident direction of an incident light, an x-axis may coincide with a polarizing direction of the incident light and a y-axis may be defined as the right-handed system from the z-axis and x-axis. An acousto-optic element is rotated around the z-axis, around the axis in a direction of propagation of an ultrasonic wave and around an axis B perpendicular to a plane formed by the z-axis and the direction of propagation of the ultrasonic wave, so that the attitude of the acousto-optic element to the incident light is adjusted.Type: GrantFiled: September 5, 1997Date of Patent: May 25, 1999Assignee: Fuji Photo Film Co., Ltd.Inventors: Akiko Yamashita, Katsuto Sumi
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Patent number: 5825497Abstract: An object surface height measuring device with two acousto-optical modules for refracting light from a light emitter with predetermined refractive indices depending on frequency modulation so that the light is swept over the X and Y axes of an object, and two other acousto-optical modules synchronized with the signals of the first two acousto-optical modules, respectively, so that the light reflected from the object is focused onto a light receiving portion. The change in the height of the object is measured from the variation between the spot of light focused onto the light receiving portion and the center of the light receiver.Type: GrantFiled: July 30, 1997Date of Patent: October 20, 1998Assignee: Samsung Electronics Co., Ltd.Inventor: Hyeong-cheol Kim
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Patent number: 5633747Abstract: An apparatus for both deflecting a beam of light illuminating a spot on a surface and varying the size of the spot, electronically, without changing any system components. The apparatus includes an acousto-optic deflector driven with a linear FM signal produced by a chirp signal generator. The linear FM signal is characterized with a dispersion rate, and the chirp signal generator includes a chirp dispersion selector to vary the dispersion rate. A beam of collimated light passes through the acousto-optic deflector and appropriate focusing optics image the beam onto a spot in a nominal focal plane. The chirp dispersion selector sets the dispersion rate in accord to a nominal rate, resulting in the beam illuminating a spot in the focal plane. Generally, the focal plane coincides with a wafer surface, of the type having periodic and non-periodic features on it. The spot size may be varied from that of a diffraction limited spot to a spot whose maximum size is system dependent.Type: GrantFiled: December 21, 1994Date of Patent: May 27, 1997Assignee: Tencor InstrumentsInventor: Mehrdad Nikoonahad
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Patent number: 5463493Abstract: An acousto-optic polychromatic light modulating apparatus employs an acousto-optic medium, and a single piezoelectric transducer, which is driven by a plurality of frequency components, the intensities of which are controlled in response to input electronic data, to produce a color-modulated diffracted polychromatic output beam. The acousto-optic medium and mode as well as acousto-optic interaction length and the geometry of the device are selected such that there is negligible acousto-optic interaction with a given frequency signal on all output optical beam colors except for the one assigned to that frequency, with a high degree of color convergence achieved over a wide wavelength range. The present invention can be used to increase the modulation rate of a polychromatic modulator by selecting the incident optical beam energy propagation direction to be nearly normal to the acoustic wave phase propagation direction with non-parallel tangents at the incident and diffracted optical wave-vector loci.Type: GrantFiled: January 19, 1993Date of Patent: October 31, 1995Assignee: MVM ElectronicsInventor: Manhar L. Shah
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Patent number: 5138482Abstract: A light modulator includes an interdigital transducer having a plurality of interdigital electrode fingers for generating surface elastic waves having respective different frequencies in an optical waveguide. The electrode fingers are oriented in different directions to enable the generated surface elastic waves to diffract a light beam guided through the optical waveguide, while satisfying the Bragg condition for diffraction. A driver applies high-frequency voltages having respective frequencies to the electrode fingers to generate the surface elastic waves, respectively. The application of the high-frequency voltages to the electrode fingers is turned on and off by switching circuits. The light modulator is incorporated in a recording device.Type: GrantFiled: September 25, 1990Date of Patent: August 11, 1992Assignee: Fuji Photo Film Co., Ltd.Inventors: Masami Hatori, Hiroshi Sunagawa
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Patent number: 5132834Abstract: Disclosed herein is a method of mixing together a plurality of inputted high-frequency signals whose frequency intervals are equal to each other so as to input the thus-mixed high-frequency signals to a multi-frequency acousto-optic device for dividing incident laser beams with the density according to the amplitude of each of the inputted high-frequency signals and in the direction corresponding to the frequency of each inputted high-frequency signal so as to radiate the thus-divided laser beams therefrom. The high-frequency signals whose frequencies are free from being adjacent to each other are mixed together, and the thus-mixed high-frequency signals are further mixed into one, thereby inputting the mixture to the acousto-optic device. Since the frequencies of high-frequency signals to be mixed first are not adjacent from each other, third-order harmonic signals appear at positions where they are dispersed.Type: GrantFiled: March 26, 1991Date of Patent: July 21, 1992Assignee: Fuji Photo Film Co., Ltd.Inventor: Hidetoshi Shinada
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Patent number: 5107368Abstract: A light beam scanning apparatus comprises an ultrasonic light deflector for diffracting a light beam of a predetermined wavelength, and a reflecting mirror position approximately normal to light deflected by the ultrasonic light deflector for reflecting the deflected light and making it again impinge upon the ultrasonic light deflector.Type: GrantFiled: May 29, 1990Date of Patent: April 21, 1992Assignee: Fuji Photo Film Co., Ltd.Inventor: Masaru Noguchi