Abstract: Disclosed herein is an image taking optical system including at least one lens provided on an optical path; a first infrared-ray absorption filter made from a resin material with a film shape and provided on the optical path; a multi-layer film provided with an infrared-ray absorption function and provided on the optical path; and a second infrared-ray absorption filter made from a resin material with a film shape and provided on the optical path, wherein the first infrared-ray absorption filter, the multi-layer film and the second infrared-ray absorption filter are provided at locations arranged along the optical path in a direction from a photographing-object side to an image side, and the multi-layer film has a spectroscopic-characteristic adjustment function and a light reflection characteristic.

Abstract: An infrared cut filter may be used with an image sensor to remove infrared light components from image light received from a first side of the infrared cut filter prior to the image light reaching the image sensor to be disposed on a second side of the infrared cut filter. The infrared cut filter includes at least one red absorbing layer and an infrared reflector. The at least one red absorbing layer partially absorbs red light components within the image light. The infrared reflector reflects the infrared light components. The infrared reflector is disposed between the red absorbing layer and the first side of the infrared cut filter while the at least one red absorbing layer is disposed between the infrared reflector and the second side of the infrared cut filter.

Abstract: A method for producing a multilayer coating (17) for reflecting radiation in the soft X-ray or EUV wavelength range on an optical element (8, 9) operated at an operating temperature (TOP) of 30° C. or more, including: determining an optical design for the multilayer coating (17) which defines an optical desired layer thickness (nOP dOP) of the layers (17.1, 17.2) of the multilayer coating (17) at the operating temperature (TOP), and applying the layers (17.1, 17.2) of the multilayer coating (17) with an optical actual layer thickness (nB dB) chosen such that a layer thickness change(nOP dOP?nB dB) caused by thermal expansion of the layers (17.1, 17.2) between the coating temperature (TB) and the operating temperature (TOP) is compensated for. Also provided are an associated optical element (8, 9) and a projection exposure apparatus having at least one such optical element (8, 9).

Abstract: To provide a near infrared cut filter glass which has few bubble defects and exhibits high climate resistance. A near infrared cut filter glass made of fluorophosphate glass, which comprises, as represented by cation percentage, 25 to 55% of P5+, 1 to 25% of Al3+, 1 to 50% of R+ (wherein R+ is a total content of Li+, Na+ and K+), 1 to 50% of R2+ (wherein R2+ is a total content of Mg2+, Ca2+, Sr2+, Ba2+ and Zn2+), 1 to 10% of Cu2+ and 0 to 3% of Sb3+, and comprises as represented by anion percentage, 35 to 95% of O2? and 5 to 65% of F?, and which has a ?-OH value of from 0.001 to 0.1 mm?1.

Abstract: A dichroic mirror configured to separate a first type of radiation in a first wavelength range having an upper boundary from a second type of radiation in a second wavelength range having a lower boundary greater than the upper boundary of the first wavelength. The mirror includes a substrate, and a stack having a reflective surface facing away from the substrate and a width that increases stepwise in a direction towards the substrate. The stack is formed by alternating layers of first and second materials on the substrate. The reflective surface has steps with a width greater than the upper boundary of the first wavelength and less than the lower boundary of the second wavelength.

Abstract: To provide an infrared reflecting substrate, from which a laminated glass with surface having favorable neutral color tone without stimulus color tone is obtained. An infrared reflecting substrate 1 comprises a transparent substrate 2, and an infrared reflecting film 3 having at least 7 layers of a high refractive index dielectric film 3H and a low refractive index dielectric film 3L alternately laminated, formed on one principal surface of the transparent substrate 2. The infrared reflecting film 3 has a first laminate portion having at least 5 layers of dielectric films 311 having a n·d/? value of 0.44 to 0.55 where the refractive index is n when the thickness is d (nm) and the wavelength is ? (nm), continuously laminated, and a second laminate portion 32 having at least 2 layers of dielectric films having a n·d/? value of 0.03 to 0.12 continuously laminated.

Abstract: The present invention discloses a non-quarter wave multilayer structure having a plurality of alternating low index of refraction material stacks and high index of refraction material stacks. The plurality of alternating stacks can reflect electromagnetic radiation in the ultraviolet region and a narrow band of electromagnetic radiation in the visible region. The non-quarter wave multilayer structure, i.e. nLdL?nHdH??0/4, can be expressed as [A 0.5 qH pL(qH pL)N 0.5 qH G], where q and p are multipliers to the quarter-wave thicknesses of high and low refractive index material, respectively, H is the quarter-wave thickness of the high refracting index material; L is the quarter-wave thickness of the low refracting index material; N represents the total number of layers between bounding half layers of high index of refraction material (0.5 qH); G represents a substrate and A represents air.

Abstract: Catadioptric projection objective (1) for microlithography for imaging an object field (3) in an object plane (5) onto an image field (7) in an image plane (9). The objective includes a first partial objective (11) imaging the object field onto a first real intermediate image (13), a second partial objective (15) imaging the first intermediate image onto a second real intermediate image (17), and a third partial objective (19) imaging the second intermediate image onto the image field. The second partial objective is a catadioptric objective having exactly one concave mirror and having at least one lens (L21, L22). A first folding mirror (23) deflects the radiation from the object plane toward the concave mirror and a second folding mirror (25) deflects the radiation from the concave mirror toward the image plane. At least one surface of a lens (L21, L22) of the second partial objective has an antireflection coating having a reflectivity of less than 0.

Abstract: The present invention provides a near-infrared reflective film and a near-infrared reflector provided with the same, which provide excellent manufacturing cost performance, can be used over large areas, exhibit excellent flexibility, and have high visible light transmittance. The near-infrared reflector is characterized in that, in an infrared film in which high refractive index layers and low refractive index layers are alternately laminated on a support body, the refractive index difference between adjacent high refractive index layers and low refractive index layers is at least 0.3, and at least one of the high refractive index layers and low refractive index layers contains a metal oxide and a polysaccharide thickener.

Abstract: Disclosed is a method for manufacturing a near-infrared reflective body in which a near-infrared reflective film is manufactured that has excellent manufacturing cost performance, is capable of being employed over a large area, and has excellent application stability and resistance to refractive index unevenness in the surface. A method for manufacturing a near-infrared reflective film in which a high refractive index layer and a low refractive index layer are alternately laminated on a support, wherein the difference in the refractive index of adjacent high refractive index layers and low refractive index layers is at least 0.3, and the near-infrared reflective film is formed using a coating liquid for a high refractive index layer and a coating liquid for a low refractive index layer, if the viscosity of the high refractive index layers and low refractive index layers at 15° C. is ?15 and at 45° C. is ?45, the viscosity ratio (?15/?45) in each case is at least 2.0.

Abstract: A reflecting sheet of the invention is comprised of at least two, a surface layer portion and an inner layer portion, or more layers, and is characterized in that the surface layer portion contains at least a thermoplastic resin (C), the inner layer portion contains a thermoplastic resin (A), and at least one kind of thermoplastic resin (B) incompatible with the thermoplastic resin (A), reflected light intensity in a vertical direction has anisotropy by an incident direction when light is incident at an incident angle of 60 degrees with respect to the vertical direction of a plane of the reflecting sheet in the entire reflecting sheet including the surface layer portion and the inner layer portion, and that a ratio L1/L2, which is a ratio of reflected light intensity L1 in the vertical direction in an incident direction A1 where the reflected light intensity in the vertical direction is the highest to reflected light intensity L2 in the vertical direction in an incident direction A2 orthogonal to the incident

Abstract: The present invention provides a highly flexible near-infrared reflecting film which has achieved good near-infrared reflection characteristics by comprising layers that have different refractive indexes and which is not susceptible to bending or cracks. This near-infrared reflecting film has a multilayer film, in which films having refractive indexes different from each other are laminated, on a film, and is characterized in that: the difference of the refractive indexes between at least two adjacent layers is 0.3 or more; at least one of the two adjacent layers contains a metal oxide; and at least one of the two adjacent layers contains a polyvinyl alcohol or an inorganic polymer.

Abstract: Disclosed herein are a multilayer light-reflecting film and a method for manufacturing the same. Main body of the light-reflecting film is the structure with multiple layers made of stacked polymers. The structure includes at least one bi-refringence material layer. In accordance with one of the embodiments, the inner or outer side of the light-reflecting film may be disposed with one or more protective layers and one or more functional films. The functional film is preferably made of the polymer with UV-resistant, scratch-resistant and high-reflection effect materials. In the method for manufacturing the light-reflecting film, a co-extruder is utilized to perform a co-extrusion process. Multiple materials are co-extruded to form a co-polymer. After configuring an output quantity and thickness of the extrudate, the multilayer light-reflecting film is formed.

Abstract: The present invention provides a near-infrared reflective film and a near-infrared reflector, which can be used over large areas and are flexible, and have low haze and high visible light transmittance. The near-infrared reflective film comprises at least one unit composed of a high refractive index layer and low refractive index layer on a substrate, and is characterized in that the refractive index difference between an adjacent high refractive index layer and low refractive index layer is at least 0.1, and said high refractive index layer contains at least one type of compound (A) selected from: 1) a rutile-type titanium oxide having a volume-average particle diameter of not more than 100 nm; 2) a water-soluble polymer; and 3) the following group of compounds. Group of compounds: a carboxyl group-containing compound, hydroxamic acids, pyridine derivatives.

Abstract: The present invention relates to a laminate that includes a pair of substrates; and one or more photochromic films and one or more infrared (IR) shield films that are provided between the pair of substrates, wherein the photochromic films or the infrared (IR) shield films that are in contact with a pair of substrates are adhered to the substrates by an adhesion film. The laminate according to the present invention has a high durable photochromic function having a UV shielding effect and an infrared (IR) shielding effect.

Abstract: Provided are infrared reflective films comprising a substrate and at least one infrared reflective layer comprising an aminium radical cation compound in a crystalline state and an organic polymer, wherein the infrared reflective layer has a reflectance peak in the infrared region from 1250 nm to 1700 nm. Such infrared films are stable in their optical properties against degradation by light and moisture. Also provided are solar control window films, security markings, and other optical articles comprising such infrared reflective films. Further provided are methods for making such infrared reflective films.

Abstract: An ink cartridge has a label portion on a wall surface of one periphery of a case forming an ink accommodating unit. The label unit has an optical functional layer that allows a predetermined wavelength of light to pass, an optical dispersion layer that includes hollow bodies, and an optical absorptive layer that absorbs the first wavelength of light, which are laminated in this order, and the optical absorptive layer is a surface side of the case. When the optical reflective layer is heated from a heating unit directed to the label portion at a temperature of damaging the hollow bodies, the dispersion of the light is suppressed by the damage to the hollow bodies, and the transmittance of the wavelength of light is irreversibly raised.

Abstract: A film mirror for reflecting sunlight includes a polymer film substrate, a reflective layer including silver coating, and a protective coating layer in sequence from the incident side of sunlight. The reflective layer is formed by coating and calcining (firing) a coating liquid containing a silver complex compound.

Abstract: The invention relates to an inspection port, and a housing with an inspection port, for use in inspecting an interior volume. The housing has a housing enclosure with an inspection opening at or over which the inspection port is mounted, either directly to the housing enclosure or to a base which in turn is mounted to the housing enclosure. The inspection port has a rotatable assembly, rotatably secured to the housing enclosure or base for rotation about an axis of rotation at the inspection opening. The rotatable assembly has a plate defining an access opening and an inspection enclosure attached to the plate around the access opening and adaptable to extend into the interior volume. The inspection enclosure has a region with a window opening which has a window axis and is adaptable to provide lines of sight into the interior volume.

Abstract: A reflective optical element e.g. for use in EUV lithography, configured for an operating wavelength in the soft X-ray or extreme ultraviolet wavelength range, includes a multilayer system (20) with respective layers of at least two alternating materials (21, 22) having differing real parts of the refractive index at the operating wavelength. Preferably, at least at an interface from the material (21) having the higher real part of the refractive index to the material (22) having the lower real part of the refractive index, a further layer (23) of a nitride or a carbide of the material (22) having the lower real part is arranged. Particularly preferably the material (22) having the lower real part of the refractive index is lanthanum or thorium. Preferably, the layers (21, 22, 23) of at least one material are applied in a plasma-based process for manufacturing a reflective optical element as described.

Abstract: Certain example embodiments of this invention relate to an electrode (e.g., front electrode) for use in a photovoltaic device or the like. In certain example embodiments, a transparent conductive oxide (TCO) based front electrode for use in a photovoltaic device is of or includes zinc oxide, or zinc aluminum oxide, doped with yttrium (Y). In certain example embodiments, the addition of the yttrium (Y) to the conductive zinc oxide or zinc aluminum oxide is advantageous in that potential conductivity loss of the electrode can be reduced or prevented. In other example embodiments, a low-E coating may include a layer of or including zinc oxide, or zinc aluminum oxide, doped with yttrium (Y).

Abstract: What is disclosed is a filter array for a multi-resolution multi-spectral camera system which not only captures 2D images at multiple wavelength bands simultaneously but also at a spatial resolution that meets the demand for spatial feature extraction. The present system optimizes filter bands that provide high image contrast at the highest possible resolution to enable spatial feature extraction and other wavelength bands at lower resolution to achieve maximum number of wavelength bands (e.g. spectral resolution) for multi-spectral analysis. After determining the required spatial resolution and number of wavelength bands for spectral analysis, multiple filters are arranged in a geometric pattern with each filter being designed to have specified wavelength and spatial resolution. Physical sizes of filters differ within each filter group. This maximizes the detector usage while optimizing the trade-off between spatial resolution and spectral resolution.

Abstract: Illumination lenses having surfaces shaped according to given differential equations in order to distribute light in a highly controlled manner with minimum reflection losses are provided. These lenses also have surfaces angled and arranged in such a way that they can be molded with relatively simple molds.

Abstract: An imaging apparatus includes an image sensor, a first optical member disposed ahead of a front of the image sensor, a second optical member disposed between the first optical member and the image sensor, and a holder. The holder elastically retains the first optical member and retains the second optical member so that the second optical member is opposed to the elastically retained first optical member. The imaging apparatus further includes a film-like resin filter disposed between the first optical member and the second optical member that is bonded to at least one of the first optical member and the second optical member.

Abstract: A method is disclosed for in-situ monitoring of an EUV mirror to determine a degree of optical degradation. The method may comprise the steps/acts of irradiating at least a portion of the minor with light having a wavelength outside the EUV spectrum, measuring at least a portion of the light after the light has reflected from the mirror, and using the measurement and a pre-determined relationship between mirror degradation and light reflectivity to estimate a degree of multi-layer mirror degradation. Also disclosed is a method for preparing a near-normal incidence, EUV mirror which may comprise the steps/acts of providing a metallic substrate, diamond turning a surface of the substrate, depositing at least one intermediate material overlying the surface using a physical vapor deposition technique, and depositing a multi-layer mirror coating overlying the intermediate material.

Abstract: An optical member made of polycrystalline silicon formed from high-purity trichlorosilane as a raw material, and that absorbs and scatters an infrared ray in a wavelength region of 4 ?m or less. In the optical member, a ratio A/B between a transmittance A of an infrared ray having a wavelength of 4 ?m and a transmittance B of an infrared ray having a wavelength of 10 ?m is 0.9 or less, and an average crystal grain size of the polycrystalline silicon is 5 ?m or less. This polycrystalline silicon is produced by hydrogen reducing SiHCI3 by heating a base material to 800 to 900° C. using a chemical vapor deposition method. In this way, an infrared ray transmissive optical member, a manufacturing method thereof, an optical device, an infrared detector, and an optical apparatus capable of sensing a human body with high sensitivity and accuracy are realized.

Abstract: An infrared transparent cover for an infrared signal port of an electronic device includes a base layer having infrared transparency, an infrared transparent and visible light reflective dielectric multilayer film laminated on the base layer to reflect light having a desired color, and a frosted surface formed on the base layer at a location corresponding to the dielectric multilayer film.

Abstract: The present invention relates to a substrate carrying a multilayer solar control stack, as well as to a multiple glazing incorporating at least one such sheet of glassy material carrying a solar control stack. The multilayer solar control stack comprises at least n functional layers based on a material which reflects infrared radiation and (n+1) transparent dielectric coatings such that each functional layer is surrounded by transparent dielectric coatings, n being greater than or equal to 3. The stack comprises at least one layer of metallic nature absorbing in the radiation which is visible inside the stack. The invention applies particularly to the formation of solar control glazings with low solar factor.

Abstract: Optical interference multilayer coatings of alternating first layers and second layers are provided. The first layers comprise alumina and have a refractive index that is about 1.38 to about 1.55 at 550 nm, while the second layers having a higher refractive index than the first layers. The first layers may be formed via chemical vapor deposition from an alumina precursor. Lamps comprising a light source and a light-transmissive envelope having a surface and at least partially enclosing the light source are also provided. At least a portion of the surface of the light-transmissive envelope is provided with an optical interference multilayer coating. Methods of forming an optical interference multilayer coating are also provided via chemical vapor deposition from an alumina precursor.

Abstract: The invention relates to a substrate made of an aluminium-silicon alloy or crystalline silicon to which a polishable layer is applied and also to a metal mirror which comprises this substrate. Furthermore, the invention relates to a method for the production of metal mirrors and also the use of the metal mirror according to the invention.

Abstract: An electromagnetic shielding coating covers a lens coated with an optical coating. A light shielding coating covers the optical coating. The electromagnetic shielding coating covers the light shielding coating. The electromagnetic shielding coating includes a first metal layer containing stainless steel and covering the light shielding coating directly, a second copper layer formed on the first metal layer, and a third metal layer formed on the second copper layer. The third metal layer includes stainless steel and copper.

Abstract: A mirror (1a; 1a?; 1b; 1b?; 1c; 1c?) for the EUV wavelength range and having a substrate (S) and a layer arrangement, wherein the layer arrangement includes at least one surface layer system (P??) consisting of a periodic sequence of at least two periods (P3) of individual layers, wherein the periods (P3) include two individual layers composed of different materials for a high refractive index layer (H??) and a low refractive index layer (L??), wherein the layer arrangement includes at least one surface protecting layer (SPL, Lp) or at least one surface protecting layer system (SPLS) having a thickness of greater than 20 nm, and preferably greater than 50 nm.

Abstract: The infrared reflective layered product can reflect infrared radiation with certain wavelengths to prevent heat accumulation and, at the same time, has excellent heat resistance. The infrared reflective layered product comprises a layer (B) as a base layer, a layer (A) layered on one side of the layer (B), and a layer (C) layered on the other side of the layer (B).

Abstract: Light management constructions contain an optical substrate having a first major surface and a second major surface opposite the first major surface. The first major surface is a microstructured surface with asymmetrical structures. The asymmetrical structures form an ordered arrangement of a plurality of multi-sided refractive prisms, with the multi-sided refractive prisms having a cross section of 4 or greater sides. The light management constructions can be incorporated into optical articles such as windows.

Abstract: An infrared ray-reflecting film that includes a laminate obtained by alternately laminating two or more layers having different refractive indices on a light-transmitting substrate, in which: a difference in refractive index (e.g., for light having a wavelength of 589 nm) between any adjacent layers falls within a range of 0.1 to 0.4; and a detected peak is observed at a depth where an interfacial region between the respective layers exists in elemental analysis in a depth direction of the film by a glow discharge optical emission spectrometry. Further, a detected peak is observed at a depth where detected signals derived from components that construct adjacent layers contact each other in elemental analysis in a depth direction of the film by a glow discharge optical emission spectrometry.

Abstract: The present disclosure provides for a correction filter that may be configured to comprise a predetermined arrangement of thin film layers. This arrangement of thin film layers may be such that it effectively enables a correction filter to generate a predetermined spectral response, wherein said predetermined spectral response is substantially the same as a determined instrument response correction associated with an instrument. The invention of the present disclosure therefore provides for effectively compensating for transmission inefficiencies associated with an instrument without the need for separate reference measurements to determine and correct for instrument response.

Abstract: An automobile or vehicle having a high efficiency solar control system is provided. The automobile may have a painted surface and a film mounted to its exterior side. The film may reflect solar radiation in the near and mid infrared ranges yet allow high transmission of light in the visible range such that the painted panel may be seen. The film may have a layer of silver which reflects the solar radiation in the near and mid infrared ranges. Since the silver is susceptible to oxidation and turns the silver into a black body which absorbs the near and mid infrared radiation, the film may be designed to slow the rate of oxidation of the silver layer to an acceptable level. The silver layer may be sandwiched between the glass which does not allow oxygen to diffuse there through and reach the layer of silver and a stack of sacrificial layers having a certain thickness which slows down the rate of oxygen diffusion to an acceptable level.

Abstract: A heat-rejecting optic comprising an optical element and receiving element or layer with intermediate layer between is provided. Refractive indices of the optical element and receiving element or layer are greater than the intermediate layer. The optic may be part of a concentrator assembly or lens concentrator system for photovoltaic cells. The heat-rejecting optic functions to redirect wavelengths of light for which power conversion by a photovoltaic cell is inefficient and which cause undesirable photovoltaic cell heating and damage, reducing photovoltaic cell life. The receiving element or layer and intermediate layer modify the optical element to frustrate the total internal reflection of light that would otherwise occur within the optical element and divert that light into the receiving element or layer.

Abstract: An exterior surface covering has a colored outer layer that transmits infrared radiation and an inner layer with a thermochromic pigment that absorbs heat at low temperature and reflects at high temperatures. The outer layer conceals the color change of the thermochromic pigment.

Abstract: An infrared cut-off optical filter includes a substrate and a film structure. The substrate has a thickness and allows incoming lights to enter the optical filter at an incidence angle. The film structure is formed on the substrate to reduce an angle dependence of the optical filter with respect to the incoming lights. Further, the film structure contains a plurality of first type thin films with a first refractive index and a plurality of second type thin films with a second refractive index; the first type thin films and the second type thin films are arranged alternately; and thickness of individual films of the first type thin films and the second type thin films are controlled individually such that a substantial number of the first type thin films and the second type thin films have different thickness.

Abstract: An optical element includes a substrate and an infrared anti-reflective film. The substrate is made of ZnSe, and the infrared anti-reflective film is formed on at least one surface of the substrate. The infrared anti-reflective film includes a low-refractive-index layer made of BaF2, a high-refractive-index layer made of ZnSe, ZnS, or Ge, and an intermediate layer made of an amorphous or anisotropic material. With this structure, an optical element having a high transmittance and a small surface roughness can be produced without using ThF4.

Abstract: A multi-band aperture filter for optically coupling to a focal plane array (FPA) of a camera includes a substrate, and a first spectral coating on a first surface of the substrate that passes both a first longer and a second shorter wavelength band. A second spectral coating that passes the longer wavelength band and blocks the shorter wavelength band is on an outer annulus region, but not on an inner region on the first surface or a second surface of the substrate. The second spectral coating provides a larger aperture area for the longer wavelength band as compared to an aperture area for the shorter wavelength band to passively realize different F-numbers for the bands to provide substantially matched beam spot sizes on the detector array for the longer wavelength band and the shorter wavelength band, such as a long-wave infrared (LWIR) band and a mid-wave IR (MWIR) band.

Abstract: A reflector includes a multi layer mirror structure configured to reflect radiation at a first wavelength, and one or more additional layers. The absorbance and refractive index at a second wavelength of the multi layer mirror structure and the one or more additional layers, and the thickness of the multi layer mirror structure and the one or more additional layers, are configured such that radiation of the second wavelength which is reflected from a surface of the reflector interferes in a destructive manner with radiation of the second wavelength which is reflected from within the reflector.

Abstract: Light management film constructions contain a first optical film having a first major surface and a second major surface opposite the first major surface. The first major surface is a micro structured surface with asymmetrical structures. The asymmetrical structures form an ordered arrangement of a plurality of multi-sided refractive prisms, with the multi-sided refractive prisms having a cross section of 3 or greater sides. A second optical film contacts and is bonded to substantially all of the structures of the first major structured surface of the first optical film. The light management constructions can be incorporated into optical articles such as windows.

Abstract: An optical information recording/reproducing optical system, comprising a light source; an optical element converting a laser beam into a substantially collimated beam; and an objective lens, wherein a wavelength ? (unit: nm) of the laser beam falls within a range of 400<?<410, the optical element and the objective lens are made of same resin materials or different resin materials having a glass transition temperature of Tg>115° C., each of optical surfaces is configured not to have an optical thin film which contains at least one of or elements of titanium, tantalum, hafnium, zirconium, niobium, molybdenum and chromium, each of optical surfaces of the optical element is provided with an antireflection film made of one of or a mixture of at least two of silicon oxide, aluminum oxide, aluminum fluoride and magnesium fluoride, and a following condition is satisfied ? i = 1 n - 1 ? ( 1 - R ( BL ) ? i 100 ) - ? i = 1 n - 1 ? ( 1 - R ( UV ) ? i 100 ) > 0.

Abstract: The infrared reflective layered product can reflect infrared radiation with certain wavelengths to prevent heat accumulation while exhibiting excellent heat resistance. The product includes a base layer (B), a layer (A) layered on one side of the layer (B), and a layer (C) layered on the other side of the layer (B). Layer (A) is a colored resin layer which has an absorptance of a light with a wavelength of 800-1400 nm of not more than 10%. Layer (B) is a thermoplastic resin layer which shows a dimensional change (s) satisfying 1%?s??1% when left at 150° C. for 30 min. Layer C is a colored resin layer having a reflectance of a light with a wavelength of 400-1400 nm of not less than 50%. The product may also include a water vapor barrier layer (D).

Abstract: A multilayer mirror constructed to reflect radiation having a wavelength in the range of 6.4 nm to 7.2 nm. The multilayer mirror has alternating layers, including a first layer and a second layer. The first and second layers are selected from the group consisting of: U, or a compound or nitride thereof, and B4C layers; Th, or a compound or nitride thereof, and B4C layers; La, or a compound or nitride thereof, and B9C layers; La, or a compound or nitride thereof, and B4C layers; U, or a compound or nitride thereof, and B9C layers; Th, or a compound or nitride thereof, and B9C layers; La, or a compound or nitride thereof, and B layers; U, or a compound or nitride thereof, and B layers; C, or a compound or nitride thereof, and B layers; Th, or a compound or nitride thereof, and B layers.

Abstract: An optical component (6) for a heat screen to be placed between a cold medium and a hot medium, includes a substrate (7) having a first face to be disposed facing towards the cold medium and a second face to be disposed facing towards the hot medium, the substrate being formed from a material that is transparent to optical radiation in the visible and/or near infrared wavelength region and the material having a crystalline or polycrystalline structure. The optical component (6) further includes a thin layer (8) deposited on the second face of the substrate (7), the thin layer (8) being electrically conductive, transparent to visible and/or near infrared optical radiation and reflective to mid and far infrared thermal radiation.

Abstract: In order to produce stress-reduced reflective optical elements (1) for an operating wave length in the soft X-ray and extreme ultraviolet wavelength range, in particular for use in EUV lithography, it is proposed to apply, between substrate (2) and a multilayer system (4) optimized for high reflectivity at the operating wavelength, a stress-reducing multilayer system (6) with the aid of particle-forming particles having an energy of 40 eV or more, preferably 90 eV or more. Resulting reflective optical elements are distinguished by low surface roughness, a low number of periods in the stress-reducing multilayer system and also high values of the stress-reducing multilayer system.

Abstract: A source-collector module for an extreme ultraviolet (EUV) lithography system, the module including a laser-produced plasma (LPP) that generates EUV radiation and a grazing-incidence collector (GIC) mirror arranged relative thereto and having an input end and an output end. The LPP is formed using an LPP target system wherein a pulsed laser beam travels on-axis through the GIC and is incident upon solid, moveable LPP target. The GIC mirror is arranged relative to the LPP to receive the EUV radiation therefrom at its input end and focus the received EUV radiation at an intermediate focus adjacent the output end. An example GIC mirror design is presented that includes a polynomial surface-figure correction to compensate for GIC shell thickness effects, thereby improve far-field imaging performance.