Multilayer Filter Or Multilayer Reflector Patents (Class 359/359)
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Patent number: 9442230Abstract: A method of manufacturing a sub-wavelength extreme ultraviolet metal transmission grating is disclosed. In one aspect, the method comprises forming a silicon nitride self-supporting film window on a back surface of a silicon-based substrate having both surfaces polished, then spin-coating a silicon nitride film on a front surface of the substrate with an electron beam resist HSQ. Then, performing electron beam direct writing exposure on the HSQ, developing and fixing to form a plurality of grating line patterns and a ring pattern surrounding the grating line patterns. Then depositing a chrome material on the front surface of the substrate through magnetron sputtering. Then, removing the chrome material inside the ring pattern. Then, growing a gold material on the front surface of the substrate through atomic layer deposition.Type: GrantFiled: December 30, 2013Date of Patent: September 13, 2016Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Hailiang Li, Changqing Xie, Ming Liu, Dongmei Li, Lina Shi, Xiaoli Zhu
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Patent number: 9395476Abstract: An infrared cut-off optical filter includes a substrate and a film structure. The substrate has a thickness and allows incoming lights to enter the optical filter at an incidence angle. The film structure is formed on the substrate to reduce an angle dependence of the optical filter with respect to the incoming lights. Further, the film structure contains a plurality of first type thin films with a first refractive index and a plurality of second type thin films with a second refractive index; the first type thin films and the second type thin films are arranged alternately; and thickness of individual films of the first type thin films and the second type thin films are controlled individually such that a substantial number of the first type thin films and the second type thin films have different thickness.Type: GrantFiled: July 13, 2012Date of Patent: July 19, 2016Assignee: ZHEJIANG CRYSTAL OPTOELECTRONIC TECHNOLOGY CO., LTD.Inventor: Jinwei Wang
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Patent number: 9394416Abstract: A functional film includes a substrate, at least two organic layers including a first organic layer directly formed on the substrate and a second organic layer being an uppermost layer farthest from the substrate, and at least one inorganic layer. The reminder of the least two organic layers except the second organic layer and the at least one inorganic layer are laminated on the substrate in such a way that one of the at least one inorganic layer is formed on each of the reminder of the least two organic layers. The first organic layer is thickest in the at least two organic layers, and the second organic layer is thinnest in the at least two organic layers and thicker than a thickest inorganic layer in the at least one inorganic layer.Type: GrantFiled: August 31, 2011Date of Patent: July 19, 2016Assignee: FUJIFILM CorporationInventor: Eijirou Iwase
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Patent number: 9366788Abstract: To provide a heat radiation reflective film which has a high heat radiation reflectance and good adherence property (peel resistance), which can have a large surface area, and which de-emphasizes certain visible reflected lights; and a method for producing the film. And to provide a heat radiation reflector which includes the heat radiation reflective film as described above. A heat radiation reflective film comprising: at least one heat radiation reflective unit on one surface of a support, the unit comprising: at least 6 laminated layers, each layer having a different refractive index from an adjacent layer, wherein a first unit as one of the heat radiation reflective units comprises the layer closest to the support having a thickness which is 3 times or more of the thickness of the layer farthest from the support.Type: GrantFiled: March 12, 2012Date of Patent: June 14, 2016Assignee: KONICA MINOLTA, INC.Inventor: Akihisa Nakajima
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Patent number: 9366783Abstract: A silicon thin film solar cell includes a substrate and an undercoating formed over the substrate. The undercoating includes first layer of tin oxide or titania and a second layer having a mixture of oxides of at least two of Sn, P, Si, Ti, Al, and Zr. A conductive coating is over the first coating. The conductive coating includes oxides of one or more of Zn, Fe, Mn, Al, Ce, Sn, Sb, Hf, Zr, Ni, Zn, Bi, Ti, Co, Cr, Si, or In or an alloy of two or more of these materials. A coated article has a substrate and an anti-iridescent layer formed over the substrate. The anti-iridescent layer has a metal oxide film and a homogeneous mixed oxide film. A functional film is over the anti-iridescent layer.Type: GrantFiled: November 16, 2012Date of Patent: June 14, 2016Assignee: PPG industries Ohio, Inc.Inventor: Songwei Lu
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Patent number: 9367083Abstract: A computing device housing is described. The housing includes a front shell and a back shell coupled to a mid-frame. An infrared port may be an integral portion of the housing or the mid-frame.Type: GrantFiled: July 3, 2014Date of Patent: June 14, 2016Assignee: Hewlett-Packard Development Company, L.P.Inventors: Francis J. Canova, Jr., Jeffrey Charles Hawkins, Traci Angela Neist, Dennis Joseph Boyle, Robert Gregory Twiss, Amy Aimei Han, Elisha Avraham Tal, Madeleine Leugers Francavilla
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Patent number: 9348063Abstract: An optical component includes a base material and an antireflection film containing silica particles, wherein the silica particles have a first local maximum in the range of 1.5 nm or more and 2.5 nm or less (a first range), a second local maximum in the range of 3.5 nm or more and 4.5 nm or less (a second range), and a third local maximum in the range of 7.5 nm or more and 8.5 nm or less (a third range) in a number-based particle size distribution. It is preferred that the silica particles have a fourth local maximum in the range of 5.5 nm or more and 6.5 nm or less in the number-based particle size distribution.Type: GrantFiled: November 3, 2015Date of Patent: May 24, 2016Assignee: Seiko Epson CorporationInventors: Daiki Furusato, Katsumi Suzuki
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Patent number: 9341756Abstract: A method for correcting a surface form of a mirror (1) for reflecting radiation in the wavelength range of 5-30 nm, which includes: applying a correction layer (13) having a layer thickness variation (21) for correcting the mirror's surface form, and applying a first group (19) of layers to the correction layer. The first group (19) of layers includes first (9) and second (11) layers arranged alternately one above another, wherein the first layers have a refractive index at the operating wavelength which is greater than the refractive index of the second layers for that radiation. The correction layer (13) is applied by: introducing the mirror into an atmosphere including a reaction gas (15), applying a correction radiation (17) having a location-dependent radiation energy density, such that a correction layer having a location-dependent layer thickness variation (21) grows on the mirror's irradiated surface.Type: GrantFiled: September 13, 2013Date of Patent: May 17, 2016Assignee: Carl Zeiss SMT GmbHInventors: Juergen Mueller, Thomas Schicketanz, Dirk Heinrich Ehm
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Patent number: 9335584Abstract: Disclosed is a display device which includes a liquid crystal display configured to display an image, a plurality of backlights which are disposed in a rear area of the liquid crystal display and comprise a plurality of point light sources, a bottom chassis on which the backlights are disposed, and a plurality of reflective devices which are mounted on the bottom chassis and reflect light, which is emitted from a plurality of light sources disposed at corners of the bottom chassis and diffused in a sideward direction, toward the corners of the bottom chassis so as to secure a sufficient amount of light at the corners of the bottom chassis.Type: GrantFiled: June 10, 2014Date of Patent: May 10, 2016Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Nae Won Jang, Young Man Ahn, Dae Hee Lee, Byoung Jin Cho, Hyeong Sik Choi
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Patent number: 9321676Abstract: A bi-layer seed layer can exhibit good seed property for an infrared reflective layer, together with improved thermal stability. The bi-layer seed layer can include a thin zinc oxide layer having a desired crystallographic orientation for a silver infrared reflective layer disposed on a bottom layer having a desired thermal stability. The thermal stable layer can include aluminum, magnesium, or bismuth doped tin oxide (AlSnO, MgSnO, or BiSnO), which can have better thermal stability than zinc oxide but poorer lattice matching for serving as a seed layer template for silver (111).Type: GrantFiled: May 1, 2015Date of Patent: April 26, 2016Assignee: Intermolecular, Inc.Inventors: Mohd Fadzli Anwar Hassan, Brent Boyce, Guowen Ding, Muhammad Imran, Minh Huu Le, Zhi-Wen Wen Sun, Yu Wang, Yongli Xu
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Patent number: 9302936Abstract: An insulating glass (IG) window unit includes first and second substrates, and a low-emissivity (low-E) coating supported by one of the substrates. The low-E coating has two silver based infrared (IR) reflecting layers and allows the IG window unit to realize an increased SHGC to U-value ratio, and an increased thickness ratio of an upper silver based layer of the coating to a bottom silver based layer of the coating. The low-E coating is designed to have a low film-side reflectance, so that for example when the low-E coating is used on surface number three of an IG window unit the IG window unit can realize reduced visible reflectance as viewed from the outside of the building on which the IG window unit is mounted or is to be mounted.Type: GrantFiled: January 9, 2015Date of Patent: April 5, 2016Assignee: Guardian Industries Corp.Inventors: Francis Wuillaume, Brent Boyce
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Patent number: 9236485Abstract: A thin film transistor substrate with an adhesive strength between a semiconductor layer and a source electrode, and between a semiconductor layer and a drain electrode; and an LCD device using the thin film transistor substrate. The thin film transistor substrate includes a substrate, a gate electrode on the substrate, a gate insulating film on the gate electrode, an active layer on the gate insulating film, an ohmic contact layer on the active layer, a barrier layer on the ohmic contact layer. The barrier layer is formed of a material layer containing Ge. A source electrode and a drain electrode are on the barrier layer. The source and drain electrodes are provided at a predetermined interval from each other.Type: GrantFiled: June 16, 2011Date of Patent: January 12, 2016Assignee: LG DISPLAY CO., LTD.Inventors: Jae Young Oh, Jae Kyun Lee
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Patent number: 9201181Abstract: An infrared cut filter includes: a transparent dielectric substrate; an infrared reflecting layer formed on one surface of the transparent dielectric substrate and configured to reflect infrared light; and an infrared absorbing layer formed on the other surface of the transparent dielectric substrate and configured to absorb infrared light. The infrared absorbing layer is formed of a resin that contains infrared absorbing pigment. The infrared reflecting layer is formed of a dielectric multilayer film.Type: GrantFiled: August 22, 2013Date of Patent: December 1, 2015Assignee: Nippon Sheet Glass Company, LimitedInventors: Katsuhide Shimmo, Lei Cai, Yoshihiro Takayanagi
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Patent number: 9186924Abstract: A decorated tab for a beverage container has a lift end, a nose end, and central webbing. An enclosed portion of the central webbing has a coating. A symbol is located on the enclosed region which is created by selective removal of the coating by a laser ablation. The symbol has a boundary profile defining a perimeter of the symbol generated by a continuous, uninterrupted vectorized laser dot pattern defining regions of ablated coating. The symbol has an interior portion generated by a plurality of pulsed rasterized laser dots defining further regions of ablated coating.Type: GrantFiled: April 17, 2012Date of Patent: November 17, 2015Assignee: Rexam Beverage Can CompanyInventor: Jeffrey L. Lewis
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Patent number: 9188707Abstract: An optical lens includes a lens body and an anti-reflection film. The lens body includes an optically effective portion and a peripheral portion surrounding the optically effective portion. The optically effective portion is configured for transmitting light therethrough. The optically effective portion has a first surface and an opposite second surface. The first and second surfaces each have a curvature of greater than zero. The anti-reflection film is formed on the first surface of the optically effective portion. A reflectivity of the anti-reflection film to light rays has wavelengths in a range from about 400 nm to about 850 nm being lower than 2%.Type: GrantFiled: August 14, 2012Date of Patent: November 17, 2015Assignee: HON HAI PRECISION INDUSTRY CO., LTD.Inventors: Juin-Hong Lin, Tai-Sheng Tsai, Shih-Che Chien
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Patent number: 9164262Abstract: An IR-cut filter includes a substrate and an infrared filtering film. The substrate is made of sapphire, and includes a first surface and a second surface opposite to the first surface. The infrared filtering film covers the first surface of the substrate and increases the reflectivity in relation to infrared light, thus filtering out the infrared light. The infrared filtering film includes a number of first high refraction index layers and a number of first low refraction index layers alternately stacked on the first surface of the substrate.Type: GrantFiled: December 19, 2012Date of Patent: October 20, 2015Assignee: HON HAI PRECSION INDUSTRY CO., LTD.Inventors: Ga-Lane Chen, Chung-Pei Wang, Chao-Tsang Wei
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Patent number: 9158048Abstract: Disclosed are a novel diimmonium-based compound that has low light absorption in visible light region and has superior light absorption efficiency in near infrared region, and has superior durability and weatherability, and a near infrared absorption filter using the same. The diimmonium-based compound is represented by the formula 1 of claim 1.Type: GrantFiled: December 26, 2011Date of Patent: October 13, 2015Assignee: SK CHEMICALS CO., LTD.Inventors: Ju-Sik Kang, Jeong-Ho Park, Yu-Mi Chang
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Patent number: 9122008Abstract: An optical element includes a transparent substrate and an infrared absorbing layer on an object-side surface of the transparent substrate. The infrared absorbing layer is a thermo sensitive ink printed or deposited on the transparent substrate. The thermo sensitive ink is cured to blue color.Type: GrantFiled: June 27, 2012Date of Patent: September 1, 2015Assignee: HON HAI PRECISION INDUSTRY CO., LTD.Inventor: Shao-Kai Pei
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Patent number: 9117858Abstract: A heater block according to the present invention comprises a light-emitting lamp; a concave reflecting member that is placed opposite the lamp and has a concave reflecting surface at one surface faced with the lamp; a lens module that is inserted into the concave reflecting member and has at least one lens; and a flat reflecting member that is placed opposite the lens module. According to embodiments of the present invention, light emitted from the lamp is reflected by the concave reflecting member. Then, light and heat are collected from the reflected light by the flat reflecting member and the lens module and are irradiated on a substrate. That is, light having energy greater than a conventional manner is irradiated on the substrate to enhance the instant heating temperature and temperature increasing rate of substrate and to increase a heat-focusing area. Therefore, it has an advantage that the productivity of semiconductor or display device manufacture that requires a rapid thermal process is improved.Type: GrantFiled: March 8, 2013Date of Patent: August 25, 2015Assignee: AP SYSTEMS INC.Inventors: Il Hwan Lim, Jang Woo Shim, Chul Soo Kim, Seung Ae Choi
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Patent number: 9103160Abstract: The present invention concerns an insulating glass pane comprising a first and a second pane of glass, the first and second panes are arranged in mutually plane-parallel spaced relationship by means of spacers, an insulating space is formed between the first and second panes and gas-tightly sealed off, a plurality of mutually spaced light strips each having a plurality of mutually spaced light emitting elements are arranged in the insulating space and each of the light strips includes a torsionally stiff carrier passing through the insulating space parallel to the first and second panes.Type: GrantFiled: October 7, 2009Date of Patent: August 11, 2015Inventor: Reinhard Cordes
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Patent number: 9082521Abstract: A multilayer mirror to reflect radiation having a wavelength in the range of 2-8 nm has alternating layers. The alternating layers include a first layer and a second layer. The first and second layers are selected from the group consisting of: U and B4C layers, Th and B4C layers, La and B9C layers, La and B4C layers, U and B9C layers, Th and B9C layers, La and B layers, U and B layers, C and B layers, Th and B layers, U compound and B4C layers, Th compound and B4C layers, La compound and B9C layers, La compound and B4C layers, U compound and a B9C layers, Th compound and a B9C layers, La compound and a B layers, U compound and B layers, and Th compound and a B layers. An interlayer is disposed between at least one of the first layers and the second layer.Type: GrantFiled: January 11, 2010Date of Patent: July 14, 2015Assignee: ASML NETHERLANDS B.V.Inventors: Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Leonid Aizikovitch Sjmaenok, Nikolay Nikolaevitch Salashchenko, Nikolay Ivanovich Chkhalo
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Patent number: 9069129Abstract: An optical body includes a first optical layer, a second optical layer having an incident surface on which light is incident, and a reflecting layer sandwiched between the first and second optical layers, wherein the first optical layer includes a plurality of convex or concave structures formed on or in a surface thereof on which the reflecting layer is disposed, ridges of the convex structures or ridges between the concave structures adjacent to each other have tip portions projecting toward the incident surface side, the tip portions are deformed from an ideal shape, the second optical layer is transparent and has a refractive index of 1.1 or more and 1.9 or less, and the optical body selectively directionally reflects part of light entering the incident surface, which part is in a specific wavelength band, in direction other than the specular reflection direction.Type: GrantFiled: April 11, 2011Date of Patent: June 30, 2015Assignee: DEXERIALS CORPORATIONInventors: Masamitsu Kageyama, Hironori Yoshida, Masayuki Tanishima, Tsutomu Nagahama, Masashi Enomoto
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Patent number: 9063291Abstract: An omnidirectional structural color (OSC) having a non-periodic layered structure. The OSC can include a multilayer stack that has an outer surface and at least two layers. The at least two layers can include at least one first index of refraction material layer A1 and at least one second index of refraction material layer B1. The at least A1 and B1 can be alternately stacked on top of each other with each layer having a predefined thickness dA1 and dB1, respectively. The dA1 is not generally equal to the dB1 such that the multilayer stack has a non-periodic layered structure.Type: GrantFiled: February 5, 2011Date of Patent: June 23, 2015Assignees: Toyota Motor Engineering & Manufacturing North America, Inc., Toyota Motor CorporationInventors: Debasish Banerjee, Minjuan Zhang, Masahiko Ishii
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Publication number: 20150146285Abstract: A reflective structure for optical touch sensing, which includes a transparent substrate, a plurality of microstructures and a transmittive reflective layer. The transparent substrate has a surface. The microstructures are disposed on the transparent substrate and expose a portion of the surface to allow a visible light to pass through. The transmittive reflective layer is disposed on the microstructures and at least covers a portion of the microstructures.Type: ApplicationFiled: February 4, 2014Publication date: May 28, 2015Applicant: UNIMICRON TECHNOLOGY CORP.Inventors: Ming-Huei Yang, Tsung-Dar Cheng, Ping-Chen Chen, Yu-Ling Hsu
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Publication number: 20150146166Abstract: Optical lenses are described and include a polymeric interference filter disposed on a curved polymeric substrate. The optical lens has an average light transmission of less than 2% across a band of blue light from 400 nm to at least 420 and up to 440 nm and substantially transmits blue light greater than 450 nm.Type: ApplicationFiled: November 27, 2013Publication date: May 28, 2015Applicant: 3M INNOVATIVE PROPERTIES COMPANYInventors: Michael F. Weber, James E. Watson, Mark R. Strenger, Stephen A. Johnson, Chad R. Wold
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Publication number: 20150146057Abstract: There are provided a near-infrared cut filter that effectively uses near-infrared absorbing glass and a near-infrared absorbing dye and is excellent in a near-infrared shielding property, and a high-sensitivity solid-state imaging device including the same. A near-infrared cut filter includes: a near-infrared absorbing glass substrate made of CuO-containing fluorophosphate glass or CuO-containing phosphate glass; and a near-infrared absorbing layer containing a near-infrared absorbing dye (A) and a transparent resin (B), on at least one principal surface of the near-infrared absorbing glass substrate, wherein an average value of a transmittance in a 400 nm to 550 nm wavelength range is 80% or more, and an average value of a transmittance in a 650 nm to 720 nm wavelength range is 15% or less.Type: ApplicationFiled: February 3, 2015Publication date: May 28, 2015Applicant: ASAHI GLASS COMPANY, LIMITEDInventors: Teppei KONISHI, Hiroyuki Arishima, Kazuhiko Shiono, Hiroki Hotaka, Makoto Hasegawa, Hiroshi Shimoda, Atsushi Komori, Aya Ikoma
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Publication number: 20150146286Abstract: A sheet is described. The sheet has at least one substrate and at least one coating, which reflects thermal radiation, on at least one surface of the substrate, wherein the coating on the substrate contains at least one adhesion layer, a functional layer containing at least one transparent, electrically conductive oxide, above the adhesion layer, a dielectric barrier layer, for regulating oxygen diffusion, above the functional layer, and an antireflection layer above the barrier layer, wherein the barrier layer has a thickness from 10 nm to 40 nm.Type: ApplicationFiled: January 16, 2013Publication date: May 28, 2015Inventors: Jan Hagen, Martin Melcher, Juliette Ruchmann, Julia Vincent
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Publication number: 20150138547Abstract: The apparatus for selectively transmitting the spectrum of electromagnetic radiation within a predefined wavelength range is provided with a carrier (115), a pinhole diaphragm which is arranged above the carrier (115) and is made of a material that is substantially impermeable to the radiation of interest, wherein the pinhole diaphragm has at least one radiation passage opening with a size for allowing through radiation at a wavelength which is less than or equal to a predefinable upper limit wavelength, and an electrically insulating and optically transparent dielectric layer (103) which is formed on the carrier (115) inside the radiation passage opening and extends, in a manner adjoining the radiation passage opening, between the carrier (115) and at least one section below the pinhole diaphragm. The dielectric layer (103) has a thickness which is less than or equal to half a predefinable lower limit wavelength which is less than the upper limit wavelength.Type: ApplicationFiled: October 31, 2012Publication date: May 21, 2015Inventors: Bernd Burchard, Frank Kleinschmidt, Jesco Möller
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Patent number: 9036772Abstract: A mirror for the EUV wavelength range (1) having a layer arrangement (P) applied on a substrate (S), the layer arrangement having a periodic sequence of individual layers, where the periodic sequence has at least two individual layers—forming a period—composed respectively of silicon (Si) and ruthenium (Ru). Also disclosed are a projection objective for microlithography (2) including such a mirror, and a projection exposure apparatus for microlithography having such a projection objective (2).Type: GrantFiled: April 8, 2010Date of Patent: May 19, 2015Assignee: Carl Zeiss SMT GmbHInventor: Aurelian Dodoc
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Publication number: 20150109663Abstract: A multispectral optical IR component with a hybrid coating DLC coating and an antireflection coating. The DLC coating has at least an outer layer with a first modulus of elasticity and an inner layer with a second modulus of elasticity which are arranged one above the other on the antireflection coating. The value of the first modulus of elasticity is greater than the value of the second modulus of elasticity. There is a transmissivity to IR radiation of at least 80% over a first determined wavelength range and over a second determined wavelength range. The first determined wavelength range lies in the range of mid-wavelength IR radiation, and the second determined wavelength range lies in the range of long-wavelength IR radiation.Type: ApplicationFiled: May 17, 2013Publication date: April 23, 2015Applicant: JENOPTIK Optical Systems GmbHInventors: Elvira Gittler, Tino Wagner, Michael Degel, Peter Maushake, Marcus Serwazi
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Publication number: 20150108370Abstract: Devices and methods for curing materials with radiant energy are described. The devices include a first reflector and a second reflector that are semi-ellipses. The ellipses that define the first reflector and the second reflector have axes of different lengths, and the reflectors are aligned such that the focal points of the reflectors are overlaid. A radiative energy source at a near focal point of a reflector can provide energy to cure a coating on a substrate at a far focal point of the reflector. The different sizes of the two reflectors decrease focusing error of the radiative energy and provide improved efficiency to the curing system.Type: ApplicationFiled: January 8, 2014Publication date: April 23, 2015Applicant: Miltec CorporationInventors: John Gunter, Jerome Kreman
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Publication number: 20150109555Abstract: Various implementations described herein are directed to a marine display device. In one implementation, a marine display device may include a housing and a display panel disposed in the housing, where the display panel is configured to project one or more images relating to marine electronics data. The marine display device may also include an infrared filter coupled to the display panel and configured to block light from being applied to the display panel.Type: ApplicationFiled: December 20, 2013Publication date: April 23, 2015Inventor: Pablo Eynon
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Publication number: 20150103397Abstract: A multi-layer photonic structure may include alternating layers of high index material and low index material having a form [H(LH)N] where, H is a layer of high index material, L is a layer of low index material and N is a number of pairs of layers of high index material and layers of low index material. N may be an integer ?1. The low index dielectric material may have an index of refraction nL from about 1.3 to about 2.5. The high index dielectric material may have an index of refraction nH from about 1.8 to about 3.5, wherein nH>nL and the multi-layer photonic structure comprises a reflectivity band of greater than about 200 nm for light having angles of incidence from about 0 degrees to about 80 degrees relative to the multi-layer photonic structure. The multi-layer photonic structure may be incorporated into a paint or coating system thereby forming an omni-directional reflective paint or coating.Type: ApplicationFiled: September 3, 2014Publication date: April 16, 2015Applicant: Toyota Motor Engineering & Manufacturing North America, Inc.Inventors: Debasish Banerjee, Benjamin Alan Grayson, Minjuan Zhang, Masahiko Ishii
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Patent number: 9007565Abstract: A spectral purity filter includes a body of material, through which a plurality of apertures extend. The apertures are arranged to suppress radiation having a first wavelength and to allow at least a portion of radiation having a second wavelength to be transmitted through the apertures. The second wavelength of radiation is shorter than the first wavelength of radiation. The body of material is formed from tungsten-molybdenum alloy or a molybdenum-rhenium alloy or a tungsten-rhenium alloy or a tungsten-molybdenum-rhenium alloy.Type: GrantFiled: December 8, 2010Date of Patent: April 14, 2015Assignee: ASML Netherlands B.V.Inventors: Andrei Mikhailovich Yakunin, Vladimir Mihailovitch Krivtsun, Viacheslav Medvedev, Alexandre Kodentsov
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Patent number: 9001418Abstract: The present invention provides a highly flexible near-infrared reflecting film which has achieved good near-infrared reflection characteristics by comprising layers that have different refractive indexes and which is not susceptible to bending or cracks. This near-infrared reflecting film has a multilayer film, in which films having refractive indexes different from each other are laminated, on a film, and is characterized in that: the difference of the refractive indexes between at least two adjacent layers is 0.3 or more; at least one of the two adjacent layers contains a metal oxide; and at least one of the two adjacent layers contains a polyvinyl alcohol or an inorganic polymer.Type: GrantFiled: June 23, 2011Date of Patent: April 7, 2015Assignee: Konica Minolta Holdings, Inc.Inventors: Noriyuki Kokeguchi, Takeo Arai
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Publication number: 20150092174Abstract: An illumination optical unit comprises a first faceted element and a second faceted element having a multiplicity of displaceable micromirrors which can be grouped flexibly to form facets.Type: ApplicationFiled: December 11, 2014Publication date: April 2, 2015Inventors: Martin Endres, Michael Patra
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Publication number: 20150085354Abstract: A near-infrared cut filter according to the present invention includes a repeated layered structure of a high-refractive index layer, a middle-refractive index layer, and a low-refractive index layer, and includes a transmission band where a mean transmittance is 85% or higher in a wavelength range of 400 nm to 700 nm, and a stopband having a width of 100 nm to 280 nm where a mean transmittance is 10% or lower in a wavelength range of 750 nm to 1100 nm.Type: ApplicationFiled: December 1, 2014Publication date: March 26, 2015Applicant: Asahi Glass Company, LimitedInventor: Mitsuyuki Tatemura
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Publication number: 20150083194Abstract: A solar light-heat hybrid power generation system having an improved efficiency is provided. A solar light-heat hybrid power generation system (100) that performs power generation by use of sunlight (52) and solar heat (52) includes a light collecting mirror (10) having an infrared reflective film (20) formed on a surface (10a) thereof; a heat collecting section (60) that collects infrared rays (55) reflected by the infrared reflective film (20) on the surface (10a) of the light collecting mirror (10); a power generator (84) including a turbine (82) rotatable by steam generated by heat collected to the heat collecting section (60); and a solar cell panel (30) including a solar cell (32) located inside the light collecting mirror (10).Type: ApplicationFiled: September 14, 2012Publication date: March 26, 2015Applicant: NITTO DENKO CORPORATIONInventor: Ryoichi Matsushima
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Patent number: 8988634Abstract: An optical film is provided. According to an embodiment, the optical film may include a base material layer, a first layer disposed on the base material layer and having a first oxide and at least one bead, and a second layer disposed on the first layer and having a second oxide and a mineral pigment.Type: GrantFiled: October 12, 2011Date of Patent: March 24, 2015Assignee: LG Electronics Inc.Inventors: Weonwoong Lee, Haechon Song
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Publication number: 20150077841Abstract: Provided is an optical filter integrally provided with a light blocking film capable of suppressing stray light. An optical filter may be used for an imaging apparatus having a built-in image sensing device on which light from a subject or a light source is incident. The optical filter includes: an optical filter main body arranged between the subject or the light source and the image sensing device and having a transmission property for the incident light; and a frame-shaped light blocking film integrally formed on at least one surface of the optical filter main body. The light blocking film satisfies the following condition (1) and/or condition (2). (1) A concavity/convexity is formed on at least a part of an inner peripheral surface of the light blocking film. (2) A thin part is formed on at least a part of an inner edge of the light blocking film.Type: ApplicationFiled: November 20, 2014Publication date: March 19, 2015Applicant: ASAHI GLASS COMPANY, LIMITEDInventors: Atsushi MATSUO, Satoshi UMEDA, Tsutomu KINASHI
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Publication number: 20150070755Abstract: The invention relates to a solar control glazing comprising a glass substrate provided, on one of its faces, with a stack of layers having a solar protection function, in which the stack comprises the sequence of the following layers, starting from the surface of the glass substrate: a lower layer for protecting the upper layers against the migration of the alkali metal ions resulting from the glass substrate, a layer of an indium tin oxide (ITO), an upper layer for protecting the ITO layer against atmospheric oxygen, said glazing being characterized in that said upper and lower layers are essentially composed of a dielectric material chosen from a silicon nitride, an aluminum nitride or their mixture and in that intermediate layers made of a chromium-comprising metal, which layers are optionally partially or completely oxidized and/or nitrided, are positioned on either side of and in contact with said ITO layer, the thickness of said intermediate layers being between 0.5 and 3 nanometers.Type: ApplicationFiled: March 8, 2013Publication date: March 12, 2015Applicant: SAINT-GOBAIN GLASS FRANCEInventors: Laura Jane Singh, Augustin Palacios-Laloy, Etienne Sandre-Chardonnal
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Publication number: 20150069253Abstract: Some embodiments of the present disclosure related to a method to form and operate the reflective surface to compensate for aberration effects on pattern uniformity. In some embodiments, the reflective surface comprises a mirror of within reduction optics of an EUV illumination tool. In some embodiments, the reflective surface comprises a reflective reticle. An EUV reflective surface topography comprising a reflective surface is disposed on a surface of a substrate, and is manipulated by mechanical force or thermal deformation. The substrate includes a plurality of cavities, where each cavity is coupled to a deformation element configured to expand a volume of the cavity and consequently deform a portion of the reflective surface above each cavity, for local control of the reflective surface through thermal deformation of a resistive material subject to an electric current, or mechanical deformation due to pressurized gas within the cavity or a piezoelectric effect.Type: ApplicationFiled: September 10, 2013Publication date: March 12, 2015Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Ching Huang, Chia-Hao Hsu, Tzu-Hsiang Chen, Chia-Chen Chen
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Patent number: 8974065Abstract: An optical body includes a substrate having a concave-convex surface, a reflecting layer formed on the concave-convex surface, and an optical layer formed on the reflecting layer to embed the concave-convex surface, wherein the reflecting layer directionally reflects light, the concave-convex surface is made up of a plurality of triangular pillars arrayed in a one-dimensional pattern, and the triangular pillar has an apex angle ? and a slope angle ?, the apex angle ? and the slope angle ? satisfying a formula (1) or (2) given below: 30???4.5??285(70???80)??(1) 30????1.5?+195(80???100)??(2).Type: GrantFiled: June 8, 2011Date of Patent: March 10, 2015Assignee: Dexerials CorporationInventors: Hironori Yoshida, Tsutomu Nagahama, Masashi Enomoto
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Publication number: 20150062695Abstract: An infrared filter includes a transparent substrate, and an infrared-filtering multilayer film. The infrared-filtering multilayer film is coated on the transparent substrate, and the infrared-filtering multilayer film includes a plurality of the first kind of film layers, a plurality of the second kind of film layers, a plurality of the third kind of film layers and a plurality of the fourth kind of film layers, wherein the four kinds of film layers are arranged in order of gradient refractive indexes. At least two kinds of film layers are made of composite materials.Type: ApplicationFiled: September 13, 2013Publication date: March 5, 2015Applicant: Largan Precision Co., Ltd.Inventors: Kuo-Chiang CHU, Chien-Pang CHANG
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Patent number: 8970949Abstract: An optical body includes a first optical layer having a concave-convex surface, a wavelength-selective reflecting layer formed on the concave-convex surface, and a second optical layer formed on the wavelength-selective reflecting layer to embed the concave-convex surface, the wavelength-selective reflecting layer having a multilayer structure formed by successively stacking at least a first high refractive index layer, a metal layer, and a second high refractive index layer, wherein, given that optical film thicknesses of the first high refractive index layer and the second high refractive index layer are x and y, respectively, and a geometrical film thickness of the metal layer is z, x, y and z satisfy the following formula (1): z ? 12.1 ? exp ? { - 1 2 ? ( x - 120 145.17 ) 2 - 1 2 ? ( y - 120 123.Type: GrantFiled: June 8, 2011Date of Patent: March 3, 2015Assignee: Dexerials CorporationInventors: Masaki Suzuki, Tsutomu Nagahama, Hiroya Takenaka, Masashi Enomoto
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Publication number: 20150055108Abstract: A mirror (1) for the EUV wavelength range having a reflectivity of greater than 40% for at least one angle of incidence of between 0° and 25° includes a substrate (S) and a layer arrangement, wherein the layer arrangement has at least one non-metallic individual layer (B, H, M), and wherein the non-metallic individual layer (B, H, M) has a doping with impurity atoms of between 10 ppb and 10%, in particular between 100 ppb and 0.1%, providing the non-metallic individual layer (B, H, M) with a charge carrier density of greater than 6*1010 cm?3 and/or an electrical conductivity of greater than 1*10?3 S/m, in particular with a charge carrier density of greater than 6*1013 cm?3 and/or an electrical conductivity of greater than 1 S/m.Type: ApplicationFiled: September 5, 2014Publication date: February 26, 2015Inventors: Peter Huber, Gisela Von Blanckenhagen
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Publication number: 20150055111Abstract: A reflective optical element and an EUV lithography appliance containing one such element are provided, the appliance displaying a low propensity to contamination. The reflective optical element has a protective layer system includes at least two layers. The optical characteristics of the protective layer system are between those of a spacer and an absorber, or correspond to those of a spacer. The selection of a material with the smallest possible imaginary part and a real part which is as close to 1 as possible in terms of the refractive index leads to a plateau-type reflectivity course according to the thickness of the protective layer system between two thicknesses d1 and d2. The thickness of the protective layer system is selected in such a way that it is less than d2.Type: ApplicationFiled: October 31, 2014Publication date: February 26, 2015Inventors: Johann Trenkler, Hans-Juergen Mann, Udo Nothelfer
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Publication number: 20150055346Abstract: A multilayer coating systems suitable for use as optical interference filters in lighting systems, for example, halogen lamps. Such an optical interference filter contains alternating layers of a high refractive index material and a low refractive index material. The high refractive index material consists of niobia, titania, and incidental impurities and contains either about 25 to less than 50 mol % titania and the balance niobia and incidental impurities, or contains about 60 to about 80 mol % titania and the balance niobia and incidental impurities.Type: ApplicationFiled: August 21, 2013Publication date: February 26, 2015Applicant: General Electric CompanyInventors: Peter William BROWN, Tianji ZHAO, Benjamin James WARD
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Publication number: 20150055112Abstract: A lithography apparatus is disclosed, having at least one mirror arrangement which includes a mirror substrate including a front side with a reflecting surface, a side wall, which extends along a circumference of the mirror substrate from a rear side of the mirror substrate, and mounting elements to mount the mirror arrangement on a structural element of the lithography apparatus. The rear side of the mirror substrate and an inner side of the side wall delimit a cavity. Each of the mounting elements is connected to the mirror arrangement at a connection surface. The relation S/D>0.5 is satisfied at least one of the connection surfaces, wherein D denotes a thickness of the side wall at the connection surface and S denotes the length of the shortest path through the mirror material from the centroid of the connection surface to the rear side of the mirror substrate.Type: ApplicationFiled: November 6, 2014Publication date: February 26, 2015Inventors: Dirk Schaffer, Wilfried Clauss, Hin-Yiu Anthony Chung
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Publication number: 20150043052Abstract: An exterior surface covering has a colored outer layer that transmits infrared radiation and an inner layer with a thermochromic pigment that absorbs heat at low temperature and reflects at high temperatures. The outer layer conceals the color change of the thermochromic pigment.Type: ApplicationFiled: October 27, 2014Publication date: February 12, 2015Inventors: Husnu M. Kalkanoglu, Ming Liang Shiao, Keith C. Hong, Gregory F. Jacobs