Abstract: An inverted microscope for the high-contrast imaging of objects includes multiple objectives configured to be disposable in an imaging beam path. Each objective has a respective objective pupil associated therewith. A lens system is also provided for generating respective intermediate images of the respective objective pupils. A modulator disposing device, which includes a plurality of modulators, is configured to dispose the modulators at predetermined respective locations on an optical axis corresponding to the locations of the respective intermediate images of the respective objective pupils so as to contrast an object image.

Abstract: A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).

Abstract: Exemplary embodiments provide an image interferometric microscope (IIM) and methods for image interferometric microscopy. The disclosed IIM can approach the linear systems limits of optical resolution by using a plurality of off-axis illuminations to access high spatial frequencies along with interferometric reintroduction of a zero-order reference beam on the low-NA side of the optical system. In some embodiments, a thin object can be placed normal to the optical axis and the frequency space limit can be extended to about [(1+NA)n/?], where NA is the numerical-aperture of the objective lens used, n is the refraction index of the transmission medium and ? is an optical wavelength. In other embodiments, tilting the object plane can further allow collection of diffraction information up to the material transmission bandpass limited spatial frequency of about 2n/?.

Abstract: In an interference microscope and a measuring device for observing and inspecting the surface and inside of a specimen such as a wafer by applying laser light to the specimen and using an interferometer, a reference optical path for conducting light is provided between a beam splitter and a reference mirror, and a measurement optical path for conducting light is provided between the beam splitter and the specimen, thereby providing an optical path difference between the reference optical path and the measurement optical path. Further, the reference mirror is tilted slightly, thereby forming interference fringes on detection means. It is possible to measure the surface shape of the specimen (measurement object) such as a wafer only by slightly tilting the reference mirror with a simple configuration and locate the accurate coordinate positions of foreign particles and pole pieces.

Abstract: A microscope system is characterized in comprising a transmission illumination optical system having a light source (11) and a condenser lens (13); a first dry objective (15a) having a magnification of from 20 or higher to 40 or lower and capable of viewing by at least one of a differential interference viewing method and a modulation contrast viewing method; and a second dry objective (15b) having a magnification of from 60 or higher to 100 or lower and capable of viewing by a differential interference viewing method; the first objective (15a) and the second objective (15b) being exchangeable.

Abstract: A differential interference contrast (DIC) determination device and method utilizes an illumination source, a layer having a pair of two apertures that receive illumination from the illumination source, and a photodetector to receive Young's interference from the illumination passing through the pair of two apertures. In addition, a surface wave assisted optofluidic microscope and method utilize an illumination source, a fluid channel having a layer with at least one aperture as a surface, and a photodetector that receives a signal based on the illumination passing through the aperture. The layer is corrugated (e.g., via fabrication) and parameters of the corrugation optimize the signal received on the photodetector.

Abstract: The present invention relates to a high-resolution surface plasmon microscope including a heterodyne interferometer (6) for splitting an excitation light beam into at least one reference beam and at least one measurement beam directed toward a coupling medium (7) to generate a surface plasmon, said heterodyne interferometer consists essentially of guide optical fibers (12, 13, 14, 15) optically connected at a first of their ends to an optical coupler (16) and each also optically connected at their second end to a light source (1), an optical coupling medium (7), an element (17) for reflecting the reference beam, and means (28) for detecting an interferometer beam, respectively.

Abstract: A microscope system includes a transmission illumination optical system having a light source and a condenser lens; a first dry objective having a magnification of from 20 or higher to 40 or lower and capable of viewing by at least one of a differential interference viewing method and a modulation contrast viewing method; and a second dry objective having a magnification of from 60 or higher to 100 or lower and capable of viewing by a differential interference viewing method; the first objective and the second objective being exchangeable.

Abstract: The invention relates to large-field high-resolution microscopy and photolithography setups operating with polychromatic light. It includes the use of a plurality of focusing micromirrors.

Abstract: Exemplary embodiments provide an image interferometric microscope (IIM) and methods for image interferometric microscopy. The disclosed IIM can approach the linear systems limits of optical resolution by using a plurality of off-axis illuminations to access high spatial frequencies along with interferometric reintroduction of a zero-order reference beam on the low-NA side of the optical system. In some embodiments, a thin object can be placed normal to the optical axis and the frequency space limit can be extended to about [(1+NA)n/?], where NA is the numerical-aperture of the objective lens used, n is the refraction index of the transmission medium and ? is an optical wavelength. In other embodiments, tilting the object plane can further allow collection of diffraction information up to the material transmission bandpass limited spatial frequency of about 2n/?.

Abstract: A microscope includes a source of electromagnetic radiation, having a wavelength, ?1 and dividing optical elements configured for dividing the radiation from the source into multiple excitation beams. The microscope also includes a detector and directing optical elements, which are configured for directing each excitation beam in unique directions, such that the beams intersect in an excitation region within a sample to create a two-dimensional or three-dimensional interference pattern of multiple excitation maxima within the sample. The detector has individual detector elements, where the detector elements are configured for detecting light resulting from an interaction of an individual excitation maximum and the sample.

Abstract: Exemplary embodiments provide an image interferometric microscope (IIM) and methods for image interferometric microscopy. The disclosed IIM can approach the linear systems limits of optical resolution by using a plurality of off-axis illuminations to access high spatial frequencies along with interferometric reintroduction of a zero-order reference beam on the low-NA side of the optical system. In some embodiments, a thin object can be placed normal to the optical axis and the frequency space limit can be extended to about [(1+NA)n/?], where NA is the numerical-aperture of the objective lens used, n is the refraction index of the transmission medium and ? is an optical wavelength. In other embodiments, tilting the object plane can further allow collection of diffraction information up to the material transmission bandpass limited spatial frequency of about 2n/?.

Abstract: A diffraction grating produces first diffraction light in a symmetrical direction with respect to the 0-th diffraction light and the optical axis. Each light flux forms two flux interference patterns on a sample surface through first and second objective lenses. A sample is illuminated by spatially modulated illumination light. Fluorescence is generated on the sample by structured illumination light as excitation light. The fluorescence caught by the first objective lens forms a modulated image of the sample on a sample conjugate surface through an objective optical system including the first and second objective lenses. The modulated image is further modulated through the diffractive grating. Fluorescence from the further modulated image passes through a lens and a dichroic mirror, enters into a single light path of an observation optical system, passes through a fluorescent filter, and forms an enlarged image of the further modulated image through a lens.

Abstract: A statistically sparse subset of switchable optical sources in a sample is activated, and the activated switchable optical sources are excited such that optical beams are emitted from the activated switchable optical sources along at least two optical paths. A first wavefront modification in a first optical beam emitted from the activated switchable optical sources along a first optical path is introduced and a second wavefront modification in a second optical beam emitted from the activated switchable optical sources along a second optical path is introduced, the second wavefront modification being distinct from the first wavefront modification. The first and second optical beams are interfered with each other to produce a plurality of output beams, and three-dimensional position information of the optical sources is determined based on an intensity of each output beam from the plurality of output beams.

Abstract: Embodiments of the present invention relate to a surface wave enabled darkfield aperture structure comprising an aperture layer, a aperture in the aperture layer and a plurality of grooves around the aperture. The aperture layer has a first and second surface. The plurality of grooves is in the first surface. A surface wave propagates along at least the first surface. The plurality of grooves is configured to generate a darkfield at the aperture by modifying the surface wave to cancel out direct transmission of a uniform incident light field received by the aperture.

Abstract: In one embodiment, an apparatus comprises an optical system with multiple detectors and a processor. The optical system is configured to produce images of an optical source in a first dimension and a second dimension substantially orthogonal to the first dimension at each detector at a given time. Each image from the images is based on an interference of an emission from the optical source in a first direction and an emission from the optical source in a second direction different from the first direction. The processor is configured to calculate a position in a third dimension based on the images. The third dimension is substantially orthogonal to the first dimension and the second dimension.

Abstract: A surgical microscopy system comprises microscopy optics for generating an image of an eye under surgery. A pattern generator generates a pattern to be superimposed with the image. An eye-tracker is provided for tracking a position of the superimposed pattern with respect to the image in case of a movement of the eye. The superimposed pattern comprises pattern elements that are equally distributed on first and second circles of different sizes, in order to give assistance when placing a suture during a corneal transplant. The superimposed pattern may also provide an assistance for orientating a toric intra-ocular lens.

Abstract: A method for creating a periodic interference pattern of coherent waves in two or three dimensions, D, includes generating at least D+2 waves, where each wave has substantially the same wavelength, ?, and travels substantially in a unique direction, kn. The waves are directed such that at least a portion of each wave intersects in a common excitation region to create the interface pattern. The directions, kn, of the waves are selected such that the interference pattern within the excitation region forms a Bravais lattice, and at least one wave travels substantially in a direction, ki, such that one or more symmetry operations characteristic of the Bravais lattice map the direction of the wave, ki, onto a direction of a different wave, kj. The directions of the waves, kn, do not all lie on a D-dimensional set of mutually orthogonal axes.

Abstract: An objective lens includes multiple optical elements disposed between a first end and a second end, each optical element oriented along an optical axis. Each optical surface of the multiple optical elements provides an angle of incidence to a marginal ray that is above a minimum threshold angle. This threshold angle minimizes pupil ghosts that may enter an interferometer. The objective lens also optimizes wavefront delivery and pupil imaging onto an optical surface under test.

Abstract: A method and objective apparatus are provided for implementing an enhanced phase contrast microscope. A focusing vortex lens, defined by a diffractive spiral zone plate (SZP) lens, is used for the objective for the phase contrast microscope. The SZP lens focuses and imparts a helical phase to incident illumination to image the specimen with spiral phase contrast. The spiral phase contrast microscope is sensitive to phase gradients in all sample axes. Replacing the objective of a microscope with the diffractive SZP lens of the invention immediately provides existing instruments with spiral phase contrast capability.

Abstract: A microscope system is characterized in comprising a transmission illumination optical system having a light source (11) and a condenser lens (13); a first dry objective (15a) having a magnification of from 20 or higher to 40 or lower and capable of viewing by at least one of a differential interference viewing method and a modulation contrast viewing method; and a second dry objective (15b) having a magnification of from 60 or higher to 100 or lower and capable of viewing by a differential interference viewing method; the first objective (15a) and the second objective (15b) being exchangeable.

Abstract: The present invention provides optical systems and methods for determining a characteristic of a cell, such as cell type, cellular response to a biochemical event, biological state and the like. The methods typically involve using interferometry to observe membrane properties in a cell and then use this information to determine one or more characteristics of a cell. The methods of the invention are useful for applications such as drug screening as well as diagnostic techniques.

Abstract: An apparatus includes an interferometer configured to generate an interference pattern by combining test light from a test object with reference light reflected from a reference object, the interferometer being further configured to direct at least a first part of a monitor test beam to the test object at a first incident angle and at least a second part of a monitor reference beam to the reference object at a second incident angle, and recombine the first part and the second part of the monitor beams after they reflect from the test and reference surfaces to interfere with one another and form a monitor pattern, where the first and second angles cause the monitor pattern to have spatial interference fringes, and wherein a change in the position of the interference fringes is indicative of a change in a relative position between the test and reference objects.

Abstract: Apparatus include a microscope including an objective and a stage for positioning a test object relative to the objective, the stage being moveable with respect to the objective, and a sensor system, that includes a sensor light source, an interferometric sensor configured to receive light from the sensor light source, to introduce an optical path difference (OPD) between a first portion and a second portion of the light, the OPD being related to a distance between the objective lens and the stage, and to combine the first and second portions of the light to provide output light, a detector configured to detect the output light from the interferometric sensor, a fiber waveguide configured to direct light between the sensor light source, the interferometric sensor and the detector, a tunable optical cavity in a path of the light from the sensor light source and the interferometric sensor, and an electronic controller in communication with the detector, the electronic controller being configured to determine in

Abstract: In certain aspects, interferometry methods are disclosed that include providing one or more interferometry signals for a test object, wherein the interferometry signals correspond to a sequence of optical path difference (OPD) values which are not all equally spaced from one another because of noise, providing information about the unequal spacing of the sequence of OPD values, decomposing each of the interferometry signals into a contribution from a plurality of basis functions each corresponding to a different frequency and sampled at the unequally spaced OPD values, and using information about the contribution from each of the multiple basis functions to each of the interferometry signals to determine information about the test object.

Abstract: Embodiments of the invention allow the operation of confocal microscopes with relatively open pinholes (e.g. 1 Airy unit) whilst still giving a significant XY resolution improvement. In addition axial (Z) discrimination or resolution may also be improved. This is achieved by splitting the emitted light path in an interferometric fashion. One of the split beams is then directed inversion which inverts at least one coordinate in image space. The transformed beam and the non-transformed beam are then recombined in an interferometric fashion (i.e. coherently added), which provides an interference effect resulting in increased resolution of the image. Where the embodiments are being used in a confocal application, the resulting combined beam can then be subject to a spatially discriminating means, such as a pinhole, or the like.

Abstract: The microscope comprises a first phase-contrast objective including a first phase film shaped like a ring and having a 20-fold magnification or lower, a second phase-contrast objective including a second phase film shaped like a ring and having a 60-fold magnification or higher; and a ring silt shared and used by the first and second phase-contrast objectives.

Abstract: In accordance with the invention, there are imaging interferometric microscopes and methods for imaging interferometric microscopy using structural illumination and evanescent coupling for the extension of imaging interferometric microscopy. Furthermore, there are coherent anti-Stokes Raman (CARS) microscopes and methods for coherent anti-Stokes Raman (CARS) microscopy, wherein imaging interferometric microscopy techniques are applied to get material dependent spectroscopic information.

Abstract: Diffracted light generated by a diffraction grating passes through a tube lens, reflected by a reflection mirror and forms illuminating light in a strip pattern on the surface of a sample. Thus, fluorescence generated by an objective lens from the sample passes through the objective lens, the reflection mirror and a tube lens, and forms an image of the sample on the diffraction grating. When the diffraction grating is removed from an optical system and a dichroic mirror is arranged, instead of the reflection mirror, fluorescence from the sample passes through the dichroic mirror, and forms an image of the sample on an imaging surface of an imaging device by an imaging lens. Thus, a microscope which can be used by being switched from a normal fluorescent microscope and uses the diffracted light is provided.

Abstract: A plurality of microscope-use components are provided for interconnection in a microscope system. Each of the microscope-use components includes a communication interface which enables communication with a control apparatus of the microscope system by a prescribed communication system; a connection component-related information obtainment unit for obtaining connection component-related information that is related to another microscope-use component from a connectable other microscope-use component; and a control unit for transmitting, to the control apparatus of the microscope system by way of the communication interface, the connection component-related information of the other microscope-use component obtained by the connection component-related information obtainment unit and microscope-use component itself-related information that is related to the present microscope-use component.

Abstract: A diffraction grating produces the first diffraction light in a symmetrical direction with respect to the 0-th diffraction light and the optical axis. Each light flux forms two flux interference patterns on a sample surface through a second objective lens and a first objective lens, and a sample is illuminated by spatially modulated illumination light. Fluorescence is generated on the sample by structured illumination light as excitation light. The fluorescence caught by the first objective lens forms a modulated image of the sample on a sample conjugate surface through an objective optical system comprised of the first objective lens and the second objective lens. The modulated image is further modulated through the diffractive grating. Fluorescence from the further modulated image passes through a lens and a dichroic mirror, enters into a single light path of an observation optical system, passes through a fluorescent filter, and forms an enlarged image of the further modulated image through a lens.

Abstract: A method for the optical detection of an illuminated specimen, wherein the illuminating light impinges in a spatially structured manner in at least one plane on the specimen and several images of the specimen are acquired by a detector in different positions of the structure on the specimen, from which images an optical sectional image and/or an image with enhanced resolution is calculated. The method includes generating a diffraction pattern in the direction of the specimen in or near the pupil of the objective lens or in a plane conjugate to the pupil. A structured phase plate with regions of varying phase delays is dedicated to the diffraction pattern in or near the pupil of the objective lens or in a plane conjugate to said pupil.

Abstract: The present invention relates to a device for analyzing particles in the nanometer or micrometer range by optical measurement of light irradiated onto the sample containing particles. Accordingly, the device of the present invention can also be referred to as a microscope. The microscope device comprises an arrangement for detection of changes of the optical properties of the sample volume, e.g. changes in absorption and/or in refractive index in space and/or in time, using an interferometer arrangement of a collimated light beam or of split beams (3, 4) generated by a beam splitter (2). The wave front of the light focused into the sample is influenced by inhomogeneities of the sample, and the resultant wave front fluctuations are subsequently measured in a wave front analyser (8), which preferably is a deep nulling interferometer.

Abstract: A scanning microscope for the optical measuring of an object in which a measurement beam emitted by the light source impinges the object and is reflected by the object as a reflection beam that reenters through the lens into the radiation path of the microscope. A scanner control unit controls a displacement to change the relative position of the object and the measuring beam so that the beam is directed to at least two different measuring points on the object. An excitation unit periodically excites the object. The reflection beam is visualized on a signal detector, and a signal storage unit saves a measuring sequence of signals of the signal detector. The scanner control unit cooperates with the excitation and signal storage units to control them such that for each measuring point on the object at least one measuring sequence of measuring signals of the signal detector is saved.

Abstract: Methods and apparatus for three-dimensional imaging of a sample. A source is provided of a beam of light characterized by partial spatial coherence. The beam is focused onto a sample and scattered light from the sample is superposed with a reference beam derived from the source onto a focal plane detector array to provide an interference signal. A forward scattering model is derived relating measurement data to structure of an object to allow solutions of an inverse scattering problem, based upon the interference signal so that a three-dimensional structure of the same may be inferred. The partial spatial coherence of the source, which may be fixed or variable, may advantageously provide for rejection of multiple scattering artifacts and thus improve image quality.

Abstract: The invention concerns an apparatus for implementing phase-contrast or modulation-contrast observation on microscopes with the aid of a modulator (7) arranged in each pupil plane in the observation beam path and containing at least one layer modifying the phase or amplitude, and of a stop (3) arranged in the illumination beam path. For stepless adaptation of the phase shift, the modulator (7) is mounted tiltably. The invention further concerns a method for implementing a defined phase shift.

Abstract: Exemplary apparatus and/or method can be provided using which, it is possible to provide information associated with at least one portion of a sample. For example, at least one electro-magnetic radiation received from the at least one portion of the sample can be separated into a plurality of first radiations, one of the first radiations having a phase delay that is different from a phase delay of another of the first radiations. In addition, at least one of the first radiations can be received and separated into second radiations according to wavelengths of the received at least one of the first radiations. Further, it is possible to detect the second radiations and generate information regarding a position of the at least one portion of the sample as a function of at least one characteristic of at least one interference of the first radiations.

Abstract: Exemplary embodiments provide an image interferometric microscope (IIM) and methods for image interferometric microscopy. The disclosed IIM can approach the linear systems limits of optical resolution by using a plurality of off-axis illuminations to access high spatial frequencies along with interferometric reintroduction of a zero-order reference beam on the low-NA side of the optical system. In some embodiments, a thin object can be placed normal to the optical axis and the frequency space limit can be extended to about [(1+NA)n/?], where NA is the numerical-aperture of the objective lens used, n is the refraction index of the transmission medium and A is an optical wavelength. In other embodiments, tilting the object plane can further allow collection of diffraction information up to the material transmission bandpass limited spatial frequency of about 2n/?.

Abstract: A method for adjusting two objective lenses in a 4Pi system of a scanning microscope includes imaging a reference object in respective pupils of the objective lenses so as to form a respective Fourier image for each of the objective lenses from a respective image of the reference object. The respective Fourier images are brought into coincidence by moving at least one of the objective lenses relative to the other.

Abstract: Microscope with heightened resolution and linear scanning wherein the sample is illuminated with a first and a second illuminating light, whereby the first illuminating light excites the sample, and the second illuminating light is generated through the refraction of coherent light at a periodic structure and displays a periodic structure in a lateral beam direction and in axial beam direction.

Abstract: The present invention has an object to provide a microscopic apparatus and an observing method that can obtain information of a super-resolved image of an object under observation with a high SN ratio. Therefore, the microscopic apparatus of the present invention is characterized by including an illuminating optical system (1, 2, 3, 6, 7 to 13) that illuminates a specimen plane of a sample (14) with line-shaped illuminating light (E), a modulating unit (4) that spatially modulates the illuminating light (E) in a lengthwise direction, an image-forming optical system (13 to 6, 15) that forms an image of light from the specimen plane illuminated with the spatially modulated illuminating light, and a detector (16) that detects light from the specimen plane. Accordingly, a confocal effect is obtained with respect to an unstructuring direction (Da) of an illuminated area (E).

Abstract: Under one aspect, a phase contrast imaging system includes a coherent light source emitting a coherent beam directed toward a sample area; a lens arranged to collect at least part of the beam from the sample area; an element Fourier transforming the collected beam in a Fourier plane; a liquid crystal cell in the Fourier plane that transmits at least part of the transformed beam, wherein the cell includes liquid crystal molecules having a phase transition temperature, and wherein at temperatures exceeding the phase transition temperature, light transmitted through the liquid crystal molecules obtains a different phase than light transmitted through the liquid crystal molecules obtains at temperatures below the phase transition temperature; and an element inversely Fourier transforming the transmitted beam to provide an image. Part of the transformed beam has an intensity sufficient to heat a portion of the liquid crystal molecules above the phase transition temperature.

Abstract: A microscope includes a light source, an illuminating optical system, an aperture device, and a spectral correction device. The light source includes a control device for controlling the intensity of light emitted by the light source. The illuminating optical system has a numerical aperture and illuminates a specimen. The aperture device is located in the illumination beam path and modifies the numerical aperture. The spectral correction device is located in the illumination beam path and corrects a change in the spectral intensity distribution of the light emitted by the light source so that the spectral intensity distribution of light directed onto the specimen remains substantially unchanged. Upon a change of the numerical aperture by the aperture device, the light source is controllable by the control device of the light source so that the light flux through the illuminating optical system remains substantially unchanged.

Abstract: The present invention relates to two new wave field microscopes, type I and type II, which are distinguished by the fact that they each have an illumination and excitation system, which include at least one real and one virtual illumination source, and at least one objective lens (in the case of type II), i.e., two objective lenses (in the case of type I), with the illumination sources and objective lenses being so positioned with respect to one another that they are suited for generating one-, two-, and three-dimensional standing wave fields in the object space. The calibration method in accordance with the present invention is adapted to this wave field microscopy and permits geometric distance measurements between fluorochrome-labeled object structures, whose distance can be less than the width at half maximum intensity of the effective point spread function. The invention relates moreover to a method of wave-field microscopic DNA sequencing.

Abstract: The present invention relates to confocal self-interference microscopy. The confocal self-interference microscopy further includes a first polarizer for polarizing reflected or fluorescent light from a specimen, a first birefringence wave plate for separating the light from the first polarizer into two beams along a polarizing direction, a second polarizer for polarizing the two beams from the first birefringence wave plate, a second birefringence wave plate for separating the two beams from the second polarizer into four beams along the polarizing direction, and a third polarizer for polarizing the four beams from the second birefringence wave plate, in the existing confocal microscopy.

Abstract: An interferometer comprises a light source unit, a first splitter, a reference beam unit and a detection unit. The light source unit provides a laser beam. The first splitter receives the laser beam from the light source unit and splits the laser beam into a first beam and a second beam. The reference beam unit comprises a frequency shifter, a stopper and a spherical mirror. A center of the frequency shifter is located on a curvature center of the spherical mirror, the first beam traveling from the first splitter to the frequency shifter, the frequency shifter splitting the first beam into a diffraction beam and a zero-order beam, wherein the diffraction beam travels to the spherical mirror, reflected by the spherical mirror toward the frequency shifter, passing the frequency shifter to become a reference beam, and the zero-order beam is stopped by the stopper. The detection unit receives the reference beam from the reference beam unit.

Abstract: A confocal laser scanning microscope acquires confocal images of a sample. The microscope is provided with an optical-microscope optical system which acquires non-confocal images of the sample by detecting measurement light coming from the sample. The optical-microscope optical system includes optical systems corresponding to at least two observation methods, and one of the optical systems is selected during use.

Abstract: In adjusting a microscope having at least two objectives for superimposing measuring beams of light in an object space to the end of obtaining an interference pattern and for monitoring the object space, each objective having a focal point, a focal plane and a pupil, auxiliary beams of light which are distinguishable from the measuring beams are directed into the objectives, and the auxiliary beams getting back out of the objectives are superimposed to obtain an auxiliary interference pattern. Further, the auxiliary beams getting back out of the objectives are imaged as spots.

Abstract: The invention provides a spectroscope that provides variable masks 24a and 24b that limits the light path of separated light beams in the spectrum direction and composite masks 24c and 24d that limit the same in the perpendicular direction. In addition, the invention provides a confocal scanning microscope that equipped with this spectroscope.

Abstract: A phase contrast x-ray microscope has a phase plate that is placed in proximity of and attached rigidly to the objective to form a composite optic. This enables easier initial and long-term maintenance of alignment of the microscope. In one example, they are fabricated on the same high-transmissive substrate. The use of this composite optic allows for lithographic-based alignment that will not change over the lifetime of the instrument. Also, in one configuration, the phase plate is located between the test object and the objective.