Abstract: An optical system for controlling polarization may include an illumination source to illuminate a surface of a sample, a set of collection optics to collect illumination from the surface of a sample, and a wave plate having a spatially-varying surface profile along a thickness direction positioned at a pupil plane of the set of collection optics, where the spatially-varying surface profile of the wave plate is configured to control polarization rotation as a continuous function of transverse position, and where the spatially-varying surface profile is selected to rotate light scattered from a surface of a sample to a selected polarization angle. The system may further include a linear polarizer oriented to block light with the selected polarization angle, and a sensor to detect illumination transmitted through the linear polarizer.

Abstract: A system includes a birefringent lens, and a polarization filter that transmits light of a first polarization output from the birefringent lens in a first direction and filters out light of a second polarization output from the birefringent lens along the first direction.

Abstract: An optical circulator integrated into a transceiver for bi-directional communication may include a core configured to pass a transmission signal in a transmit direction and a received signal in a receive direction. The optical circulator may include an input port optically coupled to the core. The input port may be configured to deliver the transmission signal to the core. The optical circulator may include an output port optically coupled to the core. The output port may be configured to receive the received signal from the core. The optical circulator may additionally include a network port optically coupled to the core. The network port may be configured to receive the transmission signal from the core and deliver the transmission signal to a fiber optic cable. The network port may be configured to receive the received signal from the fiber optic cable and deliver the received signal to the core.

Abstract: An illumination optical apparatus and projection exposure apparatus capable of reducing a light quantity loss when a mask is illuminated with a polarized illumination light. An illumination optical system for illuminating a reticle with an illumination light and a projection optical system for projecting the pattern image of the reticle onto a wafer are provided. An illumination light emitted from an exposure light source in a linearly polarized state in the illumination optical system passes through first and second birefringent members having different fast axis directions and is converted into a polarized state that is substantially linearly polarized in a circumferential direction with the optical axis as the center in an almost specific annular area, and them illuminates the reticle under an annular illuminating condition after passing through a fly-eye lens.

Abstract: An illumination optical apparatus and projection exposure apparatus capable of reducing a light quantity loss when a mask is illuminated with a polarized illumination light. An illumination optical system for illuminating a reticle with an illumination light and a projection optical system for projecting the pattern image of the reticle onto a wafer are provided. An illumination light emitted from an exposure light source in a linearly polarized state in the illumination optical system passes through first and second birefringent members having different fast axis directions and is converted into a polarized state that is substantially linearly polarized in a circumferential direction with the optical axis as the center in an almost specific annular area, and them illuminates the reticle under an annular illuminating condition after passing through a fly-eye lens.

Abstract: There is provided a light-guide, compact collimating optical device, including a light-guide having a light-waves entrance surface, a light-waves exit surface and a plurality of external surfaces, a light-waves reflecting surface carried by the light-guide at one of the external surfaces, two retardation plates carried by light-guides on a portion of the external surfaces, a light-waves polarizing beamsplitter disposed at an angle to one of the light-waves entrance or exit surfaces, and a light-waves collimating component covering a portion of one of the retardation plates. A system including the optical device and a substrate, is also provided.

Abstract: There is provided a light-guide, compact collimating optical device, including a light-guide having a light-waves entrance surface, a light-waves exit surface and a plurality of external surfaces, a light-waves reflecting surface carried by the light-guide at one of the external surfaces, two retardation plates carried by light-guides on a portion of the external surfaces, a light-waves polarizing beamsplitter disposed at an angle to one of the light-waves entrance or exit surfaces, and a light-waves collimating component covering a portion of one of the retardation plates. A system including the optical device and a substrate, is also provided.

Abstract: Curved polarization filters and methods of manufacturing such filters. The method includes laminating a planar polarization layer to a planar retarder layer at a predetermined orientation and bending the laminate to create a curved filter. The strain on the retarder layer results in stress-induced birefringence, and the predetermined orientation of the retarder substantially compensates for the stress-induced birefringence. In some embodiments, the predetermination is based on mathematical models. In some other embodiment, the predetermination is based on experimental data.

Abstract: An imaging lens having reduced susceptibility to thermally-induced stress birefringence for imaging an object plane to an image plane; comprising: an aperture stop positioned between the object plane and the image plane; a first group of lens elements located on the object plane side of the aperture stop; and a second group of lens elements located on the image plane side of the aperture stop; wherein the lens elements immediately adjacent to the aperture stop are fabricated using glasses having a negligible susceptibility to thermal stress birefringence as characterized by a thermal stress birefringence metric; and wherein the other lens elements in the first or second groups of lens elements are fabricated using glasses having at most a moderate susceptibility to thermal stress birefringence as characterized by the thermal stress birefringence metric.

Abstract: There is provided a light-guide, compact collimating optical device, including a light-guide having a light-waves entrance surface, a light-waves exit surface and a plurality of external surfaces, a light-waves reflecting surface carried by the light-guide at one of the external surfaces, two retardation plates carried by light-guides on a portion of the external surfaces, a light-waves polarizing beamsplitter disposed at an angle to one of the light-waves entrance or exit surfaces, and a light-waves collimating component covering a portion of one of the retardation plates. A system including the optical device and a substrate, is also provided.

Abstract: An optical system is able to achieve a substantially azimuthal polarization state in a lens aperture while suppressing loss of light quantity, based on a simple configuration. The optical system of the present invention is provided with a birefringent element for achieving a substantially circumferential distribution or a substantially radial distribution as a fast axis distribution in a lens aperture, and an optical rotator located behind the birefringent element and adapted to rotate a polarization state in the lens aperture. The birefringent element has an optically transparent member which is made of a uniaxial crystal material and a crystallographic axis of which is arranged substantially in parallel with an optical axis of the optical system. A light beam of substantially spherical waves in a substantially circular polarization state is incident to the optically transparent member.

Abstract: Disclosed herein are light collectors for use in projection applications. The light collectors gather light from surface emitting sources (e.g., LEDs) of differing color (or same color in some embodiments) using input lightpipes. A light collection system splits the light into orthogonal linear polarization states and efficiently propagates the light by use of a polarizing beamsplitter (PBS) and a reflecting element. Further, the light collection system may efficiently homogenize the light using an output lightpipe in a lightpath from the output of the PBS and the reflecting element. In addition, the light collection system may present a single, linear polarization at the output through the use of a half-wave switch (LC cell) in some embodiments or ColorSelect filter in other embodiments. The light collection system may be integrated into a single, monolithic glass, plastic or combination glass/plastic assembly.